CN103668053A - Mask frame and corresponding mask component thereof - Google Patents

Mask frame and corresponding mask component thereof Download PDF

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Publication number
CN103668053A
CN103668053A CN201210329270.8A CN201210329270A CN103668053A CN 103668053 A CN103668053 A CN 103668053A CN 201210329270 A CN201210329270 A CN 201210329270A CN 103668053 A CN103668053 A CN 103668053A
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CN
China
Prior art keywords
mask
inside casing
frame
mask frame
opposite side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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CN201210329270.8A
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Chinese (zh)
Inventor
魏志凌
高小平
张炜平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kunshan Power Stencil Co Ltd
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Kunshan Power Stencil Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kunshan Power Stencil Co Ltd filed Critical Kunshan Power Stencil Co Ltd
Priority to CN201210329270.8A priority Critical patent/CN103668053A/en
Priority to PCT/CN2013/081566 priority patent/WO2014036880A1/en
Priority to TW102132122A priority patent/TWI512392B/en
Priority to TW102216762U priority patent/TWM474259U/en
Publication of CN103668053A publication Critical patent/CN103668053A/en
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention discloses a mask frame and a corresponding mask component thereof. The mask frame comprises an inner frame comprising two sets of opposite sides, a reinforcement bar arranged outside the inner frame, and a connecting mechanism for connecting the inner frame and the reinforcement bar, wherein the contact part of the inner frame and the reinforcement bar is provided with a supporting mechanism, so that a clearance is left between the inner frame and the reinforcement bar; meanwhile, the inner frame is provided with mating holes in the region corresponding to the reinforcement bar; the mating holes can be distributed on the basis of the calculation according to the stress condition; and the mask frame can also comprise a support bar and an elastic part, thereby further lowering the sagging phenomenon of the mask plate. The mask component comprises the mask frame disclosed by the invention and a mask part, wherein the mask part can be an integrally-formed mask plate or a mask plate spliced by a plurality of mask plates. The mask frame and corresponding mask component thereof can further lower the sag phenomenon of the mask plate, enhance the quality, precision and yield of the product, and prepare a panel with larger sizes.

Description

A kind of mask frame and corresponding mask assembly thereof
Technical field
The present invention relates to electronic printing field, relate in particular to a kind of mask frame and corresponding mask assembly thereof.
Background technology
Compare with existing LCD technology, utilizing the made indicating meter of organic light emitting diode (OLED) technology not only to have can true color, the reaction times is fast, high brightness (100-14,000cd/m 2), the above visual angle of high luminous efficiency (16-38lm/W), 170 degree, LCD ghost as none, can be made into large size and flexibility panel, can be in the scope of ℃-80 ℃, Celsius-30 advantage such as operation, and processing procedure is simple, integral thickness also can be contracted to 1mm below, cost more only has the 30-40% of TFT-LCD.Therefore, utilizing the made indicating meter of OLED technology to firmly get society welcomes.
At present, the made indicating meter of OLED technology has reached volume production in small size, and comparatively ripe.But for by manufacture a plurality of OLED indicating meters to realize the raising of output simultaneously, or produce large-sized OLED indicating meter, just need to increase the size of the large substrate of tradition, just must increase the size for the mask assembly of evaporation organic materials accordingly.
Shown in Fig. 1, be that tradition is for the structural representation of the mask assembly of evaporation organic materials, it comprises housing 11 and is fixed on the mask portion 12 on housing 11 by solder joint 120, mask portion 12 is welded on housing 11 by applying at two ends after pulling force is tightened, and discharges pulling force after welding.During mask assembly horizontal positioned, because mask portion 12 bounces back in the other direction and causes housing 11 Shang Xia (in Fig. 1 up and down orientation) support section to occur the phenomenon of indent shown in figure along original pulling force, thereby make mask portion 12 occur sagging (particularly mask portion 12 region intermediates), the consequence so causing is that pattern position precision, the size that evaporation obtains relatively all can have certain deviation, thereby affects quality and the yield of product.
