CN103576413A - High-nonlinearity micro-ring waveguide optical device - Google Patents
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Abstract
The invention relates to a micro-ring waveguide optical device capable of realizing all-optical signal processing by utilizing a high-nonlinearity effect, and aims to overcome the defect that nonlinear coefficients are insufficient when a conventional micro ring performs all-optical signal processing. The provided micro-ring waveguide optical device comprises a straight waveguide and a parallel growth micro ring on a substrate, wherein the micro ring is an annular resonant cavity; the ridge waveguide part of the micro ring adopts a parallel slot structure instead of a single ridge waveguide structure; and the straight waveguide is coupled with the micro ring. According to the micro-ring waveguide optical device, one parallel slot micro-ring waveguide structure is innovated; and when light is coupled into the parallel slot micro-ring waveguide structure, the slot waveguide structure can well limit a light field, the light intensity of resonance light is enhanced greatly due to the resonance effect of the micro ring, accordingly, various nonlinear effects of the micro ring are enhanced, the threshold value is reduced, the efficiency is improved, and the device can be applied to the all-optical signal processing fields such as optical frequency comb, wavelength conversion, logic gate, format conversion and the like.
Description
Technical field
The present invention relates to nonlinear effect, the optical device field that full light signal is processed, more specifically relates to a kind of high non-linearity effect of utilizing and realizes micro-ring waveguide optical device that full light signal is processed.
Background technology
Since 20 century 70 optical communication techniques, in worldwide, be extensively studied and develop, and becoming an importance of current Information Technology Development.And " optical device " is the core of optical communication system, the cost of communication system, capacity and power consumption are had to very large impact, so the research of optical device is the development key point of optical communication technique with the marketization always.
About optical device; further developing is exactly light integrated (integrated optics); it is the result of optical device and System Development; Milier by U.S. Bell laboratory proposed in 1969; fundamental purpose is the optical device of various functions to be integrated to (similar microelectronics is integrated) in a planar substrate; to realize the scale of optical system, microminiaturization, integrated.Development and raising along with micro-nano process technology, integrated optics has also obtained very large progress, silica-based and SOI (silicon-on-insulator, silica-based insulation) based optical waveguide, with its high index-contrast and strong some optical confinement, can be so that optical device more and more develops to high integration, miniaturization, nanometer scale yardstick.A major issue of integrated optics is exactly to reduce the size of device to improve integrated level, the same Marcatill in U.S. Bell laboratory in 1969 has proposed concept and the structure of micro-ring, along with device fabrication level constantly improves, micro-ring develops the study hotspot becoming in integrated optics rapidly, various functional devices based on micro-ring are also accomplished, therefore micro-ring has been brought into play more and more important effect in fiber waveguide device, and is considered to the primary element of following large-scale integrated optical circuit.
At present people utilize the spectral line characteristic of micro-ring to do filter or Application in Sensing, or phase propetry does lag line (buffer), but most of or wish to utilize micro-ring to carry out the processing of full light signal.But the nonlinear factor of traditional micro-ring structure is lower, be difficult to reach the requirement that full light signal is processed.In order to make micro-ring structure obtain higher nonlinear factor, traditional method one is further to improve its Q value.But if Q value is too high, the inevitable transmission spectral line acutance of micro-ring that just causes increases, and pumping light power utilizes little, and efficiency also decreases.Traditional method two is to adopt compared with the new material of high nonlinear coefficient.But silicon based optoelectronic devices can adopt ripe CMOS technique to make production low cost, high performance commercial devices become possibility at present, and new material will inevitably cause the complexity of technique, the increase of cost.
