CN103673888B - 光学式位移计及光学式位移运算方法 - Google Patents

光学式位移计及光学式位移运算方法 Download PDF

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Publication number
CN103673888B
CN103673888B CN201310375884.4A CN201310375884A CN103673888B CN 103673888 B CN103673888 B CN 103673888B CN 201310375884 A CN201310375884 A CN 201310375884A CN 103673888 B CN103673888 B CN 103673888B
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aforementioned
light
sample
optical
separation unit
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CN103673888A (zh
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千田直道
和田健郎
和田健一郎
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Yokogawa Electric Corp
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  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
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CN201310375884.4A 2012-08-28 2013-08-26 光学式位移计及光学式位移运算方法 Active CN103673888B (zh)

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JP2012187670A JP5674050B2 (ja) 2012-08-28 2012-08-28 光学式変位計
JP2012-187670 2012-08-28

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CN103673888B true CN103673888B (zh) 2016-09-07

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Families Citing this family (8)

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Publication number Priority date Publication date Assignee Title
US10495446B2 (en) * 2015-06-29 2019-12-03 Kla-Tencor Corporation Methods and apparatus for measuring height on a semiconductor wafer
DE112016005953T5 (de) * 2015-12-25 2018-10-04 Keyence Corporation Konfokaler verschiebungssensor
JP6493265B2 (ja) 2016-03-24 2019-04-03 オムロン株式会社 光学計測装置
JP2018124167A (ja) * 2017-01-31 2018-08-09 オムロン株式会社 傾斜測定装置
CN109163662A (zh) * 2018-08-31 2019-01-08 天津大学 基于波长扫描的光谱共焦位移测量方法及装置
CN110308152B (zh) * 2019-07-26 2020-04-07 上海御微半导体技术有限公司 一种光学检测装置和光学检测方法
CN113741019B (zh) * 2021-08-23 2024-07-02 余姚市朗森光学科技有限公司 一种色差对焦模块、***及方法
CN115077391A (zh) * 2022-03-25 2022-09-20 上海洛丁森工业自动化设备有限公司 微位移传感器及位移测量方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1550754A (zh) * 2003-03-20 2004-12-01 株式会社其恩斯 位移计和位移测定方法
EP1577639A1 (en) * 2004-03-18 2005-09-21 Mitutoyo Corporation Optical axial displacement sensor
CN102313519A (zh) * 2010-06-17 2012-01-11 株式会社森精机制作所 位移检测装置

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JPS63149513A (ja) * 1986-12-12 1988-06-22 Sankyo Seiki Mfg Co Ltd 光学式変位計測方法
JPH109827A (ja) * 1996-06-24 1998-01-16 Omron Corp 高さ判別装置および方法
JP2005221451A (ja) * 2004-02-09 2005-08-18 Mitsutoyo Corp レーザ変位計
JP2009236655A (ja) * 2008-03-27 2009-10-15 Nikon Corp 変位検出装置、露光装置、およびデバイス製造方法
JP5520036B2 (ja) * 2009-07-16 2014-06-11 株式会社ミツトヨ 光学式変位計
JP2011237272A (ja) * 2010-05-10 2011-11-24 Seiko Epson Corp 光距離計及び距離測定方法
US20110286006A1 (en) * 2010-05-19 2011-11-24 Mitutoyo Corporation Chromatic confocal point sensor aperture configuration
JP5248551B2 (ja) * 2010-06-17 2013-07-31 株式会社東芝 高さ検出装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1550754A (zh) * 2003-03-20 2004-12-01 株式会社其恩斯 位移计和位移测定方法
EP1577639A1 (en) * 2004-03-18 2005-09-21 Mitutoyo Corporation Optical axial displacement sensor
CN102313519A (zh) * 2010-06-17 2012-01-11 株式会社森精机制作所 位移检测装置

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JP2014044161A (ja) 2014-03-13
MY167829A (en) 2018-09-26
CN103673888A (zh) 2014-03-26
JP5674050B2 (ja) 2015-02-18

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