CN103578898A - Electronic gun special for electron beam bombardment furnace - Google Patents
Electronic gun special for electron beam bombardment furnace Download PDFInfo
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- CN103578898A CN103578898A CN201310528309.3A CN201310528309A CN103578898A CN 103578898 A CN103578898 A CN 103578898A CN 201310528309 A CN201310528309 A CN 201310528309A CN 103578898 A CN103578898 A CN 103578898A
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Abstract
The invention discloses an electronic gun special for an electron beam bombardment furnace. The electronic gun is mainly composed of an electronic gun shell, lamp wires, a cathode, a beam-forming electrode assembly, an anode, a beam-forming electrode, a lamp wire head end electrode, a lamp wire tail end electrode, a cathode electrode, an electric reactor, an insulation assembly, insulation coolant oil and a high-voltage cable leading-out head, wherein the lamp wires, the cathode, the beam-forming electrode assembly, the anode, the beam-forming electrode, the lamp wire head end electrode, the lamp wire tail end electrode, the cathode electrode, the electric reactor, the insulation assembly, the insulation coolant oil and the high-voltage cable leading-out head are arranged in the electronic gun shell. The electric reactor which is additionally arranged is composed of an iron core and a winding wound on the iron core. The electric reactor is immersed in the insulation coolant oil. The head end of the winding of the electric reactor is connected with the beam-forming electrode, and the tail end of the winding of the electric reactor is connected with the cathode electrode. The electronic gun can restrain the transition of an electron beam, and therefore the beam passing rate of the electronic gun is improved.
Description
Technical field
The present invention relates to electron beam process equipment field, be specifically related to a kind of Electron beam bombarding furnace special electronic rifle.
Background technology
The axisymmetric Pierce electron gun structure of the normal employing of Electron beam bombarding furnace electron gun, its cathode emission electronic beam current is restricted by temperature limiting state and space charge limit state.The saturated electrons beam current density of cathode emission under temperature limiting state is by formula
determine i in formula
sfor the saturated electrons beam current density of cathode emission, A
0for the inferior constant of Richard, the thermodynamic temperature that T is negative electrode, k is Boltzmann constant,
for cathode material work function.Under space charge limit state, under a certain cathode temperature, the beam current density of cathode emission is by formula
determine i in formula
spfor the beam current density between anode and cathode under space charge limit, d is cathode and anode spacing, E
afor accelerating voltage, and i
sp<i
s.Due to cathode in electron gun and bunching electrode equipotential, effective emission area of negative electrode is relevant with the film hole diameter of bunching electrode so.So cathode emission electronic beam current and cathode material
accelerating voltage E between negative electrode work temperature, anode and cathode
a, cathode and anode spacing d and bunching electrode film hole diameter d
brelevant, wherein
d and d
bimmutable at work, and E
ageneral control is in some stationary values.Visible, the electronic beam current that change Electron beam bombarding furnace electron gun is big or small, can only change cathode temperature T by changing negative electrode heating power.In order to obtain stable electronic beam current, Electron beam bombarding furnace electron gun need adopt degenerative control strategy.The shortcoming of this electron gun is that the control of electronic beam current can only be controlled its mean value, and time constant is larger, likely causes the bundle passband of electron gun decline and affect the electron gun life-span during electron beam transition.If negative electrode and bunching electrode are separated, adopt and change grid bias-voltage E
bthe method that changes effective emission area of negative electrode is controlled electronic beam current, though can partly improve the bundle passband of electron beam transition, grid bias-voltage E
breduced the emissivities of negative electrode, will increase the working temperature of negative electrode, thereby reduce cathode life.In order to solve the contradiction between electron gun bundle passband and cathode life, be necessary the structure of electron gun to improve.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of Electron beam bombarding furnace special electronic rifle, and it can suppress the electron gun of electronic beam current transition, thereby improves the bundle passband of electron gun.
For addressing the above problem, the present invention is achieved by the following scheme:
A kind of Electron beam bombarding furnace special electronic rifle, main by electron gun shell and filament, negative electrode and the bunching electrode assembly in electron gun shell is set, anode, bunching electrode electrode, filament head end electrode, filament end electrodes, cathode electrode, reactor, insulation assembly, insulation cold oil and high-tension cable leading-out end form.Wherein said filament head end electrode and filament end electrodes draw and are connected to respectively via high-tension cable the two poles of the earth of filament supply by being fixed on high-tension cable leading-out end on electron gun shell.Described bunching electrode electrode and cathode electrode are drawn and are connected to respectively the negative pole of accelerating power source and bombard positive source via high-tension cable by the high-tension cable leading-out end being fixed on electron gun shell.The positive pole of accelerating power source and the earth, electron gun shell, anode and workpiece join.Arbitrary utmost point of bombardment power cathode and filament supply joins.Described reactor is consisted of iron core and the winding being wound on this iron core.Reactor is immersed in insulation cold oil.Reactor winding head end and bunching electrode electrode join; Reactor winding end and cathode electrode join.
