CN103671014B - Adopt opposed type moving-coil linear compressor and the manufacture method of short-coil radial magnetization - Google Patents

Adopt opposed type moving-coil linear compressor and the manufacture method of short-coil radial magnetization Download PDF

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CN103671014B
CN103671014B CN201310591008.5A CN201310591008A CN103671014B CN 103671014 B CN103671014 B CN 103671014B CN 201310591008 A CN201310591008 A CN 201310591008A CN 103671014 B CN103671014 B CN 103671014B
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left part
right part
yoke
coil
piston
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CN103671014A (en
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党海政
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Shanghai Platinum Indigo Refrigeration Technology Co ltd
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Shanghai Institute of Technical Physics of CAS
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Abstract

The invention discloses a kind of the opposed type moving-coil linear compressor and the manufacture method that adopt short-coil radial magnetization, overall structure adopts opposed type to offset the two-part mechanical vibration in left and right, left part and right part, except shared support, form by respective cylinder liner, permanent magnet, upper yoke, lower yoke, current-carrying coil, coil rack, piston, upper plate spring groups, lower plate spring groups, upper tabletting structure, lower sheeting structure, upper support structure, lower support structure, displacement transducer iron core, displacement transducer coil, displacement transducer support, casing; Permanent magnet radial magnetizing, current-carrying coil adopts short coil; The upper yoke of left part and right part, piston and current-carrying coil all need the axial thickness bottom satisfied respective lower yoke to be greater than the axial height of respective current-carrying coil and the range sum of respective piston.Compact structure of the present invention, vibrate low, electric efficiency is high, expected life is long, significant to the development of highly reliable, long lifetime, high efficiency linear compressor.

Description

Adopt opposed type moving-coil linear compressor and the manufacture method of short-coil radial magnetization
Technical field
The present invention relates to linear compressor, particularly a kind of opposed type moving-coil linear compressor and manufacture method thereof adopting short-coil radial magnetization.
Background technique
Linear compressor is the one of reciprocating-piston compressor.Traditional reciprocating-piston compressor belongs to rotary compressor mostly, namely adopts electric rotating machine to drive, realize to-and-fro motion by the mechanical transmission of connecting rod etc.The technology of rotary compressor is comparatively ripe, but its energy transferring link is many, vibration & noise large, complete machine controls complexity, energy conversion efficiency is on the low side, particularly because of structural feature to piston apply lateral force, be one of main source producing idle work and mechanical wear, thus greatly limit its operating life.Linear compressor utilizes linear electric motor driven plunger to do reciprocating linear motion in the cylinder, completely eliminate the radial forces to piston in theory, thus the mechanical wear between piston and cylinder wall and consequent idle work is eliminated, operating life and energy conversion efficiency improve all greatly, so have very important application at special dimensions such as needing the Aeronautics and Astronautics of long lifetime and efficiency operation, military affairs.
The core component of linear compressor is linear electric motor.Linear electric motor are mainly divided three classes according to moving element wherein: moving-iron type, moving coil and moving-magnetic type.Moving-iron type linear motor does not use permanent magnet, and thus price is cheaper, but performance is relatively unstable, controls more difficult, and its application reduces gradually; Moving coil and moving-magnetic type linear motor all comprise three class core components: permanent magnet, yoke and current-carrying coil, according to motion time be current-carrying coil or permanent magnet motion and divide into moving coil and moving-magnetic type.Wherein, moving coil linear compressor achieves the elimination completely of radial force because of its structural feature, and on current-carrying coil, do not produce axial force and moment of torsion when opening a way, thus there is high efficiency, low noise and highly reliable outstanding advantages, thus become the first-selected power source of space regenerating type low-temperature refrigerator (as pulse tube refrigerating machine and sterlin refrigerator) in international coverage over nearly 30 years.Take the U.S. as the western developed country of representative be example, in the space flight pulse tube refrigerating machine launched between nearly 20 years and sterlin refrigerator, the overwhelming majority have employed moving coil linear compressor.
At present, be applied to space industry in the world to need to ensure that long lifetime, moving coil linear compressor that is highly reliable, efficiency operation mainly adopt Oxford type and opposed type structural type.So-called Oxford type, it is gained the name and comes from two key technologies of Regius professor---and clearance seal and leaf spring support, the critical support that these two technology are oil-free lubrication and can operate the long lifetime; So-called opposed type structural type, refer to that in agent structure, adopt two complete equities motion and supporting structure are to the mechanical vibration self produced of cancelling out each other, this technology is the reliable guarantee realizing the low vibration of linear compressor.
As previously mentioned, dynamic coil linear motor comprises three class core components: permanent magnet, yoke and current-carrying coil.During work, current-carrying coil is in the air gap that permanent magnet and yoke are formed jointly, and magnetic field force induced effect becomes reciprocal straight line motion.According to the length of current-carrying coil and the magnetizing direction of permanent magnet, dynamic coil linear motor can be divided into four kinds, Fig. 1 gives the schematic diagram of these four kinds of forms, and wherein (1) is long loop axial charging form, (2) be short coil axial charging form, (3) be long-coil radial magnetization form, (4) are short-coil radial magnetization form, and wherein 63 is permanent magnet, 64 is upper yoke, 65 is lower yoke, and 66 is current-carrying coil, through hole centered by 67.
The kind of the linear electric motor that moving coil linear compressor adopts according to it, also four kinds of forms are correspondingly divided into, that is: the moving coil linear compressor adopting the moving coil linear compressor of long loop axial charging, adopt the moving coil linear compressor of short coil axial charging, adopt the moving coil linear compressor of long-coil radial magnetization, adopt short-coil radial magnetization.It is any no matter moving coil linear compressor adopts in above-mentioned four kinds of forms, if guarantee its energy stable operation, all must follow following basic principle: (1) or be in whole piston stroke, ensure that steady magnetic field is in (corresponding to long loop form) within current-carrying coil all the time; (2) or be in whole piston stroke, ensure that current-carrying coil is in (corresponding to short coil form) within stable magnetic field all the time.The moving coil linear compressor development at home of these four kinds of forms is all at the early-stage at present.
Summary of the invention
The present invention proposes a kind of the opposed type moving-coil linear compressor and the manufacture method thereof that adopt short-coil radial magnetization.