And existing slot straight wave guide structure has higher nonlinear factor, Slot waveguide is comprised of both sides linear pattern high-index material and middle low-index material (or air gap), and the size of the width of both sides high-index material, height and low-index material is hundreds of nanometer.This waveguide can make light field well be limited in the slot district of low-refraction, its principle is exactly to utilize the normal component of Maxwell equation medium interface electric displacement vector continuous, if there is high refringence in interface, so just must cause discontinuous in interface of electric field intensity, when the width of low-index material is much smaller than light field during the attenuation length at this material, the evanscent field of two waveguides superposes in slot region, make electric field intensity in low-index regions far away higher than within waveguide, in low-refraction gap, Ex electric field is had to very strong restriction, form accurate TE mould, thereby can realize the transmission of light signal in nanoscale low-index layer, this structure has all correspondingly obtained checking on theoretical simulation and experiment.Respectively as shown in Figure 1 and Figure 2, existing Slot waveguide is the relative geometry position with substrate 3 according to slot structural area 9, is divided into parallel and vertical slot structure.
Also in conjunction with parallel slot waveguiding structure and micro-ring structure, do not improve the non-linear of micro-ring waveguide optical device at present, reach the technical scheme of application necessary requirement.
Summary of the invention
Technical matters to be solved by this invention is to carry out full light signal processing non-linear hour coefficient deficiency for overcoming existing micro-ring, a kind of micro-ring waveguide optical device has been proposed, when not needing further to improve micro-ring Q value, and under lower pump power, just can obtain high nonlinear factor, realize the processing of full light signal.
For solving the problems of the technologies described above, the present invention proposes a kind of micro-ring waveguide optical device, comprise: straight wave guide and micro-ring that Parallel Growth goes out on substrate, described micro-ring is ring resonator, the ridge waveguide of described micro-ring is partly parallel slot structure, rather than single ridge waveguide structure, described straight wave guide and coupling.
Preferably, described straight wave guide is one, is positioned at a side of described micro-ring, side-coupled with described micro-ring.
Also preferred, described straight wave guide is one, is positioned at the upside of described micro-ring, vertical coupled with described micro-ring.
Also preferred, described straight wave guide is two, lays respectively at the both sides of described micro-ring, with described micro-loop coupling.
For the shape of described micro-ring, may be selected to be annular, polygon, ellipse.
For silica-based slot waveguide, the clearance material of slot structure is non-silicon low-index material, can reduce two-photon absorption.
In slot district, described non-silicon low-index material is highly-nonlinear material, as silicon nanocrystal doping SiO2, improves that it is non-linear.
Preferably, the width of the micro-ring xsect of described slot is 500nm ± 5%, is highly 350nm ± 5%, and wherein the low-refraction Partial Height in the middle of slot district is that the high index of refraction Partial Height on upper and lower both sides, 30～40nm ±5%， slot district is respectively 160nm ± 5%.
More excellent, in order to allow the micro-ring of straight wave guide and slot better be coupled, in its coupled zone, be spaced apart 50～100nm ± 5%.The xsect size of the cross sectional dimensions of straight wave guide and the micro-ring of slot is the same.
For the radius of described micro-ring, its big or small value is as follows:
C is the light velocity, the effective refractive index that n is waveguide, and R is the radius of the micro-ring of slot, Δ υ is optical signal frequency interval.
The present invention has innovated a micro-ring waveguide structure of parallel slot, when the micro-ring waveguide structure of parallel slot is entered in optically-coupled, wherein Slot waveguiding structure can well limit light field, and the resonance effect of micro-ring makes the enhancing of harmonic light light intensity very large, therefore the various nonlinear effects in micro-ring are enhanced, reduce threshold value, raise the efficiency, and can in full light signal is processed as fields such as frequency comb, wavelength conversion, logic gate and pattern conversions, be applied.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, technical scheme of the present invention is further described in detail.
Fig. 1 is existing parallel slot waveguiding structure schematic diagram.
Fig. 2 is existing vertical slot waveguiding structure schematic diagram.
Fig. 3 is the vertical view of the micro-ring waveguide structure of parallel slot of the present invention.
Fig. 4 is that Fig. 3 is along the vertical cross-section schematic diagram of A-A '.
Fig. 5 is the vertical view of the parallel slot waveguiding structure of polygon of the present invention.
Fig. 6 is the vertical view of the parallel slot waveguiding structure of racetrack of the present invention.
Fig. 7 is the vertical view of vertical coupled parallel slot waveguiding structure of the present invention.
Fig. 8 is the vertical view of the parallel slot waveguiding structure of wildcard-filter style of the present invention.
