CN103649716B - Analytical equipment - Google Patents

Abstract

The invention provides a kind of analytical equipment employing non-existent new analytical approach in the past.Analytical equipment (1) provides: elastomer layer (2), because fluid (FL) is in flow path surfaces (2a) flowing, is shifted because of the shear stress from fluid (FL); And sensor part (3), covered by this elastomer layer (2), there is the cantilever portion of activity (21) because of elastomer layer (2) displacement.Thus, this analytical equipment (1) is different from the traditional rotary viscosimeter measuring fluid viscosity according to viscosity resistibility, can determine the viscosity of fluid (FL), and employ non-existent new analytical approach in the past according to the change of cantilever portion (21).

Description

Analytical equipment

Technical field

Invention relates to a kind of analytical equipment, such as, is applicable to the analytical equipment analyzing the fluid viscosities such as fluid food products.

Background technology

At present, as the method for the viscosity of measurement fluid food products, the rotary viscosimeter being called flow graph is used.Such as, this rotary viscosimeter, when making rotor turns after in the fluid of the coniform bottom surface immersion viscosimetric analysis object by rotor, the viscous resistance from fluid suffered by bottom surface records the viscosity (such as, see patent documentation 1) of fluid.

At first technical literature

Patent documentation

Patent documentation 1: Japanese Unexamined Patent Publication 9-61333 publication

Summary of the invention

Invent technical matters to be solved

The viscosimetric analysis of the fluids such as fluid food products is very important when the fluid food products that the People making hypopharynx decline is easily swallowed, and for aging society, needs can measure fluid viscosity in various place.In addition, such as, when comparing the viscosity of polytype fluid food products, when analyzing each fluid viscosity, use the Viscosity Analysis method of the rotary viscosimeter of rotor, and wish to propose other new analytical approachs.

Therefore, the present invention considers the problems referred to above and makes, and its object is to provides a kind of analytical equipment using non-existent new analytical approach in the past.

For the scheme of technical solution problem

In order to solve the problems of the technologies described above, first scheme of the present invention provides a kind of analytical equipment determining fluid viscosity, it is characterized in that having: elastomer layer, by the flow path surfaces flowing that described fluid is tilting, be shifted because of the shear stress from this fluid; Sensor part, covered by described elastomer layer, occur to be shifted and the variable condition of the movable part of activity according to because of this elastomer layer, obtain the measurement result of the viscosity for determining described fluid, described sensor part has piezoelectric electro resistance layer, this piezoelectric electro resistance layer detects the change of active state as resistance value of described movable part, and described measurement result is the resistance change rate obtained from described piezoelectric electro resistance layer; And computing unit, height from this flow path surfaces of the surface velocity that this computing unit obtains the described fluid flowed in described flow path surfaces and the described fluid that flows in described flow path surfaces and fluid level, according to from the described measurement result of described sensor part, described surface velocity and described fluid level, calculate the viscosity coefficient of described fluid.

In addition, the feature of alternative plan of the present invention is to have camera head, makes a video recording to the described fluid flowed in described flow path surfaces; The surface velocity at the described fluid that described flow path surfaces flows that described computing unit determines according to the camera data from camera head, based on the fluid level of the described fluid that described flow path surfaces flows and the shear stress that draws according to the described resistance change rate during flowing of described fluid, calculate the viscosity coefficient of described fluid.

In addition, the feature of third program of the present invention is to have: elastomer layer, is flowed, be shifted because of the shear stress from this fluid by described fluid in flow path surfaces; Sensor part, covered by described elastomer layer, occur to be shifted and the variable condition of the movable part of activity according to because of this elastomer layer, obtain the measurement result of the viscosity for determining described fluid, described sensor part has piezoelectric electro resistance layer, this piezoelectric electro resistance layer detects the change of active state as resistance value of described movable part, and described measurement result is the resistance change rate obtained from described piezoelectric electro resistance layer; Main body, being provided with described sensor part and the pressure transducer for measuring the pressure be subject to from described fluid, moving, in strip in described fluid; And viscosity coefficient computing unit, according to the described resistance change rate obtained from described sensor part with from the pressure measurement result that described pressure transducer obtains, calculate the viscosity coefficient of described fluid; An end face of the described main body perpendicular with making the moving direction of described main body movement in described fluid is located at by described pressure transducer; Described sensor part is located at the side with the described main body of described end face configuration at a right angle.

In addition, the feature of fourth program of the present invention is, described viscosity coefficient computing unit, described resistance change rate according to obtaining from described sensor part calculates shear stress, measure result by described shear stress with from the pressure that described pressure transducer obtains, calculate the viscosity coefficient of described fluid; When described main body moves along described moving direction in described fluid, the described pressure transducer being located at a described end face directly contacts described fluid, and, described fluid is provided with the flow path surfaces flowing of described elastomer layer along a described side, described elastomer layer, on the flow direction of described fluid, elastic deformation occurs.

In addition, the feature of the 5th scheme of the present invention is to have: elastomer layer, is flowed, be shifted because of the power from this fluid by described fluid in flow path surfaces; Sensor part, covered by described elastomer layer, occur to be shifted and the variable condition of the movable part of activity according to because of this elastomer layer, obtain the measurement result of the viscosity for determining described fluid, described sensor part has piezoelectric electro resistance layer, this piezoelectric electro resistance layer detects the change of active state as resistance value of described movable part, and described measurement result is the resistance change rate obtained from described piezoelectric electro resistance layer; Peripheral surface near the bottom of main body is provided with multiple sensor group, sensor group is provided with multiple described sensor part, sensor group described in each detects the shear stress of 3 axial described fluids from orthogonal crossing x-axis direction, y-axis direction and z-axis direction, when making described main body move to any direction in described fluid, try to achieve the direction of making a concerted effort and the size of the described fluid obtained according to the output of sensor group described in each, the direction of making a concerted effort according to these and size measure the viscosity coefficient of described fluid.

In addition, the feature of the 6th scheme of the present invention is, described main body is cylindrical, and the peripheral surface near the bottom of this main body is across being provided with multiple shear force sensor at equal intervals, and described multiple shear force sensor has described sensor group and described elastomer layer; According to the direction of making a concerted effort and the size of the described fluid obtained when making described main body move to any direction in described fluid, measure from the pressure of described fluid and the shear stress from described fluid, according to from the described pressure of described fluid and the shear stress from described fluid, measure the viscosity coefficient of described fluid.

In addition, the feature of the 7th scheme of the present invention is to have: elastomer layer, is flowed, be shifted because of the shear stress from this fluid by described fluid in flow path surfaces; Sensor part, covered by described elastomer layer, occur to be shifted and the variable condition of the movable part of activity according to because of this elastomer layer, obtain the measurement result of the viscosity for determining described fluid, described sensor part has piezoelectric electro resistance layer, this piezoelectric electro resistance layer detects the change of active state as resistance value of described movable part, and described measurement result is the resistance change rate obtained from described piezoelectric electro resistance layer; And the main body of tubulose, described fluid is by the hollow region of the inside of this main body; The wall portion of described main body be provided with covered by described elastomer layer, described main body wall portion from it end to bottom circumferentially across predetermined distance arrange multiple described sensor part; Described sensor part is shifted and the variable condition of the described movable part of activity by elastomer layer described during described hollow region according to because of described fluid, obtains the measurement result of the viscosity for determining described fluid.

In addition, the feature of the 8th scheme of the present invention is, described flow path surfaces is formed on the internal face the same face with described main body; Measure the output voltage from sensor part described in each by information process unit, obtain the resistance change rate of the viscosity determining described fluid.

Invention effect

According to the present invention, the analytical equipment 1 of use non-existent new analytical approach in the past can be provided.

Accompanying drawing explanation

Fig. 1 is the schematic diagram of the entirety structure of the analytical equipment representing the 1st embodiment.

Fig. 2 is the schematic diagram representing the state of fluid when the flow path surfaces flowing of shear force sensor.

Fig. 3 is the schematic diagram of the velocity distribution of the fluid represented in flow surface flowing.

Fig. 4 is the schematic diagram of the detailed configuration representing shear force sensor.

Fig. 5 is the schematic diagram of the manufacture method for illustration of shear force sensor.

Fig. 6 is the schematic diagram of the manufacture method for illustration of shear force sensor.

Fig. 7 is the schematic diagram of the manufacture method for illustration of shear force sensor.

Fig. 8 is the schematic diagram of the manufacture method for illustration of shear force sensor.

The schematic diagram of explanation when Fig. 9 is for making the movable part of cantilever portion erect.

Figure 10 is the schematic diagram of the detailed configuration representing cantilever portion.

Figure 11 is the schematic diagram of the displacement situation representing the sensor part of fluid before and after the flow path surfaces flowing of shear force sensor.

Figure 12 is the chart of the time variations representing the resistance change rate of fluid when flow surface flows.

Figure 13 is the photo representing the state of fluid when flow surface flows.

Figure 14 is the chart of the relation represented between resistance change rate and flow.

Figure 15 is the chart of the relation between presentation surface flow velocity and flow.

Figure 16 is the chart of the relation represented between shear stress and surface velocity.

Figure 17 is the chart representing the relation between viscosity coefficient and sample viscosity calculated.

Figure 18 is the schematic diagram of the structure of the analytical equipment representing the 2nd embodiment.

Figure 19 is the schematic diagram in the state of the fluid of main body ambient dynamic when representing mobile agent.

Figure 20 represents the schematic diagram of fluid in the state of shear force sensor and pressure transducer ambient dynamic.

Figure 21 is the schematic diagram of the analytical equipment representing the 3rd embodiment.

Figure 22 is the schematic diagram of the state of the fluid moved at body peripheral edge surface current when representing mobile agent.

Figure 23 is the schematic diagram of the structure of the sensor group representing shear force sensor.

Figure 24 is the schematic diagram of the detailed configuration representing the 1st sensor part, the 2nd sensor part and the 3rd sensor part.

Figure 25 is the schematic diagram of state of the 1st sensor part, the 2nd sensor part and the 3rd sensor part represented when to give shear stress from fluid to y-axis direction.

Figure 26 is the schematic diagram of state of the 1st sensor part, the 2nd sensor part and the 3rd sensor part represented when to give pressure from fluid to z-axis direction.

Figure 27 represents that one when the analytical equipment of the 3rd embodiment is moved to any direction illustrates intention.

Figure 28 is the schematic diagram of the structure of the analytical equipment representing the 4th embodiment.

Figure 29 is the schematic diagram of the structure of the analytical equipment of the variation representing the 4th embodiment.

Figure 30 is the schematic diagram of the structure of the analytical equipment representing the 5th embodiment.

Figure 31 is the schematic diagram of the structure of the analytical equipment representing the 6th embodiment.

Figure 32 is the schematic diagram of the structure of the analytical equipment representing the 7th embodiment.

Figure 33 is the sectional view of the detailed configuration of the analytical equipment representing Figure 32.

Two side cross-sectional view of holding beam sensor portion that Figure 34 is relation in order to resistance change rate Δ R/R and pressure P are described and schematically shows.

Shear stress when Figure 35 represents that analytical equipment moves back and forth in water and pressure.

Critical piece Reference numeral:

1,35,41,55,61,70,80,90 analytical equipments

2,45,87,98a, 98b elastomer layer

3 sensor part

7 signal conditioning packages (calculating means)

50a the 1st sensor part (sensor part)

50b the 2nd sensor part (sensor part)

50c the 3rd sensor part (sensor part)

95a is mono-holds beam sensor portion (sensor part)

95b is two holds beam sensor portion (sensor part)

Embodiment

According to the following drawings in detail this case working of an invention mode is described in detail.

(1) the 1st embodiment

(1-1) the entirety structure of analytical equipment

In FIG, 1 represents analytical equipment of the present invention.It comprises: viscosity sensor 4a, have sensor part 3 shear force sensor 4 that covers by elastomer layer 2; Camera head 5, for measuring surface velocity (aftermentioned) as the fluid of viscosity determination object and fluid level (aftermentioned); Amplifier 6, amplifies the output signal from sensor part 3; Signal conditioning package 7, is electrically connected with camera head 5 and amplifier 6.

