CN103508592A - Recovery method of sand line cutting fluid - Google Patents

Abstract

The invention discloses a recovery method of sand line cutting fluid, which comprises the following steps: step one, placing the sand line cutting fluid in a sedimentation tank for 60 to 120 minutes; step two, draining filtrate at the middle upper part of the sedimentation tank by a pipeline; step three, carrying out gauze filtering to further filter out low-density impurities floating on the surface; step four, adding hydrogen peroxide according to a volume ratio of 100:3, i.e. adding 3 liters of hydrogen peroxide into each 100 liters of filtrate; step five, carrying out secondary filtering by a compact graphite plate and carrying out backwashing on the compact graphite plate for once at intervals of 20 minutes so as to ensure a filtering effect. The sand line cutting fluid recovered by the technical scheme can be recycled; discharge of water pollution is reduced; impurities in the recovered fluid can be collected and stored for secondary use; the recovery method of the sand line cutting fluid can reduce discharge of heavy metal pollution by 70 percent and reduce discharge of nonmetallic harmful substances by 85 percent.

Description

The recovery method of sand wire cutting liquid

Technical field

The present invention relates to a kind of recovery method of sand wire cutting liquid, belong to cutting semiconductor materials technical field.

Background technology

In carrying out the process of semiconductor machining, the consumption of the sand wire cutting liquid using is very large, heavily contaminated material is contained in general sand wire cutting liquid the inside, can cause larger injury, and directly will emit the waste that also can cause resource with the sand wire cutting liquid of crossing to environment.

Summary of the invention

The recovery method that the object of this invention is to provide a kind of sand wire cutting liquid, solves the pollution that directly discharge brings of sand wire cutting liquid and the problem of waste.

Object of the present invention is carried out specific implementation by the following technical programs:

The recovery method of sand wire cutting liquid, comprising:

The first step is placed 60-120 minute in settling tank;

Second step, discharges the cleaner liquid of settling tank middle and upper part by pipeline;

The 3rd step, carries out filtered through gauze, further the supernatant low density impurity of filtering;

The 4th step, adds hydrogen peroxide according to the ratio of volume ratio 100:3, in every 100 liters of cleaner liquids, adds 3 liters of hydrogen peroxide;

The 5th step, carries out secondary filtration by solid graphite plate, and solid graphite plate will carry out back flushing once in every 20 minutes, assurance filter effect.

The sand wire cutting liquid reclaiming by technique scheme, can reuse, and reduces the discharge that water pollutes, and the impurity that reclaims liquid the inside can be collected and is stored, for secondary; The recovery method of this sand wire cutting liquid, can reduce the discharge of 70% heavy metal contamination, reduces the discharge of 85% nonmetal objectionable impurities.

Embodiment

The recovery method of the sand wire cutting liquid described in the embodiment of the present invention one, comprising:

The first step is placed 60 minutes in settling tank;

Second step, discharges the cleaner liquid of settling tank middle and upper part by pipeline;

The 3rd step, carries out filtered through gauze, further the supernatant low density impurity of filtering;

The 4th step, adds hydrogen peroxide according to the ratio of volume ratio 100:3, in every 100 liters of cleaner liquids, adds 3 liters of hydrogen peroxide;

The 5th step, carries out secondary filtration by solid graphite plate, and solid graphite plate will carry out back flushing once in every 20 minutes, assurance filter effect.

The recovery method of the sand wire cutting liquid described in the embodiment of the present invention two, comprising:

The first step is placed 120 minutes in settling tank;

Second step, discharges the cleaner liquid of settling tank middle and upper part by pipeline;

The 3rd step, carries out filtered through gauze, further the supernatant low density impurity of filtering;

The 4th step, adds hydrogen peroxide according to the ratio of volume ratio 100:3, in every 100 liters of cleaner liquids, adds 3 liters of hydrogen peroxide;

The 5th step, carries out secondary filtration by solid graphite plate, and solid graphite plate will carry out back flushing once in every 20 minutes, assurance filter effect.

The recovery method of the sand wire cutting liquid described in the embodiment of the present invention three, comprising:

The first step is placed 80 minutes in settling tank;

Second step, discharges the cleaner liquid of settling tank middle and upper part by pipeline;

The 3rd step, carries out filtered through gauze, further the supernatant low density impurity of filtering;

The 4th step, adds hydrogen peroxide according to the ratio of volume ratio 100:3, in every 100 liters of cleaner liquids, adds 3 liters of hydrogen peroxide;

The 5th step, carries out secondary filtration by solid graphite plate, and solid graphite plate will carry out back flushing once in every 20 minutes, assurance filter effect.

The sand wire cutting liquid reclaiming by technique scheme, can reuse, and reduces the discharge that water pollutes, and the impurity that reclaims liquid the inside can be collected and is stored, for secondary; The recovery method of this sand wire cutting liquid, can reduce the discharge of 70% heavy metal contamination, reduces the discharge of 85% nonmetal objectionable impurities.

Claims (1)

1. the recovery method of sand wire cutting liquid, comprising:

The first step is placed 60-120 minute in settling tank;

Second step, discharges the cleaner liquid of settling tank middle and upper part by pipeline;

The 3rd step, carries out filtered through gauze, further the supernatant low density impurity of filtering;

The 4th step, adds hydrogen peroxide according to the ratio of volume ratio 100:3, in every 100 liters of cleaner liquids, adds 3 liters of hydrogen peroxide;

The 5th step, carries out secondary filtration by solid graphite plate, and solid graphite plate will carry out back flushing once in every 20 minutes, assurance filter effect.