CN103557969B - Accurately can trim the ceramic pressure sensor chip of temperature drift error and trim system and method for repairing and regulating - Google Patents
Accurately can trim the ceramic pressure sensor chip of temperature drift error and trim system and method for repairing and regulating Download PDFInfo
- Publication number
- CN103557969B CN103557969B CN201310545795.XA CN201310545795A CN103557969B CN 103557969 B CN103557969 B CN 103557969B CN 201310545795 A CN201310545795 A CN 201310545795A CN 103557969 B CN103557969 B CN 103557969B
- Authority
- CN
- China
- Prior art keywords
- pressure sensor
- temperature drift
- ceramic pressure
- sensor chip
- trim
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The present invention relates to a kind of temperature that can accurately trim float the ceramic pressure sensor chip of error and trim system and method for repairing and regulating.Existing ceramic pressure sensor inconvenience trims temperature drift error, and lacks the equipment that trims of industrialization and technology.For this reason, ceramic pressure sensor chip of the present invention comprises chip body, Wheatstone bridge circuit in it is connected to combination temperature drift compensation resistor, this combination temperature drift compensation resistor comprises trimming resistors and multiple roughly adjusted rheostat, each roughly adjusted rheostat two ends are connected to two and print on tinsel cords, and described trimming resistors is serially connected in wherein on a strip metal tinsel cord.Its temperature drift trim system comprise temperature drift separation system and temperature drift trim system.The invention still further relates to corresponding temperature drift method for repairing and regulating.Ceramic pressure sensor chip of the present invention have structure simple, be convenient to the advantage that industrialization accurately trims temperature drift error, it trims system equipment and method for repairing and regulating design science, efficiency is high, and cost is low, is applicable to ceramic pressure sensor manufacturing enterprise and uses.
Description
Technical field
The present invention relates to a kind of temperature that can accurately trim float the ceramic pressure sensor chip of error and trim system and method for repairing and regulating.
Background technology
Ceramic pressure sensor is printed electronic slurry on ceramic matrix elastic body, becomes Wheatstone bridge (Wheatstonebridge, also known as favour this same electric bridge, Wheatstone bridge) through sintering.Because pressure makes the change of ceramic matrix trace deformation build-up of pressure sensitive resistance, when brachium pontis two ends apply the DC voltage of 5V, by measuring the change of two brachium pontis stage casing output end voltages thus realizing pressure survey, the amplitude direct proportion of its output voltage in force value, so be referred to as pressure transducer.
But electric slurry is in printing, sintering process, there is nuance unavoidably, these nuances cause each ceramic pressure sensor, and output voltage is different at the same temperature, the difference of the design output voltage of these output voltages and ceramic pressure sensor, be temperature drift errors, be called for short temperature drift error, how trimming temperature drift error is fast the manufacturing bottleneck of restriction ceramic pressure sensor.
Summary of the invention
The technical problem to be solved in the present invention is the above-mentioned defect how overcoming prior art, provides a kind of and accurately can trim the ceramic pressure sensor chip of temperature drift error and trim system and method for repairing and regulating.
For solving the problems of the technologies described above, the present invention accurately can trim the ceramic pressure sensor chip of temperature drift, comprise chip body, Wheatstone bridge circuit is provided with in this chip body, it is characterized in that: the brachium pontis of Wheatstone bridge circuit is connected to combination temperature drift compensation resistor, this combination temperature drift compensation resistor comprises trimming resistors and multiple roughly adjusted rheostat, and each roughly adjusted rheostat two ends are connected to two and print on tinsel cords, and described trimming resistors is serially connected in wherein on a strip metal tinsel cord.Design like this, the drift of ceramic pressure sensor chip heavy industrialization temperature is accurately trimmed becomes possibility.
As optimization, described chip body is provided with locating notch.Design like this, is convenient to location fixing.
