CN103645215B - Sensor module based on flexible substrate - Google Patents
Sensor module based on flexible substrate Download PDFInfo
- Publication number
- CN103645215B CN103645215B CN201310680558.4A CN201310680558A CN103645215B CN 103645215 B CN103645215 B CN 103645215B CN 201310680558 A CN201310680558 A CN 201310680558A CN 103645215 B CN103645215 B CN 103645215B
- Authority
- CN
- China
- Prior art keywords
- sensor
- substrate
- flexible
- antenna part
- sensor assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Details Of Aerials (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention discloses a sensor module based on a flexible substrate. The sensor module comprises a sensor part and an antenna part, wherein the sensor part and the antenna part use flexible insulating materials as substrates, and are connected through a lead or a clamp, the sensor part is used for sensing an external sensitive signal, the antenna part is used for transmitting and receiving a wireless signal, and the sensor part and the antenna part are combined for realizing detection and transmission of the external sensitive signal under the wireless condition. According to the sensor module, by using the flexible insulating materials such as PI and PET as the substrates and using various microelectronic microprocessing methods, the sensor part and a wireless emitting part are made on the substrates and are combined with the substrates together so that the novel sensor module which is passive, wireless and foldable, is high in portability, and is assembled is formed.
Description
Technical field
The present invention relates to detection and the transmission technique field of sensor signal, especially one be used for sensing
Device signal detection and the sensor assembly based on flexible substrate of transmission.
Background technology
Along with development and the raising of people's living standard of society, lead in food safety, medical and health etc.
Territory is more and more urgent for sensor light, small-sized, flexible detection change.Simultaneously along with Internet of Things
The development of net, society is more and more higher for wireless interconnected requirement, and wireless senser is increasingly subject to
Pay close attention to.Sensor based on rigid substrate is the most highly developed, but, its application scenarios is by substrate
The restriction of itself, it is impossible to meet market demands, so, flexible substrate has good development potentiality.
Current wireless transport module major part is all based on rigid substrate and produces once and form, it is impossible to
Carry out the fine setting of parameter after molding, make can carry out after formation small parameter perturbations based on flexibility
The wireless transport module of substrate, it is possible to achieve a kind of module multiple use, and be easy to carry, have
Important meaning.
Summary of the invention
(1) to solve the technical problem that
In view of this, a kind of based on flexible substrate the sensor of offer is provided
Module, to realize the novel sensor module that passive and wireless is collapsible and portability is high.
(2) technical scheme
For reaching above-mentioned purpose, the invention provides a kind of sensor assembly based on flexible substrate, should
Sensor assembly includes Sensor section and antenna part, both with flexible insulating material as substrate,
And connected by wire or fixture, wherein, Sensor section is for the outside sensitive signal of perception, antenna
Part is used for transmission and the reception of wireless signal, and the two is implemented in combination with in a wireless scenario to outside sensitive
The detection of signal and transmission.
In such scheme, this flexible insulating material is polyimides (PI), poly terephthalic acid second two
Ester (PET) or special paper material, the relatively hard of this special paper material e.g. kraft paper etc
Paper material.
In such scheme, this Sensor section is the various biographies made in flexible insulating material substrate
Sensor, the planar structure of these sensors is different, the most circular, oval, square, rectangular
Shape or irregular figure, and all it is bent into variously-shaped, to adapt to various different test environment.
In such scheme, the described sensor made in flexible insulating material substrate is gas sensing
Device or humidity sensor.Described gas sensor is to produce two electricity on flexible insulating material substrate
Pole bar, then makes air-sensitive coating between two electrode strips.Described making between two electrode strips
Air-sensitive coating, its sensitive membrane used is organic high molecular polymer, metal-oxide or organic
High molecular polymer and the mixture of metal-oxide；Its painting method used include drop coating, dip-coating,
Thermal evaporation or printing.Described organic high molecular polymer is polypyrrole (PPy) or polyaniline (PANI),
Described metal-oxide is Mo3、Sn2, ZnO or Ni.
In such scheme, the size Control of this Sensor section is at 50 microns × 50 microns to 1m × 1m
In the range of.