At this, viscosity sensor 4a comprises stream forming portion 9 and base station 10, is provided with shear force sensor 4 in stream forming portion 9.Stream forming portion 9 is arranged on base station 10 to make the flow path surfaces 2a of shear force sensor 4 relative to the mode of horizontal line inclination inclination angle theta, and fluid is because flowing down from focusing on this flow path surfaces 2a.In addition, in FIG, the axle parallel with the flow path surfaces 2a of shear force sensor 4 is set as x-axis, and fluid flows in the x direction along flow path surfaces 2a.

In reality, this stream forming portion 9 is provided with the rectangular plate portion 12 be made up of such as acrylic panel, be provided with along the upper end in this plate portion 12 and both sides be made up of such as acrylic panel wall portion 13a, 13b, 13c, plate portion 12 is formed the rectangular stream forming region ER1 surrounded by these wall portion 13a, 13b, 13c.Further, at this stream forming region ER1 of stream forming portion 9, shear force sensor 4 is provided with.

In addition, in stream forming portion 9, be provided with discharge opening 15 in the central break-through of the wall portion 13a arranged along the upper end in plate portion 12, fluid supply apparatus 17 is connected to this discharge opening 15 by flexible pipe 16.In stream forming portion 9, when injecting fluid by fluid supply apparatus 17, fluid will from discharge opening 15 spue shear force sensor 4 elastomer layer 2 flow path surfaces 2a.Thus, on elastomer layer 2, the fluid spued from the discharge opening 15 of wall portion 13a flows down along plane flow path surfaces 2a, can by the flow path surfaces 2a in sensor part 3.

Shear force sensor 4 comprises: the sensor part described later 3 being arranged at the assigned position in the plate portion 12 of stream forming portion 9; And the elastomer layer 2 be formed in the mode of overlay portion 12 and sensor part 3 on the ER1 of flow passage region.Elastomer layer 2 has flexibility, and fluid flows being exposed on outside flow path surfaces 2a, by the shear stress (power acted on the x direction parallel with flow path surfaces 2a) of fluid now generated, equally in the x direction elastic deformation can occur.

In reality, when this embodiment, elastomer layer 2 is with such as PDMS (polydimethylsiloxane; Dimethyl silicone polymer) etc. silicone rubber as host, by 2 kinds of liquid being formed by this PDMS and hardening agent with the blending ratio of regulation (such as, it is made to solidify while 20:1) mixing regulates flexibility, by the shear stress of fluid flowed down from flow path surfaces 2a, produce elastic deformation in x direction.In addition, as shown in Figure 2, at elastomer layer 2, the flow path surfaces 2a that fluid F L flows down is formed as plane, fluid F L from flow path surfaces 2a equably, flow to the lower ending opening portion of stream forming portion 9 by the flow path surfaces 2a in sensor part 3.

Due to the shear stress of the fluid F L of generation when fluid F L flows down along flow path surfaces 2a, the direction (x direction) that elastomer layer 2 entirety flows to fluid F L is moved, make the angle of the sensor part 3 of cantilevered construction be shifted thus, and the resistance value R of the piezoelectric electro resistance layer (aftermentioned) in this sensor part 3 can be made to change.Therefore, when setting the resistance value of the piezoelectric electro resistance layer before displacement as R, when fluid flows down at flow path surfaces 2a, sensor part 3 is shifted by the load given because elastomer layer 2 is shifted, and this is carried out measuring as resistance change rate Δ R/R.

At this, if the shear stress that fluid F L gives shear force sensor 4 is τ, viscosity coefficient (also can be called viscosity at this) is μ, as shown in Figure 3, the flow velocity (hereinafter referred to as surface velocity) on the surface of the fluid F L that flow path surfaces 2a flows along x direction is U, by the fluid F L that extends in the y-axis intersected vertically with x-axis apart from the height (following, to be referred to as fluid high) of flow path surfaces 2a for h time, set up the relation be shown below.

[formula 1]

$\mathrm{\τ}=\frac{2\mathrm{\μ}}{h}U$

Therefore, in analytical equipment 1, shear stress τ is calculated according to the resistance change rate Δ R/R at sensor 3, determine the surface velocity U of the fluid F L in flow path surfaces 2a flowing in addition, determine the fluid level h on flow path surfaces 2a more in addition, viscosity coefficient μ can be calculated at signal conditioning package 7 thus, user can be made to judge that fluid F L has great viscosity according to this viscosity coefficient μ.In addition, about the calculating of shear stress τ, be illustrated in " detailed construction of (1-2) sensor part ".

Spent the measuring distance (20 [mm]) that how long have passed through and cross over sensor part 3 according to fluid F L, utilize formula speed (superficial velocity)=measurement distance/time, gauging surface flow velocity U is.In reality, in analytical equipment 1, made a video recording from wall portion 13b side convection cell FL by camera head 5, by signal conditioning package 7, the image data obtained from camera head 5 is analyzed, surface velocity U and fluid level h can be determined thus.In reality, as shown in Figure 2, camera head 5 is made up of such as video camera, and be adjusted to and can make a video recording from fluid F L side (with x-axis and the perpendicular side, z-axis direction of y-axis) convection cell FL, be positioned at field range to make the fluid F L flowed in the measuring distance of flow path surfaces 2a.

Signal conditioning package 7 is according to the camera data received from camera head 5, measure the unique points such as the bubble of the fluid F L in visual field and need how long to come mobile test distance, further, surface velocity U can be calculated according to this measurement result and the measuring distance preset.

In addition, when gauging surface flow velocity U, even the fluid F L owing to having same viscosity, also can change flow path surfaces 2a according to surface velocity U, so the fluid level h on flow path surfaces 2a is also very important.At this, camera head 5 is made a video recording from wall portion 13b side to the fluid F L flowed at flow path surfaces 2a, is analyzed this camera data by signal conditioning package 7, can measure the fluid level h of the fluid F L of distance flow path surfaces 2a thus.

Further, as the account form of fluid level h, can make in any way.Such as, can regulate the fluid level h that the flow of the fluid F L spued from fluid supply apparatus 17 to flow path surfaces 2a presets to make it reach, fluid level h can prestore as constant by signal conditioning package 7.In addition, in this case, camera head 5 also only for gauging surface flow velocity U, can be made a video recording from the unique point of top side (side, y-axis direction) convection cell FL.

Like this, analytical equipment 1 is in signal conditioning package 7, according to the shear stress τ of fluid F L, the surface velocity U of fluid F L and fluid level h, viscosity coefficient μ is calculated from above-mentioned formula 1, and by display part etc., this viscosity coefficient μ is informed user, user can be made thus to judge the viscosity of fluid F L.

(1-2) detailed construction of sensor part

Next, the detailed construction of the sensor part 3 of shear force sensor 4 is described.As shown in Figure 4, the sensor part 3 of shear force sensor 4 has the abutment portion 20 be fixedly installed in the plate portion 12 of stream forming portion 9, and the one end bending to the cantilever portion 21 of L-shaped is fixed on this base station 20.

Cantilever portion 21 comprises: base portion 21a, is arranged on one end, and is fixed in abutment portion 20; A pair turning point 21b, is connected with base portion 21a; And flat movable part 21c, be arranged on the other end, be connected to base portion 21a by turning point 21b.When not applying external force, by bending turning point 21b, movable part 21c can keep the state erected relative to plate portion 12 less perpendicular.

Cantilever portion 21 has the Si upper strata 23 of the L-shaped formed by Si film, is formed with the piezoelectric electro resistance layer 24 of film-form on the surface on this Si upper strata 23, and the piezoelectric electro resistance layer 24 of base portion 21a and movable part 21c is provided with Au/Ni film 25,26.In addition, abutment portion 20 is provided with Si lower floor 27, in the assigned position of Si lower floor 27, across SiO ₂layer 28 is provided with the base portion 21a of cantilever portion 21.

In cantilever portion 21, because Si upper strata 23 and piezoresistive layer 24 are formed as the film-form of nm unit quantity, turning point 21b is formed as elongated rectangle, so, when applying external force from elastomer layer 2, movable part 21c is subject to this external force, and can topple over centered by the turning point 21b of sweep easily, the piezoelectric electro resistance layer 24 of turning point 21b plays the effect as piezoelectric element.

In the case of this embodiment, because of cantilever portion 21 except the 21b of turning point, turning point cover by Au/Ni film 25,26, so, can only the distortion of turning point 21b be measured as resistance value.That is, in this cantilever portion 21, when deforming because of external force turning point 21b, the lattice of turning point 21b will produce distortion, the charge carrier of semiconductor and mobility change, and resistance value is changed.Like this, in sensor part 3, potential difference (PD) is given between the electrode (Au/Ni film 25) of the end points of the turning point 21b of bipod structure, the resistance change rate Δ R/R of measurement turning point 21b, can be recorded the power (the shear stress τ from fluid) acted on cantilever portion 21 by this measurement result.

In addition, in this cantilever portion 21, wiring 29 is electrically connected to the Au/Ni film 25 being arranged on base portion 21a, and, in order to measure the resistance change rate Δ R/R of turning point 21b, this wiring 29 is electrically connected with utilizing the amplifier 6 of Wheatstone bridge (Wheatstonebridge) circuit.

In addition; the diaphragm 30 comprising Parylene (trade name Parylene) that sensor part 3 is about 1 μm by the thickness in overlay portion 12 covers; by this diaphragm 30; both can maintain the erectility of the movable part 21c of cantilever portion 21, and movable part 21c correspondingly can have been toppled over it when displacement occurs elastomer layer 2 again.

(1-3) manufacture method of shear force sensor and viscosity sensor

Below, the manufacture method of above-mentioned shear force sensor 4 is described.As shown in Figure 5A and 5B, prepare from surface according to Si upper strata 23, SiO ₂layer 28 and stacked SOI (SiliconOnInsulator) substrate 32 of the order of Si lower floor 27.In addition, this SOI substrate 32 is placed in HF (hydrogen fluoride) solution and cleans, remove the natural oxide film formed on SOI substrate 32 surface.

After this, at once the surperficial spin coating N-shaped impurity reagent P-59230 (ODC, Tokyo should be changed) of SOI substrate 32, and use thermal oxidation furnace to carry out thermal diffusion to this SOI substrate 32, make impurity be doped to the thickness of below 100nm.As shown in Figure 6A and 6B, Si upper strata 23 forms piezoelectric electro resistance layer 24.After this, carry out patterning by the shape of regulation, this Au/Ni layer is used as mask, by DRIE (DeepReactiveIonEtching: deep reaction ion etching), piezoelectric electro resistance layer 24 and Si upper strata 23 is etched.Thus, as shown in figs. 7 a and 7b, in SOI substrate 32, form Au/Ni film 26 at the base portion forming region 33a as base portion 21a, and expose piezoelectric electro resistance layer 24 at region, the turning point 33b as turning point 21b, form Au/Ni film 26 at the movable part region 33c as movable part 21c.

After this, retain base portion forming region 33a, by DRIE, the Si lower floor 27 of the vertical lower being positioned at turning point forming region 33b and movable part region 33c is etched, re-use HF (fluoric acid) gas removing SiO ₂layer 28, can form following state thus as shown in Figure 8A and 8B: the turning point 21b and the movable part 21c that configure cantilever portion 21 at the open area 27a of Si lower floor 27, and using movable part 21c as free end.

Then, the stream forming portion 9 that formed of the bonding acrylic panel of preparation bonding agent in addition, as shown in Figure 9, after by bonding agent the sensor portion 3 being fixed to this stream forming portion 9, magnetic field (direction of arrow B this figure) is applied along the y-axis direction from the below in plate portion 12, utilize magnetic field, free end and the movable part 21c that can make to have Au/Ni film 26 are shifted in the y-axis direction.Thus, cantilever portion 21 becomes following state: turning point 21b bends, and movable part 21c erects, and the face of this movable part 21c is relative to x-axis direction arranged perpendicular.In addition, magnetic field utilizes neodium magnet (NE009, two or six make institute) to apply.

