CN103474317A - X-ray tube emitting various metal characteristic X rays - Google Patents
X-ray tube emitting various metal characteristic X rays Download PDFInfo
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- CN103474317A CN103474317A CN2013104413085A CN201310441308A CN103474317A CN 103474317 A CN103474317 A CN 103474317A CN 2013104413085 A CN2013104413085 A CN 2013104413085A CN 201310441308 A CN201310441308 A CN 201310441308A CN 103474317 A CN103474317 A CN 103474317A
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Abstract
The invention discloses an X-ray tube emitting various metal characteristic X rays. An anode target of the X-ray tube is a multi-metal anode target and made of multiple kinds of metal alloy or metal. The tube voltage is exerted on the X-ray tube and is larger than the excitation voltage of a metal K-series characteristic X ray, and the X-ray tube can emit the needed metal K-series characteristic X ray. Meanwhile, when the tube voltage which is larger than the excitation voltage of a K-series characteristic X ray of the metal with the highest atomic number of the anode target is exerted on the X-ray tube, the X-ray tube can emit the K-series characteristic X rays of all metal of the anode target. The enough-strong needed Kalpha-series characteristic X rays of the target metal can be obtained through the X-ray tube, and the enough-strong and different-wavelength Kalpha-series characteristic X rays of other target metal can be obtained through the X-ray tube. Therefore, test analysis for different demands by an instrument user is greatly facilitated, the inconvenience caused by replacement of different X-ray tubes is avoided, the demand that the characteristic X rays of multiple kinds of metal are needed for testing and analysis is met, and the work efficiency and the work accuracy are improved.
Description
Technical field
The present invention relates to a kind ofly for x-ray apparatus equipment, can send the X-ray tube of the characteristic X-ray of the different various metals of wavelength.
Background technology
In existing X ray test analysis Instrument equipment, X-ray tube is widely used as x-ray source, and common X-ray tube has two kinds, and a kind of is the glass tube (see figure 1); Another kind is metal ceramic tube, and its primary structure is identical with glass tube, and just component materials wherein is replaced by cermet by glass etc., and, due to the stability of metal ceramic tube, be difficult for the advantage such as broken and more and more obtain wide popularization and application.The X ray production process of these two kinds of X-ray tubes: be energized electronics anode target high-speed motion under (being added between negative electrode, anode) high-tension acceleration that the cathode filament of heating sends, and be focused into electron beam through the metal focus mask, this beam bombardment plate target of high-speed motion, plate target sends X ray, and pass from the beryllium window, obtain needed X ray.The kinetic energy of the electron beam of bombardment plate target only fraction converts the energy of X ray to, and the power conversion 95% or more becomes heat energy, and the lasting mobile cooling water of these heat energy in cooling water pipeline in the Cu pedestal of jointed anode target taken away, thus the cooling anodes target.The high voltage be added between X-ray tube negative electrode, anode usually is referred to as tube voltage, and the electric current between X-ray tube negative electrode, anode usually is referred to as tube current.
Usually, the X-ray spectrum that X-ray tube sends forms (see figure 2) by continuous spectrum and characteristic X-ray spectrum, and X-ray tube sends the anode target material decision of the wavelength of characteristic X-ray by X-ray tube, its characteristic X ray strength is far longer than the X ray intensity of its continuous spectrum, approximately than the X ray intensity of continuous spectrum large 1000 times.For the x-ray apparatus that needs the single wavelength X ray, great majority utilize characteristic X-ray analyzed, because being characteristic X ray strength, K α is used widely the most by force again, the wavelength that sends CuK α characteristic X-ray as the plate target Cu target X-ray tube that is Cu is 0.154nm, and the W target that plate target is W is that wavelength that ray tube sends WK α characteristic X-ray is 0.0211nm etc.
In general, in existing X ray test analysis Instrument equipment, the X-ray tube of the X-ray diffraction instrument of Xray fluorescence spectrometer, various uses etc., its tube voltage is at 10kV～60 kV, the X-ray tube as Al target, Cr target, Cu target, Mo target, Ag target, W target etc. commonly used; The instrument and equipment of existing x-ray inspection defect, the X-ray tube of x-ray flaw detector, X ray CT etc., its tube voltage is at 40kV～450 kV, the X-ray tube as Mo target, W target etc. commonly used.The plate target of these X-ray tubes is single metal and makes, characteristic X-ray+the continuous spectrum of the single metal of this sending is (even individually the people is other metal that mixes trace, also just for the manufacture craft of improving X-ray tube etc., rather than mix the characteristic X-ray of other metal of trace for sending).
Above-mentioned x-ray apparatus in actual use, when needing the characteristic X-ray of different wave length, usually by the X-ray tube mode of changing different targets, obtain, must use Cu target X-ray tube during wavelength is 0.154nm as needed characteristic X-ray, must use W target X-ray tube etc. during wavelength is 0.0211nm as needed characteristic X-ray, bring thus the user inconvenient greatly.
