CN103435257A - Glass film laminated plate and manufacturing method thereof - Google Patents

Glass film laminated plate and manufacturing method thereof Download PDF

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Publication number
CN103435257A
CN103435257A CN2013103470517A CN201310347051A CN103435257A CN 103435257 A CN103435257 A CN 103435257A CN 2013103470517 A CN2013103470517 A CN 2013103470517A CN 201310347051 A CN201310347051 A CN 201310347051A CN 103435257 A CN103435257 A CN 103435257A
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glassy membrane
glass substrate
supporting glass
membrane
glassy
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CN2013103470517A
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CN103435257B (en
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刘国正
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Priority to CN201310347051.7A priority Critical patent/CN103435257B/en
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Priority to PCT/CN2014/084041 priority patent/WO2015018370A1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06—Joining glass to glass by processes other than fusing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06—Joining glass to glass by processes other than fusing
    • C03C27/10—Joining glass to glass by processes other than fusing with the aid of adhesive specially adapted for that purpose

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Ceramic Engineering (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Laminated Bodies (AREA)

Abstract

The invention provides a glass film laminated plate and a manufacturing method of the glass film laminated plate. The laminated plate comprises a support glass substrate and a glass film that are laminated, the edge of the glass film is located on the laminated surface of the support glass substrate, a sealing layer is arranged between the peripheral side surface of the glass film and the laminated surface of the support glass substrate, and the difference of the surface roughness of the contact parts of the laminated surface of the support glass substrate and the laminated surface of the glass film is more than or equal to 1.0nm. According to the scheme provided by the invention, a sealing area with very strong adhesion force and a rough surface laminated area with very weak adhesion force are arranged on the contact surface of the two layers of glass, relevance processing can be made stably through the sealing area, the glass film can be very easily stripped through the rough surface laminated area, so that the glass film is prevented from being damaged during stripping because of the too strong adhesion force, and the glass film is also prevented from falling off during relevance processing because of the too weak adhesion force.

Description

Glassy membrane plywood and manufacture method thereof
Technical field
The present invention relates to the glass film technology, relate in particular to a kind of glassy membrane plywood and manufacture method thereof, be particularly useful for liquid-crystal display or organic EL(electro-luminescence, electroluminescent) glassy membrane that uses in the cover glass of the equipment such as the glass substrate of the equipment such as the flat-panel monitor of indicating meter etc. or solar cell, lithium ion battery, digital signage, touch panel, electronic book or organic EL illuminating or pharmaceuticals encapsulation etc.
Background technology
Popularized in recent years liquid-crystal display, the flat-panel display devices such as OLED display, these flat-panel display devices are required to further slimming, especially in OLED display, require by folding or reeling and easily carrying, and can not only can also be for curved surface for plane, in addition, on the bodywork surface of motor vehicle or the roof of buildings, post, the surface that outer wall etc. have the object of curved surface forms solar cell, perhaps form the words of organic EL illuminating, its purposes can become extensively, thereby, require further thin plate and high pliability for the substrate used or cover plate in these equipment.
The twinkler used in OLED display is deteriorated because the gas with oxygen or water vapour etc. contacts, thereby, the gas-barrier property of having relatively high expectations for the substrate used in OLED display, therefore expect to use glass substrate, but, the glass used in substrate is due to different from resin molding and do not tolerate tensile stress, therefore pliability is low, can produce breakage when by the curved glass substrate, glass baseplate surface being applied to tensile stress, for glass substrate is given pliability and need to be carried out ultra thin plate, having proposed thickness is the following glassy membranes of 200 μ m.
For the glass substrate used in the electron device at flat-panel monitor or solar cell etc., the membrane that can carry out nesa coating etc. is processed or the manufacture association process of the various electron devices such as clean, manufacturing association process refers at the various films such as nesa coating that are coated with on glass, while making glass surface possess flat-panel monitor or solar cell electron device corresponding function, must the experience associated manufacturing process, such as membrane listed in literary composition is processed or clean, but, during the glass substrate membranization used in carrying out these electron devices, because glass is hard brittle material, therefore because STRESS VARIATION slightly will produce breakage, when carrying out the processing that above-mentioned various electron devices are associated, very difficult, in addition, because the glassy membrane of thickness below 200 μ m is rich in flexiblely, when being manufactured association process, be difficult to position.
Name be called " glass film laminate " application number be 201180010413.2 patent documentations one and name be called patent documentation two that " glass film laminate " application number is 201080021282.3 all put down in writing a kind of by supporting glass substrate and glassy membrane by the stacked glass film laminate be combined into, for improving the treatability of glassy membrane, even adopt the sheet glass that there is no intensity or rigidity in monomer, also can share existing glass and manufacture liquid crystal display device with the liquid crystal display device manufacturing line, after finishing, operation can peel off glass substrate, in addition, owing to using supporting mass, therefore also easily position during association process.
But, realizing the further ultra thin plate of sheet glass, carry out ultra thin plate while changing into as glassy membrane, even above-mentioned glass film laminate, after making, electron device also is difficult to glassy membrane is peeled off from the supporting glass substrate, by glassy membrane when the supporting glass substrate is peeled off, from the corner part of glassy membrane, start to peel off, but, in the glass film laminate of putting down in writing in patent documentation one, easily produce damaged or shortcoming when peeling off glassy membrane, especially, in the situation that glassy membrane and the adhesion of supporting glass substrate, this problem is particularly remarkable, in order to address this problem, also considered to make glassy membrane outstanding stacked from a supporting glass substrate part, but also there is the problem of the glassy membrane breakage of exposing from the supporting glass substrate.
The scheme of patent documentation one, while on the surface to glassy membrane, carrying out film forming processing, clean, due to the supporting glass substrate and glassy membrane bonding well, therefore location, operation in the time of can be processed without any problems; Yet, while peeling off after processing, glassy membrane, because bonding force is crossed bending by force and significantly, exists glassy membrane that damaged defect occurs when peeling off.
