CN103591458B - Flow balancing in gas distribution networks - Google Patents
Flow balancing in gas distribution networks Download PDFInfo
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- CN103591458B CN103591458B CN201310361997.9A CN201310361997A CN103591458B CN 103591458 B CN103591458 B CN 103591458B CN 201310361997 A CN201310361997 A CN 201310361997A CN 103591458 B CN103591458 B CN 103591458B
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Abstract
The invention relates to flow balancing in gas distribution networks, and more specifically relates to flow distribution networks that supply process gas to two or more stations in a multi-station deposition chamber. Each flow distribution network includes an inlet and flow distribution lines for carrying process gas to the stations. The flow distribution lines include a branch point downstream from the inlet and two or more branches downstream from the branch point. Each branch supplies a station. The flow distribution network also includes highly variable flow elements in each branch. Restrictive components are placed downstream from the variable control elements in each branch. These restrictive components are nominally identical and designed to shift the bulk of the pressure drop away from the variable flow components to improve flow balancing while not unduly increasing inlet pressure. In some cases, the load shifting allows the more variable flow components to operate in the unchoked flow regime.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
This application claims the U.S. Provisional Patent Applications submit to, Application No. 61/684,261 on the 17th of August in 2012 and
The rights and interests of U.S. Patent application that on November 2nd, 2012 submits to, Application No. 13/667,282, aforementioned application is for whole mesh
By reference to being incorporated by herein.
Technical field
This patent disclosure relates generally to the conveying of fluid, the flow equilibrium being more particularly in gas distribution mesh network.
Background technology
Existing flow distribution network Dependent Symmetries, big part and close tolerance（close tolerance）Flow is equal
Branch line is distributed to evenly（branch）.Although this may be adapted to liquid or gases at high pressure, low pressure compressible fluid is experienced
Speed expand fluidic（fluidic element）Minor variations, make flow disequilibrium.The problem is several in complexity
What structure（Those structures such as in the presence of shutoff valve）In be particularly acute.
Change the process sequence of air-flow in the case where plasma is opened（Such as in the Shen that on December 16th, 2010 submits to
That process sequence that please be described in the U.S. Patent application of Serial No. 12/970,846（The patent its in full by reference to
It is expressly incorporated herein））Usually require that and valve is arranged as close to treating stations（For example, room）.This transfers to require to place shutoff valve
It is uneven so as to flow can be produced in each branch line of the network.Other application, especially involves in a reactor
Or those applications of the synchronous air-flow at the multiple stations in multiple reactors, may also suffer uneven to the flow of each station or reactor
The impact of weighing apparatus.
Flow rate balance is set to need the symmetry across (across) branch line with conventional art, this may not be in some applications
It is feasible or be not in accordance with desired.For example, symmetry may exclude the jet unit of the alterable heights such as conventional shutoff valve
The use of part.These fluidics are fabricated to into extremely low tolerance to maintain the symmetry across branch line to be prohibitively expensive.Substitute
Ground, needs have significant pressure drop in the system using big part come balanced flow（pressure drop）, this can increase cost simultaneously
Limit maximum stream flow.
The content of the invention
The invention provides making the flow equilibrium of the compressible fluid at the multiple stations being conveyed in low pressure flow distribution network
Technology.For balanced flow, in the end near the exit to station of a plurality of branch line of distribution pipeline flow restriction is introduced
Device.The flow restrictor is being nominally identical and is being designed to the load of most of pressure from positioned at the branch line upstream
The variable fluidic of relative altitude to be transferred to degree of variation less（less variable）Downstream current limiter, while need not
Excessively increase inlet pressure.Pressure load is transferred to into the less current limiter of degree of variation can allow more variable fluidic to grasp
Make in fluidised form of not being jammed（unchoked flow regime）In and can improve flow equilibrium.These technologies help compensate for height
Variable fluidic and across branch line other asymmetry non-equilibrium effect and without using large stream part.
In embodiments, process gas is fed to flow distribution network two or more stations in multistation settling chamber.
The flow distribution network includes at least one entrance for receiving process gas and the Discharge Distribution Tube for delivering the gas
The network of line.The network of the assignment of traffic pipeline includes the branch point in the entrance downstream and the two or more a plurality of of the branch point downstream
Branch line.Each branch line has for process gas to be supplied to into the corresponding outlet stood.The flow distribution network also includes tool
There is flow coefficient CvThe changeable flow element of value（For example, shutoff valve）, flow coefficient CvValue across branch line from element to element with least
About 2% changes in amplitude.Limiting part is located at the downstream of the variable control elements in each branch line.The limiting part can be
Such as limited part in the correlative flow distribution pipeline in variable control elements downstream（constriction）.The limiting part exists
It is nominally identical.From the inlet to the outlet, across the flow distribution network generation system pressure drop of the stream of process gas, the system pressure drop
It is big at least as the pressure in exit.In certain embodiments, the changeable flow element of flow distribution network is operable in not
It is jammed in fluidised form.
The changeable flow element of flow distribution network fifty-fifty produces first of the system pressure drop in the flow distribution network
Part.Limiting part fifty-fifty produces the Part II of the pressure drop in the flow distribution network.In certain embodiments, this second
The ratio of part and the Part I can be about 5:1 to about 20:Between 1.
In certain embodiments, flow distribution network can further include the controller for control system pressure drop.The control
Device processed can be with other component communications of entrance, one or more outlets and/or the network.
In the one side of embodiment, the limiting part can produce of the limiting part in the branch line
Fixed average system pressure drop.In one embodiment, the limiting part can produce the system pressure drop that accounts for across the limiting part
Average at least about 3% pressure drop.In another embodiment, the limiting part can be produced and account for system pressure across the limiting part
The pressure drop of average at least about the 50% of drop.In another embodiment, the limiting part can produce and be across accounting for for the limiting part
The average pressure drop between 10% and 80% of system pressure drop.
On the other hand, the changeable flow element can produce certain average of the element in the branch line
System pressure drop.In one embodiment, the changeable flow element can be produced and account for the assignment of traffic across the changeable flow element
The pressure drop of average at most about 5% of the overall presure drop in network.In another embodiment, the changeable flow element can be produced across institute
State changeable flow element the overall presure drop accounted in the flow distribution network average at most about 10% pressure drop.
It yet still another aspect, flow distribution network can have the changeable flow element for producing mass flowrate, when each element
During the substantially the same pressure drop of experience, the mass flowrate across the branch line from element to element averagely with for example, at least about 2% width
Degree change.In another embodiment, the mass flowrate at the changeable flow element can at least about 5% or 10% amplitude become
Change.
On the other hand, flow distribution network can have limiting part in the branch line, and the limiting part has stream
Coefficient of discharge CvValue, the CvIt is worth across the branch line averagely with less than the changes in amplitude of certain percentage.In one embodiment, the limit
Part processed can across the branch line from part to part averagely with 1% or less changes in amplitude.As another embodiment, the limit
Part processed can across the branch line from part to part averagely with 4% or less changes in amplitude.
On the other hand, process gas can be supplied to and be supplied to station by the limiting part with nominally uniform mass flowrate
The each outlet answered.In certain embodiments, the nominally uniform mass flowrate can between the outlets with for example, less than about 1%
Changes in amplitude.In another embodiment, the nominally uniform mass flowrate can between the outlets be less than about 2% width
Degree change.
Below with reference to the accompanying drawings further to these aspect and other side be described.
Description of the drawings
Figure 1A is the normalization deposition speed for four deposition stations in multistation flow distribution network according to embodiment
The figure of rate.
Figure 1B is the normalization sedimentation rate and flow of four deposition stations in the multistation flow distribution network for Figure 1A
Coefficient CvFigure.
