CN103586863A - Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure - Google Patents
Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure Download PDFInfo
- Publication number
- CN103586863A CN103586863A CN201310576085.3A CN201310576085A CN103586863A CN 103586863 A CN103586863 A CN 103586863A CN 201310576085 A CN201310576085 A CN 201310576085A CN 103586863 A CN103586863 A CN 103586863A
- Authority
- CN
- China
- Prior art keywords
- planar
- degree
- freedom parallel
- parallel micro
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Micromachines (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention provides a planar three-degree-of-freedom parallel micro-positioning platform of a symmetric structure. The planar three-degree-of-freedom parallel micro-positioning platform comprises a movable worktable, a fixed platform body and three full-flexible supporting chains connected between the movable worktable and the fixed platform body. The planar three-degree-of-freedom parallel micro-positioning platform is characterized in that the three full-flexible supporting chains are symmetric with the geometrical axis of the movable worktable as the center, each full-flexible supporting chain comprises an elastic moving pair and an elastic folded beam shaped like a Chinese character 'gong', the side face, shaped like the Chinese character 'gong', of each elastic folded beam and the top face of the movable worktable are in the same plane, one end of each elastic folded beam shaped like the Chinese character 'gong' is connected with the movable worktable, the other end of each elastic folded beam shaped like the Chinese character 'gong' is connected with one side face of the corresponding elastic moving pair, the opposite side faces of each elastic moving pair are fixedly connected with the fixed platform body through a piezoelectric ceramic actuator, and the geometrical axes of the three piezoelectric ceramic actuators are in the same plane and do not intersect at one point. The planar three-degree-of-freedom parallel micro-positioning platform of the symmetric structure is made of a piece of a material, and the shortest kinematic chain is adopted, so that the platform has the advantages of being free of assembly errors, compact in structure, high in kinematic accuracy, large in bearing capacity and the like.
Description
Technical field
The invention belongs to manufacturing technology field, specifically relate to a kind of symmetrical configuration type planar three freedom parallel micromotion platform.
Background technology
Development along with micro-/ nano technology, micromotion mechanism is as the important component part of micro OS, in fields such as micro-wound surgical operation, precision optical machinery engineering, fiber alignment, bioengineering, have broad application prospects, and parallel micromotion mechanism has without friction, gapless, error without accumulation, the advantage such as response is fast, bearing capacity is large than serial mechanism, thereby be widely used.
Britain Queensgate and German PIDeng company have all produced the product of the nanoscale microoperation mechanism based on Piezoelectric Ceramic, are mainly used in the occasions such as micro-processing, micro-assembling, optical fiber detection.P.Kallio etc. have developed the three-freedom microoperation parallel robot of Piezoelectric Ceramic; Hara and Henimi have studied planar three freedom and six-freedom parallel jiggle robot; Lee is studied realizing the freedom degree parallel connection micromotion mechanism of a movement and two rotations.Domestic BJ University of Aeronautics & Astronautics has developed the micro-manipulating robot based on freedom degree parallel connection Delta mechanism; The colleges and universities such as Jiaotong University Of East China, Beijing Jiaotong University are all studied plane 3-RRR flexible parallel connection robot; Beijing University of Technology has developed the 3-RRS flexible parallel mechanism that contains distribution flexibility hinge; Application number is that 201210216718.5 patent document discloses a kind of spatially decoupled three-dimensional mobile parallel connection micromotion mechanism.
Although there are many scholar's research freedom degree parallel connection micromotion mechanisms both at home and abroad, yet these achievements in research and patented technology are limited to the requirement that meets certain movement precision and space mostly, and often not using the rotational angle of motion workbench end as the important indicator of weighing micromotion platform space.At present, due to most of parallel micromotion mechanism be by by the flexibility of rigidity parallel institution to meet microoperation requirement, so usually make the structure of parallel micromotion mechanism comparatively complicated, be difficult to processing.Obviously, guaranteeing to realize micromotion platform end movement characteristic and be convenient under the prerequisite of processing, change the geometry of planar three freedom parallel micromotion platform body, make the higher kinematic accuracy of motion workbench end acquisition and larger space there is important researching value.
