CN103681204B - Inductivity coupled plasma mass spectrometry ion transmission system - Google Patents
Inductivity coupled plasma mass spectrometry ion transmission system Download PDFInfo
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- CN103681204B CN103681204B CN201210331400.1A CN201210331400A CN103681204B CN 103681204 B CN103681204 B CN 103681204B CN 201210331400 A CN201210331400 A CN 201210331400A CN 103681204 B CN103681204 B CN 103681204B
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- ion
- transmission system
- electric field
- deflecting electrode
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Abstract
The invention belongs to analytical technique of mass spectrum field, relate to inductivity coupled plasma mass spectrometry ion transmission system, its device of this transmission system is made up of ion sampling spiroid, intercepting cone, extraction lens, ion deflecting electrode, ion focusing lenses group, each several part center is on coaxial water horizontal line, space electric field distribution is produced under the dc voltage operation applied, ion deflects under this electric field action, focuses on and transmission；Wherein, in sample, photon and neutral particle be not by electric field action linear transmission, meets ion deflecting electrode and is blocked；Charged ion is guided by electric field action, walks around ion deflecting electrode and is focused into ion beam under the electric field action of focus lens group, is transferred to mass analyzer.Present configuration is simple, easy to use, can effectively remove photon and neutral particle enters the interference signal produced, improve ion transmission efficiency and the sensitivity of mass spectrometer.
Description
Technical field
The invention belongs to analytical technique of mass spectrum field, relate to inductivity coupled plasma mass spectrometry ion transmission system, be specifically related to a kind of inductance coupling
Close ion transport device and the method for plasma mass.
Background technology
Inductivity coupled plasma mass spectrometry technology (ICP-MS) is the analysis and testing technology that 20 century 70s develop rapidly, and its principle is
Utilize inductively coupled plasma to turn to charged ion by analyzing element ion contained in sample, by ion transmission system, charged ion is introduced
In mass analyzer, by different mass-to-charge ratioes separately, after gas current is amplified by device after testing, TT&C system process and provide analysis result.With it
Its analytical technology is compared, and described ICP-MS has that detection limit is low, range of linearity width, can detect the advantages such as various elements the most simultaneously.Along with
The expansion of range of application, ICP-MS has evolved into the analysis and testing technology of a kind of routine of this area.
Generally, inductivity coupled plasma mass spectrometry (ICP-MS) is mainly by ICP ion sampling system, interface system, ion-optical transmission
System, quality analysis detecting system form.Wherein ion-optical transmission system is the key component of ICP-MS technology, determines that ion is from instrument
Interface section, to the transmission between mass analyzer, is the important bridge between inductively coupled plasma ion gun and mass analyzer, and its performance is also
Directly determine the sensitivity of ICP-MS and detect the performance indications of the most criticals such as limit.
In ICPMS instrument, torch pipe the ICP plasma the produced sampling spiroid through interface section, intercept coning and enter ion transmission system
System arrives mass analyzer.ICP plasma ion is made up of electronics, ion, photon and neutral particle, the ion in ion transmission system
The function of lens is accelerated ion stream, be focused into ion beam exactly, is then communicated to reach mass analyzer, blocks photon and neutral grain simultaneously
Son.Owing to ion is charged particle, electric field energy makes it deflect, and photon and neutral particle not by electric field action with straightline propagation, so typically adopting
With photon baffle plate or make the mode that ion deflects off axis, ion is separated with photon, neutral particle (uncharged particle).
The ion transmission system used in the main product of ICPMS production firm at present has it specifically to design, and has respective characteristic,
Substantially can realize electric field deflection, allow charged particle separate with photon and neutral particle.Ion-optical transmission system entirety can be divided into three kinds
Type: photon Flapper type, ion axle type, 90 degree of swing out type.
Described photon baffle type refer to intercept cone and ion lens coaxially in the middle of place a sheet metal, through intercept cone photon, in
Property particle is stopped by metal baffle, and the charged cation in ICP plasma is guided by ion lens, converges after walking around photon baffle plate again,
And electronics, be blocked by ion lens electric field repulsion, neutral particle runs into baffle plate in transmitting procedure and stops transmission, and charged cation exists
Under the effect of ion lens electric field, it is focused into scattered angle little ion beam of trying one's best and walks around baffle plate and enter mass analyzer.Although the design of this structure keeps away
Exempted from the photon in ICP plasma and neutral particle be directly entered detector and caused signal to respond, but also result in simultaneously nearly 80% from
Son loss, thus cause the poor efficiency and quality discrimination that ion transmit.