Fig. 2A is the part of the flow distribution network with four stations according to some embodiments described herein
Schematic diagram.
Fig. 2 B are the schematic diagrames of the part of the flow distribution network of Fig. 2A, are shown with and without limiting part（Current limliting
Device）In the case of pressure at node in the network.
Fig. 2 C are the figures of pressure drop of the branch line of the flow distribution network for being showing along Fig. 2A and Fig. 2 B at different distance.
Fig. 2 D are the lines figures of the part of the flow distribution network with four stations according to embodiment.
Fig. 2 E are the lines figures of the part of the flow distribution network with two stations according to embodiment.
Fig. 3 A and 3B are the design alterations for the part for illustrating the flow distribution network to Fig. 2A and 2B so as to include limiting
The schematic diagram of part.
Fig. 4 A are to illustrate design limiting part to improve the flow equilibrium across flow distribution network branch line according to embodiment
Method figure.
Fig. 4 B are the more detailed views of a part for the figure in Fig. 4 A.
Fig. 4 C are each volume flows being shown in the flow distribution network with and without current limiter of Fig. 2A and 2B
The inlet pressure P of rateinletChange figure.
Fig. 5 A are to illustrate the upstream pressure P relative at the fluidic of embodimentinVolumetric flow rate（slm）Figure
Shape.
Fig. 5 B are the figures of the pressure drop for illustrating the downstream pressure in the fluidic relative to Fig. 5 A.
Fig. 5 C are the variabilities and the pressure ratio at changeable flow element for illustrating flow rate relative in Fig. 2A and 2B
The figure of the rank of the limiting part of flow distribution network or the relation of restriction.
Fig. 6 is the figure of the breadboardin of the flow equilibrium in the flow distribution network for embodiment.
Specific embodiment
In the following description, many details are stated to provide the thorough understanding to these embodiments.Institute
Disclosed embodiment can be carried out in the case of some or all in without these details.On the other hand, it is known
Technological operation will not be described in detail in order to avoid unnecessarily obscuring disclosed embodiment.Although can be with reference to specific embodiment party
Formula is described to disclosed embodiment, it is to be understood that, this is not intended to limit disclosed embodiment.
The flow distribution network of flow equilibrium
In embodiments, flow restrictor members（Current limiter）Be arranged on flow distribution network distribution pipeline it is a plurality of
In each of branch line.These flow restrictor members are being nominally identicals.Such network is included for connecing from source of supply
One or more entrances of getter body.These networks are additionally included at least one branch point in the entrance downstream and in the branch
Two or more the branch lines in point downstream.From single or multiple entrances and come gas its to two or more outlet way in divided
To in multiple branch lines.Each branch line gives independent station by association export supply gas.Some embodiment party presented herein
Using four stations, process gas is supplied in each station to formula by flow distribution network.Other embodiment presented herein is adopted
With two stations.Generally, the embodiment of flow distribution network may include two or more stations.
The station of the flow distribution network of embodiment can be such as room（For example, reative cell）Or the part of room
（portion）, one or more in following process can be carried out wherein：Chemical vapor deposition, ald, conformal film are sunk
Product, plasma enhanced chemical vapor deposition, etc..In certain embodiments, the station of flow distribution network can be heavy in multistation
In product reactor.Each in these stations may each be the reative cell equipped with shower nozzle, shower nozzle the going out from flow distribution network
Mouth receives process gas and provides the inside to the station by process gas.
Multistation reactor allows people to run identical or different technique simultaneously in a room environmental, so as to improve workpiece
The efficiency of process.In general, in single chamber, any number of station is all feasible.The station can have identical or different
Function.In one embodiment, individual station is operable under different process conditions and can generally be isolated from each other.Example
Such as, a station is operable in a kind of temperature regime（temperature regime）Under, and another station be operable in it is different
Under temperature regime.Certain operations may require that different temperature regimes（For example, higher temperature）, and can be at different one or many
It is performed in individual station.According to some embodiments, each process chamber operation is at identical conditions or operation is accurately
Realize that silica, silicon nitride or the other materials of same thickness are deposited in each station simultaneously under conditions of.
Process conditions and technological process itself at multiple stations can be by controller control, and the controller is included for supervising
Control, the programmed instruction for maintaining and/or adjusting some state-variables, flow rate and number of times, temperature, inlet pressure, back pressure etc..
The instruction may specify some or all operations to perform technique in parameter.The controller may include for different device station
Similar and different instruction, so as to allow it is described station independently or synchronously operate.
The controller can generally include one or more storage devices and one or more processors.The processor may include central authorities
Processing unit（CPU）Or calculator, analog and/or digital input/output connection（connection）, stepping motor controller
Plate and other likes.The instruction for realizing appropriate control operation is performed on a processor.These instructions can be deposited
Storage is being associated with the storage device of controller or they can be provided on network.Generally, have and be associated with system control
The user interface of device.User interface may include display screen, graphics software to show process conditions and user input equipment（Than
Such as pointer device, keyboard, touch-screen, microphone and like）.
Computer program code for controlling the operation of different process can be with any conventional computer-readable program
Language is write：For example, assembler language, C, C++, Pascal, Fortran or other Languages.Object code after compiling or
Script by computing device to complete program in being identified of the task.
Signal for monitoring process can be provided by the input connection of the analog and/or digital of system controller.For controlling
The signal of technique is output by the analog- and digital- output connection of the processing system.
In embodiments, flow distribution network is designed or configures compressible fluid（Such as process gas）It is defeated
It is sent to one or more stations.Precursor gas can be the process gas used in many applications of embodiment.Process gas
Can be in large-scale pressure（It is strong, strong and close vacuum in atmospheric pressure, subatmospheric including such as superatmospheric
Back pressure）Down the station is transported to by flow distribution network.In certain embodiments, the inlet gas pressure of the network
（Pinlet）Can be between 50 and 1000 supports.Generally, in the flow distribution network, from the inlet to the outlet, the overall presure drop on network
（ΔPsystem）The absolute pressure at the station reached than conveying gas（Poutlet）It is relatively large.That is, than Δ Psystem/
PoutletMore than 1.In some embodiments, than Δ Psystem/PoutletBetween 1 and 20.Unless otherwise stated, otherwise should vacation
Determine embodiments described herein and feature is adopted：（1）Flow distribution network with the branch line to multiple outlets,（2）With
In compressible fluid is transported to into this multiple outlet, and（3）Such compressible fluid is total in the flow distribution network
Pressure drop ratio back pressure is big.
In some disclosed embodiments, accurate limiting part（Such as machine the hole to close tolerance or pipe）Quilt
Each end for the branch line being added in flow distribution network.The accurate limiting part be located at exit or near go out
Mouthful, the outlet is by low outlet air pressure PoutletProcess gas be supplied to station（For example, 5 supports, 6 supports, 7 supports, etc.）.
Generally, the accurate limiting part is being nominally identical, has flow coefficient C between the limiting part of branch linev's
The relatively low change of value（For example, 5% or lower, 1% or lower, 2% or lower, 3% or lower, 4% or lower, etc.）.Limit
Part processed can be designed to match the Typical pressure drops of the branch line for limiting maximum, and wherein branch line does not have identical mobile performance, than
Such as when it is asymmetric to distribute network.By improving close to limiting part（Current limiter）Upstream point at pressure,
The density of the gas in line is increased, and so as to rate reduction, this further reduces the loss in the upstream portion of the branch line（Press
Drop）.These upstream portions usually contain the fluidic of alterable height, such as certain form of valve.Reduce these alterable heights
Loss in part can reduce the variability from branch line to branch line of flow, so as to the uniform flow between improving station and standing
Property --- this is the result to heap tunic particular importance.