Summary of the invention
The object of the present invention is to provide a kind of X-ray tube of the characteristic X-ray that can send various metals for x-ray apparatus, the X-ray tube that does not need to change different targets just can obtain the characteristic X-rays such as K α of (different metal) different wave length, is very easy to the demand that the instrument user uses for difference.
The object of the present invention is achieved like this: the plate target of X-ray tube is many metal anodes target, many metal anodes target is formed by various metals alloy or preparation of metals, apply to described X-ray tube and be greater than the tube voltage that required metal K is the excitation voltage of characteristic X-ray, it is characteristic X-ray that the X-ray tube plate target just can send required metal K, and, applying to described X-ray tube to be greater than in plate target the K of high atomic number Z metal is the tube voltage of the excitation voltage of characteristic X-ray, and just can send the K of all metals in plate target is characteristic X-ray.And X-ray tube of the present invention is except plate target is various metals or alloy preparation, identical with common X-ray tube.
Relate to the metal alloy of plate target and metal ion or the metallic atom of metal in this patent, all referred to as metal.For the present invention---can send the X-ray tube of various metals characteristic X-ray, be greater than the metal of Ag for the contained atomic number Z of plate target, be referred to as high Z metal, as W, U etc. (can send the characteristic X-rays such as WK α, UK α that wavelength is less than 0.056nm); Be less than and equal Ag, be greater than and equal the metal of manganese for the contained atomic number Z of plate target, be referred to as middle Z metal (can send AgK α, MoK α, the characteristic X-rays such as CuK α, FeK α of wavelength in 0.056nm～0.194nm scope); Be less than the metal of manganese for the contained atomic number Z of plate target, be referred to as low Z metal, as Cr, Ti, Al etc. (can send wavelength and be longer than the characteristic X-rays such as the CrK α of 0.229nm, TiK α, AlK α).
General, each metal in many metal anodes target of the present invention is for being uniformly distributed.
Further, increase the ratio of the atomic quantity of the wherein a kind of metal in many metal anodes target in the present invention, the strength ratio of its corresponding K α characteristic X-ray also increases.
A kind of scheme is, in many metal anodes target of the present invention, a kind of metal is high Z metal, and a kind of metal is middle Z metal, and/or a kind of low Z metal.
A kind of scheme is that a kind of for hanging down the Z metal in many metal anodes target of the present invention, another kind is high Z metal.
A kind of scheme is that a kind of for hanging down the Z metal in many metal anodes target of the present invention, another kind is middle Z metal.
On the other hand, many metal anodes target of the present invention consists of double layer of metal.In many metal anodes target of double layer of metal, the top layer metal thickness is 0.02 μ m～100 μ m, and the thickness of the another kind of metal of its lower floor is 0.1mm～5mm.
A kind of scheme is, many metal anodes target one deck of the present invention is low Z metal, and one deck is high Z metal, and the thickness of top layer metal is 0.02 μ m～100 μ m, and the thickness of lower metal is 1mm～3mm.
A kind of scheme is, many metal anodes target one deck of the present invention is middle Z metal, and one deck is high Z metal, and the thickness of top layer metal is 0.05 μ m～50 μ m, and the thickness of the metal of lower floor is 1mm～3mm.
As everyone knows, during 3～5 times of the excitation voltage that the tube voltage that imposes on X-ray tube is excitation anode target material characteristic X-ray, its characteristic X ray strength is large with the ratio of intensity continuum spectra, can obtain the test result that signal to noise ratio is good (although the tube voltage of X-ray tube more than the excitation voltage of this characteristic X-ray is large must be more, the intensity of this characteristic X-ray is just larger), Here it is, and the existing instrument and equipment of characteristic X-ray that utilizes applies the common rule of tube voltage to X-ray tube.
For X-ray tube of the present invention, excitation voltage according to the K α characteristic X-ray (wavelength) of selecting a kind of metal in plate target, and the aforementioned rule that imposes on the X-ray tube tube voltage, while to X-ray tube, applying the tube voltage of 3～5 times of its excitation voltages, its characteristic X ray strength is large with the ratio of intensity continuum spectra, but, in order to obtain this characteristic X ray strength that intensity is larger, can also apply higher tube voltage to X-ray tube.
The characteristic X ray strength I that comprises K system
mwith the pass of X-ray tube tube voltage V, tube current i, be:
I
m=Pi（V-V
m）
n
In formula, P and n---constant, n equals the n=1.5 of 1.5～2(K system, the n=2 of L system);
V
m---the excitation voltage that a certain characteristic X-ray is.
Can find out from above formula, at tube power one regularly, increase tube voltage V than increasing tube current i and can access larger characteristic X ray strength I
m.
