CN103427703A - Miniature nanomotor based on shearing piezoelectric effect - Google Patents
Miniature nanomotor based on shearing piezoelectric effect Download PDFInfo
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- CN103427703A CN103427703A CN2013102921887A CN201310292188A CN103427703A CN 103427703 A CN103427703 A CN 103427703A CN 2013102921887 A CN2013102921887 A CN 2013102921887A CN 201310292188 A CN201310292188 A CN 201310292188A CN 103427703 A CN103427703 A CN 103427703A
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Abstract
The invention discloses a miniature nanomotor based on a shearing piezoelectric effect. The nanomotor comprises a clamping mechanism, a shearing piezoelectric ceramic actuator, a pre-tightening mechanism and an output piece. The shearing piezoelectric ceramic actuator is in contact with the driving surface of the output piece through the pre-tightening force of the pre-tightening mechanism applied to the clamping mechanism. The output piece is of a hollow structure, and all surfaces of the output piece parallel to the proceeding direction are hollow board surfaces except the driving surface. Therefore, the weight of the output piece can be reduced to the largest extent, the driving capability of a shearing piezoelectric stacking motor is improved, and the motor can walk under low voltage under lower temperature. Meanwhile, the nanomotor has a larger stepping journey and can drive the output piece and parts on the output piece to achieve large-journey advancing and retreating in a centimeter range.
Description
Technical field
The present invention relates to a kind of micro actuator, particularly a kind of miniature nano-motor based on shearing piezoelectric effect, belong to the piezoelectric positioner technical field.
Background technology
Nanometer technology is to manufacture the science and technology of material, character and the application of research structure size material in 0.1 to 100 nanometer range with single atom, molecule.Development along with nanoscale science and technology, caused again the new science and technology of a system, as nanophysics, nanobiology, nanochemistry, nanoelectronics, nanofabrication technique and Nanometrology etc., and nano-motor just in nanosecond science and technology research for the novel micro actuator of nanometer positioning and nano measurement.
Nano-motor refers to that the acoustic vibration and the micro-strain that utilize piezoelectric ceramic, electrostriction material convert electrical energy into the novel microdrive that mechanical part moves form.Owing to thering is nano grade positioning precision, grade stroke, simple in structure firm, the advantages such as actuating force is large, be widely used in the desired position device in the nano science research under the fields, the particularly extreme conditions such as utmost point low temperature and ultrastrong magnetic field such as nanometer technology, micromechanics and micro-system, communication sensing technology, semiconductor technology, photoelectron technology, electronic scanning technique, microbial technique and Aero-Space.
Miniature nano-motor based on shearing piezoelectric effect, be by the S.H.Pan invention of California, USA university, rigidity high under low temperature and ultra-high vacuum environment and stability with it and be widely used.Operation principle is: shear piezoelectrics for six and suppress and treating that the mobile object surface clamps it, shear the logical voltage signal of piezoelectrics to one of them and make it to produce tangential deformation, the just tangentially slippage of its contact-making surface on object to be moved, but can not move object to be moved, the frictional force produced because of single piezoelectrics is not enough to overcome the total frictional force that remains piezoelectrics.Therefore can successively make all shearing piezoelectrics former contact point that slips away in the same direction, and object to be moved still keeps original position.Voltage signal on all shearing piezoelectrics is cancelled simultaneously, will treat and move the frictional force that object produces equidirectional, makes it move and move a step in the direction, can make and so forth object stepping to be moved.All by the elastic force of long sphere of action, clamp object to be moved but not directly remove folder with stress because shearing piezoelectrics, therefore can not produce excessive or too small folder power between piezoelectrics and object to be moved when the large temperature difference, piezoelectrics can be not cracked yet.But this kind of motor remains in larger defect: object to be moved is the sapphire prism that weight is larger, needs higher voltage could drive it to move, and uses six independently high-voltage driven signals simultaneously, has greatly increased the purchase cost of driving arrangement.
Summary of the invention
In order to solve the existing existing problem of nano-motor, the invention provides a kind of miniature nano-motor based on shearing piezoelectric effect, on the basis of existing widely used shearing piezoelectric nano motor, by treating the Optimized Improvement Design that moves object and the minimizing of drive voltage signal passage, increase the actuating force of nano-motor, reduced the cost of manufacture of miniature nano-motor.
