CN103645216A - Carbon dioxide gas sensor and preparation method thereof - Google Patents
Carbon dioxide gas sensor and preparation method thereof Download PDFInfo
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- CN103645216A CN103645216A CN201310728757.8A CN201310728757A CN103645216A CN 103645216 A CN103645216 A CN 103645216A CN 201310728757 A CN201310728757 A CN 201310728757A CN 103645216 A CN103645216 A CN 103645216A
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- carbon dioxide
- gas sensor
- dioxide gas
- interdigital electrode
- zinc acetate
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Abstract
The invention discloses a carbon dioxide gas sensor with relatively fast gas-sensitive response and a preparation method thereof. The carbon dioxide gas sensor comprises a substrate, wherein an interdigital electrode is arranged on the upper surface of the substrate; a discontinuous film formed by granular supports is deposited on the surface of the interdigital electrode; a carbon dioxide sensitive film composed of graphene oxide is deposited on the surface of the discontinuous film; and the carbon dioxide sensitive film is in contact with the interdigital electrode through gaps among the granular supports. The carbon dioxide sensitive film is supported by the granular supports, so that the carbon dioxide gas molecules can come into contact with the graphene oxide material in three-dimensional directions, thereby effectively improving the response of the carbon dioxide gas sensor to the carbon dioxide gas molecules, thereby realizing relatively high gas gas-sensitive response, facilitating the desorption of the carbon dioxide gas and improving the condition that the performance of the carbon dioxide gas sensor is limited by the thickness of the sensitive film. The carbon dioxide gas sensor and the preparation method thereof are suitable for being popularized and applied to the technical field of sensors.
Description
Technical field
The present invention relates to sensor technical field, be specifically related to a kind of carbon dioxide gas sensor and preparation method thereof.
Background technology
Since 20 end of the centurys, the mankind entered information society, people's activities is all centered by acquisition of information and message exchange, also enters the new period of high speed development as the sensor technology of one of the basis of infotech and three large pillars.
Because interdigital electrode is extremely sensitive to the sheet resistance, the change of electrolyte response that apply thereon, therefore resistor-type, the capacitor type gas sensor based on interdigital electrode emerges in large numbers like the mushrooms after rain.Existing carbon dioxide gas sensor generally comprises the interdigital electrode of substrate and substrate surface setting, at interdigital electrode surface deposition one deck graphene oxide film, in use there is following problem in this existing resistor-type gas sensor: because graphene oxide film is that Direct precipitation is on the surface of interdigital electrode, Here it is makes graphene oxide film thickness less, and the sensitive material of film bottom can not fully contact with gas to be measured or steam molecule, cause the air-sensitive response of gas sensor slower, the desorption of gas to be measured or steam molecule is insufficient, response, release time is very long.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of air-sensitive and responds carbon dioxide gas sensor faster.
The present invention solves the problems of the technologies described above adopted technical scheme: this carbon dioxide gas sensor, comprise substrate, the upper surface of described substrate is provided with interdigital electrode, the discontinuous film that described interdigital electrode surface deposition has graininess supporter to form, described discontinuous film surface deposits the carbon dioxide sensitive thin film that graphene oxide forms, and described carbon dioxide sensitive thin film contacts with interdigital electrode by the gap between particles supports body.
Further, described graininess supporter is Zinc oxide particles.
Further, described substrate adopts silicon dioxide or silicon materials to be made.
The present invention also provides a kind of method of preparing above-mentioned carbon dioxide gas sensor, and concrete scheme is as follows: the preparation method of this carbon dioxide gas sensor, comprises the following steps:
A, prepare zinc acetate colloidal sol;
B, by zinc acetate sol deposition in interdigital electrode, described interdigital electrode is fixed on substrate;
C, the interdigital electrode that deposits zinc acetate colloidal sol is placed in hot environment to the oxidized formation Zinc oxide particles of zinc acetate colloidal sol;
D, graphene oxide liquid deposition is surperficial in the interdigital electrode after step C processes, and be dried processing.
