CN103499308A - Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform - Google Patents
Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform Download PDFInfo
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Abstract
The invention relates to an independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform and belongs to precise scientific microscopic observation instruments. The platform is composed of X-axis, Y-axis and Z-axis precise movable assemblies, X-axis and Z-axis rotary assemblies, X-axis, Y-axis and Z-axis flexible hinge type ultra-precise following assemblies and a super-view deep observation lens. The X-axis, Y-axis and Z-axis precise movable assemblies and the X-axis and Z-axis rotary assemblies can be used for respectively carrying out precise adjustment on relative positions and relative angles of the super-view deep observation lens in X, Y and Z directions of an observation test piece; the X-axis, Y-axis and Z-axis flexible hinge type ultra-precise following assemblies can realize active following of the test piece in microseismic movement relative to a load in the X, Y and Z directions; and the Y-axis precise movable assembly can assist the super-view deep lens in zooming. The super-view deep lens is used for carrying out super-view deep observation on the shape of a microcosmic surface of the test piece. The independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform has the advantages of ingenious volume, precise driving, good following effects, high integration and strong practicability, can be used independently and can also be combined other equipment to use.
Description
Technical field
The present invention relates to exact science microscopic observation instrument, particularly a kind of super depth of field microscopic observation, accurate free-standing five degree of freedom ultraprecise material in situ test microscopic observation platform that drives, initiatively follows of integrating.Can provide in-situ monitoring for the various types of materials under the different loads state, disclose mechanical characteristic and the micromechanism of damage of material under micro-nano-scale, for the development of the hi-tech industries such as new material new process, precision optics, semiconductor technology, nanometer engineering, MEMS (micro electro mechanical system) (MEMS) technology, there is very important impetus.
Background technology
The testing of materials technology is important means and the method for Materials Science and Engineering application.All parts all inevitably bear in actual use to be puted forth effort or the effect of temperature, the failure phenomenon such as in certain service condition with after service time, material will deform, weares and teares, surperficial pit.Microscopic observation is widely used technology in failure analysis, by material sample being provided to mark analysis, analysis on cracks and fracture analysis, with key property and the Laws of Mechanics that obtains material.
The in-situ mechanical test refers under the micro-/ nano yardstick to be carried out in the process of Mechanics Performance Testing material for test, by instruments such as optical microscope, electron microscope and atomic force microscopes, microdeformation, the damage of material under various loads and goods generation thereof is carried out to omnidistance dynamically a kind of mechanical test means of on-line monitoring.This technology has disclosed the correlativity rule between size, kind and the material property of mechanical behavior, micromechanism of damage and load of various types of materials and goods thereof from microcosmic point.
Current in-situ observation equipment remains in the some shortcomings part: (1) current commercial microscope is difficult to meet the lens moving ability of large stroke, and the in-situ observation System for Large-scale Specimen is existed to restriction; (2) due to the impact of external environment, the test specimen under some load is self state in microseismic activity often, and current commercial microscope is difficult to accomplish to synchronously the following of test specimen, to guarantee to be observed the picture that is stable in zone; (3) cavity space of surface sweeping electron microscope, atomic force microscope etc. is very limited, is difficult to the test specimen under macro-scale is carried out to in-situ observation.
Therefore, design and a kind ofly there is the large stroke of five degree of freedom, can initiatively follow, be easy to integrated ultraprecise material in situ test microscopic observation platform tool and be of great significance.
Summary of the invention
The object of the present invention is to provide a kind of free-standing five degree of freedom ultraprecise material in situ test microscopic observation platform, solved the problems referred to above that prior art exists.The present invention can be applied in the observation of material microscopic appearance.By the accurate driven unit of five degree of freedom, realize super depth of field camera lens and be observed relative position between test specimen carrying out the five degree of freedom minute adjustment; Flexible hinge chain type X, Y, Z axis ultraprecise is followed assembly can realize that X, Y, Z tri-directions are with respect to observing the ultraprecise of test specimen follow in microseismic activity, make super depth of field camera lens and be observed test specimen and keep relative static, X, Y, Z axis flexible hinge chain type ultraprecise is followed assembly can realize that X, Y, Z tri-directions follow with respect to the active of test specimen in microseismic activity under load, realizes the in-situ observation to test specimen under different loads; The Y-axis ultraprecise is followed assembly also can assist superfinishing god lens zoom; By super depth of field camera lens observation, can obtain the stable microcosmic three-dimensional appearance image of test specimen.The present invention can, independently as observation platform, realize the test specimen microscopic appearance is observed; Also can be installed on testing machine and other testing apparatuss, the test specimen under integrated active subsequent load in micro-vibration, carry out real-time in-situ observation to microdeformation, the Damage and fracture process of test specimen; Also can be installed on lathe, the machine tool element in work is had a try and followed, observe online and test, can obtain machine tool element microcosmic three-dimensional appearance under real bearing state, for the design improvement of machine tool element provides critical data.Integration is high, practical, not only can independently use but also can use with other device combinations.
Above-mentioned purpose of the present invention is achieved through the following technical solutions:
Stand alone type five degree of freedom ultraprecise material in situ test microscopic observation platform, comprise that X-axis moving assembly 14, the moving assembly 12 of y-axis shift, Z axis moving assembly 11, X-axis runner assembly 7, Z axis runner assembly 6, X-Y-Z tri-axles follow assembly, super depth of field camera lens 9; The moving assembly 12 of described y-axis shift is installed on X-axis moving assembly 14, and Z axis moving assembly 11 is installed on the moving assembly 12 of y-axis shift; Following assembly base plate 1 is installed on Z axis moving assembly 11, the Y-Z axle that X-Y-Z tri-axles are followed assembly is followed assembly 2 and is installed on and follows on assembly base plate 1 by socket head cap screw 3, and X-axis is followed assembly 5 and followed assembly 2 and be connected by following assembly web joint (4) and Y-Z axle; Z axis runner assembly 6 is installed on X-axis and follows on assembly 5, and X-axis runner assembly 7 is installed on Z axis runner assembly 6; Super depth of field observation camera lens 9 is fixed in the hole of super depth of field camera lens fixed block 10, and super depth of field camera lens fixed block 10 is connected with X-axis runner assembly 7 by microscope coupling shaft 8.
Described X-axis moving assembly 14 provides accurate X-direction displacement, provide power by servomotor 30, after speed reduction unit 29 slows down, drive ball-screw 20 output straight-line displacements, X-axis moving assembly 14 is by line slideway 18 support guides of the double-slider of both sides, limit switch 15 is equipped with respectively in line slideway 18 both sides, for prompting, completes Stroke Control and position limitation protection; Described servomotor 30 is connected with speed reduction unit 29 by screw, and speed reduction unit 29 is planetary reducer, and reduction gear ratio is 33, and precision is 3 minutes; Speed reduction unit 29 is fixed on motor cabinet 28 by screw, and motor cabinet 28 is fixed in the corresponding threaded hole of X-axis base plate 25; Speed reduction unit 29 output shafts are connected with the end of ball-screw 20 by shaft coupling 27, and ball-screw 20 two ends are supported by EF leading screw seat 26 and EK leading screw seat 19 respectively, and EF leading screw seat 26 is separately fixed on X-axis base plate 25 with EK leading screw seat 19; Spring 23 is enclosed within on ball-screw 20, and two ends are connected by screw with feed screw nut 22 and EF leading screw seat 26 respectively, and feed screw nut 22 is installed in nut seat 21 holes, passes through screw fastening; Two slide blocks 24 are installed, to strengthen the anchorage force to upper working table on line slideway 18; Line slideway 18 by screw fastening on X-axis base plate 25; Limit switch 15 is installed in the threaded hole on limit switch base 16, uses former and later two nuts 17 that limit switch 15 is fixed on limit switch base 16, and limit switch base 16 is screwed on X-axis base plate 25.
Described servomotor 30 is with 20 scramblers and keep detent, make motor can reach nano level angular displacement resolution, and relative moving assembly has self-lock ability; Relative displacement between the moving assembly 12 of Z axis moving assembly 11 and y-axis shift detects by displacement of the lines formula grating scale 13, to realize the closed-loop control to the Y-axis displacement; The displacement detecting principle of X, Z axis as previously mentioned.
The connected mode that described y-axis shift moves in assembly 12, Z axis moving assembly 11 is identical with X-direction moving assembly 14; Y-Z axle web joint 31 in described Z axis moving assembly 11 is connected by screw fastening with the moving assembly 12 of y-axis shift; Z axis base plate 34 is by screw and mutual vertical connection of Y-Z axle web joint 31, web joint 32 is connected to Z axis base plate 34 and Y-Z axle web joint 31 two ends with set square 33, play the effect that connects and support two plates 34,31, and reserved the space that Z direction driving-chain is arranged.
Described X-Y-Z tri-axles are followed assembly and are followed assembly 2 by the Y-Z axle and follow assembly 5 with X-direction and form, described Y-Z direction of principal axis is followed assembly 2 and is followed assembly 5 with X-direction and be connected by the L shaped assembly web joint 4 of following, and makes X-direction flexible hinge 42 mutually vertical to flexible hinge 35 with Y-Z; Can realize closed-loop control in conjunction with being arranged near the capacitive displacement transducer be observed test specimen, the Y-Z direction of principal axis follow assembly 2 and X-direction followed assembly 5 together with response can realize that the X-Y-Z three-shaft linkage follows.
Described Y-Z axle is followed assembly 2 and is comprised of to flexible hinge 35, wedge 36, piezoelectric ceramics 37 Y-Z, and described Y-Z is fixed on and follows on assembly base plate 1 by three attachment screws to flexible hinge 35; Y-Z is comprised of two orthogonal parallel four-bar linkages to flexible hinge 35, within the Y-direction parallel four-bar linkage is nested in the Z-direction parallel four-bar linkage; Piezoelectric effect by piezoelectric ceramics 37 provides driving force, and the Z-direction parallel four-bar linkage consists of two connecting link section I 38 and Y-direction parallel four-bar linkage; The Y-direction parallel four-bar linkage consists of two connecting link section II 40 and mobile position I 39; Wedge 36, for adjusting piezoelectric ceramics 37 and the gap of Y-Z to flexible hinge 35, can carry out precompressed to piezoelectric ceramics 37 simultaneously.
The X-direction flexible hinge 42 that described X-axis is followed in assembly 5 is fixed on and follows on assembly web joint 4 by two attachment screws, drive principle as previously mentioned, X-direction flexible hinge 42 comprises an X-direction parallel four-bar linkage, the X-direction parallel four-bar linkage consists of two connecting link section III 43 and mobile position II 41, can realize that X-axis follows.
The nut seat 21 of described X-axis moving assembly 14 at motion process medi-spring 23 all the time in extended state, be aided with the ball of ball-screw 20 through the zero stand-off pre-service, make feed screw nut 22 eliminate gap in to-and-fro movement, improved the precision of X-axis moving assembly 14; The ball-screw of Y, Z axis disappears the gap method as previously mentioned.
The mobile position II 41 that the multi-functional web joint 47 of described Z axis runner assembly 6 is followed in assembly 5 by screw and X-axis is connected; Runner assembly provides power by steering wheel 46, and X-axis runner assembly 7 is connected by U-shaped web joint 45 with Z axis runner assembly 6, and the output shaft direction is mutually vertical; Microscope coupling shaft 8 is installed on X-axis runner assembly 7, and microscope coupling shaft 8 is connected by the axis hole interference with super depth of field camera lens fixed block 10, and super depth of field camera lens 9 is fixedly connected with by axis hole with super depth of field camera lens fixed block 10.
Described super depth of field camera lens 9 is installed on the top of five degree of freedom moving link, and X, Y, Z axis moving assembly 14,12,11 respectively has the stroke capability of 100mm, and displacement accuracy is 0.1 μ m, makes super depth of field camera lens 9 have very large moving range; X, Z axis runner assembly 7,6 respectively have 180 ° of angular displacement abilities, and corner accuracy is 0.18 °, and super depth of field camera lens 9 can be observed the different angles of test specimen; X, Y-Z axle are followed assembly 5,2 respectively to have stroke are the ultraprecise micrometric displacement ability that 30 μ m, precision are 10nm, while making super depth of field camera lens 9 be subject to the external environment vibrations, have the good response of following; The Y-Z axle is followed assembly 2 simultaneously can provide auxiliary zoom for super depth of field camera lens 9; The super depth of field camera lens 9 of selecting has very wide amplification range, the camera lens of replaceable 100 ~ 1000 times of zoom capabilities, 250 ~ 2500 times of zoom capabilities, 500 ~ 5000 times of zoom capabilities; Super depth of field camera lens 9 has larger depth of field ability, can obtain microcosmic and be observed the test piece three-dimensional feature image.
Beneficial effect of the present invention is: compared with prior art, the present invention have the volume exquisiteness, accurate drive, follow effective, be easy to the advantages such as integrated.Realize super depth of field camera lens and be observed relative position between test specimen carrying out the five degree of freedom minute adjustment by the accurate driven unit of five degree of freedom, make super depth of field camera lens there is larger observation scope; X-Y-Z tri-axles are followed assembly can realize that X, Y, Z tri-directions follow with respect to the ultraprecise of observation test specimen, to obtain the clear micro image of the test specimen in relative microseismic activity; By super depth of field camera lens observation, obtain the stable microcosmic three-dimensional appearance image of test specimen.The present invention can, independently as observation platform, realize the test specimen microscopic appearance is observed; Also can be installed on testing machine and other testing apparatuss, the test specimen under integrated active subsequent load in micro-vibration, carry out real-time in-situ observation to microdeformation, the Damage and fracture process of test specimen; Also can be installed on lathe, the machine tool element in work is had a try and followed, observe online and test, can obtain machine tool element microcosmic three-dimensional appearance under real bearing state, for the design improvement of machine tool element provides critical data.Integration is high, practical, not only can independently use but also can use with other device combinations.
The accompanying drawing explanation
Accompanying drawing described herein is used to provide a further understanding of the present invention, forms the application's a part, and illustrative example of the present invention and explanation thereof the present invention do not form inappropriate limitation of the present invention for explaining.
Fig. 1 is agent structure schematic diagram of the present invention;
The structural representation that Fig. 2 is X-axis moving assembly of the present invention;
The structural representation that Fig. 3 is the moving assembly of y-axis shift of the present invention;
The structural representation that Fig. 4 is Z axis moving assembly of the present invention;
Fig. 5 is the structural representation that Y-Z axle of the present invention is followed assembly;
Fig. 6 is the structural representation that X-axis of the present invention is followed assembly;
The structural representation that Fig. 7 is super depth of field camera lens of the present invention and X, Z axis runner assembly.
In figure: 1, follow the assembly base plate; 2, the Y-Z axle is followed assembly; 3, socket head cap screw; 4, follow the assembly web joint; 5, X-axis is followed assembly; 6, Z axis runner assembly; 7, X-axis runner assembly; 8, microscope coupling shaft; 9, super depth of field camera lens; 10, super depth of field camera lens fixed block; 11, Z axis moving assembly; 12, the moving assembly of y-axis shift; 13, displacement of the lines formula grating scale; 14, X-axis moving assembly; 15, limit switch; 16, limit switch base; 17, nut; 18, line slideway; 19, EK leading screw seat; 20, ball-screw; 21, nut seat; 22, feed screw nut; 23, spring; 24, slide block; 25, X-axis base plate; 26, EF leading screw seat; 27, shaft coupling; 28, motor cabinet; 29, speed reduction unit; 30, servomotor; 31, Y-Z axle web joint; 32, web joint; 33, set square; 34, Z axis base plate; 35, Y-Z is to flexible hinge; 36, wedge; 37, piezoelectric ceramics; 38, connecting link section I; 39, mobile position I; 40, connecting link section II; 41, mobile position II; 42, X-direction flexible hinge; 43, connecting link section III; 44, output wheel; 45, U-shaped web joint; 46, steering wheel; 47, multi-functional web joint.
Embodiment
Further illustrate detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Referring to shown in Fig. 1 to Fig. 7, free-standing five degree of freedom ultraprecise material in situ test microscopic observation platform of the present invention is mainly by X, Y, Z axis moving assembly 14,12,11, X, Z axis runner assembly 7,6, X, Y-Z axle flexible hinge chain type ultraprecise are followed assembly 5,2 and super depth of field observation camera lens 9 compositions.
The moving assembly 12 of described y-axis shift is installed on X-axis moving assembly 14, and Z axis moving assembly 11 is installed on the moving assembly 12 of y-axis shift; Follow assembly base plate 1 and be installed on Z axis moving assembly 11, the Y-Z axle is followed assembly 2 and is installed on and follows on assembly base plate 1 by socket head cap screw 3, and X-axis is followed assembly 5 and followed assembly 2 and be connected by following assembly web joint (4) and Y-Z axle; Z axis runner assembly 6 is installed on X-axis and follows on assembly 5, and X-axis runner assembly 7 is installed on Z axis runner assembly 6; Super depth of field observation camera lens 9 is fixed in the hole of super depth of field camera lens fixed block 10, and super depth of field camera lens fixed block 10 is connected with X-axis runner assembly 7 by microscope coupling shaft 8.
The servomotor be equipped with in described X, Y, Z axis moving assembly 14,12,11 is with 20 scramblers and keep detent, make motor can reach nano level angular displacement resolution, and relative moving assembly has self-lock ability.Detection line displacement-type grating scale 13 is for detection of relative displacement between Z axis moving assembly 11 and the moving assembly 12 of y-axis shift, to realize the closed-loop control to the Y-axis displacement.The displacement detecting principle of X, Z axis as previously mentioned.
Shown in Figure 2; described X-axis moving assembly 14 can provide accurate X-direction displacement; provide power by servomotor 30; after speed reduction unit 29 slows down; drive ball-screw 20 output straight-line displacements; the accurate moving assembly 14 of X-direction relies on double-slider guide rail 18 support guides of both sides, and limit switch 15 is equipped with respectively in line slideway 18 both sides, for prompting, completes Stroke Control and position limitation protection.Described servomotor 30 is connected with speed reduction unit 29 by screw, and speed reduction unit 29 is planetary reducer, and reduction gear ratio is 33, and precision is 3 minutes; Speed reduction unit 29 is fixed on motor cabinet 28 by screw, and motor cabinet 28 is fixed in the corresponding threaded hole of X-axis base plate 25; Speed reduction unit 29 output shafts are connected with the end of ball-screw 20 by shaft coupling 27, and ball-screw 20 two ends are supported by EF leading screw seat 26 and EK leading screw seat 19 respectively, and EF leading screw seat 26 is fixed on X-axis base plate 25 with EK leading screw seat 19; Spring 23 is enclosed within on ball-screw 20, and two ends are connected by screw with feed screw nut 22 and EF leading screw seat 26 respectively, and feed screw nut 22 is installed in nut seat 21 holes, passes through screw fastening; Two slide blocks 24 are installed, to strengthen the anchorage force to upper working table on line slideway 18; Line slideway 18 by screw fastening on X-axis base plate 25; Limit switch 15 is installed in the threaded hole on limit switch base 16, uses former and later two nuts 17 that limit switch 15 is fixed on limit switch base 16, and limit switch base 16 is screwed on X-axis base plate 25.
The nut seat 21 of described X-axis moving assembly 14 at motion process medi-spring 23 all the time in extended state, be aided with the ball of ball-screw 20 through the zero stand-off pre-service, make feed screw nut 22 eliminate gap in to-and-fro movement, improved the precision of X-axis moving assembly 14.The ball-screw of Y, Z axis disappears the gap method as previously mentioned.
Shown in Fig. 3 and Fig. 4, the connected mode that described y-axis shift moves in assembly 12, Z axis moving assembly 11 is similar to X-direction moving assembly 14.Y-Z axle web joint 31 in described Z axis moving assembly 11 is connected by screw fastening with the moving assembly 12 of y-axis shift; Z axis base plate 34 is by screw and mutual vertical connection of Y-Z axle web joint 31, web joint 32 is connected to Z axis base plate 34 and Y-Z axle web joint 31 two ends with set square 33, play the effect that connects and support two plates 34,31, and reserved the space that Z direction driving-chain is arranged.
Shown in Fig. 5 and 6, described X-Y-Z tri-axles are followed assembly and are followed assembly 2 by the Y-Z axle and follow assembly 5 with X-direction and form.Described Y-Z direction of principal axis is followed assembly 2 and is followed assembly 5 with X-direction and be connected by the L shaped assembly web joint 4 of following, and makes X-direction flexible hinge 42 mutually vertical to flexible hinge 35 with Y-Z; The Y-Z direction of principal axis follow assembly 2 and X-direction followed assembly 5 together with response can realize that the X-Y-Z three-shaft linkage follows.
Described Y-Z axle is followed assembly 2 and is comprised of to flexible hinge 35, wedge 36, piezoelectric ceramics 37 Y-Z.Described Y-Z is fixed on and follows on assembly base plate 1 by three attachment screws to flexible hinge 35; Y-Z is comprised of two orthogonal parallel four-bar linkages to flexible hinge 35, within the Y-direction parallel four-bar linkage is nested in the Z-direction parallel four-bar linkage; Utilize the piezoelectric effect of piezoelectric ceramics 37 that driving force is provided, the Z-direction parallel four-bar linkage consists of two connecting link section I 38 and Y-direction parallel four-bar linkage; The Y-direction parallel four-bar linkage consists of two connecting link section II 40 and mobile position I 39; Wedge 36 is for adjusting piezoelectric ceramics 37 and the gap of Y-Z to flexible hinge 35, and the while can be to piezoelectric ceramics 37 precompressed processing.
The X-direction flexible hinge 42 that described X-axis is followed in assembly 5 is fixed on and follows on assembly web joint 4 by two attachment screws, drive principle as previously mentioned, X-direction flexible hinge 42 comprises an X-direction parallel four-bar linkage, the X-direction parallel four-bar linkage consists of two connecting link section III 43 and mobile position II 41, can realize that X-axis follows.
Shown in Figure 7, the mobile position II 41 that the multi-functional web joint 47 of described Z axis runner assembly 6 is followed in assembly 5 by screw and X-axis is connected; Runner assembly provides power by steering wheel 46, and X-axis runner assembly 7 is connected by U-shaped web joint 45 with Z axis runner assembly 6, and the output shaft direction is mutually vertical; Microscope coupling shaft 8 is installed on X-axis runner assembly 7, and microscope coupling shaft 8 is connected by the axis hole interference with super depth of field camera lens fixed block 10, and super depth of field camera lens 9 is fixedly connected with by axis hole with super depth of field camera lens fixed block 10.
Described super depth of field camera lens 9 is installed on the top of five degree of freedom moving link, and X, Y, Z axis moving assembly 14,12,11 respectively has the stroke capability of 100mm, and displacement accuracy is 0.1 μ m, makes super depth of field camera lens 9 have very large moving range; X, Z axis runner assembly 7,6 respectively have 180 ° of angular displacement abilities, and corner accuracy is 0.18 °, and super depth of field camera lens 9 can be observed the different angles of test specimen; X, Y, Z axis is followed assembly 5,2, and respectively to have stroke be the ultraprecise micrometric displacement ability that 30 μ m, precision are 10nm, while making super depth of field camera lens 9 be subject to the external environment vibrations, has the good response of following; The Y-Z axle is followed assembly 2 simultaneously can provide auxiliary zoom for super depth of field camera lens 9; The super depth of field camera lens 9 of selecting has very wide amplification range, the camera lens of replaceable 100 ~ 1000 times of zoom capabilities, 250 ~ 2500 times of zoom capabilities, 500 ~ 5000 times of zoom capabilities; Super depth of field camera lens 9 has larger depth of field ability, can obtain microcosmic and be observed the test piece three-dimensional feature image.
The foregoing is only preferred embodiment of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.All any modifications made for the present invention, be equal to replacement, improvement etc., within protection scope of the present invention all should be included in.
Claims (10)
1. a free-standing five degree of freedom ultraprecise material in situ test microscopic observation platform is characterized in that: comprise that X-axis moving assembly (14), the moving assembly (12) of y-axis shift, Z axis moving assembly (11), X-axis runner assembly (7), Z axis runner assembly (6), X-Y-Z tri-axles follow assembly, super depth of field camera lens (9); Described y-axis shift moves assembly (12) and is installed on X-axis moving assembly (14), and Z axis moving assembly (11) is installed on the moving assembly (12) of y-axis shift; Following assembly base plate (1) is installed on Z axis moving assembly (11), the Y-Z axle that X-Y-Z tri-axles are followed assembly is followed assembly (2) and is installed on and follows on assembly base plate (1) by socket head cap screw (3), and X-axis is followed assembly (5) and followed assembly (2) and be connected by following assembly web joint (4) and Y-Z axle; Z axis runner assembly (6) is installed on X-axis and follows on assembly (5), and X-axis runner assembly (7) is installed on Z axis runner assembly (6); Super depth of field observation camera lens (9) is fixed in the hole of super depth of field camera lens fixed block (10), and super depth of field camera lens fixed block (10) is connected with X-axis runner assembly (7) by microscope coupling shaft (8).
2. free-standing five degree of freedom ultraprecise material in situ according to claim 1 is tested the microscopic observation platform, it is characterized in that: described X-axis moving assembly (14) provides accurate X-direction displacement, provide power by servomotor (30), after speed reduction unit (29) slows down, drive ball-screw (20) output straight-line displacement, X-axis moving assembly (14) is by line slideway (18) support guide of the double-slider of both sides, limit switch (15) is equipped with respectively in line slideway (18) both sides, for prompting, completes Stroke Control and position limitation protection; Described servomotor (30) is connected with speed reduction unit (29) by screw, and speed reduction unit (29) is planetary reducer; Speed reduction unit (29) is fixed on motor cabinet (28) by screw, and motor cabinet (28) is fixed in the corresponding threaded hole of X-axis base plate (25); Speed reduction unit (29) output shaft is connected with the end of ball-screw (20) by shaft coupling (27), ball-screw (20) two ends are supported by EF leading screw seat (26) and EK leading screw seat (19) respectively, and EF leading screw seat (26) is separately fixed on X-axis base plate (25) with EK leading screw seat (19); It is upper that spring (23) is enclosed within ball-screw (20), and two ends are connected by screw with feed screw nut (22) and EF leading screw seat (26) respectively, and feed screw nut (22) is installed in nut seat (21) hole, passes through screw fastening; Two slide blocks (24) are installed, to strengthen the anchorage force to upper working table on line slideway (18); Line slideway (18) by screw fastening on X-axis base plate (25); Limit switch (15) is installed in the threaded hole on limit switch base (16), uses former and later two nuts (17) that limit switch (15) is fixed on to limit switch base (16) upper, and limit switch base (16) is screwed on X-axis base plate (25).
3. free-standing five degree of freedom ultraprecise material in situ according to claim 2 is tested the microscopic observation platform, it is characterized in that: described servomotor (30) is with 20 scramblers and keep detent, make motor can reach nano level angular displacement resolution, and relative moving assembly have self-lock ability; Relative displacement between the moving assembly (12) of Z axis moving assembly (11) and y-axis shift detects by displacement of the lines formula grating scale (13), to realize the closed-loop control to the Y-axis displacement; The displacement detecting principle of X, Z axis as previously mentioned.
4. free-standing five degree of freedom ultraprecise material in situ according to claim 1 is tested the microscopic observation platform, and it is characterized in that: the connected mode that described y-axis shift moves in assembly (12), Z axis moving assembly (11) is identical with X-direction moving assembly (14); Y-Z axle web joint (31) in described Z axis moving assembly (11) is connected by screw fastening with the moving assembly (12) of y-axis shift; Z axis base plate (34) is by mutual vertical connection of screw and Y-Z axle web joint (31), web joint (32) is connected to Z axis base plate (34) and Y-Z axle web joint (31) two ends with set square (33), play connection and support two plates (34,31) effect, and reserved the space that Z direction driving-chain is arranged.
5. free-standing five degree of freedom ultraprecise material in situ according to claim 1 is tested the microscopic observation platform, it is characterized in that: described X-Y-Z tri-axles are followed assembly and are followed assembly (2) and X-direction by the Y-Z axle and follow assembly (5) and form, described Y-Z direction of principal axis is followed assembly (2) and is followed assembly (5) with X-direction and be connected by following assembly web joint (4), makes X-direction flexible hinge (42) mutually vertical to flexible hinge (35) with Y-Z; Can realize closed-loop control in conjunction with capacitive displacement transducer, the Y-Z direction of principal axis follow assembly (2) and X-direction followed assembly (5) together with response can realize that the X-Y-Z three-shaft linkage follows.
6. free-standing five degree of freedom ultraprecise material in situ according to claim 5 is tested the microscopic observation platform, it is characterized in that: described Y-Z axle is followed assembly (2) and is comprised of to flexible hinge (35), wedge (36), piezoelectric ceramics (37) Y-Z, and described Y-Z is fixed on and follows on assembly base plate (1) by three attachment screws to flexible hinge (35); Y-Z is comprised of two orthogonal parallel four-bar linkages to flexible hinge (35), within the Y-direction parallel four-bar linkage is nested in the Z-direction parallel four-bar linkage; Piezoelectric effect by piezoelectric ceramics (37) provides driving force, and the Z-direction parallel four-bar linkage consists of two connecting link section I (38) and Y-direction parallel four-bar linkage; The Y-direction parallel four-bar linkage consists of two connecting link section II (40) and mobile position I (39); Wedge (36), for adjusting piezoelectric ceramics (37) and the gap of Y-Z to flexible hinge (35), can carry out precompressed to piezoelectric ceramics (37) simultaneously.
7. free-standing five degree of freedom ultraprecise material in situ according to claim 5 is tested the microscopic observation platform, it is characterized in that: the X-direction flexible hinge (42) that described X-axis is followed in assembly (5) is fixed on and follows on assembly web joint (4) by two attachment screws, X-direction flexible hinge (42) comprises an X-direction parallel four-bar linkage, the X-direction parallel four-bar linkage consists of two connecting link section III (43) and mobile position II (41), can realize that X-axis follows.
8. free-standing five degree of freedom ultraprecise material in situ according to claim 1 is tested the microscopic observation platform, it is characterized in that: the nut seat (21) of described X-axis moving assembly (14) at motion process medi-spring (23) all the time in extended state, be aided with the ball of ball-screw (20) through the zero stand-off pre-service, make feed screw nut (22) eliminate gap in to-and-fro movement, improved the precision of X-axis moving assembly (14); The ball-screw of Y, Z axis disappears the gap method as previously mentioned.
9. free-standing five degree of freedom ultraprecise material in situ according to claim 1 is tested the microscopic observation platform, and it is characterized in that: the mobile position II (41) that the multi-functional web joint (47) of described Z axis runner assembly (6) is followed in assembly (5) by screw and X-axis is connected; Runner assembly provides power by steering wheel (46), and X-axis runner assembly (7) is connected by U-shaped web joint (45) with Z axis runner assembly (6), and the output shaft direction is mutually vertical; Microscope coupling shaft (8) is installed on X-axis runner assembly (7), and microscope coupling shaft (8) is connected by the axis hole interference with super depth of field camera lens fixed block (10), and super depth of field camera lens (9) is fixedly connected with by axis hole with super depth of field camera lens fixed block (10).
10. free-standing five degree of freedom ultraprecise material in situ according to claim 1 is tested the microscopic observation platform, it is characterized in that: described super depth of field camera lens (9) is installed on the top of five degree of freedom moving link, X, Y, Z axis moving assembly (14,12,11) respectively has the stroke capability of 100mm, displacement accuracy is 0.1 μ m, X, Z axis runner assembly (7,6) respectively have 180 ° of angular displacement abilities, corner accuracy is 0.18 °, and super depth of field camera lens (9) can be observed the different angles of test specimen; X, Y-Z axle are followed assembly (5,2) respectively to have stroke are the ultraprecise micrometric displacement ability that 30 μ m, precision are 10nm, while making super depth of field camera lens (9) be subject to the external environment vibrations, have the good response of following; The Y-Z axle is followed assembly (2) simultaneously can provide auxiliary zoom for super depth of field camera lens (9); The super depth of field camera lens (9) of selecting has amplification range, the camera lens of replaceable 100 ~ 1000 times of zoom capabilities, 250 ~ 2500 times of zoom capabilities, 500 ~ 5000 times of zoom capabilities; Super depth of field camera lens (9) has depth of field ability, can obtain microcosmic and be observed the test piece three-dimensional feature image.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104729914A (en) * | 2015-03-10 | 2015-06-24 | 吉林大学 | In-situ observation system and observation method for monitoring microscopic mechanical behaviors of material |
| CN104807494A (en) * | 2015-04-28 | 2015-07-29 | 上海大学 | Object micro surface morphology optical five-degree-of-freedom measurement device and method |
| CN105223076A (en) * | 2015-07-17 | 2016-01-06 | 吉林大学 | Material in situ proving installation and method under multi-load multiple physical field coupling service condition |
| CN106443078A (en) * | 2016-11-09 | 2017-02-22 | 深圳烯湾科技有限公司 | Scanning electronic microscope in-situ detection device and scanning electronic microscope system |
| CN106763141A (en) * | 2017-03-01 | 2017-05-31 | 华侨大学 | Two-freedom flexible hinge with auto-lock function |
| CN110281211A (en) * | 2019-06-19 | 2019-09-27 | 武汉纺织大学 | A kind of microscope multidimensional automatic displacement platform positioning device based on capacitive grating scale |
| CN110836891A (en) * | 2018-08-17 | 2020-02-25 | 湖南爱威医疗科技有限公司 | Method, device and equipment for realizing rapid microscopic examination and computer readable storage medium |
| CN110907157A (en) * | 2019-12-03 | 2020-03-24 | 武汉宏海兴民科技有限公司 | Multifunctional device for testing performance index of steering engine |
| CN112212798A (en) * | 2020-08-14 | 2021-01-12 | 厦门大学 | Part three-dimensional appearance measuring device |
| CN112881288A (en) * | 2021-01-13 | 2021-06-01 | 苏州凌云光工业智能技术有限公司 | MicroLED detection equipment |
| CN112987609A (en) * | 2021-02-05 | 2021-06-18 | 爱威科技股份有限公司 | Driving control method and system for master-slave driving device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101876609A (en) * | 2009-06-12 | 2010-11-03 | 赵宏伟 | Micron-nano scale in-situ nano indentation and scratching test system |
| CN101983829A (en) * | 2010-12-08 | 2011-03-09 | 柳州高华机械有限公司 | Rectangular coordinate five-freedom welding manipulator |
| CN102042813A (en) * | 2009-10-13 | 2011-05-04 | 株式会社三丰 | Surface texture measuring machine and a surface texture measuring method |
| US20130027690A1 (en) * | 2011-07-25 | 2013-01-31 | Disco Corporation | Laser beam spot shape detecting method |
| CN203550916U (en) * | 2013-09-26 | 2014-04-16 | 吉林大学 | Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform |
-
2013
- 2013-09-26 CN CN201310444240.6A patent/CN103499308B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101876609A (en) * | 2009-06-12 | 2010-11-03 | 赵宏伟 | Micron-nano scale in-situ nano indentation and scratching test system |
| CN102042813A (en) * | 2009-10-13 | 2011-05-04 | 株式会社三丰 | Surface texture measuring machine and a surface texture measuring method |
| CN101983829A (en) * | 2010-12-08 | 2011-03-09 | 柳州高华机械有限公司 | Rectangular coordinate five-freedom welding manipulator |
| US20130027690A1 (en) * | 2011-07-25 | 2013-01-31 | Disco Corporation | Laser beam spot shape detecting method |
| CN203550916U (en) * | 2013-09-26 | 2014-04-16 | 吉林大学 | Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform |
Non-Patent Citations (1)
| Title |
|---|
| 黄虎等: "压电驱动型微纳米压痕测试装置的设计与试验研究", 《机械工程学报》 * |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104729914A (en) * | 2015-03-10 | 2015-06-24 | 吉林大学 | In-situ observation system and observation method for monitoring microscopic mechanical behaviors of material |
| CN104807494A (en) * | 2015-04-28 | 2015-07-29 | 上海大学 | Object micro surface morphology optical five-degree-of-freedom measurement device and method |
| US10444130B2 (en) | 2015-07-17 | 2019-10-15 | Jilin University | Material in-situ detection device and method under multi-load and multi-physical field coupled service conditions |
| CN105223076A (en) * | 2015-07-17 | 2016-01-06 | 吉林大学 | Material in situ proving installation and method under multi-load multiple physical field coupling service condition |
| CN106443078A (en) * | 2016-11-09 | 2017-02-22 | 深圳烯湾科技有限公司 | Scanning electronic microscope in-situ detection device and scanning electronic microscope system |
| CN106763141A (en) * | 2017-03-01 | 2017-05-31 | 华侨大学 | Two-freedom flexible hinge with auto-lock function |
| CN106763141B (en) * | 2017-03-01 | 2023-03-10 | 华侨大学 | Two-degree-of-freedom flexible hinge with self-locking function |
| CN110836891A (en) * | 2018-08-17 | 2020-02-25 | 湖南爱威医疗科技有限公司 | Method, device and equipment for realizing rapid microscopic examination and computer readable storage medium |
| CN110281211A (en) * | 2019-06-19 | 2019-09-27 | 武汉纺织大学 | A kind of microscope multidimensional automatic displacement platform positioning device based on capacitive grating scale |
| CN110907157A (en) * | 2019-12-03 | 2020-03-24 | 武汉宏海兴民科技有限公司 | Multifunctional device for testing performance index of steering engine |
| CN112212798A (en) * | 2020-08-14 | 2021-01-12 | 厦门大学 | Part three-dimensional appearance measuring device |
| CN112881288A (en) * | 2021-01-13 | 2021-06-01 | 苏州凌云光工业智能技术有限公司 | MicroLED detection equipment |
| CN112881288B (en) * | 2021-01-13 | 2023-11-07 | 苏州凌云光工业智能技术有限公司 | MicroLED detection equipment |
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