Chinese Patent Application No. is 2010101136655 to disclose a kind of mask assembly and for using the depositing device of the flat-panel monitor of this mask assembly, its primary structure is: on the housing of mask assembly, be provided with the support stick of the open area forming across housing, thereby reduce the sag of chain of mask portion.The Chinese patent patent No. provides a kind of mask for the manufacture of large size display panel for 01138161.2, and it comprises: have the main frame in a plurality of holes, in the hole that is assemblied in main frame according to the size that will manufacture and pattern from mask.With upper type, have certain effect realizing in OLED indicating meter volume production, but still have mask portion 12 sagging problems making on large size display screen, affect good article rate and accuracy requirement that large size display screen is manufactured, so still there is certain limitation.
Summary of the invention
In view of this, need to overcome at least one in above-mentioned defect of the prior art.The invention provides a kind of mask frame and corresponding mask assembly thereof,
Described mask frame comprises inside casing, and described inside casing is used for being connected and fixed with mask plate periphery, plays the effect that mask plate is tightened; Strengthening bar, described strengthening bar is placed in described inside casing outside and interacts with described inside casing, plays the effect that reduces or make up the inside shrinkage of described inside casing frame producing when described inside casing is tightened described mask plate; And connection mechanism, described connection mechanism is used for connecting described inside casing and described strengthening bar, play and support described strengthening bar, the frame that described inside casing is inwardly shunk outwards stretches, and plays the effect that reduces or make up the inside shrinkage of described inside casing frame producing when described inside casing is tightened described mask plate.
According in this patent background technology to described in prior art, as shown in Figure 1, when the limit of housing 11 is subject to inside pulling force, housing is Shang Xia 11 (upper and lower orientation in Fig. 1) there is the indent phenomenon shown in Fig. 1, thereby has caused the sagging of mask portion in support section; Now regulate described connection mechanism can reduce or make up the situation that housing support section concaves, improve precision, the quality of product, and improve good article rate.
In addition, according to mask frame disclosed by the invention, also there is following additional technical feature:
Described inside casing comprises two groups of opposite side, and described two groups of opposite side form a hollow sealing rectangular frame.
Further, described sealing rectangular frame is formed in one or is linked and formed by interconnecting piece by described two groups of opposite side.
A kind of mask frame disclosed by the invention is more prone to solve the product of preparing large size panel, although integrated described sealing rectangular frame has certain advantage in this regard, but when size further increases, by the described sealing rectangular frame connecting and composing by interconnecting piece, there is more obvious advantage.
Described inside casing and strengthening bar have corresponding supporting mechanism in contact site, and described supporting mechanism has gap when described inside casing is connected with described strengthening bar.
Further, the supporting mechanism of described correspondence is to lay respectively at that described inside casing and described strengthening bar contact site have the bulge-structure of positioning action and sunk structure or simple monolateral bulge-structure and without corresponding sunk structure.
Simple monolateral raised structures can play and cause the gapped effect of tool between inside casing and strengthening bar, and preparation is got up relatively simpler, with low cost; Bulge-structure and the sunk structure with positioning action make location more accurate.
Preferably, the described bulge-structure with positioning action and sunk structure be radius identical, coordinate the latter two right cylinders that can realize coincidence or the trapezoidal bulge-structure that can coordinate and can coordinate with described trapezoidal bulge-structure the sunk structure of location or n be more than or equal to 1 columnar projections structure and can with the sunk structure of described columnar projections respective outer side edges, the medullary ray of the sunk structure of described columnar protrusions structure and described columnar projections respective outer side edges overlaps and perpendicular to surface, described contact site.
Described connection mechanism is screw structural.
Preferably, described screw structural is fine groove screw structural.
Syndeton can be common, easy screw structural, and it is more convenient when maintenance assembling is changed, and fine groove screw structural preferably can regulate meticulousr and bear stronger anchorage force.