Described ion axle swing out type is that ion stream is extracted lens extraction after intercepting cone, focuses on and the electric field of deflection lens through set of lenses
Effect, makes ion beam leave after optical axis passes the aperture deviateing optical axis on difference plate and enters mass analyzer, make use of neutral particle and photon not to be subject to
The characteristic that electric field action still advances along optical axis is separated with ion, and the efficiency of transmission of ion increases, and improves sensitivity, but at whole ion
On Optical System Design extremely complex so that the clean and maintenance of the parts such as ion lens becomes extremely difficult, simultaneously sample matrices can directly beat band
Form capacity effect on the ion lens of high pressure, make instrument be susceptible to drift.
Ion beam is turned to 90 degree by parabolical electric field by 90 degree of described swing out type so that the photon of ICP ion gun generation and neutron
Background noise is taken out rapidly by vacuum system, thus ensures that whole system has the highest sensitivity.The focus of 90 degree of corners is not unusual
Stable, speed and reappearance are the highest, and the ion-optic system structure of whole instrument is the most complicated so that overall maintenance and dismounting add difficulty.
In sum, ion transmission system is in the intermediate hub in sample ions source and mass analyzer, and ion gun is produced by its importance
Sample ions is transferred to mass analyzer efficiently, wherein has substantial amounts of neutral particle and photon, ion transmission system passing in ICP sample ions
The effective neutral particle removed in sample ions and photon during defeated.In view of the ion-optical of ICP-MS transmits the system analysis to instrument
The great impact of performance, each apparatus manufacture in this area, in order to increase ion transmission efficiency, eliminate photon and the neutral particle impact on instrument, carries
The sensitivity of high instrument, intends providing different ion-optic system structure.
Summary of the invention
The present invention seeks to the defect for prior art, it is provided that a kind of inductivity coupled plasma mass spectrometry ion transmission system.This transmission system
Can effectively realize the deflection path of ion, remove neutral particle and photon, the sample ions entering mass analyzer is collected and focused on simultaneously,
Mass analyzer is entered with suitable kinetic energy and angle.This transmission system and device can improve the efficiency of transmission of ion, is effectively improved ion-sensitive degree,
Its simple in construction, and easily assemble and unpick and wash.
Specifically, the invention provides a kind of inductivity coupled plasma mass spectrometry ion transmission system, it is characterised in that it mainly includes adopting
Sample cone 101, intercepting cone 102, extraction lens 103, ion deflecting electrode 104, ion focusing lenses group 105～109；By shape in ICP torch pipe
Become sample ions respectively by sampling spiroid 101, intercept cone 102, extract lens 103, ion deflecting electrode 104, ion focusing lenses group 105～
The action transport of 109 is to Mass Spectrometer Method system (mass analyzer).More specifically, different operating voltage, shape are wherein applied on all parts respectively
Becoming an effective Electric Field Distribution, ion deflects under this electric field action, focuses on and transmission；Wherein, photon and neutral particle be not by electricity
Field action and linear transmission, run into ion deflecting electrode and be blocked；Charged ion is guided by electric field action, walks around ion deflecting electrode and is focusing on thoroughly
It is focused into ion beam under the electric field action of mirror group, is transferred to mass analyzer.
The trapezoidal distribution of DC voltage that in system and device of the present invention, each parts apply, facilitates ion to transmit, can be effectively improved ion
Efficiency of transmission.
In the present invention, described sampling spiroid, intercepting cone, extraction lens, ion deflecting electrode, ion focusing lenses group switching centre are positioned at coaxial level
On line.
In the present invention, described sampling spiroid, intercepting cone, extraction lens, ion deflecting electrode, ion focusing lenses group apply different work respectively
Make voltage, form an effective Electric Field Distribution；Ion deflects under this electric field action, focuses on and transmission, and wherein, described ion is inclined
The magnitude of voltage turning the DC voltage applied on electrode is less than extraction lens DC voltage value, forms an electrical potential difference with extracting lens voltage, it is simple to from
The transmission of son.
In the present invention, after described ion deflecting electrode is placed in the ion extraction lens, between ion focusing lenses group first half；Its shape can
Think the structures such as taper, ellipse or rhombus.Ion deflecting electrode of the present invention is taper, elliptical shape or diamond structure；
The shape of described cone includes triangular pyramidal, corner taper, pentagonal pyramid shape and the taper at the most individual angle, and cone.
