CN103575738A - Surface foreign material detecting system and control method thereof - Google Patents
Surface foreign material detecting system and control method thereof Download PDFInfo
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- CN103575738A CN103575738A CN201310306369.0A CN201310306369A CN103575738A CN 103575738 A CN103575738 A CN 103575738A CN 201310306369 A CN201310306369 A CN 201310306369A CN 103575738 A CN103575738 A CN 103575738A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
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- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention relates to a surface foreign material detecting system and a control method thereof. The surface foreign material detecting system comprises a platform part, a light source irradiating part, a supporting bench, a shooting part, a control part, and a display part. A detected object is disposed on an upper part of the platform part, and the platform part can be used to adjust the height of the upper part. The light source irradiating part can be separated from the platform part, can be used to irradiate the light for the checking parallel to the surface of the detected object according to the checking condition. The shooting part is disposed on the above mentioned supporting bench, can be used to receive the light scattered from the surface of the detected object, and shoot the image information of the foreign material information of the detected object. The control part is connected with the platform part, the light source irradiating part, and the shooting part, and is used to receive the image information, and can be used to detect the surface foreign material information. The display part can be used to display the surface foreign material information.
Description
Technical field
The present invention relates to Superficial Foreign Body check system and control method thereof.
Background technology
Surface defect inspection apparatus in the past refers to following device,, as what record at korean patent application No. 2006-0080306 (application on August 24th, 2006), comprise the checking matter that will measure, for the light source portion of throwing light on and for obtaining the detection camera etc. of the image of checking matter, whether the image discriminating of the detection camera by such being obtained by image processing technique there is defect on the surface of checking matter.
The type of method for utilizing the light source portion look-up table planar defect of such surface defect inspection apparatus, can roughly be divided into bright-field illumination (Bright Field Illumination) and dark-field illmination (Dark Field Illumination).
First, bright-field illumination is the method that impinges perpendicularly in the structure that the surperficial light filter (filter) etc. of checking matter forms at the light source portion of being arranged by the mode that impinges perpendicularly on camera optical system with light and the light that makes light source portion, checking matter plane is irradiated to very bright illumination light.Such bright-field illumination has advantages of as follows: the distortion being caused by shadow of foreign matter etc. is relatively good, can obtain the measured image of matter that can easily grasp surface imperfection.
The dark-field illmination method that to be light source portion have degree of tilt arbitrarily to the surface irradiation illumination light of plane was seized with respect to camera optical system, has the illumination light of angle arbitrarily and reflects and disappear from the surface of checking matter.
Now, if checking matter plane is desirable state (surfaceness of high-quality), obtained image appearance is black or dark, but, in the situation that there is small foreign matter in the surface of checking matter, by foreign matter, caused and reflected, the light that only has scattering is detected by brighter, has the effect that looks obvious.
But, such utilization the surface inspecting method of bright-field illumination or dark-field illmination, only the surface of checking matter is partly carried out, therefore, not only be difficult to checking matter to carry out large area inspection, and detect for the scattered light detecting due to foreign matter is transformed to each pulse signal, there is elongated shortcoming of supervision time.
In addition, in surface inspecting method in the past, because having incident angle, illumination light is irradiated to the surface of checking matter, so, in the high surface of reflectivity as metal covering, not from foreign matter, but self produce consumingly scattering from surface, have the shortcoming that is difficult to application surface inspecting method in the past.
Summary of the invention
The problem that invention will solve
The object of the invention is to, in order to eliminate the problems referred to above, providing a kind of can carry out the Superficial Foreign Body check system of Superficial Foreign Body inspection to the high object of reflectivity as metal with large area.
Another object of the present invention is, in order to eliminate the problems referred to above, providing a kind of can carry out the inspection control method of the Superficial Foreign Body check system of surface inspection to the high object of reflectivity as metal with large area.
For the scheme of dealing with problems
According to the Superficial Foreign Body check system of one embodiment of the present invention, comprise: in upper side, place checking matter, regulate platform (stage) portion of the height of described upper side; From described platform part, separate, according to inspection condition, irradiate the light source irradiation portion that the inspection parallel with the surface of described checking matter used up; Be arranged on movably the brace table that separates with described platform part in upper direction, from the surface of described checking matter to scattered light carry out light-receiving, to the photography portion that comprises that the image information of the foreign matter information of described checking matter is photographed; Link with described platform part, light source irradiation portion and photography portion, from described photography portion, receive described image information, detect the control part of Superficial Foreign Body information; And from the display part of described control part display surface foreign matter information.