Described strengthening bar is provided with described opposite side opposite side pairing hole and the strengthening bar pairing hole being connected for screw.
Further, described opposite side pairing hole is tapped bind hole on described opposite side.
Further, on described strengthening bar, be provided with cylinder ladder hole.
Described tapped bind hole can be avoided the possibility that in operation, slurry overflows along through hole, also can further reduce the stressed impact of inside casing one-piece construction.
Further, arrange by rule in described opposite side and described strengthening pole length direction in described pairing hole.
Conventionally in the operation under state, on inside casing opposite side, suffered power can be rule and arranges, and generally there will be middle part stressed larger, and both sides are stressed lower, and therefore rationally more excellent arranging can be carried out according to stressing conditions in described pairing hole.
Preferably, described pairing hole is middle intensive, evenly distributed or middle sparse, the two ends dense arrangement of two ends Sparse rules arrangement.
According to embodiments of the invention, described mask frame also comprises support bar, and described support bar is used for further reducing the sag of chain of mask plate.
When the product size of needs making further increases, the size of mask plate also increases accordingly, the sag of chain bringing thus also will further increase, the effect of simple strengthening bar is likely difficult to produce a desired effect, and now support bar can further reduce the sagging of described mask plate region intermediate.
According to embodiments of the invention, described mask frame also comprises the elastomeric element for increasing anchorage force between described strengthening bar and described inside casing.
Preferably, described elastomeric element is spring.
According to embodiments of the invention, described strengthening bar also comprises and has raised platform, described raised platform and described inside casing opposite side lower surface close contact, and during mask assembly horizontal positioned, described raised platform plays the effect of supporting inside casing.
Further, the inner side of described raised platform and described inside casing opposite side is provided with chamfering structure or transition curve structure.
So design can reduce assembly to the stopping of luminous organic material, is conducive to the evaporate process of luminous organic material.
The invention also discloses a kind of mask assembly of correspondence, comprise described mask frame provided by the invention and mask parts, described mask parts is fixedly connected on the described inside casing of described mask frame.
In addition, according to the mask assembly of correspondence disclosed by the invention, also there is following additional technical feature:
Described mask parts is that polylith mask plate is spliced, or integrated monolithic mask plate forms.
Described mask parts and the joint portion that forms the inside casing of mask frame are the bonding or laser welding syndeton of glue.
Integrated monolithic mask plate, when continuing to increase size, will run into many difficulties in making itself on the one hand, and on the other hand, its internal structure rigidity constantly reduces, and sagging is more serious; Therefore the splicing of polylith mask plate can solve problems better.
The aspect that the present invention is additional and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become from the following description of the accompanying drawings of embodiments and obviously and easily understand, wherein:
Fig. 1 is that tradition is for the structural representation of the mask assembly of evaporation organic materials;
Fig. 2 is the embodiment schematic diagram of a kind of mask frame of the present invention;
Fig. 3 is 20 part enlarged diagrams in Fig. 2;
Fig. 4 is one embodiment of the invention mask frame overall plan view;
Fig. 5 is 41 part enlarged diagrams in Fig. 4;
Fig. 6 is 42 region A-A schematic cross-sections in Fig. 4;
Fig. 7 is the structural representation of mask assembly;
Fig. 8 is schematic cross-section shown in S-S direction in Fig. 7;
Fig. 9 is 81 part enlarged diagrams in Fig. 8;
It shown in Figure 10, is a kind of improvement mechanism of structure shown in Fig. 9;
Figure 11 is a modification of the present invention embodiment schematic diagram;
Figure 12 is another kind of modified embodiment schematic diagram of the present invention;
Figure 13 is the enlarged diagram in 215 regions in Figure 12;
In Fig. 1,11 is housing, and 120 is solder joint, and 12 is mask portion;
In Fig. 2,20 for treating magnification region, and 21 is inside casing, and 22 is strengthening bar, and 23Wei connection mechanism 211,212 is opposite side;
In Fig. 3,31 is groove structure, and 32 is bulge-structure;
In Fig. 4,41 for treating amplifier section, and 42 for treating anatomic region, and 43 is the pairing hole for connecting inside casing 21 and strengthening bar 22;
In Fig. 5, d is the spacing between inside casing 21 and strengthening bar;
In Fig. 7,24 is mask portion, and 241 is syndeton;
In Fig. 8,81 for treating magnification region;
In Fig. 9,221 is strengthening bar 22 upper process platforms, and 2110 is inside casing 211 inner side chamfering structures, and 2210 is strengthening bar 221 inner side chamfering structures;
In Figure 10,10 is elastomeric element;
In Figure 11,213 for being fixed on the transverse support bar on inside casing;
In Figure 12,214 for to be fixed on the vertical supporting bar on inside casing, and 215 for treating magnification region;
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " on ", orientation or the position relationship of the indication such as D score, " end ", " top ", 'fornt', 'back', " interior ", " outward ", " horizontal stroke ", " erecting " be based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, rather than indicate or imply that the device of indication or element must have specific orientation, with specific orientation, construct and operation, therefore can not be interpreted as limitation of the present invention.
