CN103528683B - A kind of movinglens scanning device for Fourier transformation infrared spectrometer - Google Patents
A kind of movinglens scanning device for Fourier transformation infrared spectrometer Download PDFInfo
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- CN103528683B CN103528683B CN201310510306.7A CN201310510306A CN103528683B CN 103528683 B CN103528683 B CN 103528683B CN 201310510306 A CN201310510306 A CN 201310510306A CN 103528683 B CN103528683 B CN 103528683B
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Abstract
The invention discloses a kind of movinglens scanning device for Fourier transformation infrared spectrometer (Fourier Transform Infrared Spectrometer, FT-IR); Comprise fixed head 1, press strip 2, front spring sheet 3, front plate 4, coil 5, hollow three-dimensional angle mirror 6, angle mirror seat 7, portable plate 8, rear plate 9, permanent magnet seat 10, rear spring sheet 11.Fixed head 1 maintains static, and can produce magnetic field when coil 5 is energized, and magnets produce magnetic fields power fixing on itself and permanent magnet seat 10, makes angle mirror seat 7 and hollow three-dimensional angle mirror 6 can move along magnetic field force direction, drives portable plate 8 to move together simultaneously; When the energising direction of coil 5 changes, the moving direction of angle mirror seat 7 also can be reverse.This scanister is that FT-IR provides and a kind ofly has without friction, index glass sweeping scheme without the need to lubrication, the advantage such as precision is high, the life-span is long, practical.
Description
Technical field
The present invention relates to the movinglens scanning device of a kind of Fourier transformation infrared spectrometer (Fourier Transform Infrared Spectrometer, FT-IR), belong to physics photonics, particularly spectrometric instrument technical field.
Background technology
The core component of FT-IR spectrometer is Michelson interferometer, and the interference of light derives from the optical path difference that between interferometer index glass and horizontal glass, relative motion produces.Index glass scanning system is an important component part of spectrometer, high-precision index glass drive system is one of the core and difficult point of Fourier transform spectrometer, in motion process, and the at the uniform velocity property that index glass be kept to move, and in motion process, to rocking or tilting to have strict requirement.
Traditional movinglens scanning device has electric rotating machine mechanical drive usually, ecp hydraulic system.Traditional physical construction (i.e. the intermediate link such as turning motor+ball-screw), mechanical organ easily produces the defects such as elastic deformation, friction, backlass, nonlinearity erron.Although and ecp hydraulic system vibration and tilt little, speed is slow, and complex structure, needs air feed liquid-supplying system, is unfavorable for the miniaturization of instrument and greatly affected by environment.Also employing dynamic coil linear motor is had, in conjunction with the movinglens scanning device of the teflon glass slides bearings of magnetic levitation technology, it can overcome the shortcoming of above-mentioned two kinds of drive systems, can effectively carry out " Direct driver ", prevents from occurring large inclination in scanning process, and volume is little, control simple, precision is also very high, but can not overcome the vibration problem existed in motion process, and the flyback of index glass places one's entire reliance upon the control of electric current, also there is slow-footed problem.
Present invention employs a kind of voice coil motor index glass sweeping scheme supported based on elastic construction, can effectively solve the problems such as directional stability, speed stability, vibration, and sweep velocity is faster.This scanister is that FT-IR provides and a kind ofly to have without friction, index glass sweeping scheme without the need to lubrication, the advantage such as precision is high, the life-span is long.
Summary of the invention
Object of the present invention be FT-IR provide a kind of there is low cost, without friction, index glass sweeping scheme without the need to lubrication, the advantage such as precision is high, vibration resistance is strong, sweep velocity is fast, the life-span is long, it effectively can ensure that FT-IR spectrometer has high reliability and good performance.
Technical scheme of the present invention is:
For a movinglens scanning device for Fourier transformation infrared spectrometer, comprise fixed head 1, two front spring sheets 3, voice coil motor, hollow three-dimensional angle mirror 6, angle mirror seat 7, portable plate 8, permanent magnet seat 10, two rear spring sheets 11;
Fixed head 1 is connected by two front spring sheets, 3, two rear spring sheets 11 with portable plate 8, and permanent magnet seat 10 is fixedly mounted on fixed head 1, the embedded circular permanent magnet 12 of permanent magnet seat 10; Hollow cubic angle mirror 6 is fixed on one end of angle mirror seat 7; Voice coil motor and angle mirror seat 7 are connected as a single entity, and the coil 5 of voice coil motor is wrapped in the other end of angle mirror seat 7, and angle mirror seat 7 is fixed on portable plate 8.
Two described front spring sheets 3, each all clamping with two panels front plate 4 is reinforced; Two described rear spring sheets 11 are gripped together by two panels rear plate 9.
Described permanent magnet seat 10 is embedded with one piece of circular permanent magnet, and permanent magnet south poles direction is identical with the axial direction of the circular coil 5 that hollow three-dimensional angle mirror 6 is wound around.
Described angle mirror seat 7 one end is circular configuration, and coil 5 is around on circular configuration; The other end is equipped with hollow three-dimensional angle mirror 6; Coil 5, hollow three-dimensional angle mirror 6 and angle mirror seat 7 three are integrated, and the centre of gravity place of three is in 1/2 place of the horizontal direction of portable plate 8.
Described hollow three-dimensional angle mirror 6 is made up of three gold-plated level crossings, and three gold-plated level crossings are mutually 90 degree.
Described fixed head 1 is completely parallel with the plate face of portable plate 8; Front spring sheet and rear spring sheet are parallel to each other, and both length between portable plate 8 and fixed head 1 is identical.
Four described spring leafs are arranged on fixed head 1 and portable plate 8 respectively by four identical press strips 2.
During use, fixed head 1 is arranged on a stationary device (position), as one piece of large place such as base plate or vertical plank.Namely fixed head 1 maintains static after installing, index glass a little range of movement interscan time, portable plate 8 can carry out rectilinear motion along a direction.Four spring leafs are installed in the position near four summits of portable plate, and two front spring sheets 3 are all identical with the length, width, thickness, material etc. of two rear spring sheets 11; Spring leaf adopts the alloy material of intensity, hardness, elasticity, wearing quality, fatigue limit and fine heat-resisting performance to make, general optional beryllium-bronze material; Because four spring leafs are thinner, in order to maintain certain rigid support ability, spring leaf have employed the method for clamping plate reinforcement.Two front spring sheets 3 respectively clamp with two panels front plates 4 and reinforce, and two rear spring sheets 11 share a large rear plate 9 and carry out clamping reinforcing.
The eyeglass be connected with angle mirror seat 7 adopts hollow three-dimensional angle mirror.Hollow three-dimensional angle mirror 6 is made up of three gold-plated level crossings, and three plate plane mirrors are mutually 90 degree, can ensure in index glass scanning process, and rotate even if exist, slight vibration, incident ray also can keep Yuanping City's line direction to return.The movement position of hollow three-dimensional angle mirror 6 is subject to the impact of coil 5 galvanization size and Orientations, by regulating size of current, the distance that hollow three-dimensional angle mirror 6 departs from equilibrium position can be controlled, when angle mirror departs from equilibrium position, only need to a very little inverse current or obstructed electric current, it just can natural counter motion under spring force, thus makes rapid scanning become very easy.
Compared with prior art, the invention has the beneficial effects as follows:
1. present invention employs the form being connected and fixed plate and portable plate by spring leaf, eliminate the friction force that traditional index glass mechanical scanning mode exists, without the need to lubricating structure, and index glass can only be moved in a direction, the resistance to shock that index glass is scanned obtains to be strengthened greatly, thus improves the quality of the infrared interference figure that spectrometer obtains to a great extent.
2. present invention employs voice coil motor as index glass (hollow three-dimensional angle mirror) driver part, position and the sweep velocity of index glass is controlled by the size and Orientation of electric current, simultaneously, can by means of the restoring force of spring leaf, realize the fast retrace of index glass, the sweep velocity of index glass is greatly enhanced.
3. the index glass in the present invention have employed hollow three-dimensional angle mirror, the light of arrival index glass back reflection and corresponding incident light is enable to keep strict parallel, thus overcome the light skew problem that the inclination that may exist in index glass motion process or slight vibration cause, make the quality of interferogram keep good.
Accompanying drawing explanation
Fig. 1 is one-piece construction schematic diagram of the present invention.
Fig. 2 is the connection layout of fixed head 1 and portable plate 8 in the present invention.
Fig. 3 is the parallelogram sturcutre vertical view that fixed head in the present invention, portable plate and spring leaf are formed; A () is equilibrium position shape figure, (b) is shape figure after deformation.
Fig. 4 is the structure of permanent magnet seat in the present invention.
Fig. 5 puts graph of a relation in the present invention between angle mirror seat and permanent magnet.
Fig. 6 is shape and the structural drawing of the three-dimensional angle mirror of hollow core of the present invention.
Embodiment
Below in conjunction with accompanying drawing, further detailed description is done to the present invention.
As shown in Figure 1, the present invention includes fixed head 1, two front spring sheets 3, voice coil motor, hollow three-dimensional angle mirror 6, angle mirror seat 7, portable plate 8, permanent magnet seat 10, two rear spring sheets 11; Fixed head 1 is connected by two front spring sheets, 3, two rear spring sheets 11 with portable plate 8, and permanent magnet seat 10 is fixedly mounted on fixed head 1, the embedded circular permanent magnet 12 of permanent magnet seat 10; Hollow cubic angle mirror 6 is fixed on one end of angle mirror seat 7; Voice coil motor and angle mirror seat 7 are connected as a single entity, and the coil 5 of voice coil motor is wrapped in the other end of angle mirror seat 7, and angle mirror seat 7 is fixed on portable plate 8.
Fig. 2 describes the connected mode of fixed head 1 and portable plate 8.Totally four spring leafs (two front spring sheets, 3, two rear spring sheets 11) are connected by two groups for fixed head 1 and portable plate 8.Four its length of spring leaf, width, thickness, materials etc. are all identical, and spring leaf is firmly arranged on fixed head 1 and portable plate 8 by four identical press strips 2.Spring leaf adopts the alloy material of intensity, hardness, elasticity, wearing quality, fatigue limit and fine heat-resisting performance to make, general optional beryllium-bronze material.By parallel each other for four spring leafs, its length between portable plate 8 and fixed head 1 is identical, and four spring leafs are installed in the position of the close lower edges of portable plate.Therefore, fixed head 1 and portable plate 8 constitute two opposite faces of a rectangular parallelepiped, and four spring leafs constitute four crest lines connecting these two faces.
Fig. 3 describes in Fig. 2, view the parallelogram sturcutre that the fixed head, portable plate and the spring leaf that look down from top are formed.As can be seen from the figure, when portable plate is subjected to displacement, portable plate 8 is parallel with fixed head 1 all the time.Portable plate, fixed head and front and back spring leaf form a parallelogram sturcutre, ensure that, in certain range of movement, portable plate 8 only has the motion in a direction, thus ensure that the shock resistance of system excellence.
Because portable plate 8 needs to support certain index glass weight, and spring leaf is thinner, downward twist distortion is produced in order to prevent spring leaf in motion process, need to carry out consolidation process to spring leaf, as shown in fig. 1, two front spring sheets 3 all have employed the method that the front plate 4 be made up of two sheet metals clamps reinforcing.Reinforce different with front spring, the rear plate 9 that two rear spring sheets 11 have employed by being made up of two large sheet metals has carried out clamping reinforcing.
In order to obtain the motion driving force of index glass, the method that have employed voice coil motor carries out index glass driving, and the method for the magnetic field interaction utilizing permanent magnet and coil to produce obtains driving force.In Fig. 1, permanent magnet seat 10 is fixedly mounted on fixed head 1.As shown in Figure 4, its embedded permanent magnet 12, permanent magnet 12 has extremely strong magnetic attraction to the concrete structure of permanent magnet seat 10, and it is circular configuration, and the south poles in magnetic field is perpendicular to circular surface.
The voice coil motor and the angle mirror seat 7 that produce magnetic force are connected as a single entity, and the coil 5 of voice coil motor is directly wrapped in one end of angle mirror seat.Relation of putting between permanent magnet 12 and angle mirror seat 7 as shown in Figure 5.Coil 5 is coiled into circular configuration, and its circular flat is parallel to the circular flat of permanent magnet 12, and two circular centers of circle are coaxial.When coil 5 is energized, according to the law of electromagnetic induction, it can result from the magnetic field of a south poles perpendicular to circular flat.When the direction of current flowing through coil changes, the direction in magnetic field also can change.When size of current changes, magnetic field intensity can change.The magnetic field interaction that the magnetic field produced can produce with permanent magnet 12, produces and attracts or repulsive force.When permanent magnet and coil produce magnetic force, angle mirror seat 7 can be promoted and move, because angle mirror seat 7 is fixed on portable plate 8, therefore, the acting force produced also can act on portable plate 8, under this acting force, four spring leafs can produce deformation, thus promotion angle mirror seat 7 moves.From the foregoing description, spring deformation can allow portable plate 8 can only move upward in one degree of freedom side, and therefore, angle mirror seat 7 also can only move upward in one degree of freedom side.Hollow angle mirror 6 is mounted on angle mirror seat 7, and this also just means that hollow angle mirror also can only move upward in one degree of freedom side, thus ensure that angle mirror motion has good rectilinearity.
From Fig. 1, can find out that another benefit adopting spring leaf is that index glass sweep velocity is fast.After angle mirror seat 7 departs from equilibrium position, as long as remove the electric current be added on coil, so magnetic field force can disappear immediately, angle mirror seat 7 can move to equilibrium position by nature under the restoring force effect of spring leaf, if add an inverse current again, so angle mirror seat can be accelerated further to the speed of equilibrium position flyback.Therefore, sweep velocity is of the present invention one large feature soon.
Traditional based in the FT-IR interferometer of plane index glass, in index glass scanning motion process, if there is a little angular deflection, so reflected light will produce larger departing from, thus it is abnormal to cause interferogram to occur.In order to overcome this problem, present invention employs hollow three-dimensional angle mirror as catoptron.As shown in Figure 6, it is glued together by 3 identical level crossings and forms hollow three-dimensional angle mirror 6 structure, and 3 plate plane mirrors are in 90 degree, forms a hollow spatial structure.Adopt the benefit of hollow angle mirror to be, incide light on angle mirror after a few secondary reflection, can return along the direction being parallel to incident ray, thus overcome reflected light completely and produce the problem departed from.Because light at least will through two secondary reflections on angle mirror, in order to reduce the energy loss in reflection process, gold-plated process has been carried out in lens reflecting face, makes optical energy loss minimum.
Claims (5)
1. for a movinglens scanning device for Fourier transformation infrared spectrometer, it is characterized in that: comprise fixed head (1), two front spring sheets (3), voice coil motor, hollow three-dimensional angle mirror (6), angle mirror seat (7), portable plate (8), permanent magnet seat (10), two rear spring sheets (11);
Fixed head (1) is connected by two front spring sheets (3), two rear spring sheets (11) with portable plate (8), permanent magnet seat (10) is fixedly mounted on fixed head (1), permanent magnet seat (10) embedded circular permanent magnet (12); Hollow cubic angle mirror (6) is fixed on one end of angle mirror seat (7); Voice coil motor and angle mirror seat (7) are connected as a single entity, and the coil (5) of voice coil motor is wrapped in the other end of angle mirror seat (7), and angle mirror seat (7) is fixed on portable plate (8);
Two described front spring sheets (3), each two panels front plate (4) of all using clamps reinforcing; Two described rear spring sheets (11) grip together by two panels rear plate (9);
Described circular permanent magnet (12) south poles direction is identical with the axial direction of the upper circular coil (5) be wound around of hollow three-dimensional angle mirror (6).
2., by a kind of movinglens scanning device for Fourier transformation infrared spectrometer according to claim 1, it is characterized in that: described angle mirror seat (7) one end is circular configuration, and coil (5) is around on circular configuration; The other end is equipped with hollow three-dimensional angle mirror (6); Coil (5), hollow three-dimensional angle mirror (6) and angle mirror seat (7) three are integrated, and the centre of gravity place of three is in 1/2 place of the horizontal direction of portable plate (8).
3., by the device that a kind of index glass for Fourier transformation infrared spectrometer according to claim 2 scans, it is characterized in that: described hollow three-dimensional angle mirror (6) is made up of three gold-plated level crossings, and three gold-plated level crossings are mutually 90 degree.
4., by a kind of movinglens scanning device for Fourier transformation infrared spectrometer according to claim 3, it is characterized in that: described fixed head (1) is completely parallel with the plate face of portable plate (8); Front spring sheet and rear spring sheet are parallel to each other, and both length between portable plate (8) and fixed head (1) is identical.
5. by a kind of movinglens scanning device for Fourier transformation infrared spectrometer in claim 1-4 described in any one, it is characterized in that: four described spring leafs are arranged on fixed head (1) and portable plate (8) respectively by four identical press strips (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310510306.7A CN103528683B (en) | 2013-10-25 | 2013-10-25 | A kind of movinglens scanning device for Fourier transformation infrared spectrometer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310510306.7A CN103528683B (en) | 2013-10-25 | 2013-10-25 | A kind of movinglens scanning device for Fourier transformation infrared spectrometer |
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| CN103528683A CN103528683A (en) | 2014-01-22 |
| CN103528683B true CN103528683B (en) | 2015-09-02 |
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| CN201310510306.7A Expired - Fee Related CN103528683B (en) | 2013-10-25 | 2013-10-25 | A kind of movinglens scanning device for Fourier transformation infrared spectrometer |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104777138B (en) * | 2015-03-25 | 2019-05-17 | 深圳市贝沃德克生物技术研究院有限公司 | Biological marker analyte detection light spectral position based on light reflection adjusts device |
| CN104777137B (en) * | 2015-03-25 | 2018-06-19 | 深圳市贝沃德克生物技术研究院有限公司 | Biological marker analyte detection light spectral position regulating device |
| CN104792740B (en) * | 2015-03-25 | 2019-07-23 | 深圳市圣必智科技开发有限公司 | Spiral lift biological marker analyte detection light spectral position regulating device |
| CN104792698B (en) * | 2015-03-25 | 2019-06-14 | 深圳市圣必智科技开发有限公司 | Worm-gear type biological marker analyte detection uses up spectrum dark space apparatus for adjusting position |
| CN106018344A (en) * | 2016-05-16 | 2016-10-12 | 中国电子科技集团公司第四十研究所 | Miniaturized Fourier spectrometer based on linear reciprocation lead screw |
| CN105938014A (en) * | 2016-05-23 | 2016-09-14 | 湖北久之洋红外***股份有限公司 | Infrared imaging spectrometer |
| CN109060131B (en) * | 2018-08-03 | 2021-03-26 | 北京雪迪龙科技股份有限公司 | Supporting device for movable mirror of infrared spectrometer and movable mirror scanning structure |
| CN114397017B (en) * | 2021-12-17 | 2024-05-03 | 光子集成(温州)创新研究院 | Moving mirror scanning device, michelson interferometer and Fourier infrared spectrometer |
| CN114967115B (en) * | 2022-04-27 | 2023-05-02 | 中国科学院西安光学精密机械研究所 | Large-stroke phase-shifting scanning device based on voice coil motor drive |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5276545A (en) * | 1989-03-24 | 1994-01-04 | Nicolet Instrument Corporation | Mirror alignment and damping device |
| EP0664443A1 (en) * | 1994-01-19 | 1995-07-26 | Yokogawa Electric Corporation | Interference spectrometer |
| US6322037B1 (en) * | 1999-10-26 | 2001-11-27 | Yokogawa Electric Corporation | Moving mirror support device for photo-interferometer |
-
2013
- 2013-10-25 CN CN201310510306.7A patent/CN103528683B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5276545A (en) * | 1989-03-24 | 1994-01-04 | Nicolet Instrument Corporation | Mirror alignment and damping device |
| EP0664443A1 (en) * | 1994-01-19 | 1995-07-26 | Yokogawa Electric Corporation | Interference spectrometer |
| US6322037B1 (en) * | 1999-10-26 | 2001-11-27 | Yokogawa Electric Corporation | Moving mirror support device for photo-interferometer |
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Granted publication date: 20150902 Termination date: 20191025 |