CN103644947B - Gas micro-flow measuring device - Google Patents
Gas micro-flow measuring device Download PDFInfo
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- CN103644947B CN103644947B CN201310694925.6A CN201310694925A CN103644947B CN 103644947 B CN103644947 B CN 103644947B CN 201310694925 A CN201310694925 A CN 201310694925A CN 103644947 B CN103644947 B CN 103644947B
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Abstract
The invention discloses a gas micro-flow measuring device. The device comprises an inlet pressure-stabilizing container, a to-be-measured micro-nano channel or device, a two-channel volume indication unit, an outlet pressure-stabilizing container and an image type position recording unit, wherein the pressure in the pressure-stabilizing containers is matched with a gas supply flowmeter through throttle valves for continuous high-resolution regulation; then one channel of the two-channel volume indication unit is used for building stable flow in the to-be-measured micro-nano channel or device with the inlet pressure-stabilizing container and the outlet pressure-stabilizing container; and the other channel for presetting liquid drops is switched on, and the image type position recording unit consisting of a microscope objective and a CCD (charge coupled device) camera is used for tracking the movement of the liquid drops. The measuring device has the advantages of high measuring accuracy and resolution and proneness to implementation.
Description
Technical field
The present invention relates to a kind of measurement apparatus, belong to field of measuring technique, particularly to a kind of gas micro-flow measurement dress
Put, for the experiment measurement of gas flow in micro/nano-scale passage or components and parts.
Background technology
At present, MEMS mems processing and manufacturing and application has become the forward position of development in Hi-Tech, the having of this field
A little yardsticks have come into the category of nanometer technology, and flowing in micro-nano machinery for the gas can enter into slipstream or even transition
Area, due to the impact of rarified flow and pinch effect, there is a great difference with conventional flowing in its dynamics, thermodynamic behaviour, to the greatest extent
Pipe has carried out extensive work for the research of Characteristics of Micro Scale Flow, but also ripe far away to the understanding of its flow mechanism, and one
A little research conclusions are also not yet unified, therefore, no matter from research angle or the detection based on industrial field micro-nano device, have
Necessary development is for the measurement apparatus of micrometeor gas flow.
In theory, for ideal gas, the mass flow changing over system is decided by the change of volume, pressure and temperature
Change, if controlling temperature approximately constant temperature in measurement process and ignoring its impact, the measurement of Tiny Mass flow can be converted into measurement
Pressure change under constant volume or the change of the volume under constant pressure, due to existing under the impact leaking venting and low-pressure indirectly
, so that the measurement of slight pressure change is more difficult, the tiny volume under constant pressure becomes for the precision of measurement pressure and poor real
Change measurement and equally exist difficulty.
Content of the invention
The problem existing for prior art, the present invention provides a kind of certainty of measurement and high resolution and gas easy to implement
Body micro-flow measurement device, to meet the demand to gas flow measurement for the micro-nano mechanical field, the present invention is according to following technology
Scheme is realizing: a kind of gas micro-flow measurement device, including entrance voltage-stabilizing system 1, tested micro-nano channel or device 2, holds
Long-pending indicating member, outlet voltage-stabilizing system 4, vacuum-pumping system 13 and image recording unit 5, wherein entrance voltage-stabilizing system 1, tested
Micro-nano channel or device 2, volume indicating member and outlet pressurizing vessel 4, are sequentially connected in series closed system, its feature in order
It is: described volume indicating member is binary channels volume indicating member 3, and described binary channels volume indicating member 3 is by bilateral
Road is formed in parallel, and one of passage is sequentially connected the 5th valve 21, the first calibrating tube 22 and the 6th valve 23 by conduit and connects
Form, another passage is sequentially connected the 7th valve 27, the second calibrating tube 25 and the 8th valve 24 by conduit and is in series, first
Injection drop 26 in calibrating tube 22 or the second calibrating tube 25, described image recording unit 5 is arranged on the mark of injection drop 26
Before fixed tube, the motion of drop 26 followed the tracks of in record.