In description of the invention, it should be noted that, unless otherwise clearly defined and limited, term " connection ", " connection ", " being connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, connecting integratedly, can be also to removably connect; It can be the connection of two element internals; Can be to be directly connected, also can indirectly be connected by intermediary, for the ordinary skill in the art, can particular case understand above-mentioned term concrete meaning in the present invention.
Inventive concept of the present invention is as follows, because existing mask stretches tight in network technology, there will be the sagging problem of large size mask plate producing large size panel, when size is larger, to the precision of product, quality, all can make a big impact, and reduces good article rate simultaneously.Mask frame provided by the invention and corresponding mask assembly thereof cause aduncate opposite side to apply contrary external force by mask frame is netted to generation internal-direction-force because stretching tight, and reduce curved degree in it, and then improve precision and the quality of product; Meanwhile, when size further strengthens, can increase support bar to mask frame and corresponding mask assembly thereof, strengthen and reduce the more sagging ability of large size mask plate, making to manufacture more large size panel becomes possibility.
Describe below with reference to accompanying drawings mask frame of the present invention and corresponding mask assembly thereof, wherein Fig. 1 is that tradition is for the structural representation of the mask assembly of evaporation organic materials; Fig. 2 is the embodiment schematic diagram of a kind of mask frame of the present invention; Fig. 4 is one embodiment of the invention mask frame overall plan view; Fig. 7 is the structural representation of mask assembly; It shown in Figure 10, is a kind of improvement mechanism of structure shown in Fig. 9; Figure 11 is a modification of the present invention embodiment schematic diagram; Figure 12 is another kind of modified embodiment schematic diagram of the present invention.
According to embodiments of the invention, a kind of mask frame, as shown in Figure 2, Figure 4 shows, described mask frame comprises inside casing 21, described inside casing is used for being connected and fixed with mask plate periphery, plays the effect that mask plate is tightened; Strengthening bar 22, described strengthening bar is placed in described inside casing outside and interacts with described inside casing, plays the effect that reduces or make up the inside shrinkage of described inside casing frame producing when described inside casing is tightened described mask plate; And connection mechanism 23, described connection mechanism is used for connecting described inside casing and described strengthening bar, play and support described strengthening bar, the frame that described inside casing is inwardly shunk outwards stretches, and plays the effect that reduces or make up the inside shrinkage of described inside casing frame producing when described inside casing is tightened described mask plate.
According to embodiments of the invention, wherein, described inside casing 21 comprises two groups of opposite side 211,212, and described two groups of opposite side 211,212 form a hollow sealing rectangular frame.
Further, described sealing rectangular frame is formed in one or is linked and formed by interconnecting piece 23 by described two groups of opposite side 211,212.
Described inside casing 21 and strengthening bar 22 have corresponding supporting mechanism 23 in contact site, and described supporting mechanism has gap d when described inside casing is connected with described strengthening bar, as shown in Figure 5.
