CN103412391A - Laser tracker based method for achieving optical system axis through and center alignment - Google Patents
Laser tracker based method for achieving optical system axis through and center alignment Download PDFInfo
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- CN103412391A CN103412391A CN2013103528185A CN201310352818A CN103412391A CN 103412391 A CN103412391 A CN 103412391A CN 2013103528185 A CN2013103528185 A CN 2013103528185A CN 201310352818 A CN201310352818 A CN 201310352818A CN 103412391 A CN103412391 A CN 103412391A
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Abstract
The invention discloses a laser tracker based method for achieving optical system axis through and center alignment. The method comprises the steps that S1, a primary mirror and a secondary mirror of an optical system are assembled and adjusted; S2, a laser tracker is arranged; S3, a target ball is moved on the primary mirror, and the optical axis of the primary mirror is calibrated through the laser tracker; S4, the target ball is moved on the secondary mirror, and the optical axis of the secondary mirror is calibrated; S5, the size and the direction of the space deviation between optical axis of the primary mirror and the optical axis of the secondary axis are calculated; S6, the space position between the primary mirror and the secondary mirror is adjusted according to the size and the direction of the space deviation to ensure that the optical axis of the primary mirror and the optical axis of the secondary mirror coincide. The laser tracker based method for achieving optical system axis through and center alignment solves the problems that tools in the prior are complex, tedious in operation process and large in datum error, and is easy to operate, safe and efficient.
Description
Technical field
The invention belongs to optics and debug field, relate to the method for a kind of optical system through axle to the heart, relate in particular to a kind of based on laser tracker to the optical system through axle center alignment method.
Background technology
Optoelectronic device consists of the imaging system of primary mirror, secondary mirror and back usually, if primary mirror optical axis and secondary mirror optical axis do not overlap, the primary and secondary mirror system will produce larger coma, has a strong impact on the picture element of system.Dimension all can take certain measure to guarantee overlapping of primary mirror optical axis and secondary mirror optical axis in the optical alignment process of optoelectronic device.
The technical method (as Fig. 3) of existing adjustment primary mirror optical axis and secondary mirror optical axis coincidence, it is debug process and can be summarized as follows: complete debuging of primary mirror 1.; 2. use the micrometer telescope, make the plane of incidence of pentaprism vertical with the telescopical optical axis of micrometer; 3. adjust micrometer telescope and pentaprism, the picture by pentaprism observes picture that the plane of incidence returns and primary mirror surface return, make the telescopical optical axis of micrometer vertical with the primary mirror optical axis; 4. by pentaprism Rotate 180 °, the secondary mirror picture be reflected back and the picture that the pentaprism plane of incidence returns are worn, complete secondary mirror to heart work.This method has several obvious shortcomings: 1. operational sequence is loaded down with trivial details, and efficiency is low; 2. the benchmark transmission causes precision to reduce; 3. to debug Accuracy large to whole for the pentaprism machining precision.
Summary of the invention
In order to solve the problem of prior art, the object of the present invention is to provide a kind of center alignment method of optical system through axle based on laser tracker.
For reaching described purpose, the invention provides a kind of center alignment method of optical system through axle based on laser tracker, the technical scheme of dealing with problems is to complete by following steps:
Step S1: primary mirror and the secondary mirror of debuging optical system;
Step S2: set up laser tracker;
Step S3: running target ball on primary mirror, utilize laser tracker to demarcate the primary mirror optical axis;
Step S4: running target ball on secondary mirror, utilize laser tracker to demarcate the secondary mirror optical axis;
Step S5: the size and Orientation that calculates the space bias of primary mirror optical axis and secondary mirror optical axis;
Step S6: adjust the locus between primary mirror and secondary mirror according to the size and Orientation of space bias, make primary mirror optical axis and secondary mirror optical axis coincidence.
Principle of the present invention is: 1. the target ball moves on primary mirror, utilizes laser tracker to measure its mobile space track, simulates the space geometry feature of primary mirror, can obtain the primary mirror axis.2. the target ball moves on secondary mirror, utilizes laser tracker to measure secondary mirror mobile space track, simulates the space geometry feature of secondary mirror, namely obtains the secondary mirror axis.3. according to the space bias of two above-mentioned straight lines, carry out the adjustment that overlaps of primary mirror optical axis and secondary mirror optical axis.