According in the Superficial Foreign Body check system of one embodiment of the present invention, described platform part comprises: the mounting table that comprises described upper side; And with the bottom link of described mounting table, according to the height adjusting portion of the height of mounting table described in the regulating and controlling of described control part.
According in the Superficial Foreign Body check system of one embodiment of the present invention, described height adjusting portion comprises motor or gearing (actuator).
According in the Superficial Foreign Body check system of one embodiment of the present invention, described light source irradiation portion comprises: produce the light source that described inspection is used up; And described inspection is used up be diffused as the lens section that directional light irradiates.
In addition, according to the present invention, the Superficial Foreign Body of another embodiment checks that control method comprises: under the state of mounting table that checking matter is arranged on to platform part, set the step to the inspection of foreign substance condition of described checking matter; According to described inspection of foreign substance condition, the step that the inspection parallel with the surface of described checking matter used up is irradiated in light source irradiation portion; By be installed on movably the photography portion of the brace table separating with described mounting table in upper direction, receive the step of the image information of described checking matter; Judge whether described image information comprises the step of the information of the surperficial foreign matter that is present in described checking matter; According to judged result, reset the step of described inspection of foreign substance condition; According to the described inspection of foreign substance condition resetting, again obtain the step of the image information of described checking matter; And the step that detects foreign matter information according to the described image information that again obtains described checking matter.
According to the present invention, the Superficial Foreign Body of another embodiment checks control method, in setting the step of described inspection of foreign substance condition, for described inspection of foreign substance condition, comprise interval between using up of the surface of described checking matter and described inspection and be arranged on the position of the photography portion of described brace table.
At the Superficial Foreign Body of another embodiment according to the present invention, check in control method, the surface of described checking matter and the described inspection interval between using up is attached at the height adjusting portion of the bottom of described mounting table and sets by control.
At the Superficial Foreign Body of another embodiment according to the present invention, check in control method, the surface of described checking matter and the described inspection interval between using up is set by the height of control light source irradiation portion.
Superficial Foreign Body at another embodiment according to the present invention checks in control method, in the step of using up in the irradiation inspection parallel with the surface of described checking matter, laser or LED light is spread to the surface that is transformed to directional light and is irradiated to abreast described checking matter.
At the Superficial Foreign Body of another embodiment according to the present invention, check in control method, in the step of information that judges whether to comprise described foreign matter, judge whether described image information comprises the scattered light image information being caused by described foreign matter.
By the detailed explanation based on accompanying drawing below, it is clearer that feature of the present invention and advantage will become.
Before the present invention will be described in detail, the term using in this specification and claims book or word can not make an explanation with the meaning on common dictionary, should for the method with best illustrates the invention of oneself, can suitably define the principle of the concept of term according to inventor, be interpreted as the meaning and the concept of technological thought according to the invention.
Invention effect
According to Superficial Foreign Body check system of the present invention, have and can easily carry out the effect to the high surperficial inspection of foreign substance of reflectivity as metal covering.
According to Superficial Foreign Body check system of the present invention, have and can irradiate the inspection parallel with the surface of checking matter and use up, the effect that can once carry out inspection of foreign substance to the surperficial whole area of checking matter.
According to Superficial Foreign Body of the present invention, check control method, the surperficial whole area of checking matter is irradiated to the inspection parallel with the surface of checking matter and use up to carry out inspection of foreign substance, therefore, there is the effect that can save supervision time and expense.
Accompanying drawing explanation
Figure 1A is the structural drawing diagrammatically showing according to the Superficial Foreign Body check system of one embodiment of the present invention.
Figure 1B is according to the upper surface skeleton view of the Superficial Foreign Body testing fixture of one embodiment of the present invention.
Fig. 2 is for illustrating that the Superficial Foreign Body of another embodiment according to the present invention checks the illustration figure of control method.
Fig. 3 checks according to the Superficial Foreign Body of another embodiment according to the present invention the image that control method detects.
Fig. 4 is for illustrating that the Superficial Foreign Body of another embodiment according to the present invention checks the process flow diagram of control method.
Description of reference numerals
101: brace table;
110: platform part;
111: mounting table;
120: light source irradiation portion;
121: light source;
122: lens section;
130: photography portion;
140: control part;
150: display part.
Embodiment
By following to the detailed explanation of accompanying drawing and preferred embodiment, object of the present invention, specific advantage and new feature will become clearer.In this manual, must be noted that, when the inscape mark Reference numeral to each accompanying drawing, be limited to identical inscape, even shown in another accompanying drawing, also mark identical Reference numeral as far as possible.In addition,, although first, second term such as grade can be for illustrating various inscapes, described inscape is not limited by described term.Described term is only as the object use that an inscape and another inscape are distinguished.In addition, when the present invention will be described, the specific description in judgement about related known technology likely makes in the unclear situation of main idea of the present invention, will omit its detailed explanation.