In such scheme, this antenna part can bend to different shapes according to demand, and can be spy
Determine to be finely adjusted under appearance profile, to realize the effect of optimum reception or transmission.This antenna part is loudspeaker
Antenna, loop aerial or flexible antenna.
(3) beneficial effect
From technique scheme it can be seen that the method have the advantages that
1, the sensor assembly based on flexible substrate that the present invention provides, owing to have employed antenna, institute
To achieve radio characteristics, owing to becoming there is the sensor of self-oscillation characteristic by sensor production,
Such as to produce the components and parts such as inductance, electric capacity or resistance making sensor simultaneously, be allowed to have from
Start-oscillation characteristic, it is achieved that sourceless characteristic, owing to antenna and sensor are based on having flexible characteristic
Substrate, is allowed to have and can bend collapsible character, so achieve passive and wireless collapsible and
The novel sensor module that portability is high.
2, the sensor assembly based on flexible substrate that the present invention provides, because during antenna receiving signal
The electromagnetic wave received can be converted into electric energy by itself, and this electric energy is produced by the self-oscillation on sensor
Energy required for raw response, can produce in sensor flexible substrate if desired inductance, electric capacity or
The electronic devices such as resistance make entirety have from start-oscillation characteristic, then feed back to antenna and launch, so can
To be fabricated to passive module, and then it is applicable to the special environment being difficult to power for a long time.
3, the sensor assembly based on flexible substrate that the present invention provides, owing to being wireless module, no
Fettered by outer lead, it is simple to the arrangement of module.
Accompanying drawing explanation
Fig. 1 a is the schematic diagram of the curling capacitor type gas sensor utilizing two root length linear structures to make；
Fig. 1 b be by the structure helix-coil shown in Fig. 1 a after schematic diagram；
Fig. 2 a is the schematic diagram of the electromagnetic horn X-Y scheme of a planar structure；
Fig. 2 b is the schematic diagram of the electromagnetic horn that various piece in Fig. 2 a utilizes fixture obtain after integrating；
Fig. 3 is the schematic diagram of another flexible antenna structure based on flexible substrate；
Fig. 4 is the showing of sensor assembly constituted that the structure shown in Fig. 1 b and Fig. 3 combined
It is intended to.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with concrete real
Execute example, and referring to the drawings, the present invention is described in more detail.
The present invention is to provide a kind of sensor assembly based on flexible substrate, this sensor assembly with PI,
The flexible insulating materials such as PET are substrate, utilize various microelectronics micro-processing method, by sensor and nothing
Line emitting portion makes thereon and combines, and formation passive and wireless is collapsible and portability is high
The novel sensor module assembled.
The sensor assembly based on flexible substrate that the present invention provides, including Sensor section and antenna part
Point, both is with flexible insulating material as substrate, and is connected by wire or fixture, wherein flexible exhausted
Edge material can be polyimides (PI), polyethylene terephthalate (PET) or special material made of paper
Material etc., the relatively hard paper material of this special paper material e.g. kraft paper etc, Sensor section
For the outside sensitive signal of perception, antenna part is used for transmission and the reception of wireless signal, and the two combines
Realize detection and the transmission in a wireless scenario to outside sensitive signal.
In the present invention, this sensor assembly is defeated for transducing signal with the parameter of the electricity such as electric capacity or resistance
The change of output, i.e. sensor capacitance or resistance etc., result in the change of concussion frequency, and then causes
The change of satellite transmitted frequencies.This sensor assembly is with flexible antenna part as wireless transport module.
Sensor section, with flexible insulating material as substrate, makes various special sensors in substrate,
Such as gas sensor, humidity sensor etc..These special sensor plane structures can be different,
Can be the various patterns such as circle, ellipse, square, rectangle, irregular figure, and
Variously-shaped to bend to, to adapt to various different test environment, such as the environment under less space.
The size Control of whole device is in the range of 50 microns × 50 microns to 1m × 1m.Antenna part is also
With flexible insulating material as substrate, antenna can bend to different shapes according to demand, and can be spy
Determine to be finely adjusted under appearance profile, to reach to realize the effect of optimum reception or transmission.