The opposed type moving-coil linear compressor of the employing short-coil radial magnetization invented is by sharing support 0, left part cylinder liner 1, left part permanent magnet 2, yoke 3 on left part, left part lower yoke 4, left part current-carrying coil 5, left part coil rack 6, left part piston 7, plate spring groups 8 on left part, plate spring groups 9 under left part, tabletting structure 10 on left part, left part lower sheeting structure 11, left part upper support structure 12, left part lower support structure 13, left part displacement transducer iron core 14, left part displacement transducer coil 15, left part displacement transducer supports 16, left part casing 17 and right part cylinder liner 1 ', right part permanent magnet 2 ', yoke 3 ' on right part, right part lower yoke 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', plate spring groups 8 ' on right part, plate spring groups 9 ' under right part, tabletting structure 10 ' on right part, right part lower sheeting structure 11 ', right part upper support structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement transducer coil 15 ', right part displacement transducer supports 16 ', right part casing 17 ' forms jointly, it is characterized in that, overall structure adopts opposed type to offset the mechanical vibration of left and right two-part generation, namely with vertical center line 40 for symmetry axis, all parts of left part and structural configuration and right part corresponding part and structural configuration enantiotropy each other, horizontal axis 50 is indicated is axial direction, share support 0 to be made up of left part cylinder 41, right part cylinder 41 ' and shared air outlet hole 42, left part cylinder liner 1 interference fit is embedded in the inside of left part cylinder 41, and right part cylinder liner 1 ' interference fit is embedded in the inside of right part cylinder 41 ', left part permanent magnet 2 is cylinder-like structure, and central position is processed with left part magnet inner via hole 43 vertically, on left part, yoke 3 is cylinder-like structure, and its central position is processed with yoke inner via hole 44 on left part that diameter is d vertically, and on left part, the external diameter of yoke 3 is less than the diameter of left part magnet inner via hole 43 2.0 ~ 3.0 μm, left part lower yoke 4 is U-shaped structure, larger than the external diameter of left part permanent magnet 2 2.0 ~ 3.0 μm of the internal diameter of U-shaped body, central position bottom U-shaped body is processed with left part lower yoke inner via hole 45 vertically, and the diameter of left part lower yoke inner via hole 45 is greater than the external diameter of yoke 3 on left part, left part permanent magnet 2 radially magnetizes to saturated, on left part, yoke 3 inserts left part magnet inner via hole 43 inside afterwards, yoke 3 on left part permanent magnet 2 and left part wraps up wherein by left part lower yoke 4, on left part, yoke left side 18 flushes with left part lower yoke left side 19, and on left part, yoke right side 20, left part permanent magnet right side 22 and left part lower yoke right side 27 three flush, left part permanent magnet inner ring surface 21 is close together with yoke outer ring surface 67 on left part, and left part magnet outer surface 68 and left part lower yoke inner ring surface 23 are close together, on left part permanent magnet 2, left part, yoke 3, left part lower yoke 4 form left part ring-type air gap 46 jointly, left part current-carrying coil 5 inserts in left part ring-type air gap 46 with one heart, on right part permanent magnet 2 ', right part, yoke 3 ', right part lower yoke 4 ' form right part ring-type air gap 46 ' jointly, and right part current-carrying coil 5 ' inserts in right part ring-type air gap 46 ' with one heart, left part current-carrying coil 5 is h with the axial height of right part current-carrying coil 5 ', range when left part piston 7 and right part piston 7 ' work is s, left part lower yoke 4 is δ with the axial thickness of right part lower yoke 4 ' bottom, and meets relation: δ > s+h, to ensure in whole piston stroke, guarantees that current-carrying coil is within stable magnetic field all the time, upper left supports right end face 24 is supported on left part lower yoke left side 19, and the two is by screw fastening, and upper annular plane 25 is processed in the left side of left part upper support structure 12, lower-left supports right end face 47 is supported on shared support left surface 48, and the two welds together, lower-left supports left front side 26 and is supported on left part lower yoke right side 27, and the two is by screw fastening, and the lower left side of left part lower support structure 13 is processed into lower ring plain 28, on left part, plate spring groups 8 is formed by stacking by some single piece plate spring thin slices, upper left group outer rim 29 is formed in outer rim, in group inner edge, formation upper left, inner edge 30, the upper left group spring body center hole 31 that diameter is d is processed with vertically in center portion, wherein upper left group outer rim 29 is positioned on the upper annular plane 25 of left part upper support structure 12, and passes through screw fastening, under left part, plate spring groups 9 is formed by stacking by some single piece plate spring thin slices, lower-left group outer rim 32 is formed in outer rim, in group inner edge, formation lower-left, inner edge 33, the lower-left group spring body center hole 34 that diameter is d is processed with vertically in center portion, wherein lower-left group outer rim 32 is positioned on the lower ring plain 28 of left part lower support structure 13, and passes through screw fastening, left part piston 7 is made up of left part piston head 35, left part piston middle transition platform 36 and left part piston rod 37, the left bar thread section 49 of long 1 ~ 3mm is processed with at the end of left part piston rod 37, the external diameter of left part piston head 35 is little 10 ~ 30 μm than the internal diameter of left part cylinder 41, ensures that the diameter of left part piston rod 37 is less than d simultaneously, left part piston rod 37 runs through yoke inner via hole 44 on lower-left group spring body center hole 34, left part lower yoke inner via hole 45, left part, upper left group spring body center hole 31 successively, on left part, group inner edge, upper left 30 and left part coil rack 6 tighten together with left part piston rod 37 by tabletting structure 10, group inner edge, lower-left 33 tightens together with left part piston middle transition platform 36 by left part lower sheeting structure 11, thus ensure left part current-carrying coil 5, left part coil rack 6 is connected with plate spring groups 9 under plate spring groups 8, left part on left part piston 7, left part is the entirety that can simultaneously move, left part displacement transducer iron core 14 inside is processed with the left iron core thread section 51 matched with left bar thread section 49, and it is interior and fastening that left bar thread section 49 screws in left iron core thread section 51, arrange outside left part displacement transducer iron core 14 and supports the 16 left part displacement transducer coils 15 tightened together with left part displacement transducer, left part displacement transducer support 16 and then to be supported on left part upper support structure 12 also tightens together with it, left part casing 17 is welded and fixed by left part casing exterior edge face 61 and support exterior edge face, lower-left 52, thus form left part airtight cavity, by left part cylinder liner 1, left part permanent magnet 2, yoke 3 on left part, left part lower yoke 4, left part current-carrying coil 5, left part coil rack 6, left part piston 7, plate spring groups 8 on left part, plate spring groups 9 under left part, tabletting structure 10 on left part, left part lower sheeting structure 11, left part upper support structure 12, left part lower support structure 13, left part displacement transducer iron core 14, left part displacement transducer coil 15, left part displacement transducer supports 16, left part casing 17 all covers in wherein, the all parts of right part and structural configuration are left part corresponding part and the structural configuration enantiotropies about vertical center line 40, right part casing 17 ' is welded and fixed by right part casing exterior edge face 61 ' and support exterior edge face, bottom right 52 ', form right part airtight cavity, by right part cylinder liner 1 ', right part permanent magnet 2 ', yoke 3 ' on right part, right part lower yoke 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', plate spring groups 8 ' on right part, plate spring groups 9 ' under right part, tabletting structure 10 ' on right part, right part lower sheeting structure 11 ', right part upper support structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement transducer coil 15 ', right part displacement transducer supports 16 ', right part casing 17 ' all covers in wherein, thus form a kind of opposed type moving-coil linear compressor adopting short-coil radial magnetization.
Be described as follows below in conjunction with the manufacture method of accompanying drawing to the opposed type moving-coil linear compressor of invented employing short-coil radial magnetization:
The section plan of the opposed type moving-coil linear compressor that Fig. 2 is invented employing short-coil radial magnetization; With vertical center line 40 for symmetry axis and all parts of the left part of enantiotropy and right part corresponding part need adopt the same batch of part produced to make the minimize variability between individuality each other;
Fig. 3 is the three-dimensional cutaway view of shared support 0; Sharing support 0 adopts the titanium alloy material that mechanical strength is high, thermal expansion coefficient is little to make, adopt five-axis machine tool to process left part cylinder 41 and right part cylinder 41 ' simultaneously, ensure that left part cylinder 41 and right part cylinder 41 ' are about vertical center line 40 symmetry, and ensure that the coaxality of left part cylinder 41 and right part cylinder 41 ' is better than 1.0 μm, ensure that the endoporus circularity of above-mentioned two cylinders is all better than 0.5 μm simultaneously; After left part cylinder 41 and right part cylinder 41 ' completion of processing, use same five-axis machine tool to process shared air outlet hole 42, ensure that sharing air outlet hole 42 is all better than 2.0 μm with the perpendicularity of left part cylinder 41 and right part cylinder 41 ';
