CN103508592A - Recovery method of sand line cutting fluid - Google Patents
Recovery method of sand line cutting fluid Download PDFInfo
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- CN103508592A CN103508592A CN201310477768.3A CN201310477768A CN103508592A CN 103508592 A CN103508592 A CN 103508592A CN 201310477768 A CN201310477768 A CN 201310477768A CN 103508592 A CN103508592 A CN 103508592A
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- China
- Prior art keywords
- cutting fluid
- line cutting
- recovery method
- sand line
- liters
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The invention discloses a recovery method of sand line cutting fluid, which comprises the following steps: step one, placing the sand line cutting fluid in a sedimentation tank for 60 to 120 minutes; step two, draining filtrate at the middle upper part of the sedimentation tank by a pipeline; step three, carrying out gauze filtering to further filter out low-density impurities floating on the surface; step four, adding hydrogen peroxide according to a volume ratio of 100:3, i.e. adding 3 liters of hydrogen peroxide into each 100 liters of filtrate; step five, carrying out secondary filtering by a compact graphite plate and carrying out backwashing on the compact graphite plate for once at intervals of 20 minutes so as to ensure a filtering effect. The sand line cutting fluid recovered by the technical scheme can be recycled; discharge of water pollution is reduced; impurities in the recovered fluid can be collected and stored for secondary use; the recovery method of the sand line cutting fluid can reduce discharge of heavy metal pollution by 70 percent and reduce discharge of nonmetallic harmful substances by 85 percent.
Description
Technical field
The present invention relates to a kind of recovery method of sand wire cutting liquid, belong to cutting semiconductor materials technical field.
Background technology
In carrying out the process of semiconductor machining, the consumption of the sand wire cutting liquid using is very large, heavily contaminated material is contained in general sand wire cutting liquid the inside, can cause larger injury, and directly will emit the waste that also can cause resource with the sand wire cutting liquid of crossing to environment.
Summary of the invention
The recovery method that the object of this invention is to provide a kind of sand wire cutting liquid, solves the pollution that directly discharge brings of sand wire cutting liquid and the problem of waste.
Object of the present invention is carried out specific implementation by the following technical programs:
The recovery method of sand wire cutting liquid, comprising:
The first step is placed 60-120 minute in settling tank;
Second step, discharges the cleaner liquid of settling tank middle and upper part by pipeline;
The 3rd step, carries out filtered through gauze, further the supernatant low density impurity of filtering;
The 4th step, adds hydrogen peroxide according to the ratio of volume ratio 100:3, in every 100 liters of cleaner liquids, adds 3 liters of hydrogen peroxide;
The 5th step, carries out secondary filtration by solid graphite plate, and solid graphite plate will carry out back flushing once in every 20 minutes, assurance filter effect.
The sand wire cutting liquid reclaiming by technique scheme, can reuse, and reduces the discharge that water pollutes, and the impurity that reclaims liquid the inside can be collected and is stored, for secondary; The recovery method of this sand wire cutting liquid, can reduce the discharge of 70% heavy metal contamination, reduces the discharge of 85% nonmetal objectionable impurities.
Embodiment
The recovery method of the sand wire cutting liquid described in the embodiment of the present invention one, comprising:
The first step is placed 60 minutes in settling tank;
Second step, discharges the cleaner liquid of settling tank middle and upper part by pipeline;
The 3rd step, carries out filtered through gauze, further the supernatant low density impurity of filtering;
The 4th step, adds hydrogen peroxide according to the ratio of volume ratio 100:3, in every 100 liters of cleaner liquids, adds 3 liters of hydrogen peroxide;
The 5th step, carries out secondary filtration by solid graphite plate, and solid graphite plate will carry out back flushing once in every 20 minutes, assurance filter effect.
The recovery method of the sand wire cutting liquid described in the embodiment of the present invention two, comprising:
The first step is placed 120 minutes in settling tank;
Second step, discharges the cleaner liquid of settling tank middle and upper part by pipeline;
The 3rd step, carries out filtered through gauze, further the supernatant low density impurity of filtering;
The 4th step, adds hydrogen peroxide according to the ratio of volume ratio 100:3, in every 100 liters of cleaner liquids, adds 3 liters of hydrogen peroxide;
The 5th step, carries out secondary filtration by solid graphite plate, and solid graphite plate will carry out back flushing once in every 20 minutes, assurance filter effect.
The recovery method of the sand wire cutting liquid described in the embodiment of the present invention three, comprising:
The first step is placed 80 minutes in settling tank;
Second step, discharges the cleaner liquid of settling tank middle and upper part by pipeline;
The 3rd step, carries out filtered through gauze, further the supernatant low density impurity of filtering;
The 4th step, adds hydrogen peroxide according to the ratio of volume ratio 100:3, in every 100 liters of cleaner liquids, adds 3 liters of hydrogen peroxide;
The 5th step, carries out secondary filtration by solid graphite plate, and solid graphite plate will carry out back flushing once in every 20 minutes, assurance filter effect.
The sand wire cutting liquid reclaiming by technique scheme, can reuse, and reduces the discharge that water pollutes, and the impurity that reclaims liquid the inside can be collected and is stored, for secondary; The recovery method of this sand wire cutting liquid, can reduce the discharge of 70% heavy metal contamination, reduces the discharge of 85% nonmetal objectionable impurities.
Claims (1)
1. the recovery method of sand wire cutting liquid, comprising:
The first step is placed 60-120 minute in settling tank;
Second step, discharges the cleaner liquid of settling tank middle and upper part by pipeline;
The 3rd step, carries out filtered through gauze, further the supernatant low density impurity of filtering;
The 4th step, adds hydrogen peroxide according to the ratio of volume ratio 100:3, in every 100 liters of cleaner liquids, adds 3 liters of hydrogen peroxide;
The 5th step, carries out secondary filtration by solid graphite plate, and solid graphite plate will carry out back flushing once in every 20 minutes, assurance filter effect.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201310477768.3A CN103508592A (en) | 2013-10-14 | 2013-10-14 | Recovery method of sand line cutting fluid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201310477768.3A CN103508592A (en) | 2013-10-14 | 2013-10-14 | Recovery method of sand line cutting fluid |
Publications (1)
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CN103508592A true CN103508592A (en) | 2014-01-15 |
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Family Applications (1)
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CN201310477768.3A Pending CN103508592A (en) | 2013-10-14 | 2013-10-14 | Recovery method of sand line cutting fluid |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1342746A (en) * | 2001-10-19 | 2002-04-03 | 吴成学 | Process and apparatus set for reclaiming waste cutting liquid of machine processing |
CN101239246A (en) * | 2008-02-20 | 2008-08-13 | 江南大学 | Method for recovering cutting solution from by-product of silicon chip cutting processing |
CN102061215A (en) * | 2011-01-17 | 2011-05-18 | 西安华晶电子技术有限公司 | Decoloring method for recovering cutting fluids through multilineal cutting |
CN102805974A (en) * | 2011-06-02 | 2012-12-05 | 南通三鑫碳素石墨设备有限公司 | Graphite filter screen |
CN102888273A (en) * | 2012-10-17 | 2013-01-23 | 沈阳创达技术交易市场有限公司 | Method for recycling machining waste liquor |
KR20130103892A (en) * | 2012-03-12 | 2013-09-25 | (주)네오텍 | Recycling system of cutting fluid and method thereof |
-
2013
- 2013-10-14 CN CN201310477768.3A patent/CN103508592A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1342746A (en) * | 2001-10-19 | 2002-04-03 | 吴成学 | Process and apparatus set for reclaiming waste cutting liquid of machine processing |
CN101239246A (en) * | 2008-02-20 | 2008-08-13 | 江南大学 | Method for recovering cutting solution from by-product of silicon chip cutting processing |
CN102061215A (en) * | 2011-01-17 | 2011-05-18 | 西安华晶电子技术有限公司 | Decoloring method for recovering cutting fluids through multilineal cutting |
CN102805974A (en) * | 2011-06-02 | 2012-12-05 | 南通三鑫碳素石墨设备有限公司 | Graphite filter screen |
KR20130103892A (en) * | 2012-03-12 | 2013-09-25 | (주)네오텍 | Recycling system of cutting fluid and method thereof |
CN102888273A (en) * | 2012-10-17 | 2013-01-23 | 沈阳创达技术交易市场有限公司 | Method for recycling machining waste liquor |
Non-Patent Citations (1)
Title |
---|
张照元等: "多晶硅切割液废液的回收与利用", 《中国环保产业》 * |
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Application publication date: 20140115 |