1, Sensor section:
The present invention is as a example by capacitor type gas sensor, produces two electrode strips on flexible substrates,
Then making air-sensitive coating between two electrode strips, can obtain structure shown in Fig. 1 a, Fig. 1 a is to utilize
The schematic diagram of the curling capacitor type gas sensor that two root length linear structures make.For adapting to different quilts
Surveying environment, the structural bending shown in Fig. 1 a can be become shape as shown in Figure 1 b, Fig. 1 b is to scheme
Schematic diagram after structure helix-coil shown in 1a.
Wherein, the air-sensitive coating made between electrode on flexible substrates, its sensitive membrane used can
To select organic high molecular polymer such as polypyrrole (PPy) or polyaniline (PANI)；Burning
Thing such as Mo3、Sn2、ZnO、Ni；Or both mixture etc..Select according to surveyed gas
Property coating.Coating method includes the methods such as drop coating, dip-coating, thermal evaporation, printing.
Compared to traditional plane sensitive membrane, owing to can this capacitor type gas sensor be bent to several
Kind different shapes, to adapt to the space of test environment, is made in fixing flat unlike conventional sensors
On face or fixing curved surface, so this capacitor type gas sensor has three-dimensional sensitive character, greatly
Played the flexible characteristic of flexible substrate, be suitable for more test scene.
2, antenna part:
The present invention is as a example by electromagnetic horn and loop aerial, utilize flexible material as substrate, at base
Process some simple strips or circular pattern (and contact conductor, for being wirelessly transferred at the end
Then need not), can be with large area manufacture.Afterwards, the specific position several needs of substrate connected
(ratio is if desired for the position playing interconnection function being folding or bending over when) perforate.At this device of needs
The when of part, the hole of each correspondence is folded (fold, if device is less by hand, it is possible to use
Aid such as tweezers etc. assist together), each limit together will be fixed with fixture,
It is allowed to link together, forms the device three-dimensional stereochemical structure used in concrete actual application.When not making
During with this device, fixture can be taken off, device tiling be placed, or is rolled into tubular and shelves, with joint
Save space.Specifically as shown in Fig. 2 a, Fig. 2 b and Fig. 3.
Fig. 2 a show the electromagnetic horn X-Y scheme of a planar structure.Utilize surface manufacturing process
After pattern shown in Cheng Shangtu, non-area of the pattern is punctured.When not using this device, can be by it
Saving space is deposited in stacking, for large-sized antenna；When needs use this device,
The transmission carrying out data can be assembled, several parts fixture will be utilized to can get after integrating
Structure shown in Fig. 2 b.When need not use this device, fixture can be taken down, becoming Fig. 2 a
Shown structure.
Fig. 3 is another flexible antenna structure based on flexible substrate, and this structure is by the two of antenna
Part is produced in the tow sides of substrate.Wherein one side is in use, by A, B bending two ends
Connect to form a loop configuration so that positive surface antenna is circular, and reverse side antenna remains as straight line
Then AB two ends are connected by type respectively with sensor.The size of ring can suitably regulate.When not making
Used time, it is also possible to kept flat, save space, for large-sized antenna.
3, Sensor section and the connection of antenna part
Sensor section and two kinds of structures of antenna part are linked together present invention offer is provided
Wireless sensor module.
The present invention is as a example by the structure shown in Fig. 1 b and Fig. 3 being combined, and refers to Fig. 4.Fig. 4
Middle left side is the capacitance sensor folded, and right side is the antenna of bending, and the two is with wire A and wire B
It is attached.
Wire A or wire B is commonly referred to as electrode with the contact of capacitance sensor and antenna junction,
This electrode uses metal electrode or has the non-metal electrode (such as MWCNTS) of strong electric conductivity.Should
The material that electrode uses can be according to actual scene and the location decision to product.If needing preferably transmission
Characteristic and the transmission line of relatively low resistance, can use metal electrode, but metal electrode is in flexible substrate
On adhesive ability more weak, it may be necessary to growth multi-layered electrode or additive method to improve adhesive force.
Non-metal electrode can preferably be attached on flexible substrate, but performance is more weak compared with metal electrode.
Alternatively, it is also possible to use fixture antenna part to be connected with Sensor section, its function and principle
It is the same with being connected with wire, is briefly through antenna leads part with sensor lead portion
Divide after being directed at by clamp, the most just repeat no more.