Fig. 4 is the three-dimensional cutaway view (for the parts of left and right enantiotropy each other, generally only provide the detailed maps of left part in accompanying drawing, and left part and right part parts are together described by manufacturer's rule, lower with) of left part cylinder liner 1; the die steel material that left part cylinder liner 1 and right part cylinder liner 1 ' all adopt hardness to be greater than 58 uses the method for low-speed WEDM to be processed into cylindrical shape, the external diameter ensureing left part cylinder liner 1 and right part cylinder liner 1 ' is 0.5 ~ 1.0mm larger than the internal diameter of left part cylinder 41 and right part cylinder 41 ' respectively, then interference fit is adopted to be inlaid in left part cylinder 41 and right part cylinder 41 ' respectively with the mode of expanding with heat and contract with cold, concrete method for embedding is as follows: shared support 0 entirety being as shown in Figure 3 positioned over inside temperature is homogeneous heating 4 ~ 6 hours in the heated at constant temperature case of 160 DEG C, before shared support 0 takes out heated at constant temperature case 5 ~ 10 minutes, left part cylinder liner 1 and right part cylinder liner 1 ' are positioned in liquid nitrogen simultaneously and soak, while shared support 0 takes out from heated at constant temperature case, left part cylinder liner 1 and right part cylinder liner 1 ' are taken out from liquid nitrogen, then mechanical external force is used left part cylinder liner 1 and right part cylinder liner 1 ' to be pushed respectively left part cylinder 41 and right part cylinder 41 ' inside, thus ensure that the outer wall of left part cylinder liner 1 and right part cylinder liner 1 ' is combined closely with the inwall of left part cylinder 41 and right part cylinder 41 ' respectively, then use the endoporus of jig grinding machine to left part cylinder liner 1 and right part cylinder liner 1 ' to carry out fine gtinding, ensure that its endoporus circularity is all better than 0.5 μm,
Fig. 5 is the section plan of left part piston 7; Left part piston 7 and right part piston 7 ' all adopt the titanium alloy material that mechanical strength is high, thermal expansion coefficient is little to make, first numerical control machine tool is adopted to process blank, then jig grinding machine is adopted to carry out fine gtinding, ensure that the circularity of left part piston head 35 and right part piston head 35 ' is all better than 0.5 μm, and ensure left part piston rod 37 and right part piston rod 37 ' vertically beat lower than 3.0 μm, and left part piston rod 37 is better than 1.0 μm with the perpendicularity of left part piston head 35, right part piston rod 37 ' is better than 1.0 μm with the perpendicularity of right part piston head 35 '; Precise numerical control machine is used to process left bar thread section 49 and right bar thread section 49 ' respectively at the end of left part piston rod 37 and right part piston rod 37 '; Range when left part piston 7 and the work of right part piston 7 ' is all designed to s, ensures that stroke accuracy is better than 2.0 μm by limit structure;
Fig. 6 is the combination schematic diagram of plate spring groups 8 and tabletting structure 10 on left part on left part, and Fig. 7 is the combination schematic diagram of plate spring groups 9 and left part lower sheeting structure 11 under left part; Tabletting structure 10 ' on tabletting structure 10, left part lower sheeting structure 11 and right part on left part, the metallic material that right part lower sheeting structure 11 ' is higher by mechanical strength, remanent magnetism is lower adopt numerical control machine tool processing and fabricating to form, and machining accuracy is all better than 9.0 μm; On left part under plate spring groups 8, left part on plate spring groups 9 and right part under plate spring groups 8 ', right part plate spring groups 9 ' by some plate sheet leaf spring superposition compositions, the thickness of monolithic thin slice leaf spring and the quantity elastic stiffness required for embody rule determines, material is beryllium bronze or stainless steel, the method of photoetching is adopted accurately to process inner molded line, inner molded line can be spirality, also can be straight-arm shape, molded line requires level and smooth, impulse-free robustness, without knuckle, and be performed for more than 10 by leaf spring vibration tester 8the inspection of fatigue that individual circulation is above;
Inner molded line be the schematic diagram of spiral monolithic thin slice leaf spring as shown in Figure 8, thin slice etches spirality molded line 38 with photolithography, thus self-assembling formation spirality leaf spring arm 39, outside reserves single piece plate spring outer rim 53, and evenly etch some screw holes 54 fixing for screw with photolithography thereon, single piece plate spring inner edge 55 is reserved in inner side;
Inner molded line be the schematic diagram of the monolithic thin slice leaf spring of straight-arm shape as shown in Figure 9, thin slice etches straight-arm template spring arm 56 and movement arm 57 with photolithography, outside reserves single piece plate spring outer rim 58, and evenly etch some screw holes 59 fixing for screw with photolithography thereon, single piece plate spring inner edge 60 is reserved in inner side;
Figure 10 and Figure 11 is respectively the section plan of left part upper support structure 12 and left part lower support structure 13; Left part upper support structure 12 and the metallic material that left part lower support structure 13 is higher by mechanical strength, remanent magnetism is lower adopt numerical control machine tool processing and fabricating to form, and machining accuracy is all better than 5.0 μm; The left side of left part upper support structure 12 uses precise numerical control machine to be processed into upper annular plane 25; Upper left supports right end face 24 is supported on left part lower yoke left side 19, and the two passes through screw fastening; Lower-left supports right end face 47 is supported on shared support left surface 48, the two is welded together by electron beam welding technology, lower-left supports left front side 26 and is supported on left part lower yoke right side 27, the two passes through screw fastening, the lower left side of left part lower support structure 13 uses precise numerical control machine to process lower ring plain 28, and the side, upper left of left part lower support structure 13 uses precise numerical control machine to process support exterior edge face, lower-left 52;
Figure 12 is the section plan of right part lower support structure 13 '; The metallic material that right part lower support structure 13 ' is higher by mechanical strength, remanent magnetism is lower adopts numerical control machine tool processing and fabricating to form, and machining accuracy is better than 5.0 μm, and its upper right side uses precise numerical control machine to process support exterior edge face, lower-left 52 ';
Figure 13 is the section plan of left part displacement transducer iron core 14; Left part displacement transducer iron core 14 and right part displacement transducer iron core 14 ' make by pure iron material, inside is processed with the left iron core thread section 51 and right iron core thread section 51 ' that match with left bar thread section 49 and right bar thread section 49 ' respectively, and left bar thread section 49 and right bar thread section 49 ' screw in left iron core thread section 51 respectively and right iron core thread section 51 ' is interior and fastening;
The metallic material employing numerical control machine tool processing and fabricating that left part coil rack 6, right part coil rack 6 ', left part displacement transducer support 16, left part displacement transducer support 16 ' is higher by mechanical strength, remanent magnetism is lower forms, and machining accuracy is all better than 9.0 μm; Left part displacement transducer coil 15 and right part displacement transducer coil 15 ' form by enamel covered wire coiling on corresponding skeleton;
Figure 14 is the section plan of left part permanent magnet 2; The rare earth permanent-magnetic material that left part permanent magnet 2 and right part permanent magnet 2 ' all adopt magnetic energy product higher makes, and uses the mode machine shaping of laser beam machining; Left part permanent magnet 2 and right part permanent magnet 2 ' all use pulsed magnetizer radially to magnetize to saturated;
Figure 15 is the section plan of yoke 3 on left part; On left part, on yoke 3 and right part, yoke 3 ' all adopts the pure iron material that permeability is higher, and use precise numerical control machine to process, machining accuracy is all better than 8.0 μm;
Figure 16 is the section plan of left part lower yoke 4; Left part lower yoke 4 and right part lower yoke 4 ' all adopt the pure iron material that permeability is higher, and use precise numerical control machine to process, the axial thickness of left part lower yoke 4 and right part lower yoke 4 ' bottom is δ, and machining accuracy is all better than 2.0 μm;
Figure 17 is the schematic diagram of left part current-carrying coil 5; Left part current-carrying coil 5 and right part current-carrying coil 5 ' all adopt enamel covered wire on a solid support coiling form, the diameter of enamel covered wire and thickness are determined by the motor force needing to provide; Left part current-carrying coil 5 is h with the axial height of right part current-carrying coil 5 ', ensures that the precision of h is better than 2.0 μm during making by machine tool accuracy and technique for coiling;
Figure 18 is the combined planar sectional view of yoke 3 on left part permanent magnet 2, left part, left part lower yoke 4 and left part current-carrying coil 5; Yoke 3 on left part permanent magnet 2 and left part wraps up wherein by left part lower yoke 4, common formation left part ring-type air gap 46, and left part current-carrying coil 5 inserts in left part ring-type air gap 46 with one heart; Yoke 3 ' on left part permanent magnet 2 ' and left part wraps up wherein by left part lower yoke 4 ', common formation right part ring-type air gap 46 ', and right part current-carrying coil 5 ' inserts in right part ring-type air gap 46 ' with one heart; On left part, on yoke 3, left part current-carrying coil 5, left part piston 7 and right part, yoke 3 ' and right part current-carrying coil 5 ', right part piston 7 ' all need when making to ensure that the axial thickness met bottom respective lower yoke is greater than the axial height of respective current-carrying coil and the range sum of respective piston, that is: δ > s+h, to ensure in whole piston stroke, guarantee that current-carrying coil is within stable magnetic field all the time;
Figure 19 and Figure 20 is respectively the section plan of left part casing 17 and right part casing 17 '; Left part casing 17 and the metallic material that right part casing 17 ' is high by mechanical strength, compact structure, remanent magnetism are lower use precise numerical control machine processing and fabricating to be shaped; Left part casing exterior edge face 61 and support exterior edge face, lower-left 52 use electron beam technology to weld together, and form left side airtight cavity; Right part casing exterior edge face 61 ' and support exterior edge face 52 ', bottom right use electron beam technology to weld together, form right part airtight cavity, all be filled with the inspection of high-purity helium to above-mentioned two complete airtight cavities of welding, compressive strength all need higher than 5.0MPa, and helium leak rates all need lower than 3.0 × 10 -8pam 3/ s.
