CN103674392A - Pressure sensor - Google Patents

Pressure sensor Download PDF

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Publication number
CN103674392A
CN103674392A CN201310413924.XA CN201310413924A CN103674392A CN 103674392 A CN103674392 A CN 103674392A CN 201310413924 A CN201310413924 A CN 201310413924A CN 103674392 A CN103674392 A CN 103674392A
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China
Prior art keywords
cover
housing
pressure
flange part
mentioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201310413924.XA
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Chinese (zh)
Inventor
石川琢郎
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Saginomiya Seisakusho Inc
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Saginomiya Seisakusho Inc
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Publication of CN103674392A publication Critical patent/CN103674392A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention provides a pressure sensor. In the pressure sensor, a cover component (2) and a shell (31) of a pressure detection element (3) are fixedly connected by welding; and durability of a welding part is increased. A flange part (21) of the cover component (2) abuts against the shell of the pressure detection element. The flange part and the whole cycle out of the shell are subjected to laser welding. The laser irradiates to one side closer to a bowl-shaped part (22) than an abutting surface (21a) of the flange part and the shell. Therefore, a melting solidified layer (10) formed by the laser welding is formed in a manner the deepest top part (10a) is disposed further away from a central side of the flange part than the abutting surface of the flange part and the shell. A base metal of the flange part is resided between the melting solidified layer and the abutting surface of the flange part; and a force of the flange part being apt to leave from the shell is reduced.