Below, with reference to accompanying drawing, the preferred embodiment of the present invention is at length described.Figure 1A is the structural drawing diagrammatically illustrating according to the Superficial Foreign Body check system of one embodiment of the present invention, and Figure 1B is according to the upper surface skeleton view of the Superficial Foreign Body testing fixture of one embodiment of the present invention.
As shown in Figure 1A, according to the Superficial Foreign Body check system of one embodiment of the present invention, comprise: in upper side, place checking matter 200, regulate the platform part 110 of the height of the upper side of placing checking matter 200; Separate with platform part 110, according to inspection condition, carry out the light source irradiation portion 120 that position adjustment, the irradiation inspection parallel with the surface of checking matter 200 are used up; Be arranged on movably the brace table 101 on top, the photography portion 130 that the light of the foreign matter scattering from checking matter 200 is carried out light-receiving, the surface image of checking matter 200 is photographed; Link with platform part 110, light source irradiation portion 120 and photography portion 130, carry out the whole control of Superficial Foreign Body inspection, use the image information receiving from photography portion 130 to detect the control part 140 of Superficial Foreign Body information; And from the display part 150 of control part 140 display surface foreign matter information.
Light source irradiation portion 120 separates from platform part 110, irradiates the part that (irradiation) inspection parallel with the surface of checking matter 200 used up, and comprises the light source 121 that generation inspection is used up and inspection is used up being diffused as the lens section 122 that directional light irradiates.
Specifically, light source 121 can comprise CO
2the device of the various laser instruments such as laser instrument, excimer laser, femto-second laser or generation LED light etc., lens section 122 can comprise to be made such laser or LED light be diffused as directional light and as inspection, uses up cylindrical lens (cylindrical-lens) irradiating etc.Certainly, other can make laser or the LED light that lens section 122 also can possess except cylindrical lens is diffused as the structure of other lens of directional light.
Particularly, in the situation that utilizing laser instrument as light source 121, lens section 122 is in Gauss (Gaussian) normal distribution of laser, and the core of shading light, optionally makes the laser of both sides bottom section spread irradiation with two-dimensional approach.
Thus, as shown in Figure 1B, the surface that is irradiated to abreast checking matter 200 is used up in inspection through lens section 122, can be minimized in the reflection in the metal surface of the checking matter 200 as copper coin, therefore, can effectively detect the light scattering being caused by the surperficial foreign matter that is present in checking matter 200.
To being arranged on, carry out like this highly checking matter 200 of the mounting table 111 of adjusting, control part 140 is controlled the 120 irradiation inspection parallel with the surface of checking matter 200 of light source irradiation portion and is used up, now, can also regulate the surface of checking matter 200 and check the interval between using up.
Secondly, 140 pairs of scattered light image information that caused by foreign matter that received by photography portion 130 of control part are analyzed, and detect position and the distribution of the surperficial foreign matter that is present in checking matter 200, can show the foreign matter information detecting by display part 150.
Form like this according to the Superficial Foreign Body check system of one embodiment of the present invention, can easily carry out the surperficial inspection of foreign substance high to reflectivity as metal covering, particularly, can irradiate the inspection parallel with the surface of checking matter 200 and use up, can once to the surperficial whole area of checking matter 200, carry out inspection of foreign substance.
Therefore, according to the Superficial Foreign Body check system of one embodiment of the present invention, in the situation that checking matter 200 is metal material, also can easily carry out inspection of foreign substance, there is the effect that can reduce the supervision time of large-area checking matter 200.
Below, with reference to Fig. 2 to Fig. 4, the Superficial Foreign Body of another embodiment according to the present invention is checked to control method describes.Fig. 2 is for illustrating that the Superficial Foreign Body of another embodiment according to the present invention checks the illustration figure of control method, Fig. 3 checks according to the Superficial Foreign Body of another embodiment according to the present invention the image that control method detects, and Fig. 4 is for illustrating that the Superficial Foreign Body of another embodiment according to the present invention checks the process flow diagram of control method.
As shown in Figure 4, according to the present invention, the Superficial Foreign Body of another embodiment checks control method, first, at the mounting table 111 of platform part 110, checking matter 200 is installed, and sets inspection condition (S410).
