CN103411689A - Laser wavelength direct measurement method and device based on single frequency orthogonal linearly polarized light - Google Patents
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Abstract
The invention discloses a laser wavelength direct measurement method and device based on single frequency orthogonal linearly polarized light. Laser to be measured with the wavelength lambada x passes through a polarizing film and a quarter-wave plate to form circularly polarized light, and the circularly polarized light is emitted to two Michelson interferometers to form two interference signals respectively of a horizontally polarized component and a vertically polarized component. Firstly, a PZT driver is used for modulating the back and forth movement of a reference pyramid prism, and then the reference pyramid prism stops after the phase difference between the two interference signals is measured; a certain moving distance delta L of the reference pyramid prism is measured, and a bidirectional counting module is used for measuring the full period number N of the interference signal of the horizontally polarized component; the reference pyramid prism is modulated again to measure the phase difference between the two interference signals at the time so as to obtain the decimal variable quantity of the interference signal of the horizontally polarized component; the wavelength lambada x to be measured is computed through a computer according to the moving distance delta L, the measured full period number N and a decimal epsilon. According to the laser wavelength direct measurement method and device based on the single frequency orthogonal linearly polarized light, a light path structure is simple, reference to a laser device is not needed, the measurement accuracy is high, and wide-range measurement of the wavelength can be realized.
Description
Technical field
The present invention relates to laser wavelength measurement method and device, especially relate to a kind of optical maser wavelength direct measuring method and device based on single-frequency orhtogonal linear polarizaiton light.
Background technology
Optical maser wavelength is as the measuring basis value, be widely used in the measurement of length, speed, angle, flatness, linearity and verticality etc., being delicate metering, the important measurement parameter of precision optical machinery and microelectronics industry field, is the key that guarantees geometric measurement accuracy and magnitude tracing and accurately measure the wavelength size.The laser wavelength measurement method is divided into substantially: 1, based on the measuring method of the laser frequency (wavelength) of harmonic wave optical frequency chain, if the method is the excesssive gap between optical frequency in chain (surpassing 10GHz) in the actual measurement process, it is very difficult between known optical frequency and arbitrary unknown optical frequency, erecting bridge; 2, based on optical frequency (wavelength) measuring method of minute (OFID) frequency chain in the optical frequency interval, however one can cover the microwave section to the OFID chain of the hundreds of THz of optical frequencies complexity extremely still; 3, based on optical frequency (wavelength) measuring method of optical frequency com, utilize the method will reach very high accuracy of measurement very difficult, accuracy of measurement is higher, and also just higher to the requirement of instrument, measuring system is also just more complicated; 4, based on the laser wavelength measurement method of Michelson Interference Principle, need reference laser diode as the reference light source, measuring accuracy is subject to the impact of reference laser diode; 5, based on laser frequency (wavelength) measuring method of empty synthetic wavelength principle, the method relates to the phase bit comparison between different frequency signals.
Optical maser wavelength direct measuring method based on single-frequency orhtogonal linear polarizaiton light, do not need reference light source, do not have the phase bit comparison between different frequency signals, can realize the continuous coverage on a large scale to wavelength, and measuring accuracy is high.
Summary of the invention
In order to meet the needs to the high-precision laser wavelength measurement, the object of the present invention is to provide a kind of optical maser wavelength direct measuring method and device based on single-frequency orhtogonal linear polarizaiton light, to be converted into to the measurement of unknown wavelength the measurement of interferometric fringe signal counting complete cycle and two-way interference signal phase differential, do not need reference light source, can realize directly measuring continuously of optical maser wavelength on a large scale.