In this condition, as shown in Figure 4, in plate portion 12 and sensor part 3, form by CVD the diaphragm 30 that the thickness be made up of Parylene is 1 μm, the state that diaphragm 30 can be utilized to maintain movable part 21c erect.Then, the abutment portion 20 of sensor part 3 arranges connecting wiring 29 on the Au/Ni film 25 making electrode, this wiring 29 is connected on amplifier 3.

Subsequently, at the stream forming region ER1 (Fig. 1) surrounded by the wall portion 13a of stream forming portion 9,13b, 13c, formed sensor part 3 is all covered, flow path surfaces 2a is the elastomer layer 2 of flat condition.Be specially, use polydiethylsiloxane (Polydimethylsiloxane (PDMS:(strain) DowCorningTorayCo., Ltd. company manufactures, SILPO184)) as the resilient material forming elastomer layer 2.In the case, first the host of PDMS and hardening agent are mixed according to the ratio of such as weight ratio 20:1, make the resilient material for the formation of elastomer layer 2.In addition, at this, in order to improve the fluid F L viscosity measurement precision at shear force sensor 4, such as, the resilient material being 10:1 with host and the weight ratio of hardening agent is compared, and preferably uses the resilient material of the weight ratio 20:1 that Young modulus is low.

Then, (awatori refines Taro ARE-250 to use centrifugal defoamer, shinki) PDMS is stirred, this PDMS is the resilient material being mixed with host and hardening agent mixing, and after using exsiccator to carry out deaeration operation, be poured into the stream forming region ER1 surrounded by the wall portion 13a of stream forming portion 9,13b, 13c, this stream forming portion 9 put into exsiccator again and carries out deaeration.After this, serviceability temperature remains on the oven cooking cycle 40 minutes of 70 DEG C, the PDMS as resilient material is solidified and forms elastomer layer 2, thus, can form shear force sensor 4 at the stream forming region ER1 of stream forming portion 9.

In addition, now, if stream forming portion 9 run-off the straight, then the flow path surfaces 2a of elastomer layer 2 does not become plane and is difficult to guarantee same flowing, so, in order to ensure flow path surfaces 2a not run-off the straight, toast time preferably every 3 minutes by its 90-degree rotation.Finally, under the state making the flow path surfaces 2a of elastomer layer 2 tilt according to the tiltangleθ of regulation relative to horizontal line, stream forming portion 9 is fixed on base station 10, viscosity sensor 4a can be made thus.

(1-4) about the relation between the resistance change rate of shear force sensor and shear stress

At this, the resistance change rate Δ R/R that the sensor part 3 of shear force sensor 4 is measured and from fluid F L shear stress τ between relation be described.As shown in Figure 10 A, because the thickness of movable part 21c and turning point 21b is small, so set the thickness of these movable parts 21c and turning point 21b as t [m], as shown in Figure 10 B, if the total length of movable part 21c and turning point 21b is L ₁the plate of [m], movable part 21c is long is L ₂the overall with of [m], movable part 21c for the wide load forces suffered by the front end of w [m], movable part 21c [beam] of b [m], the wherein pin of 1 turning point 21b be F [N], the Young modulus of movable part 21c [beam] is E [Pa], the piezoelectric modulus of cantilever portion 21 is π L when, the relation between the displacement ν of the front end of the cantilever portion 21 and resistance change rate Δ R/R of cantilever portion 21 is as follows.At this, the distortion of cantilever portion 21 can be set as being similar to the single order mode deformation singly holding beam, and can ignore other distortion.

[formula 2]

$\frac{\mathrm{\Δ}R}{R}=\frac{3{\mathrm{\π}}_{L}Etb(L_1+L_2)}{4\[(L_1^3-L_2^3)b+3L_2^{3}w\]}v$

In addition, when considering the distortion as the cantilever portion 21 of statically determinate beam problem, the displacement ν of the leading section in cantilever portion 21 caused by power F is as follows.

[formula 3]

$v=\frac{L_1^3}{3EI}F$

Wherein, I is the cross section second moment of movable part 21c [beam], can be tried to achieve by following formula.

[formula 4]

$I=\frac{{\mathrm{bt}}^3}{12}$

When using formula 3 and formula 4, above-mentioned formula 2 is shown below, and can be expressed as the relation between the loading F caused by shear stress τ of fluid F L and resistance change rate Δ R/R.

[formula 5]

$\frac{\mathrm{\Δ}R}{R}=\frac{3{\mathrm{\π}}_L{L}_1^3(L_1+L_2)}{\[(L_1^3-L_2^3)b+3L_2^{3}w\]t^2}F$

In addition, if the surface area of sensor part 3 is set to S [m ²], above-mentioned formula 5 can be as follows.

[formula 6]

$\frac{\mathrm{\Δ}R}{R}=\frac{3{\mathrm{\π}}_L{L}_1^3(L_1+L_2)S}{\[(L_1^3-L_2^3)b+3L_2^{3}w\]t^2}\mathrm{\τ}$

And then, at analytical equipment 1, by the thickness t [m] of cantilever portion 21, total length L1 [m], the long L2 of plate [m], overall with b [m], the wide w of pin [m], Young modulus E [Pa], piezoelectric modulus π L, surface area S [m ²] each constant be stored in signal conditioning package 7 in advance, the resistance change rate Δ R/R measured in sensor part 3 is delivered to signal conditioning package 7 via amplifier 6.Thus, signal conditioning package 7 can calculate shear stress τ according to these each constants relevant with cantilever portion 21 with at the resistance change rate Δ R/R that sensor part 3 measures.

After this, at signal conditioning package 7, based on the surface velocity U of fluid F L, the fluid level h on the flow path surfaces 2a determined in the flow path surfaces 2a flowing that determine according to the camera data from camera head and the shear stress τ drawn according to the resistance change rate Δ R/R in the sensor portion 3, viscosity coefficient (viscosity) μ of fluid F L can be calculated by above-mentioned formula 1.Utilize the notification means such as display part that this viscosity is informed to user, make it viscosity of convection cell FL analyze.

(1-5) action and effect

In above structure, at shear force sensor 4, sensor part 3 cover by elastomer layer 2, the resistance value of this sensor part 3 piezoelectric layer resistive layer 24 changes because turning point 21b deforms, and the plane flow path surfaces 2a of this elastomer layer 2 is configured to tilt by the tiltangleθ of regulation.

In addition, at this shear force sensor 4, sensor part 3 is applied in advance to the input piezoelectricity specified, in this condition, fluid F L flows into from top along the flow path surfaces 2a of elastomer layer 2.Thus, at this shear force sensor 4, as shown in Figure 11 A, fluid F L is erected at the cantilever portion 21 of the sensor part 3 in plate portion 12 before flowing into flow path surfaces 2a, flowed on flow path surfaces 2a by fluid F L, as shown in Figure 11 B, deform to the flow direction (x direction) of fluid F L because causing elastomer layer 2 from the shear stress τ of fluid F L, the distortion of this elastomer layer 2 conducts to cantilever portion 21, and cantilever portion 21 is on end toppled over to the flow direction of fluid F L.

At this, because elastomer layer 2 is formed by resilient material, this resilient material is the ratio mixing host of PDMS of the weight ratio specified and hardening agent and to make Young modulus lower, so, even if less from the shear stress τ of fluid F L, also be certain to deform towards applied shear stress τ direction, so cantilever portion 21 also can be made to topple over from the shear stress τ of fluid F L.

Thus, can be deformed by the turning point 21b of sensor part 3 at analytical equipment 1, the change of resistance value can be measured.At signal conditioning package 7, can according to the resistance change rate Δ R/R of sensor part 3, use above-mentioned formula 6 to calculate shear stress τ from fluid FL.

And then, at this analytical equipment 1, when to when such as multiple fluid FL compares, by making these fluid F L with identical traffic flow, can with reference to the difference of the shear stress τ as the measurement result from sensor part 3, user can be made to compare the viscosity difference of fluid F L, its result, can the viscosity of convection cell FL analyze.

In addition, at this analytical equipment 1, by making camera head 5 take fluid F L in flow path surfaces 2a flowing from the side, while the state of the fluid F L of the measuring distance of regulation is flow through in shooting, can photograph fluid F L and be positioned at how high fluid level h from flow path surfaces 2a.

Thus, at this analytical equipment 1, by analyzing from the camera data of this camera head 5, determining displacement and the traveling time of the fluid F L flowing through flow path surfaces 2a, surface velocity U when fluid F L flows through flow path surfaces 2a can be calculated according to these displacements and traveling time.

In addition, at this analytical equipment 1, camera head 5 is taken from the side of the fluid F L flowed at flow path surfaces 2a, and signal conditioning package 7 is analyzed the camera data obtained thus, can determine the fluid level h of the fluid F L in flow path surfaces 2a flowing.

Thus, at signal conditioning package 7, can based on the resistance change rate Δ R/R according to the fluid F L obtained from shear force sensor 4, the surface velocity U of fluid F L determined according to the camera data obtained from the camera head 5 and fluid level h of fluid F L, the viscosity coefficient μ (viscosity) of fluid F L is calculated according to above-mentioned formula 1, and then, viscosity coefficient can be informed to user, make it can confirm the viscosity size that fluid F L has.

In addition, shear force sensor 4 is covered by elastomer layer 2, and cantilever portion 21 becomes and is not exposed to outside state, thus can avoid the damage that is subject to because the materials such as fluid F L directly contact, thus can provide non-damageable shear force sensor 4.

According to above structure, be provided with: elastomer layer 2, by fluid F L in flow path surfaces 2a flowing, be shifted because of the shear stress from fluid F L; And sensor part 3, cover by this elastomer layer 2, have and be shifted and the movable part 21c of activity by elastomer layer 2.Thus a kind of analytical equipment 1 can be provided, this analytical equipment 1 is different from traditional rotary viscosimeter of the viscosity measuring fluid according to viscosity resistivity, can analyze according to the variable condition convection cell FL of movable part 21c, and employ non-existent new analytical approach in the past.

(1-6) confirmatory experiment

Then, prepare the analytical equipment 1 with the viscosity sensor 4a manufactured according to above-mentioned (manufacture method of (1-3) shear force sensor and viscosity sensor), carry out various confirmatory experiment.In reality, at viscosity sensor 4a, for about 2mm tetragonal sensor part 3 chip, employ the stream forming portion 9 that flow path width gets the abundant width of 30mm.In addition, in stream forming portion 9, the distance be arranged on by sensor 3 from lower ending opening portion is on the position of about the 40mm of about wall face height 5 times.In addition, in stream forming portion 9, in order to measure the steady flow of fluid F L, by from wall portion 13a to the length setting of the stream forming region ER1 in lower ending opening portion be 200mm.Further, stream forming portion 9 is arranged on the base station 10 of inclination 45 degree, and flow path surfaces 2a is tilted about 45 degree.

In addition, be that the calculating of shear stress τ is easy to Newtonian fluid as being used as the fluid F L of sample, and employ the liquid-silicone oil (KF-96-100cs, KF-96H-3 ten thousand cs, SHIN-ETSU HANTOTAI's silicone) of adjustable tack.Now, due to viscosity coefficient μ is set as parameter, so by two kinds of silicone oil phase mixing with different viscosities coefficient are carried out adjusting viscosity coefficient μ.In addition, kinetic viscosity 100 [cs], the density 0.965 × 10 of KF-96-100cs ³[kg/m ³], viscosity coefficient μ is 9.65 × 10 ^-2[Pa ﹒ s].In addition, the kinetic viscosity of KF-96H-30000cs is 30000 [cs], density is 0.976 × 10 ³[kg/m ³], viscosity coefficient μ is 29.28 [Pa ﹒ s].

