CN103499977A - Angle adjusting platform with active-and-passive vibration control function - Google Patents
Angle adjusting platform with active-and-passive vibration control function Download PDFInfo
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- CN103499977A CN103499977A CN201310285391.1A CN201310285391A CN103499977A CN 103499977 A CN103499977 A CN 103499977A CN 201310285391 A CN201310285391 A CN 201310285391A CN 103499977 A CN103499977 A CN 103499977A
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Abstract
Provided is an angle adjusting platform with the active-and-passive vibration control function. The angle adjusting platform with the active-and-passive vibration control function comprises a base, an upper platform and a spherical pair flexible hinge, wherein the upper platform is connected with the base, the spherical pair flexible hinge is arranged between the base and the upper platform in a connected mode, and the upper platform is connected with supports arranged at the periphery of the base through straight-beam type flexible hinges arranged on the four corners of the upper platform. The angle adjusting platform with the active-and-passive vibration control function further comprises two voice coil motor drivers, two active-and-passive vibration controllers and 2-4 limiting mechanisms, wherein the two voice coil motor drivers and the two active-and-passive vibration controllers are fixedly arranged between the base and the upper platform, the limiting mechanisms are fixed to the base, preset gaps are reserved between the limiting mechanisms and the upper platform, the two voice coil motor drivers and the two active-and-passive vibration controllers are symmetrically arranged about the spherical pair flexible hinge to be distributed in a square mode, the voice coil motor drivers and the active-and-passive vibration controllers are opposite in a pairwise mode, the limiting mechanisms are arranged between the voice coil motor drivers and the active-and-passive vibration controllers, and strain gauges are bonded to the surfaces of the straight-beam type flexible hinges, and are electrically connected with the voice coil motor drivers or the active-and-passive vibration controllers close to the positions of the strain gauges respectively. The angle adjusting platform with the active-and-passive vibration control function can achieve accurate and stable angle adjustment.
Description
Technical field
The present invention relates to the moving vibration control technology of angular adjustment and main quilt field, be specifically related to a kind of angular adjustment platform with the moving vibration control of main quilt.
Background technology
The angular adjustment system is widely used in optical engineering, and microelectronics is made, MEMS (micro electro mechanical system), space flight and aviation, the fields such as ultraprecise machine-building and biomedicine.What traditional angular adjustment adopted is drive and control of electric machine, and conventional motors driving control is carried out angular adjustment and generally is comprised of electric machine controller, motor and controlled plant.Conventional motors drives control to carry out angular adjustment and has following defect: one, this tradition angular adjustment is by motor output displacement and power, and general stroke and force rate are larger, but precision is not high; Two, by motor output displacement and power, response speed is slow; Three, the phenomenon of vibration easily appears in motor operation course, causes being difficult to stable angular adjustment; Four,, in actual research work, conventional motors drives to control carries out the angular adjustment inefficiency.
Summary of the invention
The problem existed in order to solve above-mentioned prior art, the object of the present invention is to provide a kind of angular adjustment platform with the moving vibration control of main quilt, and platform of the present invention can be realized accurate, stable angular adjustment.
For reaching above purpose, the present invention adopts following technical scheme:
A kind of angular adjustment platform with the moving vibration control of main quilt, comprise base 6, the upper mounting plate 1 be connected with base 6 surrounding cantilever tip, be connected to the secondary flexible hinge 2 of ball of 1 of base 6 and upper mounting plate, described upper mounting plate 1 is connected with base 6 surrounding supports by the straight beam type flexible hinge 3 on its four angles, also comprise two voice coil motor driver 5 and two moving vibrating controllers 8 of main quilt that are fixed on 1 of base 6 and upper mounting plate and be fixed on base 6 and and upper mounting plate 1 leave 2~4 position-limit mechanisms 7 of prepsetting gap, described two voice coil motor driver 5 and two moving vibrating controllers 8 of main quilt are symmetrical arranged quadrate about the secondary flexible hinge 2 of ball and distribute, and voice coil motor driver 5 is relative in twos with the moving vibrating controller 8 of main quilt, described position-limit mechanism 7 is arranged on voice coil motor driver 5 and main quilt is moved 8 of vibrating controllers, post foil gauge 4 on described straight beam type flexible hinge 3 surfaces, described foil gauge 4 is electrically connected to close voice coil motor driver 5 or the moving vibrating controller 8 of main quilt in its position respectively.
Described voice coil motor driver 5 comprises hollow barrel voice coil motor shell 5-3, be embedded in the voice coil motor permanent magnet 5-5 of hollow barrel voice coil motor shell 5-3 inner bottom part central authorities, described voice coil motor permanent magnet 5-5 top is embedded in voice coil motor permeability magnetic material 5-4 bottom, voice coil motor epoxy resin cylinder 5-1 inserts in the gap of hollow barrel voice coil motor shell 5-3 madial wall and voice coil motor permeability magnetic material 5-4, at the outer wall of described voice coil motor epoxy resin cylinder 5-1, is wound with voice coil motor coil 5-2.
The moving vibrating controller 8 of described main quilt comprises hollow barrel shell 8-3, be embedded in the permanent magnet 8-5 of hollow barrel shell 8-3 inner bottom part central authorities, described permanent magnet 8-5 top is embedded in permeability magnetic material 8-4 bottom, aluminum cylinder 8-1 inserts in the gap of hollow barrel shell 8-3 madial wall and permeability magnetic material 8-4, at the outer wall of described aluminum cylinder 8-1, is wound with coil 8-2.
The secondary flexible hinge 2 of described ball, voice coil motor driver 5, the moving vibrating controller 8 of main quilt are all with bolts with being connected of 6 of bases with upper mounting plate 1 and straight beam type flexible hinge 3.
Compared to the prior art the present invention, has following advantage:
1) the present invention selects voice coil motor driver, utilizes foil gauge to gather displacement signal, the adjusting of angle is carried out to closed-loop control, thereby can realize high-resolution, and high-precision angle is pointed to and regulated, and fast response time.
2) the present invention is with the moving vibrating controller of main quilt, when the voice coil motor driver start and while being subject to external disturbance platform vibration-generating, utilize main quilt to move vibrating controller, not only can realize passive vibration control, and the signal that can utilize the foil gauge on flexible hinge to feed back, platform is carried out to Active Vibration Control, make vibration decay rapidly.
3) supporting mechanism has adopted flexible hinge (the secondary flexible hinge of ball and straight beam type flexible hinge), the characteristic that flexible hinge has utilized resilient material microdeformation and certainly replied, eliminate idle running and the mechanical friction in the transmission process, obtained the displacement resolution of superelevation, reduced the error of mechanism.
The accompanying drawing explanation
Fig. 1 is one-piece construction figure of the present invention.
Fig. 2 is the voice coil motor driver sectional view.
Fig. 3 is the moving vibrating controller sectional view of main quilt.
Fig. 4 is that angular adjustment platform of the present invention is regulated schematic diagram.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
As shown in Figure 1; a kind of angular adjustment platform with the moving vibration control of main quilt of the present invention; comprise base 6; the upper mounting plate 1 be connected with base 6 surrounding cantilever tip; be connected to the secondary flexible hinge 2 of ball of 1 of base 6 and upper mounting plate; described upper mounting plate 1 is connected with base 6 surrounding supports by the straight beam type flexible hinge 3 on its four angles; straight beam type flexible hinge 3 has effectively improved the torsional rigidity of upper mounting plate 1 around vertical direction; prevent that it from unnecessary torsion occurring, and the secondary flexible hinge 2 of ball is had to certain protective effect.Also comprise two voice coil motor driver 5 and two moving vibrating controllers 8 of main quilt that are fixed on 1 of base 6 and upper mounting plate and be fixed on base 6 and and upper mounting plate 1 leave 2~4 position-limit mechanisms 7 of prepsetting gap; be subject to excessive bending and damage for fear of the secondary flexible hinge 2 of the ball at platform center; the present embodiment is provided with 3 position-limit mechanisms 7; angle of regulation range that can limiting mechanism by regulation position limiting mechanism 7; and idle the time, can utilize position-limit mechanism 7 that upper mounting plate 1 is clamped, therefore reach the purpose of the secondary flexible hinge 2 of protective device ball.Described two voice coil motor driver 5 and two moving vibrating controllers 8 of main quilt are symmetrical arranged quadrate about the secondary flexible hinge 2 of ball and distribute, and voice coil motor driver 5 is relative in twos with the moving vibrating controller 8 of main quilt, described position-limit mechanism 7 is arranged on voice coil motor driver 5 and main quilt is moved 8 of vibrating controllers, post foil gauge 4 on described straight beam type flexible hinge 3 surfaces, described foil gauge 4 is electrically connected to close voice coil motor driver 5 or the moving vibrating controller 8 of main quilt in its position respectively.Foil gauge 4 and voice coil motor driver 5 are electrically connected to, and utilize closed-loop control can obtain exactly the sensing angle of platform; The moving vibrating controller 8 of foil gauge 4 and main quilt is electrically connected to, and the ACTIVE CONTROL of moving vibrating controller 8 by main quilt can make the vibration of mechanism decay soon.Meanwhile, the passive vibration control of the moving vibrating controller 8 of main quilt can suppress vibration in real time.
As shown in Figure 2, described voice coil motor driver 5 comprises hollow barrel voice coil motor shell 5-3, be embedded in the voice coil motor permanent magnet 5-5 of hollow barrel voice coil motor shell 5-3 inner bottom part central authorities, described voice coil motor permanent magnet 5-5 top is embedded in voice coil motor permeability magnetic material 5-4 bottom, voice coil motor epoxy resin cylinder 5-1 inserts in the gap of hollow barrel voice coil motor shell 5-3 madial wall and voice coil motor permeability magnetic material 5-4, at the outer wall of described voice coil motor epoxy resin cylinder 5-1, is wound with voice coil motor coil 5-2.
As shown in Figure 3, the moving vibrating controller 8 of described main quilt comprises hollow barrel shell 8-3, be embedded in the permanent magnet 8-5 of hollow barrel shell 8-3 inner bottom part central authorities, described permanent magnet 8-5 top is embedded in permeability magnetic material 8-4 bottom, epoxy resin cylinder 8-1 inserts in the gap of hollow barrel shell 8-3 madial wall and permeability magnetic material 8-4, at the outer wall of described epoxy resin cylinder 8-1, is wound with coil 8-2.
As the preferred embodiment of the present invention, the secondary flexible hinge 2 of described ball, voice coil motor driver 5, the moving vibrating controller 8 of main quilt are all with bolts with being connected of 6 of bases with upper mounting plate 1 and straight beam type flexible hinge 3.
Principle of work of the present invention is: when the specific current signal of voice coil motor driver 5 input, the voice coil motor coil 5-2 of energising is in the uniform magnetic field of voice coil motor permeability magnetic material 5-4 and voice coil motor shell 5-3 formation, can make it produce linear driving force, the certain start displacement of voice coil motor driver 5 output, upper mounting plate 1 can have the deflection of an angle thereupon.The strain signal of foil gauge 4 outputs by straight beam type flexible hinge 3, feed back to the voice coil motor driver 5 with its electrical connection after treatment, utilizes closed-loop control to realize accurate angular adjustment.The start displacement that can produce micron dimension due to voice coil motor driver 5, so the angular adjustment resolution of angular adjustment platform of the present invention can reach differential of the arc level.Two voice coil motor driver 5 push-and-pull starts in phase, can realize two rotary freedoms, and its platform points to the angle range of adjustment as shown in Figure 4.During voice coil motor driver 5 start and be subject to extraneous disturbance, all can make angular adjustment platform of the present invention produce vibration, if rely on the damping of platform own to reach vibration damping to stable, often need the time of growing, so vibration control be very important.Foil gauge 4 on straight beam type flexible hinge 3 can be exported the signal of a vibration, signal is processed with controlled signal feedback to the moving vibrating controller 8 of main quilt, a power contrary with direction of vibration (resistance Buddhist nun) can be produced in the uniform magnetic field that current signal forms by permeability magnetic material 8-4 and shell 8-3 at permanent magnet 8-5 by coil 8-2, vibration decay rapidly can be made.Meanwhile, the moving vibrating controller 8 of main quilt can produce eddy current while adopting aluminum cylinder 8-1 to vibrate in magnetic field, thereby has played the passive vibration control effect.
Claims (4)
1. the angular adjustment platform with the moving vibration control of main quilt, comprise base (6), the upper mounting plate (1) be connected with base (6) surrounding cantilever tip, be connected to the secondary flexible hinge (2) of ball between base (6) and upper mounting plate (1), it is characterized in that: described upper mounting plate (1) is connected with base (6) surrounding support by the straight beam type flexible hinge (3) on its four angles, also comprise two voice coil motor driver (5) of being fixed between base (6) and upper mounting plate (1) and two moving vibrating controllers (8) of main quilt and be fixed on base (6) upper and and upper mounting plate (1) leave 2~4 position-limit mechanisms (7) of prepsetting gap, described two voice coil motor driver (5) and two moving vibrating controllers (8) of main quilt are symmetrical arranged quadrate about the secondary flexible hinge of ball (2) and distribute, and voice coil motor driver (5) is relative in twos with the moving vibrating controller (8) of main quilt, described position-limit mechanism (7) is arranged between voice coil motor driver (5) and the moving vibrating controller (8) of main quilt, post foil gauge (4) on described straight beam type flexible hinge (3) surface, described foil gauge (4) voice coil motor driver (5) close with its position or the moving vibrating controller (8) of main quilt respectively is electrically connected to.
2. a kind of angular adjustment platform with the moving vibration control of main quilt according to claim 1, it is characterized in that: described voice coil motor driver (5) comprises hollow barrel voice coil motor shell (5-3), be embedded in the voice coil motor permanent magnet (5-5) of hollow barrel voice coil motor shell (5-3) inner bottom part central authorities, described voice coil motor permanent magnet (5-5) top is embedded in voice coil motor permeability magnetic material (5-4) bottom, voice coil motor epoxy resin cylinder (5-1) inserts in the gap of hollow barrel voice coil motor shell (5-3) madial wall and voice coil motor permeability magnetic material (5-4), outer wall at described voice coil motor epoxy resin cylinder (5-1) is wound with voice coil motor coil (5-2).
3. a kind of angular adjustment platform with the moving vibration control of main quilt according to claim 1, it is characterized in that: described main quilt is moved vibrating controller (8) and is comprised hollow barrel shell (8-3), be embedded in the permanent magnet (8-5) of hollow barrel shell (8-3) inner bottom part central authorities, described permanent magnet (8-5) top is embedded in permeability magnetic material (8-4) bottom, aluminum cylinder (8-1) inserts in the gap of hollow barrel shell (8-3) madial wall and permeability magnetic material (8-4), at the outer wall of described aluminum cylinder (8-1), is wound with coil (8-2).
4. a kind of angular adjustment platform with the moving vibration control of main quilt according to claim 1 is characterized in that: being connected between the secondary flexible hinge (2) of described ball, voice coil motor driver (5), the moving vibrating controller (8) of main quilt and upper mounting plate (1) and straight beam type flexible hinge (3) and base (6) is all with bolts.
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104074904A (en) * | 2014-06-19 | 2014-10-01 | 西安交通大学 | Active vibration control system and method of flexible structure based on voice coil motor |
CN104589147A (en) * | 2015-01-08 | 2015-05-06 | 华中科技大学 | Multi-mechanical-arm follow-up restraining device for milling vibration of thin-walled workpiece |
CN105680719A (en) * | 2016-03-24 | 2016-06-15 | 西安交通大学 | Actuating platform with functions of slight swing prevention and pointing regulation and actuating method |
CN106826722A (en) * | 2017-03-06 | 2017-06-13 | 天津大学 | A kind of flexible adjust automatically lower platform mechanism for ultrasonic machining unit |
CN107339563A (en) * | 2017-08-30 | 2017-11-10 | 武汉科技大学 | A kind of reverse-engineering scanning bracket |
CN107966995A (en) * | 2017-12-01 | 2018-04-27 | 西安交通大学 | A kind of the angular adjustment platform and adjusting method of the driving of normal direction electromagnetic stress |
CN108146647A (en) * | 2017-12-25 | 2018-06-12 | 北京航空航天大学 | Photoelectric nacelle based on opposing torque is surely as control device and control method |
CN109732439A (en) * | 2019-03-04 | 2019-05-10 | 中国工程物理研究院激光聚变研究中心 | A kind of optical element rim of the mouth diameter polishing clamp |
CN110017959A (en) * | 2019-04-11 | 2019-07-16 | 上海卫星工程研究所 | The method for carrying out micro-vibration simulation using voice coil-type linear motor |
CN113059537A (en) * | 2021-02-26 | 2021-07-02 | 佛山市华道超精科技有限公司 | Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench |
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US6330828B1 (en) * | 1999-04-21 | 2001-12-18 | Seagate Technology Llc | Method and apparatus for subjecting a device to rotational vibration |
CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
CN101673118A (en) * | 2009-09-24 | 2010-03-17 | 同济大学 | Combined type transmission variable-angle micrometric displacement regulation device |
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Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104074904A (en) * | 2014-06-19 | 2014-10-01 | 西安交通大学 | Active vibration control system and method of flexible structure based on voice coil motor |
CN104074904B (en) * | 2014-06-19 | 2016-02-24 | 西安交通大学 | A kind of Vibration Active Control of Flexible Structure system and method based on voice coil motor |
CN104589147A (en) * | 2015-01-08 | 2015-05-06 | 华中科技大学 | Multi-mechanical-arm follow-up restraining device for milling vibration of thin-walled workpiece |
CN105680719B (en) * | 2016-03-24 | 2017-11-28 | 西安交通大学 | Suppress and point to regulatory function with micro- swing and make moving platform and start method |
CN105680719A (en) * | 2016-03-24 | 2016-06-15 | 西安交通大学 | Actuating platform with functions of slight swing prevention and pointing regulation and actuating method |
CN106826722A (en) * | 2017-03-06 | 2017-06-13 | 天津大学 | A kind of flexible adjust automatically lower platform mechanism for ultrasonic machining unit |
CN107339563A (en) * | 2017-08-30 | 2017-11-10 | 武汉科技大学 | A kind of reverse-engineering scanning bracket |
CN107966995A (en) * | 2017-12-01 | 2018-04-27 | 西安交通大学 | A kind of the angular adjustment platform and adjusting method of the driving of normal direction electromagnetic stress |
CN108146647A (en) * | 2017-12-25 | 2018-06-12 | 北京航空航天大学 | Photoelectric nacelle based on opposing torque is surely as control device and control method |
CN108146647B (en) * | 2017-12-25 | 2019-02-01 | 北京航空航天大学 | Photoelectric nacelle based on opposing torque is surely as control device and control method |
CN109732439A (en) * | 2019-03-04 | 2019-05-10 | 中国工程物理研究院激光聚变研究中心 | A kind of optical element rim of the mouth diameter polishing clamp |
CN110017959A (en) * | 2019-04-11 | 2019-07-16 | 上海卫星工程研究所 | The method for carrying out micro-vibration simulation using voice coil-type linear motor |
CN113059537A (en) * | 2021-02-26 | 2021-07-02 | 佛山市华道超精科技有限公司 | Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench |
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