The invention has the advantages that: with the mode of short coil and radial magnetizing achieve moving-coil linear compressor stable, reliably and continuously operate, there is compact structure, vibrate low, that electric efficiency is high, expected life is long outstanding advantages, significant to the development of highly reliable, long lifetime, high efficiency linear compressor.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of dynamic coil linear motor four kinds of forms, and wherein (1) is long loop axial charging form, and (2) are short coil axial charging form, and (3) are long-coil radial magnetization form, and (4) are short-coil radial magnetization form.Wherein 63 is permanent magnet, and 64 is upper yoke, and 65 is lower yoke, and 66 is current-carrying coil, through hole centered by 67;
The section plan of the opposed type moving-coil linear compressor that Fig. 2 is invented employing short-coil radial magnetization, wherein: 0 for sharing support, 1 is left part cylinder liner, 2 is left part permanent magnet, 3 is yoke on left part, 4 is left part lower yoke, 5 is left part current-carrying coil, 6 is left part coil rack, 7 is left part piston, 8 is plate spring groups on left part, 9 is plate spring groups under left part, 10 is tabletting structure on left part, 11 is left part lower sheeting structure, 12 is left part upper support structure, 13 is left part lower support structure, 14 is left part displacement transducer iron core, 15 is left part displacement transducer coil, 16 is the support of left part displacement transducer, 17 is left part casing, 1 ' is right part cylinder liner, 2 ' is right part permanent magnet, 3 ' is yoke on right part, 4 ' is right part lower yoke, 5 ' is right part current-carrying coil, 6 ' is right part coil rack, 7 ' is right part piston, 8 ' is plate spring groups on right part, 9 ' is plate spring groups under right part, 10 ' is tabletting structure on right part, 11 ' is right part lower sheeting structure, 12 ' is right part upper support structure, 13 ' is right part lower support structure, 14 ' is right part displacement transducer iron core, 15 ' is right part displacement transducer coil, 16 ' is the support of right part displacement transducer, 17 ' is right part casing,
Fig. 3 is the three-dimensional cutaway view of shared support 0, and wherein 41 is left part cylinder, and 41 ' is right part cylinder, and 42 for sharing air outlet hole, and 48 for sharing support left surface;
Fig. 4 is the three-dimensional cutaway view of left part cylinder liner 1;
Fig. 5 is the section plan of left part piston 7, and wherein 35 is left part piston head, and 36 is left part piston middle transition platform, and 37 is left part piston rod, and 49 is left bar thread section;
Fig. 6 is the combination schematic diagram of plate spring groups 8 and tabletting structure 10 on left part on left part, and wherein 29 is upper left group outer rim, and 30 is group inner edge, upper left, upper left group spring body center hole 31;
Fig. 7 is the combination schematic diagram of plate spring groups 9 and left part lower sheeting structure 11 under left part, and wherein 32 is lower-left group outer rim, and 33 is group inner edge, lower-left, and 34 is lower-left group spring body center hole;
The schematic diagram of Fig. 8 to be inner molded line be spiral monolithic thin slice leaf spring, wherein 38 is spirality molded line, and 39 is spirality leaf spring arm, and 53 is single piece plate spring outer rim, and 54 is screw hole, and 55 is single piece plate spring inner edge;
The schematic diagram of Fig. 9 to be inner molded line be monolithic thin slice leaf spring of straight-arm shape, wherein 56 is straight-arm template spring arm, and 57 is movement arm, and 58 is single piece plate spring outer rim, and 59 is screw hole, and 60 is single piece plate spring inner edge;
Figure 10 is the section plan of left part upper support structure 12, and wherein 24 is upper left supports right end face, and 25 is upper annular plane;
Figure 11 is the section plan of left part lower support structure 13, and wherein 26 support left front side for lower-left, 28 is lower ring plain, and 47 is lower-left supports right end face, and 52 is support exterior edge face, lower-left;
Figure 12 is the section plan of right part lower support structure 13 ', and wherein 52 ' is support exterior edge face, bottom right;
Figure 13 is the section plan of left part displacement transducer iron core 14, and wherein 51 is left iron core thread section;
Figure 14 is the section plan of left part permanent magnet 2, and wherein 21 is left part magnet inner ring surface; 22 is left part permanent magnet right side; 43 is left part magnet inner via hole, and 68 is left part magnet outer ring surface;
Figure 15 is the section plan of yoke 3 on left part, and wherein 18 is yoke left side on left part; 20 is yoke right side on left part; 44 is yoke inner via hole on left part, and 67 is yoke outer ring surface on left part;
Figure 16 is the section plan of left part lower yoke 4, and wherein 19 is left part lower yoke left side; 23 is left part lower yoke inner ring surface, and 27 is left part lower yoke right side; 45 is left part lower yoke inner via hole;
Figure 17 is the schematic diagram of left part current-carrying coil 5;
Figure 18 is the combined planar sectional view of yoke 3 on left part permanent magnet 2, left part, left part lower yoke 4 and left part current-carrying coil 5, and wherein 46 is left part ring-type air gap;
Figure 19 is the section plan of left part casing 17, and wherein 61 is left part casing exterior edge face, and 62 is left part engine housing;
Figure 20 is the section plan of right part casing 17 ', and wherein 61 ' is right part casing exterior edge face, and 62 ' is right part engine housing.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail:
The opposed type moving-coil linear compressor of the employing short-coil radial magnetization invented is by sharing support 0, left part cylinder liner 1, left part permanent magnet 2, yoke 3 on left part, left part lower yoke 4, left part current-carrying coil 5, left part coil rack 6, left part piston 7, plate spring groups 8 on left part, plate spring groups 9 under left part, tabletting structure 10 on left part, left part lower sheeting structure 11, left part upper support structure 12, left part lower support structure 13, left part displacement transducer iron core 14, left part displacement transducer coil 15, left part displacement transducer supports 16, left part casing 17 and right part cylinder liner 1 ', right part permanent magnet 2 ', yoke 3 ' on right part, right part lower yoke 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', plate spring groups 8 ' on right part, plate spring groups 9 ' under right part, tabletting structure 10 ' on right part, right part lower sheeting structure 11 ', right part upper support structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement transducer coil 15 ', right part displacement transducer supports 16 ', right part casing 17 ' forms jointly, it is characterized in that, overall structure adopts opposed type to offset the mechanical vibration of left and right two-part generation, namely with vertical center line 40 for symmetry axis, all parts of left part and structural configuration and right part corresponding part and structural configuration enantiotropy each other, horizontal axis 50 is indicated is axial direction, share support 0 to be made up of left part cylinder 41, right part cylinder 41 ' and shared air outlet hole 42, left part cylinder liner 1 interference fit is embedded in the inside of left part cylinder 41, and right part cylinder liner 1 ' interference fit is embedded in the inside of right part cylinder 41 ', left part permanent magnet 2 is cylinder-like structure, and central position is processed with left part magnet inner via hole 43 vertically, on left part, yoke 3 is cylinder-like structure, and its central position is processed with yoke inner via hole 44 on left part that diameter is d vertically, and on left part, the external diameter of yoke 3 is less than the diameter of left part magnet inner via hole 43 2.0 ~ 3.0 μm, left part lower yoke 4 is U-shaped structure, larger than the external diameter of left part permanent magnet 2 2.0 ~ 3.0 μm of the internal diameter of U-shaped body, central position bottom U-shaped body is processed with left part lower yoke inner via hole 45 vertically, and the diameter of left part lower yoke inner via hole 45 is greater than the external diameter of yoke 3 on left part, left part permanent magnet 2 radially magnetizes to saturated, on left part, yoke 3 inserts left part magnet inner via hole 43 inside afterwards, yoke 3 on left part permanent magnet 2 and left part wraps up wherein by left part lower yoke 4, on left part, yoke left side 18 flushes with left part lower yoke left side 19, and on left part, yoke right side 20, left part permanent magnet right side 22 and left part lower yoke right side 27 three flush, left part permanent magnet inner ring surface 21 is close together with yoke outer ring surface 67 on left part, and left part magnet outer surface 68 and left part lower yoke inner ring surface 23 are close together, on left part permanent magnet 2, left part, yoke 3, left part lower yoke 4 form left part ring-type air gap 46 jointly, left part current-carrying coil 5 inserts in left part