The scheme of patent documentation two, carry out the milled processed based on aluminum oxide and oxidation decorations by the contact surface to the supporting glass substrate, after thus the surface roughness Ra of contact surface being adjusted into to 2.2nm equably, by the contact surface laminated glass film at the supporting glass substrate, produce the glassy membrane plywood.For glassy membrane plywood in patent documentation two, while carrying out clean, film forming processing on the surface to glassy membrane, there is the inadequate situation of bonding force, the defect that while when processing, having glassy membrane from the supporting glass strippable substrate, can't well position and operate.
Summary of the invention
The invention provides a kind of glassy membrane plywood and manufacture method thereof; for overcoming defect of the prior art; provide provide protection by the supporting glass substrate for glassy membrane; at an easy rate glassy membrane peeled off and made glassy membrane injury-free from the supporting glass substrate, and guaranteeing good location and operation.
The invention provides a kind of glassy membrane plywood, comprise stacked supporting glass substrate and glassy membrane, the edge of described glassy membrane is positioned on the lamination surface of described supporting glass substrate, have sealing ply between all sides of described glassy membrane and the lamination surface of described supporting glass substrate, the difference of the surfaceness of the part that the lamination surface of described supporting glass substrate and the lamination surface of described glassy membrane contact with each other is more than or equal to 1.0nm.
The invention provides a kind of manufacture method of above-mentioned glassy membrane plywood, comprise the following steps:
Step 1, be laminated in glassy membrane on the supporting glass substrate; And the difference of the surfaceness of supporting glass substrate and glassy membrane contact surface is more than or equal to 1.0nm; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of described supporting glass substrate and glassy membrane is less than 15 * 10 -7/ ℃;
Step 2 applies sealing material on the lamination surface of all sides of glassy membrane and supporting glass substrate; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of any in described sealing material and described supporting glass substrate and glassy membrane is less than 100 * 10 -7/ ℃;
Step 3, heated the subassembly of above-mentioned glassy membrane and supporting glass substrate, makes sealing material solidify to form sealing ply.
Glassy membrane plywood provided by the invention and manufacture method thereof, while carrying out clean, film forming processing on the surface to glassy membrane, because supporting glass substrate and glassy membrane are bonding well by sealing ply, therefore can carry out without any problems associated location, operation of manufacturing while processing; When the supporting glass substrate is peeled off, wipe glassy membrane off sealing ply, can peel off well from uneven surface, because the difference of the lamination surface surfaceness of glassy membrane and supporting glass substrate contacts is larger, so breakage can not occur in glassy membrane.
Be provided with on the contact surface of glassy membrane and supporting glass substrate that the extremely strong seal area of bonding force is provided with the zone of sealing ply and the extremely weak vacuum suck district of bonding force is the zone between sealing ply and vacuum chamber, therefore by the extremely strong zone of bonding force, can make glassy membrane be laminated in securely stably enforcement manufacture association process under the suprabasil state of supporting glass; In addition, owing to thering is the extremely weak zone of bonding force, therefore can after manufacturing association process, at an easy rate glassy membrane be peeled off from the extremely weak zone of bonding force, thereby, breakage in the time of can preventing from crossing on the whole the glassy membrane caused by force and peeling off because of the bonding force of supporting glass substrate and glassy membrane, and improper the peeling off of the glassy membrane during manufacture association process that can prevent from causing a little less than crossing on the whole because of bonding force comes off.
The accompanying drawing explanation
The front view of the glassy membrane plywood that Fig. 1 provides for the embodiment of the present invention one;
Fig. 2 is along A-A to sectional view in Fig. 1;
The front view of the glassy membrane plywood that Fig. 3 provides for the embodiment of the present invention two;
Fig. 4 is along B-B to sectional view in Fig. 3;
The front view that Fig. 5 is supporting glass substrate in Fig. 3;
Fig. 6 is the structural representation after the glassy membrane plywood in Fig. 3 is taken away glassy membrane;
Fig. 7 is the local enlarged diagram in Fig. 4;
The sectional view of the glassy membrane plywood that Fig. 8 provides for the invention process three.
Embodiment
As shown in Figure 1 and Figure 2, the invention provides a kind of glassy membrane plywood, comprise stacked supporting glass substrate 1 and glassy membrane 2, the edge of glassy membrane 2 is positioned on the lamination surface of supporting glass substrate 1,
Have sealing ply 3 between all sides of glassy membrane 2 and the lamination surface of supporting glass substrate, the difference of the surfaceness of the part that the lamination surface of the lamination surface of supporting glass substrate 1 and glassy membrane 2 contacts with each other is more than or equal to 1.0nm.
The manufacture method of the glassy membrane plywood of the present embodiment comprises the following steps:
Step 1, be laminated in glassy membrane 2 on supporting glass substrate 1; And supporting glass substrate 1 is more than or equal to 1.0nm with the difference of the surfaceness of glassy membrane 2 contact surfaces; When temperature changes between 25～300 ℃, supporting glass substrate 1 is less than 15 * 10 with the difference of the thermal expansivity of glassy membrane 2 -7/ ℃;
Step 2 applies sealing material on the lamination surface of all sides of glassy membrane 2 and supporting glass substrate 1; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of any in sealing material and supporting glass substrate and glassy membrane all is less than 100 * 10 -7/ ℃; The difference of the thermal expansivity of sealing material and supporting glass substrate is less than 100 * 10 -7/ ℃, and the difference of the thermal expansivity of sealing material and glassy membrane is less than 100 * 10 -7/ ℃;
Step 3, heated the subassembly of above-mentioned glassy membrane and supporting glass substrate, makes sealing material solidify to form sealing ply.