With regard to X-ray tube of the present invention is used, use is greater than the tube voltage of 5 times of excitation voltages, just can obtain the individual features X ray that intensity is larger, even its characteristic X ray strength reduces with the ratio of intensity continuum spectra, and, in the situation that tube current intensity is constant, tube voltage is larger, and the intensity of individual features X ray is larger.For the K that obtains all metals in its plate target is characteristic X-ray, the K that the tube voltage that imposes on described X-ray tube is greater than the heaviest in its plate target (high atomic number) metal is the excitation voltage of characteristic X-ray, and, in the situation that tube current intensity is constant, tube voltage is larger, and the intensity of each characteristic X-ray is also larger.
We know, in order to obtain the longer characteristic X-ray of wavelength, adopt low Z metal to make plate target; In order to obtain the shorter characteristic X-ray of wavelength, in employing, the Z metal is made plate target; In order to obtain the shorter characteristic X-ray of wavelength, adopt high Z metal to make plate target.
The X-ray tube be evenly distributed in many metal anodes target for the content of each metal, use voltage according to the maximum of described X-ray tube maximum power and described X-ray tube, change the atomic quantity percentage of each metal, thereby can change the strength ratio of the characteristic X-rays such as K α that each target metal sends; Tube voltage and the power of described X-ray tube raise, improve the intensity of the characteristic X-rays such as K α that each metal of its plate target sends, for this reason, mainly from the maximum of each tenor ratio of many metal anodes target, X-ray tube, use this two aspect of voltage and power to manufacture and design the X-ray tube of described plate target, obtain meeting the characteristic X-ray of the required metal of requirement of strength simultaneously.
Many metal anodes target that the present invention adopts can by a kind of high Z metal, a kind of in Z metal and a kind of low Z metal be uniformly distributed the X-ray tube formed, X-ray tube as equally distributed Ti, Cu, many metal anodes of W target, the atomic quantity ratio of its Ti, Cu, W can be 1～3:1～3:5～10, its maximum use voltage is 160～320KV, and its maximum power is 2～3KW.
And two kinds of metallicity X ray commonly using for the user, can adopt corresponding two kinds of metals as anode target material.As a kind of X-ray tube of the present invention, two kinds of metals that the present invention adopts are made plate target, obtain two kinds of respective metal characteristic X-rays that strong user commonly uses.Especially, a kind of low Z metal (as Cr, Ti etc.) and a kind of middle Z metal (as Cu, Mo etc.) are made the plate target of X-ray tube, just can obtain the longer characteristic X-ray of acquisition wavelength commonly used (as CrK α, the TiK α etc.) characteristic X-ray (CuK α, MoK α etc.) shorter with wavelength; A kind of low Z metal (as Cr, Ti etc.) and a kind of high Z metal (as W, U etc.) are made the plate target of X-ray tube, meet X-ray tube of the present invention and both can send the longer characteristic X-ray of wavelength (as CrK α, TiK α etc.), also can send the shorter characteristic X-ray of wavelength (as WK α, UK α etc.); A kind of middle Z metal (as Fe, Cu etc.) and a kind of high Z metal (as W, U etc.) are made the plate target of X-ray tube, meet X-ray tube of the present invention and both can send the shorter characteristic X-ray of wavelength (as FeK α, CuK α etc.), also can send the shorter characteristic X-ray of wavelength (as WK α, UK α etc.), reach the convenient purpose of using.
Many metal anodes target for a kind of low Z metal and a kind of high Z preparation of metals, as required, change the atomic quantity percentage of two kinds of metals, thereby the strength ratio of the K α characteristic X-ray of the longer wavelength that the low Z metal of change sends and the K α characteristic X-ray of the shorter wavelength that high Z metal sends, the anode target material for preparing described X-ray tube, as the atomic quantity of Cr and U, than being the Cr-U alloy target material of 1:6～30, the atomic quantity of Co and W is than the Co-W target for 1:5～25 etc.
Another kind of for the low Z metal of one deck and a floor height Z metal are many metal anodes target that stratiform forms, according to its top layer for hanging down the Z metal or being divided into two kinds for high Z metal.A kind of for its top layer for low Z metal (as Cr, Ti etc.), directly bear beam bombardment, send (wavelength is long) individual features X ray (as CrK α, TiK α etc.); Its lower floor is high Z metal (as W, U etc.), bears the beam bombardment through the low Z metal in top layer, sends (wavelength is shorter) individual features X ray (as WK α, UK α etc.).Another kind is high Z metal (as W, U etc.) for its top layer, directly bears beam bombardment, sends (wavelength is shorter) individual features X ray (as WK α, UK α etc.); The beam bombardment through the high Z metal in top layer, for low Z metal (as Cr, Ti etc.), bears in its lower floor, sends (wavelength is grown) individual features X ray (as CrK α, TiK α etc.).
X-ray tube for the equally distributed many metal anodes target of each metal, sending of the various metals characteristic X-ray of X-ray tube of the present invention: the electron beam sent from cathode filament bombards plate target under the high voltage electric field effect, in the situation that be added in the excitation voltage of the characteristic X-ray of the metallic atom of the tube voltage of negative electrode and anode in being greater than plate target or metal ion, the characteristic X-ray that plate target sends is through the beryllium window (absorbing very weak) of very thin thickness, the characteristic X-ray gone out from the beryllium window transmission is the characteristic X-ray of acquisition, and, the K that is greater than the heaviest in plate target (high atomic number) metal when tube voltage is the excitation voltage of characteristic X-ray, just can send the K of all metals in plate target is characteristic X-ray, through the beryllium window transmission, go out, the K that obtains all metals is characteristic X-ray.
