CN103487459A - Test system and method for cooling performance of microscale liquid cooler - Google Patents

Test system and method for cooling performance of microscale liquid cooler Download PDF

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CN103487459A
CN103487459A CN201310481442.8A CN201310481442A CN103487459A CN 103487459 A CN103487459 A CN 103487459A CN 201310481442 A CN201310481442 A CN 201310481442A CN 103487459 A CN103487459 A CN 103487459A
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microscale
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liquid cooling
cooling appts
thermometer
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CN103487459B (en
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张杨飞
张兰英
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Peking University
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Abstract

The invention discloses a test system and method for the cooling performance of a microscale liquid cooler. The test system for the cooling performance of the microscale liquid cooler comprises the microscale liquid cooler, a heating device, a temperature measurement system, a cooling liquid circulator, a metering pump and a diverter. According to the test system, on one hand, high reliability, high accuracy and high precision of a micro-fluid division control technology are utilized, and the temperature, the flow and the pressure of the cooling liquid are accurately controlled step by step through the cooling liquid circulator, the metering pump and the diverter, so as to achieve accurate control of low-flow or extra-low flow cooling liquid; on the other hand, a surface temperature field of the heating device is monitored in real time by adopting an advanced infrared thermal imaging technology; visual observation of a working temperature field of a microscale device is achieved. By adopting the test system, the accuracy, the precision and the reliability of measurement of the cooling performance of the microscale liquid cooler are greatly improved; the test system is especially suitable for test of the cooling performances of the microscale liquid coolers for aerospace, information communication, transportation and medical treatment, automatic control, consumer electronics and the like.

Description

A kind of microscale liquid cooling appts heat dispersion test macro and method of testing thereof
Technical field
The present invention relates to the heat dispersion measuring technology, relate in particular to a kind of microscale liquid cooling appts heat dispersion test macro and method of testing thereof.
Background technology
Along with the develop rapidly of microelectric technique, microminiaturized, highly integrated, multifunction, high-power become trend and the trend of electronic product gradually.Size of Microelectronic Devices is more and more less, from micron dimension, to nanometer scale, develop, integrated level grows at top speed with annual 40%~50% speed, and hundred up to ten thousand components and parts are arranged on each chip, and the heat flow density of high performance chips and electron device has surpassed 100W/cm 2, the thermic Problem of Failure has become the bottleneck of restriction microelectric technique development gradually.Take away the high heat produced on the microscale device, the naturally cooling cooling technologies such as convection current, radiation, conduction are no longer applicable, and its heat radiation heat flow density is no more than 0.155W/cm 2, the heat flow density of metal fever through hole also is no more than 10W/cm 2, only have liquid cooling and heat pipe cooling technology to can be used for heat flow density and be greater than 100W/cm 2device heat radiation, heat transfer coefficient is high, can manufacture that volume is very little, the product of very light in weight, but heat pipe in use for some time heat transfer property can descend, also to bear the restriction of the working limits such as heat flow density, resistance to flow, capillary pressure reduction.
The microfluid heat dissipation technology (also referred to as the fluid channel heat dissipation technology) that the microscale liquid cooling appts be take in the liquid cooling technology is basis, on directed silicon chip, base plate for packaging, heat-dissipating metal sheet or other high thermal conducting materials, utilize the technology such as anisotropic etching, micromachined to produce microchannel, liquid when flowing through fluid channel by the evaporation or directly heat is taken away, radiating effect is very good, and theory can be used for heat flow density 1000W/cm 2the working heat environment.The microscale liquid cooling appts can avoid other liquid cooling technology such as direct liquid cooling, indirectly cooling, the spraying cooling of liquid cooling, hydrofluidic, dropping liquid be cooling in actual applications problem, the problem includes: seepage, thermo shock wave, thermal stress that thermo-lag can cause are too high, chip thermoelectricity does not mate and the problem such as system maintenance inconvenience, for the thermic Problem of Failure that solves microelectronic component provides good solution.
Yet in the microscale heating radiator, liquid coolant (microfluid) flow is little, and flow velocity is relatively very fast, required hydraulic pressure changes greatly with flow channel shape; Size of Microelectronic Devices is little, generate heat inhomogeneous, after on device, the maximum temperature value of any point surpasses operating temperature limit, all likely cause whole component failure, traditional heat dispersion measuring technology can't meet the test needs of microscale liquid cooling appts heat dispersion.The heat dispersion test of microscale liquid cooling appts needs simultaneously in conjunction with microfluid flow-dividing control technology and infrared temperature-test technology, utilize the liquid circulation machine to make inlet water temperature constant on the one hand, utilize volume pump that pressure is provided, in conjunction with shunt precision controlling cooling liquid flow, and utilize the direct supply on-load voltage to control heat flow density; On the other hand, utilize thermopair, hydralic pressure gauge, flowmeter to detect in real time coolant temperature, pressure and flow, utilize infrared thermography Real-Time Monitoring device surface temperature field, measure radiating efficiency and the heat transfer coefficient Changing Pattern with heat flow density, working time, coolant rate.
