CN103480609A - Device for cleaning precise part by supercritical carbon dioxide - Google Patents
Device for cleaning precise part by supercritical carbon dioxide Download PDFInfo
- Publication number
- CN103480609A CN103480609A CN201310245591.4A CN201310245591A CN103480609A CN 103480609 A CN103480609 A CN 103480609A CN 201310245591 A CN201310245591 A CN 201310245591A CN 103480609 A CN103480609 A CN 103480609A
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- Prior art keywords
- transducer
- carbon dioxide
- supercritical carbon
- cleaning
- cleans
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- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims abstract description 67
- 238000004140 cleaning Methods 0.000 title claims abstract description 51
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims abstract description 33
- 239000001569 carbon dioxide Substances 0.000 title claims abstract description 33
- 239000000463 material Substances 0.000 claims abstract description 23
- 229920002545 silicone oil Polymers 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000005260 corrosion Methods 0.000 claims description 4
- 230000007797 corrosion Effects 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- 238000005452 bending Methods 0.000 claims description 2
- 239000011230 binding agent Substances 0.000 claims description 2
- 239000003822 epoxy resin Substances 0.000 claims description 2
- 229920000647 polyepoxide Polymers 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- 238000003466 welding Methods 0.000 claims description 2
- 239000012498 ultrapure water Substances 0.000 abstract description 2
- 239000000654 additive Substances 0.000 abstract 1
- 230000000996 additive effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000003643 water by type Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 230000009967 tasteless effect Effects 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a device for cleaning a precise part by supercritical carbon dioxide. The device for cleaning the precise part by supercritical carbon dioxide comprises a magnetic driving device, a cleaning kettle, a material frame, an ultrasonic transducer auxiliary structure and a transducer, wherein the flat cap end socket of the cleaning kettle is welded with the magnetic driving device; an inlet pipe and an outlet pipe are positioned in the cap end socket to be communicated with the cleaning kettle; the material frame is connected with the magnetic driving shaft of the magnetic driving device; the ultrasonic transducer auxiliary structure is positioned on the lower part of the cleaning kettle; a transducer support plate is welded with the cleaning kettle; a transducer plate is connected with the transducer support plate via a bolt; and the transducer is installed on the transducer plate and is connected with a power line via a power line hole. According to the device for cleaning the precise part by supercritical carbon dioxide, which is disclosed by the invention, the phenomena that a great quantity of high-purity water is wasted and additive is used are avoided, the microstructure of the precise part can be effectively cleaned, carbon dioxide is recycled, and no pollution is caused to the environment.
Description
Technical field
The invention provides a kind of supercritical carbon dioxide and clean the precision parts device, relate generally to the precision parts that contains blind hole and slit and clean.
Background technology
Along with the fast development of equipment manufacture, the precise treatment degree of component of machine is more and more higher, correspondingly also more and more stricter to the requirement of precision parts cleanliness factor, and greasy dirt and the smear metal of cleaning in precision parts are the prerequisites that guarantees its serviceability.The cleaning device of conventional clean technology need to use a large amount of high purity waters and chemical reagent while cleaning, derivative problem is that a large amount of waste liquids cause environmental pollution thus, also need to carry out drying, easily cause the piece surface oxidation, because the liquid body surface tension is large and the high restriction of viscosity, conventional clean can't effectively be cleaned precision parts blind hole and slit slight void, and in cleaning, cleaning device or cleaning agent may damage precision parts, so the conventional clean device also more and more can't meet the specification requirement of precision parts.
Chinese patent literature CN101740342A discloses a kind of green carbon dioxide supercritical fluid semiconductor cleaning equipment, is mainly semiconductor electronic component is cleaned, and does not relate to precision parts, and not auxiliary cleaning measure increases cleaning performance; The patent that the application number of Changlin Machinery Group, Shandong's application is 201210370799.4 is mentioned a kind of cleaning still for the operation of precision cleaning cleaning parts, this cleaning still size is larger, the internal structure complexity, mounting or dismounting part trouble is not high for small cleaning parts efficiency; Patent CN1990126A discloses a kind of supercritical carbon dioxide cleaning system and method, and cleaning device is funnel-shaped container wide at the top and narrow at the bottom, and cleaning space is little; Patent CN102211096A discloses a kind of supercritical water jet cleaning equipment, utilizes supercritical water effectively to clean silicon chip, and the supercritical water of blast tube ejection may have part not reach supercriticality, thereby reduces cleaning quality.
Summary of the invention
The invention provides a kind of supercritical carbon dioxide and clean the precision parts device, in order to solve high purity water waste in conventional clean, the waste liquor contamination environment, blind hole and slit cleaning performance are not good, clean the problems such as rear dry part.
The technical solution adopted for the present invention to solve the technical problems is: cleaning device comprises magnetic driving equipment 1, cleaning still 2, material frame 3, ultrasonic transducer supplementary structure 4, transducer 5, and wherein said cleaning still 2 comprises cylindrical shell 207, ellipse head 205, flat head 208, inlet tube 209, outlet 210, power line hole 204, chuck 206, Pressure gauge and safe explosion-proof device 202, thermometer 203; Described ultrasonic transducer supplementary structure 4 comprises transducer plate 401 and transducer gripper shoe 407; Described material frame 3 comprises material frame bracket 301, material frame carriage 302 and nut 303.The flat head 208 that cleans still 2 welds mutually with magnetic driving equipment 1, inlet tube 209 is positioned at flat head 208 with outlet 210 and is communicated with cleaning still 2, material frame 3 is connected with the magnetically-actuated axle 102 of magnetic driving equipment 1, ultrasonic transducer supplementary structure 4 is positioned at ellipse head 205 welds that clean still 2, transducer gripper shoe 407 and cylindrical shell 207 welding of cleaning still 2, transducer plate 401 is connected with transducer gripper shoe 407 by hold-down screw 403, transducer 5 is installed on transducer plate 401, and the line that switches on power of the power line hole 204 by ellipse head 205.
Described cleaning still 2 top and the bottom are equipped with flat head 208 and ellipse head 205, and sealed high pressure cleans still 2, and flat head 208 is connected with cylindrical shell 207 by bolt 201, and ellipse head 205 welds mutually with cylindrical shell 207, described material frame 3 is tightened and is expected what frame carriage 302 formed by nut 303 by three threaded column on material frame bracket 301, and material frame carriage 302 is welded by three narrow stainless sheet steels, has deep trouth on thin plate, for installing and the moving parts fixture, described transducer plate 401 comprises transducer hole 402, air vent 406 and balancing orifice 404, transducer hole 402 is installed transducer 5, air vent 406 injects silicone oil, sealing tights a bolt, balancing orifice 404 is pressed into rubber sheet gasket, push down rubber sheet gasket by housing screw 405, wherein transducer 5 quantity are 6, on transducer plate 401, even circumferential distributes, hyperacoustic oscillation action can be diffused into to the every nook and cranny on top, guarantee that vibration is without dead angle, guarantee that supercritical carbon dioxide still has good cleaning performance in operating pressure hour, and air vent 406 is in order to guarantee that cleaning still 2 bottoms does not have air to retain and fill with silicone oil, balancing orifice 404 is to make rubber sheet gasket inside and outside pressure identical for the silicone oil by being filled with by air vent 406, thereby guarantee that transducer plate 401 lower space are identical with upper space pressure, and can not damage transducer, described transducer gripper shoe 407 is the thin corrosion resistant plate of annular, is welded in and cleans on the still wall, has six screw holes hold-down screws 403 are installed, for the fixing of energy converter plate with prevent that silicone oil from leaking, the transducer power line is conveniently drawn in the power line hole 204 of described cleaning still 2, utilizes high temperature high voltage resistant epoxy resin to be sealed, safe and reliable, and can too much not take inner space, described chuck 206 forms for thin corrosion resistant plate bending, is welded in cylindrical shell 207 outsides, and inside passes into conduction oil or recirculated water, for supercritical carbon dioxide is heated, described magnetic driving equipment 1 does not need built-in motor 103, and motor 103 is mounted externally, by magnetically-actuated axle 102 binder frames 3, makes to expect frame 3 rotations, can save the usage space of cleaning still 2, Pressure gauge and safe explosion-proof device 202, thermometer 203 are read out instrument, play the effect of grasping inner CO 2 fluid state.
Technique effect of the present invention is: supercritical carbon dioxide provided by the invention cleans the precision parts device, and by utilizing, magnetic force rotating part and supersonic oscillations are auxiliary cleans, and has strengthened cleaning efficiency, has reduced the pressure while cleaning; Cleansing medium of the present invention is supercritical carbon dioxide, and avoid waste a large amount of high purity waters and organic solvent reduce sewage discharge, energy-conserving and environment-protective; The present invention utilizes the highly dissoluble, low-viscosity, non-corrosiveness of supercritical carbon dioxide and without the surface tension characteristics, gos deep into blind hole and slit is cleaned, and has overcome in the conventional clean method and can't go deep into the difficult problem that micro gap effectively cleans due to surface tension; Carbon dioxide of the present invention is the accessory substance of industrial economy, stable chemical nature, nonpoisonous and tasteless, do not burn, can be recycled, financial cost is low.
The accompanying drawing explanation
Fig. 1 is cleaning device overall structure schematic diagram;
Fig. 2 is the cleaning device top view;
Fig. 3 is material frame carriage schematic diagram;
Fig. 4 is the transducer plate front view;
Fig. 5 is the transducer plate top view;
Fig. 6 is transducer gripper shoe schematic diagram;
Fig. 7 is the transducer schematic diagram.
In figure: the 1-magnetic driving equipment, the 101-magnetic coupling, 102-magnetically-actuated axle, the 103-motor, 2-cleans still, the 201-bolt, 202-Pressure gauge and safe explosion-proof device, the 203-thermometer, 204-power line hole, the 205-ellipse head, the 206-chuck, the 207-cylindrical shell, the 208-flat head, the 209-inlet tube, the 210-outlet, 3-expects frame, 301-expects frame bracket, 302-material frame carriage, the 303-nut, 4-ultrasonic transducer supplementary structure, the 401-transducer plate, the 402-transducer hole, the 403-hold-down screw, the 404-balancing orifice, the 405-housing screw, the 406-air vent, 407-transducer gripper shoe, the 5-transducer.
The specific embodiment
Now by following examples, further describe beneficial effect of the present invention, be interpreted as these embodiment only for the purpose of illustration, do not limit the scope of the invention, within the apparent change that those of ordinary skills make according to the present invention simultaneously and modification are also contained in the scope of the invention.
In conjunction with Fig. 1, the specific embodiment of the present invention is described
At first in cylindrical shell 207 bottoms of cleaning still 2 by transducer 5, transducer plate 401 is connected with transducer gripper shoe 407, then the balancing orifice on transducer plate 401 404 is installed rubber sheet gasket, with housing screw 405, push down, silicone oil is injected by air vent 406, assurance is filled with without the bolt of tightening air vent 406 after gas, then according to the geomery of precision parts to be cleaned, adjust dividing plate and fixture on material frame carriage 302, different precision parts is passed through to nut 303 clampings in material frame bracket 301, magnetically-actuated axle 102 by magnetic driving equipment 1 is connected with material frame bracket 301, the flat head 208 that top is cleaned to still 2 is connected with the cylindrical shell 207 that cleans still 2 by bolt 201 together with magnetic driving equipment 1, now carbon dioxide process pressurization from holding vessel, the heater (not shown) enters and cleans in still 2 by inlet tube 209, Pressure gauge and safe explosion-proof device 202, thermometer 203 shows data, observe and whether reach the supercritical carbon dioxide requirement, after supercritical carbon dioxide forms a period of time, open the motor 103 of magnetic driving equipment 1, material frame 3 is along with 102 rotations of magnetically-actuated axle, open the power supply of ultrasonic transducer 5 simultaneously, produce sonication by supercritical carbon dioxide, after cleaning action a period of time, open outlet 210, the supercritical carbon dioxide that contains dirt is directly flowed out through outlet 210, dirt and supercritical carbon dioxide decompression separation after outlet 210, supercritical carbon dioxide recycles, after cleaning the time of advent, close all power supplys, carry out pressure release by outlet 210, after Pressure gauge and safe explosion-proof device 202 are shown as zero, open flat head 208, to expect that frame 3 takes off from magnetically-actuated axle 102, unload precision parts, cleaned precision parts is put into to assigned address, just completed as mentioned above the cleaning to precision parts.
Claims (10)
1. a supercritical carbon dioxide cleans the precision parts device, it is characterized in that comprising magnetic driving equipment (1), clean still (2), expect frame (3), ultrasonic transducer supplementary structure (4), transducer (5), wherein said cleaning still (2) comprises cylindrical shell (207), ellipse head (205), flat head (208), inlet tube (209), outlet (210), power line hole (204), chuck (206), Pressure gauge and safe explosion-proof device (202), thermometer (203); Described ultrasonic transducer supplementary structure (4) comprises transducer plate (401) and transducer gripper shoe (407); Described material frame (3) comprises material frame bracket (301), material frame carriage (302) and nut (303).The flat head (208) that cleans still (2) welds mutually with magnetic driving equipment (1), inlet tube (209) is positioned at flat head (208) with outlet (210) and is communicated with cleaning still (2), material frame (3) is connected with the magnetically-actuated axle (102) of magnetic driving equipment (1), ultrasonic transducer supplementary structure (4) is positioned at ellipse head (205) weld that cleans still (2), transducer gripper shoe (407) and cylindrical shell (207) welding of cleaning still (2), transducer plate (401) is connected with transducer gripper shoe (407) by hold-down screw (403), transducer (5) is installed on transducer plate (401), and the line that switches on power of the power line hole (204) by ellipse head (205).
2. a kind of supercritical carbon dioxide cleans the precision parts device according to claim 1, it is characterized in that described cleaning still (2) top and the bottom are equipped with flat head (208) and ellipse head (205), sealed high pressure cleans still (2), flat head (208) is connected with cylindrical shell (207) by bolt (201), and ellipse head (205) welds mutually with cylindrical shell (207).
3. a kind of supercritical carbon dioxide cleans the precision parts device according to claim 1, it is characterized in that described material frame (3) tightened and expect what frame carriage (302) formed by nut (303) by three threaded column on material frame bracket (301), material frame carriage (302) is welded by three narrow stainless sheet steels, have deep trouth on thin plate, for installing and the moving parts fixture.
4. a kind of supercritical carbon dioxide cleans the precision parts device according to claim 1, it is characterized in that described transducer plate (401) comprises transducer hole (402), air vent (406) and balancing orifice (404), transducer hole (402) is installed transducer (5), air vent (406) injects silicone oil, sealing tights a bolt, balancing orifice (404) is pressed into rubber sheet gasket, by housing screw (405), pushes down rubber sheet gasket.
5. a kind of supercritical carbon dioxide cleans the precision parts device according to claim 4, it is characterized in that described transducer (5) quantity is 6, at the upper even circumferential of transducer plate (401), distributes.
6. a kind of supercritical carbon dioxide cleans the precision parts device according to claim 1, it is characterized in that described transducer gripper shoe (407) is for the thin corrosion resistant plate of annular, be welded in and clean on the still wall, have six screw holes hold-down screw (403) is installed.
7. a kind of supercritical carbon dioxide cleans the precision parts device according to claim 1, the transducer power line is conveniently drawn in the power line hole (204) that it is characterized in that described cleaning still (2), utilize high temperature high voltage resistant epoxy resin to be sealed, safe and reliable.
8. a kind of supercritical carbon dioxide cleans the precision parts device according to claim 1, it is characterized in that described chuck (206) forms for thin corrosion resistant plate bending, be welded in cylindrical shell (207) outside, inside passes into conduction oil or recirculated water, for supercritical carbon dioxide is heated.
9. a kind of supercritical carbon dioxide cleans the precision parts device according to claim 1, it is characterized in that described magnetic driving equipment (1) does not need built-in motor (103), motor (103) is mounted externally, by magnetically-actuated axle (102) binder frame (3), make to expect frame (3) rotation.
10. clean the precision parts device according to the described a kind of supercritical carbon dioxide of claim 1, it is characterized in that described Pressure gauge and safe explosion-proof device (202), thermometer (203) are read out instrument.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310245591.4A CN103480609A (en) | 2013-06-09 | 2013-06-09 | Device for cleaning precise part by supercritical carbon dioxide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310245591.4A CN103480609A (en) | 2013-06-09 | 2013-06-09 | Device for cleaning precise part by supercritical carbon dioxide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103480609A true CN103480609A (en) | 2014-01-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310245591.4A Pending CN103480609A (en) | 2013-06-09 | 2013-06-09 | Device for cleaning precise part by supercritical carbon dioxide |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109465245A (en) * | 2018-11-29 | 2019-03-15 | 奥林汽车零部件（常熟）有限公司 | A kind of precision auto parts and components cleaning device |
| CN112974412A (en) * | 2021-02-23 | 2021-06-18 | 中国核动力研究设计院 | Chemical decontamination method and device for radioactive pollution by supercritical carbon dioxide |
| CN114130762A (en) * | 2021-11-02 | 2022-03-04 | 国核电站运行服务技术有限公司 | Supercritical carbon dioxide cleaning device and use method thereof |
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| CN201073596Y (en) * | 2007-05-24 | 2008-06-18 | 上海交通大学 | Supercritical liquid refiller |
| TW200840656A (en) * | 2007-04-10 | 2008-10-16 | Taiwan Supercritical Technology Co Ltd | Precision part cleaning method featuring recyclability and reusability |
| KR20090083969A (en) * | 2008-01-31 | 2009-08-05 | 부경대학교 산학협력단 | Method for removing a contamination by using power ultrasonic waves in supercritical carbon dioxide |
| CN203292140U (en) * | 2013-06-09 | 2013-11-20 | 青岛科技大学 | Precise part cleaning device using supercritical carbon dioxide |
-
2013
- 2013-06-09 CN CN201310245591.4A patent/CN103480609A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW438631B (en) * | 1993-09-07 | 2001-06-07 | Hughes Aircraft Co | Low cost equipment for cleaning using liquefiable gases |
| JP2004186530A (en) * | 2002-12-05 | 2004-07-02 | Sony Corp | Cleaning apparatus and cleaning method |
| CN1990126A (en) * | 2005-12-30 | 2007-07-04 | 财团法人工业技术研究院 | Supercritical carbon dioxide cleaning system and method |
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| CN203292140U (en) * | 2013-06-09 | 2013-11-20 | 青岛科技大学 | Precise part cleaning device using supercritical carbon dioxide |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109465245A (en) * | 2018-11-29 | 2019-03-15 | 奥林汽车零部件（常熟）有限公司 | A kind of precision auto parts and components cleaning device |
| CN112974412A (en) * | 2021-02-23 | 2021-06-18 | 中国核动力研究设计院 | Chemical decontamination method and device for radioactive pollution by supercritical carbon dioxide |
| CN114130762A (en) * | 2021-11-02 | 2022-03-04 | 国核电站运行服务技术有限公司 | Supercritical carbon dioxide cleaning device and use method thereof |
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Application publication date: 20140101 |