The temperature drift that the present invention accurately can trim the ceramic pressure sensor chip of warm drift trims system, comprises temperature drift separation system and trims system with temperature drift, wherein:
Temperature drift separation system comprises constant temperature oven, data collector, process of separation controller, grading manipulator and multiple separatory vessel, wherein, data collector comprises multiple pallet, measurement jig frame and combined data acquisition module, described measurement jig frame comprises M layer supporting plate, wherein every layer of supporting plate is equipped with bracket tray positioning apparatus, every layer of supporting plate is provided with a tool dish, tool dish or supporting plate are furnished with lifting drive, each tool dish is provided with N number of probe groups, each probe groups comprises multiple probe, a fixed bit of its lower tray corresponding, often organize the interface that probe is connected to combined data acquisition module respectively, combined data acquisition module is connected with the signal input part of process of separation controller, described grading manipulator is connected with the signal output part of process of separation controller, control by it.
Temperature drift trims system and comprises probe groups, pallet, laser trimming instrument, temperature compensation programming controller, high accuracy number voltage instrument and tray rack, have in temperature compensation programming controller and multiplely pre-set slightly trim program, eachly slightly trim the corresponding separatory vessel of program, a corresponding temperature drift error range simultaneously; Ceramic pressure sensor chip is placed on fixed bit, the laser head of probe groups and laser trimming instrument is collectively referred to as and trims working head, trim working head or tray rack is furnished with X to driving mechanism, Y-direction driving mechanism and Z-direction driving mechanism, under the control of temperature compensation programming controller, tray rack with trim working head top to bottom, left and right, front and rear relative displacement occur, ceramic pressure sensor chip on pallet is shifted near one by one and trims working head, probe groups is pressed in the corresponding contacts of ceramic pressure sensor chip.
Temperature drift separation system and temperature drift trim in system, described pallet is provided with N number of fixed bit, and each fixed bit is all furnished with limited post or spacing preiection, and ceramic pressure sensor chip is placed on fixed bit, locate fixing by limited post or spacing preiection, wherein M, N are positive integer.Design like this, provides equipment Foundations for the drift of ceramic pressure sensor chip heavy industrialization temperature accurately trims.
The present invention accurately can trim the temperature drift method for repairing and regulating of the ceramic pressure sensor chip of temperature drift, comprises the steps:
(1) temperature drift sorting: during sorting, measurement jig frame is placed in constant temperature oven, constant temperature oven is adjusted to the working temperature of ceramic pressure sensor chip, each fixed bit of pallet locates placing ceramic pressure sensor chip, then pallet is placed on respectively on different supporting plates, process of separation controller controls lifting drive action, tool dish and supporting plate are drawn close mutually, until the corresponding contacts of each ceramic pressure sensor chip is pressed with probe, then process of separation controller is connected by combined data acquisition module tool dish, collect the temperature drift error of each ceramic pressure sensor chip, and according to temperature drift error range, by grading manipulator, each ceramic pressure sensor chip is divided in different separatory vessels,
(2) temperature drift trims
Ceramic pressure sensor chip in a certain separatory vessel is loaded in pallet, pallet is put on tray rack, start temperature drift and trim system,
Under the control of temperature compensation programming controller, tray rack with trim working head top to bottom, left and right, front and rear relative displacement occur, ceramic pressure sensor chip on pallet is shifted near one by one and trims working head, probe groups is pressed in the corresponding contacts of ceramic pressure sensor chip, select corresponding with separatory vessel slightly to trim program, slightly trimming under programmed control, coarse adjustment is being carried out to each ceramic pressure sensor chip in corresponding separatory vessel, namely to each roughly adjusted rheostat R in combination temperature drift compensation resistor
1, R
2, R
2r
nand two the printing tinsel cords connecting roughly adjusted rheostat carry out corresponding cutting, make the combination of each roughly adjusted rheostat, connection in series-parallel relation changes, and carries out coarse adjustment;
Then, temperature compensation programming controller measures each ceramic pressure sensor chip actual output voltage under atmospheric pressure by high accuracy number voltage instrument, compared with ceramic pressure sensor chip design output voltage, and then draw accurately temperature drift error, laser trimming instrument cuts the trimming resistors in combination temperature drift compensation resistor, during cutting, the probe of probe groups is pressed in ceramic pressure sensor chip corresponding contacts, limit is cut, lateral dominance high accuracy number voltage instrument detects ceramic pressure sensor, until ceramic pressure sensor temperature drift error reaches preassigned.