Preferably, described entrance voltage-stabilizing system includes being sequentially connected the first valve 8, inlet container 7 in order using conduit,
One interface of described inlet container 7 is picked out using conduit and is sequentially connected described in first throttle valve 10, the 3rd valve 12 master
Inlet container 7 is respectively fixedly connected with first pressure sensor 11 and inlet container interface 6；Described outlet voltage-stabilizing system 4 includes
It is sequentially connected the second valve 18, exit vessel 19 using conduit in order, an interface of described exit vessel 7 utilizes conduit
Pick out and be sequentially connected second throttle 16, the 4th valve 14, be respectively fixedly connected with second pressure sensor in exit vessel 19
15 and exit vessel interface 20, the 3rd valve 12 in described entrance voltage-stabilizing system 1 and the 4th valve of outlet voltage-stabilizing system 4
14 are connected with vacuum-pumping system 13 respectively；In the first valve 8 of entrance voltage-stabilizing system 1 and the second valve of outlet voltage-stabilizing system 4
Door 18 connects the first gas supply flow meter 9 and the second gas supply flow meter 17, respectively by first throttle valve 10 and second throttle 16
Cooperation with the first gas supply flow meter 9 and the second gas supply flow meter 17 adjusts the pressure in container.
Further preferably, described image recording unit 5 is made up of microcobjective 28 and ccd camera 29.
Beneficial effects of the present invention: using choke valve and mass flowmenter cooperation adjustment micro/nano-scale passage or 2 liang of device
The pressure at end, is conducive to carrying so that Stress control is more stable because gas supply flow meter has continuously high-resolution adjustment capability
High measurement accuracy；Using symmetrically twin-channel volume indicating member, can in a passage preset drop, when decreasing measurement
Add the impact that drop flows to stabilizing gas；And droplet position and time linear data is taken in calculation of pressure,
Eliminate the impact to measurement for the interchannel conversion, be conducive to improving certainty of measurement；The microcobjective that image recording unit adopts carries
The high resolution ratio to droplet position, and the real time record of ccd camera so that data pickup is more convenient more accurate, be also beneficial to improve
The resolution ratio of measurement and order of accuarcy.
Brief description
Below in conjunction with the accompanying drawings technical scheme is described further:
Fig. 1 gas micro-flow measurement device constitutes schematic diagram；
Fig. 2 entrance pressurizing vessel and outlet pressurizing vessel constitute schematic diagram；
Fig. 3 binary channels Volume rendering unit constitutes schematic diagram；
Fig. 4 image recording unit constitutes schematic diagram；
In figure: 1, entrance pressurizing vessel；2nd, micro-nano channel or device；3 binary channels volume indicating members；4th, outlet voltage stabilizing is held
Device；5th, image recording unit；6th, inlet container interface；7th, inlet container；8th, the first valve；9th, the first gas supply flow meter；10th,
One choke valve；11st, first pressure sensor；12nd, the 3rd valve；13rd, vacuum-pumping system；14th, the 4th valve；15th, the second pressure
Force snesor；16th, second throttle；17th, the second gas supply flow meter；18th, the second valve；19th, exit vessel；20th, exit vessel
Interface；21st, the 5th valve；22nd, the first calibrating tube；23rd, the 6th valve；24th, the 8th valve；25th, the first calibrating tube；26th, drop；
27th, the 7th valve；28th, microcobjective；29th, ccd camera.
Specific embodiment
A kind of gas micro-flow measurement device as shown in Figure 1, including entrance pressurizing vessel 1, tested micro-nano channel or device
Part 2, binary channels volume indicating member 3, outlet voltage-stabilizing system 4, vacuum-pumping system 13 and image recording unit 5, wherein entrance
The tested micro-nano channel of voltage-stabilizing system 1 or device 2, binary channels volume indicating member 3, outlet pressurizing vessel 4 are sequentially connected in order
It is composed in series the confining gas flowing space；As shown in Fig. 2 described entrance voltage-stabilizing system 1 is included using conduit in order successively
Connect the first valve 8, inlet container 7, an interface of described inlet container 7 is picked out using conduit and is sequentially connected first throttle
The main described inlet container 7 of valve 10, the 3rd valve 12 is respectively fixedly connected with first pressure sensor 11 and inlet container interface 6；
Described outlet voltage-stabilizing system 4 includes being sequentially connected the second valve 18, exit vessel 19 in order using conduit, described outlet
One interface of container 7 picks out and is sequentially connected second throttle 16, the 4th valve 14 using conduit, in exit vessel 19 respectively
It is fixedly connected second pressure sensor 15 and exit vessel interface 20, in the first valve 8 and the outlet voltage stabilizing of entrance voltage-stabilizing system 1
Second valve 18 of system 4 connects the first gas supply flow meter 9 and the second gas supply flow meter 17 respectively, and gas supply flow meter can continuously be adjusted
Save and there is high resolution ratio；The 3rd valve 12 in described entrance voltage-stabilizing system 1 and the 4th valve of outlet voltage-stabilizing system 4
14 are connected with vacuum-pumping system 13 respectively；As shown in figure 3, described binary channels volume indicating member 3 is by binary channels parallel connection
Become, one of passage is sequentially connected the 5th valve 21, the first calibrating tube 22 and the 6th valve 23 by conduit and is in series, another
Passage is sequentially connected the 7th valve 27, the second calibrating tube 25 and the 8th valve 24 by conduit and is in series, in the second calibrating tube 25
Injection drop 26, two passages of described binary channels volume indicating member 3 should have identical physical dimension, internal diameter according to
High accuracy and uniformity are selected and should be had to measurement range, and the entrance and exit of two passages is in parallel by threeway composition, two
In symmetric channel, one is used for adjusting measuring system to stable state；Another preset drop, after system stability, by valve
The switching of door carries out the measurement of volume change；As shown in figure 4, described image recording unit 5 is arranged on the second calibrating tube 25
Relevant position, is made up of with ccd camera microcobjective 28, and ccd camera should select at a high speed and high pixel product, the putting of microcobjective
Big multiple should be selected with the pixels fit of ccd camera, and the motion of drop 26 followed the tracks of in record.