The technical solution adopted for the present invention to solve the technical problems is:
One, a kind of optical maser wavelength direct measuring method based on single-frequency orhtogonal linear polarizaiton light:
(1) testing laser device output wavelength is λ
xLaser through polaroid, form linearly polarized light, after the quarter-wave plate at the angle at 45 °, polarization direction of directive e axle and linearly polarized light, form circularly polarized light, this circularly polarized light is comprised of single-frequency orhtogonal linear polarizaiton light, after directive two cover Michelson interferometers, form the interference signal of horizontal polarization component and vertical polarization component, by separately photodetector, received respectively;
(2) at first the measured angular cone prism is motionless, by PZT driver modulation reference prism of corner cube back and forth movement in 5 μ m strokes, records λ by the phase difference measurement module
xThe interference signal of vertical polarization component and λ
xThe phase differential of the interference signal of horizontal polarization component
The PZT driver stops modulation;
(3) then the measured angular cone prism moves Δ L=100mm, records λ by two-way counting module
xThe complete cycle issue N that horizontal polarization component interference signal changes;
(4) modulation reference prism of corner cube back and forth movement in 5 μ m strokes again, record λ by the phase difference measurement module
xThe interference signal of vertical polarization component and λ
xThe phase differential of the interference signal of horizontal polarization component is
λ
xThe decimal variable quantity ε of horizontal polarization component interference signal is:
(5) according to measured angular cone prism the displacement L moved and the λ recorded
xComplete cycle issue N and decimal variable quantity ε that horizontal polarization component interference signal changes obtain the testing laser wavelength and are:
So far obtain the wavelength of testing laser device.
Two, the direct measurement mechanism of a kind of optical maser wavelength based on single-frequency orhtogonal linear polarizaiton light:
The present invention includes the testing laser device, polaroid, quarter-wave plate, the first spectroscope, PZT driver, reference angle cone prism, the first polarization spectroscope, measured angular cone prism, the second polarization spectroscope, the second spectroscope, the first photodetector, the second photodetector, the 3rd photodetector, the phase difference measurement module, two-way counting module and computing machine; Testing laser device output wavelength is λ
xLaser through polaroid, form linearly polarized light, the circularly polarized light that after the quarter-wave plate at the angle at 45 °, polarization direction of directive e axle and linearly polarized light, formation is comprised of single-frequency orhtogonal linear polarizaiton light, wherein λ
xVertical polarization component directive by the first spectroscope, be arranged on the first set Michelson interferometer that reference angle cone prism on the PZT driver and the first polarization spectroscope form, form the interference signal of vertical polarization component, λ
xHorizontal polarization component directive, by the second cover Michelson interferometer that the first spectroscope, reference angle cone prism and measured angular cone prism form, forms the interference signal of horizontal polarization component; Vertical polarization component interference signal is received by the first photodetector after the second polarization spectroscope reflection, horizontal polarization component interference signal, after the second polarization spectroscope transmission, the second spectroscope light splitting, is received by the second photodetector and the 3rd photodetector respectively; The described two-way interference signal that the first photodetector and the second photodetector receive is sent into the phase difference measurement module, the described two-way interference signal that the second photodetector and the 3rd photodetector receive is sent into two-way counting module, and phase difference measurement module and two-way counting module connect computing machine.
The beneficial effect that the present invention has is:
The present invention is converted into the measurement to unknown wavelength the measurement of interferometric fringe signal counting complete cycle and two-way interference signal phase differential, can realize the high-acruracy survey to optical maser wavelength, light channel structure of the present invention is simple, do not need reference laser diode, easy to use, measuring accuracy is high, can realize the large-range measuring to wavelength, can be widely used in technical field of optical precision measurement.
The accompanying drawing explanation
Fig. 1 is based on the direct measuring principle figure of optical maser wavelength of single-frequency orhtogonal linear polarizaiton light.
Fig. 2 is λ before and after the measured angular cone prism moves
xVertical polarization component and λ
xThe phase differential of the interference signal of horizontal polarization component changes schematic diagram.
In figure: 1, testing laser device, 2, polaroid, 3, quarter-wave plate, 4, the first spectroscope, 5, the PZT driver, 6, the reference angle cone prism, 7, the first polarization spectroscope, 8, the measured angular cone prism, the 9, second polarization spectroscope, 10, the second spectroscope, the 11, first photodetector, the 12, second photodetector, 13, the 3rd photodetector, 14, phase difference measurement module, 15, two-way counting module, 16, computing machine.