In the present invention, described sampling spiroid, intercepting cone make instrument be transitioned into vacuum system by atmospheric pressure, extract from ICP plasma simultaneously
Sample ions enters in mass spectrograph, and the taper ratio of its sampling spiroid intercepts the tapering of cone and wants big, and the aperture of sampling spiroid, within 2mm, intercepts cone
Aperture, within 1mm, forms an effective difference vacuum system, it is simple to the transmission of ion.
Extraction lens of the present invention are close to intercept after cone, apply corresponding DC voltage extracting, formed certain on lens
Electric field can extract sample ions, and the sample ions after being bored by intercepting is played the effect defocusing and focusing on, and is formed after the arrival of effective ion beam
Ion deflecting electrode.
In the present invention, described ion focusing lenses group its be shaped as plate shaped or cylindrical shape, be made up of two or more lens drums, respectively
Being not attached to mutually between individual lens, to remain electrically isolated from, in one embodiment of the present of invention, each lens drum in ion focusing lenses group is all with pottery
Porcelain is isolated；
In the present invention, each lens drum loads different DC voltage values, formed with extraction lens and ion deflecting electrode DC voltage value
One effective ladder electromotive force, can reach to extract, defocus and focus on the electro-ionic purpose of sample belt.
The ion transmission system of the present invention can be used in other kinds of mass spectrometer, or any ion-optical transmission system and device of analysis field
In.
In practical operation, sampling spiroid, intercepting cone, extraction lens, ion deflecting electrode, ion focusing lenses group apply respectively different
DC voltage value, forms an effective ladder electrical potential difference；The sample ions formed in ICP torch pipe is by analyte charged ion, neutral grain
Son and photon；Sample ions arrives ion deflecting electrode through sampling spiroid, intercepting cone, extraction lens, and its neutral particle and photon be not by electric field
Effect, does linear motion transmission；Ion deflecting electrode and sampling spiroid, intercept cone, extract lens on coaxial line, neutral particle and photon by from
Sub-deflecting electrode stops, it is impossible to pass through, and the charged ion of analyte is controlled by the guiding of ion lens electric field, after walking around ion deflecting electrode
Converging, the structure of ion deflecting electrode more contributes to the transmission of ion, and electronics be there would not be by ion lens electric field repulsion again, neutral grain
Son is then got rid of by vavuum pump, eliminates the photon in ICP plasma and neutral particle is directly entered detector and causes signal to respond, described from
One directed velocity is transferred to ion by sub-condenser lens, and focuses it into the ion beam entrance mass analyzer trying one's best little in scattered angle, adds ion
Efficiency of transmission, eliminate photon and neutral particle impact, reach to put forward highly sensitive purpose.
The inductivity coupled plasma mass spectrometry ion transmission system of the present invention has the advantage that
Simple in construction, easy to use, can effectively remove photon and neutral particle and enter detector and the interference signal that produces；Improve ion
Efficiency of transmission and the sensitivity of mass spectrometer.
By concrete drawings and Examples, the inductivity coupled plasma mass spectrometry ion of the present invention will be transmitted system in order to make it easy to understand, following
It is described in detail.It is important to note that instantiation and accompanying drawing are merely to explanation, it is clear that those of ordinary skill in the art is permissible
According to illustrating herein, the present invention making various correction and change within the scope of the invention, these are revised and change and also include this in
In bright scope.
Accompanying drawing explanation
Fig. 1 (a) is that ion transmits system architecture schematic diagram；
Fig. 1 (b) is that ion transmits system ion deflecting electrode pyrometric cone structural representation；
Fig. 1 (c) is that ion transmits system ion deflecting electrode quadrangular pyramid structural representation；
Fig. 1 (d) is that ion transmits system ion deflecting electrode pentagonal pyramid structural representation.
Fig. 2 is theoretical modeling result of calculation figure in ion transmission system.
Fig. 3 is that ion transmits system overall applicability structural representation.
