CN103576465B - Rotary exposure carry equipment - Google Patents
Rotary exposure carry equipment Download PDFInfo
- Publication number
- CN103576465B CN103576465B CN201210254365.8A CN201210254365A CN103576465B CN 103576465 B CN103576465 B CN 103576465B CN 201210254365 A CN201210254365 A CN 201210254365A CN 103576465 B CN103576465 B CN 103576465B
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- China
- Prior art keywords
- base material
- rotary
- rotating mechanism
- exposure
- carry equipment
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
System of the present invention provides a kind of rotary exposure carry equipment, for carrying a base material to expose, rotary exposure carry equipment comprises a bogey and a rotary type mobile device, base material is fixed thereon and supporting substrate by bogey, rotary type mobile device has a rotating mechanism, rotating mechanism connects bogey and is mobile under the state of rotating, to improve the efficiency of exposure manufacture process.
Description
Technical field
System of the present invention exposes carry equipment about one, particularly about a kind of rotary exposure carry equipment.
Background technology
The product of electronic loop image-forming is needed at LCD, printed circuit board (PCB) and wireless charger etc., all need through design circuit, smear the steps such as photoresistance, aligning, exposure, development, etching, removing photoresistance and detection, to be transferred on a base material by designed electronic loop image.Exposure manufacture process uses a light source (such as, short arc mercury lamp) to irradiate base material to expose to make base material usually.
But, in known techniques, when using each surface of exposure sources exposed substrate, each surface of base material need be made sequentially to expose by overturning base material successively.Therefore step of exposure is complicated, and processing time is increased.
Summary of the invention
Fundamental purpose of the present invention is to provide a kind of rotary exposure carry equipment, to simplify step of exposure and to improve the overall process time.
The technological means that the present invention adopts for the problem solving known techniques is a kind of rotary exposure carry equipment, for carrying a base material to expose, rotary exposure carry equipment comprises a bogey and a rotary type mobile device, base material is fixed thereon and supporting substrate by bogey, rotary type mobile device has a rotating mechanism, and rotating mechanism connects bogey and is mobile under the state of rotating.
In one embodiment of this invention, rotating mechanism is a fulcrum of axial-rotation.
In one embodiment of this invention, rotating mechanism is the longitudinally surface being parallel to base material.
In one embodiment of this invention, the rotational axis line of rotating mechanism is by the center of base material.
In one embodiment of this invention, the distance of the rotational axis line of rotating mechanism and the center of base material is the half of the length of the lateral surfaces of base material.
In one embodiment of this invention, the distance of the rotational axis line of rotating mechanism and the center of base material is greater than the half of the length of the lateral surfaces of base material.
In one embodiment of this invention, also comprise and receive component, be connected between rotating mechanism and bogey.
In one embodiment of this invention, bogey is multiple, and receives component by multiple and each bogey is connected with rotating mechanism.
In one embodiment of this invention, the bearing of trend receiving component is the lateral surfaces being parallel to base material.
In one embodiment of this invention, component is received for being set to its bearing of trend as axial rotary.
Via the technology used in the present invention means, by rotary exposure carry equipment of the present invention, multiple surfaces of base material all can be exposed in single exposure process, and save successively by step that base material turn-over sequentially exposes to make each surface of base material, processing time is more reduced and operation steps more simplifies, and improve the efficiency of exposure manufacture process.
In one embodiment, can expose each surface of multiple base material and base material, to improve exposure efficiency by rotary exposure carry equipment.
Accompanying drawing explanation
The schematic diagram of the rotary exposure carry equipment of Fig. 1 system display first embodiment of the present invention.
The schematic diagram of the rotary exposure carry equipment of Fig. 2 system display second embodiment of the present invention.
The schematic diagram of the rotary exposure carry equipment of Fig. 3 system display third embodiment of the present invention.
Primary clustering symbol description
100,100a, 100b rotary exposure carry equipment
1,1a, 1b bogey
11 fixed components
2 rotary type mobile devices
21,21a, 21b rotating mechanism
22 driving mechanisms
23 conveying mechanisms
3 receive component
4 base materials
5 exposure devices
A, A', A " rotational axis line
D1, D2 distance
E bearing of trend
O center
P exposure passages
R1, R2 sense of rotation
S1 is surface longitudinally
S2 lateral surfaces
Embodiment
Specific embodiment of the present invention, by by following embodiment and to be attachedly further described in graphic.
Consult shown in Fig. 1, it is the schematic diagram of the rotary exposure carry equipment of the display first embodiment of the present invention.The rotary exposure carry equipment 100 of the first embodiment of the present invention comprises bogey 1 and a rotary type mobile device 2.
Bogey 1 is in order to carry a base material 4.In the present embodiment, bogey 1 comprises a fixed component 11 with fixing substrate 4.Bogey 1 is a microscope carrier, and fixed component 11 is a fixture.