At this, as the fluid F L being carried out viscosity analysis by analytical equipment 1, be conceived to the food that viscosity domain is 0.1 ~ 1.0 [Pa ﹒ s], above-mentioned two kinds of silicone oil phases mixing is carried out adjusting viscosity coefficient μ, prepares 4 kinds of sample fluid of various sample viscosity that viscosity coefficient μ is respectively 0.1 [Pa ﹒ s], 0.5 [Pa ﹒ s], 0.75 [Pa ﹒ s], 1.0 [Pa ﹒ s].In addition, two kinds of KF-96-100cs and the KF-96H-30000cs weight ratios (weight ratio KF-96-100cs:KF-96H-30000cs) used in the making of sample fluid are as shown in the table.

[table 1]

Make viscosity [Pa ﹒ s]	Weight ratio
		0.1	100：0
0.5	72：28
		0.75	65：35
1.0	60：40

In addition, at analytical equipment 1, when cantilever portion 21 is subject to loading, although resistance value can correspondingly change, the resistance change exported due to cantilever portion 21 is small, so, employ the amplifier 6 with Wheatstone bridge circuit when measuring.

At this, prepare that there is 12 [ml], internal diameter 15 [mm], basal area 177 [mm ²], injection tube inside is full of the fluid supply apparatus 17 of sample fluid, to be fixed on single shaft movable carrier table that figure do not show by injection tube and to drive this single shaft movable carrier table, the sample fluid in injection tube to be spued to flow path surfaces 2a from the discharge opening 15 (Fig. 1) of stream forming portion 9.Now, by driving single shaft movable carrier table with certain speed, the sample fluid of time per unit keeps a certain amount of to the discharge-amount on flow path surfaces 2a.

After this, in order to measure the surface velocity U of the sample fluid flowed on the flow path surfaces 2a of stream forming portion 9, using and camera is taken the sample fluid flowed at this flow path surfaces 2a as camera head 5.Now, as the mark of the surface velocity U of sample fluid, use the unique points such as the bubble formed on the surface of the sample fluid of flow path surfaces 2a flowing.In addition, at the wall portion 13b of stream forming portion 9, cross over sensor part 3 and draw a diatom at 20 [mm] interval every 5 [mm].The unique point of measurement sample fluid determines the surface velocity U of sample fluid by the time in this interval.In addition, 1 second can be divided into 30 frames to take by camera as used herein, so can obtain the measurement result of 1/30 second unit.

Now, the resistance change rate Δ R/R in sensor portion 3 is kept at signal conditioning package 7 in the future.After this, stop the video recording of camera in the moment making the sample fluid of the injection tube putting into fluid supply apparatus 17 all pour out, record from the resistance change rate Δ R/R of sensor part 3 respectively by each sample fluid and record a video from the image of camera.In addition, because the sensor part 3 in shear force sensor 4 is very fragile, so can not directly wiping flow path surfaces 2a.Therefore, the sample fluid flowing through flow path surfaces 2a next time is flowed 3 times at flow path surfaces 2a, and flushing flow road surfaces 2a, can not remain on flow path surfaces 2a to make the sample fluid of last time.

At this, the test result of the resistance change rate Δ R/R that the sensor part 3 from the plate portion 12 being fixed on stream forming portion 9 obtains, as shown in figure 12.From this result, flow path surfaces 2a starts banish after sample fluid after about 1.5 seconds, sample fluid have passed in sensor part 3.In addition, as the camera picture obtained from camera, obtain the result as shown in Figure 13 A ~ 13D.In addition, in 13A ~ 13D, dotted line DL1 represents the outline of sample fluid, and the inner side of this dotted line DL1 represents sample fluid.

In fig. 12, more than 0 [s] and the A being less than 1.5 [s] as shown in figure 13, for sample fluid is by the state before sensor part 3.In fig. 12, the B of 1.5 [s] as shown in Figure 13 B, for sample fluid begins through the moment in sensor part 3.In fig. 12, more than 1.5, [s] and the C being less than 3.25 [s] are as shown in fig. 13 c, for sample fluid is stablized by the state before in sensor part 3.In fig. 12, more than 3.25 [s] 5 [s] D below as illustrated in figure 13d, for sample fluid in sensor part 3 stably with constant a certain amount of flowing when.

Image according to Figure 13 C can be thought, the flow path width of the sample fluid in C is not fully expanded, and sample fluid not only goes up at flow direction (x direction) and also can be moved on the flow path width direction flowed to perpendicular to sample fluid.Therefore can think, be not the data of the shear stress of the pure flow direction based on sample fluid in the data in this C stage.When sample fluid reaches the state shown in Figure 13 D, can think that sample fluid is fully expanded in flow path width direction, flowing is in stable steady state.

At this, if the average resistance of the sensor part 3 under the sample fluid state shown in 13A is set as R _a, the average resistance of the sensor part 3 under the sample fluid state shown in Figure 13 D is set as R _d, then when sample fluid is in the state shown in Figure 13 D, effect and (R in sensor part 3 _d-R _a)/R _acorresponding power.

Wherein, R _aget the B shown in Figure 12 just before 1 second in mean value, R _dget the mean value in just rear 1 second of the C shown in Figure 12.After this, flow measurement to respective 5 stages of the 4 kinds of sample fluid result of resistance change rate Δ R/R as above, about the flow Q of each sample fluid and the relation at that time between the resistance change rate Δ R/R in shear force sensor portion 4, obtain result as shown in figure 14.In addition, carry out 3 this measurements, its variance is shown in Figure 14 with the form of error bar.Can confirm from the result shown in this Figure 14, the flow Q of sample fluid is more and viscosity is larger, and the resistance change rate Δ R/R of sensor part 3 just has higher tendency.

Afterwards, when confirming the relation between the surface velocity U of sample fluid and the flow Q of sample fluid, result is as shown in figure 15 obtained.In addition, analyze the image from camera, the unique points such as the bubble of mensuration fluid F L move the time Δ T required for 20mm, calculate surface velocity U=20/ Δ T [mm/s].Can confirm from the result shown in Figure 15: there is flow Q sample fluid larger, the tendency that surface velocity U also correspondingly increases.

Afterwards, for each sample fluid, to the surface velocity U on shear force sensor 4 and result that between the shear stress τ of each sample fluid calculated according to the resistance change rate Δ R/R from this shear force sensor 4, relation is verified, obtain result as shown in figure 16.Can confirm from the result shown in Figure 16, between the surface velocity U [m/s] in sample fluid and the shear stress τ from sample fluid at shear force sensor 4 (resistance change rate Δ R/R), there is proportionate relationship.

Further, measure the fluid level h of the various sample fluid at flow path surfaces 2a, according to formula 1, utilize surface velocity U, shear stress τ and fluid level h calculates viscosity coefficient μ.After this, the sample viscosity, mu during adjustment of the viscosity coefficient μ that this is calculated and each sample fluid ' between relation analyze, drawn result as shown in figure 17.Can confirm from the result shown in Figure 17, the viscosity coefficient μ calculated and sample viscosity, mu ' between there is corresponding relation, and can confirm, the optimum viscosity coefficient μ of sample fluid can calculated according to the surface velocity U measured by analytical equipment, shear stress τ and fluid level h.

2nd embodiment

In figure 18, the analytical equipment of the strip type of 35 expression the 2nd embodiments.Consist of and move in specified directions by means of only in fluid F L, just can record the viscosity of fluid F L.And achieve miniaturization so that user carries.In reality, this analytical equipment 35 has the main body 36 be made up of the bar-like member of elongated four side column shapes, a side 36a in four limits of this main body 36 is provided with shear force sensor 37, and, be provided with pressure transducer 38 at the other end 36b at right angles configured with a side 36a.

At this, in main body 36, shear force sensor 37 and pressure transducer 38 are co-located near the bottom lower than middle position.Therefore, by the container C A storing the fluid F L for analyzing viscosity, main body 36 being put near middle position, shear force sensor 37 and pressure transducer 38 just can be made simultaneously to immerse in fluid F L.

This analytical equipment 35, by making shear force sensor 37 and pressure transducer 38 to be configured at fore-and-aft direction (moving direction) x2 that under the state in fluid F L, at one end face 36b is relative with other end 36c upper mobile, thus as shown in Figure 19 of the cross section structure of the A-A ' part of expression Figure 18, fluid F L flows along another side 36a while abutting an end face 36b of main body 36.Therefore, at analytical equipment 35, shear force sensor 37 can be used to measure the shear stress of fluid F L coming from and flow along a side 36a, and, pressure transducer 38 can be used to measure pressure from fluid F L.

In reality, main body 36 is formed as, one side 36a and another side 36d is formed as not having irregular plane, in the recess 36e that a part of this side 36a is formed, have shear force sensor 37, flow path surfaces 2a and a side 36a of the elastomer layer 2 of this shear force sensor 37 form the same face.At this, in fluid F L, such as, when moving along fore-and-aft direction x2, also can flow at the flow path surfaces 2a of shear force sensor 37 (in Figure 19, showing for arrow FL1) along a side of main body and the fluid F L of another side flowing.

At this, can study as follows for the shear stress from fluid F L giving shear force sensor 37.At this, if fluid F L equally has higher viscosity with food, make the speed of main body 36 movement on fore-and-aft direction x2 slowly (Reynolds number of the flowing of generation is fully little, such as less than 1).Now, if with on shear force sensor 37 for benchmark, if the axle parallel with a side 36a is x-axis, the axle vertical with a side 36a is that y-axis is to set coordinate, then near the flow path surfaces 2a of shear force sensor 37 (boundary layer), velocity gradient is as shown in FIG. 20 A produced.The friction force being applied to the flow path surfaces 2a of shear force sensor 37 due to the flowing of this fluid F L becomes the shear stress represented in following formula.

[formula 7]

$\mathrm{\τ}\left(x\right)=\mathrm{\μ}{\left(\frac{\∂u}{\∂y}\right)}_{y=0}$

At this, τ (x) is for being applied to the shear stress on the flow path surfaces 2a of shear force sensor 37, and u is the flow velocity in the x-axis direction generated on flow path surfaces 2a, and μ is the viscosity (viscosity coefficient) of fluid F L.At this, according to the Blasius equation formula relevant with the flowing velocity of the fluid F L on flow surface 2a, the flow velocity in the x-axis direction on flat board is as follows.

[formula 8]

u＝U·f′(η)

[formula 9]

$\mathrm{\η}=\frac{y}{\mathrm{\δ}}$

Wherein, U is the surface velocity that flow velocity outside boundary layer becomes certain region; η represents that the similar argument of similar shape is got in the flowing velocity distribution position kept off in x-axis of fluid F L on flow path surfaces 2a; δ is the thickness (distance from flow path surfaces 2a reaching certain position to velocity distribution) in boundary layer.According to Na Weiye-RANS formula, the thickness in the boundary layer that flow path surfaces 2a generates is time dependent function as follows, can calculate according to the position of the surface velocity of constant flow and shear force sensor 37.Wherein, ρ is the density of liquid.

[formula 10]

$\mathrm{\δ}\≈\sqrt{\frac{\mathrm{\μ}}{\mathrm{\ρ}}t}\≈\sqrt{\frac{\mathrm{\μx}}{\mathrm{\ρU}}}$

According to above-mentioned formula 7 ~ formula 9, fluid F L can be expressed as follows shear stress τ (x) that the flow path surfaces 2a of shear force sensor 37 applies.Wherein, if k is proportionality constant.

[formula 11]

$\mathrm{\τ}\left(x\right)=\mathrm{\μ}{\left(\frac{\∂u}{\∂y}\right)}_{y=0}=\mathrm{\μ}\left(\frac{\∂u}{\∂\mathrm{\η}}\right){\left(\frac{\∂\mathrm{\η}}{\∂y}\right)}_{y=0}=k\sqrt{\frac{{\mathrm{\μ\ρU}}^3}{x}}$

On the other hand, shown in can being expressed as the power F in the pressure transducer 38 applied pressure direction be located on an end face 36b of main body 36.Wherein, Q is the traffic flow of each unit interval to the fluid F L that pressure transducer 38 applies.A is the surface area (Figure 20 B) of pressure transducer 38.