Particular embodiments described above, is carried out the purpose of the present invention, technical scheme and beneficial effect
Further describe, be it should be understood that the foregoing is only the present invention specific embodiment and
, be not limited to the present invention, all within the spirit and principles in the present invention, that is done any repaiies
Change, equivalent, improvement etc., should be included within the scope of the present invention.
Claims (9)
1. a sensor assembly based on flexible substrate, it is characterised in that this sensor assembly bag
Include Sensor section and antenna part, both with flexible insulating material as substrate, and by wire or
Fixture connects, and wherein, Sensor section is for the outside sensitive signal of perception, and antenna part is for wireless
The transmission of signal and reception, the two be implemented in combination with in a wireless scenario to the detection of outside sensitive signal and
Transmission, wherein:
This Sensor section is the various sensors made in flexible insulating material substrate, and these pass
The planar structure of sensor is different, the most circular, oval, square, rectangle or irregular component
Shape, and all it is bent into variously-shaped, to adapt to various different test environment；
This antenna part utilize flexible insulating material as substrate, this substrate process strip or
Circular pattern；Afterwards, in the position perforate needing connection:
When using this antenna part when, will be to one by the hole folding fixture of each correspondence
Each the limit risen is fixed, and is allowed to link together, and forms 3-D solid structure；
When not using this antenna part when, fixture is taken off, antenna part tiling is placed,
Or it is rolled into tubular to shelve.
Sensor assembly based on flexible substrate the most according to claim 1, it is characterised in that
This flexible insulating material is polyimides, polyethylene terephthalate or special paper material.
Sensor assembly based on flexible substrate the most according to claim 1, it is characterised in that
The sensor made in described flexible insulating material substrate is gas sensor or humidity sensor.
Sensor assembly based on flexible substrate the most according to claim 3, it is characterised in that
Described gas sensor is to produce two electrode strips on flexible insulating material substrate, then at two
Air-sensitive coating is made between electrode strip.
Sensor assembly based on flexible substrate the most according to claim 4, it is characterised in that
The air-sensitive coating made between said two electrode strip, its sensitive membrane used is that organic polymer gathers
Compound, metal-oxide or organic high molecular polymer and the mixture of metal-oxide；It uses
Painting method include drop coating, dip-coating, thermal evaporation or printing.
Sensor assembly based on flexible substrate the most according to claim 5, it is characterised in that
Described organic high molecular polymer is polypyrrole or polyaniline, and described metal-oxide is Mo3、Sn2、
ZnO or Ni.
Sensor assembly based on flexible substrate the most according to claim 1, it is characterised in that
The size Control of this Sensor section is in the range of 50 microns × 50 microns to 1m × 1m.
Sensor assembly based on flexible substrate the most according to claim 1, it is characterised in that
This antenna part can bend to different shapes according to demand, and can carry out under given configuration profile
Fine setting, to realize the effect of optimum reception or transmission.
Sensor assembly based on flexible substrate the most according to claim 8, it is characterised in that
This antenna part is electromagnetic horn, loop aerial or flexible antenna.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310680558.4A CN103645215B (en) | 2013-12-12 | 2013-12-12 | Sensor module based on flexible substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310680558.4A CN103645215B (en) | 2013-12-12 | 2013-12-12 | Sensor module based on flexible substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103645215A CN103645215A (en) | 2014-03-19 |
| CN103645215B true CN103645215B (en) | 2017-01-11 |
Family