Description

Pressure transducer
Technical field
The present invention relates to detect the pressure of the fluids such as cold-producing medium in freeze cycle the pressure transducer of output pressure signal.
Background technology
In the past, as this pressure transducer, there is for example disclosed technology of Fig. 6 of TOHKEMY 2005-308397 communique (patent documentation 1).The structure of this existing pressure transducer is as follows: the fluid from outside is imported to the inner space (pressure chamber) of cover (cap member) from pressure ingress pipe, the liquid of the fluid-tight chamber by diaphragm at an upper portion thereof of configuration and pressure detecting element and detect pressure by semiconductor transducer sheet.In addition, pressure detecting element and cover be by the housing of welding pressure detecting element and the peripheral part of cover and mutually fastening, and utilize riveted joint cover cylindraceous and pressure detecting element and cover is fixing integratedly.
Prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2005-308397 communique (Fig. 6)
Summary of the invention
Invent problem to be solved
In the pressure transducer of patent documentation 1, the housing of pressure detecting element and cover (cap member) utilizations are welded the installation that is fixed.Same with this existing pressure transducer, for welded case and cover, prior art is for example as Fig. 6 (A).In this existing structure, centered by cover a and housing b bearing surface each other because welding forms melting and solidification layer 20.
Therefore, there is because pressure transducer bears pressure for a long time the problem at generation of interfaces crackle of melting and solidification layer 20 and cover a and so on.In the technology of welding, the interface of known melting and solidification layer and mother metal is the most weak in intensity.In addition, as shown in Fig. 6 (B), in cover a and housing b, the cover a of weak strength is out of shape significantly because of pressurization., as shown in Fig. 6 (B) hollow core arrow, cover a is applied towards the power of leaving the direction of housing b.A part for this power, as shown in filled arrows, becomes the power of direction of delaminate and acts on respect to the interface of melting and solidification layer 20 and cover a.Therefore,, in existing pressure transducer, aspect the permanance of this welding portion, still there iing the leeway of improvement.
The present invention is the scheme proposing in order to eliminate problem points as above, and object is to provide a kind of high pressure transducer of intensity, permanance that has improved the housing of pressure detecting element and the welding portion of cover.
For solving the method for problem
The pressure transducer of scheme 1, is characterized in that, possesses: the metal cover that forms the pressure chamber of the fluid importing that is provided as pressure detection object; Metal housing with this cover butt; And be built in this housing and detect via above-mentioned pressure chamber the press detection sensor of applied pressure, utilize welding to engage with the periphery of above-mentioned housing above-mentioned cover, whole week of the abutting part of above-mentioned cover and above-mentioned housing upwards, in the mode by this cover one side partially, form the melting and solidification layer being formed by the welding of this cover and this housing.
The pressure transducer of scheme 2, according to the pressure transducer described in scheme 1, is characterized in that, above-mentioned cover and above-mentioned housing are stainless steel.
The pressure transducer of scheme 3, according to the pressure transducer described in scheme 1 or 2, is characterized in that, by laser bonding, forms above-mentioned melting and solidification layer.
Effect of the present invention is as follows.
According to the pressure transducer of scheme 1, in the pressure chamber of cover, produce the high pressure that fluid causes, on cover, effect wants to make the power that cover leaves from the housing of pressure detecting element, but the melting and solidification layer forming because of the welding of cover and housing partially by cover one side form, therefore a part for cover (mother metal) is present between melting and solidification layer and housing, in this part, a part that acts on the power of above-mentioned cover acts on the direction of pressing melting and solidification layer.Therefore, the power of wanting to peel off at the interface of melting and solidification layer and cover is lowered, and the permanance of welding portion uprises.
According to the pressure transducer of scheme 2, except the effect of scheme 1, because cover and housing are stainless steel, therefore can firmly weld.
According to the pressure transducer of scheme 3, except the effect of scheme 1 or 2, also, owing to utilizing laser bonding to form melting and solidification layer, therefore can weld with higher positional precision.
Accompanying drawing explanation
Fig. 1 is the longitudinal section of the pressure transducer of the first embodiment of the present invention.
Fig. 2 is the major part amplification view of the pressure transducer of this embodiment.
Fig. 3 is the figure of effect of the melting and solidification layer in the pressure transducer of this embodiment of explanation.
The sketch of test condition when Fig. 4 means the welded structure of more existing welded structure and embodiment and implements long duration test and the figure of test findings.
Fig. 5 is the longitudinal section of the pressure transducer of the second embodiment of the present invention.
Fig. 6 is the structure of weld part and the figure of problem points thereof in the existing pressure transducer of explanation.
In figure:
1-flare tube fitting, 2-cover, 2A-pressure chamber, 21-flange part, the bearing surface of 21a-flange part, 22-bowl-shaped part, 3-pressure detecting element, 3A-fluid-tight chamber, 31-housing, 32-semiconductor transducer sheet (press detection sensor), 4-diaphragm, 5-bucker, 10-melting and solidification layer.
Embodiment
Referring to accompanying drawing, the embodiment of pressure transducer of the present invention is described.Fig. 1 is the longitudinal section of the pressure transducer of the first embodiment, and Fig. 2 is the major part amplification view of the pressure transducer of embodiment.
This pressure transducer has: the brazen flare tube fitting 1 being connected with the pipe arrangement of the fluid have detected object of flowing; The cover 2 of stainless steel; Pressure detecting element 3; The diaphragm 4 being formed by stainless sheet steel; And the bucker 5 being formed by resin.
Cover 2 is that circular flange part 21 and bowl-shape bowl-shaped part 22 form by its periphery, and flare tube fitting 1 is by chimeric central through hole 22a that is fixed on the bowl-shaped part 22 that is formed at cover 2 such as solderings.Thus, the 2A of the pressure chamber conducting of the inner side of flare tube fitting 1 and bowl-shaped part 22.
Cover 2 and pressure detecting element 3 utilize like that and are welded and fixed installation as described later, and the assembly of this cover 2 and pressure detecting element 3 becomes under the state being covered by bucker 5 cylindraceous and passes through to fill bonding agent 65 and the fixing structure of one.