Below provide a kind of concrete manufacture method, the transparent sheet glass of the rectangular shape that is 500 μ m using lengthwise 300mm, horizontal wide 300mm, thickness is used as supporting glass.Be provided with the otch 11 of right-angle triangle of vertical 3mm, horizontal 3mm at supporting glass one jiao as plane of orientation.As the glassy membrane be layered on the supporting glass substrate, used the glassy membrane that lengthwise 298mm, horizontal wide 298mm, thickness are 100 μ m.Supporting glass substrate and glassy membrane have used the non-alkali glass of Nippon Electric Glass Co., Ltd's system, and (thermal expansivity under ProductName: OA-10G, 30～380 ℃ is 38 * 10 -7/ ℃).By overflow downdraw be shaped supporting glass substrate and glassy membrane.On the contact surface of supporting glass substrate, the fluorspar acid solution of coating 1%, carried out roughened processing thus.The coating fluorspar acid solution carried out clean after 30 seconds, using the fluoric acid treated side as uneven surface.The surface roughness Ra of the lamination surface on the supporting glass substrate is 1.5nm.The surface roughness Ra of the lamination surface of glassy membrane is 0.2nm.Afterwards, laminated glass film on the contact surface of supporting glass substrate, be coated with the sintering sealing material, thereby obtain the glassy membrane plywood of embodiment.For the glassy membrane plywood obtained, while carrying out clean, film forming processing on the surface to glassy membrane, due to bonding well by sealing ply between supporting glass substrate and glassy membrane, location, operation in the time of therefore can be processed without any problems.Because the difference of the surfaceness of two lamination surface is more than or equal to 1.0nm, the bonding force between two surface in contacts a little less than, when the supporting glass substrate is peeled off glassy membrane, can peel off well from uneven surface thus, breakage can not occur in glassy membrane.
The manufacture method of the present embodiment glassy membrane plywood is with respect to the scheme of patent documentation one, and the contact surface of supporting glass substrate is carried out to roughened processing, and the surface roughness Ra of the contact surface of supporting glass substrate and glassy membrane is 0.2nm.The composition of supporting glass substrate and glassy membrane is not restricted, such as the glass that can use the various compositions such as the glass (being soda-lime glass) that contains alkalimetal oxide, non-alkali glass.The shape of supporting glass substrate is not restricted, but is preferably rectangle.Wherein, at this, " rectangle " also comprises and is essentially essentially rectangular, cut away the shape at one of them angle, cut away Hou inclined-plane, this angle 11 for location, convenient operation.The present invention can in the situation that the glass substrate that the equipment such as flat-panel monitor, solar cell such as liquid-crystal display or OLED display of making are used, and the lens of organic EL illuminating compatibly use.
Below providing several embodiments, at first, is 38 * 10 to long 720mm, wide 600mm, thickness of slab 0.4mm, thermal expansivity -7/ ℃ supporting glass substrate (Asahi Glass Co., Ltd manufacture, AN100) and corresponding glassy membrane carry out the pure water cleaning, UV cleans and surface is become clean.Both sides glass is stacked; Then, utilize silk screen printing to take width as 0.6mm and be the frame shape and the category of glass seal, sealing materials is printed on to the circumference of glassy membrane; Then, with 430 ℃, layer glass is heated 10 minutes sintered glass class seal, sealing materials in atmosphere.
Can also utilize screen process press that the mixture of solvent-free addition reaction-type organosilicon (organosilicon company of SHIN-ETSU HANTOTAI manufactures, KNS-320A, viscosity: 0.40Pas)) 100 mass parts and platinum class catalyzer (manufacture of organosilicon company of SHIN-ETSU HANTOTAI, CAT-PL-56) two mass parts is coated on to the circumference of glassy membrane and glassy membrane is laminated on the supporting glass substrate.Then, in atmosphere with 180 ℃ to supporting glass base plate heating 30 minutes, make the mixture solidified of solvent-free addition reaction-type organosilicon and platinum class catalyzer, obtain the encapsulated with silicone resin material.Then, in atmosphere with 450 ℃ to glassy membrane plywood heat treated one hour.
In addition, for the glass laminated class of other preparation, under decompression state (1.0 * 10 -5pa) be warming up to 450 ℃ from room temperature, from the glassy membrane plywood, do not produce gas.Then, as the resin that is used to form sealing ply, used at two ends and there is the straight chain shape polysiloxane (Arakawa Chemical Industries, Ltd. manufacture, trade(brand)name " 8500 ") of vinyl and there is the methyl hydrogen siloxane (Arakawa Chemical Industries, Ltd. manufactures, trade(brand)name " 12031 ") of hydrogen silyl in molecule.Then, it is mixed mutually with platinum class catalyzer (Arakawa Chemical Industries, Ltd.'s manufacture, trade(brand)name " CAT12070 "), further utilize pentane to be diluted, prepare solids component and account for 50% mixture, by extrusion coated, in the glassy membrane side, in atmosphere, with 250 ℃ of heating, within 30 minutes, make it be solidified to form the encapsulated with silicone resin material.At this, the mode that becomes 1:1 with the mol ratio of hydrogen silyl and vinyl is adjusted the ratio of mixture of straight chain shape polysiloxane and methyl hydrogen siloxane.Add the platinum class catalyzer of five mass parts with respect to total 100 mass parts of straight chain shape polysiloxane and methyl hydrogen siloxane.
Usually, if glass plies is gathered into folds and is bonded to each other on lamination surface upper glass surface and with bonding force close contact to a certain degree, think this bonding force be by the silanol base (Si-OH) that is present in two glass surfaces hydrogen each other in conjunction with or the generation of the chemical bond that causes of local dehydrating condensation, the Van der Waals force between two glass surfaces etc. produce.Preferably the difference of the surfaceness of supporting glass substrate and glassy membrane contact surface is greater than 1.0nm.If the surfaceness average deviation of two lamination surface is more than 1.0nm, the essence contact area on two surfaces is too small, therefore can not make two face close contacts with sufficient bonding force, is easy to peel off.