For the X-ray tube that is the plate target that stratiform forms by two kinds of metals, the electron beam of bombardment plate target under the high voltage electric field effect, this electron beam inspires its characteristic X-ray except having an effect with plate target top layer metal and (goes out through the beryllium window transmission,) part outside, some electron beam will inspire through the another kind of metal of top layer metal bombardment plate target lower floor the characteristic X-ray of lower metal, pass the top layer metal, from the beryllium window transmission, go out, the K that just obtains two kinds of metals of top layer metal and lower floor is characteristic X-ray.Obviously, when K that the tube voltage that is added in negative electrode and anode is less than metal be that in the situation of excitation voltage of characteristic X-ray, the K that just can not comprise respective metal gone out through the beryllium window transmission is characteristic X-ray.The thickness of the plate target top layer metal of X-ray tube is 0.02 μ m～100 μ m, the thickness of plate target lower metal is 0.1mm～5mm, certainly, the plate target top layer metal of X-ray tube is thinner, the another kind of metal that more kinetic energy penetration of electrons plate target top layer metal bombardment plate target lower floors are just arranged, the characteristic X-ray photon that the lower metal bombarded sends is just more, and intensity is just stronger.
Especially, the low Z metal of one deck and a floor height Z metal are the X-ray tube that stratiform forms in plate target, and in one deck, Z metal and a floor height Z metal are the X-ray tube that stratiform forms in plate target, the thickness of its plate target top layer metal 1-1 is 0.05 μ m～100 μ m, and the thickness of the another kind of metal 1-2 of plate target lower floor is 1mm～3mm.
In sum: provided by the invention for X ray test analysis Instrument equipment X-ray tube, can send the characteristic X-ray of various metals, do not need to change X-ray tube and other Installation and Debugging work of different targets, as long as comprised needed metal in the plate target of this X-ray tube, the tube voltage of this X-ray tube is added to suitably high voltage, the K α that just can obtain enough strong required target metal is characteristic X-ray, and enough other target metal K α of strong different wave length is characteristic X-ray, be very easy to the test analysis of instrument user for different demands, exempted the inconvenience of changing different X-ray tube etc., the characteristic X-ray that has adapted to the needs various metals carries out the demand of test analysis, efficiency and the precision of work have been improved.
The accompanying drawing explanation
Below in conjunction with drawings and Examples, the invention will be further described.
Fig. 1 is the X-ray tube structural representation
Fig. 2 is the X-ray spectrum that the molybdenum target X-ray tube sends
The X-ray tube that each tenor of Fig. 3 embodiments of the invention 1, embodiment 2, embodiment 3, embodiment 4 is evenly distributed in anode target material;
The layer of metal that Fig. 4 is embodiments of the invention 5, embodiment 6, embodiment 7, embodiment 8 and other metal of one deck are the X-ray tube that stratiform forms plate target.
In figure, Fig. 3 (b) and Fig. 4 (b) are respectively plate target in Fig. 3 (a), Fig. 4 (a) and near the amplification of (circle part) thereof; 1 for plate target, 2 is that electron beam, 3 is that negative electrode, 4 is that the X ray, 5 sent is that beryllium window, 6 is the copper pedestal of plate target 1, the top layer metal that 1-1 is the stratiform plate target, the lower floor that 1-2 is the stratiform plate target (another kind) metal.
Embodiment
In the present invention, except plate target is many metal or alloy, X-ray tube structure of the present invention is identical with common X-ray tube.Fig. 3, Fig. 4 are respectively as X-ray tube schematic diagram of the present invention, and Fig. 3 (b) and Fig. 4 (b) are respectively plate target in Fig. 3 (a), Fig. 4 (a) and near the amplification of (circle part) thereof.The metallic atom of the 1 different atomic numbers that are two or more or the plate target that metal ion forms, 2 electron beams that focus on for the line focus cover, bombardment plate target 1 under the high voltage electric field effect, 3 for sending the negative electrode (comprising filament etc.) of electron beam 2,4 X ray that send for plate target 1,5 is the beryllium window, 6 is the copper pedestal of plate target 1 (cooling water channel or cooling insulating oil road are inside arranged, connect high-voltage anode).The plate target that plate target 1 in Fig. 3 (b) is evenly distributed in anode target material for the content of each metal; Plate target in Fig. 4 (b) is that top layer layer metal 1-1 and other metal of another layer 1-2 are the plate target that stratiform forms in plate target.
X-ray tube target of the present invention is that various metals alloy or preparation of metals form, and the preparation of its plate target is divided into two large classes:
The plate target that the content that one class is each metal in plate target is evenly distributed in plate target, be shown in Fig. 3; The another kind of layer of metal 1-1 of being and other metal of another layer 1-2 are the plate target that stratiform forms, and see Fig. 4.