[formula 12]

F＝ρQU＝ρU ²A

According to above-mentioned formula 11 and formula 12, shown in the viscosity, mu of fluid can be expressed as.

[formula 13]

$\mathrm{\μ}=\frac{1}{k^2}\frac{x}{\mathrm{\ρ}}\frac{{\mathrm{\τ}}^2}{U^3}=\frac{1}{k^2}x\frac{{\mathrm{\τ}}^2}{\sqrt{\frac{F^3}{{\mathrm{\ρA}}^3}}}=\frac{1}{k^2}x\sqrt{\mathrm{\ρ}}\frac{{\mathrm{\τ}}^2}{P^{\frac{3}{2}}}=K\frac{{\mathrm{\τ}}^2}{P^{\frac{3}{2}}}$

[formula 14]

$K=\frac{1}{k^2}x\sqrt{\mathrm{\ρ}}$

Wherein, if P is the pressure of the fluid F L be applied to before pressure transducer 38, K is proportionality constant.As shown in Equation 14, although proportionality constant K comprises these 2 variablees of density p of sensor part (aftermentioned) the position x and fluid F L of shear force sensor 37, but, the sensor part position of shear force sensor 37 can uniquely be determined, and, because measurement object is defined as food, the density of most viscosity material for testing is all about 1.0, so density p can be treated to approximate constant.

Therefore, in the analytical equipment 35 of the 2nd embodiment, as shown in the result of above-mentioned formula 13, pressure transducer 38 is set by the end face 36b in main body 36, and shear force sensor 37 is set at a side 36a of main body 36, viscosity (viscosity coefficient) μ of fluid F L can be measured.

In addition, as shown in Figure 4, shear force sensor 37 has the structure identical with the shear force sensor 4 of above-mentioned 1st embodiment, has following structure: sensor part 3 is arranged in plate portion 12, and elastomer layer 2 is arranged to cover this sensor part 3.In this sensor part 3, cantilever portion 21 is with the form configuration of erectting relative to a side 36a of main body 36, and the face of the movable part 21c of this cantilever portion 21 is relative to fore-and-aft direction x2 arranged perpendicular (Fig. 4).

The elastomer layer 2 in covering sensor portion 3 is made up of the resilient material same with above-mentioned 1st embodiment, and be exposed to outside flow path surfaces 2a and be formed as plane, a side 36a of this flow path surfaces 2a and main body 36 forms the same face.On elastomer layer 2, because main body 36 moves on fore-and-aft direction x2, fluid F L flows, when the shear stress from this fluid F L is applied to flow path surfaces 2a along flow path surfaces 2a, correspondingly deform, and sensor part 3 is toppled on fore-and-aft direction x2.Therefore, at sensor 3, the amplitude of toppling over of cantilever portion 21 changes according to the size of the shear stress from this fluid F L, and the resistance value of piezoelectric electro resistance layer 24 also can correspondingly change.

At this, the built-in information process unit (not shown) be made up of CUP etc. in main body 36, by this information process unit, can according to the resistance change rate Δ R/R from shear force sensor 37, the above-mentioned formula 6 of reason calculates the shear stress τ from fluid FL.In addition, this information process unit receives the pressure P from fluid F L being applied to pressure transducer 38 from pressure transducer 38, according to above-mentioned formula 13, can utilize the shear stress τ and pressure P that measure, calculate viscosity coefficient μ.

In above structure, at analytical equipment 35, shear force sensor 37 and pressure transducer 38 are immersed in fluid F L, in this case, move on fore-and-aft direction x2 by making main body 36, thus the sensor part 3 of shear force sensor 37 deforms, resistance change rate Δ R/R can be measured thus.

In addition, at this analysis device 35, by information process unit built-in in main body 36, according to the resistance change rate Δ R/R of sensor part 3, use above-mentioned formula 6 can calculate shear stress τ from fluid FL.And then user can be allowed according to the viscosity of the resistance change rate Δ R/R analysing fluid FL from shear force sensor 37.

In addition, at this analytical equipment 35, owing to being provided with pressure transducer 38, when making main body 36 move along fore-and-aft direction x2 in fluid F L, pressure transducer 38 can measure the pressure P be subject to from fluid F L.Thus, in analytical equipment 35, by being located at the information process unit of main body 36 inside, according to above-mentioned formula 13, the pressure P utilizing the shear stress τ of these fluid F L and be subject to from fluid F L, can calculate viscosity coefficient (viscosity) μ of fluid F L.And then viscosity coefficient μ carried out sound notification or be shown in display part to inform to user, user can recognize the viscosity degree that fluid F L has.

In addition, the applicable various structure of above-mentioned pressure transducer 38, such as there is the 3rd sensor part 50c (being described in fig. 24), 3rd sensor part 50c has and has two cantilever portion 51 of holding beam described in ((3) the 3rd embodiment) described later, as the 3rd sensor part 50c can use the pressure transducer that covers by elastomer layer.

According to above structure, be provided with: elastomer layer 2, flowed on flow surface 2a by fluid F L, be shifted by the shear stress from fluid F L; And sensor part 3, cover by this elastomer layer 2, there is the movable part 21c of activity because this elastomer layer 2 is shifted.By arranging elastomer layer 2 and sensor part 3, be different from the rotary viscosimeter in the past of the viscosity according to viscous resistance measurement fluid, the viscosity of a kind of variable condition convection cell FL according to movable part 21c can be provided to analyze, and use the analytical equipment 35 of non-existent new analytical approach in the past.

In addition, in this analytical equipment 35, by arranging the sensor part 3 that covered by elastomer layer 2 and the pressure transducer 38 for measuring the pressure be subject to from fluid F L, can according to the measurement result obtained from sensor part 3 and the pressure measurement result obtained from pressure transducer 38, calculate the viscosity coefficient μ of fluid F L, further, according to this viscosity coefficient μ, the viscosity size that fluid F L has can be analyzed.

(3) the 3rd embodiments

In figure 21, the portable analytical equipment of 41 expression the 3rd embodiments.This analytical equipment 41 is different from the analytical equipment 35 of the 2nd embodiment, and the mixing direction of convection cell FL has no particular limits, and main body 42 is moved to any direction in fluid F L, can measure the viscosity of fluid F L.

In reality, this analytical equipment 41 has the main body 42 formed by columniform bar-like member, peripheral surface 42a near the bottom of this main body 42 is provided with multiple shear force sensor 44a, 44b ... in the present embodiment, as shown in figure 22, in main body 42, across arranging 4 shear force sensors 44a, 44b, 44c, 44d at equal intervals, main body 42 is moved in specified directions in fluid F L, fluid F L flows along the peripheral surface 44a of main body 42 thus, further, the flow path surfaces 45a of shear force sensor 44a, 44b, 44c, 44d also there is fluid F L flow.At this, because these multiple shear force sensor 44a, 44b, 44c, 44d all have same structure, therefore only emphatically the structure of the shear force sensor 44a of one of them is described.

As shown in figure 23, shear force sensor 44a has the elastomer layer 45 of the rectangular shape of sensor group 46 and covering sensor group 46, can measure the shear stress from fluid F L be applied to respectively on 3 directions of the x-axis, y-axis and the z-axis that mutually intersect vertically in sensor group 46.Sensor group 46 is configured to, abutment portion 49 is provided with the 1st sensor part 50a of the external force that detection acts in the direction of the x axis, detect the 2nd sensor part 50b of the external force acted on the y-axis direction perpendicular with x-axis direction, detect with the 3rd sensor part 50c of external force that acts on the perpendicular z-axis direction in x-axis direction and y-axis direction, these the 1st sensor part 50a, the 2nd sensor part 50b and the 3rd sensor part 50c are configured in abutment portion 49 across the interval of regulation mutually.

As shown in figure 24,1st sensor part 50a and the 2nd sensor part 50b have the structure identical with the sensor part 3 of above-mentioned 1st embodiment, have by the base portion 21a being fixed on abutment portion 49, a pair turning point 21b be connected with base portion 21a and the cantilever portion 21 that forms as the movable part 21c of free end, the turning point 21b constructed by bipod, movable part 21c can keep the state erected relative to abutment portion 49.In this case, vertically arrange relative to x-axis direction at the face of the 1st sensor part 50a, movable part 21c, by the shearing sensing stress from fluid F L applied in the direction of the x axis, movable part 21c can topple over to x-axis direction.

In addition, at the face of the 2nd sensor part 50b, movable part 21c relative to y-axis direction arranged perpendicular, by the shearing sensing stress from fluid F L applied in the y-axis direction, movable part 21c can topple over to y-axis direction.On the other hand, in contrast, the 3rd sensor part 50c is different from these the 1st sensor 51a and the 2nd sensor part 50b, have the cantilever portion 51 of plane, the plane movable part 51c of this cantilever portion 51 is arranged to abutment portion 49 substantially in the same face.

In this cantilever portion 51, be respectively arranged with laminal turning point 51b at the relative both ends of movable part 51c.When the shear stress from fluid F L is applied to flow path surfaces 2a from z-axis direction, movable part 51c bear the power of elastomer layer 45 from distortion, thus this movable part 51c can be shifted in the z-axis direction.Thus, at the 3rd sensor part 50c, according to the size of the shear stress applied in the z-axis direction from fluid F L, the displacement amplitude of cantilever portion 51 changes, and the resistance value of piezoelectric electro resistance layer correspondingly changes.

Like this, at these the 1st sensor part 50a, the 2nd sensor part 50b and the 3rd sensor part 50c, when applying external force from elastomer layer 45, corresponding movable part 21c, 51c bear respectively from 3 direction of principal axis externally applied forces, be shifted by each turning point 21b, 51b, can only the distortion of turnover 21b, 51b be measured as resistance value by the piezoelectric electro resistance layer of this turning point 21b, 51b.Namely, in these the 1st sensor part 50a, the 2nd sensor part 50b and the 3rd sensor part 50c, potential difference (PD) is given between the electrode of the end points of turning point 21b, 51b, the resistance change rate Δ R/R of measurement turning point 21b, 51b, can measure according to this measurement result the power (the shear stress τ from fluid F L) acted on respectively in cantilever portion 21,51.

As shown in figure 22, analytical equipment 41 is configured to: when moving to any direction under the state immersing in fluid F L making main body 42, such as, the direction of making a concerted effort calculated according to the output of two place shear force sensor 44b, the 44c facing fluid F L flowing (flowing of convection cell FL reacts) and size, measurement is at the pressure P of the flow path surfaces 45a of main body 42 and the shear stress τ from fluid F L of flow path surfaces 45a, derive the relation identical with above-mentioned formula 13 according to its size, measure viscosity coefficient μ.

In reality, as marked same tag in the part identical with Fig. 4 Figure 25 shown in, main body 42 is moved in fluid F L, when fluid F L flows in the y-axis direction, such as, the flow path surfaces 45a of the elastomer layer 45 of shear force sensor 44b also has fluid F L to flow, and according to from the shear stress suffered by this fluid F L, the elastomer layer 45 of this shear force sensor 44b can move at the direction y1 of fluid F L flowing and be shifted.Thus, in sensor group 46, the cantilever portion 21 of the 1st sensor part 50a that movable part 21c erects relative to flow path surfaces 2a and the 2nd sensor part 50b is toppled over along with the displacement of elastomer layer 45, and therefore, the resistance value of the 1st sensor part 50a and the 2nd sensor part 50b can change.And, according to shear force sensor 4 illustrated in above-mentioned (manufacture method of (1-3) shear force sensor and viscosity sensor) and manufacture method thereof, the shear force sensor 44b shown in Figure 25 can be made.