Detailed description of the invention
Embodiment 1
As shown in Figures 1 to 3, the ion of the inductivity coupled plasma mass spectrometry of present invention transmission system and device (as shown in Figure 1), its structure by
Sampling spiroid 101, intercepting cone 102, extraction lens 103, ion deflecting electrode 104, ion focusing lenses group 105～109 composition, its ion
Deflecting electrode 104 is shaped as triangular pyramidal such as Fig. 1 (b), corner taper such as Fig. 1 (c) or pentagonal pyramid shape such as Fig. 1 (d) structure；Its 101～
109 centers, all on coaxial water horizontal line, apply DC voltage value respectively on 101～109, form an effective electric potential field, by ICP torch pipe
The sample ions of interior formation is respectively by sampling spiroid 101, intercepting cone 102, extraction lens 103, ion deflecting electrode 104, ion focusing lenses
The action transport of group 105～109 to Mass Spectrometer Method system, photon in sample ions and neutral particle in transmitting procedure by electric field action not still
Stopped along optical axis transmission by ion deflecting electrode 104；Its photon and neutral particle cannot pass ion deflecting electrode 104, thus avoid photon
The signal response interference being directly entered detector with neutral particle and cause, the analyte ion in sample ions is being guided by ion electric field
Control lower transmission, converge again after walking around ion deflecting electrode 104, under the electric field action of focus lens group 105～109, by analyte from
Son is focused into ion beam and enters in mass analyzer；According to the design of ion transmission system, theorized calculating mould by analogue
Analog model, its simulation result of calculation is as shown in Figure 2.Voltage during theory calculates according to the applying voltage method described in embodiment,
In order to preferably describe, the present embodiment is enumerated one of them instance parameter and is described whole simulation calculating process；During theoretical modeling computation modeling,
The a diameter of 1.5mm of sampling spiroid 201 taper hole, the size in intercepting cone 202 taper hole apertures are 1.1mm, extraction lens 203 diameter of bore is 1mm,
Ion deflecting electrode 204 uses triangular shaped, ion focusing lenses group 105～109 employing cylindrical shape, and internal diameter is 24mm, each focusing
Lens drum be spaced apart 2mm, sampling spiroid 201, intercept cone 202, extract lens 203, ion deflecting electrode 204, ion focusing lenses group
205～209 apply DC voltage value+40V ,+35V ,+32V ,+30V ,+30V ,+25V ,+20V ,+18V ,+15V respectively, charged
Ion acted on by electric field, along optical axis transmit, walk around ion deflecting electrode 204 converge to again ion focusing lenses group focus on the most a branch of,
It is transferred in mass analyzer, finally arrives detector.Being shown by theoretical modeling result of calculation, the ion of this ion transmission system and device passes through
Rate is more than 95%, regulates the DC voltage value on each electrode according to different mass number, forms an effective electric potential field, it is simple to from
Son transmission, improves efficiency of transmission and the stability of ion.
Claims (8)
1. an inductivity coupled plasma mass spectrometry ion transmission system, it is characterised in that by sampling spiroid (101), cut
Take cone (102), extract lens (103), ion deflecting electrode (104) and ion focusing lenses group (105)～(109)
Composition；
Described sampling spiroid, intercepting cone, extraction lens, ion deflecting electrode and ion focusing lenses group switching centre are positioned at coaxial water
On horizontal line, after ion deflecting electrode is placed in extraction lens, between ion focusing lenses group first half, extract lens and be close to
Intercepting after cone；
In described transmission system, each parts apply different operating voltage respectively, form an effective Electric Field Distribution,
Ion deflects under this electric field action, focuses on and transmits；Wherein photon and the neutral particle not straight line by electric field action
Transmission, runs into ion deflecting electrode and is blocked；Charged ion is guided by electric field action, walks around ion deflecting electrode and is focusing on
It is focused into ion beam under the electric field action of set of lenses, is transferred to mass analyzer.
2. the inductivity coupled plasma mass spectrometry ion transmission system as described in claim 1, it is characterised in that described
In system and device, the operating voltage that each parts apply is DC voltage, trapezoidal distribution.
3. the inductivity coupled plasma mass spectrometry ion transmission system as described in claim 1 or 2, it is characterised in that institute
State the DC voltage value applied on ion deflecting electrode and be less than extraction lens DC voltage value, form one with extracting lens voltage
Individual electrical potential difference.
4. as described in claim 1 inductivity coupled plasma mass spectrometry ion transmission system, it is characterised in that described from
Sub-deflecting electrode its be shaped as taper, ellipse or rhombus.
5. the inductivity coupled plasma mass spectrometry ion transmission system as described in claim 4, it is characterised in that described
Taper is triangular pyramidal, corner taper, pentagonal pyramid shape or cone.