Specifically, inspection condition as shown in Figure 2, comprises about the surface of checking matter 200 and for checking the interval d between light A, is arranged on the condition of position etc. of the photography portion 130 of brace table 101.
The surface of checking matter 200 and check that can the height of upper support platform 111 of checking matter 200 or the height of light source irradiation portion 120 etc. be installed by adjustment with the interval d between light A sets.
According to the inspection condition of setting like this, the surface that is irradiated to abreast checking matter 200 is used up in the inspection that control part 140 control light source irradiation portions 120 are transformed to directional light by diffusion, obtains the image information (S420) being caused by scattered light in the surface of checking matter 200 by photography portion 130.
Now, whether control part 140 is analyzed the image information being received by photography portion 130 can grasp foreign matter, or no be the image information (S430) that comprises foreign matter.
For example, analyze whether the image information being received by photography portion 130 is the bad image information that comprises noise, or noly with the interval d between light A, cross the image information that the scattered light being caused by foreign matter far do not detected for the surface because of checking matter 200 and inspection.
Thus, if the image information being received by photography portion 130 for can not grasp foreign matter or not comprise the image information about the information of foreign matter, control part 140 is just set the inspection condition (S440) to checking matter 200 again.
For example, if the image information being received by photography portion 130 is the bad image information that comprises noise, control part 140 just appends optical filtering condition to the image information receiving.
In addition, in the situation that be because surface and the inspection of checking matter 200 cross with the interval d between light A the image information that the scattered light being caused by foreign matter far and do not detected, control part 140 is in order to dwindle the surface of the checking matter 200 shown in Fig. 2 and to check with the interval d between light A, control the height adjusting portion of platform part 110, can promote the height of upper support platform 111 or reduce the height of light source irradiation portion 120.
According to the inspection condition resetting like this, control part 140 is controlled light source irradiation portion 120, the surface that is irradiated to abreast checking matter 200 is used up in the inspection that diffusion is transformed to directional light, again obtains the image information (S450) being caused by scattered light in the surface of checking matter 200 by photography portion 130.
That is, the surperficial inspection that is irradiated to abreast checking matter 200 is encountered and is present in the surperficial foreign matter of checking matter 200 and carries out scattering with light A, produces scattered light B, and the scattered light B causing is thus obtained by photography portion 130 together with the surface image of checking matter 200.
Secondly, control part 140 is used the image information again being obtained by photography portion 130 to detect foreign matter information (S460).
For example, control part 140 is analyzed the image information again being obtained by photography portion 130, as shown in Figure 3, can as " C ", to the surface image of checking matter 200, show foreign matter information by display part 150.
Therefore, according to the present invention, the Superficial Foreign Body of another embodiment checks control method, and the surface of checking matter 200 is irradiated to light abreast, detects the scattered light image information being caused by foreign matter, therefore, can easily carry out the surperficial inspection of foreign substance high to reflectivity as metal covering.
In addition, according to the present invention, the Superficial Foreign Body of another embodiment checks control method, and the surperficial whole area irradiation inspection parallel with the surface of checking matter 200 of checking matter 200 used up and carried out inspection of foreign substance, therefore, can save supervision time and expense.
Although by described technological thought of the present invention preferred embodiment described particularly,, must be noted that, aforesaid embodiment, just for describing, does not limit the invention.
In addition, should be understood that so long as there is the people of the common knowledge of technical field of the present invention, just can in the scope of technological thought of the present invention, carry out various enforcement.
Claims (10)
1. a Superficial Foreign Body check system, this Superficial Foreign Body check system comprises:
Platform part, places checking matter in upper side, regulates the height of described upper side;
Light source irradiation portion, it separates from described platform part, irradiates the inspection parallel with the surface of described checking matter use up according to inspection condition;
Photography portion, it is arranged on the brace table separating in upper direction with described platform part movably, from the surface of described checking matter, scattered light is carried out to light-receiving, to comprising that the image information of the foreign matter information of described checking matter photographs;
Control part, itself and described platform part, light source irradiation portion and photography portion link, and from described photography portion, receive described image information, detect Superficial Foreign Body information; And
Display part, it is from described control part display surface foreign matter information.
2. Superficial Foreign Body check system according to claim 1, wherein, described platform part comprises: mounting table, it comprises described upper side; And height adjusting portion, itself and the bottom link of described mounting table, according to the height of mounting table described in the regulating and controlling of described control part.
3. Superficial Foreign Body check system according to claim 2, wherein, described height adjusting portion comprises motor or gearing.