A kind of mask frame disclosed by the invention is more prone to solve the product of preparing large size panel, although integrated described sealing rectangular frame has certain advantage in this regard, but when size further increases, by the described sealing rectangular frame connecting and composing by interconnecting piece 23, there is more obvious advantage.
According to embodiments of the invention, further, the supporting mechanism 23 of described correspondence is to lay respectively at that described inside casing 21 and described strengthening bar 22 contacts site have the bulge-structure of positioning action and sunk structure or simple monolateral bulge-structure and without corresponding sunk structure.
Simple monolateral raised structures can play and cause the gapped effect of tool between inside casing and strengthening bar, and preparation is got up relatively simpler, with low cost; Bulge-structure and the sunk structure with positioning action make location more accurate.
Preferably, as shown in Figure 5, the described bulge-structure 32 with positioning action and sunk structure 31 be radius identical, coordinate the latter two can realize the right cylinder of coincidence, or the trapezoidal bulge-structure that can coordinate and the sunk structure that can coordinate with described trapezoidal bulge-structure location, or n be more than or equal to 1 columnar projections structure and can with the sunk structure of described columnar projections respective outer side edges, the medullary ray of the sunk structure of described columnar protrusions structure and described columnar projections respective outer side edges overlaps and perpendicular to surface, described contact site.
According to embodiments of the invention, described connection mechanism 23 is screw structurals, as shown in Figure 6.
Preferably, described screw structural is fine groove screw structural.
Syndeton 23 can be common, easy screw structural, and it is more convenient when maintenance assembling is changed, and fine groove screw structural preferably can regulate meticulousr and bear stronger anchorage force.
According to embodiments of the invention, described strengthening bar 22 is provided with described opposite side 211 opposite side pairing hole and the strengthening bar pairing hole 43 being connected for screw, as shown in Figure 4.
Further, described opposite side pairing hole is tapped bind hole on described opposite side, as shown in Figure 6.
Further, on described strengthening bar, be provided with cylinder ladder hole, as shown in Figure 6.
Described tapped bind hole can be avoided the possibility that in operation, slurry overflows along through hole, also can further reduce the stressed impact of inside casing one-piece construction.
According to embodiments of the invention, further, arrange by rule on described opposite side 211 and described strengthening bar 23 length directions in described pairing hole 43.
Conventionally in the operation under state, on inside casing 21 opposite side, suffered power is rule and arranges, and generally there will be middle part stressed larger, and both sides are stressed lower, and therefore can rationally arrange according to stressing conditions in described pairing hole 43.
Preferably, described pairing hole 43 is middle intensive, evenly distributed or middle sparse, the two ends dense arrangement of two ends Sparse rules arrangement.
According to embodiments of the invention, described mask frame also comprises support bar 213,214, and described support bar 213,214 is used for further reducing the sag of chain of mask plate, as shown in Figure 11,12.
Described support bar can be many and parallel construction, or single structure, as shown in figure 11; Also can be cross one another array mode as shown in figure 12, in Figure 12, only do an orthogonal structure of simple volume, and do not meant that the restriction to other unitized constructions.
When the product size of needs making further increases, the size of mask plate also increases accordingly, the sag of chain bringing thus also will further increase, the effect of simple strengthening bar is likely difficult to produce a desired effect, and now support bar can further reduce the sagging of described mask plate region intermediate.
According to embodiments of the invention, described mask frame also comprises the elastomeric element 10 for increasing anchorage force between described strengthening bar 22 and described inside casing 21.
Preferably, described elastomeric element 10 is springs.
According to embodiments of the invention, described strengthening bar 22 also comprises and has raised platform 2210, described raised platform 2210 and described inside casing 21 opposite side lower surface close contacts, and during mask assembly horizontal positioned, described raised platform 2210 plays the effect of supporting inside casing.
Further, described raised platform 2210 is provided with chamfering structure 2210,2210 with the inner side of described inside casing 21 opposite side.