X-ray tube for the equally distributed plate target 1 of each metal of this class as shown in Figure 3, sending of the various metals characteristic X-ray of X-ray tube of the present invention: as shown in Figure 3, the electron beam 2 sent from cathode filament 3 bombards plate target 1 under the high voltage electric field effect, in the situation that be added in the excitation voltage of the characteristic X-ray of the metallic atom of the tube voltage of negative electrode and anode in being greater than plate target or metal ion, the characteristic X-ray 4 that plate target 1 sends absorbs very weak through the beryllium window 5(of very thin thickness), the characteristic X-ray 4 transmitted from beryllium window 5 is the characteristic X-ray of acquisition, and, the K that is greater than the heaviest in plate target (high atomic number) metal when tube voltage is the excitation voltage of characteristic X-ray, just can send the K of all metals in plate target is characteristic X-ray, through 5 transmissions of beryllium window, go out, the K that obtains all metals is characteristic X-ray.
Be the X-ray tube of the plate target 1 that stratiform forms by two kinds of metals for a class as shown in Figure 4, the electron beam 2 of bombardment plate target under the high voltage electric field effect, this electron beam has an effect except the plate target top layer metal with 1-1 and inspires its characteristic X-ray (through 5 transmissions of beryllium window, to go out, ) part outside, some electron beam will inspire through the another kind of metal of the top layer metal bombardment 1-2 of plate target lower floor the characteristic X-ray of lower metal, pass top layer 1-1 metal, from 5 transmissions of beryllium window, go out, the K that just obtains two kinds of metals of top layer metal and lower floor is characteristic X-ray.Obviously, when K that the tube voltage that is added in negative electrode and anode is less than metal be that in the situation of excitation voltage of characteristic X-ray, the K that just can not comprise respective metal gone out through 5 transmissions of beryllium window is characteristic X-ray.The thickness of the plate target top layer metal 1-1 of X-ray tube is 0.02 μ m～100 μ m, the thickness of plate target lower metal 1-2 is 1mm～5mm, certainly, the plate target top layer metal 1-1 of X-ray tube is thinner, the another kind of metal that more kinetic energy penetration of electrons plate target top layer metal 1-1 bombardment plate target lower floors are just arranged, the characteristic X-ray photon that the lower metal 1-2 bombarded sends is just more, and intensity is just stronger.
embodiment 1:referring to Fig. 3, a kind of X-ray tube be evenly distributed in anode target material by Ti, Cu, W, the atomic quantity of its Ti, Cu, W is than being 1:1:8, its maximum use voltage is 225KV, its maximum power is 3KW, and X-ray tube can send TiK α or CuK α+TiK α or WK α+CuK α+TiK α.
For TiK α, CuK α, ratio row due to Ti, Cu atom in target are less, in order to make this X-ray tube send enough TiK α, CuK alpha ray intensity, in the situation that tube current is constant, can by improve tube voltage reach and surpass tube voltage than hour the TiK α that sends while being pure Ti or pure Cu of plate target or the transmitted intensity of CuK α, for example, for CuK α, the CuK α intensity that this X-ray tube tube voltage sends while being 110KV equates with the CuK α intensity that same tube current, the fine copper target X-ray tube of 30KV tube voltage send.
In this X-ray tube is used, recommend: in the situation that tube current is constant, in order to obtain the TiK α of sufficient intensity, apply the tube voltage of 40KV～225KV; In the situation that tube current is constant, in order to obtain the CuK α of sufficient intensity, apply the tube voltage of 50KV～225KV; In order to obtain the WK α of sufficient intensity, apply 160KV～225KV tube voltage, the CuK α simultaneously sent, TiK α are also very strong.
embodiment 2:referring to Fig. 3, a kind of X-ray tube be evenly distributed in anode target material by Co, W, the atomic quantity of its Co, W is than being 1:15, and its maximum use voltage is 320KV, and its maximum power is 3KW, and X-ray tube can send CoK α or WK α+CoK α.
In order to make this X-ray tube send enough CoK alpha ray intensity, in the situation that tube current is constant, can by improve tube voltage reach and surpass tube voltage than hour the transmitted intensity of the CoK α that sends while being pure Co of plate target.
In this X-ray tube is used, recommend: in the constant situation of tube current, in order to obtain the CoK α of sufficient intensity, apply the tube voltage of 50KV～225KV; For obtain sufficient intensity WK α (certainly, CoK α is also very strong), apply 160～320KV tube voltage.
embodiment 3:referring to Fig. 3, a kind of X-ray tube be evenly distributed in anode target material by Cr, U, the atomic quantity of its Cr, U is than being 1:25, and its maximum use voltage is 450KV, and its maximum power is 2.5KW, and X-ray tube can send CrK α or UK α+CoK α.
In order to make this X-ray tube send enough CrK alpha ray intensity, in the situation that tube current is constant, can by improve tube voltage reach and surpass tube voltage than hour the transmitted intensity of the CrK α that sends while being pure Cr of plate target.
In this X-ray tube is used, recommend: in the constant situation of tube current, in order to obtain the CrK α of sufficient intensity, apply the tube voltage of 130KV～450KV; For obtain sufficient intensity UK α (certainly, CrK α is also strong), apply 260～450KV tube voltage.
embodiment 4:referring to Fig. 3, a kind of X-ray tube be evenly distributed in anode target material by Cr, Cu, the atomic quantity of its Cr, Cu is than being 1:1, and its maximum use voltage is 60KV, and its maximum power is 2.5KW, and X-ray tube can send CrK α, CuK α.
In this X-ray tube is used, recommend: for the Cr that obtains sufficient intensity, the characteristic X-ray of Cu, apply the tube voltage of 25KV～60KV.
embodiment 5:referring to Fig. 4, a kind ofly by the low Z Metal Cr of one deck and a floor height Z metal U, be the X-ray tube that stratiform forms in plate target, wherein, the plate target top layer is that thickness is the low Z Metal Cr of 0.15 μ m, the high Z metal U layer of plate target is under low Z metal level, and the thickness of high Z metal U layer is 2mm, it is maximum use voltage for 320KV～450KV and more than, its maximum power is 1.5KW, and X-ray tube can send CrK α or UK α+CrK α.
In order to make this X-ray tube send enough CrK alpha ray intensity, in the situation that tube power is constant, can by improve tube voltage reach and surpass tube voltage than hour the transmitted intensity of the CrK α that sends while being pure Cr of plate target.
In this X-ray tube is used, recommend: in the situation that tube current is constant, in order to obtain the Cr characteristic X-ray of sufficient intensity, apply 50KV～320KV and above tube voltage; UK α (certainly, CrK α is also strong) in order to obtain sufficient intensity, apply 200KV～320KV and above tube voltage.
embodiment 6:referring to Fig. 4, a kind ofly by the low Z Metal Cr of one deck and a floor height Z metal U, be the X-ray tube that stratiform forms in plate target, wherein, the plate target top layer is that thickness is the low Z Metal Cr of 100 μ m, the high Z metal U layer of plate target is under low Z metal level, and the thickness of high Z metal U layer is 1mm, and its maximum use voltage is 320KV～450KV, its maximum power is 2.5KW, and X-ray tube can send CrK α or UK α+CrK α.
In order to make this X-ray tube send enough CrK alpha ray intensity, in the situation that tube power is constant, can by improve tube voltage reach and surpass tube voltage than hour the transmitted intensity of the CrK α that sends while being pure Cr of plate target.
In this X-ray tube is used, recommend: in the situation that tube current is constant, in order to obtain the Cr characteristic X-ray of sufficient intensity, apply 50KV～320KV and above tube voltage; UK α (certainly, CrK α is also strong) in order to obtain sufficient intensity, apply 200KV～320KV and above tube voltage.
embodiment 7:referring to Fig. 4, a kind of in a floor height Z metal W and one deck Z metal M o be the X-ray tube that stratiform forms in plate target, wherein, the plate target top layer is that thickness is the high Z metal W of 5 μ m, the middle Z metal M o layer of plate target is under high Z metal W layer, and the thickness of middle Z metal M o layer is 3mm, it is maximum use voltage for 225KV and more than, its maximum power is 2.5KW, and X-ray tube can send MoK α or WK α+MoK α.
In order to make this X-ray tube send enough MoK alpha ray intensity, in the situation that tube power is constant, can by improve tube voltage reach and surpass tube voltage than hour the transmitted intensity of the MoK α that sends while being pure Mo of plate target.
In this X-ray tube is used, recommend: in the situation that tube current is constant, in order to obtain the MoK α characteristic X-ray of sufficient intensity, apply 70KV～225KV and above tube voltage; WK α (certainly, MoK α is also strong) in order to obtain sufficient intensity, apply 160KV～225KV and above tube voltage.
embodiment 8:referring to Fig. 4, a kind of in a floor height Z metal W and one deck Z metal M o be the X-ray tube that stratiform forms in plate target, wherein, the plate target top layer is that thickness is the high Z metal W of 20 μ m, the middle Z metal M o layer of plate target is under high Z metal W layer, and the thickness of middle Z metal M o layer is 2mm, it is maximum use voltage for 225KV and more than, its maximum power is 2KW, and X-ray tube can send MoK α or WK α+MoK α.
In order to make this X-ray tube send enough MoK alpha ray intensity, in the situation that tube power is constant, can by improve tube voltage reach and surpass tube voltage than hour the transmitted intensity of the MoK α that sends while being pure Mo of plate target.
In this X-ray tube is used, recommend: in the situation that tube current is constant, in order to obtain the Mo characteristic X-ray of sufficient intensity, apply 70KV～225KV and above tube voltage; WK α (certainly, MoK α is also very strong) in order to obtain sufficient intensity, apply 160KV～225KV and above tube voltage.