Beneficial effect of the present invention: disclosed in this invention based on laser tracker, under same benchmark, realize the optical system through axle center alignment method, definite mode of its optical element optical axis direction is that the target ball is moved on optical element, utilize laser tracker to measure its mobile space track, simulate the geometric properties of optical element, can obtain the axis of optical element.The method is simple and quick, has avoided the cumbersome procedure of using pentaprism to carry out the benchmark transmission, has improved work efficiency and precision.
The accompanying drawing explanation
Fig. 1 is based on the optical system through axle center alignment method process flow diagram of laser tracker in the present invention;
Fig. 2 is based on the optical system through axle center alignment method schematic diagram of laser tracker in the present invention;
Fig. 3 is available technology adopting optical system through axle center alignment method.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
As Fig. 1, illustrate based on the flow process of laser tracker to the optical system through axle center alignment method, the method completes by following steps:
Step S1: primary mirror and the secondary mirror of debuging optical system.
Step S2: set up laser tracker.Laser tracker is erected at and can measures simultaneously on the position of primary mirror and secondary mirror, and guarantee that laser tracker is firmly motionless.
Step S3: running target ball on primary mirror, utilize laser tracker to demarcate the primary mirror optical axis.The target ball moves on primary mirror, utilize laser tracker to measure target ball mobile space track, according to the quadric surface formula fitting, goes out the space geometry feature of primary mirror, can obtain the primary mirror optical axis.
The quadric surface formula of space geometry feature that simulates primary mirror is as follows:
Wherein, c is the vertex curvature of primary mirror, and k is the conic constant of the space geometry feature of primary mirror, and x, y are quadric coordinate unknown number of the space geometry feature of primary mirror.
Step S4: running target ball on secondary mirror, utilize laser tracker to demarcate the secondary mirror optical axis.The target ball moves on secondary mirror, utilize laser tracker to measure target ball mobile space track, according to formula fitting, goes out the space geometry feature of secondary mirror, can obtain the secondary mirror optical axis.
Step S5: the size and Orientation that calculates the space bias of primary mirror optical axis and secondary mirror optical axis.Two centerline fits that above-mentioned steps S3, step S4 are calibrated, under the same coordinate system, calculate the space bias of primary mirror optical axis and secondary mirror optical axis.
Step S6: utilize the size and Orientation of space bias to adjust the locus between primary mirror and secondary mirror, make primary mirror optical axis and secondary mirror optical axis coincidence.Namely can realize by translation, the inclination of adjusting primary mirror the locus of adjusting between primary mirror and secondary mirror, also can realize by translation, the inclination of adjusting secondary mirror, can also realize by the combination adjustment of primary mirror and secondary mirror.
As Fig. 2, illustrate based on laser tracker the optical system through axle centering device, comprise laser tracker, the first target ball and the second target ball, primary mirror and the secondary mirror of optical system are staggered relatively, and between primary mirror and secondary mirror, have a distance; Between primary mirror and secondary mirror, place the first target ball and the second target ball, the first target ball is located at a side of primary mirror minute surface, the second target ball is located at a side of secondary mirror minute surface, one side of laser tracker line between the first target ball and the second target ball, and the light-emitting window of laser tracker is aimed at respectively the first target ball and the second target ball, laser tracker is used for the size and Orientation that obtains target ball mobile space track, calculates the space bias of primary mirror optical axis and secondary mirror optical axis, adjusts the locus between primary mirror and secondary mirror, makes primary mirror optical axis and secondary mirror optical axis coincidence.