Wherein, 1-parallel slot ring resonator, 2-straight wave guide, 3-substrate, 4-straight wave guide ridged part, 5-slot structure upside high index of refraction part, 6-slot structure low-refraction part, 7-slot structure underside high index of refraction part, 8-slot waveguide.
Embodiment
As shown in Figure 3,4, pump light source or signal optical source enter in parallel slot ring resonator 1 (pump light source or signal optical source can be coupled in straight wave guide 2 by grating or tapered transmission line) by straight wave guide 2 is side-coupled.When optically-coupled enters in parallel slot ring resonator 1, due to slot structure, with its high index-contrast and strong some optical confinement, it is very strong that light intensity in slot district reaches, and adds the resonance effect of micro-ring, under lower pumping light power, various nonlinear effects in slot structure ring resonator are enhanced, reduce threshold value, improved efficiency, and can utilize its high nonlinear effect to carry out full light signal processing.When pumping laser is coupled into resonator cavity, its energy surpasses after the threshold value of its parametric oscillation, can excite the frequency making new advances by four-wave mixing effect, finally forms optical frequency com.Utilize pumping laser at the four-wave mixing effect of parallel slot ring resonator, can realize the generation of frequency comb, realize wavelength conversion.Can also utilize its Nonlinear optical absorption, two-photon absorption and free carrier effect of dispersion are realized logic gate function.
As shown in Figure 5,6, circular except above of the shape of micro-ring of parallel slot ring resonator, can also be polygon, track type (ellipse).Side-coupled except above of the coupling scheme of straight wave guide and micro-ring can also be vertical coupled.One-piece construction can be not only through-type as shown in Fig. 3,4,5,6,7, can also be wildcard-filter style as shown in Figure 8.
Owing to reaching higher nonlinear factor, device size of the present invention is generally: the width of the micro-ring xsect of slot is 500nm ± 5%, it is highly 350nm ± 5%, wherein the low-refraction Partial Height in the middle of slot district is that the high index of refraction Partial Height on upper and lower both sides, 30～40nm ±5%， slot district is respectively 160nm ± 5%.In order to allow the micro-ring of straight wave guide and slot better be coupled, in its coupled zone, be spaced apart 50-100nm ± 5%.The cross sectional dimensions of straight wave guide is generally the same with the xsect size of the micro-ring of slot.For the radius of micro-ring, as required, can its size of flexible design:
C is the light velocity, the effective refractive index that n is waveguide, and R is the radius of the micro-ring of slot, Δ υ is frequency interval.
It should be noted last that, above embodiment is only unrestricted in order to technical scheme of the present invention to be described, although the present invention is had been described in detail with reference to preferred embodiment, those of ordinary skill in the art is to be understood that, can modify or be equal to replacement technical scheme of the present invention, and not departing from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of claim scope of the present invention.
Claims (10)
1. a micro-ring waveguide optical device, is characterized in that, comprising: straight wave guide and micro-ring that Parallel Growth goes out on substrate, and described micro-ring is ring resonator, the ridge waveguide of described micro-ring is partly parallel slot structure, described straight wave guide and coupling.
2. micro-ring waveguide optical device according to claim 1, is characterized in that, described straight wave guide is one, is positioned at a side of described micro-ring, side-coupled with described micro-ring.
3. micro-ring waveguide optical device according to claim 1, is characterized in that, described straight wave guide is one, is positioned at the upside of described micro-ring, vertical coupled with described micro-ring.
4. micro-ring waveguide optical device according to claim 1, is characterized in that, described straight wave guide is two, lays respectively at the both sides of described micro-ring, with described micro-loop coupling.
5. micro-ring waveguide optical device according to claim 1, is characterized in that, described micro-ring be shaped as annular, polygon or ellipse.
6. according to the micro-ring waveguide optical device one of claim 1-5 Suo Shu, it is characterized in that, the width of the micro-ring xsect of described slot is 500nm ± 5%, it is highly 350nm ± 5%, wherein the low-refraction Partial Height in the middle of slot district is that the high index of refraction Partial Height on upper and lower both sides, 30～40nm ±5%， slot district is respectively 160nm ± 5%.