ring-type air gap 46 with one heart, on right part permanent magnet 2 ', right part, yoke 3 ', right part lower yoke 4 ' form right part ring-type air gap 46 ' jointly, and right part current-carrying coil 5 ' inserts in right part ring-type air gap 46 ' with one heart, left part current-carrying coil 5 is h with the axial height of right part current-carrying coil 5 ', range when left part piston 7 and right part piston 7 ' work is s, left part lower yoke 4 is δ with the axial thickness of right part lower yoke 4 ' bottom, and meets relation: δ > s+h, to ensure in whole piston stroke, guarantees that current-carrying coil is within stable magnetic field all the time, upper left supports right end face 24 is supported on left part lower yoke left side 19, and the two is by screw fastening, and upper annular plane 25 is processed in the left side of left part upper support structure 12, lower-left supports right end face 47 is supported on shared support left surface 48, and the two welds together, lower-left supports left front side 26 and is supported on left part lower yoke right side 27, and the two is by screw fastening, and the lower left side of left part lower support structure 13 is processed into lower ring plain 28, on left part, plate spring groups 8 is formed by stacking by some single piece plate spring thin slices, upper left group outer rim 29 is formed in outer rim, in group inner edge, formation upper left, inner edge 30, the upper left group spring body center hole 31 that diameter is d is processed with vertically in center portion, wherein upper left group outer rim 29 is positioned on the upper annular plane 25 of left part upper support structure 12, and passes through screw fastening, under left part, plate spring groups 9 is formed by stacking by some single piece plate spring thin slices, lower-left group outer rim 32 is formed in outer rim, in group inner edge, formation lower-left, inner edge 33, the lower-left group spring body center hole 34 that diameter is d is processed with vertically in center portion, wherein lower-left group outer rim 32 is positioned on the lower ring plain 28 of left part lower support structure 13, and passes through screw fastening, left part piston 7 is made up of left part piston head 35, left part piston middle transition platform 36 and left part piston rod 37, the left bar thread section 49 of long 1 ~ 3mm is processed with at the end of left part piston rod 37, the external diameter of left part piston head 35 is little 10 ~ 30 μm than the internal diameter of left part cylinder 41, ensures that the diameter of left part piston rod 37 is less than d simultaneously, left part piston rod 37 runs through yoke inner via hole 44 on lower-left group spring body center hole 34, left part lower yoke inner via hole 45, left part, upper left group spring body center hole 31 successively, on left part, group inner edge, upper left 30 and left part coil rack 6 tighten together with left part piston rod 37 by tabletting structure 10, group inner edge, lower-left 33 tightens together with left part piston middle transition platform 36 by left part lower sheeting structure 11, thus ensure left part current-carrying coil 5, left part coil rack 6 is connected with plate spring groups 9 under plate spring groups 8, left part on left part piston 7, left part is the entirety that can simultaneously move, left part displacement transducer iron core 14 inside is processed with the left iron core thread section 51 matched with left bar thread section 49, and it is interior and fastening that left bar thread section 49 screws in left iron core thread section 51, arrange outside left part displacement transducer iron core 14 and supports the 16 left part displacement transducer coils 15 tightened together with left part displacement transducer, left part displacement transducer support 16 and then to be supported on left part upper support structure 12 also tightens together with it, left part casing 17 is welded and fixed by left part casing exterior edge face 61 and support exterior edge face, lower-left 52, thus form left part airtight cavity, by left part cylinder liner 1, left part permanent magnet 2, yoke 3 on left part, left part lower yoke 4, left part current-carrying coil 5, left part coil rack 6, left part piston 7, plate spring groups 8 on left part, plate spring groups 9 under left part, tabletting structure 10 on left part, left part lower sheeting structure 11, left part upper support structure 12, left part lower support structure 13, left part displacement transducer iron core 14, left part displacement transducer coil 15, left part displacement transducer supports 16, left part casing 17 all covers in wherein, the all parts of right part and structural configuration are left part corresponding part and the structural configuration enantiotropies about vertical center line 40, right part casing 17 ' is welded and fixed by right part casing exterior edge face 61 ' and support exterior edge face, bottom right 52 ', form right part airtight cavity, by right part cylinder liner 1 ', right part permanent magnet 2 ', yoke 3 ' on right part, right part lower yoke 4 ', right part current-carrying coil 5 ', right part coil rack 6 ', right part piston 7 ', plate spring groups 8 ' on right part, plate spring groups 9 ' under right part, tabletting structure 10 ' on right part, right part lower sheeting structure 11 ', right part upper support structure 12 ', right part lower support structure 13 ', right part displacement transducer iron core 14 ', right part displacement transducer coil 15 ', right part displacement transducer supports 16 ', right part casing 17 ' all covers in wherein, thus form a kind of opposed type moving-coil linear compressor adopting short-coil radial magnetization.
The section plan of the opposed type moving-coil linear compressor that Fig. 2 is invented employing short-coil radial magnetization; With vertical center line 40 for symmetry axis and all parts of the left part of enantiotropy and right part corresponding part need adopt the same batch of part produced to make the minimize variability between individuality each other;
Fig. 3 is the three-dimensional cutaway view of shared support 0; Sharing support 0 adopts the titanium alloy material that mechanical strength is high, thermal expansion coefficient is little to make, adopt five-axis machine tool to process left part cylinder 41 and right part cylinder 41 ' simultaneously, ensure that left part cylinder 41 and right part cylinder 41 ' are about vertical center line 40 symmetry, and ensure that the coaxality of left part cylinder 41 and right part cylinder 41 ' is better than 1.0 μm, ensure that the endoporus circularity of above-mentioned two cylinders is all better than 0.5 μm simultaneously; After left part cylinder 41 and right part cylinder 41 ' completion of processing, use same five-axis machine tool to process shared air outlet hole 42, ensure that sharing air outlet hole 42 is all better than 2.0 μm with the perpendicularity of left part cylinder 41 and right part cylinder 41 ';
Fig. 4 is the three-dimensional cutaway view (for the parts of left and right enantiotropy each other, generally only provide the detailed maps of left part in accompanying drawing, and left part and right part parts are together described by manufacturer's rule, lower with) of left part cylinder liner 1; the die steel material that left part cylinder liner 1 and right part cylinder liner 1 ' all adopt hardness to be greater than 58 uses the method for low-speed WEDM to be processed into cylindrical shape, the external diameter ensureing left part cylinder liner 1 and right part cylinder liner 1 ' is 0.5 ~ 1.0mm larger than the internal diameter of left part cylinder 41 and right part cylinder 41 ' respectively, then interference fit is adopted to be inlaid in left part cylinder 41 and right part cylinder 41 ' respectively with the mode of expanding with heat and contract with cold, concrete method for embedding is as follows: shared support 0 entirety being as shown in Figure 3 positioned over inside temperature is homogeneous heating 5 hours in the heated at constant temperature case of 160 DEG C, heated at constant temperature case is taken out first 6 minutes at shared support 0, left part cylinder liner 1 and right part cylinder liner 1 ' are positioned in liquid nitrogen simultaneously and soak, while shared support 0 takes out from heated at constant temperature case, left part cylinder liner 1 and right part cylinder liner 1 ' are taken out from liquid nitrogen, then mechanical external force is used left part cylinder liner 1 and right part cylinder liner 1 ' to be pushed respectively left part cylinder 41 and right part cylinder 41 ' inside, thus ensure that the outer wall of left part cylinder liner 1 and right part cylinder liner 1 ' is combined closely with the inwall of left part cylinder 41 and right part cylinder 41 ' respectively, then use the endoporus of jig grinding machine to left part cylinder liner 1 and right part cylinder liner 1 ' to carry out fine gtinding, ensure that its endoporus circularity is all better than 0.5 μm,