The laser tracker adopted in the present invention is APIT3 type laser tracker, and it is a kind of high-precision Portable three-dimensional coordinate measurment instrument, and it uses two rotary angle encoders and a laser distance measuring system, to follow the tracks of and to measure the position of target ball.The target ball is comprised of hollow corner cube mirror, accurately is fixed in the processing spheroid with catoptron.Outer surface of spheroid is to the distance known (being radius of sphericity) at center, and the laser tracker Survey Software utilizes radius of sphericity to measure skew or compensating measure.Laser tracker is launched and is received the red He-Ne Lasers returned from the target ball, and two rotary angle encoders and Range Measurement System feedack that the direction of laser tracker mechanical axis can receive according to the location sensitive detector of its inside are constantly adjusted.Laser tracker is determined the coordinate of target by measuring two angles and distance.These angles are measured by the scrambler be arranged on angle, summit axle and azimuth axis.Radial distance is measured by fringe count micrometer or a kind of phase deviation absolute distance measurement system.
Adjusted optical system is comprised of primary mirror, secondary mirror, and primary mirror is paraboloidal mirror, bore 300mm; Secondary mirror is hyperbolic mirror, bore 80mm.
Described in present embodiment in the process of demarcating the optical element optical axis, the target ball should should be large as far as possible under the condition that condition is allowed in moving range on optical element, gathers that count should be many as far as possible.According to the laser tracker characteristic, target ball moving range is larger, and collection is counted more, more can reflect the space geometry feature of optical element, the optical element space curve precision simulated by laser tracker is just higher, and then the stated accuracy of optical element optical axis is also just higher.
Those of ordinary skill in the art will be appreciated that, above embodiment illustrates the present invention, and not be used as limitation of the invention, as long as in connotation scope of the present invention, the above embodiment is changed, and modification all will drop in the scope of the claims in the present invention book.
Claims (6)
1. based on laser tracker, realize the optical system through axle center alignment method for one kind, it is characterized in that: the method completes by following steps:
Step S1: primary mirror and the secondary mirror of debuging optical system;
Step S2: set up laser tracker;
Step S3: running target ball on primary mirror, utilize laser tracker to demarcate the primary mirror optical axis;
Step S4: running target ball on secondary mirror, utilize laser tracker to demarcate the secondary mirror optical axis;
Step S5: the size and Orientation that calculates the space bias of primary mirror optical axis and secondary mirror optical axis;
Step S6: adjust the locus between primary mirror and secondary mirror according to the size and Orientation of space bias, make primary mirror optical axis and secondary mirror optical axis coincidence.
2. optical system through axle center alignment method according to claim 1, is characterized in that: in step S2, described laser tracker is erected at and can measures simultaneously on the position of primary mirror and secondary mirror, and guarantee that laser tracker is firmly motionless.
3. optical system through axle center alignment method according to claim 1, it is characterized in that: in step S3, described target ball moves on primary mirror, utilizes laser tracker to measure target ball mobile space track, simulate the space geometry feature of primary mirror, namely obtain the primary mirror optical axis.
4. optical system through axle center alignment method according to claim 1, it is characterized in that: in step S4, described target ball moves on secondary mirror, utilizes laser tracker to measure target ball mobile space track, simulate the space geometry feature of secondary mirror, namely obtain the secondary mirror optical axis.
5. optical system through axle center alignment method according to claim 1, it is characterized in that: in step S5, two centerline fits that calibrated respectively optical axis by step S3, step S4, under the same coordinate system, are calculated to the space bias of primary mirror optical axis and secondary mirror optical axis.
6. optical system through axle center alignment method according to claim 1, it is characterized in that: in step S6, locus between described adjustment primary mirror and secondary mirror is by the translation of adjusting primary mirror, tilts to realize, or realize, or realize by the combination adjustment of primary mirror and secondary mirror by translation, the inclination of adjusting secondary mirror.
