CN103673888B - 光学式位移计及光学式位移运算方法 - Google Patents
光学式位移计及光学式位移运算方法 Download PDFInfo
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- CN103673888B CN103673888B CN201310375884.4A CN201310375884A CN103673888B CN 103673888 B CN103673888 B CN 103673888B CN 201310375884 A CN201310375884 A CN 201310375884A CN 103673888 B CN103673888 B CN 103673888B
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012187670A JP5674050B2 (ja) | 2012-08-28 | 2012-08-28 | 光学式変位計 |
JP2012-187670 | 2012-08-28 |
Publications (2)
Publication Number | Publication Date |
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CN103673888A CN103673888A (zh) | 2014-03-26 |
CN103673888B true CN103673888B (zh) | 2016-09-07 |
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Application Number | Title | Priority Date | Filing Date |
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CN201310375884.4A Active CN103673888B (zh) | 2012-08-28 | 2013-08-26 | 光学式位移计及光学式位移运算方法 |
Country Status (3)
Country | Link |
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JP (1) | JP5674050B2 (ja) |
CN (1) | CN103673888B (ja) |
MY (1) | MY167829A (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10495446B2 (en) * | 2015-06-29 | 2019-12-03 | Kla-Tencor Corporation | Methods and apparatus for measuring height on a semiconductor wafer |
DE112016005953T5 (de) * | 2015-12-25 | 2018-10-04 | Keyence Corporation | Konfokaler verschiebungssensor |
JP6493265B2 (ja) | 2016-03-24 | 2019-04-03 | オムロン株式会社 | 光学計測装置 |
JP2018124167A (ja) * | 2017-01-31 | 2018-08-09 | オムロン株式会社 | 傾斜測定装置 |
CN109163662A (zh) * | 2018-08-31 | 2019-01-08 | 天津大学 | 基于波长扫描的光谱共焦位移测量方法及装置 |
CN110308152B (zh) * | 2019-07-26 | 2020-04-07 | 上海御微半导体技术有限公司 | 一种光学检测装置和光学检测方法 |
CN113741019B (zh) * | 2021-08-23 | 2024-07-02 | 余姚市朗森光学科技有限公司 | 一种色差对焦模块、***及方法 |
CN115077391A (zh) * | 2022-03-25 | 2022-09-20 | 上海洛丁森工业自动化设备有限公司 | 微位移传感器及位移测量方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1550754A (zh) * | 2003-03-20 | 2004-12-01 | 株式会社其恩斯 | 位移计和位移测定方法 |
EP1577639A1 (en) * | 2004-03-18 | 2005-09-21 | Mitutoyo Corporation | Optical axial displacement sensor |
CN102313519A (zh) * | 2010-06-17 | 2012-01-11 | 株式会社森精机制作所 | 位移检测装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63149513A (ja) * | 1986-12-12 | 1988-06-22 | Sankyo Seiki Mfg Co Ltd | 光学式変位計測方法 |
JPH109827A (ja) * | 1996-06-24 | 1998-01-16 | Omron Corp | 高さ判別装置および方法 |
JP2005221451A (ja) * | 2004-02-09 | 2005-08-18 | Mitsutoyo Corp | レーザ変位計 |
JP2009236655A (ja) * | 2008-03-27 | 2009-10-15 | Nikon Corp | 変位検出装置、露光装置、およびデバイス製造方法 |
JP5520036B2 (ja) * | 2009-07-16 | 2014-06-11 | 株式会社ミツトヨ | 光学式変位計 |
JP2011237272A (ja) * | 2010-05-10 | 2011-11-24 | Seiko Epson Corp | 光距離計及び距離測定方法 |
US20110286006A1 (en) * | 2010-05-19 | 2011-11-24 | Mitutoyo Corporation | Chromatic confocal point sensor aperture configuration |
JP5248551B2 (ja) * | 2010-06-17 | 2013-07-31 | 株式会社東芝 | 高さ検出装置 |
-
2012
- 2012-08-28 JP JP2012187670A patent/JP5674050B2/ja active Active
-
2013
- 2013-08-26 CN CN201310375884.4A patent/CN103673888B/zh active Active
- 2013-08-26 MY MYPI2013003139A patent/MY167829A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1550754A (zh) * | 2003-03-20 | 2004-12-01 | 株式会社其恩斯 | 位移计和位移测定方法 |
EP1577639A1 (en) * | 2004-03-18 | 2005-09-21 | Mitutoyo Corporation | Optical axial displacement sensor |
CN102313519A (zh) * | 2010-06-17 | 2012-01-11 | 株式会社森精机制作所 | 位移检测装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2014044161A (ja) | 2014-03-13 |
MY167829A (en) | 2018-09-26 |
CN103673888A (zh) | 2014-03-26 |
JP5674050B2 (ja) | 2015-02-18 |
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