CN103423477B - Swing type water-cooled vacuum gate valve and mangetic core assembly thereof - Google Patents
Swing type water-cooled vacuum gate valve and mangetic core assembly thereof Download PDFInfo
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- CN103423477B CN103423477B CN201210163149.2A CN201210163149A CN103423477B CN 103423477 B CN103423477 B CN 103423477B CN 201210163149 A CN201210163149 A CN 201210163149A CN 103423477 B CN103423477 B CN 103423477B
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Abstract
Swing type water-cooled vacuum gate valve and mangetic core assembly thereof can improve sealability, wherein mangetic core assembly comprises dunnage, valve plate and steel ball rack, steel ball rack is placed rotating steel ball, steel ball rack is between dunnage and valve plate, and clamped by latch plate, the latch plate of the dunnage side of steel ball rack is connected with dunnage, the latch plate of the valve plate side of steel ball rack is connected with valve plate, valve plate and dunnage strut and therefore on valve plate, are applied with pressure by steel ball, on, the ball of corresponding steel ball is had to cheat in lower cover plate, steel ball can enter ball hole, pressure on valve plate is acted on to discharge steel ball.Valve can realize whole-water-cooling, to improve the working life of seal ring.
Description
Technical field
The present invention relates to the valve used in vacuum system, particularly relate to push-pull valve.
Background technique
Current monocrystalline, polycrystalline furnace manufacturer be the cold separating valve of manual water, this valve longitudinal size is large, and " O " shape seal ring life-span is short, poor sealing performance, and job insecurity can not carry out Automated condtrol.Therefore monocrystalline, polycrystalline furnace manufacturer need to work under 1450 DEG C of temperature environments in a hurry; " O " shape seal ring can obtain water cooling protection do not burnt, melted, aging; make monocrystalline, polycrystalline furnace working efficiency high, throughput is large, the valve of practicable Automated condtrol.
Summary of the invention
The object of the present invention is to provide a kind of swing type water-cooled vacuum gate valve, to improve sealability.
For realizing the swing type water-cooled vacuum gate valve of described object, being characterized in, comprising: valve component, comprising the valve body of tubular; Upper cover plate assembly, comprises the upper cover plate with upper valve port, and upper cover plate is fixedly connected with the upside of valve body, arranges seal ring between upper cover plate and valve body; Lower cover plate assembly, comprises the lower cover plate with lower valve port, and lower cover plate is fixedly connected with the downside of valve body, arranges seal ring between lower cover plate and valve body; Transmission shaft component, comprise transmission shaft, transmission shaft through upper cover plate attachment hole and penetrate the attachment hole of lower cover plate, the lower end of transmission shaft is supported by the thrust-bearing in the end cap below the attachment hole of lower cover plate, sealed by shaft seal black box between transmission shaft and the attachment hole of upper cover plate, sealed by seal ring between end cap and lower cover plate; Mangetic core assembly, be arranged in valve component, comprise dunnage, valve plate and steel ball rack, steel ball rack is placed rotating steel ball, steel ball rack is between dunnage and valve plate, and clamped by latch plate, the latch plate of the dunnage side of steel ball rack is connected with dunnage, and the latch plate of the valve plate side of steel ball rack is connected with valve plate, and valve plate is placed between the upper and lower cover plate of lower cover plate and arranges seal ring, and sealing lower valve port, dunnage is positioned at the below of upper cover plate; The ball of corresponding steel ball is had to cheat in dunnage, valve plate, steel ball rack is connected with outward extending fork, fork is connected so that promote steel ball rack to rotate forward the plane making steel ball climb to valve plate, dunnage from ball hole with transmission shaft, make valve plate, dunnage strut and then make each valve port close, also be convenient to promote steel ball rack rotate backward make steel ball from the plane of valve plate, dunnage get back to ball hole, to make valve plate, dunnage draw in, thus each valve port is opened; And drive unit, be arranged on upper cover plate, and can drive axis be driven.
Described swing type water-cooled vacuum gate valve, its further feature has cooling water circulation passage respectively in upper and lower cover plate, is provided with water inlet and outlet passage in transmission shaft, described water inlet and outlet passage and cooling water circulation channel connection.
Described swing type water-cooled vacuum gate valve, its further feature is, has upper and lower two steel balls in the ball hole of steel ball rack.