Preferably, temperature is in the time of 25 ℃～300 ℃, and the difference of the thermal expansivity of supporting glass substrate and glassy membrane is 15 * 10 -7/ ℃ below.Temperature is in the time of 25 ℃～300 ℃, and the difference of the thermal expansivity of sealing material and supporting glass substrate is 100 * 10 -7/ ℃ below, the difference of the thermal expansivity of sealing material and glassy membrane is 100 * 10 -7/ ℃ below.
The thermal expansivity of supporting glass substrate can be identical in fact with glassy membrane, also can be different.If identical in fact,, when duplexer of the present invention is heat-treated, be difficult for producing warpage on glassy membrane or supporting glass substrate.The difference of the thermal expansivity of glassy membrane and supporting glass substrate is preferably 300 * 10 -7/ ℃ below, more preferably 100 * 10 -7/ ℃ below, more preferably 15 * 10 -7/ ℃ below.Glassy membrane can be the glass of identical material with the supporting glass substrate.In this case, the difference of the thermal expansivity of two glass is 0.The composition of supporting glass substrate for example can be identical with alkali glass, non-alkali glass.Wherein, the preferred non-alkali glass because percent thermal shrinkage is less.
In addition, manufacture the method for glassy membrane and supporting glass substrate and be restricted especially, can adopt known method in the past.For example, in fusing known glass raw material and after obtaining melten glass in the past, utilize under float glass process, scorification, crystal pulling method, discharge orifice and draw method, traction method again etc. and be configured as tabularly, can obtain glassy membrane and supporting glass substrate.Wherein the category of glass seal, sealing materials can be lead glass, borate glass, zinc glass, vanadate glass, tellurate glass, stibnate glass etc., if consider sealing-in (binding property) with respect to glassy membrane and supporting glass substrate, its reliability (adhesion reliability, stopping property) and for the impact property of environment, human body etc., preferably tin-phosphoric acid class glass, bismuth class glass.
Above-mentioned sealing material be acrylic resin, polyolefin resin, polyurethanes resin, silicone based resin, polyamide-based resin, polyimide based resin, polyether-ether-ketone resinoid, polyphenylene oxide resinoid, poly (arylene ether) be resin, redix, silicone elastomer, silicone elastomer, fluorosilicone elastomerics or Perfluoroelastomer.The category of glass sealing material is the glass of melt temperature between 300～750 ℃.
As for forming the resin of sealing material, be not restricted especially as mentioned above, but be based on excellent heat resistance and with respect to the excellent such reason of the rippability of glassy membrane, preferably silicone resin.In addition, though based on for example about 400 ℃ process also deteriorated aspect hardly of about 1 hour, rippability, also preferred silicone resin.
The melt temperature of the category of glass seal, sealing materials so obtained is preferably 400 ℃～750 ℃, more preferably 500 ℃～700 ℃/℃.And the thermal expansivity contained after category of glass seal, sealing materials sintering is preferably 20 * 10 -7～250 * 10 -7/ ℃.
As in the situation that the known method that the coating sealing material is used can list extrusion coated method, print roll coating method, bar shaped coating method, silk screen print method, intaglio plate coating method etc., can suitably be selected according to the kind of sealing material.For example, utilize the resin combination that the known methods such as extrusion coated method will contain organosilicon (host), linking agent and catalyzer to be coated on the surface of supporting glass substrate, heat afterwards it is solidified, this organosilicon (host) contains the poly-silica a heatable brick bed of dimethyl of straight chain shape at molecule.By being heating and curing, the ground combination of the surface chemistry of resin and supporting glass substrate.
The condition that is heating and curing the also use level because of catalyzer is different.For example, in the situation that coordinated the platinum class catalyzer of two mass parts with respect to total amount 100 mass parts of host and linking agent, in atmosphere, preferably with 50 ℃～300 ℃, reacted, more preferably reacted with 100 ℃～250 ℃.In addition, the reaction times is preferably 5 minutes～and 60 minutes, more preferably 10 minutes～30 minutes.
There is the metastatic silicone resin of low organosilicon for sealing ply is made as, preferably with residual in silicone resin, do not have the mode of unreacted silicone ingredients to be cured reaction as far as possible.If temperature of reaction as above and reaction times, can make not residually in silicone resin has a unreacted silicone ingredients, so preferably.In the situation that compare long with the above-mentioned reaction times or temperature of reaction is too high, carry out the oxygenolysis of silicone resin simultaneously and generated low-molecular-weight silicone ingredients, the organosilicon transitivity likely increases.From in order to make the good angle of rippability heat treated, it is also preferred being cured reaction in the not residual mode that unreacted silicone ingredients arranged in silicone resin as far as possible.
In addition, when making glassy membrane be layered on the supporting glass substrate, silicone resin combines with the surface of supporting glass substrate by means of anchoring effect, is fixed more firmly.As the sintering of category of glass sealing material, particularly, such as listing the sintering undertaken by process furnace, the sintering undertaken by laser radiation etc.
Sealing ply 3 comprises makes to have the aromatic diamines of benzoxazole structure and the polyimide that the polycondensation of aromatic tetracarboxylic acid's acid anhydride class forms.Preferably sealing ply only comprises above-mentioned polyimide.Above-mentioned " polycondensation " carried out as follows, at first, in solvent, Diamines and tetracarboxylic anhydride class, in the open loop polyaddition reaction, obtained to polyamic acid solution, then, by this polyamic acid solution, after forming as required base film etc., carries out dehydrating condensation (imidization).The solvent used while making Diamines and tetracarboxylic anhydride Type of Collective obtain polyamic acid is so long as just be not particularly limited the material that the polyamic acid as the monomer of raw material and generation all dissolves, preferred polar organic solvent, such as listing: METHYLPYRROLIDONE, dimethyl sulfoxide (DMSO), hempa acid amide, ethyl cellosolve acetate, diethylene glycol dimethyl ether etc.These solvents can be used separately or mix use.The usage quantity of solvent is to be enough to make the amount that the monomer as raw material dissolves to get final product, and as concrete usage quantity, the mass percent that can list monomer shared total mass in being dissolved with the solution of monomer is generally 5～40%, preferably 10～30%.Condition for the polyreaction (following also referred to as " polyreaction ") that obtains polyamic acid is used known condition in the past to get final product, as concrete example, can list in organic solvent the temperature range continuously stirring of 0～80 ℃ and/or mix 10 minutes～30 hours.Also can make as required polyreaction carry out stage by stage or elevate the temperature or reduce.In this situation, the order of addition of two kinds of monomers is not particularly limited, and preferably in the solution of aromatic diamines, adds aromatic tetracarboxylic acid's acid anhydride class.Polyamic acid shared mass percent in the polyamic acid solution obtained by polyreaction is preferably 5～50%, more preferably 10～30%, the viscosity of above-mentioned solution is in the mensuration of utilizing cloth formula viscometer to carry out (25 ℃), consider to be preferably 10～2000Pas, more preferably 100～1000Pas from the stability aspect of liquor charging.Carrying out vacuum defoamation in polyreaction, is effective for the organic solvent solution of the polyamic acid of manufacturing high-quality.In addition, can add a small amount of end-capping reagent before polyreaction in aromatic diamines and control polymerization.As end-capping reagent, can list the compound that maleic anhydride etc. has carbon-carbon double bond.Usage quantity while using maleic anhydride preferably every 1 mole of aromatic diamines is 0.001～1.0 mole.
Above-described embodiment is applicable to electricity field, and the thickness of supporting glass substrate is between 0.08mm to 1.3mm, and the thickness of glassy membrane is between 0.01mm to 1.1mm.
Above-described embodiment has following three kinds of preferred implementations:
Embodiment mono-
As shown in Figure 1 and Figure 2, glassy membrane plywood structure: the lamination surface of supporting glass substrate or the lamination surface of glassy membrane are carried out to roughened processing, make the difference of the surfaceness of two lamination surface increase, be easy to peel off, but preferred version is that the lamination surface of supporting glass substrate is carried out to roughened processing, because its relative glassy membrane is thicker, be easy to roughened processing.
The manufacture method of glassy membrane plywood is as follows:
Step 1A, carry out roughened processing to the lamination surface 12 of supporting glass substrate;
Step 1B, be compound in glassy membrane 2 on the lamination surface 12 of supporting glass substrate; And the difference of the surfaceness of supporting glass substrate and glassy membrane contact surface is more than or equal to 1.0nm; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of supporting glass substrate and glassy membrane is less than 15 * 10 -7/ ℃;
Step 2 applies sealing material on the lamination surface of all sides of glassy membrane and supporting glass substrate; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of any in sealing material and supporting glass substrate and glassy membrane is less than 100 * 10 -7/ ℃;
Step 3, heated the subassembly of above-mentioned glassy membrane and supporting glass substrate, makes sealing material solidify to form sealing ply 3.
Above-mentioned roughened processing can be form from the etch processes based on fluoric acid, etch processes based on atmospheric pressure plasma, based thin film roughened, the roughened processing based on sandblast, one or more the processing based on grinding form roughened, that form based on surface modification roughened.
Embodiment bis-
As shown in Fig. 3-7, glassy membrane plywood structure: the lamination surface of supporting glass substrate is provided with the seal area of enclosed shape and encloses the vacuum suck district 30 be placed in the sealing district, is provided with many grooves that communicate with each other 10 in vacuum suck district 30; Between groove 10 and glassy membrane 2, the common vacuum chamber 20 that forms, have the sealing ply 3 for sealed vacuum chamber 20 on seal area.
The manufacture method of glassy membrane plywood is as follows:
Step 1C divides the seal area that is closed and encloses the vacuum suck district 30 of putting with the sealing district on the lamination surface of described supporting glass substrate, and the edge shape of seal area and glassy membrane 2 is suitable; When temperature changes between 25～300 ℃, supporting glass substrate 1 is less than 15 * 10 with the difference of the thermal expansivity of glassy membrane 2 -7/ ℃;
Step 1D offers many grooves that communicate with each other 10 in this vacuum suck district 30;
Step 1E, be compound in glassy membrane on the lamination surface of above-mentioned supporting glass substrate, and make glassy membrane cover all above-mentioned grooves fully;
Step 2 applies sealing material on the lamination surface of all sides of glassy membrane and supporting glass substrate; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of any in sealing material and supporting glass substrate and glassy membrane is less than 100 * 10 -7/ ℃;
Step 3 is heated the subassembly of above-mentioned glassy membrane and supporting glass substrate in vacuum environment, makes sealing material solidify to form sealing ply 3.Air in the heat-processed further groove can overflow by uncured sealing material.
Glassy membrane plywood provided by the invention, be provided with on the contact surface of glassy membrane and supporting glass substrate that the extremely strong sealing area of bonding force is provided with the seal area of sealing ply 3 and the extremely weak lamination area of bonding force is the vacuum suck district 30 between sealing ply 3 and vacuum chamber 20, therefore by the extremely strong zone of bonding force, can make glassy membrane be laminated in securely stably enforcement manufacture association process under the suprabasil state of supporting glass; In addition, owing to thering is the extremely weak zone of bonding force, therefore can after manufacturing association process, at an easy rate glassy membrane be peeled off from the extremely weak zone of bonding force, thereby, breakage in the time of can preventing from crossing on the whole the glassy membrane caused by force and peeling off because of the bonding force of supporting glass substrate and glassy membrane, and improper the peeling off of the glassy membrane during manufacture association process that can prevent from causing a little less than crossing on the whole because of bonding force comes off.