Be further, in steps A, adopt sol-gal process to prepare zinc acetate colloidal sol, specific as follows: two appropriate hydration zinc acetates are dissolved in quantitative absolute ethyl alcohol, then add quantitative monoethanolamine as stabilizing agent and stir a period of time to obtain precursor liquid, then add glacial acetic acid and ammoniacal liquor to form zinc acetate colloidal sol.
Further, in step B, the process deposits by zinc acetate colloidal sol by gas blowout film forming is in interdigital electrode.
Further, in step C, it is in the environment of 300 ℃ that the interdigital electrode that deposits zinc acetate colloidal sol is placed on to temperature, the oxidized formation Zinc oxide particles of zinc acetate colloidal sol.
Further, in step D, graphene oxide solution is surperficial in the interdigital electrode after step C processes by the process deposits of gas blowout film forming.
Further, in step D, described dry processing adopts vacuum drying mode, and the described vacuum drying time is two days.
Beneficial effect of the present invention: by the discontinuous film being formed by graininess supporter at interdigital electrode surface deposition, described discontinuous film surface deposits the carbon dioxide sensitive thin film that graphene oxide forms, described carbon dioxide sensitive thin film contacts with interdigital electrode by the gap between particles supports body, utilize graininess supporter that carbon dioxide sensitive thin film is propped up, carbon dioxide molecule can be contacted with graphene oxide material on three-dimensional, make graphene oxide material contact more abundant with carbon dioxide molecule, effectively improved the response of carbon dioxide gas sensor to carbon dioxide molecule, air-sensitive response is very fast, and be conducive to the desorption of carbon dioxide, the performance of simultaneously having improved carbon dioxide gas sensor is limited to the situation of sensitive thin film thickness, in addition, this carbon dioxide gas sensor is at room temperature tested, need at specific temperature, not carry out, be convenient to carry out relevant experimental implementation.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing carbon dioxide gas sensor;
Fig. 2 is the structural representation of carbon dioxide gas sensor of the present invention;
Fig. 3 is carbon dioxide gas sensor of the present invention and the column comparison diagram of existing carbon dioxide gas sensor to the CO2 gas air-sensitive response of variable concentrations;
Description of symbols in figure: substrate 1, interdigital electrode 2, carbon dioxide sensitive thin film 3, discontinuous film 4.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is further described.
As shown in Figure 2, this carbon dioxide gas sensor, comprise substrate 1, the upper surface of described substrate 1 is provided with interdigital electrode 2, the discontinuous film 4 that described interdigital electrode 2 surface depositions have graininess supporter to form, the carbon dioxide sensitive thin film 3 that described discontinuous film 4 surface depositions have graphene oxide to form, described carbon dioxide sensitive thin film 3 contacts with interdigital electrode 2 by the gap between particles supports body.This carbon dioxide gas sensor is placed in test chamber in use, adopt dry air as carrier gas and diluents, and by the concentration of MT50-4J Flow Measurement Display Meter or MF-3C dynamic gas mixer regulation of carbon dioxide gas, with the corresponding resistance signal of multiplexed signal sampling device collection, described interdigital electrode 2 is connected with readout device or computing machine as the output terminal of sensor signal, according to the characteristic of carbon dioxide sensitive thin film 3, by resistance formal output sensor signal, probe temperature is room temperature.By the discontinuous film 4 being formed by graininess supporter at interdigital electrode 2 surface depositions, the carbon dioxide sensitive thin film 3 that described discontinuous film 4 surface depositions have graphene oxide to form, described carbon dioxide sensitive thin film 3 contacts with interdigital electrode 2 by the gap between particles supports body, utilize graininess supporter that carbon dioxide sensitive thin film 3 is propped up, carbon dioxide molecule can be contacted with graphene oxide material on three-dimensional, make graphene oxide material contact more abundant with carbon dioxide molecule, effectively improved the response of carbon dioxide gas sensor to carbon dioxide molecule, air-sensitive response is very fast, and be conducive to the desorption of carbon dioxide, the performance of simultaneously having improved carbon dioxide gas sensor is limited to the situation of carbon dioxide sensitive thin film 3 thickness, in addition, this carbon dioxide gas sensor is at room temperature tested, need at specific temperature, not carry out, be convenient to carry out relevant experimental implementation.
