CN103424578B - 探针台旋转升降机构 - Google Patents
探针台旋转升降机构 Download PDFInfo
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- CN103424578B CN103424578B CN201310293865.7A CN201310293865A CN103424578B CN 103424578 B CN103424578 B CN 103424578B CN 201310293865 A CN201310293865 A CN 201310293865A CN 103424578 B CN103424578 B CN 103424578B
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CN201310293865.7A CN103424578B (zh) | 2013-07-12 | 2013-07-12 | 探针台旋转升降机构 |
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CN201310293865.7A CN103424578B (zh) | 2013-07-12 | 2013-07-12 | 探针台旋转升降机构 |
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CN103424578A CN103424578A (zh) | 2013-12-04 |
CN103424578B true CN103424578B (zh) | 2016-08-10 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106019016B (zh) * | 2016-06-21 | 2019-04-19 | 苏州赛腾精密电子股份有限公司 | 一种旋转下压探针机构 |
CN107440855A (zh) * | 2017-09-11 | 2017-12-08 | 中国科学院自动化研究所 | 一种应用于轮椅的旋转升降机构 |
CN107991595B (zh) * | 2017-11-06 | 2020-12-04 | 广州高谱技术有限公司 | 一种高速高精旋转升降联动机构 |
CN108645866A (zh) * | 2018-05-11 | 2018-10-12 | 福建工程学院 | 一种通用型视觉检测装置 |
CN108593982B (zh) * | 2018-06-06 | 2020-09-29 | 杭州长川科技股份有限公司 | 针卡固定圈旋转升降机构 |
CN110501526B (zh) * | 2019-09-06 | 2024-05-07 | 仪晟科学仪器(嘉兴)有限公司 | 超高真空极低温四探针测量装置及其方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101441225A (zh) * | 2007-11-20 | 2009-05-27 | 深圳市矽电半导体设备有限公司 | 一种顶针顶出机构及包含该机构的高精度运动部件 |
CN102324800A (zh) * | 2011-04-12 | 2012-01-18 | 深圳市再丰达实业有限公司 | 集约式旋转伸缩装置 |
TW201229520A (en) * | 2010-12-03 | 2012-07-16 | Nihon Micronics Kk | Probe assembly |
CN103018496A (zh) * | 2012-12-14 | 2013-04-03 | 深圳市天微电子有限公司 | 晶圆测试装置 |
Family Cites Families (1)
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JP5898862B2 (ja) * | 2011-06-10 | 2016-04-06 | 日鉄住金テックスエンジ株式会社 | 大電流用コンタクトプローブ |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101441225A (zh) * | 2007-11-20 | 2009-05-27 | 深圳市矽电半导体设备有限公司 | 一种顶针顶出机构及包含该机构的高精度运动部件 |
TW201229520A (en) * | 2010-12-03 | 2012-07-16 | Nihon Micronics Kk | Probe assembly |
CN102324800A (zh) * | 2011-04-12 | 2012-01-18 | 深圳市再丰达实业有限公司 | 集约式旋转伸缩装置 |
CN103018496A (zh) * | 2012-12-14 | 2013-04-03 | 深圳市天微电子有限公司 | 晶圆测试装置 |
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Address after: 518057, Nanshan District hi tech Zone, Guangdong, Shenzhen, road, 13 Thunis Road, A1001, A1003, A1005 Applicant after: Shenzhen Titan Micro Electronics Co., Ltd Address before: 518057 Shenzhen science and Technology Park, 13 Lang Shan Road, North District, Nanshan District hi tech Zone, Guangdong, Applicant before: Shenzhen Titan Micro Electronics Co., Ltd. |
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Effective date of registration: 20170711 Address after: 523815 Guangdong province Dongguan City Dalingshan Town Village Industrial Zone B building Patentee after: Dongguan view automation equipment Co., Ltd. Address before: 518057, Nanshan District hi tech Zone, Guangdong, Shenzhen, road, 13 Thunis Road, A1001, A1003, A1005 Patentee before: Shenzhen Titan Micro Electronics Co., Ltd |
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CP01 | Change in the name or title of a patent holder | ||
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Address after: 523815 B, Dongguan, Guangdong province. Patentee after: Dongguan guanzai robot Co., Ltd Address before: 523815 B, Dongguan, Guangdong province. Patentee before: DONGGUAN AVATAR SYSTEMS AUTOMATION EQUIPMENT Co.,Ltd. |