As the optimal way of embodiment bis-, also be provided with a plurality of depressions 40 on the surface of supporting glass substrate and glassy membrane edge contact, caving in 40 all is communicated with by groove 10, caves in 40 and is filled with the sealing material that is used to form sealing ply 3.Sealing material is a kind of or its mixture in bismuth class glass, vanadium class glass, antimony class glass, tellurium class glass, plumbous class glass, phosphate glass.Sealing material is filled in depression 40, is convenient to deposit the moulding with sealing ply.
By the structure of discontinuous depression is set at the circumference with the contacted one side of above-mentioned glassy membrane at above-mentioned supporting glass substrate, can be more prone to and peel off reliably glassy membrane and supporting glass substrate, thereby, breakage in the time of can preventing from crossing on the whole the glassy membrane caused by force and peeling off because of the bonding force of supporting glass substrate and glassy membrane, and improper the peeling off of the glassy membrane during manufacture association process that can prevent from causing a little less than crossing on the whole because of bonding force comes off.The upper strata glassy membrane can be whole piece glass, can be also that multi-disc rectangle glass is spliced, and sealing material is centered around the side of every rectangle glass.
In order to guarantee the intensity of supporting glass substrate, cave in 40 and the degree of depth of groove 10 all be less than half of supporting glass substrate 1 thickness.
As the preferred implementation of above-described embodiment, groove 10 comprises many continuous grooves and is communicated with the connecting groove 10c of continuous groove.The shape of groove and connecting groove can be crossed polyline shaped etc. for linearity, curve-like continuously, at this, does not limit.In the present embodiment, glassy membrane 2 is rectangular, and continuous groove alternately is connected from beginning to end stepped by transverse concave groove 10a and longitudinal fluting 10b, and the both ends of groove form and cave in 40 continuously.Simple in structure, be easy to make.
On the basis of above-described embodiment, for further guaranteeing the intensity of supporting glass substrate, the all transverse concave groove 10a length sums that are located along the same line are less than half of the horizontal length of side of glassy membrane, and all longitudinal fluting 10b length sums that are located along the same line are less than half of vertical length of side of glassy membrane.In the present embodiment, the widthwise edge of transverse concave groove 10a and glassy membrane be arranged in parallel, and the longitudinal edge of longitudinal fluting 10b and glassy membrane be arranged in parallel, and, continuously groove transverse concave groove and transverse concave groove when arranging is located along the same line, and longitudinal fluting and longitudinal fluting are located along the same line.The weak lamination area glassy membrane of bonding force is more balanced with the bonding force between the supporting glass substrate, and the forming of glassy membrane plywood, be difficult for disengaging.
The manufacture method of the plywood preferred version in embodiment bis-is as follows:
Step 1C divides the seal area that is closed and encloses the vacuum suck district 30 of putting with the sealing district on the lamination surface of supporting glass substrate, and the edge shape of seal area and glassy membrane is suitable; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of supporting glass substrate and glassy membrane is less than 15 * 10 -7/ ℃;
Step 1D offers many grooves that communicate with each other 10 in this vacuum suck district 30; Offer a plurality of depressions on described seal area, depression all is communicated with by described groove;
Step 1D ', packing matcrial in depression; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of any in sealing material and supporting glass substrate and glassy membrane is less than 100 * 10 -7/ ℃;
Step 1E, be compound in glassy membrane on the lamination surface of above-mentioned supporting glass substrate, and make glassy membrane 2 cover all above-mentioned grooves 10 fully;
Step 2 applies sealing material on the lamination surface of all sides of glassy membrane and supporting glass substrate; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of any in described sealing material and described supporting glass substrate and glassy membrane is less than 100 * 10 -7/ ℃;
Step 3 is heated the subassembly of above-mentioned glassy membrane and supporting glass substrate in vacuum environment, makes sealing material solidify to form sealing ply 3.
Make the air pressure in layer glass is 10 in room temperature at above-mentioned glassy membrane plywood to the temperature range of above-mentioned two sheet glass strain points 4～10 -5between Pa, make glassy membrane further by vacuum adsorption force, be laminated in securely under the state on the supporting glass substrate and stably implement to manufacture association process.
The method that glassy membrane and supporting glass plaque layer are gathered into folds is not restricted especially, if utilize vacuum layer platen press or vacuum-pressure processes to carry out crimping, that can suppress better bubble sneaks into, guarantees good close contact, so more preferably.By carry out crimping under vacuum, even in the situation that residual micro-bubble arranged, bubble can be because heating increases yet, and has advantages of that to be difficult for causing the deflection defect of glassy membrane so yet.Glassy membrane plywood of the present invention preferably forms by laminated glass film under reduced atmosphere and supporting glass Substrate manufacture.Below, this layered manner is called to the decompression layered manner.Reduced atmosphere refers to, if normal atmosphere is standardized as to zero, pressure be preferably-below 60kPa, more preferably-below 100kPa.In other words, if normal atmosphere is not standardized as to zero, reduced atmosphere refers to that pressure is preferably below 41.3kPa, more preferably below 1.3kPa.
Embodiment tri-
As shown in Figure 8, glassy membrane plywood structure: on the lamination surface of supporting glass substrate, there is plated film, plated film is the mineral membrane 4 of thickness between lnm～10000nm, and glassy membrane 2 is stacked and placed on mineral membrane 4, and sealing ply 3 is sealed between all sides of mineral membrane 4 and glassy membrane.
Glassy membrane plywood manufacture method,
Step 1F, plated film on the lamination surface of supporting glass substrate, this film is the mineral membrane 4 of thickness between lnm～10000nm;
Step 1G, be compound in glassy membrane 2 on mineral membrane 4; And supporting glass substrate 1 is more than or equal to 1.0nm with the difference of the surfaceness of glassy membrane contact surface; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of described supporting glass substrate and glassy membrane is less than 15 * 10 -7/ ℃;
Step 2 applies sealing material on all sides of glassy membrane and mineral membrane 4; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of any in sealing material and supporting glass substrate and glassy membrane is less than 100 * 10 -7/ ℃;
Step 3, heated the subassembly of above-mentioned glassy membrane and supporting glass substrate, makes sealing material solidify to form sealing ply 3.
Can form one deck plated film on the supporting glass substrate, plated film can be selected the mineral membrane that thickness is lnm～10000nm.In order to control the film forming cost, thickness is more few more favourable, and more preferably lnm～1000nm, most preferably be lnm～200nm.Mineral membrane is by being selected from ITO, Ti, Si, Au, Ag, Al, Cr, Cu, Mg, Ti, SiO, SiO 2, AI 2o 3, MgO, Y 2o 3, La 2o 3, Pr 6o 11, SC 2o 3, WO 3, HfO 2, In 2o 3, ZrO 2, Nd 2o 3, Ta 2o 5, CeO 2, Nb 2o 5, TiO, TiO 2, Ti 3o 5, a kind of or two or more formation in NiO, ZnO.Mineral membrane is sull more preferably.Sull is thermally-stabilised.Therefore, by the supporting glass substrate, sull being set, even the glassy membrane plywood is carried out to the processing of heat tracing, also can the membrane supporting glass substrate of Reusability as sull, preferably use SiO, SiO 2, AI 2o 3, MgO, Y 2o 3, La 2o 3, Pr 6o 11, SC 2o 3, WO 3, HfO 2, In 2o 3, ZrO 2, Nd 2o 3, Ta 2o 5, CeO 2, Nb 2o 5, TiO, TiO 2, Ti 3o 5, NiO, ZnO and their combination.
Only form one deck mineral membrane on the supporting glass substrate, but also can form mineral membrane by multilayer.Now, the layer that outermost layer contacts with glassy membrane is preferably sull.As mentioned above, this is because sull is heat-staple.Also can, in order to use the two sides of supporting glass substrate, on the surface with above-mentioned surface opposite side, also can form mineral membrane.In addition, also can on the whole surface of supporting glass substrate, form mineral membrane.Become film unit can use known method, can use sputtering method, vapour deposition method, CVD method, sol-gel method etc.In addition, the width in the zone that is used to form groove of the downside of glassy membrane circumference is preferably from the outer rim of glassy membrane 0.5mm～100mm to the inside, 0.5mm～50mm more preferably, and more preferably 0.5mm～10mm, further be preferably 0.5mm～1mm.If the supporting glass substrate is larger, preferably width is also larger.The supporting glass substrate is more bigger than glassy membrane, and during device processes, it avoids the edge impact by the protective glass film.For example, this carrier can slightly large 5mm, and its edge is carried out to precision work, rounding or grinding, to allow the typical impact stood in the equipment making equipment.In addition, the supporting glass substrate can have the geometrical shape different from glassy membrane.In addition, the supporting glass substrate can have surface characteristic or groove, make sealing material bonding or the location.When supporting glass substrate and glassy membrane are bonded together by sealing material, the hardness of combination is compatible with typical treatment facility.
According to the desired treatment condition of later step, the sealing material between supporting glass substrate and glassy membrane can be for example organic radical tackiness agent, elastomerics or inorganic bond layer.In certain embodiments, advantageously, bonding agent layer is elastomerics, inorganic, elastic body especially, and described elastomeric embodiment comprises silicone elastomer, the intoxicated elastomerics of fluorine silicon and Perfluoroelastomer.Certainly, Perfluoroelastomer is suitable for many application especially well, because they are all substituted hydrogen atom by fluorine atom, and they realize crosslinked ability fully, this causes low-level degassed and high-caliber thermostability and chemical stability jointly, and for example thermostability is up to 400 ℃ and than silicon and the higher chemical durability of fluorosilicone.According to the composition of function substrate and carrier substrates, Perfluoroelastomer can present the combination energy higher than silicone elastomer, and this is additional advantage for some application.
Comprise the supporting glass substrate that engages by sealing material and the assembly of glassy membrane once form, the noncontact surface of glassy membrane can the mode similar to the single thick supporting glass substrate for having component thickness be processed.Described processing can include, but are not limited to that thickness reduces, surface remodeling (for example, surface finish, alligatoring, film deposition, etching, through raying, be bonded to additional substrate or film etc.), and make functional component thereon.The several functions parts can be formed on the noncontact surface of supporting glass substrate.Functional component can comprise optical device, mechanical means, electric equipment or their combination or mixing.The non-limiting example of optics comprises: indicating meter, colour filter, slab guide, slab guide parts and equipment, lens, optical amplifier, multiplexer, demultplexer etc.The non-limiting example of mechanical part comprises: MEMS, valve etc.The non-limiting example of electricity parts comprises: transistor, diode, electrical condenser, resistor, inducer, antenna, transceiver, conductor, sensor, optical diode, and their combination and mixing etc.Functional component can be material function layer or its part.For example, functional layer can be single silicon layer (non-crystalline state, polycrystal or single crystal).The person of ordinary skill in the relevant knows for making the desired treatment condition of described functional component and material on the noncontact surface at the supporting glass substrate.During the step that forms functional component, assembly can stand radiation, mechanical vibration, machine washing, brushing, acceleration and the deceleration etc. of high temperature, various chemical solution, steam, various energy level and dosage.The selected material that applies to wedding agent of high expectations, and the bonding strength between wedding agent and two supporting glass substrates can stand described treatment condition.
The advantage of silicone elastomer is, can pass through to change the consumption of linking agent in solidification process, the level of adhesion of regulating easily them.But in the finished product, unreacted linking agent and/or low molecular weight substance may produce unacceptable exhaust level in the manufacturing processed of electronic unit.As discussed above, Perfluoroelastomer can not cause exhausting problem usually.