So design can reduce assembly to the stopping of luminous organic material, is conducive to the evaporate process of luminous organic material.
The invention also discloses a kind of mask assembly of correspondence, comprise described mask frame provided by the invention and mask parts 24, described mask parts 24 is fixedly connected on described mask frame.
In addition, according to the mask assembly of correspondence disclosed by the invention, also there is following additional technical feature:
Described mask parts 24 is that polylith mask plate is spliced, or integrated monolithic mask plate forms.
Described mask parts 24 and the syndeton 241 that forms the inside casing 21 of mask frame are the bonding or laser welding structure of glue.
In actually operating, mask parts 24 is fixed on one group of opposite side 211 of mask frame inside casing 21, because mask parts 24 is tightened rear fixing, so need to discharge the pulling force of tightening with mask parts 24 after mask parts 24 is fixing, under the resilience of mask parts 24, one opposite side 211 of mask frame 21 there will be indent phenomenon (as shown in Figure 1 the situation of prior art), and mask parts 24 also there will be sagging.Now, by screwing screw 23, because inside casing 21 and strengthening bar 22 middle portions have certain spacing, coordinate governing screw 23, can make the limit 211 of inside casing 21 recover to a certain extent the state before deformation, thereby make mask parts 24 more smooth.
Concrete member, structure or feature that any mentioning " embodiment ", " embodiment ", " illustrative examples " etc. mean to describe in conjunction with this embodiment are contained at least one embodiment of the present invention.In this schematic statement everywhere of this specification sheets, not necessarily refer to identical embodiment.And, when describing concrete member, structure or feature in conjunction with any embodiment, advocate, within realizing in conjunction with other embodiment the scope that such member, structure or feature all drop on those skilled in the art.
Although the specific embodiment of the present invention is described in detail with reference to a plurality of illustrative examples of the present invention, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, and these improve and within embodiment will drop on spirit and scope.Particularly, within the scope of aforementioned open, accompanying drawing and claim, can aspect the layout of component and/or subordinate composite configuration, make rational modification and improvement, and can not depart from spirit of the present invention.Except modification and the improvement of component and/or layout aspect, its scope is limited by claims and equivalent thereof.

Claims (21)

1. a mask frame, is characterized in that, comprising:
Inside casing, described inside casing is used for being connected and fixed with mask plate periphery, plays the effect that mask plate is tightened;
Strengthening bar, described strengthening bar is placed in described inside casing outside and interacts with described inside casing, plays the effect that reduces or make up the inside shrinkage of described inside casing frame producing when described inside casing is tightened described mask plate;
And connection mechanism, described connection mechanism is for connecting described inside casing and the described strengthening bar that is placed in described inside casing outside, play and support described strengthening bar, the frame that described inside casing is inwardly shunk outwards stretches, and plays the effect that reduces or make up the inside shrinkage of described inside casing frame producing when described inside casing is tightened described mask plate.
2. mask frame according to claim 1, is characterized in that, described inside casing comprises two groups of opposite side, and described two groups of opposite side form a hollow sealing rectangular frame.
3. mask frame according to claim 2, is characterized in that, described hollow sealing rectangular frame is formed in one or is linked and formed by interconnecting piece by described two groups of opposite side.
4. mask frame according to claim 1, is characterized in that, described inside casing and strengthening bar have corresponding supporting mechanism in contact site, and described supporting mechanism has gap when described inside casing is connected with described strengthening bar.
5. mask frame according to claim 4, it is characterized in that, the supporting mechanism of described correspondence is to lay respectively at that described inside casing and described strengthening bar contact site have the bulge-structure of positioning action and sunk structure or simple monolateral bulge-structure and without corresponding sunk structure.
6. mask frame according to claim 5, it is characterized in that, the described bulge-structure with positioning action and sunk structure be radius identical, coordinate the latter two right cylinders that can realize coincidence or the trapezoidal bulge-structure that can coordinate and can coordinate with described trapezoidal bulge-structure the sunk structure of location or n be more than or equal to 1 columnar projections structure and can with the sunk structure of described columnar projections respective outer side edges, the medullary ray of the sunk structure of described columnar protrusions structure and described columnar projections respective outer side edges overlaps and perpendicular to surface, described contact site.