Fig. 5 is the section plan of left part piston 7; Left part piston 7 and right part piston 7 ' all adopt the titanium alloy material that mechanical strength is high, thermal expansion coefficient is little to make, first numerical control machine tool is adopted to process blank, then jig grinding machine is adopted to carry out fine gtinding, ensure that the circularity of left part piston head 35 and right part piston head 35 ' is all better than 0.5 μm, and ensure left part piston rod 37 and right part piston rod 37 ' vertically beat lower than 3.0 μm, and left part piston rod 37 is better than 1.0 μm with the perpendicularity of left part piston head 35, right part piston rod 37 ' is better than 1.0 μm with the perpendicularity of right part piston head 35 '; Precise numerical control machine is used to process left bar thread section 49 and right bar thread section 49 ' respectively at the end of left part piston rod 37 and right part piston rod 37 '; Range when left part piston 7 and the work of right part piston 7 ' is all designed to s, ensures that stroke accuracy is better than 2.0 μm by limit structure;
Fig. 6 is the combination schematic diagram of plate spring groups 8 and tabletting structure 10 on left part on left part, and Fig. 7 is the combination schematic diagram of plate spring groups 9 and left part lower sheeting structure 11 under left part; Tabletting structure 10 ' on tabletting structure 10, left part lower sheeting structure 11 and right part on left part, the metallic material that right part lower sheeting structure 11 ' is higher by mechanical strength, remanent magnetism is lower adopt numerical control machine tool processing and fabricating to form, and machining accuracy is all better than 9.0 μm; On left part under plate spring groups 8, left part on plate spring groups 9 and right part under plate spring groups 8 ', right part plate spring groups 9 ' by some plate sheet leaf spring superposition compositions, the thickness of monolithic thin slice leaf spring and the quantity elastic stiffness required for embody rule determines, material is beryllium bronze or stainless steel, the method of photoetching is adopted accurately to process inner molded line, inner molded line can be spirality, also can be straight-arm shape, molded line requires level and smooth, impulse-free robustness, without knuckle, and be performed for more than 10 by leaf spring vibration tester 8the inspection of fatigue that individual circulation is above;
Inner molded line be the schematic diagram of spiral monolithic thin slice leaf spring as shown in Figure 8, thin slice etches spirality molded line 38 with photolithography, thus self-assembling formation spirality leaf spring arm 39, outside reserves single piece plate spring outer rim 53, and evenly etch some screw holes 54 fixing for screw with photolithography thereon, single piece plate spring inner edge 55 is reserved in inner side;
Inner molded line be the schematic diagram of the monolithic thin slice leaf spring of straight-arm shape as shown in Figure 9, thin slice etches straight-arm template spring arm 56 and movement arm 57 with photolithography, outside reserves single piece plate spring outer rim 58, and evenly etch some screw holes 59 fixing for screw with photolithography thereon, single piece plate spring inner edge 60 is reserved in inner side;
Figure 10 and Figure 11 is respectively the section plan of left part upper support structure 12 and left part lower support structure 13; Left part upper support structure 12 and the metallic material that left part lower support structure 13 is higher by mechanical strength, remanent magnetism is lower adopt numerical control machine tool processing and fabricating to form, and machining accuracy is all better than 5.0 μm; The left side of left part upper support structure 12 uses precise numerical control machine to be processed into upper annular plane 25; Upper left supports right end face 24 is supported on left part lower yoke left side 19, and the two passes through screw fastening; Lower-left supports right end face 47 is supported on shared support left surface 48, the two is welded together by electron beam welding technology, lower-left supports left front side 26 and is supported on left part lower yoke right side 27, the two passes through screw fastening, the lower left side of left part lower support structure 13 uses precise numerical control machine to process lower ring plain 28, and the side, upper left of left part lower support structure 13 uses precise numerical control machine to process support exterior edge face, lower-left 52;
Figure 12 is the section plan of right part lower support structure 13 '; The metallic material that right part lower support structure 13 ' is higher by mechanical strength, remanent magnetism is lower adopts numerical control machine tool processing and fabricating to form, and machining accuracy is better than 5.0 μm, and its upper right side uses precise numerical control machine to process support exterior edge face, lower-left 52 ';
Figure 13 is the section plan of left part displacement transducer iron core 14; Left part displacement transducer iron core 14 and right part displacement transducer iron core 14 ' make by pure iron material, inside is processed with the left iron core thread section 51 and right iron core thread section 51 ' that match with left bar thread section 49 and right bar thread section 49 ' respectively, and left bar thread section 49 and right bar thread section 49 ' screw in left iron core thread section 51 respectively and right iron core thread section 51 ' is interior and fastening;
The metallic material employing numerical control machine tool processing and fabricating that left part coil rack 6, right part coil rack 6 ', left part displacement transducer support 16, left part displacement transducer support 16 ' is higher by mechanical strength, remanent magnetism is lower forms, and machining accuracy is all better than 9.0 μm; Left part displacement transducer coil 15 and right part displacement transducer coil 15 ' form by enamel covered wire coiling on corresponding skeleton;
Figure 14 is the section plan of left part permanent magnet 2; The rare earth permanent-magnetic material that left part permanent magnet 2 and right part permanent magnet 2 ' all adopt magnetic energy product higher makes, and uses the mode machine shaping of laser beam machining; Left part permanent magnet 2 and right part permanent magnet 2 ' all use pulsed magnetizer radially to magnetize to saturated;
Figure 15 is the section plan of yoke 3 on left part; On left part, on yoke 3 and right part, yoke 3 ' all adopts the pure iron material that permeability is higher, and use precise numerical control machine to process, machining accuracy is all better than 8.0 μm;
Figure 16 is the section plan of left part lower yoke 4; Left part lower yoke 4 and right part lower yoke 4 ' all adopt the pure iron material that permeability is higher, and use precise numerical control machine to process, the axial thickness of left part lower yoke 4 and right part lower yoke 4 ' bottom is δ, and machining accuracy is all better than 2.0 μm;
Figure 17 is the schematic diagram of left part current-carrying coil 5; Left part current-carrying coil 5 and right part current-carrying coil 5 ' all adopt enamel covered wire on a solid support coiling form, the diameter of enamel covered wire and thickness are determined by the motor force needing to provide; Left part current-carrying coil 5 is h with the axial height of right part current-carrying coil 5 ', ensures that the precision of h is better than 2.0 μm during making by machine tool accuracy and technique for coiling;
Figure 18 is the combined planar sectional view of yoke 3 on left part permanent magnet 2, left part, left part lower yoke 4 and left part current-carrying coil 5; Yoke 3 on left part permanent magnet 2 and left part wraps up wherein by left part lower yoke 4, common formation left part ring-type air gap 46, and left part current-carrying coil 5 inserts in left part ring-type air gap 46 with one heart; Yoke 3 ' on left part permanent magnet 2 ' and left part wraps up wherein by left part lower yoke 4 ', common formation right part ring-type air gap 46 ', and right part current-carrying coil 5 ' inserts in right part ring-type air gap 46 ' with one heart; On left part, on yoke 3, left part current-carrying coil 5, left part piston 7 and right part, yoke 3 ' and right part current-carrying coil 5 ', right part piston 7 ' all need when making to ensure that the axial thickness met bottom respective lower yoke is greater than the axial height of respective current-carrying coil and the range sum of respective piston, that is: δ > s+h, to ensure in whole piston stroke, guarantee that current-carrying coil is within stable magnetic field all the time;
Figure 19 and Figure 20 is respectively the section plan of left part casing 17 and right part casing 17 '; Left part casing 17 and the metallic material that right part casing 17 ' is high by mechanical strength, compact structure, remanent magnetism are lower use precise numerical control machine processing and fabricating to be shaped; Left part casing exterior edge face 61 and support exterior edge face, lower-left 52 use electron beam technology to weld together, and form left side airtight cavity; Right part casing exterior edge face 61 ' and support exterior edge face 52 ', bottom right use electron beam technology to weld together, form right part airtight cavity, all be filled with the inspection of high-purity helium to above-mentioned two complete airtight cavities of welding, compressive strength all need higher than 5.0MPa, and helium leak rates all need lower than 3.0 × 10 -8pam 3/ s.