It is base portion that pressure detecting element 3 be take the circular housing 31 of stainless steel, and the semiconductor transducer sheet 32 of the conduct " press detection sensor " of detected pressures is housed in this housing 31.The fluid-tight chamber 3A forming at the inner space by pressure detecting element 3 and diaphragm 4, by the oil such as illustrated pipe filling silicon oil never, pipe is shriveled and welded, thereby this fluid-tight chamber 3A is sealed.In addition, in the central opening portion of housing 31, be installed with seal glass 33, the sealed glass 33 of terminal pin 61 and metal pedestal 34 is fixing.And semiconductor transducer sheet 32 is mounted to by pedestal 34 and is exposed in the 3A of fluid-tight chamber.
Semiconductor transducer sheet 32 and terminal pin (リ ー De ピ Application) 61 by closing line, be electrically connected to.On pressure detecting element 3, lay terminal board 62, terminal 62a and terminal pin 61 welding, terminal 62a is together with electric wire 63 solders.And, on terminal board 62, be coated with and cover shape material 64, in bucker 5, be filled with bonding agent 65.In addition, between cover 2 and diaphragm 4, be provided with the protective cover 4a of diaphragm protection use, on this protective cover 4a, be formed with the hole of passing through for fluid.In addition, diaphragm 4 and protective cover 4a are fastened on the lower surface of inner circumferential side of the housing 31 of pressure detecting element 3 by welding.
By above structure, from the fluid of flare tube fitting 1, be directed to the 2A of pressure chamber of cover 2, configuration diaphragm 4 is at an upper portion thereof pressed.The pressure that imposes on this diaphragm 4 is delivered to semiconductor transducer sheet 32 via the oil in the 3A of fluid-tight chamber.Semiconductor transducer sheet 32 converts detected pressures to electric signal by this pressure, by terminal pin 61, terminal 62a and electric wire 63, exports outside to.
Under the state of the flange part 21 of cover 2 and the lower surface butt of housing 31, the housing 31 of cover 2 and pressure detecting element 3 is welded together from outside by laser bonding., wholely in the outside of flange part 21 and housing 31 weld on circumferentially, this flange part 21 and housing 31 weld melting and solidification layer 10 joint of formation by utilizations.
When this laser bonding, Ear Mucosa Treated by He Ne Laser Irradiation, to more partially leaning on the position of the central side of flange part 21 than flange part 21 with bearing surface 21a housing 31, forms melting and solidification layer 10 partially (cover 2 sides) by flange part 21 sides.Thus, as shown in Figure 3, with the top 10a in the deep of melting and solidification layer 10, be positioned at the mode of leaving the position of distance D from above-mentioned bearing surface 21a and weld.In addition, in this embodiment, the thickness of flange part 21 is 1.5mm, and distance D is 0.1mm~0.2mm left and right.
Thus, as shown in Figure 3, in the 2A of pressure chamber that the bowl-shaped part 22 of cover 2 forms, produce the high pressure that fluid causes.By this high pressure, as shown in hollow arrow, the masterpiece of wanting to make bowl-shaped part 22 leave housing 31 is for cover 2, but a part for flange part 21 is present between the top 10a and bearing surface 21a of melting and solidification layer 10.Therefore, in this part, act on the part of power for cover 2 as shown in filled arrows, act on the direction of pressing flange part 21 to melting and solidification layer 10.Therefore, reduced the power of wanting to peel off at melting and solidification layer 10 and the interface of cover 2, the permanance of welding portion uprises.
Fig. 4 (A) and (B) mean the sketch of the test condition when welded structure of the existing welded structure shown in Fig. 6 (A) and embodiment is compared and investigate being related to of pressure-displacement, Fig. 4 (A) represents the structure of the formation melting and solidification layer 20 corresponding with conventional example, and Fig. 4 (B) represents the structure of the formation melting and solidification layer 10 corresponding with embodiment.In these trials, replace pressure detecting element (housing) and use stainless steel (SUS) plate, from flare tube fitting, exert pressure and with displacement meter, measure the displacement of corrosion resistant plate.In addition, the thickness of cover is 1.5mm, and the thickness of corrosion resistant plate is 6.7mm, and weld width is 0.8mm, and the depth of weld is 0.6mm, and the distance D of Fig. 4 (B) situation is 0.2mm.
As shown in Fig. 4 (C), when applying the pressure of 5MPa, the movement of the displacement that the trial target of the structure of embodiment and the trial target of existing structure cause because exerting pressure is identical, but in existing structure, produce plastic yield, in the structure of embodiment, not produce this point of plastic yield different., in existing structure, produce plastic yield, exist at welding portion and produce the possibility of floating, but do not produce plastic yield in the structure of embodiment, therefore at welding portion, can not produce and float.
Fig. 5 is the longitudinal section of the pressure transducer of the second embodiment.In Fig. 5, for the parts identical with Fig. 1, mark same-sign and omit detailed explanation.This pressure transducer connects inflow pipe 71 at the through hole 22a of cover 2, is imported into the 2A of pressure chamber of cover 2 from the fluid of this inflow pipe 71.In addition, cover 2 and pressure detecting element 3 utilizes welding fastening, become state to be covered by bucker 72 by filling bonding agent 73 fixing structure integratedly.
Identical with the first embodiment, cover 2 is stainless steel, flange part 21 and bowl-shaped part 22, consists of.In addition, pressure detecting element 3 has the housing 31 of stainless steel and is built in the semiconductor transducer sheet 32 of housing 31.In the fluid-tight chamber 3A forming at the diaphragm 4 consisting of housing 31 and stainless sheet steel, be filled with the oil such as silicone oil, semiconductor transducer sheet 32 is mounted to and exposes in the 3A of fluid-tight chamber.And semiconductor transducer sheet 32 converts detected pressures to electric signal, this electric signal outputs to outside via terminal pin 73, substrate 74 and electric wire 75.
In this second embodiment, at the flange part 21 by cover 2 and housing 31, clamp under the state of diaphragm 4, utilize laser bonding to weld from outside., wholely in the outside of flange part 21, diaphragm 4 and housing 31 weld on circumferentially, this flange part 21, diaphragm 4 and housing 31 utilize the melting and solidification layer 10 forming by welding to be bonded together.
When this laser bonding, Ear Mucosa Treated by He Ne Laser Irradiation leans on the position of the central side of flange part 21 more partially to the bearing surface 21a of ratio housing 31 sides of flange part 21, and melting and solidification layer 10 is formed by flange part 21 sides partially (cover 2 sides).Thus, the top 10a in the deep of melting and solidification layer 10 forms to be positioned at the mode of the position that (cover 2 sides) are left from bearing surface 21a to flange part 21 sides.Therefore, identical with the first embodiment, reduced the power of wanting to peel off at the interface of melting and solidification layer 10 and cover 2, the permanance of welding portion uprises.
In embodiment, cover and housing are stainless steel, therefore can realize reliable welding, but as long as this cover and the housing metal for being welded to each other.
In addition, in embodiment, utilize laser bonding to weld, but also can utilize Plasma Welding etc. to weld.