It is disclosed herein for distributing the design of low-pressure gas and technology can be regardless of fluidic from branch line to branch line
Variability（Asymmetry）And provide improved flow matches in each branch line of flow distribution network.It is such design and
Technology can also be by some network pressure drops from the fluidic of alterable height（For example, shutoff valve）It is transferred to the less jet of degree of variation
Element（" load transfer "）.The example of the less fluidic of degree of variation includes easily and being consistently produced as tight public affairs
Poor limiting part, such as, for example, hole or machining pipe.These limiting parts are in flow coefficient CvValue on can have
Relatively low variability, when it is placed in each bar branch line flow equilibrium can be improved.
Flow distribution network can undergo choked flow at the fluidic of alterable height.In the fluidic of the alterable height
Choked flow can be transferred to the less limiting part of degree of variation by downstream addition limiting part.Because have being associated with choked flow
Larger pressure drop, it is advantageous to choked flow is transferred to into the less limiting unit of degree of variation from more variable fluidic
Part.Choked flow through the compressible fluid of fluidic needs the pressure drop in the fluidic to account for the big percentage of inlet pressure
（Such as 50%）.Shifted by load as herein described, the major part of overall presure drop is transferred to the less limiting unit of degree of variation
Part, this contributes to the relatively small number of change of flow rate.
In some embodiments, disclosed design utilizes the compressibility of conveyed gas flat to significantly improve flow
Weigh without the overall pressure drop substantially increased in flow distribution network or without the need for substantially increasing the one or more of flow distribution network
The pressure of individual porch.The further advantage of some embodiments includes：1）Due to the relative pressure drop at alterable height fluidic
Be greatly diminished, thus allow the upstream of limiting part use alterable height fluidic, 2）Due to limiting part（Current limliting
Device）Can be dimensioned to match the pressure drop limited in maximum branch line, so eliminating the right of the fluidic to the network
The requirement of title property, this balances significantly all of mass flowrate, and 3）Because the speed of the air-flow in the network can be by higher
Pressure reduce, so allow to use less network components, and/or 4）Can be using the notable of the pressure for changing low-pressure gas
Effect is so as to passing through to adopt " load transfer " more efficiently to solve equilibrium problem.
Figure 1A and Figure 1B are shown for low-pressure gas to be conveyed to into four independent reaction stations（Such as oxygen is carried out wherein
The deposition of SiClx, silicon nitride, polysilicon, and/or other materials）Multistation flow distribution network in observed result.The flow
Distribution network can be used in such as Vertical collection memory（VIM）Manufacture in.Those results it is not described herein
It is observed in the case of the less limiting part of degree of variation that the end of branch line adopts.
In figure ia, for flow distribution network in four deposition stations depict normalization sedimentation rate（That is, specific station
Sedimentation rate/station highest sedimentation rate）.In many applications, it is desirable to, sedimentation rate is across multiple stations from highest
Speed is with less than the changes in amplitude of about maximum change.In shown application, it is desirable to, sedimentation rate is across four deposition stations
To be less than about the changes in amplitude of 1% maximum allowable change.In figure ia, stand 2 3% and station 1 and 4 7% it is significantly higher
Change and be observed in by the network observed.The source of the change of the sedimentation rate for being observed can be because that reactant is dense
The change of degree, the change of radio-frequency power（In the case where plasma ion assisted deposition reacts）And it is fed to the system
The change at single station or the mass flowrate of the precursor gas of room or other process gas.In the context of the disclosure, quality
The change of flow rate is to come into question（address）Change.It should be appreciated that " specific gas flow rate " described herein or " stream
The change of rate " or " flow " is the change of the mass flowrate of process gas.Because sedimentation rate is the function of mass flowrate, so
The change of the mass flowrate of process gas directly affects sedimentation rate.
Impact of the mass flowrate to sedimentation rate is reflected in the figure shown in Figure 1B.More specifically, the figure in Figure 1B
Shape shows the fluidic of the normalization sedimentation rate corresponding to control to the air-flow at station at four stations（For example, valve）Flow system
Number CvSome measurement results and be to flow system CvValue some measurement results.Parameter CvIt is associated with mass flowrate
Specific fluidic（Such as valve）In pressure drop.For across the situation that the pressure drop of fluidic is fixed, higher CvValue correspondence
In higher mass flowrate.Certainly, higher mass flowrate is again corresponding to the higher sedimentation rate in the station for receiving the air-flow.
The technology of embodiment and design may be provided in the process gas of nominally uniform mass flowrate to assignment of traffic
The station of network.In embodiments, in nominally uniform mass flowrate from CFS to CFS with less than little percentage（For example, 1%,
2%th, 0.5%, etc.）Changes in amplitude.May correspond to across station nominally equal in nominally uniform mass flowrate across station
Even sedimentation rate.The application of the such technology and design that can benefit from embodiment is using the VIM of dielectric stack layers
Manufacture.Stack layers may include, for example, the alternating layer and/or oxide and the alternating layer of polysilicon of oxide or nitride.
The task of top priority is, in application（Such as VIM）In, the thickness of single layer is subject to good control and is consistent from CFS to CFS.
Certainly, techniques disclosed herein and device are not limited to VIM applications.With Integrated circuit manufacturers, LED manufacturer, photovoltaic system
Make relevant many other applications such as business and can benefit from techniques disclosed herein and device.
Fig. 2A is the schematic diagram of the configuration for describing flow distribution network 10 according to some embodiments described herein.
In shown configuration, flow distribution network 10 is multistation deposition reactor.Flow distribution network 10 includes conveying process gas
To the network of the assignment of traffic pipeline 12 at four stations 20, this four stations 20 include station 1-20（a）, stand 2-20（b）, stand 3-20（c）
With station 4-20（d）.In the diagram, it 20 is deposition station in reative cell to stand.Each stood in 20 includes shower nozzle, and shower nozzle is received
Process gas and provide the process gas arrive at a station 20 inside.In other embodiments, standing 20 may include other parts.
Process gas can be by the two entrances 30 of each manifold（a）With 30（b）In one or more be provided to flow point
Distribution network 10.T accessory of the flow distribution network 10 described in assignment of traffic pipeline 12（Herein also referred to as tee or T-shaped
Part）Place has three branch points 40（a）、42（a）With 42（b）.From the entrance 30 of manifold 1 and 2（a）With 30（b）Start, gas exists
First branch point 40（a）First T accessory is run into, first T accessory divides the flow into two parts, and a part carries gas
Supply station 2-20（b）With station 3-20（c）And another part provides gas to the 1-20 that stands（a）With station 4-20（d）.These pipelines
In each in the first branch point 40（a）There are two two grades of branch points 42 at the T accessories in downstream（a）With 42（b）, branch point
42（a）With 42（b）Air-flow is assigned to station 1-20（a）, stand 2-20（b）, stand 3-20（c）With station 4-20（d）Four it is independent
In branch line.
In addition, as what is described in the figure of the flow distribution network 10 of Fig. 2A, there are two local to enter at each station 20
Mouth 50（a）With 50（b）, local entrance 50（a）With 50（b）Gas is supplied directly to into the station 20 of correlation.In shown embodiment
In, local entrance 50（a）Be manifold 3 entrance and local entrance 50（b）It is TEOS entrances.TEOS is to be used to form oxygen sometimes
The presoma of SiClx and associated materials.In practice, these local entrances 50（a）With 50（b）May be utilized many differences
Any one in gas is supplied directly to the station 20 of correlation.