Summary of the invention
The object of this invention is to provide a kind of symmetrical configuration type planar three freedom parallel micromotion platform that can overcome above-mentioned defect, there is high kinematic accuracy and high bearing capacity.Its technical scheme is:
A kind of symmetrical configuration type planar three freedom parallel micromotion platform, comprise motion workbench, fixed platform and be connected in motion workbench and fixed platform between three complete flexible side chains, it is characterized in that: three complete flexible side chains are symmetrical about the geometrical axis of motion workbench, every complete flexible side chain includes a resilient movement pair and " bow " font elastic foldable beam, it is coplanar that wherein " bow " font elastic foldable beam is on the side of " bow " font and motion workbench end face, one end of " bow " font elastic foldable beam is connected with motion workbench, the other end is connected with a side of resilient movement pair, the opposite flank of resilient movement pair is fixed in fixed platform by piezoelectric ceramic actuator, the geometrical axis of three piezoelectric ceramic actuators is coplanar and do not meet at a bit.
The present invention compared with prior art, its advantage is: adopt complete flexible side chain as driving-chain, distinguish between affixed and motion workbench and fixed platform, the shortest this Kinematic Chain Design has guaranteed the kinematic accuracy of micromotion platform to greatest extent, and the length that can adjust " bow " font elastic foldable beam simultaneously changes rigidity and the precision of motion workbench.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention.
In figure: 1, piezoelectric ceramic actuator 2, resilient movement pair 3, " bow " font elastic foldable beam 4, motion workbench 5, fixed platform.
The specific embodiment
Article three, complete flexible side chain is symmetrical about the geometrical axis of motion workbench, every complete flexible side chain includes a resilient movement pair and " bow " font elastic foldable beam, it is coplanar that wherein " bow " font elastic foldable beam is on the side of " bow " font and motion workbench end face, one end of " bow " font elastic foldable beam is connected with motion workbench, the other end is connected with a side of resilient movement pair, the opposite flank of resilient movement pair is fixed in fixed platform by piezoelectric ceramic actuator, the geometrical axis of three piezoelectric ceramic actuators is coplanar and do not meet at a bit.
Claims (1)
1. a symmetrical configuration type planar three freedom parallel micromotion platform, comprise motion workbench (4), fixed platform (5) and be connected in motion workbench (4) and fixed platform (5) between three complete flexible side chains, it is characterized in that: three complete flexible side chains are symmetrical about the geometrical axis of motion workbench (4), every complete flexible side chain includes a resilient movement pair (2) and " bow " font elastic foldable beam (3), wherein " bow " font elastic foldable beam (3) is the side of " bow " font and the upper end face of motion workbench (4) is coplanar, one end of " bow " font elastic foldable beam (3) is connected with motion workbench (4), the other end is connected with a side of resilient movement secondary (2), the opposite flank of resilient movement secondary (2) is fixed in fixed platform (5) by piezoelectric ceramic actuator (1), the geometrical axis of three piezoelectric ceramic actuators (1) is coplanar and do not meet at a bit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310576085.3A CN103586863B (en) | 2013-11-18 | 2013-11-18 | Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310576085.3A CN103586863B (en) | 2013-11-18 | 2013-11-18 | Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103586863A true CN103586863A (en) | 2014-02-19 |
| CN103586863B CN103586863B (en) | 2015-07-15 |
Family
ID=50077289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310576085.3A Expired - Fee Related CN103586863B (en) | 2013-11-18 | 2013-11-18 | Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103586863B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104842343A (en) * | 2015-05-25 | 2015-08-19 | 山东理工大学 | Direct-driven rotary three-translation micromanipulation robot |
| CN105945904A (en) * | 2016-05-09 | 2016-09-21 | 北京空间飞行器总体设计部 | Three-freedom-degree platform based on flexible mechanism |
| CN113125094A (en) * | 2019-12-31 | 2021-07-16 | 上海交通大学 | Six-degree-of-freedom micro-vibration device based on flexible mechanism |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040086351A1 (en) * | 2002-11-06 | 2004-05-06 | Kim Jong Won | Micro-motion machine and micro-element fabricating machine using a 3 degree of freedom parallel mechanism |