In such scheme, the iron core of described reactor adopts annular amorphous state high-frequency magnetic material to make.
The effect of described reactor is: when electron gun divergent bundle, electronic beam current direction is that the negative pole of electrode → high-tension cable → accelerating power source of electrode → reactor winding end → reactor winding → reactor winding head end → bunching electrode of the positive pole → workpiece → negative electrode → negative electrode of accelerating power source forms loop, when electronic beam current is flowed through reactor, if changed generation pressure drop
inductance value, I
eelectronic beam current), this voltage U
eto be applied between negative electrode and bunching electrode, electronic beam current will be formed to a quick local negative feedback, reach the object that suppresses electronic beam current momentary fluctuation.Electronic beam current I
eflip-flop by reactor, do not produce pressure drop, negative electrode and bunching electrode direct current equipotential, the anticathode average emitted ability of reactor does not exert an influence.
Compared with prior art, between the negative electrode of the electron gun that the present invention is designed and bunching electrode, on electric, be not directly connected, but connect by a reactor, can utilize like this reactor to suppress the dynamic component of electronic beam current, improve the stationarity of electronic beam current and the bundle passband of electron gun, but do not increase negative electrode working temperature, the life-span of not reducing negative electrode.
Accompanying drawing explanation
Fig. 1 is electron gun structure and high-field electrode wiring schematic diagram thereof.Mark in figure: 1, filament, negative electrode and bunching electrode assembly; 2, anode; 3, bunching electrode electrode; 4, filament head end electrode; 5, filament end electrodes; 6, cathode electrode; 7, reactor; 8, electron gun shell; 9, insulation assembly; 10, insulation cold oil; 11, high-tension cable leading-out end; 12, high-tension cable; 13, bombardment power supply; 14, filament supply; 15, accelerating power source.
Fig. 2 is reactor schematic diagram in Fig. 1.Mark in figure: 71, iron core; 72, winding; 73, winding head end; 74, winding end.
Embodiment
A kind of Electron beam bombarding furnace special electronic rifle, as shown in Figure 1, it is mainly by electron gun shell 8 and be located at filament, negative electrode and the bunching electrode assembly 1 in electron gun shell 8, anode 2, bunching electrode electrode 3, filament head end electrode 4, filament end electrodes 5, cathode electrode 6, insulation assembly 9, insulation cold oil 10 and high-tension cable leading-out end 11 form.Described filament head end electrode 4 and filament end electrodes 5 draw and are connected to respectively via high-tension cable 12 the two poles of the earth of filament supply 14 by being fixed on high-tension cable leading-out end 11 on electron gun shell 8.Negative pole and bombardment power supply 13 positive poles of accelerating power source 15 are also drawn and be connected to respectively via high-tension cable 12 to described bunching electrode electrode 3 and cathode electrode 6 by above-mentioned high-tension cable leading-out end 11.The positive pole of accelerating power source 15 and the earth, electron gun shell 8, anode 2 and workpiece join.Arbitrary utmost point of bombardment power supply 13 negative poles and filament supply 14 joins.
Basic mounting structure and the electric connecting relation of all parts of above-mentioned electron gun are continued to use prior art, and same or similar with existing electron gun, core improvement of the present invention is to have set up reactor 7 in the insulation cold oil 10 filling in electron gun shell 8, and by this reactor 7, indirectly realizes the electrical connection of 3, the cathode electrode 6 of electron gun and bunching electrode electrode.The reactor 7 of setting up is consisted of iron core 71 and the winding 72 being wound on this iron core 71.The iron core 71 of reactor 7 adopts annular amorphous state high-frequency magnetic material to make.Reactor 7 is immersed in insulation cold oil 10.Reactor 7 winding head ends 73 join with bunching electrode electrode 3, and reactor 7 winding ends 74 join with cathode electrode 6.
Claims (2)
1. an Electron beam bombarding furnace special electronic rifle, mainly by electron gun shell (8) and filament, negative electrode and the bunching electrode assembly (1) in electron gun shell (8) is set, anode (2), bunching electrode electrode (3), filament head end electrode (4), filament end electrodes (5), cathode electrode (6), insulation assembly (9), insulation cold oil (10) and high-tension cable leading-out end (11) form;
Described filament head end electrode (4) and filament end electrodes (5) draw and are connected to respectively via high-tension cable (12) the two poles of the earth of filament supply (14) by being fixed on high-tension cable leading-out end (11) on electron gun shell (8); Described bunching electrode electrode (3) and cathode electrode (6) are drawn and are connected to respectively the negative pole of accelerating power source (15) and bombard power supply (13) positive pole via high-tension cable (12) by the high-tension cable leading-out end (11) being fixed on electron gun shell (8); The positive pole of accelerating power source (15) and the earth, electron gun shell (8), anode (2) and workpiece join; Arbitrary utmost point of bombardment power supply (13) negative pole and filament supply (14) joins;
It is characterized in that:
In described electron gun shell (8), be also provided with reactor (7); This reactor (7) is consisted of iron core (71) and the winding (72) that is wound on this iron core (71); Reactor (7) is immersed in insulation cold oil (10); Reactor (7) winding head end (73) joins with bunching electrode electrode (3), and reactor (7) winding end (74) joins with cathode electrode (6).