On the other hand, as shown in figure 26, main body 42 is moved in fluid F L, such as, when fluid F L flows in the z-axis direction, in shear force sensor 44b, the flow path surfaces 45a of fluid F L contact resilient body layer 45, due to the pressure P be subject to from this fluid F L, the elastomer layer 45 of this shear force sensor 44b is by from the conquassation to the inside of z-axis direction, and this elastomer layer 45 can be shifted on the direction z1 of fluid F L flowing.Thus, in sensor group 46, the cantilever portion 51 with the 3rd sensor part 50c of the movable part 51c parallel with flow path surfaces 2a is subject to the external force from elastomer layer 45, thus movable part 51c caves in, therefore, can change in the resistance value of the turning point 51b bent.

At this, in analytical equipment 1, consider the nowed forming of fluid F L when main body 42 is moved in fluid F L, shear force sensor 44a, 44b, 44c (Figure 22) is configured everywhere, according to facing fluid F L flowing (namely, the flowing of convection cell reacts) the output as obtained according to shear force sensor 44b, the 44c respectively from two, try to achieve the direction of making a concerted effort and the size of fluid F L, the direction can made a concerted effort according to these and size, measure the pressure P from fluid F L and the shear stress τ from fluid F L.

After this, at analytical equipment 41, such as, the pressure P from fluid F L obtained according to shear force sensor 44b, the 44c from two and the shear stress τ from fluid F L, apply the relational expression of above-mentioned formula 13, can record the viscosity coefficient μ of fluid F L.

In said structure, at this analytical equipment 41, the peripheral surface of main body 42 arranges multiple shear force sensor 44a, 44b, 44c, 44d, the sensor group 46 that can measure the shear stress of 3 axis is set at each shear force sensor 44a, 44b, 44c, 44d respectively.In this analytical equipment 41, these shear force sensors 44a, 44b, 44c, 44d are immersed in fluid F L, such as, as shown in figure 21, even if under the state that the length direction of main body 42 remains vertical, main body 42 is moved horizontally by user, also can by the 1st sensor part 50a shown in Figure 23, the 2nd sensor part 50b and the 3rd sensor part 50c, the face of movable part 21c measures shear stress τ from fluid F L perpendicular to the 1st sensor part 50a that x-axis direction is arranged.In addition, meanwhile, at this analysis device 41, pressure P from fluid F L can be measured by the face of movable part 51c perpendicular to the 3rd sensor part 50c that z-axis direction configures.Thus, at this analysis device 41, according to the shear stress τ obtained by sensor group 46 and pressure P, viscosity coefficient μ can be calculated by above-mentioned formula 13.

In addition, in analytical equipment 41, by these shear force sensors 44a, 44b, 44c immerses in fluid F L, such as, as shown in figure 27, even if at the length direction of main body 42 from the state of vertical direction inclination certain angle θ 1, main body 42 is moved along this angle direction by user, also can by the 1st sensor part 50a shown in Figure 23, in 2nd sensor part 50b and the 3rd sensor part 50c, the 2nd sensor part 50b measurement that the face of the 1st sensor part 50a that the face of movable part 21c configures perpendicular to x-axis direction and movable part 21c is arranged perpendicular to y-axis direction is from the shear stress τ of fluid F L.In addition, meanwhile, at this analysis device 41, the 3rd sensor part 50c that can be configured perpendicular to z-axis direction by the face of movable part 51c measures from the pressure P of fluid F L.Thus, at this analysis device 41, according to the shear stress τ obtained by sensor group 46 and pressure P, viscosity coefficient μ can be calculated by above-mentioned formula 13.

As above, in analytical equipment 41, the direction of stirred fluid FL does not have special provision, by means of only make main body 42 in fluid F L in any direction on move, shear stress τ and the pressure P of fluid F L can be measured by sensor group 46, the viscosity coefficient μ of fluid F L can be calculated by these measurement results, and then, viscosity coefficient μ is informed user, makes it can confirm the viscosity size that fluid F L has.

(4) the 4th embodiments

In Figure 28, the portable analytical equipment of 55 expression the 4th embodiments.The difference of the analytical equipment 35 of this analytical equipment 55 and the 2nd embodiment is, the shape of main body 52 be Y-shaped a bit, and be provided with 2 shear force sensors 37 a bit.

Now, main body 52 has the thickness of regulation, is two strands of the 1st foot 54a and the 2nd foot 54b, is formed as broadening along with away from bottom between these the 1st foot 54a and the 2nd foot 54b from the end portion of bar-shaped Handheld Division 53.In addition, at the 1st foot 54a, at the inner face 52b relative with the 2nd foot 54b, be arranged 2 shear force sensors 37 in the vertical, and 52a is provided with pressure transducer 38 before perpendicular with this inner face 52b.

This analytical equipment 55 is configured to, the shear force sensor 37 be located in main body 52 and pressure transducer 38 are immersed in fluid F L, in this condition, by means of only making main body 52 upper mobile at fore-and-aft direction (moving direction) x2, the viscosity coefficient μ of fluid FL can just be measured.At this, the structure that shear force sensor 37 has with the above-mentioned the 1st, the 2nd embodiment is same, namely have following structure: sensor part 3 is arranged on (Fig. 4) in plate portion 12, elastomer layer 2 is arranged to cover this sensor part 3.In this sensor part 3, cantilever portion 21 is configured to erect relative to the inner face 52b of the 1st foot 54a, and the face of the movable part 21c of this cantilever portion 21 becomes perpendicular to fore-and-aft direction x2.

Covering the elastomer layer 2 of this sensor part 3, be exposed to outside flow path surfaces 2a and be formed as plane, the inner face 52b of this flow path surfaces 2a and the 1st foot 54a forms the same face.On elastomer layer 2, because main body 52 moves on fore-and-aft direction x2, fluid F L, along flow path surfaces 2a flowing, deforms because of the shear stress from this fluid F L, and external force is transmitted to sensor part 3, this sensor part 3 is toppled on fore-and-aft direction x2.And then at sensor 3, the amplitude of toppling over of cantilever portion 21 changes according to the size of the shear stress from this fluid F L, and the resistance value of piezoelectric electro resistance layer 24 also can correspondingly change.

The information process unit (not shown) be made up of CUP etc. is provided with in the inside of main body 52.By this information process unit, according to the resistance change rate Δ R/R from sensor part 3, utilize above-mentioned formula 6 can calculate shear stress τ from fluid FL.In addition, this information process unit receives the pressure P from fluid F L being applied to pressure transducer 38 from pressure transducer 38, based on above-mentioned formula 13, can calculate viscosity coefficient μ according to measured shear stress τ and pressure P.

In addition, in the above-described embodiment, the situation applying the analytical equipment 55 that the Y-shaped main body 52 that broadened gradually by the distance between the 1st foot 54a and the 2nd foot 54b is formed is illustrated, but, the present invention is not limited thereto, as shown in figure 29, the analytical equipment 61 keeping the main body 62 of certain distance to form by the distance between the 1st foot 54a and the 2nd foot 54b can be also suitable for.

In reality, main body 62 has following structure: an end of the 1st foot 63a is connected by bar-shaped connecting portion 64 with an end of the 2nd foot 63b, erects be provided with the bar-shaped handle portion 65 extended outward in the centre of this connecting portion 64.On the inner face 62b relative with the 2nd foot 63b of the 1st foot 63a, such as, be arranged 3 shear force sensors 37 along the longitudinal, and, 62a is provided with pressure transducer 38 before perpendicular with this inner face 62b.

There is the analytical equipment 61 of this main body 62, by having the structure identical with the analytical equipment 55 of above-mentioned 4th embodiment, also can by the information process unit of inside according to the resistance change rate Δ R/R of sensor part 3 coming from each sensor 37, above-mentioned formula 6 is utilized to calculate shear stress τ from fluid FL, again according to the pressure P from fluid F L being applied to pressure transducer 38 and the shear stress τ measured, utilize above-mentioned formula 13 can calculate viscosity coefficient μ.

(5) the 5th embodiments

In fig. 30, the rotary-type analytical equipment of 70 expression the 5th embodiments, this analytical equipment 70 has following structure: have and be located on substrate 72 with the mutually isostructural shear force sensor 37 of above-mentioned 2nd embodiment.In addition, this analytical equipment 70 have with shear force sensor 37 the sensor part (not shown) opposite face erected that covers by elastomer layer 2 the structure of rotary plate 73 is set.This rotary plate 73 is formed as discoid, and its plane opposite faces configures abreast with the plane flow path surfaces 2a of elastomer layer 2 substantially, and, between the flow path surfaces 2a of elastomer layer 2, be formed with the gap of regulation.

In addition, this rotary plate 73 is configured to, and under the state keeping opposite faces parallel with the flow path surfaces 2a of shear force sensor 37 substantially, centered by turning axle z3, such as, rotates with certain speed gradient according to clockwise or counterclockwise middle a direction.In addition, as other embodiment, now, under the state keeping opposite faces parallel with the flow path surfaces 2a of shear force sensor 37 substantially, press after rotating with certain speed gradient clockwise centered by turning axle z3, rotate with certain speed gradient to counterclockwise reversion, repeat these clockwise and be rotated counterclockwise with some cycles.

In addition, this rotary plate 73 has the structure that can move the gap regulated between the flow path surfaces 2a of shear force sensor along turning axle z3 direction.Therefore, be configured at analytical equipment 70, by separating between the flow path surfaces 2a of shear force sensor 37 and the opposite faces of rotary plate 73 after interval, be configured between these flow path surfaces 2a and opposite faces by there being the fluid F L of regulation viscosity, by making rotary plate 73 close to fluid F L side, clamp fluid F L by the flow path surfaces 2a of shear force sensor 37 and opposite faces.

At this, in shear force sensor 37, the sensor part 3 (not shown in Figure 30) with the structure identical with above-mentioned 1st embodiment is fixed on plate portion 12, elastomer layer 2 is formed as covering this sensor part 3, same with above-mentioned 1st embodiment, along with the cantilever portion 21 in the deformation-sensor portion 3 of elastomer layer 2 is toppled over, the resistance value of sensor part 3 can change.

In reality, this shear force sensor 37 is arranged on substrate 72 in the mode of the turning axle z3 avoiding rotary plate 73, sensor part 3 is arranged at the position facing with the opposite faces of rotary plate 73, further, the face of the movable part of sensor part 3 becomes the sense of rotation x4 perpendicular to rotary plate 73.

Thus, shear force sensor 37 is configured to, by be adjacent between rotary plate 73 and elastomer layer 2 be configured with fluid F L state under, with the velocity gradient specified rotate rotary plate 73, fluid F L can be made to move to sense of rotation x4.Now, cut part 3 is subject to the shear stress that fluid F L can be made to sense of rotation x4 movement from elastomer layer 2, cantilever portion 21 is toppled over to sense of rotation x4 side, thus resistance value can change.

In reality, as the fluid F L be configured between rotary plate 73 and elastomer layer 2, the fluid F L low with regard to viscosity and the high fluid F L of viscosity, the high fluid F L shear stress of viscosity is higher than the low fluid F L of viscosity, therefore, resistance change rate Δ R/R sensor part 3 produced also correspondingly improves.So user can analyze the viscosity of fluid F L according to this resistance change rate Δ R/R.

(6) the 6th embodiments

In Figure 31, the analytical equipment of 80 expression the 6th embodiments.This analytical equipment 80 is configured to, have be formed as drum tubular-type main body 81, fluid F L3, FL4 can by being formed at the hollow region ER2 in main body 81.This analytical equipment 80, when taking out fluid F L3, the FL4 of flowing in main body 81 from main body 81, just can obtain the measurement result can inferring that what kind of viscosity fluid F L3, the FL4 of flowing in main body 81 have and fluid F L3, the FL4 of flowing in main body 81 with what kind of state flow.

In reality, main body 81 is configured to, and the halfbody wall portion 82 of semi-circular cylindrical is fixed with the state that the shear force sensor 83 of semi-circular cylindrical fits with edge part, forms drum thus.In reality, the substrate 85 being formed as semi-circular cylindrical is provided with at shear force sensor 83, the inner peripheral surface of this substrate 85 is provided with multiple sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g, elastomer layer 87 is formed as covering all these multiple sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g.