Claims (3)

1. a pressure transducer, is characterized in that, possesses:
Form the metal cover of the pressure chamber of the fluid importing that is provided as pressure detection object;
Metal housing with this cover butt; And
Be built in this housing and detect via above-mentioned pressure chamber the press detection sensor of applied pressure,
Utilize welding to engage with the periphery of above-mentioned housing above-mentioned cover,
Whole week of the abutting part of above-mentioned cover and above-mentioned housing upwards, in the mode by this cover one side partially, form the melting and solidification layer being formed by the welding of this cover and this housing.
2. pressure transducer according to claim 1, is characterized in that,
Above-mentioned cover and above-mentioned housing are stainless steel.
3. pressure transducer according to claim 1 and 2, is characterized in that,
By laser bonding, form above-mentioned melting and solidification layer.
CN201310413924.XA 2012-09-12 2013-09-12 Pressure sensor Pending CN103674392A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012200269A JP2014055826A (en) 2012-09-12 2012-09-12 Pressure sensor
JP2012-200269 2012-09-12

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CN103674392A true CN103674392A (en) 2014-03-26

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KR (1) KR20140034692A (en)
CN (1) CN103674392A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107024315A (en) * 2016-01-29 2017-08-08 株式会社鹭宫制作所 Refrigerant loop component parts
CN107024320A (en) * 2016-01-29 2017-08-08 株式会社鹭宫制作所 Refrigerant loop component parts
CN110319969A (en) * 2018-03-29 2019-10-11 株式会社鹭宫制作所 Pressure sensor
CN110494729A (en) * 2017-04-07 2019-11-22 株式会社鹭宫制作所 Pressure sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102623221B1 (en) * 2021-12-16 2024-01-10 대양전기공업 주식회사 Pressure sensor unit

Citations (8)

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Publication number Priority date Publication date Assignee Title
CN87104155A (en) * 1987-06-09 1987-11-18 上海第三纺织机械厂 Diaphragm type High Temperature High Pressure flow media pressure transducer
JPH07128170A (en) * 1993-11-05 1995-05-19 Fuji Electric Co Ltd Differential pressure detector
CN2234612Y (en) * 1995-08-29 1996-09-04 李育森 Pressure transducer
CN2398624Y (en) * 1999-10-25 2000-09-27 钟荣融 Fluid-power pressure sensor
JP2002292485A (en) * 2001-03-29 2002-10-08 Saginomiya Seisakusho Inc Method for welding process component
CN1650155A (en) * 2002-05-06 2005-08-03 罗斯蒙德公司 Barometric pressure sensor
US20120079884A1 (en) * 2010-10-05 2012-04-05 Rosemount Inc. Industrial process transmitter with high static pressure isolation diaphragm coupling
JP5542638B2 (en) * 2010-12-03 2014-07-09 株式会社不二工機 Pressure detector

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN87104155A (en) * 1987-06-09 1987-11-18 上海第三纺织机械厂 Diaphragm type High Temperature High Pressure flow media pressure transducer
JPH07128170A (en) * 1993-11-05 1995-05-19 Fuji Electric Co Ltd Differential pressure detector
CN2234612Y (en) * 1995-08-29 1996-09-04 李育森 Pressure transducer
CN2398624Y (en) * 1999-10-25 2000-09-27 钟荣融 Fluid-power pressure sensor
JP2002292485A (en) * 2001-03-29 2002-10-08 Saginomiya Seisakusho Inc Method for welding process component
CN1650155A (en) * 2002-05-06 2005-08-03 罗斯蒙德公司 Barometric pressure sensor
US20120079884A1 (en) * 2010-10-05 2012-04-05 Rosemount Inc. Industrial process transmitter with high static pressure isolation diaphragm coupling
JP5542638B2 (en) * 2010-12-03 2014-07-09 株式会社不二工機 Pressure detector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107024315A (en) * 2016-01-29 2017-08-08 株式会社鹭宫制作所 Refrigerant loop component parts
CN107024320A (en) * 2016-01-29 2017-08-08 株式会社鹭宫制作所 Refrigerant loop component parts
CN110494729A (en) * 2017-04-07 2019-11-22 株式会社鹭宫制作所 Pressure sensor
CN110494729B (en) * 2017-04-07 2023-12-05 株式会社鹭宫制作所 Pressure Sensor
CN110319969A (en) * 2018-03-29 2019-10-11 株式会社鹭宫制作所 Pressure sensor

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KR20140034692A (en) 2014-03-20
JP2014055826A (en) 2014-03-27

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Application publication date: 20140326