CN103551921A - Piezoresistive integrated three-dimensional turning force sensor - Google Patents

Abstract

The invention relates to a piezoresistive integrated three-dimensional turning force sensor. A turning tool is installed in a head turning tool slot of a sensor main structure, a first vertical octagonal semi-ring and a second vertical octagonal semi-ring are arranged on an upper surface and a lower surface of a middle portion of the sensor main structure respectively, a front side and a rear side of the middle portion of the sensor major structure are connected with a first horizontal octagonal semi-ring and a second horizontal octagonal semi-ring respectively, a tail portion of the sensor major structure is provided with a sensor handle, and a micro-electromechanical system (MEMS) silicon micro force sensor chip is packaged on an outer surface of the octagonal semi-ring. According to the piezoresistive integrated three-dimensional turning force sensor, two octagonal ring structures which are perpendicular to each other are used so that independent measurement of three-dimensional turning forces is achieved, and interaction influence and coupling among effective lateral forces are reduced; the MEMS silicon micro force sensor chip is used, so that measurement accuracy and sensitivity of the chip are greatly improved, and measurement of stress and stain can be achieved by only packaging the MEMS silicon micro force sensor chip in one place; accurate measurement of three-dimensional turning forces is achieved, and both dynamic forces and static forces can be measured.

Description

The integrated three-dimension lathe power of a kind of pressure resistance type sensor

Technical field

The present invention relates to intelligent manufacturing equipment technical field, particularly the integrated three-dimension lathe power of a kind of pressure resistance type sensor.

Background technology

In metal cutting processing, turning processing is one of modal processing method.Cutting Force is the important indicator of reflection turning process, and the size of Cutting Force and turning process change closely related, and each minor variations of turning state can reflect by the variation of Cutting Force.How the close relations such as Cutting Force size and tool wear, machining accuracy, turning temperature, power consumption, therefore accurately measure Cutting Force extremely important to improving processing characteristics.

Traditional Cutting Force dynamometer mainly contains the types such as resistance-strain type, piezoelectric type, current type, optical fiber type, condenser type, but resistance-strain type of dynamometer instrument exists the contradiction of sensitivity and rigidity; Piezoelectric type dynamometer can not tested static power due to charge leakage, the restriction of contact stiffness is assembled in the raising of intrinsic frequency, it is extremely inconvenient, expensive to safeguard; Current type dynamometer certainty of measurement is not high, and because electric current sluggishness causes meeting the high requirement to Cutting Force Real-Time Monitoring; Optical fiber type and capacitance type sensor be subject to extraneous vibration and variations in temperature impact and cannot Measurement accuracy.

In recent years along with the development of various micro-nano sensors, for cutting quality control in lathe process tool working angles, cutter life prediction and Intelligent Machining demand, the volume micro-nano sensor little, low in energy consumption, function admirable that research and development detect control for processes such as Tool in Cutting seems particularly urgent and necessary.

Summary of the invention

The defect existing in order to overcome above-mentioned prior art, the object of the present invention is to provide the integrated three-dimension lathe power of a kind of pressure resistance type sensor, with the quick chip Catching bomb of the micro-power of MEMS silicon gonosome surface stress, realizes the accurate measurement of three-dimension lathe power.

In order to achieve the above object, technical scheme of the present invention is achieved in that

The integrated three-dimension lathe power of a kind of pressure resistance type sensor, comprise sensor body structure 7, lathe tool 1 is arranged in the head lathe tool slot 8 of sensor body structure 7, the top and bottom, middle part of sensor body structure 7 are respectively equipped with the first vertical anistree semi-ring 4 and the second vertical anistree semi-ring 5, the first vertical anistree semi-ring 4, the second vertical anistree semi-ring 5 forms vertical direction octagonal ring, elastomer structure as vertical direction, former and later two sides, the middle part of sensor body structure 7 connect respectively the anistree semi-ring 2 of the first level and the anistree semi-ring 3 of the second level, the anistree semi-ring 3 of the anistree semi-ring 2 of the first level and the second level forms horizontal direction octagonal ring, elastomer structure as horizontal direction, the afterbody of sensor body structure 7 is sensor handle, sensor handle is that cross section is the cuboid bar of rectangle, at the first vertical anistree semi-ring 4, the second vertical anistree semi-ring 5, the anistree semi-ring 2 of the first level and anistree semi-ring 3 outer surfaces of the second level are packaged with respectively the quick chip 6 of the micro-power of MEMS silicon.

Described lathe tool slot 8 is that cross section is square hollow slot, at lathe tool slot 8 middle parts, side, has screwed hole 9.

The quick chip 6 of the micro-power of described MEMS silicon is the ess-strain conversion elements by MEMS fabrication techniques, chip internal integrated piezoresistance Hui Sidun full-bridge circuit.

The invention has the beneficial effects as follows: first, the present invention, according to the feature of octagonal ring stress deformation, adopts two mutually perpendicular octagonal ring structures to realize the independent measurement of three-dimension lathe power, reduced each to influencing each other and being coupled between power; Than traditional metal strain chip Cutting Force sensor, adopt the quick chip of the micro-power of MEMS silicon, not only the certainty of measurement of chip and sensitivity improve greatly, and all integrated Hui Sidun full-bridge circuit on the quick chip of the micro-power of every a slice MEMS silicon, only need to just can realize the measurement of counter stress, strain at the quick chip of the micro-power of place's package of MEMS silicon, traditional metal strain-gauge transducer need to be pasted respectively metal strain plate to form resistance bridge at four privileged sites, easily introduces coupling and error; The defect that can only measure dynamic force than piezoelectric type Cutting Force sensor, the present invention not only can measure dynamic force, is also applicable to measure static force.

Accompanying drawing explanation

Fig. 1 is structural representation of the present invention.

Fig. 2 is the structural representation of sensor body structure 7 of the present invention.

Fig. 3 is the schematic diagram of the anistree semi-ring of level of the present invention.

Fig. 4 is the scheme of installation of the present invention on lathe saddle.

Fig. 5 is the stressed schematic diagram of the present invention.

Fig. 6 is the horizontal octagonal ring force analysis of the present invention schematic diagram.

The specific embodiment

Below in conjunction with accompanying drawing, the present invention is described in further detail.

With reference to Fig. 1, Fig. 2 and Fig. 3, the integrated three-dimension lathe power of a kind of pressure resistance type sensor, comprise sensor body structure 7, lathe tool 1 is arranged in the head lathe tool slot 8 of sensor body structure 7, and be bolted lathe tool 1, the top and bottom, middle part of sensor body structure 7 are respectively equipped with the first vertical anistree semi-ring 4 and the vertical anistree semi-ring 5 of the vertical anistree semi-ring 4, second of the second vertical anistree semi-ring 5, the first forms vertical direction octagonal ring, as the elastomer structure of vertical direction, former and later two sides, the middle part of sensor body structure 7 connect respectively the anistree semi-ring 2 of the first level and the anistree semi-ring 3 of the second level, the anistree semi-ring 3 of the anistree semi-ring 2 of the first level and the second level forms horizontal direction octagonal ring, elastomer structure as horizontal direction, the afterbody of sensor agent structure 7 is sensor handle, sensor handle is that cross section is the cuboid bar of rectangle, for this sensor is fixed on to lathe saddle 10, at the first vertical anistree semi-ring 4, the second vertical anistree semi-ring 5, the anistree semi-ring 2 of the first level and anistree semi-ring 3 outer surfaces of the second level are packaged with respectively the quick chip 6 of the micro-power of MEMS silicon, thereby form Cutting Force sensor.

With reference to Fig. 2, described lathe tool slot 8 be cross section be square, there is certain thickness hollow slot, for inserting lathe tool 1, in lathe tool slot 8 sides, have screwed hole 9, for inserting bolt fixing lathe tool 1.

The quick chip 6 of the micro-power of described MEMS silicon is the ess-strain conversion elements by MEMS fabrication techniques, chip internal integrated piezoresistance Hui Sidun full-bridge circuit.

Operation principle of the present invention is:

During use, with reference to Fig. 4, the tail sensor handle of sensor agent structure 7 is fixed on lathe saddle 10, motor 11 drives blade holder turns to realize tool changing function.

With reference to Fig. 5, hard alloy rotatable lathe tool 1 is subject to Cutting Force in turning process can be decomposed into three mutually perpendicular active forces, is respectively main Cutting Force FC, centripetal force Ff and radial-thrust force Fp.The distortion that wherein main Cutting Force FC causes is mainly reflected on the vertical anistree semi-ring 5 of the first vertical anistree semi-ring 4, second, the distortion that centripetal force Ff causes is mainly reflected on the anistree semi-ring 2 of the first level, the anistree semi-ring 3 of the second level, and the distortion that radial-thrust force Fp causes is embodied in respectively on the first vertical anistree semi-ring 5 of vertical anistree semi-ring 4, second and the anistree semi-ring 2 of the first level, the anistree semi-ring 3 of the second level.

With reference to Fig. 6, one end of the horizontal octagonal ring that the anistree semi-ring 2 of the first level, the anistree semi-ring 3 of the second level form is fixed, and the other end is subject to the effect of centripetal force Ff and radial-thrust force Fp, and in figure, t represents octagonal ring thickness, and r represents octagonal ring mean radius.Due to octagonal ring symmetrical configuration, and structure is similar to annulus, therefore adopts annulus analytical method to get the right semi-ring and analyzes, and the moment of flexure on arbitrary section is:

$M=-\frac{F_{V}R}{2}(\frac{2}{\mathrm{\&pi;}}-\sin \mathrm{\&theta;})-\frac{{\mathrm{<figure-callout\; id="2"\; label="F\; h\; R"\; filenames="HDA0000393251020000011.png,HDA0000393251020000021.png"\; state="\{\{state\}\}">F</figure-callout>}}_{h}R}{2}\cos \mathrm{\&theta;}(0<\mathrm{\&theta;}<\mathrm{\&pi;})$

Ignore the impact of axle power, annulus surface stress is:

(W is module of anti-bending section),

Visible when θ=90 °, annulus surface stress only with radial-thrust force F _prelevant, in the time of θ=39.4 ° or140.6 °, annulus surface stress only with centripetal force F _frelevant.By infrastest, find, for octagonal ring structure, in θ=90, octagonal ring surface ° with the applicable quick chip 6 of the micro-power of package of MEMS silicon in ° or135 ° position, θ=45.The quick chip 6 of the micro-power of MEMS silicon on the anistree semi-ring 2 of the first level, the anistree semi-ring of the second level 3 surfaces can and be converted to electric weight output by the strain of octagonal ring surface stress, by demarcating, can realize the measurement to centripetal force Ff and radial-thrust force Fp.

In like manner, on the vertical anistree semi-ring 5 of the first vertical anistree semi-ring 4, second, the quick chip 6 of the micro-power of MEMS silicon of encapsulation can be realized the measurement to main Cutting Force FC.

Claims (3)

1. the integrated three-dimension lathe power of a pressure resistance type sensor, comprise sensor body structure (7), it is characterized in that: lathe tool (1) is arranged in the head lathe tool slot (8) of sensor body structure (7), the top and bottom, middle part of sensor body structure (7) are respectively equipped with the first vertical anistree semi-ring (4) and the second vertical anistree semi-ring (5), the first vertical anistree semi-ring (4), the second vertical anistree semi-ring (5) forms vertical direction octagonal ring, elastomer structure as vertical direction, former and later two sides, middle part of sensor body structure (7) connect respectively the anistree semi-ring (2) of the first level and the anistree semi-ring (3) of the second level, the anistree semi-ring (2) of the first level and the anistree semi-ring of the second level (3) form horizontal direction octagonal ring, elastomer structure as horizontal direction, the afterbody of sensor body structure (7) is sensor handle, sensor handle is that cross section is the cuboid bar of rectangle, at the first vertical anistree semi-ring (4), the second vertical anistree semi-ring (5), the anistree semi-ring (2) of the first level and anistree semi-ring (3) outer surface of the second level are packaged with respectively the quick chip of the micro-power of MEMS silicon (6).

2. the integrated three-dimension lathe power of a kind of pressure resistance type according to claim 1 sensor, is characterized in that: described lathe tool slot (8) is that cross section is square hollow slot, at middle part, lathe tool slot (8) side, has screwed hole (9).

3. the integrated three-dimension lathe power of a kind of pressure resistance type according to claim 1 sensor, is characterized in that: the quick chip of the micro-power of described MEMS silicon (6) is the ess-strain conversion element by MEMS fabrication techniques chip internal integrated piezoresistance Hui Sidun full-bridge circuit.

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