Shear force sensor 83 is configured to, the thickness of the Thickness Ratio halfbody wall portion 82 of substrate 85 is thin, be formed on the inner peripheral surface the same face with halfbody wall portion 82 to the flow path surfaces 87a of the elastomer layer 87 that the sensor part 86a on substrate 85,86b, 86c, 86d, 86e, 86f, 86g cover, at hollow region ER2, do not having concavo-convex with the crossing part of halfbody wall portion 82, fluid F L3, FL4 can unimpededly flow by the hollow region ER2 in main body 81.

In reality, on shear force sensor 83, such as, from upper end to bottom, circumferentially predetermined distance is provided with multiple sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g.In this embodiment, sensor part 86a, 86d, 86g is respectively equipped with in the upper end of shear force sensor 83, pars intermedia and bottom, 2 sensor part 86b, 86c are provided with between upper end and pars intermedia, and, between pars intermedia and bottom, be provided with sensor part 86e, 86f, total has 7 sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g and circumferentially configures.

At this, each sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g have the structure identical with the sensor part 3 of above-mentioned 1st embodiment, namely the face (Fig. 4) of the movable part 21c of cantilever portion 21 is configured to the flow direction perpendicular to fluid F L3, FL4, and movable part 21c is formed relative to the surface vertical of substrate 85.Elastomer layer 87 covers multiple sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g, thus sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g are arranged to not be exposed to the state in main body 81.In addition, this elastomer layer 87 is formed as, and the flow path surfaces 87a be exposed in main body 81 is formed as not having irregular level and smooth cross section semicircle shape, and in main body 81, fluid F L3, the FL4 of flowing unimpededly flow along flow path surfaces 87a.

In above structure, at this analytical equipment 80, when fluid F L3, FL4 flow in main body 81, contact this fluid F L3, FL4 elastomer layer 87 part because being shifted to flow direction from the shear stress of fluid F L3, FL4, deformed by sensor part 86a correspondingly, 86b, 86c, 86d, 86e, 86f, 86g, resistance value can change.In addition, at analytical equipment 80, by being measured the output voltage from sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g by the information process unit of scheming not show, the resistance change of sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g can be measured.

Thus, at analytical equipment 80, according to the resistance change rate Δ R/R of sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g, the fluid F L3 of flowing, the viscosity of FL4 in main body 81 can be analyzed.In addition, at this analysis device 80, the elastomer layer 87 in the region do not contacted with fluid F L3, FL4 is not shifted, only have the elastomer layer 87 contacted with fluid F L3, FL4 to be shifted due to the shear stress from fluid F L3, FL4, the sensor part 86d also only till the flowing height of this fluid F L3, FL4, the resistance value of 86e, 86f, 86g change.Therefore, at analytical equipment 80, according to the resistance change rate Δ R/R of these sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g, easily can infer how highly to flow in main body 81 at fluid F L3, FL4.

In addition, at this analytical equipment 80, such as, when the fluid-mixing of water and oil flows in main body 81, because proportion is different, as shown in figure 31, water (now, the being fluid F L4) lower flow in main body 81, and the oil that proportion is less (now, being fluid F L3) flows on top.Now, in analytical equipment 80, because water is different from the viscosity of oil, elastomer layer 87 part of water contact is different with the displacement degree of oily elastomer layer 87 part contacted, therefore, from the resistance change rate Δ R/R, different from the resistance change rate Δ R/R of the sensor part 86d in the region from oil flow of the sensor part 86e in the region of water flow, 86f, 86g.

In this case, at analytical equipment 80, prior prediction send as an envoy to the flow of water when flowing in main body 81 and now from sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g resistance change rate Δ R/R between relation, flow when oil flows in main body and in advance prediction is sent as an envoy to and now from sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g resistance change rate Δ R/R between relation, this relation data is stored in information process unit.

Thus, at analytical equipment 80, when making water and oil flow in main body 81 and analyze it, contrasted by resistance change rate Δ R/R that sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g are measured and this relation data, also can infer the flow of water and the oil flowing in main body 81.

(7) the 7th embodiments

Denote in Figure 32 of same tag in the part corresponding with Figure 18, the bar-shaped type analysis device of 90 expression the 7th embodiments, in a same manner as in the second embodiment, be configured to move back and forth along prescribed direction by means of only in fluid, just can record the viscosity, mu of fluid.In reality, this analytical equipment 90 has the main body 91 be made up of the bar-like member of elongated four side column shapes, and user can hold main body 91 with thumb, forefinger and middle finger, and achieves miniaturization so that user is easy to carry about with one.

Main body 91 has following structure: in four limits, a side 91a is provided with shear force sensor 92, and is provided with pressure transducer 93 configuring an end face 91b at a right angle with this side 91a.At this, main body 91 is configured to, and shear force sensor 92 and pressure transducer 93 are all located near bottom, and shear force sensor 92 and pressure transducer 93 can immerse in the fluid deposited in container simultaneously.

This analytical equipment 91 is the same with the 2nd embodiment, under the state that shear force sensor 92 and pressure transducer 93 are configured in fluid, by moving up in the front and back x2 side in the direction (with longitudinal direction (z-axis direction) and the x-axis direction perpendicular from the vertical line direction (y-axis direction) that a side 91a is initial of main body 91) vertical with an end face 91b, at the direct contacting with fluid of an end face 91b of main body 91, further, fluid flows along a side 91a.Thus, at analytical equipment 90, when fluid flows along a side 91a, according to the measurement result detected at shear force sensor 92, the shear stress τ that a side 91a is subject to from fluid can be calculated.In addition, meanwhile, at analytical equipment 90, the measurement result that can detect according to now pressure transducer 93, can calculate the pressure P that an end face 91b is subject to from fluid.

In reality, in main body 91, being formed as the part of lower end of an a plane side 91a and end face 91b, be formed with recess 91e, 91f of quadrilateral; In a recess 91e, be configured with shear force sensor 92, in another recess 91f, be configured with pressure transducer 93.In main body 91, the flow path surfaces being located at the elastomer layer 98a on shear force sensor 92 is exposed to outside, and this flow path surfaces and a side 91a form the same face.In addition, in main body 91, the flow path surfaces being located at the elastomer layer 98b on pressure transducer 93 is also exposed to outside, and this flow path surfaces also forms the same face with other end 91b.

At this, at the analytical equipment 90 of the 7th embodiment, the structure of shear force sensor 92 and the structure of pressure transducer 93 are different from above-mentioned 2nd embodiment, it is characterized in that: be provided with on shear force sensor 92 and singly hold beam sensor portion 95a with the 1st sensor part 50a phase of singly holding beam in the 3rd embodiment shown in Figure 23 is isostructural, be provided with on pressure transducer 93 equally and hold beam sensor portion 95b with two isostructural pair of the 3rd sensor part 50c phases of holding beam in the 3rd embodiment shown in Figure 23.

In reality, as shown in figure 33, this shear force sensor 92 has following structure: singly hold beam sensor portion 95a and be located at bottom in recess 91e, and elastomer layer 98a is arranged to cover all that these singly hold beam sensor 95a.At shear force sensor 92, when main body 91 moves along x-axis side in fluid, due to the external force be subject to from fluid, elastomer layer 98a deforms, and the external force correspondingly acting on x-axis direction can be detected by singly holding beam sensor portion 95a.

In addition, as implied above, singly hold beam sensor portion 95a and hold beam sensor portion 95b with two there is the structure identical with the 3rd sensor part 50c with the 1st sensor part 50a shown in Figure 23, therefore omit the repeat specification about detailed construction at this.In this case, singly hold beam sensor portion 95a and be configured to, the face of movable part 21c becomes perpendicular with x-axis, and due to the shear stress τ from fluid applied in the direction of the x axis, movable part 21c can topple over to x-axis direction.

Singly holding beam sensor portion 95a, according to the size of the shear stress τ applied by fluid, the displacement amplitude of cantilever portion 21 changes, and the resistance value of piezoelectric electro resistance layer also can correspondingly change.Now, singly hold beam sensor portion 95a and give potential difference (PD) between the electrode of the end points of turning point 21b, the resistance change rate Δ R/R of measurement turning point 21b, can measure the power (the shear stress τ from fluid) acted on respectively in cantilever portion 21 according to this measurement result.

On the other hand, pressure transducer 93 has following structure: two beam sensor portion 95b that holds is located at bottom in recess 91f, and elastomer layer 98b is configured to cover and all twoly holds beam sensor portion 95b.In this case, be formed with space part 91h in the bottom of recess 91f, fix two base station 51a holding beam sensor portion 95b in bottom, be positioned on this space part 91h to make couple movable part 51c holding beam sensor portion 95b and turning point 51b.

Thus, at pressure transducer 93, when the pressure P from fluid is applied to the flow path surfaces of elastomer layer 98b from side, x-axis direction, elastomer layer 98b because of this pressure by crimp a little, movable part 51c bears the power of the elastomer layer 98b from distortion, and this movable part 51c is shifted in x-axis direction.And then hold beam sensor portion 95b two, according in the direction of the x axis by fluid applied pressure size, the displacement amplitude of cantilever portion 51 changes, and the resistance value of piezoelectric electro resistance layer also correspondingly changes.Now, hold in beam sensor portion 95b two, give potential difference (PD) between the electrode of the end points of turning point 51b, the resistance change rate Δ R/R of measurement turning point 51b, can measure the power (pressure P from fluid) acting on cantilever portion 51 according to this measurement result.

Even have the analytical equipment 90 of this structure, also the relation of above-mentioned formula 7 ~ 14 is set up, measurement result according to shear force sensor 92 calculates shear stress τ, and the measurement result according to pressure transducer 93 calculates pressure P, and according to μ=K (τ of formula 13 ²/ P ^3/2) calculate to obtain viscosity (viscosity coefficient) μ of fluid.Specifically, beam sensor portion of singly the holding 95a of shear force sensor 92 obtains resistance change rate Δ R/R as measurement result, and is delivered to the information process unit (not shown) be built in main body 91.Thus, this information process unit according to the resistance change rate Δ R/R obtained from shear force sensor 92 and above-mentioned formula 6, can calculate shear stress τ.

On the other hand, at pressure transducer 93, when be under pressure P time, can think about resistance change rate Δ R/R and pressure P, set up following relation.At this, Figure 34 A and 34B is the two side cross-sectional view of holding beam sensor portion 95b schematically showing pressure transducer 93 in order to relation between resistance change rate Δ R/R and pressure P is described.

First, as shown in fig. 34 a, when hold beam construction to embed in elastomer layer 98b two two hold beam sensor portion 95b apply pressure P [Pa] time, calculate in the strain stress produced as two turning point 51b holding beam 51b end.Now, the size of assumed stress P is fully little, and the deflection of elastomer layer 98b is also fully little, even if then hypothesis also to put into the elastic body of elastomer layer 98b in two bottom of holding beam 51d, also can think the elastomeric distortion substantially ignoring this part.Under this assumed condition, when applying pressure P [Pa] from x-axis direction to elastomer layer 98b, as illustrated in figure 34b, can think also to be applied to the pressure P of the equal size of pressure P being applied to elastomer layer 98b surface and fix the two of two ends by turning point 51b and hold beam 51d.

At this, if the length of holding beam 51d two is L [mm], and width is W [mm], and thickness is T [mm], then the formula 15 below the moment size produced in two end (turning point 51b) of holding beam 51d can be expressed as.

[formula 15]

$M=\frac{{\mathrm{PWL}}^2}{12}$

Now, consider that two cross section of holding beam 51d is rectangle, the strain stress as generation on the turning point 51b of end can be expressed as formula 16 below.

[formula 16]

$\mathrm{\ϵ}=\frac{M}{ZE}=\frac{{\mathrm{PWL}}^2}{12}\·\frac{6}{{\mathrm{WT}}^2}\·\frac{1}{E}=\frac{{\mathrm{PL}}^2}{2T^{2}E}$

Wherein, if Z is two cross section 2 ordered coefficients of holding beam 51d, E is two Young moduluss of holding beam 51d.When setting the coefficient of strain of piezoelectricity opposing element as K, the resistance change rate Δ R/R of the piezoresistance element produced because of this strain stress can be expressed as formula 17 below.