Design like this, fast, accurately can trim the temperature drift error of ceramic pressure sensor chip.
The present invention accurately can trim the ceramic pressure sensor chip of temperature drift error, have structure simple, be convenient to the advantage that heavy industrialization accurately trims temperature drift error, it is high that it trims system equipment automaticity, its method for repairing and regulating design science, trim precisely, efficiency is high, cost is low, is the indispensable weapon of existing ceramic pressure sensor manufacturing enterprise technology, the device upgrade replacement.
Accompanying drawing explanation
Accurately can trim the ceramic pressure sensor chip of temperature drift error below in conjunction with accompanying drawing to the present invention and trim system and method for repairing and regulating is described further:
Fig. 1 is the schematic appearance of the ceramic pressure sensor chip that originally accurately can trim temperature drift error;
Fig. 2 is the schematic diagram of the combination temperature drift compensation resistor that originally can accurately trim in the ceramic pressure sensor chip of temperature drift error;
Fig. 3 is the schematic diagram () after combining the trimming of temperature drift compensation resistor in Fig. 2;
Fig. 4 is the schematic diagram (two) after combining the trimming of temperature drift compensation resistor in Fig. 2;
Fig. 5 is the schematic diagram (three) after combining the trimming of temperature drift compensation resistor in Fig. 2;
Fig. 6 is support holder structure schematic diagram in the present invention;
Fig. 7 is the structural representation of temperature drift separation system in the present invention;
Fig. 8 is the working state schematic representation trimming working head in the present invention;
Fig. 9 is the structural representation that in the present invention, temperature drift trims system.
In figure: 1 for chip body, 2 for contact, 3 for tinsel cord, 5 for locating notch, 6 for constant temperature oven, 7 for data collector, 8 for process of separation controller, 9 for grading manipulator, 10 for separatory vessel, 11 for pallet, 12 for combined data acquisition module, 13 for supporting plate, 14 for tool dish, 15 for probe, 16 for fixed bit, 17 for laser trimming instrument, 18 for temperature compensation programming controller, 19 for high accuracy number voltage instrument, 20 for tray rack, 21 for trimming working head, R
0for trimming resistors, R
1, R
2, R
2r
nfor roughly adjusted rheostat, X, Y, Z represent direction, top to bottom, left and right, front and rear respectively.
Embodiment
Embodiment one: as Figure 1-5, the ceramic pressure sensor chip that originally accurately can trim temperature drift comprises chip body 1, this chip body 1 is provided with four contacts 2, and be provided with Wheatstone bridge circuit, it is characterized in that: the brachium pontis of Wheatstone bridge circuit is connected to combination temperature drift compensation resistor, this combination temperature drift compensation resistor comprises trimming resistors R
0with multiple roughly adjusted rheostat R
1, R
2, R
2r
n, each roughly adjusted rheostat two ends R
1, R
2, R
2r
nbeing connected to two prints on tinsel cord 3, described trimming resistors R
0be serially connected in wherein on a strip metal tinsel cord 3.
As shown in Figure 1, described chip body 1 is provided with locating notch 5.
The temperature drift that the present invention accurately can trim the ceramic pressure sensor chip of warm drift trims system, comprises temperature drift separation system and trims system with temperature drift, wherein:
As shown in Figure 7, temperature drift separation system comprises constant temperature oven 6, data collector 7, process of separation controller 8, grading manipulator 9 and multiple separatory vessel 10.Wherein, data collector comprises multiple pallet 11, measurement jig frame and combined data acquisition module 12, as shown in Figure 7, described measurement jig frame comprises M layer supporting plate 13, wherein every layer of supporting plate 13 is equipped with bracket tray positioning apparatus (not shown, can be detent), every layer of supporting plate 13 is provided with a tool dish 14, tool dish 14 is furnished with lifting drive, supporting plate 13 maintains static (can certainly join lifting drive by supporting plate 13, tool dish 14 maintains static, and figure slightly).
Each tool dish 14 is provided with N number of probe groups, each probe groups comprises four probes 15, a fixed bit 16 of corresponding pallet 11 below it, often organize the interface that probe is connected to combined data acquisition module 12 respectively, combined data acquisition module 12 is connected with the signal input part of process of separation controller 8, described grading manipulator 9 is connected with the signal output part of process of separation controller 8, controls by it.
Each interface of combined data acquisition module 8 includes DC voltage output end and DC voltage input end, DC voltage output end provides 5V driving voltage for ceramic pressure sensor chip, and DC voltage input end receives the actual output voltage of ceramic pressure sensor chip.
Described constant temperature oven 6 is adjustable thermostatic case preferably.
As shown in Figure 8,9, temperature drift trims system and comprises probe groups, pallet 11, laser trimming instrument 17, temperature compensation programming controller 18, high accuracy number voltage instrument 19 and tray rack 20, have in temperature compensation programming controller 18 and multiplely pre-set slightly trim program, eachly slightly trim the corresponding a certain separatory vessel 10 of program, a corresponding temperature drift error range simultaneously; Ceramic pressure sensor chip is placed on fixed bit 16, the laser head of probe groups and laser trimming instrument 17 is collectively referred to as and trims working head 21, trim working head 21 or tray rack 20 is furnished with X to driving mechanism, Y-direction driving mechanism and Z-direction driving mechanism, under the control of temperature compensation programming controller 18, tray rack 20 with trim working head 21 top to bottom, left and right, front and rear relative displacement occur, ceramic pressure sensor chip on pallet 11 is shifted near one by one and trims working head 21, probe groups comprises four probes 15, and probe 15 is pressed in the corresponding contacts of ceramic pressure sensor chip.
X, Y, Z represent direction, top to bottom, left and right, front and rear respectively.
Temperature drift separation system and temperature drift trim in system, as shown in Figure 6, described pallet 11 is provided with N number of fixed bit 16, and each fixed bit 16 is all furnished with limited post or spacing preiection, ceramic pressure sensor chip is placed on fixed bit 16, locates fixing by limited post or spacing preiection.
Wherein M, N are positive integer.
The present invention accurately can trim the temperature drift method for repairing and regulating of the ceramic pressure sensor chip of temperature drift, comprises the steps:
(1) temperature drift sorting
As shown in Figure 7, during sorting, measurement jig frame is placed in constant temperature oven 6, constant temperature oven 6 is adjusted to the working temperature of ceramic pressure sensor chip, each fixed bit 16 of pallet 11 locates placing ceramic pressure sensor chip, then M pallet 11 is placed on different supporting plates 13 respectively, process of separation controller controls lifting drive action, tool dish and supporting plate are drawn close mutually, until the corresponding contacts 2 of each ceramic pressure sensor chip is pressed with probe 15, then process of separation controller 8 is connected by combined data acquisition module 12 tool dish 14, collect the temperature drift error of each ceramic pressure sensor chip, and according to temperature drift error range, by grading manipulator 9, each ceramic pressure sensor chip is divided in different separatory vessels 10.
(2) temperature drift trims
As shown in Figure 8,9, the ceramic pressure sensor chip in a certain separatory vessel 10 is loaded in pallet 11, pallet 11 is put on tray rack 20, start temperature drift and trim system,
Under the control of temperature compensation programming controller 18, tray rack 20 with trim working head 21 top to bottom, left and right, front and rear relative displacement occur, ceramic pressure sensor chip on pallet 11 is shifted near one by one and trims working head 21, probe groups is pressed in the corresponding contacts 2 of ceramic pressure sensor chip, select corresponding with separatory vessel 10 slightly to trim program, slightly trimming under programmed control, coarse adjustment is carried out to each ceramic pressure sensor chip in corresponding separatory vessel, namely to each roughly adjusted rheostat R in combination temperature drift compensation resistor
1, R
2, R
2r
nend and connect two of roughly adjusted rheostat and print tinsel cords 3 and carry out corresponding cutting, makes the combination of each roughly adjusted rheostat, connection in series-parallel relation changes, carry out coarse adjustment.