Embodiment
The present invention is further illustrated below in conjunction with drawings and Examples.
As shown in Figure 1, the present invention includes testing laser device 1, polaroid 2, quarter-wave plate 3, the first spectroscopes 4, PZT driver 5, reference angle cone prism 6, the first polarization spectroscopes 7, measured angular cone prism 8, the second polarization spectroscope 9, the second spectroscope 10, the first photodetectors 11, the second photodetector 12, the 3rd photodetector 13, phase difference measurement module 14, two-way counting module 15 and computing machine 16.Testing laser device 1 output wavelength is λ
xLaser through polaroid 2, form linearly polarized lights, after the quarter-wave plate at the angle at 45 °, polarization direction of directive e axle and linearly polarized light, form circularly polarized light, this circularly polarized light is comprised of single-frequency orhtogonal linear polarizaiton light, wherein λ
xVertical polarization component directive by the first spectroscope 4, be arranged on the first set Michelson interferometer that reference angle cone prism 6 on PZT driver 5 and the first polarization spectroscope 7 form, form the interference signal of vertical polarization component; Simultaneously, λ
xHorizontal polarization component directive, by the second cover Michelson interferometer that the first spectroscope 4, reference angle cone prism 6 and measured angular cone prism 8 form, forms the interference signal of horizontal polarization component; The interference signal of vertical polarization component is received by the first photodetector 11 after the second polarization spectroscope 9 reflections, the interference signal of horizontal polarization component is after the second polarization spectroscope 9 transmissions, after the second spectroscope 10 reflections and transmission, received by the second photodetector 12 and the 3rd photodetector 13 again; The two-way interference signal that the first photodetector 11 and the second photodetector 12 receive is sent into phase difference measurement module 14, the second photodetectors 12 and
ThreeThe two-way interference signal that photodetector 13 receives is sent into two-way counting module 15, and the measurement result of phase difference measurement module 14 and two-way counting module 15 is sent into computing machine 16.
Note L
0For the reference path of first set Michelson interferometer and initial optical path difference, the L of optical path
1Be the reference path of the second cover Michelson interferometer and the initial optical path difference of optical path.
Before measuring beginning, the phase place that the first detector 11 detects vertical polarization component interference signal is:
The phase place of the horizontal polarization component interference signal that the second detector 12 detects is:
Initial phase difference between the two-way interference signal is:
Measured angular cone prism 8 moving displacement Δ L, the phase place of horizontal polarization component interference signal becomes:
Now the phase difference variable of two-way interference signal is:
This phase differential of two-way interference signal changes, as shown in Figure 2, and V (λ
X) the expression wavelength X
xThe interference signal waveform of vertical polarization component, V (λ
X||) mean that the measured angular cone prism moves front λ
xThe interference signal waveform of horizontal polarization component, V (λ '
X||) mean that the measured angular cone prism moves rear λ
xThe interference signal waveform of horizontal polarization component.
By formula (5) formula, deducting formula (3) formula obtains:
In formula: N is λ
xThe complete cycle issue that horizontal polarization component interference signal changes, ε is λ
xThe decimal variable quantity of horizontal polarization component interference signal.