2. a kind of Electron beam bombarding furnace special electronic rifle according to claim 1, is characterized in that: the iron core (71) of described reactor (7) adopts annular amorphous state high-frequency magnetic material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201310528309.3A CN103578898B (en) | 2013-10-31 | 2013-10-31 | A kind of electronic gun special for electron beam bombardment furnace |
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|---|---|---|---|
| CN201310528309.3A CN103578898B (en) | 2013-10-31 | 2013-10-31 | A kind of electronic gun special for electron beam bombardment furnace |
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| CN103578898A true CN103578898A (en) | 2014-02-12 |
| CN103578898B CN103578898B (en) | 2016-02-24 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105655215A (en) * | 2016-04-07 | 2016-06-08 | 桂林狮达机电技术工程有限公司 | Electronic gun for filament feeding type electron beam additive manufacturing equipment |
| CN105895478A (en) * | 2016-06-24 | 2016-08-24 | 桂林狮达机电技术工程有限公司 | Electron beam system with function of suppressing discharge harm of electron gun |
| CN109202071A (en) * | 2018-03-21 | 2019-01-15 | 中国航空制造技术研究院 | A kind of electron gun arrangements |
| CN114334587A (en) * | 2021-12-31 | 2022-04-12 | 广州赛隆增材制造有限责任公司 | Electron gun |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0451438A (en) * | 1990-06-18 | 1992-02-19 | Fujitsu Ltd | Electron beam exposure device and method |
| US20030155525A1 (en) * | 2002-02-15 | 2003-08-21 | Akimitsu Okura | Electron beam apparatus and high-voltage discharge prevention method |
| CN1721567A (en) * | 2004-07-05 | 2006-01-18 | 日立金属株式会社 | Fe-based amorphous alloy ribbon and magnetic core formed thereby |
| CN201123151Y (en) * | 2007-12-07 | 2008-09-24 | 桂林电子科技大学 | Electron beam generating system power supply device of electron-beam furnace |
| CN103177921A (en) * | 2013-02-06 | 2013-06-26 | 桂林狮达机电技术工程有限公司 | Electron beam control system and method for electronic gun |
| CN203562389U (en) * | 2013-10-31 | 2014-04-23 | 桂林电子科技大学 | Special electron gun for electron beam bombardment furnace |
-
2013
- 2013-10-31 CN CN201310528309.3A patent/CN103578898B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0451438A (en) * | 1990-06-18 | 1992-02-19 | Fujitsu Ltd | Electron beam exposure device and method |
| US20030155525A1 (en) * | 2002-02-15 | 2003-08-21 | Akimitsu Okura | Electron beam apparatus and high-voltage discharge prevention method |
| CN1721567A (en) * | 2004-07-05 | 2006-01-18 | 日立金属株式会社 | Fe-based amorphous alloy ribbon and magnetic core formed thereby |
| CN201123151Y (en) * | 2007-12-07 | 2008-09-24 | 桂林电子科技大学 | Electron beam generating system power supply device of electron-beam furnace |
| CN103177921A (en) * | 2013-02-06 | 2013-06-26 | 桂林狮达机电技术工程有限公司 | Electron beam control system and method for electronic gun |
| CN203562389U (en) * | 2013-10-31 | 2014-04-23 | 桂林电子科技大学 | Special electron gun for electron beam bombardment furnace |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105655215A (en) * | 2016-04-07 | 2016-06-08 | 桂林狮达机电技术工程有限公司 | Electronic gun for filament feeding type electron beam additive manufacturing equipment |
| CN105655215B (en) * | 2016-04-07 | 2018-01-05 | 桂林狮达机电技术工程有限公司 | Wire feed type electron beam increasing material manufacturing equipment electron gun |
| CN105895478A (en) * | 2016-06-24 | 2016-08-24 | 桂林狮达机电技术工程有限公司 | Electron beam system with function of suppressing discharge harm of electron gun |
| CN109202071A (en) * | 2018-03-21 | 2019-01-15 | 中国航空制造技术研究院 | A kind of electron gun arrangements |
| CN109202071B (en) * | 2018-03-21 | 2020-09-08 | 中国航空制造技术研究院 | Electron gun device |
| CN114334587A (en) * | 2021-12-31 | 2022-04-12 | 广州赛隆增材制造有限责任公司 | Electron gun |
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| Publication number | Publication date |
|---|---|
| CN103578898B (en) | 2016-02-24 |
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