CN103492928B - Distribution method and for assigned unit - Google Patents
Distribution method and for assigned unit Download PDFInfo
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- CN103492928B CN103492928B CN201280013907.0A CN201280013907A CN103492928B CN 103492928 B CN103492928 B CN 103492928B CN 201280013907 A CN201280013907 A CN 201280013907A CN 103492928 B CN103492928 B CN 103492928B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
- B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/007—Processes for applying liquids or other fluent materials using an electrostatic field
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B25/00—Eyepieces; Magnifying glasses
- G02B25/002—Magnifying glasses
- G02B25/004—Magnifying glasses having binocular arrangement
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0037—Production of three-dimensional images
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/06—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying two different liquids or other fluent materials, or the same liquid or other fluent material twice, to the same side of the work
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The invention discloses a kind of use elongated applicator first liquid layer is provided in surface first area on method, elongate gap is formed between described applicator and described surface, described gap is made to be full of the elongated globule of described first liquid, and a certain amount of second liquid is arranged to contact with described applicator with the described globule, described first liquid and described second liquid are that the described first liquid of immiscible and described first area has higher wetting state than described second liquid, said method comprising the steps of: between described applicator and described surface, apply relative motion, only the second liquid of described amount is arranged on the tail end-side of described applicator.
Description
Technical field
The present invention relates to a kind of method for being provided in by first liquid layer by divider on the first area on surface.The present invention also relates to a kind of device for performing described method.
Background technology
For the method for electric moistening display from known surf zone first fluid layer being provided in back up pad of international application WO2010/133690.In this approach, bearing diagonal plate is immersed in first fluid in immiscible second fluid.Second fluid forms groove at the near surface of back up pad, makes groove be full of first fluid.By increasing second fluid relative to the height on surface, move groove surfacewise.Surface is covered by air at first, is covered subsequently by first fluid, and is finally immersed in second fluid.When second fluid covers whole back up pad, the surf zone of first fluid between back up pad and second fluid forms thin layer.
The shortcoming of this known method is that it consumes a large amount of second liquids and all surface of back up pad is substantially covered by the second fluid, but, only have a surperficial covering to be necessary.After application process, other surfaces must be removed.Object of the present invention is for overcoming this shortcoming.
Summary of the invention
According to an aspect of the present invention, there is provided a kind of use elongated applicator first liquid layer is provided in surface first area on method, elongate gap is formed between applicator and surface, gap is made to be full of the elongated globule of first liquid, and a certain amount of second liquid is arranged to contact with applicator with the globule, first liquid and second liquid are immiscible and the first liquid of first area has higher wetting state than second liquid
Said method comprising the steps of: between applicator and surface, apply relative motion, only the second liquid of described amount is arranged on the tail end-side of applicator.
The surperficial back up pad that must possess first liquid layer need not be immersed in as in the prior art and be full of in the groove of second liquid.Instead, the second liquid applying relatively small amount between applicator and surface is just enough.Other surfaces of back up pad can be made not containing second liquid, thereby reduce the needs cleaning these surfaces after using said method.The method also no longer needs a large amount of second liquids.
Applicator can move relative to surface; Also can relative to applicator translational surface.Applicator just distributes first liquid from the teeth outwards and serves as spreader thus.Because a certain amount of second liquid is only on the tail end-side of applicator, therefore the surface before applicator is not covered by second liquid.Surface before applicator preferably adjoins with gas (such as, air).When the globule is through surface, first liquid is deposited upon on first area and second liquid is deposited upon on first liquid layer.Because first surface has higher wetting state for first liquid, so second liquid can not make first liquid remove from first surface.
Method for depositing according to the present invention is more easily extended to larger back up pad size than art methods.
When second liquid be polarity or conduction time, possess first liquid and second liquid and the surface forming a part for back up pad is specially adapted to switchable optical elements, such as, Electrowetting display device.
In specific embodiments, method comprises the following steps: fill gap by the first liquid of depositing dosed quantities in gap.Capillary force makes first liquid along the length diffusion in gap and is remained in gap by first liquid between the moving period of applicator.The height in gap is preferably less than 600 microns and is more preferably less than 100 microns.
During the movement of applicator, first liquid can be made to be deposited in gap.Second liquid can be made to be deposited as side a certain amount of second liquid from the teeth outwards along applicator.After providing first liquid, preferably provide second liquid to promote the deposition of first liquid in gap.
Can at the normal becoming layout surface under non-zero angle with vertical plane.This angle may be used for adjusting deposition process.When surface less horizontal (that is, this angle be substantially zero), simplify production run.
In specific embodiments, the second liquid being close to the second area of first area has higher wetting state than first liquid.Due to the difference of wetting state, first liquid will preferentially be attached to first area and be not attached to second area.Therefore, during scanning applicator, second liquid will be attached to second area and drive any first liquid to leave these regions.Therefore, first area will be covered by first liquid layer, and wherein thickness depends on the shape of the globule and the speed of scanning, and second area will be covered by second liquid.
When the size of first area is less, the first liquid of deposition can suppose the shape close to hemisphere.This type of bending deposition also contained by term " first liquid layer ".
Surface can comprise and to be separated by second area and to form multiple first areas of pattern.Pattern or sub pattern can have decoration functions or serve as mark.
Gap preferably has the length at least identical with the size of the pattern of the major axis being parallel to applicator.When gap has the length at least identical with the size of the pattern of the major axis being parallel to applicator, first liquid uniform deposition from the teeth outwards will be realized.If with the scanning of twice or more time, first liquid is deposited on pattern and a part twice for the globule through first area, the thickness so depositing layer on the first region will be different from the globule only through first area once.Therefore, with the single sweep operation of larger applicator but not little applicator scanning carrys out filling pattern several times time, thickness will be more even.
In preferred embodiments, the relative motion between applicator and surface is on the direction of major axis being essentially perpendicular to applicator.When applicator and surface are relative to each other moved on the direction of major axis being preferably essentially perpendicular to applicator, maximum region is covered by the single sweep of applicator.
The direction of the separatrix between first area and second area and the major axis of applicator can form zero angle to simplify the device for manner of execution.
In the particular of the method, this angle can be different from zero degree.The direction of first liquid and the trailing edge between second liquid and surface (that is, wherein the edge that replaced by surface by second liquid of first liquid) is partly determined in the direction of major axis.When the formation of this trailing edge and the marginal linear contact lay between first area and second area, the first liquid of the also not all second area may be skimmed from second area.When separatrix and trailing edge form non-zero angle, no longer there is linear contact lay, but only there is point cantact, this shows any location hardly.Therefore, nearly all first liquid is skimmed from second area.5 ° between separatrix and major axis or larger angle cause obvious improvement.For 20 ° and larger angle, obtain and well skim result.
Therefore, the rectangular patterns of first area should preferably be arranged to the non-zero angle of major axis under there is its separatrix.
Another scanning of applicator effects on surface can be performed.When twice, side or Multiple-Scan applicator from the teeth outwards, wherein twice or repeatedly translational surface below applicator, can improve the homogeneity of the thickness of layer.In scan period first time, first liquid is made to be deposited on the surface; In ensuing one or many scan period, by deposit in first time scanning very little liquid time supplement first liquid and by removing first liquid when depositing too many liquid, side reallocates first liquid from the teeth outwards.
Surface can be a part for the first back up pad and said method comprising the steps of: provide the second back up pad, thus limit a space between the first back up pad and the second back up pad, described space comprises first liquid and second liquid.
First back up pad and the second back up pad can form Electrowetting element.When surface provides the second back up pad for a part for the first back up pad, thus when limiting the space comprising first liquid and second liquid between the first back up pad and the second back up pad, the surface possessing first liquid layer and second liquid layer can be converted to closed system.
Another aspect of the present invention relates to a kind of device, and it comprises for using method according to the present invention first liquid layer to be provided in applicator on the first area on surface.
Applicator is preferably elongated.Device preferably includes the mobile platform for relative to each other moving applicator and surface.Device preferably includes the controller for controlling applicator height square from the teeth outwards.Device can be very similar to the slot coated equipment of prior art, and it promotes the exploitation being applicable to the equipment produced in enormous quantities.Device can have two applicators of the scanning of second time subsequently for performing first time scanning and same surface; The gap of two applicators can be identical; Or the gap for the applicator of first time scanning can be greater than or less than the gap of the applicator for second time scanning.
From what provide by means of only example, in the following description of the preferred embodiments of the invention that reference accompanying drawing carries out, other features and advantages of the present invention will become apparent.
Accompanying drawing explanation
Fig. 1 illustrates the device for depositing first liquid layer;
Fig. 2 illustrates the applicator having and distribute passage;
Fig. 3 illustrates the pattern on the surface partly covered by first liquid;
Fig. 4 (a), Fig. 4 (b) and Fig. 4 (c) illustrate for first, second, and third of scanning of a surface directed;
Fig. 5 illustrates the xsect of Electrowetting element; And
Fig. 6 illustrates the device for performing the method.
Embodiment
Fig. 1 illustrates the embodiment for using method according to the present invention first liquid to be deposited upon the device on surface with cross-sectional view.Also there is with the plate 1 shown in cross-sectional view the surface 2 depositing first liquid layer above.Be suspended on above surface 2 with the applicator 3 of bar or slide plate form.Applicator and surface are formed in the drawings with the gap 4 that arrow represents, it illustrates the minor increment between applicator and surface.Applicator has the major axis of the plane perpendicular to figure; Gap is elongated on the direction of major axis.Gap is made to be full of the elongated globule 5 of first liquid.
In operation, square moving slide board 3 over surface 2 on direction 6.The globule 5 has the front interface 7 with gas 8 above at applicator 3.Interface 7 extends to applicator 3 from surface 2.The tail end-side 10 that the second liquid with a certain amount of 9 of elongated shape is only arranged in applicator 3 contacts with applicator.The tail end-side 10 of applicator is the side of direction of motion 6 dorsad.The side 11 towards direction 6 of applicator is front side.The globule 5 has the rear interface 12 between first liquid and second liquid.First liquid can not mix with second liquid.
When side is mobile over surface 2 for applicator 3, the mobile globule 5 of first liquid 5 uses thickness reduces along with the distance with applicator first liquid layer 13 to get wet the still dry surface 2 of plate 1.After a certain distance, the thickness of layer 13 becomes irrelevant with distance.Similarly, the second liquid of a certain amount of 9 forms second liquid layer 14 on first liquid layer 13.In other words, mobile applicator 3 along first liquid the globule 5 and a certain amount of 9 second liquid drag, the globule 5 of first liquid and the second liquid of a certain amount of 9 all stay after layer 13,14 over surface 2.
Wherein, the translational speed of the size in gap 4, its shape, applicator, the shape at interface 12, the viscosity of liquid, the first liquid being applied to applicator and the amount of second liquid, the interfacial tension at two interfaces and chemical contrast is depended at the thickness of the first liquid layer 13 of applicator through staying on surf zone later, that is, the various combination of two kinds of liquid and the hydrophobic difference between surface and applicator.
First liquid can be alkane (such as, hexadecane) or oil (such as, hydrocarbon-type oil).The embodiment of Fig. 1 uses silicone oil.Second liquid can be immiscible any liquid with first liquid.Second liquid can be polarity or conduction, and it can be used in some application of the plate 1 covered by first liquid and second liquid.Water is used as second liquid by shown embodiment.Or second liquid can comprise the combination of water and at least one nonaqueous component, or second liquid can comprise the first nonaqueous component and the second nonaqueous component.The example of the first component is ethylene carbonate, and the example of second component is erythritol.Gas 8 can be any gas, such as, and air, nitrogen or argon gas.This embodiment uses air.Other immiscible liquid operable are fluorocarbon and liquid metal (such as, mercury).
The first liquid in the region on the surface 2 shown in Fig. 1 has higher wetting state than second liquid, thus prevents second liquid from replacing first liquid by this region.In the illustrated embodiment, plate 1 can be covered by hydrophobic layer, such as, and amorphous fluoropolymer (such as, AF1600).Hydrophobic layer increases first liquid and surface conjunction and repels the trend of second liquid.
Wherein, the shape at interface 7 depends on surface 2 and the first liquid on surface of applicator 3 and the size in the wetting state of gas 8 and gap 4.Wherein, the shape at interface 12 depends on first liquid and the wetting state of second liquid, the shape of applicator near the position of interface 12 contact coating device and the size in gap on the surface of applicator 3.In embodiment in FIG, shape can be changed by the inclination angle changing applicator.
In the implementation of figure 1, the size in the gap between applicator 3 and surface 2 is 50 microns.As the FPD(such as from CoreFlow company is, flat-panel monitor) the doctor blade clearance control of the air supporting solution of slot coated or the coating equipment of KekoEquipment company is known, between the moving period of applicator, by controlling the position on applicator and/or surface 2, this size can keep constant.
The size of the globule 5 is also determined by the amount of the first liquid be deposited in gap 4.Such as, use the syringe or the pump machanism that are used for gap, distribute the first liquid of aequum from the tail end-side of applicator, first liquid can be deposited in gap.Due to capillary force, first liquid will be evenly dispersed in gap.Also by syringe or pump machanism, second liquid can be deposited on tail end-side 10.Pump machanism has the advantage of the amount that can control first liquid and the second liquid contacted with applicator; Such as, during operation applicator, the amount of first liquid and second liquid can keep less constant.Preferably first liquid is being deposited on after-applied second liquid in gap.
Can to be used in outside applicator and the first pipe extended close to gap 4 from front side 11 and the second pipe of extending close to tail end-side 10 to deposit first liquid and second liquid.Or, the first passage 20 in applicator as shown in Figure 2 and second channel 21 can be used to deposit first liquid and second liquid.Passage can be slit.The combination of pipe and passage is also feasible.Multiple pipe and/or passage can be arranged along the length of applicator 3.
But in the implementation of figure 1, applicator 3 moves above fixed surface 2, applicator also can be fixing and plate moves below applicator.It is the possible surface to make applicator scanning board that the combination of applicator and plate is moved.
The tail end-side 10 of applicator 3 is preferably hydrophilic with the second liquid improving side's dragging a certain amount of 9 over surface 2.The surface 15 towards this surface of applicator 3 can be made to be hydrophobic to improve the leak tightness of first liquid in gap.
Although the xsect of applicator is in the implementation of figure 1 rectangle, this xsect also can be circular and have the shape of bar.In the case of the latter, be water wettability by making the tail end-side of bar and make the side towards gap be hydrophobicity, the position of interface 12 contact coating device can be fixing.Shaft-like applicator can be made to rotate to provide extra procedure parameter for controlling, such as, for not needing the region be coated with from surfaced lift first liquid.
Fig. 3 illustrates the vertical view of tool patterned surface.Pattern 30 comprises first area 31, is square in this embodiment, and the first liquid of first area 31 has higher wetting state than second liquid.Squarely can be made up of the layer of AF1600.The second liquid of contiguous second area 32 has higher wetting state than first liquid.Second area 32 can be made up of various material layer, comprises photoresist (such as, SU8).Can by arranging that separation layer forms second area, separation layer has the profile of the second area on the uninterrupted layer forming first area.When first area is hydrophobic, separation layer should be hydrophilic.Such as, separation layer can be formed by printing process or evaporation.Also second area can be formed by the wall with height first liquid being mechanically defined in first area.The size of first area can be 170 microns × 170 microns, and the width of second area can be 10 microns.When but second area is not flat has the profile of wall, highly can be such as 5 microns.
When plate has the patterned surface shown in Fig. 3, deposition process provides the patterned layer of first liquid.Be decorated with hatched region in figure to be covered by the first liquid that the applicator by movement from right to left in the drawings deposits.Line 33 is the cross spider on front interface 7 and surface 2.The surface on online 33 left sides is covered by air.The wetting state of the air in region 31 and region 32 and the different of first liquid causes the fluctuation characteristic of line.The surface below the gap of applicator indicated by braces 34 is covered by first liquid.
At the tail end-side of applicator, the thickness of first liquid layer 13 reduces, as shown in fig. 1.When thickness has become enough hour, because the second liquid in these regions has larger affinity than first liquid, so second liquid will replace first liquid by second area 32.Because the first liquid in these regions has larger affinity than second liquid, so the first liquid of first area 31 will not replaced by second liquid.Therefore, this method only deposits first liquid layer on first area 31.
Due to the thickness of the first liquid layer after applicator relatively little (that is, being less than the height in gap), therefore second liquid relatively easily removes first liquid layer from second area 32.When gap has the height of 50 microns, the first liquid layer that remove is thinner than 50 microns.This should with in art methods disclosed in WO2010/133690 more than 1 mm of thickness first liquid layer compared with, first liquid layer must be skimmed from second area in prior art approaches.Therefore, can scanning of a surface scanning of a surface quickly substantially than prior art groove according to applicator of the present invention.The former typical sweep velocity is 30mm/s and the typical sweep velocity of the latter is 3mm/s.
In the embodiment of the method in figure 3, the part still covered by first liquid is parallel with the separatrix 36 between first area with second area with the trailing edge 35 between the part covered by the second liquid in second area 32.In this case, because first liquid must move up in the side being parallel to trailing edge, remove under the effect of the power of second liquid so first liquid in second area 37 is more difficult and is replaced by second liquid.In different directed second area 38, first liquid easily can leave second area on the moving direction of trailing edge.This effect may cause the remainder of first liquid to be stayed on second area 37.
Fig. 4 (a) illustrates that applicator 60 is directed relative to first of surface, and this surface has the pattern 61 being arranged in first area on plate 62 and second area.Direction of scanning is indicated by arrow 63.First is directed identical with the orientation shown in Fig. 3.Fig. 4 (b) illustrates that compared with the orientation in Fig. 4 (a) second is directed, makes plate 62 rotate with the angle being about 8 degree together with pattern 61 in the second orientation.The angle of 8 degree that the major axis 65 of present applicator 60 is identical with 54 one-tenth, separatrix.Trailing edge 35 in the second area of pattern will be no longer parallel with separatrix 36.Therefore, the first liquid on present second area 37 can easily flow away from second area.Therefore, than skimming first liquid from second area better when Fig. 4 (a).For the angle being greater than 5 degree, observe the improvement of homogeneity, and for being greater than the angle of 22.5 degree, homogeneity is not improved further significantly.It should be noted that the direction of scanning 63 in Fig. 4 (b) also can become 63', wherein direction of scanning is parallel to the orientation of pattern, but with the direction of major axis 65 at an angle.This direction of scanning implements simpler in process units.
Fig. 4 (c) illustrates alternative arrangements, and wherein one of them sides aligned parallel of plate 64 is in applicator 60 and pattern 65 has separatrix under becoming to be not equal to the angle of zero with the front interface of divider.Trailing edge that is straight, elongated applicator is straight and has the direction in the direction of the major axis equaling applicator.When applicator is bending in the plane being parallel to surface, trailing edge also will bend.In order to avoid above-mentioned stick-slip, the local direction of trailing edge should form non-zero angle with marginal direction.
Fig. 5 illustrates the cross-sectional view of a series of Electrowetting elements using deposition process according to the present invention to manufacture.It is the electrode 71 of thin film conductor that first substrate 70 possesses at deposited on substrates.Each Electrode connection is to the signal wire 72 for providing voltage.Electrode is covered by the thin hydrophobic layer 73 of amorphous fluoropolymer AF1600.First substrate with the layer being coated on it forms the first back up pad.The surface of back up pad is separated in the pattern of the thin hydrophilic layer 74 of the SU8 hydrophobic first area 75 between hydrophilic second area 74.The size of first area is 160 square microns, and second area has the width of 10 microns and the height of 3 microns to 6 microns.
Making the first substrate 70 possessing layer 71,73 and 74 be similar to plate 1 carries out according to deposition process of the present invention, and it uses oil as first liquid and uses water as any other combination (such as, as given) of second liquid or liquid above.After manner of execution, first area 75 is covered equably by oil reservoir 76, and oil reservoir 76 has the thickness of between 3 microns and 6 microns (such as, 5 microns).Second area 74 and oil reservoir are covered by water 77.Water can containing salt to increase its conductivity and to expand the temperature window of this method.The identical liquid that the second liquid (being water in this example) used during this method preferably uses in the product comprising back up pad, thus avoid changing second liquid after by another kind of liquid manner of execution.
Second back up pad 78 forms closed space between the first back up pad and the second back up pad.The seal (not shown in FIG.) being attached to two back up pads protects described space not by the impact of environment.Element in the back up pad that the pattern defining oil reservoir 76 of layer 74 is limited on it.Each element has electrode 71.Another electrode 79 being connected to signal wire 80 contacts with water 77, thus forms the common electrode 15 of multiple element.When applying voltage between the common electrode 79 and electrode 71 of element, the oil reservoir 76 in this element moves to the side of element or scatters, and first surface will be covered by water 77 at least in part.This so-called electrowetting effect is more completely described in international patent application W003/071346.When oil and/or glassware for drinking water have the absorption of light, reflection and/or transmission specific optical property time, element can operate as light valve.Electrowetting element can be used in a display device, and wherein multiple Electrowetting element forms display device.Display driving system in device is provided for the voltage arranging element in required state.
Fig. 6 illustrates according to the device for deposited liquid layer on the surfaces of the board of the present invention.Plate can be arranged on platform 84.The applicator 85 forming gap 86 is arranged in translate stage (not shown in FIG.) together with surface, and this translate stage enables applicator at platform 84 scanning overhead.Or applicator is fixing and is surface mounted in translate stage.First container 87 of first liquid is connected to the first control module 88(such as, valve or pump), the first control module 88 controls the amount of the first liquid being delivered to applicator 85 via connection 89.The second container 90 of second liquid is connected to the second control module 91, second control module 91 similarly for second liquid being delivered to applicator via connection 92.Controller 93 is provided for the signal the first controller and second controller being arranged to required setting.Device can comprise the measuring equipment of the thickness for determining sedimentary deposit.One-tenth-value thickness 1/10 can be used as the input that control module is set.Device also can comprise the equipment of the shape of the globule for measuring first liquid and/or the volume of size or the second liquid between applicator and surface, such as, the direction being used in the major axis of applicator is observed the camera of applicator, and being used for, control module is set changing input.Such as, by elongate dispenser two far-end measuring height and these are highly remained on equal value, the height of divider of side from the teeth outwards can be made to remain on required value.Controller also can use artificial input from the operator of device instead of measured value.
Above-mentioned embodiment should be understood to illustrative example of the present invention.Imagine other embodiments of the present invention.Should understand, can be used by other features separately or described in combining about any feature described in any one embodiment, and also can any other one or more features of embodiment combined, or any of any other embodiment combinationally uses.In addition, when not departing from the scope of the present invention defined in claims, also the equivalent do not described and amendment can be used above.
Claims (14)
1. first liquid layer is provided in the method on the first area on surface by the elongated applicator of use,
Elongate gap is formed between described elongated applicator and described surface, makes described elongate gap be full of the elongated globule of described first liquid, and
A certain amount of second liquid be arranged to described elongated applicator and contact with the described globule, described first liquid and described second liquid are that immiscible and described first area is compared to described second liquid for described first liquid and has higher wetting state
Said method comprising the steps of: between described elongated applicator and described surface, apply relative motion, only a certain amount of described second liquid is arranged on the tail end-side of described elongated applicator.
2. method according to claim 1, comprises the following steps: fill described elongate gap by the described first liquid of depositing dosed quantities in described elongate gap.
3. method according to claim 2, wherein, during the movement of described elongated applicator, is deposited on described first liquid in described elongate gap.
4. the method according to claim 1,2 or 3, comprises the following steps: provide described second liquid by the described second liquid of the depositing dosed quantities on said surface of the side along described elongated applicator.
5. the method according to claim 1,2 or 3, wherein, described surface is less horizontal.
6. the method according to claim 1,2 or 3, wherein, described surface has the second area of contiguous described first area, and described second area is compared to described first liquid for described second liquid and has higher wetting state.
7. method according to claim 6, wherein, described surface comprises and to be separated by second area and to form multiple first areas of pattern.
8. method according to claim 7, wherein, described elongate gap has the length at least identical with the size of the described pattern of the major axis being parallel to described elongated applicator.
9. method according to claim 1, wherein, the described relative motion between described elongated applicator and described surface is on the direction of major axis being essentially perpendicular to described elongated applicator.
10. method according to claim 7, wherein, the direction of the major axis of the separatrix between described first area and described second area and described elongated applicator forms the angle being different from zero.
11. methods according to claim 1,2 or 3, comprise the following steps: another scanning being applied described surface by described elongated applicator.
12. methods according to claim 1,2 or 3, wherein, described surface is the part of the first back up pad and said method comprising the steps of: provide the second back up pad, thus a space is limited between described first back up pad and described second back up pad, described space comprises described first liquid and described second liquid.
13. methods according to claim 12, wherein, described first back up pad and described second back up pad form Electrowetting element.
14. 1 kinds of devices comprised for using the method according to any one of claim 1 to 13 first liquid layer to be provided in the elongated applicator on the first area on surface.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1104713.1 | 2011-03-21 | ||
| GBGB1104713.1A GB201104713D0 (en) | 2011-03-21 | 2011-03-21 | Dispensing method and device for dispensing |
| PCT/EP2012/054710 WO2012126851A1 (en) | 2011-03-21 | 2012-03-16 | Dispensing method and device for dispensing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103492928A CN103492928A (en) | 2014-01-01 |
| CN103492928B true CN103492928B (en) | 2016-02-10 |
Family
ID=44012887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280013907.0A Active CN103492928B (en) | 2011-03-21 | 2012-03-16 | Distribution method and for assigned unit |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9259756B2 (en) |
| JP (1) | JP5719457B2 (en) |
| KR (1) | KR101522132B1 (en) |
| CN (1) | CN103492928B (en) |
| GB (1) | GB201104713D0 (en) |
| TW (1) | TWI547316B (en) |
| WO (1) | WO2012126851A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201220155D0 (en) | 2012-11-08 | 2012-12-26 | Samsung Lcd Nl R & D Ct Bv | Method of manufacture |
| US9625704B1 (en) | 2014-12-19 | 2017-04-18 | Amazon Technologies, Inc. | Liquid dispensing method for manufacturing an electrowetting device |
| US9581804B1 (en) | 2014-12-19 | 2017-02-28 | Amazon Technologies, Inc. | Liquid dispensing method for manufacturing an electrowetting device |
| CN106773017B (en) * | 2017-01-22 | 2023-03-24 | 华南师范大学 | Filling method and filling equipment for electrowetting display device with dry-wet separation |
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| ATE548678T1 (en) | 2002-02-19 | 2012-03-15 | Samsung Lcd Nl R & D Ct Bv | DISPLAY DEVICE |
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| JP2004330164A (en) * | 2003-05-12 | 2004-11-25 | Seiko Epson Corp | Method for forming thin film pattern, device and its production method and electro-optic apparatus as well as electronic equipment |
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| GB0707201D0 (en) * | 2007-04-13 | 2007-05-23 | Liquavista Bv | Dispensing method and device for dispensing |
| GB0722812D0 (en) * | 2007-11-21 | 2008-01-02 | Liquavista Bv | Method of making an electrowetting device, apparatus for carrying out the method and electrowetting device |
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2011
- 2011-03-21 GB GBGB1104713.1A patent/GB201104713D0/en not_active Ceased
-
2012
- 2012-03-16 WO PCT/EP2012/054710 patent/WO2012126851A1/en active Application Filing
- 2012-03-16 KR KR1020137027246A patent/KR101522132B1/en active IP Right Grant
- 2012-03-16 JP JP2013558463A patent/JP5719457B2/en active Active
- 2012-03-16 CN CN201280013907.0A patent/CN103492928B/en active Active
- 2012-03-21 TW TW101109733A patent/TWI547316B/en active
-
2013
- 2013-09-20 US US14/032,937 patent/US9259756B2/en not_active Expired - Fee Related
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| US4938994A (en) * | 1987-11-23 | 1990-07-03 | Epicor Technology, Inc. | Method and apparatus for patch coating printed circuit boards |
| JPH04155622A (en) * | 1990-10-19 | 1992-05-28 | Fuji Photo Film Co Ltd | Coating method |
| JP2003260400A (en) * | 2002-03-08 | 2003-09-16 | Fuji Photo Film Co Ltd | Coating method and apparatus |
| JP2005262083A (en) * | 2004-03-18 | 2005-09-29 | Sony Corp | Application method |
| CN101023460A (en) * | 2004-04-08 | 2007-08-22 | 利奎阿维斯塔股份有限公司 | Display device |
| WO2010133690A1 (en) * | 2009-05-20 | 2010-11-25 | Liquavista B.V. | Method of manufacturing an optical display |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101522132B1 (en) | 2015-05-20 |
| US20140023792A1 (en) | 2014-01-23 |
| TWI547316B (en) | 2016-09-01 |
| CN103492928A (en) | 2014-01-01 |
| GB201104713D0 (en) | 2011-05-04 |
| KR20130130866A (en) | 2013-12-02 |
| JP2014514600A (en) | 2014-06-19 |
| WO2012126851A1 (en) | 2012-09-27 |
| US9259756B2 (en) | 2016-02-16 |
| TW201249546A (en) | 2012-12-16 |
| JP5719457B2 (en) | 2015-05-20 |
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