In the flow distribution network 10 described, it is of interest that mass flowrate at the different station 20 of independent branch line and
The variational source of correlative sediments speed.Variational main source described herein is fluidic（For example, valve, limiting unit
Part, distribution pipeline, etc.）Design in, it is given at one group under conditions of, mass flowrate is in the element with same design and unit
Change between part or change over time in discrete component.In the embodiment of valve and limiting part, with same design
Element between asymmetry be based on manufacturing tolerance（manufacturing tolerance）With other manufacture variables
（fabrication variation）.If variational source is assignment of traffic pipeline from a branch line to another branch line
Asymmetry, then the asymmetry can be with asymmetric length, the barrier of distribution pipeline 12（For example, distribution pipeline
In fragment）, accessory and/or elbow（For example, bend pipe）It is associated.
Variability in fluidic is often shown as the flow coefficient C between the fluidic with same designv's
The change of value.As it was previously stated, flow coefficient CvMass flowrate is set to be associated with the pressure drop across fluidic.In shown embodiment party
In formula, across the variational main source of the mass flowrate of branch line the flow coefficient C between the changeable flow element 60 in branch line is based onv
Value change.It is in other embodiments, variable although changeable flow element 60 is depicted as in the embodiment shown valve
Flow element can be variational other sources or can be combination across the variational source of branch line.
The one embodiment that can be the valve in variational main source in flow distribution network 10 is shutoff valve（For example,The valves of ISO 9001）.The variability of the feature of conventional shutoff valve can be about ± 10%.Change in conventional shutoff valve
Change property source can near the valve mechanical actuator and with the valve in diaphragm or flow control mechanism degree of deformation phase
Association.
In embodiments, the flow coefficient C of the changeable flow element 60 in flow distribution network 10vAcross branch line in element
Between it is average with least about such as 1%, 2%, 5%, 10% etc. such changes in amplitude.For example, each changeable flow element 60
Flow coefficient CvCan be from nominal CvValue is calculated at least with all of changeable flow element 60 from flow distribution network 10
About 2% changes in amplitude.
In certain embodiments, the coefficient C of the changeable flow element 60 in flow distribution network 10vAcross branch line element it
Between with least about minimum percent（For example, 2%, 5%, etc.）Amplitude of variation change so as to station mass flowrate or deposition speed
Rate more than maximum allowable change（For example, 1%, 2%, etc.）Change it is corresponding.For example, flow coefficient CvValue can need with
The amplitude of variation of 2% at least minimum percent changes so as to produce the change of the maximum allowable change more than 1% of sedimentation rate,
Wherein the network does not also include accurate current limiter.Due to sedimentation rate exceed maximum allowable change, so by height can
The fluidic downstream of change arranges the less fluidic of degree of variation and makes flow equilibrium to be used to drop sedimentation rate change
To less than maximum allowable change.
Fig. 2A is returned to, flow distribution network 10 is in changeable flow element 60（a）、60（b）、60（c）With 60（d）Downstream bag
Include four limiting parts 70.Limiting part 70 is being nominally identical, with the nominal C from all limiting parts 70vValue with
Maximum changing amplitude（For example, 0.5%, 1%, 2%, 3%, 4%, etc.）Or the anaplasia of part of the small change amplitude in branch line
The flow coefficient C of changevValue.Nominally identical limiting part 70 has identical design feature, and the design feature has can be little
It is sized in such as 0.5%, 1%, 2%, 3%, 4% etc. tolerance（For example, internal diameter）, so as to flow coefficient CvValue most
Big change is not exceeded.
Process gas stream is supplied to station by the outlet 80 in the downstream of limiting part 70.In embodiments, limiting part 70
Process gas is supplied to into each outlet 80, each outlet 80 is with nominally uniform mass flowrate and/or nominally uniformly deposits
Speed supply station 20.Nominally uniform speed at all of station 20 from nominal rate with less than maximum allowable amplitude of variation
（For example, 1%, 2%, etc.）Change.For example, the limiting part 70 in branch line can with outlet 80 between be less than about 1% width
The mass flowrate of degree change provides process gas.
Fig. 2 B are shown when the flow distribution network 10 of Fig. 2A includes the limiting part 70 and when not comprising restriction
During part 70, how pressure changes in the flow distribution network 10 of Fig. 2A.For the pressure values quilt that two kinds of networks 10 are calculated
It is displayed at each node in the diagram.Node pressure in bracket is the pressure when network 10 does not include limiting part 70
By force.Node pressure outside bracket is the pressure when it includes limiting part 70.When network 10 includes limiting part 70, network
Shown pressure in 10 shows from changeable flow element 60 load for being transferred to limiting part 70（Pressure drop）.Importantly,
With limiting part 70（Current limiter）Shown design in, the pressure drop in changeable flow element 60 is to the overall presure drop Δ in network 10
PsystemContribution be down to 9% from 56%.Pressure drop Δ PsystemIt is further detailed with reference to the figure shown in Fig. 2 C.
In embodiments, the overall presure drop in 60 pairs of flow distribution networks 10 comprising limiting part 70 of changeable flow element
ΔPsystemAverage contribution at most about maximal valve contribution（For example, 5%, 10%, 15%, 20%, etc.）.For example, changeable flow element 60
Overall presure drop Δ P that can be in across branch line average contribution at most about network 10system20%.As another embodiment, changeable flow unit
Part 60 can be in across branch line average contribution at most about network 10 overall presure drop Δ Psystem10%.In another embodiment, variable flow
Amount element 60 can be in across branch line average contribution at most about network 10 overall presure drop Δ Psystem5%.
In embodiments, limiting part 70 is to overall presure drop Δ PsystemAt least about minimum contribution of average contribution（For example, 3%,
5%th, 10%, 25%, 50%, 60% or 70%）.In one embodiment, the average contribution of limiting part 70 at least about 3%.In another enforcement
In mode, the average contribution of limiting part 70 at least about 50%.In yet, the average contribution of limiting part 70 10% is arrived
80%。
Pressure values shown in Fig. 2 B are utilizedModel is calculated.Model includes flow point
Distribution network 10 is from the first branch point 40（a）To the outlet 80 at four stations 20（For example, shower nozzle manifold）Part.Used
Gas is the N of 12slm2The N of O, 5slm2With the mixture of the He of 4slm.ρ, μ, Cp and k that the model is used is based on the mixing
The property of thing.Darcy-Weisbach equations are used for pipe and Colebrook equations are used for friction factor.Equivalent length side
Method is used for the accessory in assignment of traffic pipeline 12（For example, bend pipe, T-piece）.MS-06-84 valves by with
As the model of changeable flow element 60.All methods assume that stream is sufficiently formed.CvCalculate from measurement result（0.301-
0.314）.Back pressure PoutletIt is 6 supports and temperature is from start to finish 25 DEG C.
Fig. 2 C are the pressure calculated at each node of the flow distribution network 10 of Fig. 2A and 2B as away from entrance
The function graft of distance.Figure in Fig. 2 C includes illustrating pressure in the flow distribution network 10 comprising the limiting part 70
The first curve for inside how changing.The figure also include illustrate pressure flow distribution network 10 do not include limiting part 70 when
The second curve how changed in flow distribution network 10.In both cases, away from the first branch point maximum distance
Back pressure is 6 supports.In embodiments, by the taking out with the flow substantially exceeded for the technique at outlet manifold
Speed, back pressure PoutletLow pressure can be maintained at.
In the flow distribution network 10 not comprising limiting part 70, inlet pressure is 97.5 supports.It is especially envisaged that, more
Valve in each of four branch lines for crossing the distribution network 10 not comprising limiting part 70, pressure falls to approximately from about 70 supports
18.7 supports.Inlet pressure, pressure drop and back pressure are in each branch line（Arm）In be slightly changed.As it was previously stated, valve is described
The main source of the flow rate variation in flow distribution network 10.Additionally, also as previously noted, in no limiting part 70
About 56% of overall presure drop in flow distribution network 10 occurs in stream by these valves.As a result, the variability in these valves is straight
Switch through the variability of the mass flowrate for turning to the gas for being conveyed to each station 20.And certainly, the variability correspondence of mass flowrate
In the variability of sedimentation rate.
In the flow distribution network 10 comprising limiting part 70, inlet pressure is 128.7 supports.In this embodiment, press
Valve is crossed by force falls to approximately 97 supports from about 108 supports, and in the exit in the downstream of limiting part 70, pressure falls to approximately from about 97 supports
6 supports.In this embodiment, pressure drop has been transferred to limiting part 70.Importantly, in the design with limiting part 70,
Contribution of the valve to the overall presure drop in flow distribution network 10 is down to 9% from 56%.Additionally, inlet pressure from flow distribution network 10 not
Increase to flow distribution network 10 comprising 128.7 supports during limiting part 70 comprising 97.5 supports during limiting part 70.By pressure drop
Being transferred to limiting part 70 can increase total system pressure drop.In some embodiments, when system pressure drop is increased, one can be taken
A little steps apply overvoltage to avoid being disconnected to gas.
Figure in Fig. 2 C also show changeable flow element 60（It is herein valve）Contribution overall presure drop Δ PsystemFirst
Point（ΔPV）And the contribution overall presure drop Δ P of limiting part 70systemPart II（ΔPR）.Additionally, also from assignment of traffic net
The relatively small contribution of other parts of network 10.When flow distribution network 10 includes limiting part 70, pressure drop is from variable flow
Amount element 60 is transferred to limiting part 70.In this embodiment, from changeable flow element 60 pressure drop to network 10 in it is total
The contribution of pressure drop is down to 9% from 56%.In embodiments, by the Part II of the average contribution of limiting part 70 and by changeable flow
The ratio of the Part I of the average contribution of element 60 at least such as 5:1、10:1、15:1、20:The minimum of a value such as 1.In some embodiment party
In formula, limiting part 70 can be designed to for inlet pressure to be maintained at a below maximum（For example, 150 supports, 200 supports, 300 supports,
400 supports, 500 supports, 600 supports, etc.）.
Fig. 2 D are the lines figures of the part of the flow distribution network 10 with four stations according to embodiment.The flow point
Distribution network 10 includes process gas being exported to four stations（It is not shown）Assignment of traffic pipeline 12 network.From entrance（Do not scheme
Show）Process gas is supplied to into flow distribution network 10.T of the flow distribution network 10 described in assignment of traffic pipeline 12
There are three branch points 40 at accessory（a）、42（a）With 42（b）.From the beginning of entrance, gas is in the first branch point 40（a）Run into
One T accessory, first T accessory divides the flow into two parts, and a part provides gas to two and stands and another portion
Divide and provide two other station by gas.Each in these pipelines is in the first branch point 40（a）Have two at the T accessories in downstream
Individual two grades of branch points 42（a）With 42（b）.So as to air-flow is assigned to into four independent branch lines of respective stations.
The flow distribution network 10 described in Fig. 2 D also includes four changeable flow elements 60（a）、60（b）、60（c）With
60（d）, it is depicted herein as valve.The flow distribution network 10 also includes changeable flow element 60（a）、60（b）、60（c）With 60（d）
Four limiting parts 70 in downstream.The flow distribution network 10 is also included to four outlets 80 at this four stations.This four restrictions
Part 70 is located at outlet 80 or neighbouring outlet 80.Limiting part 70 is being nominally identical and is being designed to major part
Pressure drop is transferred to the less limiting part of degree of variation from the larger flow element of degree of variation.
Fig. 2 E are the lines figures of the part of the flow distribution network 10 with two stations according to embodiment.The flow point
Distribution network 10 includes process gas being exported to two stations（It is not shown）Assignment of traffic pipeline 12 network.From entrance（Do not scheme
Show）Flow distribution network 10 is provided by process gas.The flow distribution network 10 has single branch point 40 at T accessories（a）.
From the beginning of entrance 30, gas is in branch point 40（a）First T-piece is run into, it divides the flow into two through two branch lines
Part.One branch line provides gas to a station and another branch line provides gas to another station.The assignment of traffic net
Network 10 also includes two changeable flow elements 60（a）With 60（b）, it is depicted herein as valve.The flow distribution network 10 also includes can
Variable-flow element 60（a）With 60（b）Two limiting parts 70 in downstream.The flow distribution network 10 also include to this two station
Two outlets 80.Two limiting parts 70 are located at outlet 80 or neighbouring outlet 80.Limiting part 70 is being nominally phase
With and be designed to for most of pressure drop to be transferred to the less limiting part of degree of variation from more variable flow element.
It should be appreciated that invention disclosed herein feature is not limited to what is described in such as Fig. 2A, 2B, 2C and 2D
Flow distribution network 10.For example, some embodiments do not use independent local station entrance at each station.In addition, some flows
Distribution network is only with single manifold inlet.In addition, although two stations and four stations are depicted in shown network, it is but disclosed
Embodiment is not limited to two and four stations.In fact, for by compressible fluid be conveyed to two or more station it is any
Network may be utilized.Correspondingly, although distribution pipeline including two branch lines and four branch lines is depicted in shown network
Network, but disclosed embodiment can have any number of branch line.In addition, although by changeable flow unit in illustrated embodiment
Part 60 is depicted as valve, but the combination in any source or variational any source or variational source can be included.Show as another
Example, some embodiments can include specific to control for controlling one or more controllers of pressure at each part of network 10
Pressure drop of the pressure and/or control at part through network 10.
Fig. 3 A and 3B are the design alterations in the fluidic of flow distribution network 10（As it can be presented in Figures 2 A and 2 B
's）Schematic diagram.The change is introduced in valve and to the limiting part 70 between the outlet 80 at the station 20 in reactor.Fig. 3 A are retouched
The constant of fluidic is painted（Benchmark pipeline）Design.Fig. 3 B depict the main flow path of the branch line in flow distribution network 10
In have limiting part 70 fluidic revision.Sole difference between two elements described in Fig. 3 A and 3B
It is Fig. 3 A to shower nozzle（Distribution network is to the flowexit for reacting station）Limiting part 70 is included in the lower pipeline of feeding.Fig. 3 A
It is and the local entrance 50 for the manifold 3 in Fig. 2A and 2B with the upper pipeline to fluidic feeding shown in 3B（a）Phase
The pipeline of association.Limiting part 70 is depicted in branch line the constriction part in entrance positioned at the downstream of valve
（constriction）.The constriction part is rendered as the internal diameter with about 0.09 inch（ID）.The ID of constant lower pipeline is about
0.180 inch.In other embodiments, it is possible to use other ID.
It should be appreciated that limiting part 70 can be used in many different types of flow distribution networks 10, and not only
It is only used to there can be those networks designed just like the U-shaped or V-arrangement of the independent local manifold inlet shown in Fig. 3 A and 3B
In 10.However, it should be understood that can also use other designs for limiting part 70.
From from the point of view of design, it is noted that, limiting part 70 is added to valve or other changeable flow elements 60
Downstream is to reduce the pressure ratio of changeable flow element 60 and to dredge（un-choke）They.Further, stable part
（consistent component）（For example, limiting part 70）Should be flow distribution network 10 each branch line in restriction
Maximum fluidic.In other words, the most of pressure drop in any branch line is occurred mainly in stable part.Additionally, it should
So that the overall presure drop Δ P of flow distribution network 10 will not be causedsystemThe inlet pressure P dramatically increased with network 10inletPossibility
Such mode that dramatically increases complete the modification of flow distribution network to balance arm（Branch line）In flow and pressure is born
Load is moved away from changeable flow element 60.