7. mask frame according to claim 1, is characterized in that, described connection mechanism is screw structural.
8. mask frame according to claim 7, is characterized in that, described screw structural is fine groove screw structural.
9. according to the mask frame described in claim 1,2, it is characterized in that, described strengthening bar is provided with described opposite side opposite side pairing hole and the strengthening bar pairing hole being connected for screw.
10. mask frame according to claim 9, is characterized in that, described opposite side pairing hole is tapped bind hole on described opposite side.
11. mask frames according to claim 9, is characterized in that, described strengthening bar pairing hole is cylinder ladder hole on described strengthening bar.
12. mask frames according to claim 9, is characterized in that, arrange by rule in described opposite side and described strengthening pole length direction in described pairing hole.
13. mask frames according to claim 12, is characterized in that, described pairing hole is middle intensive, evenly distributed or middle sparse, the two ends dense arrangement of two ends Sparse rules arrangement.
14. according to the mask frame described in claim 1-13 any one, it is characterized in that, described mask frame also comprises the elastomeric element for increasing anchorage force between described strengthening bar and described inside casing.
15. mask frames according to claim 14, is characterized in that, described elastomeric element is spring.
16. according to the mask frame described in claim 1-13,15 any one, it is characterized in that, described mask frame also comprises support bar, and described support bar is used for further reducing the sag of chain of mask plate.
17. according to the mask frame described in claim 1-13,15 any one, it is characterized in that, described strengthening bar also includes raised platform, described raised platform and described inside casing opposite side lower surface close contact, during mask assembly horizontal positioned, described raised platform plays the effect of supporting inside casing.
18. mask frames according to claim 17, is characterized in that, the inner side of described raised platform and described inside casing opposite side is provided with chamfering structure or transition curve structure.
19. 1 kinds of corresponding mask assemblies, is characterized in that, comprise described mask frame and the mask parts of claim 1-18, and described mask parts is fixedly connected on the described inside casing of described mask frame.
The mask assembly of 20. correspondences according to claim 19, is characterized in that, described mask parts is that polylith mask plate is spliced, or integrated monolithic mask plate forms.
The mask assembly of 21. correspondences according to claim 19, is characterized in that, described mask parts and the joint portion that forms the inside casing of mask frame are the bonding or laser welding syndeton of glue.
CN201210329270.8A 2012-09-07 2012-09-07 Mask frame and corresponding mask component thereof Pending CN103668053A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201210329270.8A CN103668053A (en) 2012-09-07 2012-09-07 Mask frame and corresponding mask component thereof
PCT/CN2013/081566 WO2014036880A1 (en) 2012-09-07 2013-08-15 Mask frame and corresponding mask component of mask frame
TW102132122A TWI512392B (en) 2012-09-07 2013-09-06 Mask frame and mask component thereof
TW102216762U TWM474259U (en) 2012-09-07 2013-09-06 Mask frame and mask component thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210329270.8A CN103668053A (en) 2012-09-07 2012-09-07 Mask frame and corresponding mask component thereof

Publications (1)

Publication Number Publication Date
CN103668053A true CN103668053A (en) 2014-03-26

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CN201210329270.8A Pending CN103668053A (en) 2012-09-07 2012-09-07 Mask frame and corresponding mask component thereof

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CN (1) CN103668053A (en)
TW (2) TWI512392B (en)
WO (1) WO2014036880A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018028183A1 (en) * 2016-08-08 2018-02-15 京东方科技集团股份有限公司 Mask plate and evaporation device
CN111519134A (en) * 2019-02-01 2020-08-11 三星显示有限公司 Mask assembly and apparatus for manufacturing display device including the same
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TWM474259U (en) 2014-03-11

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