For realizing above technical purpose, the present invention will take following technical scheme:
A kind of miniature nano-motor based on shearing piezoelectric effect, comprise fixture, shearing piezoelectric ceramics driver, pre-tightening mechanism and output, the pretightning force that described shearing piezoelectric ceramics driver applies fixture by pre-tightening mechanism touches mutually with the drive surface of output, described output is hollow structure, and each surface that output parallels with direct of travel is the hollowed-out board face except drive surface.
As a further improvement on the present invention, described output is the hollow form cuboid, and in two groups of planes that are oppositely arranged that this hollow form cuboid extends along the output direct of travel, wherein one group is drive surface, another group is non-drive surface, the plate face hollowed-out board face that described non-drive surface is corresponding.
As a further improvement on the present invention, described shearing piezoelectric ceramics driver comprises that 4 are sheared piezoelectric stack; Two drive surface of output configure respectively two and shear piezoelectric stacks, and on two drive surface two to shear between piezoelectric stacks spacing consistent.
As a further improvement on the present invention, described fixture comprises pedestal and potsherd, pedestal is offered semiclosed cavity corresponding to the shape of output and the layout demand of shearing piezoelectric ceramics driver, the shape of described semiclosed cavity and the profile of output are suitable, and the storing position of potsherd and the opening end of semiclosed cavity are adjoining; Shear the semiclosed cavity inner wall that piezoelectric stack is bonded in pedestal for two of described drive surface configuration, shear piezoelectric stack and be bonded on potsherd for two of another drive surface configuration.
As a further improvement on the present invention, described pre-tightening mechanism comprises shell fragment, and the end of described shell fragment is arranged on the opening end of the semiclosed cavity of pedestal by screw, and the middle part of shell fragment is inconsistent by ball and potsherd.
As a further improvement on the present invention, described shell fragment is sheet metal or butterfly spring.
As a further improvement on the present invention, described hollowed-out board face is rectangle frame, between two frame plates that this rectangle frame parallels with the output direct of travel, by the horizontal dowel more than 1, is connected.
As a further improvement on the present invention, described output adopts Titanium, sapphire or magnetism-free stainless steel to make.
According to above technical scheme, with respect to prior art, the present invention has advantages of following:
1, output of the present invention adopts hollow structure, and each surface that output parallels with direct of travel is the hollowed-out board face except drive surface, therefore, the application can reduce the weight of output to a great extent, increase the driving force of shearing the piezoelectric stack motor, can at lower temperature, realize the walking of low voltage; Simultaneously, the present invention has larger stepping stroke, and nano-motor can drive output and realize that together with the parts that arrange on it large stroke of cm range moves forward and backward;
2, output of the present invention adopts the hollow form rectangular structure, therefore, only needs 4 and shears the stepper drive that piezoelectric stack can carry out output, has reduced the drive voltage signal passage, has greatly reduced the cost of manufacture of shearing the piezoelectric stack nano-motor;
3, clamping structure of the present invention comprises pedestal and potsherd, pedestal is offered semiclosed cavity corresponding to the shape of output and the layout demand of shearing piezoelectric ceramics driver, shear in piezoelectric stack for 4, wherein two stick on semiclosed cavity inner wall, remaining two stick on potsherd, and the pretightning force applied by pre-tightening mechanism, make 4 shearing piezoelectric stacks all touch mutually with the drive surface of output, hence one can see that, the present invention has more simply firmly structure, makes it not to be subject to the interference of external shock.
The accompanying drawing explanation
Fig. 1 is the left view of the longitudinally cutting of miniature nano-motor of the present invention;
Fig. 2 is the vertical view of the transverse cross sectional of miniature nano-motor of the present invention;
Fig. 3 is the fundamental diagram of miniature nano-motor of the present invention;
In figure: pedestal 1; Output 2; Shear piezoelectric stack 3; Potsherd 4; Ball 5; Shell fragment 6.
Embodiment
Accompanying drawing discloses the structural representation of preferred embodiment involved in the present invention without limitation; Explain technical scheme of the present invention below with reference to accompanying drawing.