Design limiting part is with balanced flow
As previously noted, it is generally desirable to such a flow distribution network 10, wherein across assignment of traffic net
The mass flowrate of the branch line of network 10 or the variability of sedimentation rate are fairly small, for example, less than about 1%, 2% etc..It is also desirable to
The inlet pressure P that meet the target and need not excessively increase in flow distribution network 10inlet。
Fig. 4 A are to illustrate make flow equilibrium but without the need for excessively increasing inlet pressure P by selection according to embodimentinlet's
Limiting part design and in flow distribution network 10 across branch line low-level variability inner equilibrium flow technology figure
Shape.The method changes the internal diameter of the limiting part 70 in the flow distribution network 10 with four stations of Fig. 2A and 2B.As a result build
Stand inOn the basis of model, as previously mentioned.
Figure in Fig. 4 A has two curves.First curve shows internal diameter in limiting part 70 from 0.04 inch
Change to during 0.18 inch, the change of the mass flowrate between four stations.Article 2 curve is shown in limiting part
70 internal diameter is changed to during 0.18 inch from 0.04 inch, the inlet pressure of the network.The internal diameter is chosen so that matter
The change of amount flow rate is less than maximum allowable change（It is in this embodiment 1%）, and maintain relatively low inlet pressure.As being somebody's turn to do
Shown on figure, change of the limiting part 70 with 0.090 inch of internal diameter in the mass flowrate provided by each branch line
It is upper that appropriate little change is provided, while maintaining the relatively low inlet pressure in flow distribution network 10.
Fig. 4 B are the more detailed views of a part for the figure in Fig. 4 A, including for limiting part 70 internal diameter from
0.0895 to 0.0905 inch of different value shows the curve of a part first of the change of the mass flowrate at four stations.The figure
Show the impact of the slight change to the change of mass flowrate of the internal diameter of limiting part 70 near 0.09 inch.Around 0.09
The actual tolerance of ± 0.0002 inch of inch inner diameter shows the different limits of the manufacture in ± 0.0002 inch of actual tolerance
The variability of the mass flowrate of part processed 70.Less actual tolerance（For example, ± 0.0001 inch）Cut using such as laser
Cut part and obtain.
Fig. 4 C be shown for Fig. 2A and 2B flow distribution network 10 fromWhat model was calculated
The inlet pressure P of each volumetric flow rateinletChange figure.The figure includes showing inlet pressure in distribution network 10 not
Comprising the first curve how changed in distribution network 10 during limiting part 70.In this embodiment, feeding to shower nozzle
The internal diameter of lower pipeline is the value of the benchmark pipeline of 0.18 inch as shown in fig. 3.The figure also includes showing inlet pressure
PinletHow to change for different volumetric flow rates in distribution network 10 when network 10 includes limiting part 70 distributing
Second curve.In this embodiment, the internal diameter is 0.09 inch as shown in Figure 3 B.There is provided herein to assignment of traffic net
The comparison of the scope of the volumetric flow rate in network, wherein slm are Standard Liters per Minutes.As shown in the distribution network simulated, limiting unit
The introducing of part 70 makes inlet pressure PinletIncreased about 10 to 50 supports.The increase is just in the margin of tolerance.
Choked flow
When according to equation 2a, upstream pressure PinWith downstream pressure PoutRatio compare P* equal to or more than critical pressure（In equation
It is defined in 1）When, the choked flow in compressible fluid can occur in fluidic（For example, valve, limiting part, etc.）In.
When based on equation 3a, Pin/PoutWhen this is than less than critical pressure than P*, non-choked flow occurs.For choked flow and non-choked flow
Flow rate Q be illustrated in equation 2b and 3b respectively.As indicated, coefficient CvMake flow rate Q related to the pressure in fluidic.
Wherein（Equation 1）
Wherein：
P*=critical pressure ratio
k=cp/cvThe ratio of the specific heat capacity of=fluid
For by the choked flow in the compressible fluid of fluidic（It is jammed fluidised form）：
（Equation 2a）
（Equation 2b）
For by the non-choked flow in the compressible fluid of fluidic（It is not jammed fluidised form）：
（Equation 3a）
（Equation 3b）
Wherein：
CvThe discharge coefficient of=fluidic
Q=flow rates
Constants of the N=based on unit
Pin=fluidic upstream pressure
Pout=fluidic downstream pressure
Overall presure drops of the Δ P=through fluidic（Pin-Pout）
SgThe proportion of=fluid
Tin=fluidic inlet temperature
As the downstream pressure P of the fluidics such as valveoutIt is down to its upstream pressure PinBe issued to and can make upstream pressure
PinWith downstream pressure PoutRatio when increasing to more than amount depending on the value of the critical pressure than P* of fluid properties, jet unit
Stream in part can be jammed.When being jammed, according to equation 2b, the upstream pressure P of fluidicinBecome independent of with flow rate Q
Back pressure Pout。
In order to dredge fluidic, downstream pressure PoutCan be increased increases gas to reduce the speed of gas upstream
The density of upstream, and make upstream pressure PinWith downstream pressure PoutRatio be down to critical pressure than P* under.For dredging jet unit
A kind of technology of part is to arrange limited part in the downstream of the fluidic（restriction）So that pressure load is transferred to into the limit
Product is so that Pin/PoutRatio be decreased to less than critical pressure and compare P*.
Fig. 5 A are to illustrate volumetric flow rate（slm）How with fluidic（Such as valve）The upstream pressure P at placeinIncrease and
The figure of change.Downstream pressure PoutIt is maintained at that 300 supports are constant and flow coefficient CvIt is 0.55.The figure is with upstream pressure Pin
Be jammed fluidised form and the fluidised form of not being jammed that the form of volumetric flow rate shows fluidic.As illustrated, with inlet pressure Pin
More than downstream pressure PoutReaching makes the ratio of upstream pressure and downstream pressure increase to critical pressure than the amount on P*, jet unit
Stream at part is jammed.
Fig. 5 B are the downstream pressure P in illustrating by increasing fluidicout（For example, the back pressure of valve）Can reduce
Through fluidic speed and thereby reduce through fluidic pressure drop figure.Downstream pressure PoutBy going out in valve
The downstream of mouth introduces limiting part 70 and is increased.
Fig. 5 C are to illustrate the assignment of traffic net with four stations 20 by introducing limiting part 70 according to embodiment
Network 10（For example, the network shown in Fig. 2A and 2B）In flow equilibrium figure.The figure have across changeable flow unit is shown
The ratio P of part 60out/PinThe first curve for changing is limited how for the difference of the internal diameter based on limiting part 70.The figure has
The second curve that change across the flow rate at station limits how to change for the difference of the internal diameter based on limiting part 70 is shown.It is jammed
Fluidised form be not jammed with Pout/PinThe form of ratio is illustrated.When the internal diameter in the downstream of changeable flow element 60 is greater than about 0.130 inch
When, changeable flow element 60 is in region of being jammed.In this region, the P of changeable flow element 60outLess than Pin50%.
In region of not being jammed, increasing the internal diameter of limiting part 70 can improve the change of the flow rate to four stations.It is being jammed
In region, when the internal diameter is more than 0.130 inch, the second curve is relatively flat and the change of flow rate is interior with limiting part 70
The less correlation of change in footpath.That is, the graph show the change of the flow rate variation of the change for internal diameter in variable flow
Amount element 60 is in changeable flow element 60 in the fluidised form when ratio that is not jammed and is jammed fluidised form phase to larger.Further, lead to
Cross to be transferred to pressure load and show the limiting part 70 for having small change than valve, the every of flow distribution network can be increased
The global consistency or accuracy of the flow rate in one branch line.
