A kind of pressure sensor chip nation fixed structure
Technical field
The invention belongs to pressure sensor technique field, relate in particular to a kind of pressure sensor chip nation fixed structure.
Background technology
Conventional pressure sensor chip is directly connected on substrate by glue, and nation's alignment is connected to substrate from sensor upper surface again, and chip upper surface is higher than upper surface of base plate, nation's alignment stroke is long, flexibility is large, cause nation's alignment to connect unreliable, easily fracture, causes sensor life-time low.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of nation alignment and connects reliable, high pressure sensor chip nation fixed structure of life-span.
In order to solve the problems of the technologies described above, the technical solution adopted in the present invention is: a kind of pressure sensor chip nation fixed structure, comprise substrate, chip and nation's alignment, described substrate is provided with groove, described chip is arranged in the groove of substrate, described nation's alignment one end is connected with chip, and the other end is connected with substrate.
The upper surface of described substrate is concordant with the upper surface of chip.
The periphery of described chip is connected by glue with the sidewall of the groove of substrate.
The upper surface of described glue is concordant with the upper surface of substrate.
The aluminum steel that described nation alignment is 1.0~2.0mil.
Described groove is provided with pore.
The invention has the advantages that, by chip being arranged in the groove of substrate, thereby reduce the height of chip upper surface, the difference in height of chip and upper surface of base plate is reduced, when nation's alignment connects chip and substrate, the stroke of nation's alignment is short, flexibility is little, thereby improves nation's alignment connection reliability, increases sensor serviceable life.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of pressure sensor chip of the present invention nation fixed structure;
Fig. 2 is prior art structural representation;
Mark in above-mentioned figure is: 1, substrate, 2, chip, 3, glue.
Embodiment
Fig. 1 is the structural representation of a kind of pressure sensor chip of the present invention nation fixed structure, comprises substrate 1, chip 2 and nation's alignment, and substrate 1 is provided with groove, and chip 2 is arranged in the groove of substrate 1, and nation's alignment one end is connected with chip 2, and the other end is connected with substrate 1.
The upper surface of substrate 1 is concordant with the upper surface of chip 2.When nation's alignment connection substrate 1 and chip 2 upper surface, nation's alignment stroke is short, and flexibility is little.
The sidewall of the periphery of chip 2 and the groove of substrate 1 is connected by glue 3.Increased the contact area of chip 2 with substrate 1, thereby improved the load-bearing capacity of chip 2, made chip 2 more stable work reliable.
The upper surface of glue 3 is concordant with the upper surface of substrate 1, makes substrate 1 surface more smooth, and structure is more stable.
Nation's alignment is the aluminum steel of 1.0mil.Groove is provided with pore.
Adopt after above-mentioned structure, by chip 2 being arranged in the groove of substrate 1, thereby reduce the height of chip 2 upper surfaces, the difference in height of chip 2 and substrate 1 upper surface is reduced, when nation's alignment connects chip 2 and substrate 1, the stroke of nation's alignment is short, flexibility is little, thereby improves nation's alignment connection reliability, increases sensor serviceable life.
By reference to the accompanying drawings the present invention is exemplarily described above; obviously specific implementation of the present invention is not subject to the restrictions described above; as long as adopted the improvement of the various unsubstantialities that method of the present invention design and technical scheme carry out; or without improving, design of the present invention and technical scheme are directly applied to other occasion, all within protection scope of the present invention.