Summary of the invention
The problem existed for above prior art, the invention provides a kind of microscale liquid cooling appts heat dispersion test macro and method of testing thereof of utilizing microfluid flow-dividing control technology and infrared temperature-test technology, accurate control and detection by coolant temperature, pressure, flow, thermal source heat flow density and temperature field, calculate radiating efficiency and the heat transfer coefficient Changing Pattern with heat flow density, working time, coolant rate, realize that the heat dispersion of microscale liquid cooling appts under low discharge or utmost point low discharge is measured.
One object of the present invention is to provide a kind of microscale liquid cooling appts heat dispersion test macro.
Microscale liquid cooling appts heat dispersion test macro of the present invention comprises: microscale liquid cooling appts, heater members, temp measuring system, liquid circulation machine, volume pump and shunt; Wherein, heater members is placed on the surface of microscale liquid cooling appts; Temp measuring system is towards heater members; Liquid coolant flows into the liquid circulation machine from the outlet of microscale liquid cooling appts, enters volume pump through the liquid circulation machine, then enters shunt, and then the part of liquid coolant enters the entrance of microscale liquid cooling appts by the first outlet of shunt; Another part of liquid coolant flow back in the liquid circulation machine by the second outlet of shunt.
Temp measuring system comprises infrared thermometer and computing machine, and infrared thermometer is towards heater members, and infrared thermometer is connected to computing machine.Utilize advanced infrared thermal imaging technique Real-Time Monitoring device surface temperature field, realize the visual inspection of microscale device working temperature field.
Liquid circulation machine, volume pump and shunt form pressure and flow control system; The liquid circulation machine drives coolant flow, and controls the temperature constant of the liquid coolant of outlet; Volume pump is controlled the flow of liquid coolant and pressure is provided; The flow of the further precision controlling cooling liquid of shunt, and unnecessary liquid coolant flow back in the liquid circulation machine and reuses; Thereby realize pressure and the flow of the liquid coolant in the mobile microscale liquid cooling appts of controlled circulation.The liquid circulation machine, in conjunction with volume pump and shunt, forms the microfluid flow-dividing control, can accurately control pressure and the flow of liquid coolant, realizes low discharge, micro-scale measurement.Entrance at the liquid circulation machine is provided with flowmeter, is used for measuring in real time the flow of liquid coolant, accurately to control the flow of liquid coolant.The first outlet at shunt is provided with hydralic pressure gauge, is used for measuring in real time the pressure of liquid coolant, accurately to control the pressure of liquid coolant.And, at the outlet of microscale liquid cooling appts and entrance set temperature meter respectively, to realize the real-time measurement in the temperature of the outlet of microscale liquid cooling appts and entrance to liquid coolant.
Liquid coolant adopts one or more in water, ethylene glycol, alcohol and glycerine.Thermometer comprises thermocouple thermometer, alcohol thermometer, mercury thermometer, gas thermometer, resistance thermometer and flash ranging thermometer.Flowmeter comprises positive displacement, differential pressure type, float-type, turbine type, electromagnetic type, eddy currents and plug-in type.
Heater members is connected to power supply, by the power supply on-load voltage, changes heat flow density.Heater members is electron device or heating resistor.
Another object of the present invention is to provide a kind of method of testing of microscale liquid cooling appts heat dispersion test macro.
The method of testing of microscale liquid cooling appts heat dispersion test macro of the present invention comprises the following steps:
1) utilize the liquid circulation machine to drive liquid coolant work, make the temperature constant of the liquid coolant of outlet;
2) utilize volume pump to control coolant rate, and provide the microscale liquid cooling appts required pressure;
3) a part of liquid coolant flows into the microscale liquid cooling appts by the first outlet of shunt, and by the further precision controlling cooling liquid flow of shunt, unnecessary liquid coolant is back in the liquid circulation machine by the second outlet of shunt;
4) detect the initial pressure of the entrance of microscale liquid cooling appts by hydralic pressure gauge;
5) temperature of the liquid coolant of the entrance by thermometer measure microscale liquid cooling appts;
6) utilize the power supply on-load voltage to control the heat flow density of heater members;
7) utilize the temp measuring system Real-Time Monitoring and record the surface temperature field of heater members;
8) pass through the temperature of the outlet of thermometer measure microscale liquid cooling appts;
9) utilize flowmeter survey and the checking flow from a part of liquid coolant of the first outlet outflow of shunt;
10) another part liquid coolant flow back into the liquid circulation machine from the second outlet of shunt, constantly repeating step 1)~10), until the temperature of liquid coolant, pressure are relatively stable;
11) radiating efficiency of calculating microscale liquid cooling appts and heat transfer coefficient are with the Changing Pattern of the flow of heat flow density, working time and liquid coolant.
Advantage of the present invention:
Microscale liquid cooling appts heat dispersion test macro provided by the invention, utilize on the one hand high reliability, accuracy and the high precision of microfluid flow-dividing control technology, by liquid circulation machine, volume pump and shunt, the temperature of precision controlling cooling liquid, flow and pressure a step by a step, the accurate control of realization to low discharge or utmost point low discharge liquid coolant, detect in real time in conjunction with thermometer, hydralic pressure gauge and flowmeter; Utilize on the other hand the surface temperature field of advanced infrared thermal imaging technique Real-Time Monitoring heater members, by the power supply on-load voltage, change heat flow density, realize the visual inspection of the working temperature field of microscale device.Accuracy, accuracy and reliability that the heat dispersion in conjunction with can greatly improving the microscale liquid cooling appts of these two kinds of technology is measured, the heat dispersion that is particularly suitable for high integration in the national economic development such as Aero-Space, information communication, traffic medical treatment, controls automatically, consumer electronics and national security guarantee field, the microscale liquid cooling appts that high-power, the micro-dimension electronic product is supporting is tested.
The accompanying drawing explanation
The structured flowchart that Fig. 1 is microscale liquid cooling appts heat dispersion test macro of the present invention;
The structural representation of the embodiment that Fig. 2 is microscale liquid cooling appts heat dispersion test macro of the present invention.
Embodiment
Below in conjunction with accompanying drawing, by embodiment, the present invention will be further described.
As shown in Figure 1, microscale liquid cooling appts heat dispersion test macro of the present invention comprises microscale liquid cooling appts, temp measuring system, liquid circulation machine, volume pump and shunt.
As shown in Figure 2, the microscale liquid cooling appts heat dispersion test macro of the present embodiment comprises: microscale liquid cooling appts 1, heater members 2, temp measuring system 31 and 32, liquid circulation machine 4, volume pump 5 and shunt 6; Wherein, heater members 2 is placed on the surface of microscale liquid cooling appts 1; Temp measuring system is towards heater members 2; Liquid coolant flows into liquid circulation machine 4 from the outlet of microscale liquid cooling appts 1, enters volume pump 5 through liquid circulation machine 4, then enters shunt 6, and then the part of liquid coolant enters the entrance of microscale liquid cooling appts 1 by the first outlet 61 of shunt; Another part of liquid coolant comes back in liquid circulation machine 4 by the second outlet 62 of shunt.Further comprise: the flowmeter 7 that is arranged on the entrance of liquid circulation machine 4; Be arranged on the hydralic pressure gauge 8 of the first outlet 61 of shunt; And be arranged on the outlet of microscale liquid cooling appts 1 and the thermometer 9 of entrance.Thermometer adopts thermocouple thermometer.Temp measuring system comprises infrared thermometer 31 and computing machine 32.Shunt 6 adopts the three-way water pipe connector of belt switch valve.Heater members 2 is connected to power supply 21.
The method of testing of the microscale liquid cooling appts heat dispersion test macro of the present embodiment comprises the following steps:
1) utilize liquid circulation machine 4 to drive coolant flow, the coolant temperature that during work, circulator exports is constant is room temperature (0~30 ℃);
2) utilize volume pump 5 to control coolant rate (0~100ml/s), and the required pressure of microscale liquid cooling appts (0~1.6MPa) is provided;
3) use the three-way water pipe connector of belt switch valve to make shunt 6, liquid coolant flows into microscale liquid cooling appts 1 by the first outlet 61, flow by the further precision controlling cooling liquid of shunt, degree of accuracy can reach 0.001ml/s, and unnecessary liquid coolant is back in the liquid circulation machine and reuses by the second outlet 62;
4) detect the initial pressure of the entrance of microscale liquid cooling appts 1 by hydralic pressure gauge 8;
5) measure the temperature of liquid coolant of the entrance of microscale liquid cooling appts 1 by thermometer 9;
6) utilize power supply 21 on-load voltages to control the heat flow density (0~1000W/cm2) of heater members;
7) utilize the surface temperature field (0~200 ℃) of infrared thermometer 31 Real-Time Monitoring heater members, measure and record the variation of maximum temperature value with the flow of heat flow density, working time and the liquid coolant of heater members;
8) utilize thermometer 9 to measure the coolant temperature (0~100 ℃) of the outlet of microscale liquid cooling appts;
9) utilize flowmeter 7 to detect the flow of a part of liquid coolant flowed out from the first outlet 61 of shunt;
10) another liquid coolant 62 flow back into liquid circulation machine 4 from the second outlet of shunt, constantly repeating step 1)~10), until the temperature of liquid coolant, pressure are relatively stable, fluctuation range is no more than ± 5%;
11) calculate the radiating efficiency of microscale liquid cooling appts 1 and the heat transfer coefficient Changing Pattern with the flow of heat flow density, working time and liquid coolant:
A) in the time of freezing the temperature rise value of maximum temperature with respect to the ratio reduced when cooling the evaluation criterion as heat dispersion:
Figure BDA0000395876000000051
unit is %, and radiating efficiency numerical value is higher, represents that the heat dispersion of this kind of microscale liquid cooling appts is better, wherein, and T chthe maximum temperature of heater members during for refrigeration, T hfor the maximum temperature of heater members when cooling, T 0for room temperature;
B), in the work of microscale liquid cooling appts, during the highest working temperature value of reaching capacity of heater members, extrapolate the heat transfer coefficient of microscale liquid cooling appts by the variation of water temperature, unit is W/m 2k, when coolant rate is maximum, corresponding heat transfer coefficient represents the heat radiation limit of this kind of liquid cooling appts, wherein T outfor the temperature of liquid coolant in the outlet of microscale liquid cooling appts, T infor the temperature of liquid coolant at the entrance of microscale liquid cooling appts; The specific heat capacity that C is liquid coolant, the flow that Q is liquid coolant, the density that ρ is liquid coolant, the area that A is heater members;
C) change the flow of heat flow density, working time and liquid coolant, calculate the Changing Pattern of radiating efficiency with the flow of heat flow density, working time and liquid coolant, calculate the Changing Pattern of heat transfer coefficient with the flow of liquid coolant.
Finally it should be noted that, the purpose of publicizing and implementing mode is to help further to understand the present invention, but it will be appreciated by those skilled in the art that: without departing from the spirit and scope of the invention and the appended claims, various substitutions and modifications are all possible.Therefore, the present invention should not be limited to the disclosed content of embodiment, and the scope that the scope of protection of present invention defines with claims is as the criterion.

Claims (10)

1. a microscale liquid cooling appts heat dispersion test macro, it is characterized in that, described microscale liquid cooling appts heat dispersion test macro comprises: microscale liquid cooling appts (1), heater members (2), temp measuring system (31 and 32), liquid circulation machine (4), volume pump (5) and shunt (6); Wherein, described heater members (2) is placed on the surface of microscale liquid cooling appts (1); Described temp measuring system is towards heater members (2); Liquid coolant flows into liquid circulation machine (4) from the outlet of described microscale liquid cooling appts (1), enter volume pump (5) through liquid circulation machine (4), enter shunt (6), then the part of liquid coolant enters the entrance of microscale liquid cooling appts (1) by the first outlet (61) of shunt again; Another part of liquid coolant flow back in liquid circulation machine (4) by the second outlet (62) of shunt.
2. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, it is characterized in that, described temp measuring system comprises infrared thermometer (31) and computing machine (32), described infrared thermometer (31) is towards heater members (2), and described infrared thermometer (31) is connected to computing machine (32).
3. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, is characterized in that, at the entrance of described liquid circulation machine (4), is provided with flowmeter (7).
4. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, is characterized in that, at first of described shunt (6), exports and be provided with hydralic pressure gauge (8).
5. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, is characterized in that, at outlet and the entrance of described microscale liquid cooling appts (1), is respectively arranged with thermometer (9).
6. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, is characterized in that, described heater members (2) is connected to power supply (21), by described power supply on-load voltage, changes heat flow density.
7. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, is characterized in that, described liquid coolant adopts one or more in water, ethylene glycol, alcohol and glycerine.
8. microscale liquid cooling appts heat dispersion test macro as claimed in claim 3, is characterized in that, described flowmeter (7) comprises positive displacement, differential pressure type, float-type, turbine type, electromagnetic type, eddy currents and plug-in type.
9. microscale liquid cooling appts heat dispersion test macro as claimed in claim 5, is characterized in that, described thermometer (9) comprises thermocouple thermometer, alcohol thermometer, mercury thermometer, gas thermometer, resistance thermometer and flash ranging thermometer.
10. the method for testing of a microscale liquid cooling appts heat dispersion test macro, is characterized in that, described method of testing comprises the following steps:
1) utilize the liquid circulation machine to drive liquid coolant work, make the temperature constant of the liquid coolant of outlet;
2) utilize volume pump to control coolant rate, and provide the microscale liquid cooling appts required pressure;
3) a part of liquid coolant flows into the microscale liquid cooling appts by the first outlet of shunt, and by the further precision controlling cooling liquid flow of shunt, unnecessary liquid coolant is back in the liquid circulation machine by the second outlet of shunt;
4) detect the initial pressure of the entrance of microscale liquid cooling appts by hydralic pressure gauge;
5) temperature of the liquid coolant of the entrance by thermometer measure microscale liquid cooling appts;
6) utilize the power supply on-load voltage to control the heat flow density of heater members;
7) utilize the temp measuring system Real-Time Monitoring and record the surface temperature field of heater members;
8) pass through the temperature of the outlet of thermometer measure microscale liquid cooling appts;
9) utilize flowmeter survey and the checking flow from a part of liquid coolant of the first outlet outflow of shunt;
10) another part liquid coolant flow back into the liquid circulation machine from the second outlet of shunt, constantly repeating step 1)~10), until the temperature of liquid coolant, pressure are relatively stable;
11) radiating efficiency of calculating microscale liquid cooling appts and heat transfer coefficient are with the Changing Pattern of the flow of heat flow density, working time and liquid coolant.
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CN104155749A (en) * 2014-09-04 2014-11-19 中国科学院光电技术研究所 Thermal field diaphragm temperature control device capable of being used for large-diameter foundation solar telescope
CN105628731A (en) * 2015-12-23 2016-06-01 中山大学惠州研究院 Detection method for heat transfer performance of lubricating grease for RV reducer
CN106596625A (en) * 2016-11-22 2017-04-26 武汉大学 Method and device for measuring natural-convection heat transfer coefficient at micro-scale
CN106769799A (en) * 2016-11-11 2017-05-31 中山大学 The mode identification method and system of a kind of latent heat of vaporization on-line monitoring
CN106879227A (en) * 2017-01-23 2017-06-20 西安电子科技大学 A kind of micro-channel heat exchanger and fluid interchange experimental provision
CN107356628A (en) * 2017-07-07 2017-11-17 武汉优能纳米流体技术有限公司 A kind of nano-fluid coolant heat exchange property rapid measurement device and evaluation method
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CN104155749A (en) * 2014-09-04 2014-11-19 中国科学院光电技术研究所 Thermal field diaphragm temperature control device capable of being used for large-diameter foundation solar telescope
CN105628731A (en) * 2015-12-23 2016-06-01 中山大学惠州研究院 Detection method for heat transfer performance of lubricating grease for RV reducer
CN105628731B (en) * 2015-12-23 2018-10-09 中山大学惠州研究院 A kind of detection method of RV retarders lubricating grease heat transfer property
CN106769799A (en) * 2016-11-11 2017-05-31 中山大学 The mode identification method and system of a kind of latent heat of vaporization on-line monitoring
CN106596625A (en) * 2016-11-22 2017-04-26 武汉大学 Method and device for measuring natural-convection heat transfer coefficient at micro-scale
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CN107356628A (en) * 2017-07-07 2017-11-17 武汉优能纳米流体技术有限公司 A kind of nano-fluid coolant heat exchange property rapid measurement device and evaluation method
CN107356628B (en) * 2017-07-07 2020-10-20 武汉优能纳米流体技术有限公司 Rapid measurement device and evaluation method for heat exchange performance of nano fluid cooling liquid
CN110361415A (en) * 2018-03-26 2019-10-22 深圳带路科技有限公司 A kind of heat dissipation index measurement and dynamic compatibilization method
CN109932392A (en) * 2019-03-07 2019-06-25 中国电子科技集团公司第五十八研究所 A kind of fluid channel radiator performance test and monitoring system and its application
CN112858382A (en) * 2020-12-31 2021-05-28 东软睿驰汽车技术(沈阳)有限公司 Method and device for detecting heat dissipation performance of liquid cooling system

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