Described graininess supporter can adopt existing various metallization oxide, for the air-sensitive of carbon dioxide gas sensor is responded more quick and precisely, described graininess supporter is preferably Zinc oxide particles, and described substrate 1 adopts silicon dioxide or silicon materials to be made.
The present invention also provides a kind of method of preparing above-mentioned carbon dioxide gas sensor, and concrete scheme is as follows: the preparation method of this carbon dioxide gas sensor, comprises the following steps:
A, prepare zinc acetate colloidal sol;
B, by zinc acetate sol deposition in interdigital electrode 2, described interdigital electrode 2 is fixed on substrate 1;
C, the interdigital electrode 2 that deposits zinc acetate colloidal sol is placed in hot environment to the oxidized formation Zinc oxide particles of zinc acetate colloidal sol;
D, by graphene oxide liquid deposition on interdigital electrode 2 surfaces after step C processes, fraction graphene oxide material sees through between Zinc oxide particles like this gap and interdigital electrode 2 contact to form conductive path, most of graphene oxide material does not directly contact with interdigital electrode 2, but be deposited on the Zinc oxide particles surface of formation, be finally dried processing.According to above-mentioned steps, can prepare very easily the resistor-type gas sensor based on interdigital electrode 2 of the present invention, and whole manufacturing process technique is simple, convenient operation.
In the above-described embodiment, described zinc acetate colloidal sol can adopt existing the whole bag of tricks to realize, as preferably: in steps A, adopt sol-gal process to prepare zinc acetate colloidal sol, specific as follows: two appropriate hydration zinc acetates are dissolved in quantitative absolute ethyl alcohol, then add quantitative monoethanolamine as stabilizing agent and stir a period of time and obtain precursor liquid, stir and adopt the mode of magnetic agitation to carry out, mixing time is two hours, then add glacial acetic acid and ammoniacal liquor to form zinc acetate colloidal sol, add glacial acetic acid and ammoniacal liquor can regulate the pH value of zinc acetate colloidal sol.
In order to guarantee crudy, avoid the last Zinc oxide particles forming to come off, in step B, the process deposits by zinc acetate colloidal sol by gas blowout film forming is in interdigital electrode 2.
In order to form the Zinc oxide particles that diameter is larger, thereby improve its support effect, in step C, it is in the environment of 300 ℃ that the interdigital electrode 2 that deposits zinc acetate colloidal sol is placed on to temperature, the oxidized formation Zinc oxide particles of zinc acetate colloidal sol.
In order to guarantee crudy, avoid the last sensitive thin film 3 forming to come off, in step D, the process deposits by graphene oxide solution by gas blowout film forming is on interdigital electrode 2 surfaces after step C processing.
Further, in step D, described dry processing adopts vacuum drying mode, and the described vacuum drying time is two days.
After lot of experiment validation, draw carbon dioxide gas sensor of the present invention and the CO of existing carbon dioxide gas sensor to variable concentrations
2the column comparison diagram of gas air-sensitive response, as shown in Figure 3, ordinate is the Sensitirity va1ue of air-sensitive response, horizontal ordinate is the concentration value of carbon dioxide, RGO represents graphene oxide, and ZnO represents zinc paste, and existing carbon dioxide gas sensor is the discontinuous film 4 that does not have Zinc oxide particles to form, as can be seen from Figure, carbon dioxide gas sensor of the present invention is to CO
2the air-sensitive response of gas is compared with existing carbon dioxide gas sensor and has nearly been improved 200%, and is beneficial to the desorption of gas molecule to be measured.
Claims (9)
1. carbon dioxide gas sensor, comprise substrate (1), the upper surface of described substrate (1) is provided with interdigital electrode (2), it is characterized in that: the discontinuous film (4) that described interdigital electrode (2) surface deposition has graininess supporter to form, the carbon dioxide sensitive thin film (3) that described discontinuous film (4) surface deposition has graphene oxide to form, described carbon dioxide sensitive thin film (3) contacts with interdigital electrode (2) by the gap between particles supports body.
2. carbon dioxide gas sensor as claimed in claim 1, is characterized in that: described graininess supporter is Zinc oxide particles.