| CN102009358A (en) * | 2010-11-05 | 2011-04-13 | 山东理工大学 | Annular elastic pair-containing three-degrees-of-freedom micro operating table |
| CN102830711A (en) * | 2012-09-14 | 2012-12-19 | 袁庆丹 | Large-stroke and high-precision micro-motion platform |
| CN102873683A (en) * | 2012-09-28 | 2013-01-16 | 北京工业大学 | Experimental apparatus with three flexible hinges and planar parallel mechanism |
| CN103030103A (en) * | 2012-12-10 | 2013-04-10 | 山东理工大学 | 3-PRR micro-displacement platform based on symmetrical variable cross-section compliant mechanism |
-
2013
- 2013-11-18 CN CN201310576085.3A patent/CN103586863B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040086351A1 (en) * | 2002-11-06 | 2004-05-06 | Kim Jong Won | Micro-motion machine and micro-element fabricating machine using a 3 degree of freedom parallel mechanism |
| CN102009358A (en) * | 2010-11-05 | 2011-04-13 | 山东理工大学 | Annular elastic pair-containing three-degrees-of-freedom micro operating table |
| CN102830711A (en) * | 2012-09-14 | 2012-12-19 | 袁庆丹 | Large-stroke and high-precision micro-motion platform |
| CN102873683A (en) * | 2012-09-28 | 2013-01-16 | 北京工业大学 | Experimental apparatus with three flexible hinges and planar parallel mechanism |
| CN103030103A (en) * | 2012-12-10 | 2013-04-10 | 山东理工大学 | 3-PRR micro-displacement platform based on symmetrical variable cross-section compliant mechanism |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104842343A (en) * | 2015-05-25 | 2015-08-19 | 山东理工大学 | Direct-driven rotary three-translation micromanipulation robot |
| CN104842343B (en) * | 2015-05-25 | 2020-08-07 | 山东理工大学 | Direct-drive type one-rotation three-translation micro-operation robot |
| CN105945904A (en) * | 2016-05-09 | 2016-09-21 | 北京空间飞行器总体设计部 | Three-freedom-degree platform based on flexible mechanism |
| CN105945904B (en) * | 2016-05-09 | 2018-08-24 | 北京空间飞行器总体设计部 | A kind of 3-dimensional freedom platform based on compliant mechanism |
| CN113125094A (en) * | 2019-12-31 | 2021-07-16 | 上海交通大学 | Six-degree-of-freedom micro-vibration device based on flexible mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103586863B (en) | 2015-07-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100484728C (en) | Three-translation orthogonal decoupling parallel micromotion platform | |
| CN103021472B (en) | Plane parallel type three-freedom-degree precise positioning work table | |
| CN1962209B (en) | Three-branch chain six-freedom degree parallel flexible hinge micromotion mechanism | |
| CN103552061B (en) | Parallel micro-motion platform with one translational degree of freedom and two rotational degrees of freedom | |
| CN202428438U (en) | Six-freedom-degree parallel connection micro robot | |
| CN100363157C (en) | Six-freedom micro operation robot with complete position and posture feedback | |
| CN101733754B (en) | Three-dimensionally moved decoupling micro-manipulating robot | |
| CN103568005B (en) | Dual-translation orthogonal decoupling parallel micro-positioning platform | |
| CN103586864A (en) | Planar three degree-of-freedom drive redundancy parallel robot mechanism formed by four PRR branched chains | |
| CN102626920B (en) | Non-concurrent axis symmetric three-dimensional-rotation parallel mechanism with two-degree of freedom planar subchains | |
| CN102699908A (en) | Two-freedom-degree mobile decoupling parallel robot mechanism | |
| CN104308835A (en) | Plane-symmetry three-rotating parallel connection mechanism | |
| CN105500347A (en) | Three-DOF (degrees of freedom) parallel mechanism with achievable stable pure translation | |
| CN102626921B (en) | Non-concurrent axis symmetric two-rotation one-movement parallel mechanism with two-degree of freedom planar subchains | |
| CN103586863B (en) | Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure | |
| CN104760037A (en) | (2T)&(1T1R) four-DOF (Degree of Freedom) decoupling and series-parallel connecting mechanism | |
| CN201109120Y (en) | Microposition platform for 2dof parallel structure | |
| CN104999452A (en) | Three-freedom-degree micro-operation robot | |
| CN204209685U (en) | A kind of novel two one-rotation parallel mechanisms | |
| CN104999457B (en) | Large-stroke three-freedom-degree micro-operation robot | |
| CN201736217U (en) | Three degree-of-freedom micro-operation robot | |
| CN103624559A (en) | Two-rotating complete decoupling parallel mechanism | |
| CN103406897B (en) | There is the 3-freedom parallel mechanism that two move a turn | |
| CN200991901Y (en) | Three flat-moving orthogonal decoupling paralled connecting micromovement platform | |
| CN105108742A (en) | Decoupled two-translation one-rotation parallel robot |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150715 Termination date: 20151118 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |