CN103510040B - Cooling device for thermal spraying rotating target material - Google Patents
Cooling device for thermal spraying rotating target material Download PDFInfo
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- CN103510040B CN103510040B CN201310513173.9A CN201310513173A CN103510040B CN 103510040 B CN103510040 B CN 103510040B CN 201310513173 A CN201310513173 A CN 201310513173A CN 103510040 B CN103510040 B CN 103510040B
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Abstract
The invention relates to a cooling device for a thermal spraying rotating target material. The cooling device is characterized in that a liner pipe is arranged in a base pipe; a hollow shaft is arranged in the liner pipe; a first end cover and a second end cover are mounted at the two ends of the base pipe; a first connecting pipe is connected with the outer side of the first end cover; a first through hole communicated with the hollow shaft is formed in the first end cover; a second through hole communicated with a cavity between the base pipe and the liner pipe is formed in the periphery of the first through hole; a second connecting pipe is connected with the outer side of the second end cover, and is connected with a core shaft through a third connecting pipe; a third through hole communicated with the hollow shaft is formed in the second end cover; a hollow pole is arranged in the third through hole, and penetrates into an inner stepped hole of the core shaft; a fourth through hole communicated with the cavity between the base pipe and the liner pipe is formed in the periphery of the hollow pole; a first radial hole communicated with the hollow pole and a second radial hole communicated with the stepped hole are formed in the core shaft; a housing is sleeved with the core shaft; a water inlet in the housing is communicated with the first radial hole; a water outlet is communicated with the second radial hole. The weight born by the target material is reduced, and the temperature is uniform.
Description
Technical field
The present invention relates to a kind of refrigerating unit, especially a kind of refrigerating unit of thermospray rotary target material, belong to rotary target material production unit technical field.
Background technology
Rotary target material commonly uses stainless steel tube as base material, after sandblasting, bottoming process, carry out thermospray, due to spray gun extreme temperatures in course of injection, therefore need to cool stainless steel tube in spraying process, way conventional is at present that stainless steel tube is enclosed within a steel pipe, two ends nut is fixed, then in steel pipe, pass into water coolant cooled stainless steel tube by the thermal conduction of steel pipe tube wall, but this cooling performance is undesirable, easily occur that stainless steel tube is crossed thermal expansion and causes coating cracking, affect yield rate and the quality of product.
Patent application CN201120376529.5 discloses a kind of refrigerating unit of spraying rotary target material, comprise cooling of central, water inlet pipe, rising pipe, the two ends at cooling of central center are provided with disconnected two sections of axial step holes mutually, two sections of axial step holes are provided with the radial hole being communicated with cooling of central outside surface near the bottom in hole, cooling of central one end outside surface is provided with cylindrical shoulder and matches with the tubular metal base material of rotary target material near radial hole place, cooling of central the other end outside surface is socketed a shifting ring, shifting ring is also provided with cylindrical shoulder to match with the tubular metal base material of rotary target material, shifting ring is other arranges the nut that is locked in cooling of central outside surface, match with water inlet pipe and rising pipe in the axial step hole at cooling of central two ends.The good cooling results of this application, but structure is comparatively complicated, and the weight that rotary target material bears in rotation is larger.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of refrigerating unit of thermospray rotary target material is provided, alleviate the weight that rotary target material bears in rotation, and reach uniform temperature in process of production, avoid Yin Wendu and cause decrease in yield.
According to technical scheme provided by the invention, a kind of refrigerating unit of thermospray rotary target material, comprises rotary target material base tube, feature is: arrange bushing pipe at described rotary target material substrate tube, bushing pipe closed at both ends, bushing pipe inside arranges tubular shaft, and the two ends of bushing pipe are stretched out at the two ends of tubular shaft; At the two ends of described rotary target material base tube, the first coupling device and the second coupling device are installed respectively, first coupling device comprises the first end cap being arranged on rotary target material base tube one end, the outside of the first end cap connects the first pipe connecting, the outer end sealing of the first pipe connecting, the first through hole being provided with and being communicated with tubular shaft one end is covered at first end, second through hole is set in the first through hole periphery, the second through hole and the cavity connects between rotary target material base tube and bushing pipe; Described second coupling device comprises the second end cap being arranged on the rotary target material base tube the other end, the outside of the second end cap connects the second pipe connecting, the outer end of the second pipe connecting is connected with one end of the 3rd pipe connecting, and the other end of the 3rd pipe connecting is connected with rotary connecting joint mandrel; Described second end cap is provided with the third through-hole be communicated with the tubular shaft the other end, arranges hollow union lever at third through-hole place, hollow union lever outer end is stretched in rotary connecting joint mandrel inner step hole through the inner chamber of the 3rd pipe connecting; The second end cap between described hollow union lever and the second pipe connecting arranges fourth hole, fourth hole and the cavity connects between rotary target material base tube and bushing pipe, the cavity between hollow union lever and the second pipe connecting and the cavity connects between the 3rd pipe connecting and hollow union lever; Described rotary connecting joint mandrel is radially provided with the first radial hole and the second radial hole respectively, and the first radial hole and the second radial hole are all communicated with rotary connecting joint mandrel inner step hole; The shoulder bottom shoulder hole is withstood in the outer end of described hollow union lever, arranges the first sealing-ring between hollow union lever and shoulder hole, and the first sealing-ring is between the first radial hole and the second radial hole; The inner space of described first radial hole and hollow union lever, the second radial hole and the cavity connects between hollow union lever and shoulder hole; At the sheathed rotary connecting joint shell of described rotary connecting joint mandrel exterior, rotary connecting joint shell is provided with prosopyle and posticum, and prosopyle is communicated with the first radial hole, and posticum is communicated with the second radial hole.
Gear pipe is set in described first through hole, gear pipe outer end opening; The first end that described second through hole is arranged between gear pipe and the first pipe connecting covers.
Between described rotary connecting joint mandrel and rotary connecting joint shell, arrange the second sealing-ring, the second sealing-ring is between prosopyle and posticum.
Described first end cap and the second end cap are arranged on the two ends of rotary target material base tube respectively by target pipe nut.
The present invention realizes, with entering with going out, can alleviating the weight that rotary target material bears in rotation, and can reaching uniform temperature in process of production by rotary connecting joint, can not Yin Wendu and under causing yield rate; And the bonding strength of rotary target material can be improved, reduce production cost.
Accompanying drawing explanation
fig. 1 is structural representation of the present invention.
Embodiment
Below in conjunction with concrete accompanying drawing, the invention will be further described.
As shown in Figure 1: the refrigerating unit of described thermospray rotary target material comprises rotary target material base tube 1, bushing pipe 2, tubular shaft 3, first coupling device 4, first end cap 4-1, first pipe connecting 4-2, first through hole 4-3, gear pipe 4-4, second through hole 4-5, second coupling device 5, second end cap 5-1, second pipe connecting 5-2, third through-hole 5-3, fourth hole 5-4, 3rd pipe connecting 6, rotary connecting joint mandrel 7, first radial hole 7-1, second radial hole 7-2, hollow union lever 8, shoulder hole 9, first sealing-ring 10, rotary connecting joint shell 11, prosopyle 12, posticum 13, second sealing-ring 14, target pipe nut 15 etc.
As shown in Figure 1, the present invention includes rotary target material base tube 1, arrange bushing pipe 2 in rotary target material base tube 1 inside, bushing pipe 2 closed at both ends, bushing pipe 2 inside arranges tubular shaft 2, and the two ends of bushing pipe 2 are stretched out at the two ends of tubular shaft 2, first coupling device 4 and the second coupling device 5 is installed respectively at the two ends of described rotary target material base tube 1, first coupling device 4 comprises the first end cap 4-1 being arranged on rotary target material base tube 1 one end, the outside of the first end cap 4-1 connects the first pipe connecting 4-2, the outer end sealing of the first pipe connecting 4-2, first end cap 4-1 is provided with the first through hole 4-3 be communicated with tubular shaft 3 one end, gear pipe 4-4 is set at the first through hole 4-3 place, gear pipe 4-4 outer end opening, the first end cap 4-1 between gear pipe 4-4 and the first pipe connecting 4-2 arranges the second through hole 4-5, second through hole 4-5 and the cavity connects between rotary target material base tube 1 and bushing pipe 2,
Described second coupling device 5 comprises the second end cap 5-1 being arranged on rotary target material base tube 1 the other end, the outside of the second end cap 5-1 connects the second pipe connecting 5-2, the outer end of the second pipe connecting 5-2 is connected with one end of the 3rd pipe connecting 6, and the other end of the 3rd pipe connecting 6 is connected with rotary connecting joint mandrel 7; Described second end cap 5-1 is provided with the third through-hole 5-3 be communicated with tubular shaft 3 the other end, arranges hollow union lever 8 at third through-hole 5-3 place, hollow union lever 8 outer end is stretched in rotary connecting joint mandrel 7 inner step hole 9 through the inner chamber of the 3rd pipe connecting 6; The second end cap 5-1 between described hollow union lever 8 and the second pipe connecting 5-2 arranges fourth hole 5-4, fourth hole 5-4 and the cavity connects between rotary target material base tube 1 and bushing pipe 2, the cavity between hollow union lever 8 and the second pipe connecting 5-2 and the cavity connects between the 3rd pipe connecting 6 and hollow union lever 8;
Described rotary connecting joint mandrel 7 is radially provided with the first radial hole 7-1 and the second radial hole 7-2 respectively, and the first radial hole 7-1 is all communicated with rotary connecting joint mandrel 7 inner step hole 9 with the second radial hole 7-2; The shoulder bottom shoulder hole 9 is withstood in the outer end of described hollow union lever 8, first sealing-ring 10 is set between hollow union lever 8 and shoulder hole 9, the inner chamber of hollow union lever 8 and the cavity between hollow union lever 8 and shoulder hole 9 between the first radial hole 7-1 and the second radial hole 7-2, thus seal by the first sealing-ring 10 mutually; The inner space of described first radial hole 7-1 and hollow union lever 8, the second radial hole 7-2 and the cavity connects between hollow union lever 8 and shoulder hole 9;
In described rotary connecting joint mandrel 7 outside by the sheathed rotary connecting joint shell 11 of bearing, rotary connecting joint shell 11 is provided with prosopyle 12 and posticum 13, and prosopyle 12 is communicated with the first radial hole 7-1, and posticum 13 is communicated with the second radial hole 7-2; Second sealing-ring 14, second sealing-ring 14 is set between described rotary connecting joint mandrel 7 and rotary connecting joint shell 11 between prosopyle 12 and posticum 13;
Described first end cap 4-1 and the second end cap 5-1 is arranged on the two ends of rotary target material base tube 1 respectively by target pipe nut 15.
The present invention in use, water coolant is entered by the prosopyle 12 on rotary connecting joint shell 11, the bottom in rotary connecting joint mandrel 7 inner step hole 9 is entered again by the first radial hole 7-1 on rotary connecting joint mandrel 7, the inner chamber of hollow union lever 8 is entered by the bottom of shoulder hole 9, one end of tubular shaft 3 is sent into by the inner chamber of hollow union lever 8, flowed out by the other end of tubular shaft 3 again, successively from the first through hole 4-3, second through hole 4-5 enters in the cavity between rotary target material base tube 1 and bushing pipe 2, the cavity between hollow union lever 8 and the second pipe connecting 5-2 is entered again by fourth hole 5-4, then the cavity between hollow union lever 8 and the 3rd pipe connecting 6 is entered, after entering the cavity between hollow union lever 8 and shoulder hole 9 again, flow to posticum 13 by the second radial hole 7-2 on rotary connecting joint mandrel 7 to flow out.
The present invention can realize water coolant with entering with going out, and ensures the homogeneity of temperature, alleviates the weight of target carrying; In production process, the component of water is very light, and flow is very fast, target homogeneous temperature, thus the bonding strength strengthening target, improve the reliability in coating process uses.
Claims (4)
1. the refrigerating unit of a thermospray rotary target material, comprise rotary target material base tube (1), it is characterized in that: in described rotary target material base tube (1) inside, bushing pipe (2) is set, bushing pipe (2) closed at both ends, bushing pipe (2) inside arranges tubular shaft (3), and the two ends of bushing pipe (2) are stretched out at the two ends of tubular shaft (3), at the two ends of described rotary target material base tube (1), the first coupling device (4) and the second coupling device (5) are installed respectively, first coupling device (4) comprises the first end cap (4-1) being arranged on rotary target material base tube (1) one end, the outside of the first end cap (4-1) connects the first pipe connecting (4-2), the outer end sealing of the first pipe connecting (4-2), first end cap (4-1) is provided with the first through hole (4-3) be communicated with tubular shaft (3) one end, in the first through hole (4-3) periphery, the second through hole (4-5) is set, second through hole (4-5) and the cavity connects between rotary target material base tube (1) and bushing pipe (2), described second coupling device (5) comprises the second end cap (5-1) being arranged on rotary target material base tube (1) the other end, the outside of the second end cap (5-1) connects the second pipe connecting (5-2), the outer end of the second pipe connecting (5-2) is connected with one end of the 3rd pipe connecting (6), and the other end of the 3rd pipe connecting (6) is connected with rotary connecting joint mandrel (7), described second end cap (5-1) is provided with the third through-hole (5-3) be communicated with tubular shaft (3) the other end, arrange hollow union lever (8) at third through-hole (5-3) place, hollow union lever (8) outer end is stretched in rotary connecting joint mandrel (7) inner step hole (9) through the inner chamber of the 3rd pipe connecting (6), the second end cap (5-1) between described hollow union lever (8) and the second pipe connecting (5-2) arranges fourth hole (5-4), fourth hole (5-4) and the cavity connects between rotary target material base tube (1) and bushing pipe (2), the cavity between hollow union lever (8) and the second pipe connecting (5-2) and the cavity connects between the 3rd pipe connecting (6) and hollow union lever (8), described rotary connecting joint mandrel (7) is radially provided with the first radial hole (7-1) and the second radial hole (7-2) respectively, and the first radial hole (7-1) is all communicated with rotary connecting joint mandrel (7) inner step hole (9) with the second radial hole (7-2), the shoulder of shoulder hole (9) bottom is withstood in the outer end of described hollow union lever (8), arrange the first sealing-ring (10) between hollow union lever (8) and shoulder hole (9), the first sealing-ring (10) is positioned between the first radial hole (7-1) and the second radial hole (7-2), the inner space of described first radial hole (7-1) and hollow union lever (8), the second radial hole (7-2) and the cavity connects between hollow union lever (8) and shoulder hole (9), the outside sheathed rotary connecting joint shell (11) of described rotary connecting joint mandrel (7), rotary connecting joint shell (11) is provided with prosopyle (12) and posticum (13), prosopyle (12) is communicated with the first radial hole (7-1), and posticum (13) is communicated with the second radial hole (7-2).
2. the refrigerating unit of thermospray rotary target material as claimed in claim 1, is characterized in that: arrange gear pipe (4-4) at described first through hole (4-3) place, gear pipe (4-4) outer end opening; Described second through hole (4-5) is arranged on the first end cap (4-1) between gear pipe (4-4) and the first pipe connecting (4-2).
3. the refrigerating unit of thermospray rotary target material as claimed in claim 1, it is characterized in that: between described rotary connecting joint mandrel (7) and rotary connecting joint shell (11), arrange the second sealing-ring (14), the second sealing-ring (14) is positioned between prosopyle (12) and posticum (13).
4. the refrigerating unit of thermospray rotary target material as claimed in claim 1, is characterized in that: described first end cap (4-1) and the second end cap (5-1) are arranged on the two ends of rotary target material base tube (1) respectively by target pipe nut (15).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310513173.9A CN103510040B (en) | 2013-10-25 | 2013-10-25 | Cooling device for thermal spraying rotating target material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310513173.9A CN103510040B (en) | 2013-10-25 | 2013-10-25 | Cooling device for thermal spraying rotating target material |
Publications (2)
Publication Number | Publication Date |
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CN103510040A CN103510040A (en) | 2014-01-15 |
CN103510040B true CN103510040B (en) | 2015-06-24 |
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CN201310513173.9A Expired - Fee Related CN103510040B (en) | 2013-10-25 | 2013-10-25 | Cooling device for thermal spraying rotating target material |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106319431A (en) * | 2016-10-31 | 2017-01-11 | 芜湖映日科技有限公司 | Mandrel-free target spraying equipment |
CN108570637B (en) * | 2018-05-11 | 2020-01-07 | 广州市尤特新材料有限公司 | Hot spraying rotating target equipment tool |
CN110527966B (en) * | 2019-09-05 | 2021-01-08 | 西安交通大学 | Horizontal magnetron sputtering equipment for long pipe coating |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN202246827U (en) * | 2011-09-29 | 2012-05-30 | 厦门映日光电科技有限公司 | Cooling device for spraying rotary target materials |
CN202322992U (en) * | 2011-10-31 | 2012-07-11 | 宁波江丰电子材料有限公司 | Target assembly capable of preventing deformation by impact of high-pressure cooling water |
CN202717837U (en) * | 2012-08-08 | 2013-02-06 | 兰州理工大学温州泵阀工程研究院 | Water-cooled type electric arc evaporation assembly for improving utilization rate of target |
CN202945317U (en) * | 2012-11-08 | 2013-05-22 | 温州职业技术学院 | Bipolar rotating coupling magnetic field auxiliary quasi diffusion arc cold cathode ion plating device |
CN203569174U (en) * | 2013-10-25 | 2014-04-30 | 无锡舒玛天科新能源技术有限公司 | Cooling device of thermally-sprayed rotary target material |
-
2013
- 2013-10-25 CN CN201310513173.9A patent/CN103510040B/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN202246827U (en) * | 2011-09-29 | 2012-05-30 | 厦门映日光电科技有限公司 | Cooling device for spraying rotary target materials |
CN202322992U (en) * | 2011-10-31 | 2012-07-11 | 宁波江丰电子材料有限公司 | Target assembly capable of preventing deformation by impact of high-pressure cooling water |
CN202717837U (en) * | 2012-08-08 | 2013-02-06 | 兰州理工大学温州泵阀工程研究院 | Water-cooled type electric arc evaporation assembly for improving utilization rate of target |
CN202945317U (en) * | 2012-11-08 | 2013-05-22 | 温州职业技术学院 | Bipolar rotating coupling magnetic field auxiliary quasi diffusion arc cold cathode ion plating device |
CN203569174U (en) * | 2013-10-25 | 2014-04-30 | 无锡舒玛天科新能源技术有限公司 | Cooling device of thermally-sprayed rotary target material |
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CN103510040A (en) | 2014-01-15 |
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