Rotary type mobile device 2 comprises rotating mechanism 21, driving mechanism 22 and a conveying mechanism 23.Wherein, rotating mechanism 21 is connected to bogey 1.In the present embodiment, rotating mechanism 21 is a fulcrum 21 of axial-rotation, and for mobile under the state rotated.Certainly, the present invention is not as limit, and rotating mechanism 21 also can be a rotating disk, and bogey 1 can be made to rotate.
In the present embodiment, the longitudinal direction surperficial S1 of rotating mechanism 21 for being parallel to base material 4, and the rotational axis line A of rotating mechanism 21 is by the O place, center of base material 4.
Driving mechanism 22 is connected to one end of rotating mechanism 21, to drive rotating mechanism 21 to rotate, rotating mechanism 21 is rotated for axial rotary with rotational axis line A.Conveying mechanism 23 connects driving mechanism 22, with moving drive mechanism 22, and makes rotating mechanism 21 move along an exposure passages P in the lump.In the present embodiment, driving mechanism 22 is a motor, conveying mechanism 23 is a conveying belt, but the present invention is not limited to this, also can only rotating mechanism be rotated and conveying with single institution, such as driving mechanism 22 and conveying mechanism 23 can change mechanical arm etc. into, as long as rotating mechanism 21 can be made to rotate and move along exposure passages P.
And the lateral location place of exposure passages P is provided with an exposure device 5, make base material 4 by the exposure of exposure device 5.
Above structure, when conveying mechanism 23 is along throughput direction T transport driving 22, related rotating mechanism 21, bogey 1 and the base material 4 be fixed on bogey 1 of making moves along throughput direction T.Base material 4, in the process along throughput direction T movement, can be subject to sending out exposure device 5 and irradiates and be exposed.
Because rotating mechanism 21 rotates for axial rotary with the bearing of trend of rotational axis line A by driving mechanism 22, bogey 1 also can rotate for axial rotary with the bearing of trend of rotational axis line A along with rotating mechanism 21 by this, thus the base material 4 be fixed on bogey 1 also can rotate along with rotating mechanism 21.In the present embodiment, the sense of rotation R1 of rotating mechanism 21 is that certainly, the present invention is not as limit, and sense of rotation R1 also can be clockwise counterclockwise.
When base material 4 rotates, base material 4 each longitudinally surperficial S1 all can be exposed the illumination that device 5 sends and be mapped to.Thus reach in single exposure process, each longitudinal effect of being all exposed of surperficial S1 of base material 4.
Consult shown in Fig. 2, it is the schematic diagram of the rotary exposure carry equipment of the display second embodiment of the present invention.The composition assembly of the rotary exposure carry equipment 100a of this embodiment is roughly identical with aforementioned first embodiment, therefore identical assembly is indicate with identical component numerals, as a means of correspondence.Its difference is that the distance D1 of the rotational axis line A' of rotating mechanism 21a in the present embodiment and the center O of base material 4 is the half of the length of the lateral surfaces S2 of base material 4, therefore the radius of turn that the base material 4 on bogey 1a rotates along with rotating mechanism 21a is fixed on not identical with aforementioned first embodiment, to tackle the exposure under different situations.Other structure is all identical with the first embodiment, therefore repeats no more.
Consult shown in Fig. 3, it is the schematic diagram of the rotary exposure carry equipment of the display third embodiment of the present invention.The composition assembly of the rotary exposure carry equipment 100b of this embodiment is roughly identical with the first embodiment, therefore identical assembly is indicate with identical component numerals, as a means of correspondence.Its difference is, in the present embodiment, rotary exposure carry equipment 100b comprises four bogey 1b(also can the bogey of or more), and by four receive component 3(also can one or more receive component) to make each bogey 1b be connected with rotating mechanism 21b.
In the present embodiment, the rotational axis line A of rotating mechanism 21b " exceedes the half of the length of base material 4 lateral surfaces S2 with the distance D2 of the center O of base material 4.
In the present embodiment, receiving component 3 is connected between rotating mechanism 21b and bogey 1b, and the bearing of trend E respectively receiving component 3 be parallel to each base material 4 lateral surfaces S2 and perpendicular to rotating mechanism 21b, certainly, the present invention is not as limit, and bearing of trend E also can be with the lateral surfaces S2 of base material 4 not parallel with rotating mechanism 21b out of plumb.
In the present embodiment, receive component 3 to rotate for axial rotary with its bearing of trend E by rotating mechanism (not shown).In the present embodiment, receive the sense of rotation R2 of component 3 for being rotated counterclockwise, certainly, the present invention is not as limit, and sense of rotation R2 also can be clockwise.
Therefore, each bogey 1b receives the axial rotary of component 3 according to each and rotates respectively, and " revolve round the sun for hollow shaft according to the rotation of rotating mechanism 21b with the rotational axis line A of rotating mechanism 21b, the illumination that device 5 sends can be exposed to make the surface of the base material 4 be fixed on bogey 1 and be mapped to and be exposed.Thus the effect that the surface reaching four base materials 4 is all exposed.