Claims (2)

1. adopt an opposed type moving-coil linear compressor for short-coil radial magnetization, by shared support (0), left part cylinder liner (1), left part permanent magnet (2), yoke (3) on left part, left part lower yoke (4), left part current-carrying coil (5), left part coil rack (6), left part piston (7), plate spring groups (8) on left part, plate spring groups (9) under left part, tabletting structure (10) on left part, left part lower sheeting structure (11), left part upper support structure (12), left part lower support structure (13), left part displacement transducer iron core (14), left part displacement transducer coil (15), left part displacement transducer supports (16), left part casing (17) and right part cylinder liner (1 '), right part permanent magnet (2 '), yoke (3 ') on right part, right part lower yoke (4 '), right part current-carrying coil (5 '), right part coil rack (6 '), right part piston (7 '), plate spring groups (8 ') on right part, plate spring groups (9 ') under right part, tabletting structure (10 ') on right part, right part lower sheeting structure (11 '), right part upper support structure (12 '), right part lower support structure (13 '), right part displacement transducer iron core (14 '), right part displacement transducer coil (15 '), right part displacement transducer supports (16 ') and right part casing (17 ') composition, it is characterized in that, the mechanical vibration that overall structure adopts opposed type to produce to offset left and right two-part, namely with vertical center line (40) for symmetry axis, all parts of left part and structural configuration and right part corresponding part and structural configuration enantiotropy each other, horizontal axis (50) is indicated is axial direction, share support (0) to be made up of left part cylinder (41), right part cylinder (41 ') and shared air outlet hole (42), left part cylinder liner (1) interference fit is embedded in the inside of left part cylinder (41), and right part cylinder liner (1 ') interference fit is embedded in the inside of right part cylinder (41 '), left part permanent magnet (2) is cylinder-like structure, and central position is processed with left part magnet inner via hole (43) vertically, on left part, yoke (3) is cylinder-like structure, its central position is processed with yoke inner via hole (44) on left part that diameter is d vertically, and on left part, the external diameter of yoke (3) is less than the diameter of left part magnet inner via hole (43) 2.0 ~ 3.0 μm, left part lower yoke (4) is U-shaped structure, larger than the external diameter of left part permanent magnet (2) 2.0 ~ 3.0 μm of the internal diameter of U-shaped body, central position bottom U-shaped body is processed with left part lower yoke inner via hole (45) vertically, and the diameter of left part lower yoke inner via hole (45) is greater than the external diameter of yoke on left part (3), left part permanent magnet (2) radially magnetizes to saturated, on left part, yoke (3) inserts left part magnet inner via hole (43) inside afterwards, left part lower yoke (4) by yoke (3) parcel on left part permanent magnet (2) and left part wherein, on left part, yoke left side (18) flush with left part lower yoke left side (19), and on left part, yoke right side (20), left part permanent magnet right side (22) and left part lower yoke right side (27) three flush, left part permanent magnet inner ring surface (21) is close together with yoke outer ring surface (67) on left part, and left part magnet ring surface (68) and left part lower yoke inner ring surface (23) are close together, on left part permanent magnet (2), left part, yoke (3), left part lower yoke (4) form left part ring-type air gap (46) jointly, left part current-carrying coil (5) inserts in left part ring-type air gap (46) with one heart, on right part permanent magnet (2 '), right part, yoke (3 '), right part lower yoke (4 ') form right part ring-type air gap (46 ') jointly, and right part current-carrying coil (5 ') inserts in right part ring-type air gap (46 ') with one heart, left part current-carrying coil (5) is h with the axial height of right part current-carrying coil (5 '), range when left part piston (7) and right part piston (7 ') work is s, left part lower yoke (4) is δ with the axial thickness of right part lower yoke (4 ') bottom, and meet relation: δ > s+h, to ensure in whole piston stroke, guarantee that current-carrying coil is within stable magnetic field all the time, upper left supports right end face (24) is supported on left part lower yoke left side (19), and the two is by screw fastening, and upper annular plane (25) is processed in the left side of left part upper support structure (12), lower-left supports right end face (47) is supported on shared support left surface (48), and the two welds together, lower-left supports left front side (26) and is supported on left part lower yoke right side (27), and the two is by screw fastening, and the lower left side of left part lower support structure (13) is processed into lower ring plain (28), on left part, plate spring groups (8) is formed by stacking by some single piece plate spring thin slices, upper left group outer rim (29) is formed in outer rim, in group inner edge, formation upper left, inner edge (30), upper left group spring body center hole (31) that diameter is d is processed with vertically in center portion, wherein upper left group outer rim (29) is positioned on the upper annular plane (25) of left part upper support structure (12), and passes through screw fastening, under left part, plate spring groups 9 is formed by stacking by some single piece plate spring thin slices, lower-left group outer rim (32) is formed in outer rim, in group inner edge, formation lower-left, inner edge (33), lower-left group spring body center hole (34) that diameter is d is processed with vertically in center portion, wherein lower-left group outer rim (32) is positioned on the lower ring plain (28) of left part lower support structure (13), and passes through screw fastening, left part piston (7) is made up of left part piston head (35), left part piston middle transition platform (36) and left part piston rod (37), the left bar thread section (49) of long 1 ~ 3mm is processed with at the end of left part piston rod (37), the external diameter of left part piston head (35) is little 10 ~ 30 μm than the internal diameter of left part cylinder (41), ensures that the diameter of left part piston rod (37) is less than d simultaneously, left part piston rod (37) runs through yoke inner via hole (44), upper left group spring body center hole (31) on lower-left group spring body center hole (34), left part lower yoke inner via hole (45), left part successively, on left part, group inner edge, upper left (30) and left part coil rack (6) tighten together with left part piston rod (37) by tabletting structure (10), group inner edge, lower-left (33) tightens together with left part piston middle transition platform (36) by left part lower sheeting structure (11), thus ensure left part current-carrying coil (5), left part coil rack (6) is connected with plate spring groups (9) under plate spring groups (8), left part on left part piston (7), left part is the entirety that can simultaneously move, left part displacement transducer iron core (14) inside is processed with the left iron core thread section (51) matched with left bar thread section (49), and it is interior and fastening that left bar thread section (49) screws in left iron core thread section (51), outside left part displacement transducer iron core (14), setting supports the left part displacement transducer coil (15) that (16) tighten together with left part displacement transducer, and left part displacement transducer supports (16) and then is supported on left part upper support structure (12) and also tightens together with it, left part casing (17) is welded and fixed by left part casing exterior edge face (61) and support exterior edge face, lower-left (52), thus form left part airtight cavity, by left part cylinder liner (1), left part permanent magnet (2), yoke (3) on left part, left part lower yoke (4), left part current-carrying coil (5), left part coil rack (6), left part piston (7), plate spring groups (8) on left part, plate spring groups (9) under left part, tabletting structure (10) on left part, left part lower sheeting structure (11), left part upper support structure (12), left part lower support structure (13), left part displacement transducer iron core (14), left part displacement transducer coil (15), left part displacement transducer supports (16), left part casing (17) all covers in wherein, the all parts of right part and structural configuration are left part corresponding part and the structural configuration enantiotropies about vertical center line (40), right part casing (17 ') is welded and fixed by right part casing exterior edge face (61 ') and support exterior edge face, bottom right (52 '), form right part airtight cavity, by right part cylinder liner (1 '), right part permanent magnet (2 '), yoke (3 ') on right part, right part lower yoke (4 '), right part current-carrying coil (5 '), right part coil rack (6 '), right part piston (7 '), plate spring groups (8 ') on right part, plate spring groups (9 ') under right part, tabletting structure (10 ') on right part, right part lower sheeting structure (11 '), right part upper support structure (12 '), right part lower support structure (13 '), right part displacement transducer iron core (14 '), right part displacement transducer coil (15 '), right part displacement transducer supports (16 '), right part casing (17 ') all covers in wherein, thus forms a kind of opposed type moving-coil linear compressor adopting short-coil radial magnetization.