Flow distribution network described herein 10 can dredge the stream through changeable flow element 60 or other fluidics.
What these flow distribution networks 10 arranged limiting part 70 pressure drop is jammed from this by the member downstream being jammed at each
Element is transferred to limiting part 70 to dredge stream.Pressure drop is transferred such amount：The amount can make the upstream in the element that this is jammed
Pressure PinWith downstream pressure PoutThe critical pressure that is decreased to less than defined in equation 1 of ratio compare P*.For example, limiting part 70 can
It is designed to produce as the average of at least minimum pressure drop needed for the changeable flow element 60 dredged in the limiting part upstream
Pressure drop.Minimum pressure drop needed for dredging changeable flow element 60 can be determined by equation 1.It is variable in dredging flow distribution network 10
Flow element 60 can reduce total change of the flow rate from branch line to branch line so as to improve flow equilibrium.As the knot of load transfer
Really, limiting part 70 can become to be jammed.Because limiting part 70 has the C of relative constancyvValue, so making these parts be jammed
The change caused in flow rate is relatively small compared to the change in the flow rate caused because of the aforementioned changeable flow element 60 being jammed,
Thus flow equilibrium is enhanced on the whole.
Fig. 6 is the figure of the breadboardin of the flow equilibrium in the flow distribution network 10 to embodiment.In the simulation
In, resistor represents fluidic, wherein across resistor voltage corresponding to passing through the resistor across the pressure drop of fluidic
Electric current correspond to the pass the mass flow of fluidic.Resistance in series circuit is RAlways=R1+R2.If two in circuit
Branch line is uneven because of inconsistent part, then being added with high electrical resistance and conforming ballast can improve balance.As illustrated,
Add on each branch line of circuit " error " of the ratio of all-in resistance in each branch line that big resistor can reduce the circuit.According to
This analogizes, and introduces and provides big pressure drop（That is, to the big resistance of fluid stream）Fluidic can be similarly reduced by fluidic network
" error " of the ratio of the flow rate of the branch line of network.So, introducing these restricted fluidics improves the population equilibrium of network.
Control flow distribution network
As disclosed herein flow distribution network 10 can be used in many different types of handling implements.For example, exist
Can be equipped with above by the multistation reactor described in the U.S. Patent application with reference to the Application No. 12/970,846 being incorporated to
Flow distribution network 10 described herein.
In some embodiments, system controller（It may include one or more physics or logic controller）Control
Some or all in the operation of handling implement.For example, system controller can control the flow distribution network 10 of embodiment
The pressure of one or more porch.System controller performs the system controlling software for performing on a processor.System control is soft
The sequential of special process that part may include to be performed by handling implement for control, admixture of gas, inlet pressure, chamber pressure and/
Or station pressure, room temperature and/or station temperature, chip temperature, target power level, RF power levels, substrate pedestal, chuck position and/
Or pedestal（susceptor）Position and the instruction of other parameters.System controlling software can be matched somebody with somebody in any suitable manner
Put.For example, the subprogram or control targe of various handling implement parts can be write to control to perform the work of various handling implements
The operation of handling implement part necessary to skill.System controlling software can be carried out with any appropriate computer-readable program language
Coding.
In embodiments, system controlling software can control inlet pressure, one or more exits pressure and/
Or across the average system pressure drop of flow distribution network 10.System controller can be logical with one or more parts of flow distribution network 10
Letter, such as, for example, entrance, outlet, stand, etc..System controller can send a signal to one or more parts to control
Pressure.
In some embodiments, system controlling software includes that the input/output for controlling above-mentioned parameters is controlled
（IOC）Sequencing instruction.For example, each stage of CFD techniques may include for being performed by system controller one or more refer to
Order.Instruction for arranging process conditions for CFD operation stages can be included in corresponding CFD formulation stages.In some realities
In applying mode, CFD formulation stages can be arranged in order so that for CFD operation stages all instructions in the technique rank
Section is performed simultaneously.
In some embodiments, other computer softwares and/or program may be utilized.Program for the purpose or
The example of program segment includes substrate positioning program, process gas control program, pressure control program, heater control program and waits
Gas ions control program.
Substrate positioning program may include the program code for handling implement part, the handling implement part be used to by
Substrate is loaded into the spacing on pedestal and between control substrate and other parts of the handling implement.
Process gas control program may include for controlling gas component and flow rate and being optionally used to before the deposition
The code of the pressure in making gas flow into one or more treating stations to stablize treating stations.Pressure control program may include for passing through
Adjust the choke valve in the gas extraction system of such as treating stations, pressure that the air-flow etc. into treating stations comes in control process station 20
Code.For example, pressure control program may include for the code of following item：1）Pressure at control entrance 30,2）Control
Make the pressure at mouth 80,3）Pressure at control station 20, and/or 4）Control across flow distribution network 10 branch line it is average total
System pressure drop.
Heater control program may include for controlling to the code of the electric current for being used for the heating unit for heating substrate.Substitute
Ground, heater control program can control to the heat-conducting gas of substrate（Such as helium）Conveying.
Plasma control program may include the RF work(for arranging the process electrode being applied in one or more treating stations
The code of rate level.
In some embodiments, there can be the user interface being associated with system controller.The user interface can be wrapped
Include the graphics software display and user input equipment of display screen, device and/or process conditions（Such as, pointer device, key
Disk, touch-screen, microphone, etc.）.
In some embodiments, the parameter for being adjusted by system controller can relate to process conditions.Nonrestrictive enforcement
Example includes process gas composition and flow rate, temperature, pressure, condition of plasma（Such as RF bias power levels）, pressure, temperature
Degree, etc..The form of the formula that these parameters can be input into using user interface is supplied to user.
For the analog and/or digital that the signal of monitoring process can pass through system controller from various handling implement sensors
It is input into connection to provide.Signal for controlling technique can be output at the analog- and digital- output connection of handling implement.Can
The non-limiting example of monitored handling implement sensor includes mass flow controller, pressure transducer（Such as pressure
Meter）, thermocouple, etc..Properly programmed feedback and control algolithm can with reference to the data from these sensors carry out using with
Keep process conditions.
System controller can provide for implementing the programmed instruction of above-mentioned depositing operation.Described program instruction is controllable various
Technological parameter, such as DC power levels, RF bias power levels, pressure, temperature, etc..It is described to instruct controllable parameter to press
Membrane stack layer is manipulated according to embodiments described herein（film stacks）In-situ deposition.
Device/technology described previously herein can be used for such as semiconductor devices, show with reference to lithographic patterning instrument or technique
Show the manufacture or production of device, LED, photovoltaic panel and the like.Although not necessarily, generally such instrument/technique can be logical
It is used in combination or is managed with manufacturing facility.The lithographic patterning of film generally includes some or all in operations described below, often
Individual operation is realized with many possible instruments：（1）Photoresist is applied to into workpiece using spin coating or Spray painting tool（Serve as a contrast
Bottom）On；（2）Using hot plate or stove or UV tools of solidifying solidification photoresist；（3）Using such as optical wafer stepper
Photoresist is set to be exposed to visible ray or UV light or x light Deng instrument；（4）Resist development is made to utilize such as wet-cleaning
The instruments such as platform optionally remove resist so as to be patterned；（5）Will using dry method or plasmaassisted etch tool
Resist patterns is transferred to lower membrane（underlying film）Or in workpiece；And（6）Using such as RF or microwave plasma
The instruments such as body resist stripper remove resist.