[formula 17]

$\frac{\mathrm{\Δ}R}{R}=\frac{\mathrm{\ϵ}}{K}$

As above, the resistance change rate Δ R/R that pressure transducer 93 is used as measurement result to obtain, according to formula 16 and formula 17, can calculate pressure P.In reality, the two of pressure transducer 93 hold beam sensor portion 95b, obtain resistance change rate Δ R/R as measurement result, and sent to information process unit according to the external force be subject to from fluid.Information process unit according to resistance change rate Δ R/R, above-mentioned formula 16 and the formula 17 received from pressure transducer 93, can calculate pressure P.This analytical equipment 90 thus, by information process unit, utilizes the shear stress τ calculated by the measurement result of shear force sensor 92 and the pressure P calculated by the measurement result of pressure transducer 93, from formula 13 μ=K (τ ²/ P ^3/2) calculate to obtain viscosity, mu.

Then, the analytical equipment 90 shown in actual fabrication Figure 32, and use this analytical equipment 90 to carry out the measurement experiment of shear stress τ and pressure P.In addition, on the shear force sensor 92 of the shear stress of measurement moving direction, arrange beam sensor portion of singly the holding 95a of about about 200 μm, at the pressure transducer 93 for measuring from the pressure of moving direction, what arrange about about 200 μm two holds beam sensor portion 95b.

Now, prepare the drive unit with the arm carrying out certain piston movement, after analytical equipment 90 is vertically fixed on this arm, the shear force sensor 92 of analytical equipment 90 and pressure transducer 93 are put into water.After this, by drive unit, do straight reciprocating motion (frequency is 2 [Hz], is 50 [mm] toward complex magnitude) towards the direction (the x-axis direction in Figure 32) that the end face 91b with main body 91 is vertical.Now check the pressure P and shear stress τ that obtain from analytical equipment 90, result as shown in figure 35 can be obtained.In the result of Figure 35, when the peak portion of reading waveform and valley are as its value of sampling spot, pressure P is 10Pa, and shear stress τ is 0.4Pa.

In addition, in other viscosity meters, the viscosity of the sample (water) measured in advance is 0.9 [mPa.s].At this, viscosity, mu is set as 0.9 [mPa.s], pressure P is set as 10 [Pa], shear stress τ is set as 0.4 [Pa], according to μ=K (τ of above-mentioned formula 13 ²/ P ^3/2) Proportional coefficient K of trying to achieve is 175.8.Therefore, at analytical equipment 90, by prestoring the formula 13 of substitution Proportional coefficient K=175.8, using the shear stress τ calculated from the measurement result of shear force sensor 92 and the pressure P calculated from the measurement result of pressure transducer 93, viscosity, mu can be calculated to obtain by formula 13.

And, in the above-described embodiment, following situation is illustrated: what arrange that movable part 21c can topple over to x-axis direction at a side 91a singly holds beam device 95a, arrange at the side 91b bearing applied pressure on x-axis direction and two hold sensor part 95b, main body 91 is moved back and forth along the x-axis direction in fluid, thus calculates fluid viscosity μ.But the invention is not restricted to above-mentioned explanation, such as, also the face of movable part 21c can be become perpendicular to z-axis direction (direction of principal axis of main body 91), what arrange that movable part 21c can topple over to z-axis direction at a side 91a singly holds beam sensor portion, arrange in the bottom surface sections of the main body 91 of bearing applied pressure on z-axis direction and two hold beam sensor portion 95b, main body 91 is moved up and down along the z-axis direction in fluid, calculates the viscosity, mu of fluid.

(8) other embodiments

In addition, the invention is not restricted to present embodiment, various distortion can be implemented in main scope of the present invention, also can combine these above-mentioned embodiments, also on analytical equipment 41 of the separating device 35 of the 2nd embodiment and the 3rd embodiment etc., acceleration transducer can be set respectively.

When being as above provided with acceleration transducer, if measure the measurement result of shear force sensor 37 and pressure transducer 38 etc. when the acceleration that acceleration transducer detects is 0, not then under the unsure state starting mobile agent, but can measure and obtain shear stress τ when main body is moved with certain speed in fluid F L and pressure P, so viscosity coefficient μ more accurately can be calculated.

In addition, that the situation employing pressure transducer 38 is illustrated in the above-described embodiment, but the present invention is not limited thereto, the supplementary data that the measurement result that obtains from these measuring devices is used as when calculating viscosity coefficient τ by the various measuring devices such as gyrosensor also can be set.In addition, when combining acceleration transducer, the output of in the future acceleration sensor can carry out integration to calculate the translational speed of acceleration transducer.In this case, without pressure transducer, and only viscosity can be calculated according to acceleration transducer and shear force sensor.

And, in above-mentioned 1st embodiment, following situation is illustrated: the signal conditioning package 7 independently arranged separating with stream forming portion 9 is used as the computing unit according to calculating the viscosity coefficient of above-mentioned fluid from the above-mentioned measurement result in the sensor portion, above-mentioned surface velocity and above-mentioned fluid level.But the present invention is not limited thereto, also the information process unit be built in fluid forming portion 9 can be used as computing unit.

In addition, in above-mentioned 2nd ~ 4th, the 7th embodiment, following situation is illustrated: the information process unit (not shown) be built in main body 36,42,52,62,91 is used as according to the measurement result obtained from the sensor portion and the viscosity coefficient computing unit calculating the viscosity coefficient of above-mentioned fluid from the pressure measurement result that above-mentioned pressure transducer obtains.But the present invention is not limited thereto, the information process unit that also independently can arrange opening with main body 36,42,52,62,91 points is used as viscosity coefficient computing unit.

In addition, also can appropriately combined each structure about the above-mentioned embodiment of the 1st ~ 7th.Such as, on the analytical equipment 55,61 of the 4th embodiment, the shear force sensor 37 for detecting unidirectional external force can be replaced and be applied in the shear force sensor 44a for detecting 3 axial external force that the 3rd embodiment uses.

Industrial applicibility

Analytical equipment of the present invention may be used for following situation: such as, when adding denseness adjusting agent and come to give denseness to food in the food such as milk, fruit juice, nursing meal, for confirming the viscosity that the fluid food products after giving this denseness has.

Claims (8)

1., for determining an analytical equipment for fluid viscosity, it is characterized in that,

Have:

Elastomer layer, the flow path surfaces flowing of being tilted by described fluid, is shifted because of the shear stress from this fluid;

Sensor part, covered by described elastomer layer, occur to be shifted and the variable condition of the movable part of activity according to because of this elastomer layer, obtain the measurement result of the viscosity for determining described fluid, described sensor part has piezoelectric electro resistance layer, this piezoelectric electro resistance layer detects the change of active state as resistance value of described movable part, and described measurement result is the resistance change rate obtained from described piezoelectric electro resistance layer; And

Computing unit, height from this flow path surfaces of the surface velocity that this computing unit obtains the described fluid flowed in described flow path surfaces and the described fluid that flows in described flow path surfaces and fluid level, according to from the described measurement result of described sensor part, described surface velocity and described fluid level, calculate the viscosity coefficient of described fluid.

2. analytical equipment according to claim 1, is characterized in that,

There is camera head, the described fluid flowed in described flow path surfaces is made a video recording;

The surface velocity at the described fluid that described flow path surfaces flows that described computing unit determines according to the camera data from camera head, based on the fluid level of the described fluid that described flow path surfaces flows and the shear stress that draws according to the described resistance change rate during flowing of described fluid, calculate the viscosity coefficient of described fluid.

3., for determining an analytical equipment for fluid viscosity, it is characterized in that,

Have:

Elastomer layer, is flowed in flow path surfaces by described fluid, is shifted because of the shear stress from this fluid;

Sensor part, covered by described elastomer layer, occur to be shifted and the variable condition of the movable part of activity according to because of this elastomer layer, obtain the measurement result of the viscosity for determining described fluid, described sensor part has piezoelectric electro resistance layer, this piezoelectric electro resistance layer detects the change of active state as resistance value of described movable part, and described measurement result is the resistance change rate obtained from described piezoelectric electro resistance layer;

Main body, being provided with described sensor part and the pressure transducer for measuring the pressure be subject to from described fluid, moving, in strip in described fluid; And

Viscosity coefficient computing unit, according to the described resistance change rate obtained from described sensor part with from the pressure measurement result that described pressure transducer obtains, calculates the viscosity coefficient of described fluid;

An end face of the described main body perpendicular with making the moving direction of described main body movement in described fluid is located at by described pressure transducer;

Described sensor part is located at the side with the described main body of described end face configuration at a right angle.

4. analytical equipment according to claim 3, is characterized in that,

Described viscosity coefficient computing unit, the described resistance change rate according to obtaining from described sensor part calculates shear stress, measures result, calculate the viscosity coefficient of described fluid by described shear stress with from the pressure that described pressure transducer obtains;

When described main body moves along described moving direction in described fluid, the described pressure transducer being located at a described end face directly contacts described fluid, and, described fluid is provided with the flow path surfaces flowing of described elastomer layer along a described side, described elastomer layer, on the flow direction of described fluid, elastic deformation occurs.

5., for determining an analytical equipment for fluid viscosity, it is characterized in that,

Have:

Elastomer layer, is flowed in flow path surfaces by described fluid, is shifted because of the power from this fluid;

Sensor part, covered by described elastomer layer, occur to be shifted and the variable condition of the movable part of activity according to because of this elastomer layer, obtain the measurement result of the viscosity for determining described fluid, described sensor part has piezoelectric electro resistance layer, this piezoelectric electro resistance layer detects the change of active state as resistance value of described movable part, and described measurement result is the resistance change rate obtained from described piezoelectric electro resistance layer;

Peripheral surface near the bottom of main body is provided with multiple sensor group, sensor group is provided with multiple described sensor part, sensor group described in each detects the shear stress of 3 axial described fluids from orthogonal crossing x-axis direction, y-axis direction and z-axis direction, when making described main body move to any direction in described fluid, try to achieve the direction of making a concerted effort and the size of the described fluid obtained according to the output of sensor group described in each, the direction of making a concerted effort according to these and size measure the viscosity coefficient of described fluid.

6. analytical equipment according to claim 5, is characterized in that,

Described main body is cylindrical, and the peripheral surface near the bottom of this main body is across being provided with multiple shear force sensor at equal intervals, and described multiple shear force sensor has described sensor group and described elastomer layer;

According to the direction of making a concerted effort and the size of the described fluid obtained when making described main body move to any direction in described fluid, measure from the pressure of described fluid and the shear stress from described fluid, according to from the described pressure of described fluid and the shear stress from described fluid, measure the viscosity coefficient of described fluid.

7., for determining an analytical equipment for fluid viscosity, it is characterized in that,

Have:

Elastomer layer, is flowed in flow path surfaces by described fluid, is shifted because of the shear stress from this fluid;

Sensor part, covered by described elastomer layer, occur to be shifted and the variable condition of the movable part of activity according to because of this elastomer layer, obtain the measurement result of the viscosity for determining described fluid, described sensor part has piezoelectric electro resistance layer, this piezoelectric electro resistance layer detects the change of active state as resistance value of described movable part, and described measurement result is the resistance change rate obtained from described piezoelectric electro resistance layer; And

The main body of tubulose, described fluid is by the hollow region of the inside of this main body;

The wall portion of described main body be provided with covered by described elastomer layer, described main body wall portion from it end to bottom circumferentially across predetermined distance arrange multiple described sensor part;

Described sensor part is shifted and the variable condition of the described movable part of activity by elastomer layer described during described hollow region according to because of described fluid, obtains the measurement result of the viscosity for determining described fluid.

8. analytical equipment according to claim 7, is characterized in that,

Described flow path surfaces is formed on the internal face the same face with described main body;

Measure the output voltage from sensor part described in each by information process unit, obtain the resistance change rate of the viscosity determining described fluid.