After system connects, the air-tightness in order to ensure system should be hunted leak to the system connecting, and leak rate should be less than 10- 9pam3/s；Then proceed by measurement, first, system is vacuumized, in vacuum, the first valve 8, the second valve 18 begin
Close eventually, the 5th valve 21, the 6th valve 23, the 8th valve 24, the 7th valve 27 are opened all the time, start vacuum-pumping system 13
Afterwards, the 3rd valve 12, the 4th valve 14, first throttle valve 10, second throttle 16 are opened successively, the final vacuum of system should
Reach 1 × 10-3pa.
System reaches capacity after vacuum, closes the 7th valve 27, opens valve the first valve 8, the second valve 18 afterwards, leads to
Cross gas supply flow meter 9, gas supply flow meter 17 and be filled with experimental gas into system, then pass through to adjust gas supply flow meter 9, supply air-flow
The aperture of gauge 17 and first throttle valve 10, second throttle 16 controls the pressure in entrance voltage-stabilizing system 1 and outlet voltage-stabilizing system 4
Power reaches and stablizes in experimental pressure, and now, gas flows through micro-nano channel or device 2 from entrance voltage-stabilizing system 1 and passes through first
Calibrating tube 22 place passage flows in exit vessel 7；After reaching steady pressure, start preset drop；Now, binary channels volume
In indicating member 3, only the 7th valve 27 is closed, the 5th valve 21, the 6th valve 23, all open modes of the 8th valve 24.
Drop 26 is injected in the second calibrating tube 25 by syringe, because the 7th valve 27 is closed, drop 26 can be in the second demarcation
Remains stationary state in pipe 25；After microcobjective 28 and ccd camera 29 are installed and calibrated startup, simultaneously close off the 5th valve
21, open the 7th valve 27, drop will gradually setting in motion, the movement position of ccd cameras record drop and temporal information.8th
Valve 24 can be closed when drop is close, to prevent it from entering in exit vessel 19.
After measurement terminates, carry out data processing, take the data that droplet position and time are linear, and calculate by 1 formula
Gas tiny flow quantity；
Wherein: qmGas flow, unit: kg/s；
P exports the pressure of gas in pressurizing vessel, unit: pa；
The tested gas molar quality of m, unit: kg/mol；
R mol gas constant, unit: 8.31441j/mol k；
T temperature, unit: k；
A volume indicating member corridorbarrier function tube section amasss, unit: m2；
δ l presses the liquid drop movement distance of calibration standard, microcobjective multiplication factor and the conversion of ccd pixel, unit, m；
The time that δ t liquid drop movement δ l distance is experienced, s；
Understand according to a kind of gas micro-flow measurement device provided by the present invention, there is certainty of measurement and divide in sum
The high good effect of resolution, the minimum mass flow of this measurement device is up to 1 × 10-11kg/s.
Specific embodiment in the present invention is to be write according to the mode gone forward one by one, and mainly highlights each embodiment party
Difference in case, its similar portion can be with cross-reference.
Above in conjunction with accompanying drawing, embodiments of the present invention are elaborated, but the present invention is not limited to above-mentioned enforcement
Mode, in the ken that those of ordinary skill in the art possess, can also be on the premise of without departing from present inventive concept
Make a variety of changes.
Claims (2)
1. a kind of gas micro-flow measurement device, including entrance voltage-stabilizing system (1), tested micro-nano channel or tested micro-nano device
(2), volume indicating member, outlet voltage-stabilizing system (4), vacuum-pumping system (13) and image recording unit (5), wherein entrance is steady
Pressure system (1), tested micro-nano channel or tested micro-nano device (2), volume indicating member and outlet voltage-stabilizing system (4) in order according to
Secondary be composed in series closed system it is characterised in that: described volume indicating member be binary channels volume indicating member (3), described
Binary channels volume indicating member (3) be formed in parallel by binary channels, one of passage is sequentially connected the 5th valve by conduit
(21), the first calibrating tube (22) and the 6th valve (23) are in series, another passage by conduit be sequentially connected the 7th valve (27),
Second calibrating tube (25) and the 8th valve (24) are in series, and inject liquid in the first calibrating tube (22) or the second calibrating tube (25)
Drip (26), before described image recording unit (5) is arranged on the calibrating tube of injection drop (26), the fortune of drop (26) followed the tracks of in record
Dynamic；Described entrance voltage-stabilizing system includes the first valve (8), the inlet container (7) being sequentially connected in order using conduit, described
One interface of inlet container (7) picks out and is sequentially connected first throttle valve (10), the 3rd valve (12) using conduit, described
Inlet container (7) is fixedly connected first pressure sensor (11) and inlet container interface (6)；Described outlet voltage-stabilizing system (4)
Including the second valve (18) being sequentially connected in order using conduit, exit vessel (19), the one of described exit vessel (19)
Individual interface picks out and is sequentially connected second throttle (16), the 4th valve (14) using conduit, and exit vessel (19) is fixedly connected
Second pressure sensor (15) and exit vessel interface (20)；The 3rd valve (12) in described entrance voltage-stabilizing system (1) and
4th valve (14) of outlet voltage-stabilizing system (4) is connected with vacuum-pumping system (13) respectively；Described entrance voltage-stabilizing system (1)
The first valve (8) be fixedly connected the first gas supply flow meter (9)；Second valve (18) of described outlet voltage-stabilizing system (4) is solid
Surely connect the second gas supply flow meter (17).
2. a kind of gas micro-flow measurement device according to claim 1 it is characterised in that: described image recording unit
(5) it is made up of microcobjective (28) and ccd camera (29).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310694925.6A CN103644947B (en) | 2013-12-17 | 2013-12-17 | Gas micro-flow measuring device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310694925.6A CN103644947B (en) | 2013-12-17 | 2013-12-17 | Gas micro-flow measuring device |
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| CN103644947B true CN103644947B (en) | 2017-01-18 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104568954A (en) * | 2014-12-19 | 2015-04-29 | 昂纳自动化技术（深圳）有限公司 | Electronic cigarette smoke concentration detection system |
| CN106323393B (en) * | 2016-08-31 | 2018-12-18 | 电子科技大学 | A kind of double mode micro liquid flowmeter based on light manipulation |
| CN110095275A (en) * | 2019-05-31 | 2019-08-06 | 北京长城华冠汽车技术开发有限公司 | The table apparatus and brake oil weight testing method of analogue measurement brake-pedal travel |
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| CN101435712A (en) * | 2008-12-26 | 2009-05-20 | 青岛崂山应用技术研究所 | Device for measuring air volume flow |
| CN101706297A (en) * | 2009-08-10 | 2010-05-12 | 浙江鼎立实业有限公司 | Digital display micropressure and micro-flow comprehensive test bed |
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| CN102937467A (en) * | 2012-11-12 | 2013-02-20 | 中国航天科技集团公司第五研究院第五一〇研究所 | All-metal gas micro-flow meter |
| CN102967527A (en) * | 2012-11-02 | 2013-03-13 | 卢耀文 | Composite material deflating rate test system with self calibration function and method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6796165B2 (en) * | 2002-11-18 | 2004-09-28 | Southwest Research Institute | Apparatus and method for real-time measurement of mass, size and number of solid particles of particulate matter in engine exhaust |
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Patent Citations (5)
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| CN101435712A (en) * | 2008-12-26 | 2009-05-20 | 青岛崂山应用技术研究所 | Device for measuring air volume flow |
| CN101706297A (en) * | 2009-08-10 | 2010-05-12 | 浙江鼎立实业有限公司 | Digital display micropressure and micro-flow comprehensive test bed |
| CN102042852A (en) * | 2010-10-26 | 2011-05-04 | 中国航天科技集团公司第五研究院第五一○研究所 | Method for measuring minimum gas flow |
| CN102967527A (en) * | 2012-11-02 | 2013-03-13 | 卢耀文 | Composite material deflating rate test system with self calibration function and method |
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