7. micro-ring waveguide optical device according to claim 6, is characterized in that, coupled zone be spaced apart 50～100nm ± 5%.The xsect size of the cross sectional dimensions of straight wave guide and the micro-ring of slot is the same.
8. micro-ring waveguide optical device according to claim 7, is characterized in that, the radius of described micro-ring, and its big or small value is as follows:
In above formula, c is the light velocity, the effective refractive index that n is waveguide, and R is the radius of the micro-ring of slot, Δ υ is optical signal frequency interval.
9. micro-ring waveguide optical device according to claim 7, is characterized in that, for silica-based slot waveguide, the clearance material of slot structure is non-silicon low-index material.
10. micro-ring waveguide optical device according to claim 9, is characterized in that ， slot district, and described non-silicon low-index material is highly-nonlinear material silicon nanocrystal doping SiO2.
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| CN104238009A (en) * | 2014-09-12 | 2014-12-24 | 北京大学 | Method for achieving optical isolation though nonreciprocity of mode coupling and optical isolator |
| CN104932171A (en) * | 2015-06-23 | 2015-09-23 | 华中科技大学 | Micro-annular waveguide optical device used for generating optical frequency comb |
| CN104977774A (en) * | 2015-07-09 | 2015-10-14 | 华中科技大学 | Microcavity for chromatic dispersion cutting for silicon substrate multi-wavelength light source |
| CN105591269A (en) * | 2016-03-10 | 2016-05-18 | 上海理工大学 | Broadband surface plasma logic input source |
| CN105629625A (en) * | 2016-03-02 | 2016-06-01 | 北方工业大学 | Dual microring resonant cavity differential delay based all-optical logic exclusive OR gate |
| CN105629387A (en) * | 2016-03-14 | 2016-06-01 | 华中科技大学 | Micro-ring waveguide device |
| WO2016086412A1 (en) * | 2014-12-05 | 2016-06-09 | 华为技术有限公司 | Optical waveguide |
| CN106602403A (en) * | 2017-02-28 | 2017-04-26 | 太原理工大学 | Method and device for realizing low-power all-optical quantization based on micro-nano resonant cavity |
| CN107727611A (en) * | 2017-09-25 | 2018-02-23 | 电子科技大学 | A kind of SOI micro-loop photon biology sensors based on 1-D photon crystal |
| CN108123756A (en) * | 2017-03-09 | 2018-06-05 | 杭州电子科技大学 | Wavelength converting device based on the full light samples of ring resonator |
| CN108227073A (en) * | 2017-12-12 | 2018-06-29 | 东南大学 | A kind of modulation integrated type optical buffer based on SOI based structures |
| CN108363145A (en) * | 2018-02-02 | 2018-08-03 | 西南大学 | It is a kind of based on plasma-induced transparent variable optical delay line, implementation method and regulation and control method with sink effect |
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| CN110740030A (en) * | 2019-09-23 | 2020-01-31 | 太原理工大学 | Integrated chaotic signal generator with double-microring waveguide structure |
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| CN111969396B (en) * | 2020-07-27 | 2021-07-27 | 中国科学院西安光学精密机械研究所 | High-integration intermediate infrared broadband super-continuum spectrum generation device and method |
| CN114280873A (en) * | 2020-11-17 | 2022-04-05 | 华中科技大学 | Method for improving strength of nonlinear effect in resonant cavity |
| CN114280730A (en) * | 2021-06-29 | 2022-04-05 | 华中科技大学 | Double-resonant-cavity double-waveguide filtering system and method |
| CN114280730B (en) * | 2021-06-29 | 2022-09-13 | 华中科技大学 | Double-resonant-cavity double-waveguide filtering system and method |
| WO2023272690A1 (en) * | 2021-07-01 | 2023-01-05 | 深圳市速腾聚创科技有限公司 | Ridge waveguide, micro-ring resonator, tunable optical delay line and chip |
| CN116045940A (en) * | 2023-03-31 | 2023-05-02 | 中国船舶集团有限公司第七〇七研究所 | Micro-ring coupling structure based on integrated optical gyroscope and adjusting method |
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