Each roughly adjusted rheostat and adjustable resistance R in Fig. 3
0series connection; R in Fig. 4
1, R
2parallel connection, then with adjustable resistance R
0and the series connection of other roughly adjusted rheostats; Except R in Fig. 5
noutward, all the other roughly adjusted rheostats are all cut, roughly adjusted rheostat R
n, adjustable resistance R
0series connection, as in Figure 3-5, only limited citing, actual series-parallel system is not limited to this.
The roughly adjusted rheostat of all ceramic pressure sensor chips in same separatory vessel 10 combines, connection in series-parallel relation is identical, but the adjustable resistance R of each ceramic pressure sensor chip
0cutting mode may be different.
Then, temperature compensation programming controller 18 measures each ceramic pressure sensor chip actual output voltage under atmospheric pressure by high accuracy number voltage instrument 19, compared with ceramic pressure sensor chip design output voltage, and then drawing accurately temperature drift error, laser trimming instrument 17 is to the trimming resistors R in combination temperature drift compensation resistor
0cut, during cutting, the probe 15 of probe groups is pressed in ceramic pressure sensor chip corresponding contacts 2, and limit cutting, lateral dominance high accuracy number voltage instrument 19 pairs of ceramic pressure sensors detect, until ceramic pressure sensor chip temperature drift error reaches preassigned.
Claims (2)
1. the temperature drift that accurately can trim the ceramic pressure sensor chip of temperature drift trims system, comprise the warm separation system that floats trim system with temperature drift and accurately can trim the warm ceramic pressure sensor chip floated, wherein: the ceramic pressure sensor chip that accurately can trim temperature drift, comprise chip body, Wheatstone bridge circuit is provided with in this chip body, it is characterized in that: the brachium pontis of Wheatstone bridge circuit is connected to combination temperature drift compensation resistor, this combination temperature drift compensation resistor comprises can the trimming resistors of cut and multiple roughly adjusted rheostat, each roughly adjusted rheostat two ends are connected to two and print on tinsel cord, described trimming resistors be serially connected in wherein one print on tinsel cord, described chip body is provided with locating notch,
Temperature drift separation system comprises constant temperature oven, data collector, process of separation controller, grading manipulator and multiple separatory vessel, wherein, data collector comprises multiple pallet, measurement jig frame and combined data acquisition module, described measurement jig frame comprises M layer supporting plate, wherein every layer of supporting plate is equipped with bracket tray positioning apparatus, every layer of supporting plate is provided with a tool dish, tool dish or supporting plate are furnished with lifting drive, each tool dish is provided with N number of probe groups, each probe groups comprises multiple probe, corresponding pallet fixed bit below it, often organize the interface that probe connects combined data acquisition module respectively, combined data acquisition module is connected with the signal input part of process of separation controller, described grading manipulator is connected with the signal output part of process of separation controller, control by it,
Temperature drift trims system and comprises probe groups, pallet, laser trimming instrument, temperature compensation programming controller, high accuracy number voltage instrument and tray rack, have in temperature compensation programming controller and multiplely pre-set slightly trim program, eachly slightly trim the corresponding separatory vessel of program, a corresponding temperature drift error range simultaneously; The laser head of probe groups and laser trimming instrument is collectively referred to as and trims working head, trim working head or tray rack is furnished with X to driving mechanism, Y-direction driving mechanism and Z-direction driving mechanism, under the control of temperature compensation programming controller, tray rack with trim working head top to bottom, left and right, front and rear relative displacement occur, ceramic pressure sensor chip on pallet is shifted near one by one and trims working head, probe groups is pressed in the corresponding contacts of ceramic pressure sensor chip
Temperature drift separation system and temperature drift trim in system, described pallet is provided with N number of fixed bit, and each fixed bit is all furnished with limited post or spacing preiection, and ceramic pressure sensor chip is placed on fixed bit, locate fixing by limited post or spacing preiection, wherein M, N are positive integer.