3. carbon dioxide gas sensor as claimed in claim 1 or 2,, it is characterized in that: described substrate (1) adopts silicon dioxide or silicon materials to be made.
4. the preparation method of carbon dioxide gas sensor, is characterized in that comprising the following steps:
A, prepare zinc acetate colloidal sol;
B, zinc acetate sol deposition is upper in interdigital electrode (2), described interdigital electrode (2) is fixed on substrate (1);
C, the interdigital electrode (2) that deposits zinc acetate colloidal sol is placed in hot environment to the oxidized formation Zinc oxide particles of zinc acetate colloidal sol;
D, by graphene oxide liquid deposition on interdigital electrode (2) surface after step C processes, and be dried processing.
5. the preparation method of carbon dioxide gas sensor as claimed in claim 4, it is characterized in that: in steps A, adopt sol-gal process to prepare zinc acetate colloidal sol, specific as follows: two appropriate hydration zinc acetates are dissolved in quantitative absolute ethyl alcohol, then add quantitative monoethanolamine as stabilizing agent and stir a period of time to obtain precursor liquid, then add glacial acetic acid and ammoniacal liquor to form zinc acetate colloidal sol.
6. the preparation method of carbon dioxide gas sensor as claimed in claim 5, is characterized in that: in step B, the process deposits by zinc acetate colloidal sol by gas blowout film forming is in interdigital electrode (2).
7. the preparation method of carbon dioxide gas sensor as claimed in claim 6, it is characterized in that: in step C, it is in the environment of 300 ℃ that the interdigital electrode (2) that deposits zinc acetate colloidal sol is placed on to temperature, the oxidized formation Zinc oxide particles of zinc acetate colloidal sol.
8. the preparation method of carbon dioxide gas sensor as claimed in claim 7, is characterized in that: in step D, the process deposits by graphene oxide solution by gas blowout film forming is on interdigital electrode (2) surface after step C processes.
9. the preparation method of carbon dioxide gas sensor as claimed in claim 8, it is characterized in that: in step D, described dry processing adopts vacuum drying mode, and the described vacuum drying time is two days.
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Cited By (5)
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| CN104181209A (en) * | 2014-08-14 | 2014-12-03 | 电子科技大学 | Nitrogen dioxide gas sensor and preparation method thereof |
| CN105067670A (en) * | 2015-07-07 | 2015-11-18 | 南京信息工程大学 | Ordered Cu-doped nano-porous tin oxide sensing device |
| CN105181896A (en) * | 2015-09-01 | 2015-12-23 | 上海理工大学 | Acetone gas detection gas-sensitive material, acetone gas detection gas-sensitive element, and preparation methods of acetone gas detection gas-sensitive material and acetone gas detection gas-sensitive element |
| CN105403596A (en) * | 2015-10-28 | 2016-03-16 | 上海交通大学 | Portable gas detection system based on nanometer compound material |
| WO2018000926A1 (en) * | 2016-06-27 | 2018-01-04 | 京东方科技集团股份有限公司 | Semiconductor hydrogen sensor and manufacturing method thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104181209A (en) * | 2014-08-14 | 2014-12-03 | 电子科技大学 | Nitrogen dioxide gas sensor and preparation method thereof |
| CN105067670A (en) * | 2015-07-07 | 2015-11-18 | 南京信息工程大学 | Ordered Cu-doped nano-porous tin oxide sensing device |
| CN105181896A (en) * | 2015-09-01 | 2015-12-23 | 上海理工大学 | Acetone gas detection gas-sensitive material, acetone gas detection gas-sensitive element, and preparation methods of acetone gas detection gas-sensitive material and acetone gas detection gas-sensitive element |
| CN105403596A (en) * | 2015-10-28 | 2016-03-16 | 上海交通大学 | Portable gas detection system based on nanometer compound material |
| WO2018000926A1 (en) * | 2016-06-27 | 2018-01-04 | 京东方科技集团股份有限公司 | Semiconductor hydrogen sensor and manufacturing method thereof |
| US10782275B2 (en) | 2016-06-27 | 2020-09-22 | Boe Technology Group Co., Ltd. | Semiconductor hydrogen sensor and manufacturing method thereof |
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Application publication date: 20140319 |