2. one kind adopts the manufacture method of the opposed type moving-coil linear compressor of short-coil radial magnetization as claimed in claim 1, it is characterized in that, with vertical center line (40) for symmetry axis and all parts of the left part of enantiotropy and right part corresponding part need adopt the same batch of part produced to make the minimize variability between individuality each other, sharing support (0) adopts the titanium alloy material that mechanical strength is high, thermal expansion coefficient is little to make, adopt five-axis machine tool to process left part cylinder (41) and right part cylinder (41 ') simultaneously, ensure that left part cylinder (41) and right part cylinder (41 ') are about vertical center line (40) symmetry, and ensure that the coaxality of left part cylinder (41) and right part cylinder (41 ') is better than 1.0 μm, ensure that the endoporus circularity of above-mentioned two cylinders is all better than 0.5 μm simultaneously, after left part cylinder (41) and right part cylinder (41 ') completion of processing, use same five-axis machine tool to process shared air outlet hole (42), ensure that sharing air outlet hole (42) is all better than 2.0 μm with the perpendicularity of left part cylinder (41) and right part cylinder (41 '), the die steel material that left part cylinder liner (1) and right part cylinder liner (1 ') all adopt hardness to be greater than 58 uses the method for low-speed WEDM to be processed into cylindrical shape, ensure the external diameter 0.5 ~ 1.0mm larger than the internal diameter of left part cylinder (41) and right part cylinder (41 ') respectively of left part cylinder liner (1) and right part cylinder liner (1 '), then interference fit is adopted to be inlaid in left part cylinder (41) and right part cylinder (41 ') respectively with the mode of expanding with heat and contract with cold, concrete method for embedding is: sharing support (0) entirety, to be positioned over inside temperature be homogeneous heating 4 ~ 6 hours in the heated at constant temperature case of 160 DEG C, before shared support (0) takes out heated at constant temperature case 5 ~ 10 minutes, left part cylinder liner (1) and right part cylinder liner (1 ') are positioned in liquid nitrogen simultaneously and soak, while shared support (0) takes out from heated at constant temperature case, left part cylinder liner (1) and right part cylinder liner (1 ') are taken out from liquid nitrogen, then mechanical external force is used left part cylinder liner (1) and right part cylinder liner (1 ') to be pushed respectively left part cylinder (41) and right part cylinder (41 ') inside, thus ensure that the outer wall of left part cylinder liner (1) and right part cylinder liner (1 ') is combined closely with the inwall of left part cylinder (41) and right part cylinder (41 ') respectively, then use the endoporus of jig grinding machine to left part cylinder liner (1) and right part cylinder liner (1 ') to carry out fine gtinding, ensure that its endoporus circularity is all better than 0.5 μm, left part piston (7) and right part piston (7 ') all adopt mechanical strength high, the titanium alloy material that thermal expansion coefficient is little makes, first numerical control machine tool is adopted to process blank, then jig grinding machine is adopted to carry out fine gtinding, ensure that the circularity of left part piston head (35) and right part piston head (35 ') is all better than 0.5 μm, and ensure left part piston rod (37) and right part piston rod (37 ') vertically beat lower than 3.0 μm, and left part piston rod (37) is better than 1.0 μm with the perpendicularity of left part piston head (35), right part piston rod (37 ') is better than 1.0 μm with the perpendicularity of right part piston head (35 '), precise numerical control machine is used to process left bar thread section (49) and right bar thread section (49 ') respectively at the end of left part piston rod (37) and right part piston rod (37 '), range when left part piston (7) and right part piston (7 ') work is all designed to s, ensures that stroke accuracy is better than 2.0 μm by limit structure, on left part, on tabletting structure (10), left part lower sheeting structure (11) and right part, tabletting structure (10 '), right part lower sheeting structure (11 ') adopt numerical control machine tool processing and fabricating to form by the metallic material of high mechanical properties, low remanent magnetism, and machining accuracy is all better than 9.0 μm, on left part under plate spring groups (8), left part on plate spring groups (9) and right part under plate spring groups (8 '), right part plate spring groups (9 ') by some plate sheet leaf spring superposition compositions, the thickness of monolithic thin slice leaf spring and the quantity elastic stiffness required for embody rule determines, material is beryllium bronze or stainless steel, the method of photoetching is adopted accurately to process inner molded line, inner molded line is spirality or straight-arm shape, molded line requires level and smooth, impulse-free robustness, without knuckle, and be performed for more than 10 by leaf spring vibration tester 8the inspection of fatigue that individual circulation is above, inner molded line is that the making method of spiral monolithic thin slice leaf spring for etch spirality molded line (38) with photolithography on thin slice, thus self-assembling formation spirality leaf spring arm (39), outside reserves single piece plate spring outer rim (53), and evenly etch some screw holes (54) fixing for screw with photolithography thereon, single piece plate spring inner edge (55) is reserved in inner side, inner molded line is the making method of the monolithic thin slice leaf spring of straight-arm shape: on thin slice, etch straight-arm template spring arm (56) and movement arm (57) with photolithography, outside reserves single piece plate spring outer rim (58), and evenly etch some screw holes (59) fixing for screw with photolithography thereon, single piece plate spring inner edge (60) is reserved in inner side, left part upper support structure (12) and left part lower support structure (13) adopt numerical control machine tool processing and fabricating to form by the metallic material of high mechanical properties, low remanent magnetism, and machining accuracy is all better than 5.0 μm, the left side of left part upper support structure (12) uses precise numerical control machine to be processed into upper annular plane (25), upper left supports right end face (24) is supported on left part lower yoke left side (19), and the two passes through screw fastening, lower-left supports right end face (47) is supported on shared support left surface (48), the two is welded together by electron beam welding technology, lower-left supports left front side (26) and is supported on left part lower yoke right side (27), the two passes through screw fastening, the lower left side of left part lower support structure (13) uses precise numerical control machine to process lower ring plain (28), and the side, upper left of left part lower support structure (13) uses precise numerical control machine to process support exterior edge face, lower-left (52), right part lower support structure (13 ') adopts numerical control machine tool processing and fabricating to form by the metallic material of high mechanical properties, low remanent magnetism, machining accuracy is better than 5.0 μm, and its upper right side uses precise numerical control machine to process support exterior edge face, bottom right (52 '), left part displacement transducer iron core (14) and right part displacement transducer iron core (14 ') make by pure iron material, inside is processed with the left iron core thread section (51) and right iron core thread section (51 ') that match with left bar thread section (49) and right bar thread section (49 ') respectively, and left bar thread section (49) and right bar thread section (49 ') screw in left iron core thread section (51) respectively and right iron core thread section (51 ') is interior and fastening, left part coil rack (6), right part coil rack (6 '), left part displacement transducer support (16), left part displacement transducer support (16 ') adopts numerical control machine tool processing and fabricating to form by the metallic material of high mechanical properties, low remanent magnetism, and machining accuracy is all better than 9.0 μm, left part displacement transducer coil (15) and right part displacement transducer coil (15 ') form by enamel covered wire coiling on corresponding skeleton, left part permanent magnet (2) and right part permanent magnet (2 ') all adopt rare earth permanent-magnetic material to make, use the mode machine shaping of laser beam machining, left part permanent magnet (2) and right part permanent magnet (2 ') all use pulsed magnetizer radially to magnetize to saturated, on left part, on yoke (3) and right part, yoke (3 ') all adopts pure iron material, and use precise numerical control machine to process, machining accuracy is all better than 8.0 μm, left part lower yoke (4) and right part lower yoke (4 ') all adopt pure iron material, use precise numerical control machine processes, the axial thickness of left part lower yoke (4) and right part lower yoke (4 ') bottom is δ, and machining accuracy is all better than 2.0 μm, left part current-carrying coil (5) and right part current-carrying coil (5 ') all adopt enamel covered wire on a solid support coiling form, the diameter of enamel covered wire and thickness are determined by the motor force needing to provide, left part current-carrying coil (5) is h with the axial height of right part current-carrying coil (5 '), ensures that the precision of h is better than 2.0 μm during making by machine tool accuracy and technique for coiling, left part lower yoke (4) by yoke (3) parcel on left part permanent magnet (2) and left part wherein, common formation left part ring-type air gap (46), left part current-carrying coil (5) inserts in left part ring-type air gap (46) with one heart, left part lower yoke (4 ') by yoke (3 ') parcel on left part permanent magnet (2 ') and left part wherein, common formation right part ring-type air gap (46 '), right part current-carrying coil (5 ') inserts in right part ring-type air gap (46 ') with one heart, on left part, on yoke (3), left part current-carrying coil (5), left part piston (7) and right part, yoke (3 ') and right part current-carrying coil (5 '), right part piston (7 ') all need when making to ensure that the axial thickness met bottom respective lower yoke is greater than the axial height of respective current-carrying coil and the range sum of respective piston, that is: δ > s+h, to ensure in whole piston stroke, guarantee that current-carrying coil is within stable magnetic field all the time, left part casing (17) and right part casing (17 ') use precise numerical control machine processing and fabricating to be shaped by the metallic material of high mechanical properties, compact structure, low remanent magnetism, left part casing exterior edge face (61) and support exterior edge face, lower-left (52) use electron beam technology to weld together, form left side airtight cavity, right part casing exterior edge face (61 ') and support exterior edge face, bottom right (52 ') use electron beam technology to weld together, form right part airtight cavity, the inspection of high-purity helium is all filled with to above-mentioned two complete airtight cavities of welding, compressive strength all need higher than 5.0MPa, and helium leak rates all need lower than 3.0 × 10 -8pam 3/ s.
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