According to formula (6), can calculate unknown wavelength X
xFor:
The concrete implementation step of directly measuring based on the optical maser wavelength of single-frequency orhtogonal linear polarizaiton light is as follows:
(1) before measuring beginning, measured angular cone prism 8 is motionless, by PZT driver 5 modulation reference prism of corner cubes 6 back and forth movement in 5 μ m strokes, the λ now the first photodetector 11 recorded
xThe λ that the interference signal of vertical polarization component and the second photodetector 12 record
xThe interference signal of horizontal polarization component is sent into phase difference measurement module 14(Agilent 53220A type universal frequency counter), record phase differential and be
(2) PZT driver 5 stops modulation, and measured angular cone prism 8 moves certain displacement Δ L=100mm, by the mode of mechanical phase shift, and the λ that the second photodetector 12 and the 3rd photodetector 13 are detected
xHorizontal polarization component interference signal phase differential is that the two paths of signals of 90 ° is sent into the two-way counting module 15(HCTL-2020 of Hewlett-Packard type and debated to the counting circuit chip), record λ
xThe complete cycle issue N of horizontal polarization component interference signal;
(3) modulation reference prism of corner cube 6 back and forth movement in 5 μ m strokes again, record the now phase difference variable of two-way interference signal and be
(4) according to measured angular cone prism 8, move the phase differential of front and back two-way interference signal
With
Draw λ
xThe interference signal decimal variable quantity ε of horizontal polarization component:
(5) computing machine 16(Lenovo Qitian M7300 type) according to the λ recorded
xThe complete cycle issue N of horizontal polarization component interference signal, interference signal decimal variable quantity ε, and the displacement L that moves of measured angular cone prism 8 calculate as follows the testing laser wavelength and are:
Substitution representative value: testing laser wavelength X
xFor 633nm, the displacement L=100mm that measured angular cone prism 8 moves, the complete cycle issue N of interference signal is 315955, interference signal decimal variable quantity ε is 0.7662, when the positioning precision of measured angular cone prism moving displacement is 0.1nm, interference fringe segmentation coefficient is 1/4096 o'clock, and the measuring accuracy of testing laser wavelength is 1.23 * 10
-9.
So far complete the present invention.
Claims (2)
1. optical maser wavelength direct measuring method based on single-frequency orhtogonal linear polarizaiton light is characterized in that:
(1) testing laser device output wavelength is λ
xLaser through polaroid, form linearly polarized light, after the quarter-wave plate at the angle at 45 °, polarization direction of directive e axle and linearly polarized light, form circularly polarized light, this circularly polarized light is comprised of single-frequency orhtogonal linear polarizaiton light, after directive two cover Michelson interferometers, form the interference signal of horizontal polarization component and vertical polarization component, by separately photodetector, received respectively;
(2) at first the measured angular cone prism is motionless, by PZT driver modulation reference prism of corner cube back and forth movement in 5 μ m strokes, records λ by the phase difference measurement module
xThe interference signal of vertical polarization component and λ
xThe phase differential of the interference signal of horizontal polarization component
The PZT driver stops modulation;
(3) then the measured angular cone prism moves Δ L=100mm, records λ by two-way counting module
xThe complete cycle issue N that horizontal polarization component interference signal changes;
(4) modulation reference prism of corner cube back and forth movement in 5 μ m strokes again, record λ by the phase difference measurement module
xThe interference signal of vertical polarization component and λ
xThe phase differential of the interference signal of horizontal polarization component is
λ
xThe decimal variable quantity ε of horizontal polarization component interference signal is:
(5) according to measured angular cone prism the displacement L moved and the λ recorded
xComplete cycle issue N and decimal variable quantity ε that horizontal polarization component interference signal changes obtain the testing laser wavelength and are:
So far obtain the wavelength of testing laser device.