Although the present invention is disclosed by above-mentioned preferred embodiment and accompanying drawing, the present invention is not subject to the restriction of these embodiment.Other according to the spirit and scope of the present invention, make change and modification, do not break away from protection scope of the present invention.
Claims (26)
1. an X-ray tube, it is characterized in that: the plate target of X-ray tube is many metal anodes target, many metal anodes target is prepared from by various metals or metal alloy, apply to described X-ray tube and be greater than the tube voltage that required metal K is the excitation voltage of characteristic X-ray, just can send required metal K is characteristic X-ray, and, applying to described X-ray tube to be greater than in many metal anodes target the K of high atomic number metal is the tube voltage of the excitation voltage of characteristic X-ray, and the K that just can send all metals in many metal anodes target is characteristic X-ray.
2. X-ray tube as claimed in claim 1, it is characterized in that: each metal in described many metal anodes target is for being uniformly distributed.
3. X-ray tube as claimed in claim 2, it is characterized in that: many metal anodes target of described X-ray tube, use voltage according to the maximum of described X-ray tube maximum power and described X-ray tube, change the atomic quantity percentage of each metal, thereby can change the strength ratio of the characteristic X-rays such as K α that each target metal sends; Tube voltage and the power of described X-ray tube raise, improve the intensity of the characteristic X-rays such as K α that each metal of its plate target sends, mainly manufacture and design the X-ray tube of described plate target from this two aspect, obtain meeting the characteristic X-ray of the required metal of requirement of strength simultaneously.
4. as claim 1 or 2 or 3 described X-ray tubes, it is characterized in that: in described many metal anodes target, a kind of metal is high Z metal, and a kind of metal is middle Z metal, and a kind of low Z metal.
5. X-ray tube as claimed in claim 1 or 2 is characterized in that: a kind of in described many metal anodes target is middle Z metal, and another kind is high Z metal.
6. as claim 1 or 2 or 3 described X-ray tubes, it is characterized in that: a kind of in described many metal anodes target is low Z metal, and another kind is high Z metal.
7. as claim 1 or 2 or 3 described X-ray tubes, it is characterized in that: a kind of in described many metal anodes target is low Z metal, and another kind is middle Z metal.
8. X-ray tube as claimed in claim 4, it is characterized in that: described many metal anodes target is equally distributed Ti, Cu, W, the atomic quantity ratio of its Ti, Cu, W is 1～3:1～3:5～10, and the maximum use of described X-ray tube voltage is 160～320KV, and its maximum power is 2～3KW.
9. the described X-ray tube of claim 8, it is characterized in that: described many metal anodes target is equally distributed Ti, Cu, W, the atomic quantity of its Ti, Cu, W is than being 1:1:8, its maximum use voltage is 225KV, its maximum power is 3KW, when the tube voltage that applies 40KV～225KV, obtain strong TiK α; When the tube voltage that applies 50KV～225KV, obtain strong TiK α, CuK α characteristic X-ray; Apply 160KV～225KV tube voltage, obtain strong WK α characteristic X-ray, the CuK α simultaneously sent, TiK α characteristic X-ray are also strong.
10. X-ray tube as claimed in claim 5, it is characterized in that: described many metal anodes target is equally distributed Co and W, Co is 1:5～25 with the atomic quantity ratio of W, described X-ray tube is maximum use voltage for 225KV～450 KV and more than, its maximum power is 2KW～3KW, and X-ray tube can send CoK α characteristic X-ray or WK α+CoK α characteristic X-ray.
11. X-ray tube as claimed in claim 10, it is characterized in that: the Co of described many metal anodes target, the atomic quantity of W are than being 1:15, the maximum use of described X-ray tube voltage is 320KV, applies the tube voltage of 50KV～225KV, obtains strong CoK α characteristic X-ray; Apply 160～320KV tube voltage, obtain strong WK α characteristic X-ray, the CoK α characteristic X-ray simultaneously sent is also strong.
12. X-ray tube as claimed in claim 6, it is characterized in that: described many metal anodes target is equally distributed Cr and U, Cr is 1:6～30 with the atomic quantity ratio of U, described X-ray tube is maximum use voltage for 225KV～450 KV and more than, its maximum power is 1KW～2.5KW, and X-ray tube can send CrK α characteristic X-ray or UK α+CrK α characteristic X-ray.
13. X-ray tube as claimed in claim 12, it is characterized in that: the Cr of its many metal anodes target, the atomic quantity of U are than being 1:25, the maximum use of described X-ray tube voltage is 450 KV, applies the tube voltage of 50KV～450KV, obtains strong CrK α characteristic X-ray; Apply 260～450KV tube voltage, obtain strong UK α characteristic X-ray, the CrK α characteristic X-ray simultaneously sent is also strong.