It is understood that configuration described herein and/or method are inherently exemplary, and these specific realities
Apply mode or embodiment is not to be seen as on limited significance, because numerous change case is also feasible.Described herein
Specific procedure or method can represent any number of one or more processed in strategy.Thus, the various operations can
According to the sequence, in other orders, abreast or according to some examples being omitted perform.Similarly, above-mentioned technique
Order also can be changed.
Claims (27)
1. it is a kind of for by process gas be supplied in multistation settling chamber two or more station flow distribution network, the stream
Amount distribution network includes：
For receiving the entrance of the process gas；
For delivering the network of the assignment of traffic pipeline of the process gas, it includes the branch point in the entrance downstream and described
The two or more a plurality of branch lines in branch point downstream, each of which branch line has for process gas to be supplied to into going out for corresponding station
Mouthful；
In each branch line with CvThe changeable flow element of value, the CvValue across the branch line from a changeable flow element to
Another changeable flow element is with least 2% changes in amplitude；And
The limiting part of the changeable flow member downstream in each branch line, wherein the limiting part is being nominally phase
With,
Wherein from the entrance to the outlet, the stream of the process gas across the flow distribution network generation system pressure drop,
The system pressure drop is at least big as the pressure in the exit.
2. flow distribution network as claimed in claim 1, wherein the changeable flow element operation is in fluidised form of not being jammed.
3. flow distribution network as claimed in claim 1, wherein the limiting part is produced accounts for institute across the limiting part
State average at least the 3% of system pressure drop pressure drop.
4. flow distribution network as claimed in claim 1, wherein the limiting part is produced accounts for institute across the limiting part
State average at least the 50% of system pressure drop pressure drop.
5. flow distribution network as claimed in claim 1, wherein the limiting part is produced accounts for institute across the limiting part
State the average pressure drop between 10% and 80% of system pressure drop.
6. flow distribution network as claimed in claim 1, wherein the changeable flow element is produced across changeable flow unit
The pressure drop of average at most the 10% of the overall presure drop accounted in the flow distribution network of part.
7. flow distribution network as claimed in claim 1, wherein the changeable flow element is produced across the changeable flow element
The overall presure drop accounted in the flow distribution network average at most 5% pressure drop.
8. flow distribution network as claimed in claim 1, wherein the changeable flow element fifty-fifty produces the flow point
The Part I of the pressure drop in distribution network and the limiting part fifty-fifty produce described in the flow distribution network
The Part II of pressure drop, and the ratio of wherein described Part II and the Part I is 5:1 to 20:Between 1.
9. flow distribution network as claimed in claim 1, wherein the changeable flow element produces mass flowrate, when each
When element experiences substantially the same pressure drop, the mass flowrate across the branch line from element to element averagely with least 2% width
Degree change.
10. flow distribution network as claimed in claim 1, wherein the limiting part in the branch line has CvValue, the Cv
Value across the branch line from part to part averagely with 1% or less changes in amplitude.
11. flow distribution networks as claimed in claim 1, wherein the limiting part in the branch line has CvValue, the Cv
Value across the branch line from part to part averagely with 4% or less changes in amplitude.
12. flow distribution networks as claimed in claim 1, the changeable flow element in each of which branch line includes
Valve.
13. flow distribution networks as claimed in claim 1, wherein the limiting part is the changeable flow member downstream
Limited part in correlative flow distribution pipeline.
14. flow distribution networks as claimed in claim 1, wherein the limiting part by process gas with nominally uniform
Mass flowrate is supplied to each outlet of station supply.
15. flow distribution networks as claimed in claim 14, wherein the nominally uniform mass flowrate is between the outlets
With the changes in amplitude less than 1%.
16. flow distribution networks as claimed in claim 14, wherein the nominally uniform mass flowrate is between the outlets
With the changes in amplitude less than 2%.
17. flow distribution networks as claimed in claim 1, its further include with the entrance and it is described go out port communications control
Device processed is controlling the system pressure drop.
18. flow distribution networks as claimed in claim 1, wherein the inlet pressure is less than 200 supports.
A kind of 19. methods of the flow at two or more stations balanced into multistation settling chamber, methods described includes：
Process gas is received in porch；
Process gas is delivered by the network of assignment of traffic pipeline, the network of the assignment of traffic pipeline includes dividing for entrance downstream
Fulcrum and the two or more a plurality of branch lines in the branch point downstream, every branch line has CvThe changeable flow element of value, the CvValue across
The branch line is from element to element with least 2% changes in amplitude；
Process gas is supplied to by corresponding station by the outlet in each branch line；
The downstream of each changeable flow element limiting part being arranged in every branch line, wherein the limiting part is across described
Branch line is being nominally identical；And
From entrance to the outlet, system pressure drop at least big as the pressure in the exit is produced.
20. methods as claimed in claim 19, it further includes to make the changeable flow element operation in fluidised form of not being jammed
In.
21. methods as claimed in claim 19, wherein generation system pressure drop include being produced across the limit by the limiting part
The average pressure drop between 10% and 80% for accounting for the system pressure drop of part processed.
22. methods as claimed in claim 19, wherein generation system pressure drop include being produced across institute by the changeable flow element
State changeable flow element system pressure drop average at most 10% pressure drop.
23. methods as claimed in claim 19, wherein generation system pressure drop includes：
The Part I of the pressure drop is fifty-fifty produced by the changeable flow element；And
The Part II of the pressure drop is fifty-fifty produced by the limiting part, wherein the Part II and the Part I
Ratio 5:1 to 20:Between 1.
24. methods as claimed in claim 19, wherein the limiting part in the branch line has CvValue, the CvValue is across institute
Branch line is stated from part to part averagely with 1% or less changes in amplitude.
25. methods as claimed in claim 19, it is further included process gas by the limiting part with nominally
Uniform mass flowrate is supplied to each outlet of station supply.
26. methods as claimed in claim 25, wherein the nominally uniform mass flowrate is between the outlets with less than 1%
Changes in amplitude.
27. methods as claimed in claim 19, wherein produce the system pressure drop include by with the entrance and it is described go out
The controller of port communications controls the system pressure drop.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261684261P | 2012-08-17 | 2012-08-17 | |
| US61/684,261 | 2012-08-17 | ||
| US13/667,282 | 2012-11-02 | ||
| US13/667,282 US8925588B2 (en) | 2012-08-17 | 2012-11-02 | Flow balancing in gas distribution networks |
Publications (2)
| Publication Number | Publication Date |
|---|---|
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| CN103591458B true CN103591458B (en) | 2017-04-12 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5307568A (en) * | 1991-09-09 | 1994-05-03 | Tokyo Electron Limited | Gas supply system |
| WO2002095519A1 (en) * | 2001-05-24 | 2002-11-28 | Unit Instruments, Inc. | Method and apparatus for providing a determined ratio of process fluids |
| CN1468441A (en) * | 2000-10-06 | 2004-01-14 | 兰姆研究公司 | Gas distribution apparatus for semiconductor processing |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6210482B1 (en) * | 1999-04-22 | 2001-04-03 | Fujikin Incorporated | Apparatus for feeding gases for use in semiconductor manufacturing |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5307568A (en) * | 1991-09-09 | 1994-05-03 | Tokyo Electron Limited | Gas supply system |
| CN1468441A (en) * | 2000-10-06 | 2004-01-14 | 兰姆研究公司 | Gas distribution apparatus for semiconductor processing |
| WO2002095519A1 (en) * | 2001-05-24 | 2002-11-28 | Unit Instruments, Inc. | Method and apparatus for providing a determined ratio of process fluids |
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