Finally it should be noted that: above each embodiment, only in order to technical scheme of the present invention to be described, is not intended to limit; Although with reference to aforementioned each embodiment, the present invention is had been described in detail, those of ordinary skill in the art is to be understood that: its technical scheme that still can put down in writing aforementioned each embodiment is modified, or some or all of technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the scope of various embodiments of the present invention technical scheme.

Claims (12)

1. a glassy membrane plywood, comprise stacked supporting glass substrate and glassy membrane, the edge of described glassy membrane is positioned on the lamination surface of described supporting glass substrate, it is characterized in that, have sealing ply between all sides of described glassy membrane and the lamination surface of described supporting glass substrate, the difference of the surfaceness of the part that the lamination surface of described supporting glass substrate and the lamination surface of described glassy membrane contact with each other is more than or equal to 1.0nm.
2. glassy membrane plywood according to claim 1, it is characterized in that, the lamination surface of described supporting glass substrate is provided with the seal area of enclosed shape and encloses the vacuum suck district be placed in the sealing district, is provided with many grooves that communicate with each other in described vacuum suck district; Between described groove and described glassy membrane, the common vacuum chamber that forms, have in described seal area for sealing the described sealing ply of described vacuum chamber.
3. glassy membrane plywood according to claim 2, is characterized in that, described seal area is provided with a plurality of depressions, and described depression all is communicated with by described groove, is filled with the sealing material that is used to form described sealing ply in described depression.
4. glassy membrane plywood according to claim 3, is characterized in that, the degree of depth of described depression and groove all is less than half of described supporting glass substrate thickness.
5. glassy membrane plywood according to claim 4, is characterized in that, described groove comprises many continuous grooves and is communicated with the connecting groove of described continuous groove.
6. glassy membrane plywood according to claim 5, is characterized in that, described glassy membrane is rectangular, and described continuous groove alternately is connected from beginning to end stepped by transverse concave groove and longitudinal fluting, and the both ends of described continuous groove form described depression; The all described transverse concave groove length sum be located along the same line is less than half of the horizontal length of side of described glassy membrane, and all longitudinal fluting length sums that are located along the same line are less than half of vertical length of side of described glassy membrane.
7. glassy membrane plywood according to claim 1, it is characterized in that, there is the mineral membrane of thickness between lnm～10000nm on the lamination surface of described supporting glass substrate, described glassy membrane is stacked and placed on described mineral membrane, and described sealing ply is sealed between all sides of described mineral membrane and described glassy membrane.
8. the manufacture method of the arbitrary described glassy membrane plywood of the claims 1-7, is characterized in that, comprises the following steps:
Step 1, be laminated in glassy membrane on the supporting glass substrate; And the difference of the surfaceness of supporting glass substrate and glassy membrane contact surface is more than or equal to 1.0nm; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of described supporting glass substrate and glassy membrane is less than 15 * 10 -7/ ℃;
Step 2 applies sealing material on the lamination surface of all sides of glassy membrane and supporting glass substrate; When temperature changes between 25～300 ℃, the difference of the thermal expansivity of any in described sealing material and described supporting glass substrate and glassy membrane is less than 100 * 10 -7/ ℃;
Step 3, heated the subassembly of above-mentioned glassy membrane and supporting glass substrate, makes sealing material solidify to form sealing ply.
9. the manufacture method of glassy membrane plywood according to claim 8, is characterized in that, described step 1 comprises the following steps:
Step 1A, carry out roughened processing to the lamination surface of described supporting glass substrate;
Step 1B, be compound in described glassy membrane on the lamination surface of described supporting glass substrate.
10. the manufacture method of glassy membrane plywood according to claim 8, is characterized in that, described step 1 comprises the following steps:
Step 1C divides the seal area that is closed and encloses the vacuum suck district be placed in the sealing district on the lamination surface of described supporting glass substrate, and the edge shape of described seal area and described glassy membrane is suitable;
Step 1D offers many grooves that communicate with each other in this vacuum suck district;
Step 1E, be compound in glassy membrane on the lamination surface of above-mentioned supporting glass substrate, and make described glassy membrane cover all above-mentioned grooves fully; .
11. the manufacture method of glassy membrane plywood according to claim 10, is characterized in that,
Described step 1D also comprises: offer a plurality of depressions on described seal area, described depression all is communicated with by described groove;
Between described step 1D and step 1E, also comprise:
Step 1D ', packing matcrial in described depression.
12. the manufacture method of glassy membrane plywood according to claim 8, is characterized in that, described step 1 comprises the following steps:
Step 1F, plated film on the lamination surface of described supporting glass substrate, this film is the mineral membrane of thickness between lnm～10000nm;
Step 1G, be compound in described glassy membrane on described mineral membrane;
Step 2 is specially, the described sealing material of coating on all sides of glassy membrane and described mineral membrane.
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WO2015018370A1 (en) * 2013-08-09 2015-02-12 Liu Guozheng Glass film laminate and manufacturing method therefor
CN105093595A (en) * 2015-09-24 2015-11-25 京东方科技集团股份有限公司 Carrying body, preparation method of ultrathin display panel and display device
CN105415808A (en) * 2015-11-05 2016-03-23 金弼 Vacuum glass and preparation method therefor
CN105271835A (en) * 2015-11-17 2016-01-27 湖南普照爱伯乐平板显示器件有限公司 Attaching method for flexible glass
JP2018035008A (en) * 2016-08-29 2018-03-08 日本電気硝子株式会社 Joined body and production method thereof
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WO2020077827A1 (en) * 2018-10-17 2020-04-23 武汉华星光电半导体显示技术有限公司 Flexible substrate, flexible display panel and method for manufacturing flexible display panel
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CN112448209B (en) * 2019-08-29 2022-04-08 矢崎总业株式会社 Shielded connector

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