6. the inductivity coupled plasma mass spectrometry ion transmission system as described in claim 1, it is characterised in that described
Ion focusing lenses group its be shaped as plate shaped or cylindrical shape, be made up of two or more lens drums, each lens it
Between be not attached to mutually, with pottery isolated insulation.
7. the inductivity coupled plasma mass spectrometry ion transmission system as described in claim 6, it is characterised in that Mei Getou
Load different DC voltage values on lens barrel, form one effectively with extraction lens and ion deflecting electrode DC voltage value
Ladder electromotive force.
8. the inductivity coupled plasma mass spectrometry ion transmission system described in claim 1 passes at mass spectrometer or ion-optical
Purposes in communication system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201210331400.1A CN103681204B (en) | 2012-09-08 | 2012-09-08 | Inductivity coupled plasma mass spectrometry ion transmission system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210331400.1A CN103681204B (en) | 2012-09-08 | 2012-09-08 | Inductivity coupled plasma mass spectrometry ion transmission system |
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| CN103681204B true CN103681204B (en) | 2016-09-07 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105225918B (en) * | 2014-06-13 | 2017-04-05 | 中国科学院大连化学物理研究所 | For the electrostatic lenses of flight time mass spectrum intermediate ion beam shaping |
| EP3167270B1 (en) | 2014-07-07 | 2024-03-13 | Nanotech Analysis S.R.L. | Portable electronic system for the analysis of time-variable gaseous flows |
| JP6027583B2 (en) | 2014-09-17 | 2016-11-16 | 株式会社フジクラ | Ion filter and manufacturing method thereof |
| CN105632873B (en) * | 2014-10-28 | 2018-03-27 | 中国科学院大连化学物理研究所 | One kind is used for mass spectrographic ion optical path electrostatic convergence deviation device |
| CN107221488A (en) * | 2016-03-22 | 2017-09-29 | 四川大学 | A kind of transmitting device for being used to transmit Proton-Transfer Reactions ion source |
| CN107301945B (en) * | 2016-04-14 | 2024-02-13 | 广州禾信仪器股份有限公司 | Electron bombardment source and mass spectrometer |
| CN108152358B (en) * | 2017-12-30 | 2024-02-02 | 杭州谱育科技发展有限公司 | Plasma-mass spectrometry system and working method thereof |
| CN109887827A (en) * | 2019-04-10 | 2019-06-14 | 江苏天瑞仪器股份有限公司 | A kind of progressive multistage bar ion focusing transmission device of straight line and device |
| CN112951703B (en) * | 2019-12-10 | 2023-01-03 | 中国科学院大连化学物理研究所 | Heatable VUV photoionization source |
| CN112516797B (en) * | 2020-12-01 | 2022-09-16 | 中国科学院近代物理研究所 | Electrostatic focusing and accelerating system and method for isotope separation system |
| CN113488371A (en) * | 2020-12-31 | 2021-10-08 | 杭州谱育科技发展有限公司 | Ion interface device and plasma-mass spectrometry system |
| CN113410119B (en) * | 2021-05-07 | 2022-05-20 | 广东省科学院测试分析研究所(中国广州分析测试中心) | Plasma mass spectrum ion focusing deflection sample introduction interface and working mode |
| CN114156158A (en) * | 2021-11-19 | 2022-03-08 | 中国地质科学院地质研究所 | High-efficient stable secondary ion extraction element |
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| CN85202304U (en) * | 1985-06-13 | 1986-04-02 | 南京工学院 | Auti-interference ion seperating device |
| US5637879A (en) * | 1996-03-20 | 1997-06-10 | Schueler; Bruno W. | Focused ion beam column with electrically variable blanking aperture |
| JPH10302709A (en) * | 1997-04-28 | 1998-11-13 | Jeol Ltd | Ion introducing device |
| JP2007234508A (en) * | 2006-03-03 | 2007-09-13 | Biemtron:Kk | Mass filter for ion beam and ion beam device |
| GB2446005B (en) * | 2007-01-23 | 2012-03-21 | Superion Ltd | Apparatus and method relating to removal of selected particles from a charged particle beam |
| CN102375022A (en) * | 2011-10-09 | 2012-03-14 | 北京纳***仪器有限公司 | LA-ICPMS (laser ablation inductively coupled plasma mass spectrometry) based original position statistic distribution analysis system |
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