ID=50250466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310680558.4A Active CN103645215B (en) | 2013-12-12 | 2013-12-12 | Sensor module based on flexible substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103645215B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015085537A1 (en) * | 2013-12-12 | 2015-06-18 | 中国科学院微电子研究所 | Sensor module based on flexible substrate |
| CN104374490A (en) * | 2014-11-17 | 2015-02-25 | 王东方 | Passive wireless temperature monitoring lantern ring for metal bearing |
| CN107179336B (en) * | 2016-03-10 | 2020-02-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Pasting type ionic flexible humidity sensor, and preparation method and application thereof |
| CN108627542A (en) * | 2017-03-23 | 2018-10-09 | 张家港康得新光电材料有限公司 | Flexible gas sensor and its production method |
| CN108414584A (en) * | 2018-03-05 | 2018-08-17 | 北京化工大学 | A kind of preparation method of flexible, wearable moisture sensor and its application in breathing detection |
| CN114137040B (en) * | 2021-11-26 | 2023-09-01 | 南京农业大学 | Foldable passive NFC flexible sensing device and manufacturing method and using method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1517296A (en) * | 2002-09-26 | 2004-08-04 | ���ǵ�����ʽ���� | Flexible micro-electromechanical system changer and its manufacturing method and radio loud-speaker |
| CN1711633A (en) * | 2002-11-08 | 2005-12-21 | 皇家飞利浦电子股份有限公司 | Flexible device and method of manufacturing the same |
| EP2275805A1 (en) * | 2009-07-16 | 2011-01-19 | Acreo AB | Moister sensor |
| CN102798648A (en) * | 2012-07-30 | 2012-11-28 | 中国科学院微电子研究所 | Method for preparing sensor membrane material based on flexible substrate |
-
2013
- 2013-12-12 CN CN201310680558.4A patent/CN103645215B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1517296A (en) * | 2002-09-26 | 2004-08-04 | ���ǵ�����ʽ���� | Flexible micro-electromechanical system changer and its manufacturing method and radio loud-speaker |
| CN1711633A (en) * | 2002-11-08 | 2005-12-21 | 皇家飞利浦电子股份有限公司 | Flexible device and method of manufacturing the same |
| EP2275805A1 (en) * | 2009-07-16 | 2011-01-19 | Acreo AB | Moister sensor |
| CN102798648A (en) * | 2012-07-30 | 2012-11-28 | 中国科学院微电子研究所 | Method for preparing sensor membrane material based on flexible substrate |
Non-Patent Citations (3)
| Title |
|---|
| 柔性MEMS衬底材料及其在传感器上的应用;郑湃 等;《微纳电子技术》;20091031;第46卷(第10期);第604-609页 * |
| 聚3_己基噻吩及其掺杂TiO_2材料对NO_2的气敏特性;梁圣法 等;《传感器与微***》;20120731;第31卷(第7期);第55-57、60页 * |
| 聚二甲基二烯丙基氯化铵元件的氨敏性能研究;詹爽 等;《电子元件与材料》;20130131;第32卷(第1期);第31页第2栏第1段至第32页第1栏第2段 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103645215A (en) | 2014-03-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103645215B (en) | Sensor module based on flexible substrate | |
| WO2015085537A1 (en) | Sensor module based on flexible substrate | |
| CN102934237B (en) | Integrated photovoltaic cells and radio-frequency antenna | |
| CN114725656B (en) | Antenna with frequency selective element | |
| CN103053073B (en) | Resonance circuit and antenna assembly | |
| TWI345874B (en) | Band pass filter | |
| JP2009544010A5 (en) | ||
| JP6075511B2 (en) | ANTENNA DEVICE AND ELECTRONIC DEVICE | |
| CN104466354B (en) | Antenna structure and wireless communication device with the antenna structure | |
| JP2014501465A5 (en) | ||
| JP2012253700A (en) | Wireless communication device, its manufacturing method, and metal article with wireless communication device | |
| JP2009159480A5 (en) | ||
| US10892649B2 (en) | Radio frequency (RF) power source and method for use with a wireless power transmitter of a wireless power transfer system | |
| CN103794868B (en) | Antenna module | |
| WO2012159403A1 (en) | Antenna device | |
| Anacleto et al. | Self-folding microcube antennas for wireless power transfer in dispersive media | |
| CN209448023U (en) | Antenna assembly and electronic equipment | |
| JP7101853B2 (en) | Antennas and wireless communication equipment | |
| CN202333124U (en) | Microstrip antenna | |
| JP2009218878A (en) | Antenna, circuit board, circuit module, and electronic device | |
| TWM393817U (en) | Chip antenna with capacitive load | |
| TWI245459B (en) | A miniature monopole antenna for wireless systems | |
| CN208299038U (en) | A kind of low-frequency range small size antenna | |
| CN202940327U (en) | Folded-dipole passive electronic tag antenna | |
| Le | Nano-material based flexible radio frequency sensors for wearable health and environment monitoring: Designs and prototypes utilizing 3d/inkjet printing technologies |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |