CN103639711B - High-bearing-capacitprecise precise two-dimensional motion platform - Google Patents
High-bearing-capacitprecise precise two-dimensional motion platform Download PDFInfo
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- CN103639711B CN103639711B CN201310667251.0A CN201310667251A CN103639711B CN 103639711 B CN103639711 B CN 103639711B CN 201310667251 A CN201310667251 A CN 201310667251A CN 103639711 B CN103639711 B CN 103639711B
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- air floating
- floating table
- slide way
- cross slide
- movable slider
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67138—Apparatus for wiring semiconductor or solid state device
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Bearings For Parts Moving Linearly (AREA)
Abstract
The invention discloses a kind of High-bearing-capacitprecise precise two-dimensional motion platform, solve existing two-dimension moving platform motion guide precision under high-mechanic and can not meet high-precision problem.Be included on marble bedplate (1) and be provided with cross slide way (2) and cross slide way movable slider (3), the top crossbeam of T-shaped transverse shifting stand (5) is fixedly installed on cross slide way movable slider, be fixedly installed in the longeron bottom of T-shaped transverse shifting stand and support road wheel (15), T-shaped transverse shifting stand is respectively arranged with longitudinal rail (6) and longitudinal driving device (8), one side of rectangle movable frame (9) is fixedly connected on longitudinal rail movable slider, air floating table (12) is movably set with in rectangle movable frame, the air floating table base (16) of air floating table is movably arranged on marble bedplate.This invention removes the impact of high capacity on guide rail guiding accuracy, solve the contradiction between locating platform bearing capacity and precision.
Description
Technical field
The present invention relates to the accurate XY motion platform of a kind of high-mechanic, being applied in precision optical machinery particularly Electronic Special Equipment field, is a kind of high precision motion locating platform of high-bearing capacity.
Background technology
On high accuracy reverse chip key binder, two-dimension moving platform is its key equipment, and this device needs the exactitude position realized chip and substrate, also will carry the pressure of maximum 150 kilograms simultaneously.Existing accurate two-dimensional motion platform is all be arranged on line slideway, and line slideway had not only been responsible for accurate guiding but also had been responsible for the weight of work package on carrying platform and platform, when motion platform is under high-mechanic, there is the unappeasable problem of motion guide precision.
Summary of the invention
The invention provides a kind of High-bearing-capacitprecise precise two-dimensional motion platform, solve existing two-dimension moving platform motion guide precision under high-mechanic and can not meet high-precision technical problem.
The present invention solves above technical problem by the following technical programs:
A kind of High-bearing-capacitprecise precise two-dimensional motion platform, comprise marble bedplate, marble bedplate is provided with cross slide way, cross slide way is provided with cross slide way movable slider, the marble bedplate in the outside of cross slide way is provided with lateral driver device, the screw of lateral driver device is fixedly connected with cross slide way movable slider, the top crossbeam of T-shaped transverse shifting stand is fixedly installed on cross slide way movable slider, support road wheel is fixedly installed in the longeron bottom of T-shaped transverse shifting stand, T-shaped transverse shifting stand is respectively arranged with longitudinal rail and longitudinal driving device, longitudinal rail is provided with longitudinal rail movable slider, the screw of longitudinal driving device is fixedly connected with longitudinal rail movable slider, one side of rectangle movable frame is fixedly connected on longitudinal rail movable slider, air floating table is movably set with in rectangle movable frame, the air floating table base of air floating table is movably arranged on marble bedplate.
Air floating table base is provided with air floating table footstock, stretcher before the front side edge of air floating table footstock is fixedly installed, stretcher after the back side edge of air floating table footstock is fixedly installed, shell fragment bridge before the front side frame end face of rectangle movable frame is provided with, shell fragment bridge after the rear side frame end face of rectangle movable frame is provided with, front stretcher is movably arranged on front shell fragment bridge, and rear stretcher is movably arranged on rear shell fragment bridge.
Structure of the present invention is simple; Design is abandoned the thought that traditional X-ray Y Platform Designing middle guide had not only led but also had been responsible for carrying.Motion adopts high precision ball guide rail to realize XY precision guiding, plane air-float guide rail is set between platform bearer main body and granite base plane, achieve high-mechanic, high stability, low friction, eliminate the impact of high capacity on guide rail guiding accuracy, solve the contradiction between locating platform bearing capacity and precision.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of air floating table 12 of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described in detail:
A kind of High-bearing-capacitprecise precise two-dimensional motion platform, comprise marble bedplate 1, marble bedplate 1 is provided with cross slide way 2, cross slide way 2 is provided with cross slide way movable slider 3, the marble bedplate 1 in the outside of cross slide way 2 is provided with lateral driver device 4, the screw of lateral driver device 4 is fixedly connected with cross slide way movable slider 3, the top crossbeam of T-shaped transverse shifting stand 5 is fixedly installed on cross slide way movable slider 3, be fixedly installed in the longeron bottom of T-shaped transverse shifting stand 5 and support road wheel 15, T-shaped transverse shifting stand 5 is respectively arranged with longitudinal rail 6 and longitudinal driving device 8, longitudinal rail 6 is provided with longitudinal rail movable slider 7, the screw of longitudinal driving device 8 is fixedly connected with longitudinal rail movable slider 7, one side of rectangle movable frame 9 is fixedly connected on longitudinal rail movable slider 7, air floating table 12 is movably set with in rectangle movable frame 9, the air floating table base 16 of air floating table 12 is movably arranged on marble bedplate 1.
Air floating table base 16 is provided with air floating table footstock 17, stretcher 13 before the front side edge of air floating table footstock 17 is fixedly installed, stretcher 14 after the back side edge of air floating table footstock 17 is fixedly installed, shell fragment bridge 10 before the front side frame end face of rectangle movable frame 9 is provided with, shell fragment bridge 11 after the rear side frame end face of rectangle movable frame 9 is provided with, front stretcher 13 is movably arranged on front shell fragment bridge 10, and rear stretcher 14 is movably arranged on rear shell fragment bridge 11.
Patent of the present invention adopts marble bedplate 1 as the pedestal of XY motion platform, the motion platform in plane X direction, i.e. T-shaped transverse shifting stand 5, be arranged on marble bedplate 1, one end of T-shaped transverse shifting stand 5 is arranged on cross slide way 2, and the other end is arranged in the flat surface of marble bedplate 1 by supporting road wheel 15; The motion platform of plane Y-direction, i.e. longitudinal rail movable slider 7, be arranged on T-shaped transverse shifting stand 5; Air floating table 12 is supporting bodies of motion platform, be a plane floating cushion, be movably arranged on marble bedplate 1, after air floating table 12 is filled with clean compressed air, air film is formed with the flat surface of marble bedplate 1, can without frictionally moving freely in plane X, Y both direction.One side of rectangle movable frame 9 is fixedly connected on longitudinal rail movable slider 7, air floating table 12 is movably set with in rectangle movable frame 9, and air floating table 12 is connected with the front stretcher 13 on air floating table 12 and rear stretcher 14 elasticity with rear shell fragment bridge 11 by front shell fragment bridge 10, by control cross slide way movable slider 3 and longitudinal rail movable slider 7 realize to the XY of rectangle movable frame 9 to accurate running fix.Because shell fragment bridge only limits the motion in XY direction, and the fine motion that the Z-direction load of air supporting seat produces, do not increase the load of XY platform, be directly delivered on marble bedplate 1, therefore the load capacity of platform and precision are ensured by two dissimilar guide rails, be independent of each other, solve the contradiction between platform bearer power and platform precision.
Described XY platform type of drive is not limited to motor and drives leading screw mode, and type of drive can be that linear electric motors or voice coil motor drive.Described XY platform guidance mode is not limited to spherical guide mode, and guidance mode also can be air-float guide rail.Support road wheel 15 guidance mode of one, described Y platform can also be spherical guide or floating cushion.Described air floating table 12 is not limited to monoblock floating cushion scheme, also can be multiple little floating cushion composition floating cushion carrying groups.
Claims (1)
1. a High-bearing-capacitprecise precise two-dimensional motion platform, comprise marble bedplate (1), marble bedplate (1) is provided with cross slide way (2), cross slide way (2) is provided with cross slide way movable slider (3), the marble bedplate (1) in the outside of cross slide way (2) is provided with lateral driver device (4), the screw of lateral driver device (4) is fixedly connected with cross slide way movable slider (3), it is characterized in that, the top crossbeam of T-shaped transverse shifting stand (5) is fixedly installed on cross slide way movable slider (3), be fixedly installed in the longeron bottom of T-shaped transverse shifting stand (5) and support road wheel (15), T-shaped transverse shifting stand (5) is respectively arranged with longitudinal rail (6) and longitudinal driving device (8), longitudinal rail (6) is provided with longitudinal rail movable slider (7), the screw of longitudinal driving device (8) is fixedly connected with longitudinal rail movable slider (7), one side of rectangle movable frame (9) is fixedly connected on longitudinal rail movable slider (7), air floating table (12) is movably set with in rectangle movable frame (9), the air floating table base (16) of air floating table (12) is movably arranged on marble bedplate (1), air floating table base (16) is provided with air floating table footstock (17), the front side edge of air floating table footstock (17) is fixedly installed front stretcher (13), the back side edge of air floating table footstock (17) is fixedly installed rear stretcher (14), the front side frame end face of rectangle movable frame (9) is provided with front shell fragment bridge (10), the rear side frame end face of rectangle movable frame (9) is provided with rear shell fragment bridge (11), front stretcher (13) is movably arranged on front shell fragment bridge (10), and rear stretcher (14) is movably arranged on rear shell fragment bridge (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310667251.0A CN103639711B (en) | 2013-12-11 | 2013-12-11 | High-bearing-capacitprecise precise two-dimensional motion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310667251.0A CN103639711B (en) | 2013-12-11 | 2013-12-11 | High-bearing-capacitprecise precise two-dimensional motion platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103639711A CN103639711A (en) | 2014-03-19 |
| CN103639711B true CN103639711B (en) | 2016-01-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310667251.0A Active CN103639711B (en) | 2013-12-11 | 2013-12-11 | High-bearing-capacitprecise precise two-dimensional motion platform |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106168493B (en) * | 2015-05-20 | 2019-04-23 | 冯黎 | The double crossbeam design structures of gantry measuring machine combined by guide beam with load-bearing driving beam |
| CN109048028A (en) * | 2018-08-07 | 2018-12-21 | 航天恒星科技有限公司 | wire bonding method and system |
| CN109014457B (en) * | 2018-08-13 | 2024-03-26 | 中国纺织科学研究院有限公司 | Air floatation guiding and positioning device for processing spinneret plate |
| CN113437008B (en) * | 2021-06-23 | 2023-11-17 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | bonding machine |
Citations (6)
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|---|---|---|---|---|
| US4778143A (en) * | 1984-06-15 | 1988-10-18 | Omron Tateisi Electronics Co. | Apparatus for locking movable table |
| CN2148634Y (en) * | 1992-05-30 | 1993-12-08 | 李鹏生 | Superprecious work-table |
| CN1423810A (en) * | 1999-11-24 | 2003-06-11 | 多佛器械公司 | High-stability spin stand platform |
| CN101408732A (en) * | 2008-11-19 | 2009-04-15 | 哈尔滨工业大学 | Embedded type common basal plane two-dimension balance double-drive double-workpiece platform positioning system |
| CN102393610A (en) * | 2011-11-12 | 2012-03-28 | 哈尔滨工业大学 | Gyro precession type active stabilizing device for workbench of lithography machine |
| CN202317689U (en) * | 2011-11-15 | 2012-07-11 | 华中科技大学 | Aerostatically-borne and electromagnetically-driven ultraprecise working platform |
-
2013
- 2013-12-11 CN CN201310667251.0A patent/CN103639711B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4778143A (en) * | 1984-06-15 | 1988-10-18 | Omron Tateisi Electronics Co. | Apparatus for locking movable table |
| CN2148634Y (en) * | 1992-05-30 | 1993-12-08 | 李鹏生 | Superprecious work-table |
| CN1423810A (en) * | 1999-11-24 | 2003-06-11 | 多佛器械公司 | High-stability spin stand platform |
| CN101408732A (en) * | 2008-11-19 | 2009-04-15 | 哈尔滨工业大学 | Embedded type common basal plane two-dimension balance double-drive double-workpiece platform positioning system |
| CN102393610A (en) * | 2011-11-12 | 2012-03-28 | 哈尔滨工业大学 | Gyro precession type active stabilizing device for workbench of lithography machine |
| CN202317689U (en) * | 2011-11-15 | 2012-07-11 | 华中科技大学 | Aerostatically-borne and electromagnetically-driven ultraprecise working platform |
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| CN103639711A (en) | 2014-03-19 |
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