2. the direct measurement mechanism of a kind of optical maser wavelength based on single-frequency orhtogonal linear polarizaiton light of method according to claim 1, it is characterized in that: comprise testing laser device (1), polaroid (2), quarter-wave plate (3), the first spectroscope (4), PZT driver (5), reference angle cone prism (6), the first polarization spectroscope (7), measured angular cone prism (8), the second polarization spectroscope (9), the second spectroscope (10), the first photodetector (11), the second photodetector (12), the 3rd photodetector (13), phase difference measurement module (14), two-way counting module (15) and computing machine (16), testing laser device (1) output wavelength is λ
xlaser through polaroid (2), form linearly polarized light, after the quarter-wave plate (3) at the angle at 45 °, polarization direction of directive e axle and linearly polarized light, form the circularly polarized light formed by single-frequency orhtogonal linear polarizaiton light, wherein λ
xvertical polarization component directive by the first spectroscope (4), be arranged on the first set Michelson interferometer that reference angle cone prism (6) on PZT driver (5) and the first polarization spectroscope (7) form, form the interference signal of vertical polarization component, λ
xhorizontal polarization component directive, by the second cover Michelson interferometer that the first spectroscope (4), reference angle cone prism (6) and measured angular cone prism (8) form, forms the interference signal of horizontal polarization component, vertical polarization component interference signal is received by the first photodetector (11) after the second polarization spectroscope (9) reflection, horizontal polarization component interference signal, after the second polarization spectroscope (9) transmission, the second spectroscope (10) light splitting, is received by the second photodetector (12) and the 3rd photodetector (13) respectively, the described two-way interference signal that the first photodetector (11) and the second photodetector (12) receive is sent into phase difference measurement module (14), the described two-way interference signal that the second photodetector (12) and the 3rd photodetector (13) receive is sent into two-way counting module (15), and phase difference measurement module (14) and two-way counting module (15) connect computing machine (16).
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| CN105043245A (en) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | Contrast type anti-interference plane reflector laser interferometer, calibration method and measurement method |
| WO2018014325A1 (en) * | 2016-07-22 | 2018-01-25 | 浙江理工大学 | Phase modulation-based dual-laser single-frequency interferometric nanometer displacement measurement device and method |
| CN108627084A (en) * | 2018-04-27 | 2018-10-09 | 华中科技大学 | A kind of laser wavelength calibration system based on static Michelson's interferometer |
| CN110487173A (en) * | 2019-08-22 | 2019-11-22 | 上海理工大学 | Reflective quadrature in phase single-frequency laser interference measuring device and measuring method |
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| CN108627084A (en) * | 2018-04-27 | 2018-10-09 | 华中科技大学 | A kind of laser wavelength calibration system based on static Michelson's interferometer |
| CN110487173A (en) * | 2019-08-22 | 2019-11-22 | 上海理工大学 | Reflective quadrature in phase single-frequency laser interference measuring device and measuring method |
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| CN111366075A (en) * | 2020-03-20 | 2020-07-03 | 北京国泰蓝盾科技有限公司 | High-precision online volume measurement system |
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| CN113607063A (en) * | 2021-08-03 | 2021-11-05 | 中国工程物理研究院激光聚变研究中心 | Nano displacement measurement method and system based on vortex light field interference |
| CN113810103A (en) * | 2021-09-08 | 2021-12-17 | 中国矿业大学(北京) | Wavelength measurement system and wavelength measurement method |
| CN113810103B (en) * | 2021-09-08 | 2022-09-09 | 中国矿业大学(北京) | Wavelength measurement system and wavelength measurement method |
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Effective date of registration: 20191028 Address after: 314100 room 107, building 3, No.118, Kangbao Road, ganyao Town, Jiashan County, Jiaxing City, Zhejiang Province Patentee after: Jiaxing Junhong Optical Co.,Ltd. Address before: 310018, No. 928, No. 2, Poplar Street, Jianggan Economic Development Zone, Hangzhou, Zhejiang Patentee before: ZHEJIANG SCI-TECH University |
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Effective date of registration: 20230421 Address after: 314100 Room 102, building 4, 118 Kangbao Road, ganyao Town, Jiashan County, Jiaxing City, Zhejiang Province Patentee after: Zhejiang Huawei Equipment Manufacturing Co.,Ltd. Address before: Room 107, building 3, 118 Kangbao Road, ganyao Town, Jiashan County, Jiaxing City, Zhejiang Province, 314100 Patentee before: Jiaxing Junhong Optical Co.,Ltd. |
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Application publication date: 20131127 Assignee: Jiaxing Zhixin Precision Parts Co.,Ltd. Assignor: Zhejiang Huawei Equipment Manufacturing Co.,Ltd. Contract record no.: X2023980053719 Denomination of invention: Direct measurement method and device for laser wavelength based on single frequency orthogonal linearly polarized light Granted publication date: 20160601 License type: Common License Record date: 20231222 |
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