2. the temperature based on the ceramic pressure sensor chip that accurately can trim temperature drift described in claim 1 floats a method for repairing and regulating, it is characterized in that: comprise the steps:
(1) temperature drift sorting: during sorting, measurement jig frame is placed in constant temperature oven, constant temperature oven is adjusted to the working temperature of ceramic pressure sensor chip, each fixed bit of pallet locates placing ceramic pressure sensor chip, then pallet is placed on respectively on different supporting plates, process of separation controller controls lifting drive action, tool dish and supporting plate are drawn close mutually, until the corresponding contacts of each ceramic pressure sensor chip is pressed with probe, then process of separation controller is connected by combined data acquisition module tool dish, collect the temperature drift error of each ceramic pressure sensor chip, and according to temperature drift error range, by grading manipulator, each ceramic pressure sensor chip is divided in different separatory vessels,
(2) temperature drift trims
Ceramic pressure sensor chip in a certain separatory vessel is loaded in pallet, pallet is put on tray rack, start temperature drift and trim system,
Under the control of temperature compensation programming controller, tray rack with trim working head top to bottom, left and right, front and rear relative displacement occur, ceramic pressure sensor chip on pallet is shifted near one by one and trims working head, probe groups is pressed in the corresponding contacts of ceramic pressure sensor chip, select corresponding with separatory vessel slightly to trim program, slightly trimming under programmed control, coarse adjustment is being carried out to each ceramic pressure sensor chip in corresponding separatory vessel, namely to each roughly adjusted rheostat R in combination temperature drift compensation resistor
1, R
2, R
2r
nand two the printing tinsel cords connecting roughly adjusted rheostat carry out corresponding cutting, make the combination of each roughly adjusted rheostat, connection in series-parallel relation changes, and carries out coarse adjustment;
Then, temperature compensation programming controller measures each ceramic pressure sensor chip actual output voltage under atmospheric pressure by high accuracy number voltage instrument, compared with ceramic pressure sensor chip design output voltage, and then draw accurately temperature drift error, laser trimming instrument cuts the trimming resistors in combination temperature drift compensation resistor, during cutting, the probe of probe groups is pressed in ceramic pressure sensor chip corresponding contacts, limit is cut, lateral dominance high accuracy number voltage instrument detects ceramic pressure sensor, until ceramic pressure sensor temperature drift error reaches preassigned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310545795.XA CN103557969B (en) | 2013-11-07 | 2013-11-07 | Accurately can trim the ceramic pressure sensor chip of temperature drift error and trim system and method for repairing and regulating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310545795.XA CN103557969B (en) | 2013-11-07 | 2013-11-07 | Accurately can trim the ceramic pressure sensor chip of temperature drift error and trim system and method for repairing and regulating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103557969A CN103557969A (en) | 2014-02-05 |
| CN103557969B true CN103557969B (en) | 2016-02-24 |
Family
ID=50012279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310545795.XA Expired - Fee Related CN103557969B (en) | 2013-11-07 | 2013-11-07 | Accurately can trim the ceramic pressure sensor chip of temperature drift error and trim system and method for repairing and regulating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103557969B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104535252A (en) * | 2014-11-20 | 2015-04-22 | 武汉中航传感技术有限责任公司 | Automatic compensation device of silicon piezoresistive sensors and parameter coupling program-control switching device |
| EP3205992B1 (en) * | 2016-02-11 | 2019-06-19 | MOBA - Mobile Automation AG | Electrical circuit, weighing cell, load detection device and vehicle with a load detection device |
| IT201600081649A1 (en) * | 2016-08-03 | 2018-02-03 | Kolektor Microtel S P A | PIEZORESISTIVE PRESSURE SENSOR EQUIPPED WITH OFFSET CALIBRATION RESISTOR |
| CN107655625A (en) * | 2017-09-22 | 2018-02-02 | 陕西华经微电子股份有限公司 | Thick film ceramic pressure sensor zero-point voltage on-line debugging method |