As depicted in figs. 1 and 2, miniature nano-motor of the present invention comprises fixture, shearing piezoelectric ceramics driver, pre-tightening mechanism and output, wherein:
Described output, be the hollow form cuboid, in two groups of planes that are oppositely arranged that this hollow form cuboid extends along its length, wherein one group is drive surface, another group is non-drive surface, plate face corresponding to described non-drive surface is Openworks shape, and the application offers non-drive surface institute respective panels face to be frame shape structure; In the application, described output adopts Titanium to make, and can certainly can meet the environmental demand material for other, such as magnetism-free stainless steel;
Described fixture, comprise pedestal and potsherd, pedestal is offered semiclosed cavity corresponding to the shape of output and the layout demand of shearing piezoelectric ceramics driver, in the application, the shape of semiclosed cavity and the profile of output are suitable, and the storing position of potsherd and the opening end of semiclosed cavity are adjoining;
Described shearing piezoelectric ceramics driver, comprise a plurality of shearing piezoelectric stacks, in the application, is four, and two drive surface of output configure respectively two and shear piezoelectric stacks, and on two drive surface two shear the piezoelectric stack spaced sets;
In addition, shear piezoelectric stack for two of aforesaid drive surface configuration, be bonded in the semiclosed cavity inner wall of pedestal by bonding mode, shear piezoelectric stack, be bonded on potsherd by bonding mode for two of another drive surface configuration;
Described pre-tightening mechanism, by potsherd being applied towards the pretightning force of the opposite end of the opening end of semiclosed cavity, the shearing piezoelectric ceramics driver is arranged on to the drive surface of output by the mode of extruding, the pretightning force size applied, can determine according to the frictional force size requirement between shearing piezoelectric ceramics driver and output drive surface; In the application, described pre-tightening mechanism comprises shell fragment, and the end of described shell fragment is arranged on the opening end of the semiclosed cavity of pedestal by screw, and the middle part of shell fragment is inconsistent by ball and potsherd; The coefficient of friction materials less, that material rigidity is larger such as described ball employing sapphire are made, and described shell fragment can carry out elastically-deformable thin slice or butterfly spring for all.
As shown in Figure 3, in figure, 3a-3d means 4 shearing piezoelectric stacks of making step motion for the driver output part, and the operation principle of miniature nano-motor of the present invention is:
T
0Constantly, give four to shear the negative voltage signal that piezoelectric stack 3a-3d applies a formed objects simultaneously, according to the piezoelectric effect of shearing piezoelectric patches, shearing piezoelectric stack for four will be along a certain size flexible of same tangential generation, drives the titanium slide block and advance after certain distance and keep elongation state under the effect of frictional force.
T
1Constantly, the negative voltage signal 3a that one of them is sheared on piezoelectric stack becomes positive voltage signal, corresponding shearing piezoelectric stack will extend round about, because a frictional force of shearing between piezoelectric stack and titanium slide block is less than the individual frictional force sum of its excess-three, this shears piezoelectric stack relative titanium slide block is produced to arrival one reposition that slides backward, then keeps; t
2Constantly, equally second negative voltage signal of shearing on piezoelectric stack 3b become to positive voltage signal, will make equally its relative titanium slide block produce backward slip and arrive a reposition, then keep; t
3Constantly, equally second negative voltage signal of shearing on piezoelectric stack 3c become to positive voltage signal, will make equally its relative titanium slide block produce backward slip and arrive a reposition, then keep; t
4Constantly, equally second negative voltage signal of shearing on piezoelectric stack 3d become to positive voltage signal, will make equally its relative titanium slide block produce backward slip and arrive a reposition, then keep;
T
5Constantly, remove simultaneously and be applied to four voltage signals of shearing on piezoelectric stack, shear piezoelectric stack and will return to flexible state, will drive the titanium slide block certain distance that advances under the effect of four frictional force, and then completed a walking and walk.
According to t
0-t
5Corresponding step, back and forth operate constantly, can drive the constantly stepping forward of titanium slide block.
The titanium slide block operation principle of stepping backward is identical with it, and the phase angle that is applied drive voltage signal differs 180 ° than the driving voltage phase angle of forward stepping.
Claims (8)
1. the miniature nano-motor based on shearing piezoelectric effect, comprise fixture, shearing piezoelectric ceramics driver, pre-tightening mechanism and output, the pretightning force that described shearing piezoelectric ceramics driver applies fixture by pre-tightening mechanism touches mutually with the drive surface of output, it is characterized in that: described output is hollow structure, and each surface that output parallels with direct of travel is the hollowed-out board face except drive surface.
2. the miniature nano-motor based on shearing piezoelectric effect according to claim 1, it is characterized in that: described output is the hollow form cuboid, in two groups of planes that are oppositely arranged that this hollow form cuboid extends along the output direct of travel, wherein one group is drive surface, another group is non-drive surface, the plate face hollowed-out board face that described non-drive surface is corresponding.
3. the miniature nano-motor based on shearing piezoelectric effect according to claim 2, it is characterized in that: described shearing piezoelectric ceramics driver comprises that 4 are sheared piezoelectric stacks; Two drive surface of output configure respectively two and shear piezoelectric stacks, and on two drive surface two to shear between piezoelectric stacks spacing consistent.
4. the miniature nano-motor based on shearing piezoelectric effect according to claim 3, it is characterized in that: described fixture comprises pedestal and potsherd, pedestal is offered semiclosed cavity corresponding to the shape of output and the layout demand of shearing piezoelectric ceramics driver, the shape of described semiclosed cavity and the profile of output are suitable, and the storing position of potsherd and the opening end of semiclosed cavity are adjoining; Shear the semiclosed cavity inner wall that piezoelectric stack is bonded in pedestal for two of described drive surface configuration, shear piezoelectric stack and be bonded on potsherd for two of another drive surface configuration.
5. the miniature nano-motor based on shearing piezoelectric effect according to claim 4, it is characterized in that: described pre-tightening mechanism comprises shell fragment, the end of described shell fragment is arranged on the opening end of the semiclosed cavity of pedestal by screw, and the middle part of shell fragment is inconsistent by ball and potsherd.
6. the miniature nano-motor based on shearing piezoelectric effect according to claim 5, it is characterized in that: described shell fragment is sheet metal or butterfly spring.
7. the miniature nano-motor based on shearing piezoelectric effect according to claim 1, it is characterized in that: described hollowed-out board face is rectangle frame, between two frame plates that this rectangle frame parallels with the output direct of travel, by the horizontal dowel more than 1, is connected.
8. the miniature nano-motor based on shearing piezoelectric effect according to claim 1, it is characterized in that: described output adopts Titanium or magnetism-free stainless steel to make.
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| CN2013102921887A CN103427703A (en) | 2013-07-11 | 2013-07-11 | Miniature nanomotor based on shearing piezoelectric effect |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107086812A (en) * | 2017-05-16 | 2017-08-22 | 南京邮电大学 | A kind of miniature nano-motor based on shearing piezoelectric stack |
| CN110957938A (en) * | 2019-12-09 | 2020-04-03 | 西安交通大学 | Positive-negative bidirectional micro-displacement amplification flexible mechanism and method based on shear type piezoelectric ceramics |
| CN115149838A (en) * | 2022-09-05 | 2022-10-04 | 上海隐冠半导体技术有限公司 | High-thrust piezoelectric driving device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993019494A1 (en) * | 1992-03-16 | 1993-09-30 | Fisons Plc | Piezoelectric motor |
| CN101521195A (en) * | 2009-04-07 | 2009-09-02 | 中国科学技术大学 | Three-friction stepper for juxtaposedly pushing double piezoelectrics and scanning probe microscope thereof |
-
2013
- 2013-07-11 CN CN2013102921887A patent/CN103427703A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993019494A1 (en) * | 1992-03-16 | 1993-09-30 | Fisons Plc | Piezoelectric motor |
| CN101521195A (en) * | 2009-04-07 | 2009-09-02 | 中国科学技术大学 | Three-friction stepper for juxtaposedly pushing double piezoelectrics and scanning probe microscope thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107086812A (en) * | 2017-05-16 | 2017-08-22 | 南京邮电大学 | A kind of miniature nano-motor based on shearing piezoelectric stack |
| CN110957938A (en) * | 2019-12-09 | 2020-04-03 | 西安交通大学 | Positive-negative bidirectional micro-displacement amplification flexible mechanism and method based on shear type piezoelectric ceramics |
| CN115149838A (en) * | 2022-09-05 | 2022-10-04 | 上海隐冠半导体技术有限公司 | High-thrust piezoelectric driving device |
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Application publication date: 20131204 |