Described swing type water-cooled vacuum gate valve, its further feature has cooling water circulation region in lower cover plate.
Described swing type water-cooled vacuum gate valve, its further feature has cooling water circulation region respectively in upper cover plate, valve body.
For realizing the mangetic core assembly of described object, be characterized in, comprise dunnage, valve plate and steel ball rack, steel ball rack is placed rotating steel ball, steel ball rack is between dunnage and valve plate, and clamped by latch plate, the latch plate of the dunnage side of steel ball rack is connected with dunnage, the latch plate of the valve plate side of steel ball rack is connected with valve plate, the ball of corresponding steel ball is had to cheat in dunnage, valve plate, steel ball rack can rotate forward and steel ball is climbed in the plane of upper and lower cover plate from ball hole, makes valve plate, dunnage struts; Steel ball rack can also rotate backward and steel ball is got back to ball hole from the plane of upper and lower cover plate, and valve plate, dunnage are drawn in.
Described mangetic core assembly, its further feature is, have upper and lower two steel balls in each ball hole of steel ball rack, these two steel balls contact dunnage and valve plate respectively.
In embodiments of the invention, clamp steel ball rack with latch plate, steel ball rack promotes steel ball, and steel ball climbs out of and struts valve plate, dunnage from ball hole, and valve closes; Steel ball is got back to two plates in ball hole and is drawn in, valve open.Because steel ball struts valve plate, dunnage, therefore valve plate has powerful pressure, this pressure is delivered on the seal ring on below valve plate, lower cover plate, and the sealability of seal ring is strengthened.Swing the fork in steel ball rack, just can swing steel ball rack, thus control steel ball climbs out of or climbs in ball hole from ball hole, to realize the switch of valve, fork is driven by transmission shaft, and transmission shaft can have cylinder and connecting rod to drive.Cylinder can by electromagnetic valve, and therefore the use of this valve can realize automation.Also can realize with 90 degree of rotary cylinders or 90 degree of rotary electrical apparatus.
In an embodiment of the present invention, valve has multichannel water-cooled, normally works under therefore can realizing the condition of whole-water-cooling, keeps the long lifetime of seal ring.
In an embodiment of the present invention; monocrystalline can be realized, valve that polycrystalline furnace manufacturer needs in a hurry; this valve can work under 1450 DEG C of temperature environments; the cooling protection that " O " shape seal ring obtains water is not burnt, melt, aging; make monocrystalline, polycrystalline furnace working efficiency high; throughput is large, practicable Automated condtrol.
Embodiments of the invention, can be used on single crystal growing furnace in a large number, turbidity test are poor, in environment that temperature is high, the basic parameter of this environment: leak rate 1 × 10
-10paM
3/ S, working pressure 1 × 10
5pa ~ 1 × 10
-6pa, operating ambient temperature 1450 DEG C.
Embodiments of the invention and straight push-pull valve than shorten length 1/3, with separating valve than height reduction 2/3.Whole-water-cooling Ke You seven road cooling water, " O " shape seal ring obtains sufficient cooling protection, extends operating life.Valve switch pendulum angle about 70 ° is compact.
Accompanying drawing explanation
Fig. 1 is the planimetric map of mangetic core assembly.
Fig. 2 is the sectional drawing of the mangetic core assembly cut open along the A-A line shown in Fig. 1.
Fig. 3 is the planimetric map of valve component.
Fig. 4 is the sectional drawing of the valve component cut open along the B-B line shown in Fig. 3.
Fig. 5 is planimetric map that is upper or lower cover plate assembly.
Fig. 6 is the sectional drawing of the upper or lower cover plate assembly cut open along the C-C line shown in Fig. 5.
Fig. 7 is the sectional drawing cut open along the D-D line shown in Fig. 5.
Fig. 8 is the plan view of transmission shaft.
Fig. 9 is the planimetric map of swing type water-cooled vacuum gate valve.
Figure 10 is the sectional view along A-B-C-D line in Fig. 9.
Figure 11 is the schematic diagram of the cooling water path between transmission shaft, dunnage, valve plate.