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Cited By (10)
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| CN105182510A (en) * | 2015-07-20 | 2015-12-23 | 中国科学院上海光学精密机械研究所 | Spherical Cassegrain system for imaging finite target and adjusting method of spherical Cassegrain system |
| CN105674934A (en) * | 2016-01-25 | 2016-06-15 | 西安应用光学研究所 | Measuring method for optical interval of refraction and reflection system with hollow main lens |
| CN106338261A (en) * | 2016-09-13 | 2017-01-18 | 湖北航天技术研究院总体设计所 | Angle deviation calibration method between two interferometer emergence plane wave light beams |
| CN107865667A (en) * | 2017-12-19 | 2018-04-03 | 上海联影医疗科技有限公司 | Medical image system and its method of adjustment |
| CN108489401A (en) * | 2018-05-23 | 2018-09-04 | 上海市计量测试技术研究院 | Split type calibration target, calibrating installation and its calibration method with the target |
| CN109656013A (en) * | 2018-12-17 | 2019-04-19 | 中国科学院长春光学精密机械与物理研究所 | A kind of large aperture telescope primary mirror cell assembly method based on laser tracker |
| CN110531531A (en) * | 2019-09-27 | 2019-12-03 | 昆明北方红外技术股份有限公司 | The Method of Adjustment of Cassegrain optical system primary and secondary reflecting mirror |
| CN111175961A (en) * | 2018-11-09 | 2020-05-19 | 中国科学院长春光学精密机械与物理研究所 | Telescope secondary mirror assembly position detection device, method and system |
| CN113477976A (en) * | 2021-07-29 | 2021-10-08 | 中材科技（阜宁）风电叶片有限公司 | Blade drilling method and support |
| CN114942014A (en) * | 2022-04-15 | 2022-08-26 | 中国科学院微电子研究所 | Direct-injection laser tracker, target tracking recovery method, device, and storage medium |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105182510B (en) * | 2015-07-20 | 2017-07-14 | 中国科学院上海光学精密机械研究所 | To the sphere Cassegrain system and its method of adjustment of limited remote object plane imaging |
| CN105182510A (en) * | 2015-07-20 | 2015-12-23 | 中国科学院上海光学精密机械研究所 | Spherical Cassegrain system for imaging finite target and adjusting method of spherical Cassegrain system |
| CN105674934A (en) * | 2016-01-25 | 2016-06-15 | 西安应用光学研究所 | Measuring method for optical interval of refraction and reflection system with hollow main lens |
| CN105674934B (en) * | 2016-01-25 | 2018-06-12 | 西安应用光学研究所 | A kind of assay method for being used for the catadioptric system optical interval containing hollow primary mirror |
| CN106338261A (en) * | 2016-09-13 | 2017-01-18 | 湖北航天技术研究院总体设计所 | Angle deviation calibration method between two interferometer emergence plane wave light beams |
| CN107865667A (en) * | 2017-12-19 | 2018-04-03 | 上海联影医疗科技有限公司 | Medical image system and its method of adjustment |
| CN108489401A (en) * | 2018-05-23 | 2018-09-04 | 上海市计量测试技术研究院 | Split type calibration target, calibrating installation and its calibration method with the target |
| CN108489401B (en) * | 2018-05-23 | 2023-09-01 | 上海市计量测试技术研究院 | Split type calibration target, calibration device with target and calibration method of calibration device |
| CN111175961B (en) * | 2018-11-09 | 2022-08-19 | 中国科学院长春光学精密机械与物理研究所 | Telescope secondary mirror assembly position detection device, method and system |
| CN111175961A (en) * | 2018-11-09 | 2020-05-19 | 中国科学院长春光学精密机械与物理研究所 | Telescope secondary mirror assembly position detection device, method and system |
| CN109656013A (en) * | 2018-12-17 | 2019-04-19 | 中国科学院长春光学精密机械与物理研究所 | A kind of large aperture telescope primary mirror cell assembly method based on laser tracker |
| CN110531531A (en) * | 2019-09-27 | 2019-12-03 | 昆明北方红外技术股份有限公司 | The Method of Adjustment of Cassegrain optical system primary and secondary reflecting mirror |
| CN113477976A (en) * | 2021-07-29 | 2021-10-08 | 中材科技（阜宁）风电叶片有限公司 | Blade drilling method and support |
| CN113477976B (en) * | 2021-07-29 | 2024-06-14 | 中材科技（阜宁）风电叶片有限公司 | Blade drilling method and bracket |
| CN114942014A (en) * | 2022-04-15 | 2022-08-26 | 中国科学院微电子研究所 | Direct-injection laser tracker, target tracking recovery method, device, and storage medium |
| CN114942014B (en) * | 2022-04-15 | 2023-10-31 | 中国科学院微电子研究所 | Direct laser tracker, target tracking recovery method, device and storage medium |
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Application publication date: 20131127 |