4. Superficial Foreign Body check system according to claim 1, wherein, described light source irradiation portion comprises: light source, it produces described inspection and uses up; And lens section, it uses up described inspection to be diffused as directional light to irradiate.
5. Superficial Foreign Body checks a control method, and the method comprises:
Under the state of mounting table that checking matter is arranged on to platform part, set the step to the inspection of foreign substance condition of described checking matter;
According to described inspection of foreign substance condition, the step that the inspection parallel with the surface of described checking matter used up is irradiated in light source irradiation portion;
By be installed on movably the photography portion of the brace table separating with described mounting table in upper direction, receive the step of the image information of described checking matter;
Judge whether described image information comprises the step of the information of the surperficial foreign matter that is present in described checking matter;
According to judged result, reset the step of described inspection of foreign substance condition;
According to the described inspection of foreign substance condition resetting, again obtain the step of the image information of described checking matter; And
According to the image information of the described checking matter of again obtaining, detect the step of foreign matter information.
6. Superficial Foreign Body according to claim 5 checks control method, wherein, in setting the step of described inspection of foreign substance condition, described inspection of foreign substance condition comprises interval between using up of the surface of described checking matter and described inspection and is arranged on the position of the photography portion of described brace table.
7. Superficial Foreign Body according to claim 6 checks control method, and wherein, the surface of described checking matter and the described inspection interval between using up is attached at the height adjusting portion of the bottom of described mounting table and sets by control.
8. Superficial Foreign Body according to claim 6 checks control method, and wherein, the surface of described checking matter and the described inspection interval between using up is set by controlling the height of described light source irradiation portion.
9. Superficial Foreign Body according to claim 5 checks control method, wherein, in the step of using up in the irradiation inspection parallel with the surface of described checking matter, laser or LED light is spread to the surface that is transformed to directional light and is irradiated to abreast described checking matter.
10. Superficial Foreign Body according to claim 5 checks control method, wherein, in the step of information that judges whether to comprise described foreign matter, judges whether described image information comprises the scattered light image information being caused by described foreign matter.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120078887A KR20140011777A (en) | 2012-07-19 | 2012-07-19 | Surface foreign material detecting system and control method thereof |
| KR10-2012-0078887 | 2012-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103575738A true CN103575738A (en) | 2014-02-12 |
Family
ID=50047974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310306369.0A Pending CN103575738A (en) | 2012-07-19 | 2013-07-19 | Surface foreign material detecting system and control method thereof |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2014021120A (en) |
| KR (1) | KR20140011777A (en) |
| CN (1) | CN103575738A (en) |
| TW (1) | TW201411122A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105548193A (en) * | 2014-10-22 | 2016-05-04 | 东友精细化工有限公司 | System and method for defect detection |
| CN106645196A (en) * | 2016-12-15 | 2017-05-10 | 广东威创视讯科技股份有限公司 | Dust detector of projection lens and dust remover |
| CN108303431A (en) * | 2017-01-11 | 2018-07-20 | 由田新技股份有限公司 | Automatic optical detection system for surface foreign matter detection |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170055064A (en) | 2015-11-10 | 2017-05-19 | 삼성전자주식회사 | Fabricating method of substrate |
| KR101841183B1 (en) * | 2017-10-31 | 2018-03-22 | 주식회사 루피너스 | Apparatus for machining light-guide plate using lazer |
| CN108562273B (en) * | 2018-06-11 | 2024-01-30 | 珠海格力智能装备有限公司 | Visual inspection apparatus |
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| JP5579588B2 (en) * | 2010-12-16 | 2014-08-27 | 株式会社日立ハイテクノロジーズ | Defect observation method and apparatus |
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- 2012-07-19 KR KR1020120078887A patent/KR20140011777A/en not_active Application Discontinuation
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- 2013-07-18 JP JP2013149074A patent/JP2014021120A/en active Pending
- 2013-07-19 CN CN201310306369.0A patent/CN103575738A/en active Pending
- 2013-07-19 TW TW102125962A patent/TW201411122A/en unknown
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| CN105548193A (en) * | 2014-10-22 | 2016-05-04 | 东友精细化工有限公司 | System and method for defect detection |
| CN106645196A (en) * | 2016-12-15 | 2017-05-10 | 广东威创视讯科技股份有限公司 | Dust detector of projection lens and dust remover |
| CN108303431A (en) * | 2017-01-11 | 2018-07-20 | 由田新技股份有限公司 | Automatic optical detection system for surface foreign matter detection |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140011777A (en) | 2014-01-29 |
| JP2014021120A (en) | 2014-02-03 |
| TW201411122A (en) | 2014-03-16 |
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