Can be learnt by embodiments of the invention, by rotary exposure carry equipment of the present invention, multiple surfaces of base material are all exposed, and save and successively base material turn-over is made the step that each surface of base material sequentially exposes, processing time is more reduced and operation steps more simplifies, and improve the efficiency of exposure manufacture process.
From above embodiment, the value in the true tool industry of rotary exposure carry equipment provided by the present invention.But above describing is only preferred embodiment of the present invention and illustrates, be allly skillful in this those skilled in the art when can do other all improvement according to above-mentioned explanation, but these change and still belong in the spiritual and the scope of the claims that defines of invention of the present invention.
Claims (10)
1. a rotary exposure carry equipment, for carrying a base material to expose, this rotary exposure carry equipment comprises:
One bogey, is fixed thereon this base material, and carries this base material;
One rotary type mobile device, have a rotating mechanism, a driving mechanism and a conveying mechanism, this conveying mechanism connects this driving mechanism, and this conveying mechanism makes this rotating mechanism move, and this rotating mechanism rotates this bogey with a rotational axis line; And
One exposure device;
It is characterized in that, make this rotating mechanism by the movement of this conveying mechanism for moving along an exposure passages, this exposure device is arranged at the lateral location place of this exposure passages, this base material is by the process of this conveying mechanism movement, this base material being fixed on this bogey with the bearing of trend of this rotational axis line for axial rotary and rotate and be subject to this exposure device and irradiate and be exposed, thus in single exposure process, each longitudinal surface of this base material is all exposed.
2. rotary exposure carry equipment as claimed in claim 1, it is characterized in that, this rotating mechanism is a fulcrum of axial-rotation.
3. rotary exposure carry equipment as claimed in claim 1, is characterized in that, this rotating mechanism is the longitudinally surface being parallel to this base material.
4. rotary exposure carry equipment as claimed in claim 1, is characterized in that, this rotational axis line of this rotating mechanism passes through the center of this base material.
5. rotary exposure carry equipment as claimed in claim 1, it is characterized in that, the distance of this rotational axis line of this rotating mechanism and the center of this base material is the half of the length of the lateral surfaces of this base material.
6. rotary exposure carry equipment as claimed in claim 1, it is characterized in that, the distance system of this rotational axis line of this rotating mechanism and the center of this base material is greater than the half of the length of the lateral surfaces of this base material.
7. rotary exposure carry equipment as claimed in claim 1, is characterized in that, also comprise and receive component, be connected between this rotating mechanism and this bogey.
8. rotary exposure carry equipment as claimed in claim 7, it is characterized in that, this bogey is multiple, and receives component by multiple this and each this bogey is connected with this rotating mechanism.
9. rotary exposure carry equipment as claimed in claim 7, it is characterized in that, this bearing of trend system of receiving component is parallel to the lateral surfaces of this base material.
10. rotary exposure carry equipment as claimed in claim 7, it is characterized in that, this is received component system and is set to its bearing of trend as axial rotary.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210254365.8A CN103576465B (en) | 2012-07-23 | 2012-07-23 | Rotary exposure carry equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210254365.8A CN103576465B (en) | 2012-07-23 | 2012-07-23 | Rotary exposure carry equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103576465A CN103576465A (en) | 2014-02-12 |
| CN103576465B true CN103576465B (en) | 2016-02-24 |
Family
ID=50048533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210254365.8A Expired - Fee Related CN103576465B (en) | 2012-07-23 | 2012-07-23 | Rotary exposure carry equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103576465B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1041841A (en) * | 1988-04-15 | 1990-05-02 | 米德公司 | Making is used for the method for the photomask of image projection and device |
| CN1183580A (en) * | 1996-11-21 | 1998-06-03 | 三星电子株式会社 | Developing device for semiconductor device fabrication and its controlling method |
| CN102043345A (en) * | 2009-10-20 | 2011-05-04 | 索尼公司 | Exposure device and exposure method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001322177A (en) * | 2000-05-17 | 2001-11-20 | Minolta Co Ltd | Method and apparatus for three-dimensional modeling |
| GB2378150A (en) * | 2001-07-31 | 2003-02-05 | Dtm Corp | Fabricating a three-dimensional article from powder |
-
2012
- 2012-07-23 CN CN201210254365.8A patent/CN103576465B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1041841A (en) * | 1988-04-15 | 1990-05-02 | 米德公司 | Making is used for the method for the photomask of image projection and device |
| CN1183580A (en) * | 1996-11-21 | 1998-06-03 | 三星电子株式会社 | Developing device for semiconductor device fabrication and its controlling method |
| CN102043345A (en) * | 2009-10-20 | 2011-05-04 | 索尼公司 | Exposure device and exposure method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103576465A (en) | 2014-02-12 |
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160224 |
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| CF01 | Termination of patent right due to non-payment of annual fee |