14. X-ray tube as claimed in claim 7, it is characterized in that: its many metal anodes target is equally distributed Cr, Cu, the atomic quantity of Cr, Cu is than being 1:1, the maximum use of described X-ray tube voltage is 60KV, its maximum power is 2.5KW, apply the tube voltage of 25KV～60KV, obtain strong CrK α characteristic X-ray and strong CuK α characteristic X-ray.
15. X-ray tube as claimed in claim 1 is characterized in that: described many metal anodes target consists of double layer of metal.
16. X-ray tube as claimed in claim 15 is characterized in that: many metal anodes target top layer metal thickness is 0.02 μ m～100 μ m, and the thickness of the another kind of metal of many metal anodes target lower floor is 1mm～5mm.
17. X-ray tube as claimed in claim 15, it is characterized in that: described many metal anodes target, use voltage according to the maximum of described X-ray tube maximum power and described X-ray tube, change the thickness of top layer metal, thereby can change the strength ratio of the characteristic X-rays such as K α that each target metal sends; Tube voltage and the power of described X-ray tube raise, improve the intensity of the characteristic X-rays such as K α that each metal of its plate target sends, mainly manufacture and design the X-ray tube of described plate target from this two aspect, obtain meeting the characteristic X-ray of two kinds of metals of requirement of strength simultaneously.
18., as claim 15 or 16 or 17 described X-ray tubes, it is characterized in that: described many metal anodes target one deck is low Z metal, and one deck is high Z metal, and the thickness of top layer metal is 0.1 μ m～50 μ m, and the thickness of lower metal is 1mm～3mm.
19. X-ray tube as claimed in claim 18 is characterized in that: the top layer of described many metal anodes target is low Z metal, and lower floor is high Z metal.
20. X-ray tube as claimed in claim 19, it is characterized in that: its many metal anodes target top layer is that thickness is the Metal Cr of 0.15 μ m, the thick metal U of the 2mm of plate target layer is under the Metal Cr layer, the maximum voltage that uses of described X-ray tube is more than 320～450KV reaches, its maximum power is 1.5 KW～2.5KW, and X-ray tube can send CrK α characteristic X-ray or UK α characteristic X-ray+CrK α characteristic X-ray.
21. X-ray tube as claimed in claim 19, it is characterized in that: its many metal anodes target top layer is that thickness is the Metal Cr of 100 μ m, the thick metal U of the 1mm of plate target layer is under the Metal Cr layer, the maximum voltage that uses of described X-ray tube is more than 320～450KV reaches, its maximum power is 1.5 KW～2.5KW, and X-ray tube can send CrK α characteristic X-ray or UK α characteristic X-ray+CrK α characteristic X-ray.
22. X-ray tube as described as claim 20 or 21 is characterized in that: apply the tube voltage of 50KV～320KV, obtain strong CrK α; Apply 200～450KV and above tube voltage, obtain strong UK α characteristic X-ray, the CrK α characteristic X-ray simultaneously sent is also very strong.
23. as claim 15 or 16 or 17 described X-ray tubes, it is characterized in that: described many metal anodes of X-ray tube target Z metal and floor height Z metal in one deck are stratiform and form, the thickness of many metal anodes target top layer metal is 0.02 μ m～100 μ m, and the thickness of the another kind of metal of many metal anodes target lower floor is 1mm～3mm.
24. X-ray tube as claimed in claim 23, it is characterized in that: described many metal anodes target skin depth is the middle Z metal M o of 5 μ m, lower floor is the thick high Z metal W of 3mm, described X-ray tube is maximum use voltage for 225KV and more than, its maximum power is 1.5～2.5KW, and X-ray tube can send MoK α characteristic X-ray or WK α characteristic X-ray+MoK α characteristic X-ray.
25. X-ray tube as claimed in claim 23, it is characterized in that: described many metal anodes target top layer is that thickness is the W of 20 μ m, the thick metal M o layer of the 2mm of plate target is under metal W layer, described X-ray tube is maximum use voltage for 225KV and more than, its maximum power is 1.5～2.5KW, and X-ray tube can send MoK α characteristic X-ray or WK α characteristic X-ray+MoK α characteristic X-ray.
26. X-ray tube as described as claim 24 or 25 is characterized in that: apply the tube voltage of 70KV～225KV, obtain strong MoK α; Apply 160～225KV and above tube voltage, obtain strong WK α characteristic X-ray, the MoK α characteristic X-ray simultaneously sent is also strong.
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| CN2013104413085A CN103474317A (en) | 2013-09-25 | 2013-09-25 | X-ray tube emitting various metal characteristic X rays |
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| CN2013104413085A CN103474317A (en) | 2013-09-25 | 2013-09-25 | X-ray tube emitting various metal characteristic X rays |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103871832A (en) * | 2014-03-21 | 2014-06-18 | 中国科学院空间科学与应用研究中心 | Extreme ultraviolet pulse generation modulator |
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| US3336494A (en) * | 1962-09-15 | 1967-08-15 | Yawata Iron & Steel Co | X-ray tube with alloy target |
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Application publication date: 20131225 |