Embodiment
As depicted in figs. 1 and 2, mangetic core assembly 1 comprises valve plate (lower valve plate) 11, dunnage (upper valve plate) 12, steel ball 13, latch plate 14 and steel ball rack 17.Steel ball rack 17 is in ring, in circumference, there is multiple ball 171 of receiving, respectively receive in ball 171 and be placed with upper and lower two steel balls 13, the outstanding upper edge receiving ball 171 of steel ball 13 of top contacts with the lower surface of dunnage 12, the outstanding lower edge receiving ball 171 of steel ball 13 of below contacts with the upper surface of valve plate 11, in embodiment as shown in Figure 1, have 12 in steel ball rack 17 and receive ball.Steel ball rack 17 is fixedly clamped by two groups of latch plates 14, each group of latch plate 14 comprises and is positioned at upper spring plate 141 on the upside of steel ball rack 17, is positioned at lower spring plate 142 on the downside of steel ball rack 17, the respective end of upper and lower latch plate 141,142 is fixedly connected with by fastening piece such as bolt and nut, and steel ball rack 17 is clamped in wherein, the middle part of upper spring plate 141 is fixedly connected with by link 143 with dunnage 12, and the middle part of lower spring plate 142 is fixedly connected with by link 144 with valve plate 11.As shown in Figure 1, steel ball rack 17 connects radial outstanding fork 16, and fork 16 is for being connected with transmission shaft described later.Fork 16 is connected with roller 15, is connected with two rollers 15 in the side in contrast to fork of steel ball rack 17, the rolling path of each roller 15 is all centered by the oscillation center of fork 16, and three rollers 15 are not on the same line.
Continue to see figures.1.and.2, the upper surface of valve plate 11 has the ball hole 138 of the steel ball 13 in the corresponding steel ball rack 17 of a circle, and the lower surface of dunnage 12 also has the ball hole 138 of the steel ball in the corresponding steel ball rack 17 of a circle.Position shown in Fig. 2 is the position that steel ball 13 climbs out of ball hole, and now valve plate 11 and dunnage 12 are strutted by steel ball 13, and distance is therebetween the twice of the diameter of the steel ball 13 received in ball 171.Position is as shown in Figure 1 the position that steel ball 13 is positioned at ball hole, and the distance now between valve plate 11 and dunnage 12 is the twice of the diameter being less than steel ball 13, and such mangetic core assembly can swing and the seal ring that can not rub.Distance softened between valve plate 11 and dunnage 12 depends on the degree of depth that ball is cheated, and the degree of depth in ball hole and the unlatching size of valve have relation.
As shown in Figure 3, the overall ovalize of valve component 2 (shape containing approximate ellipsoidal).As shown in Figure 4, valve component 2 comprises a valve body 21, and there is circular groove 210 outer circumferential of valve body 21, and circular groove 210 is closed by water-cooled compound plate 22, and circular groove 210 and water-cooled compound plate 22 provide the cooling water passage of a Cooling Water flowing.
Upper and lower cover board component 3,4 has identical or approximate structure, and above cover plate assembly 3 is example, and as shown in Figures 5 to 7, upper cover plate assembly 3 comprises upper cover plate 30, and upper cover plate 30 has upper valve port 31.Upper cover plate assembly 3 also comprises the flange 32 around upper valve port 31, and flange 32 is for being connected with user's pipe flange.Upper cover plate assembly 3 also comprises water-cooling cover plate 33, water-cooling cover plate 33 covers on cover plate 30, flow of cooling water chamber 331 is formed between water-cooling cover plate 33 and upper cover plate 30, and be also formed with flow of cooling water passage 332 between flange 32 and upper valve port 31 circumferential side wall, flow of cooling water chamber 331 can be connected with flow of cooling water passage 332, forms the flow of cooling water region of upper cover plate assembly 3.In addition, upper cover plate 30 is also formed with transmission axis hole flange 35, transmission axis hole flange 35 provides axis hole 34, passes for transmission shaft described later.
Same, lower cover plate assembly 4 comprises lower cover plate 40, and lower cover plate has lower valve port 41.Lower cover plate assembly also comprises the flange around lower valve port, and flange is used for being connected with user's pipe flange.Lower cover plate assembly also comprises water-cooled lower cover plate, water-cooled lower cover plate covers on lower cover plate, flow of cooling water chamber is formed between water-cooled lower cover plate and lower cover plate, and be also formed with flow of cooling water passage between flange and lower valve port 41 circumferential side wall, flow of cooling water chamber is connected with flow of cooling water passage, forms the flow of cooling water region of lower cover plate assembly.In addition, lower cover plate 40 is also formed with transmission axis hole flange, transmission axis hole flange provides axis hole, passes for transmission shaft described later.
As shown in figs, transmission shaft component 5 comprises transmission shaft 51, the bearing (as needle bearing) 52 that connects on the underpart of transmission shaft 51, underpart the supporting piece 53 that connects of end face, needle bearing 52 is fixed on transmission shaft 51 by supporting piece 53.There is attachment hole 510 lower end of transmission shaft 51, and attachment hole 510 can be profile hole, connects with the fork 16 that the steel ball rack 17 of mangetic core assembly 1 is connected.
As shown in Figure 9 and Figure 10, valve body 21 is fixedly connected with upper cover plate 30, the lower end of valve body 21 is fixedly connected with lower cover plate 40, sealed by O-ring seals 92,93 between valve body 21 and each cover plate 30,40, mangetic core assembly 1 is built in valve body 21, and the valve plate 11 of mangetic core assembly 1 is placed on lower cover plate 40, seals the lower valve port 41 on lower cover plate 40, the dunnage 12 of mangetic core assembly 1 is positioned at below upper cover plate 30, seals the upper valve port 31 of upper cover plate 30.Between position around the lower valve port 41 of valve plate 11 and lower cover plate 40, O-ring seals 91 is set.Position as shown in Figure 10, lower valve port 41 seals by means of O-ring seals 91 by the valve plate 11 of mangetic core assembly 1, and because the steel ball 13 of mangetic core assembly 1 climbs out of from ball hole, valve plate 11 and dunnage 12 are strutted, because dunnage 12 is by the stop of upper cover plate 31, can not move, thus the powerful pressure of generation acts in valve plate 11 and dunnage 12 by steel ball 13 place simultaneously, after valve plate 11 obtains enough pressure, even if the running parameter of vacuum system is leak rate 1 × 10
-10paM
3/ S, working pressure 1 × 10
5pa ~ 1 × 10
-6pa, also can ensure the effective sealing of O-ring seals 91.
Fork 16 is inserted in the attachment hole 510 of transmission shaft 51 and by fastening piece, such as screw is fixed.Transmission shaft 51 through upper cover plate 30 transmission axis hole flange 35 and and the transmission axis hole flange 45 penetrated on lower cover plate 40, the lower end of transmission axis hole flange 45 is fixedly connected with end cap 46, thrust-bearing 47 is installed in end cap 46, transmission shaft 51 is supported by thrust-bearing 47, the needle bearing 52 on transmission shaft 51 and the shaft hole matching of transmission axis hole flange 45.Sealed by shaft seal Sealing 36 between transmission axis hole flange 35 and transmission shaft 5.
Drive unit 6 is arranged on upper cover plate 31, and the upper end of the power output member 61 connection for transmission axle 51 of drive unit 6, power output member 61 applies moment of torsion on transmission shaft 51, rotates to make transmission shaft 51.
Drive unit 6 is such as 90 ° of rotary cylinders, or straight line cylinder jointed crank connecting rod mechanism is formed, or 90 degree of rotary electrical apparatus, or motor connects reducing gear formation, in addition, also can make spanner, or hand worm-and-wheel gear.
In one embodiment of this invention, the installation process of swing type water-cooled vacuum gate valve is as follows:
1, lower cover plate fills " O " shape seal ring towards sky;
2, valve component to be placed on lower cover plate and to be screwed;
3, mangetic core assembly and transmission shaft component are assembled, will insert in the transmission axis hole flange of lower cover plate bottom transmission shaft component together;
4, the transmission axis hole flange sleeve of upper cover plate is entered in transmission shaft upper axis, upper cover plate housing screw is fixed on valve component;
5, installing shaft seal Sealing to the transmission axis hole flange of upper cover plate compresses;
6, be contained on upper cover plate by drive unit such as cylinder part, the connecting rod that cranks is connected with transmission shaft.
The valve of previous embodiment is whole-water-cooling swing board plug valve, can be widely used on single crystal growing furnace, turbidity test are poor, in environment that temperature is high, meets the basic parameter of vacuum system: leak rate 1 × 10
-10paM
3/ S, working pressure 1 × 105Pa ~ 1 × 10
-6pa, operating ambient temperature 1450 DEG C.
The closedown of valve, open principle and be: clamp steel ball rack with latch plate, steel ball rack promotes steel ball, and steel ball climbs out of plane and struts valve plate, dunnage from ball hole, and valve cuts out, and steel ball is got back to two plates in ball hole and drawn in, valve open; With reference to Fig. 1,2,9,10, namely
(1) promoting steel ball rack right-hand rotation makes steel ball climb to plane (now valve plate, the dunnage stop be subject to inside valve body can not be rotated and only can be backed down by steel ball, namely only can move axially) from hole, makes valve plate, dunnage struts valve closing;
(2) promoting steel ball rack turns left to make steel ball to get back to (now valve plate, dunnage have larger pressure to rotate, unless ball hole got back to by steel ball, prevent seal ring by friction destruction) hole from plane, makes valve plate, dunnage draw valve open in.Continue to turn left the spool of valve plate is taken away, valve wide open.
The length of aforementioned valve is very short, with straight push-pull valve than shorten length 1/3, with Flap valve than height reduction 2/3.
The whole-water-cooling of aforementioned valve has seven road cooling waters, wherein a road is the cooling water in valve component 2, two-way water-cooled is the cooling water in upper cover plate assembly, another two-way water-cooled is the cooling water in lower cover plate assembly, a road water-cooled is the cooling water on valve plate in addition, and a road water-cooled is the cooling water in dunnage in addition.
As shown in figure 11, in transmission shaft 51, there are two groups of inlet and outlet pipes 511,522, the cooling water circulation expanding channels wherein in one group of inlet and outlet pipe and dunnage 12, the cooling water circulation expanding channels of another group inlet and outlet pipe and valve plate 11.Therefore transmission shaft 51 provides the cooling water passage of valve plate, dunnage.
Because valve has multichannel cooling water passage, each " O " shape seal ring therefore in valve obtains sufficient cooling protection, extends operating life.
In addition, the pendulum angle of mangetic core assembly in valve component about 70 °, therefore compact structure.Valve upper and lower cover plates compresses and adopts screw to be combined with hinge, and mounting or dismounting are convenient.
Cylinder adopts bounce cylinder, and valve switch is steady, sound vibration is little.
Pneumatic basic parameter: source of the gas 4 ~ 6kgf/cm
2, power supply 220V, threshold switch magnetic switch exports electrical signal.
Claims (7)
1. swing type water-cooled vacuum gate valve, is characterized in that, comprising:
Valve component, comprises the valve body of tubular;
Upper cover plate assembly, comprises the upper cover plate with upper valve port, and upper cover plate is fixedly connected with the upside of valve body, arranges seal ring between upper cover plate and valve body;
Lower cover plate assembly, comprises the lower cover plate with lower valve port, and lower cover plate is fixedly connected with the downside of valve body, arranges seal ring between lower cover plate and valve body;
Transmission shaft component, comprise transmission shaft, transmission shaft through upper cover plate attachment hole and penetrate the attachment hole of lower cover plate, the lower end of transmission shaft is supported by the thrust-bearing in the end cap below the attachment hole of lower cover plate, sealed by shaft seal black box between transmission shaft and the attachment hole of upper cover plate, sealed by seal ring between end cap and lower cover plate;
Mangetic core assembly, be arranged in valve component, comprise dunnage, valve plate and steel ball rack, steel ball rack is placed rotating steel ball, steel ball rack is between dunnage and valve plate, and clamped by latch plate, the latch plate of the dunnage side of steel ball rack is connected with dunnage, and the latch plate of the valve plate side of steel ball rack is connected with valve plate, and valve plate is placed between the upper and lower cover plate of lower cover plate and arranges seal ring, and sealing lower valve port, dunnage is positioned at the below of upper cover plate; The ball of corresponding steel ball is had to cheat in dunnage, valve plate, steel ball rack is connected with outward extending fork, fork is connected so that promote steel ball rack to rotate forward the plane making steel ball climb to valve plate, dunnage from ball hole with transmission shaft, make valve plate, dunnage strut and then make each valve port close, also be convenient to promote steel ball rack rotate backward make steel ball from the plane of valve plate, dunnage get back to ball hole, to make valve plate, dunnage draw in, thus each valve port is opened; And
Drive unit, is arranged on upper cover plate, and can drive drive axis.
2. swing type water-cooled vacuum gate valve as claimed in claim 1, is characterized in that there is cooling water circulation passage respectively in upper and lower cover plate, is provided with water inlet and outlet passage in transmission shaft, described water inlet and outlet passage and cooling water circulation channel connection.
3. swing type water-cooled vacuum gate valve as claimed in claim 1, is characterized in that, has upper and lower two steel balls in the ball hole of steel ball rack.
4. swing type water-cooled vacuum gate valve as claimed in claim 1, is characterized in that there is cooling water circulation region in lower cover plate.
5. swing type water-cooled vacuum gate valve as claimed in claim 1, is characterized in that there is cooling water circulation region respectively in upper cover plate, valve body.
6. mangetic core assembly, it is characterized in that, comprise dunnage, valve plate and steel ball rack, steel ball rack is placed rotating steel ball, steel ball rack is between dunnage and valve plate, and clamped by latch plate, the latch plate of the dunnage side of steel ball rack is connected with dunnage, and the latch plate of the valve plate side of steel ball rack is connected with valve plate, has the ball of corresponding steel ball to cheat in dunnage, valve plate, steel ball rack can rotate forward and steel ball is climbed in the plane of upper and lower cover plate from ball hole, makes valve plate, dunnage struts; Steel ball rack can also rotate backward and steel ball is got back to ball hole from the plane of upper and lower cover plate, and valve plate, dunnage are drawn in.
7. mangetic core assembly as claimed in claim 6, is characterized in that, have upper and lower two steel balls in each ball hole of steel ball rack, these two steel balls contact dunnage and valve plate respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210163149.2A CN103423477B (en) | 2012-05-23 | 2012-05-23 | Swing type water-cooled vacuum gate valve and mangetic core assembly thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210163149.2A CN103423477B (en) | 2012-05-23 | 2012-05-23 | Swing type water-cooled vacuum gate valve and mangetic core assembly thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103423477A CN103423477A (en) | 2013-12-04 |
| CN103423477B true CN103423477B (en) | 2015-12-02 |
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ID=49648642
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210163149.2A Active CN103423477B (en) | 2012-05-23 | 2012-05-23 | Swing type water-cooled vacuum gate valve and mangetic core assembly thereof |
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|---|---|
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108716550B (en) * | 2018-07-27 | 2024-03-01 | 沈阳乐贝真空技术有限公司 | Novel vacuum isolation door valve |
| CN113932024B (en) * | 2021-09-23 | 2024-06-14 | 成都中科唯实仪器有限责任公司 | Valve core structure of vacuum valve |
| CN116066583B (en) * | 2023-03-30 | 2023-06-13 | 成都中科唯实仪器有限责任公司 | Self-locking single valve plate vacuum valve |
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|---|---|---|---|---|
| US4541453A (en) * | 1983-11-03 | 1985-09-17 | Conoco Inc. | High temperature slide valve |
| CN2186334Y (en) * | 1993-03-12 | 1994-12-28 | 机械电子工业部西安重型机械研究所 | Sway vacuum pneumatic valve |
| CN201225445Y (en) * | 2008-05-28 | 2009-04-22 | 钰衡科技股份有限公司 | Valve plate opening and closing mechanism |
| CN201593617U (en) * | 2010-01-08 | 2010-09-29 | 良精集团有限公司 | Butterfly-type flat-plate vacuum valve |
| CN202629122U (en) * | 2012-05-23 | 2012-12-26 | 费海鸿 | Swing-type water-cooling vacuum gate valve and valve core component thereof |
-
2012
- 2012-05-23 CN CN201210163149.2A patent/CN103423477B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4541453A (en) * | 1983-11-03 | 1985-09-17 | Conoco Inc. | High temperature slide valve |
| CN2186334Y (en) * | 1993-03-12 | 1994-12-28 | 机械电子工业部西安重型机械研究所 | Sway vacuum pneumatic valve |
| CN201225445Y (en) * | 2008-05-28 | 2009-04-22 | 钰衡科技股份有限公司 | Valve plate opening and closing mechanism |
| CN201593617U (en) * | 2010-01-08 | 2010-09-29 | 良精集团有限公司 | Butterfly-type flat-plate vacuum valve |
| CN202629122U (en) * | 2012-05-23 | 2012-12-26 | 费海鸿 | Swing-type water-cooling vacuum gate valve and valve core component thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103423477A (en) | 2013-12-04 |
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