| CN107544478B (en) * | 2017-10-26 | 2020-06-05 | 北京广利核***工程有限公司 | Automatic analog quantity testing device and method in nuclear power DCS identification |
| CN110926688A (en) * | 2019-11-21 | 2020-03-27 | 歌尔股份有限公司 | Air pressure detection method and system |
| CN115855327B (en) * | 2023-02-22 | 2023-06-09 | 成都凯天电子股份有限公司 | Adjustable resistance ceramic substrate applied to silicon piezoresistive pressure sensor and manufacturing method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4563902A (en) * | 1984-04-12 | 1986-01-14 | Ermeto Armaturen Gmbh | Pressure and temperature sensor |
| CN1503904A (en) * | 2001-12-28 | 2004-06-09 | ��ʽ���縻ʿ�� | Pressure sensor, pressure controller and temp drief corrector of pressure type flow controller |
| CN1832650A (en) * | 2005-03-10 | 2006-09-13 | 台达电子工业股份有限公司 | System for regulating light source performance using cuttable resistance and regulating method thereof |
| CN201138796Y (en) * | 2007-10-31 | 2008-10-22 | 无锡友芯集成电路设计有限公司 | Improved voltage scaling digital to analog converter |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001153745A (en) * | 1999-11-30 | 2001-06-08 | Hokuriku Electric Ind Co Ltd | Temperature conpensation method and device for sensor output |
| CN201430037Y (en) * | 2009-06-22 | 2010-03-24 | 济宁正和电子有限责任公司 | High-precision metal foil resistor chip |
-
2013
- 2013-11-07 CN CN201310545795.XA patent/CN103557969B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4563902A (en) * | 1984-04-12 | 1986-01-14 | Ermeto Armaturen Gmbh | Pressure and temperature sensor |
| CN1503904A (en) * | 2001-12-28 | 2004-06-09 | ��ʽ���縻ʿ�� | Pressure sensor, pressure controller and temp drief corrector of pressure type flow controller |
| CN1832650A (en) * | 2005-03-10 | 2006-09-13 | 台达电子工业股份有限公司 | System for regulating light source performance using cuttable resistance and regulating method thereof |
| CN201138796Y (en) * | 2007-10-31 | 2008-10-22 | 无锡友芯集成电路设计有限公司 | Improved voltage scaling digital to analog converter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103557969A (en) | 2014-02-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103557969B (en) | Accurately can trim the ceramic pressure sensor chip of temperature drift error and trim system and method for repairing and regulating | |
| CN107036517B (en) | Loading device for calibrating displacement sensor and calibration method | |
| CN109531262B (en) | Contact feedback type automatic measurement method and system for numerical control machine tool and storage medium | |
| CN203502148U (en) | Data acquisition device of ceramic pressure sensor chips | |
| CN110470969B (en) | PCB (printed circuit board) burning test integrated machine equipment and use method | |
| CN111157799A (en) | Laser resistance repairing method and system | |
| CN104251966A (en) | Automation measurement system and method | |
| CN214892973U (en) | Measuring jig for cutter machining | |
| CN210718990U (en) | Jig device for detecting adjustable flatness | |
| CN210719489U (en) | Grid cell clamping force detection device | |
| CN211330355U (en) | Sorting device for resistance test | |
| WO2019130952A1 (en) | Inspection device and inspection method | |
| CN219455299U (en) | Automatic testing and recording device for vibration value of fan | |
| CN117761398A (en) | Detection equipment | |
| CN217384155U (en) | Automatic thickness detection equipment | |
| US4821822A (en) | Method and apparatus for adjusting resistors in load-cell scale | |
| CN213397600U (en) | Spring detection tool | |
| CN113119329B (en) | Cutting method and cutting device for crystalline silicon | |
| CN216012117U (en) | Displacement calibration device for suspended tunnel pipe body | |
| CN214951008U (en) | Grating ruler detection device | |
| CN210981153U (en) | New forms of energy battery tray check out test set | |
| CN108548484B (en) | Method for detecting position of built-in part of automobile fuel tank | |
| CN212179853U (en) | Displacement detection device for travel switch | |
| CN216668590U (en) | Correction equipment applied to large-breadth galvanometer plane size calibration | |
| CN210550349U (en) | Automatic detection device for piston bore |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Ceramic pressure sensor chip capable of accurately correcting and adjusting temperature drift error, correcting and adjusting system and correcting and adjusting method Effective date of registration: 20170915 Granted publication date: 20160224 Pledgee: Bank of Nanjing, Limited by Share Ltd, Pearl River Bank Pledgor: NANJING HUANKE ELECTRONIC TECHNOLOGY CO., LTD. Registration number: 2017990000879 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160224 Termination date: 20191107 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |