CN103411534B - A kind of method and apparatus measuring spot size - Google Patents
A kind of method and apparatus measuring spot size Download PDFInfo
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- CN103411534B CN103411534B CN201310340491.XA CN201310340491A CN103411534B CN 103411534 B CN103411534 B CN 103411534B CN 201310340491 A CN201310340491 A CN 201310340491A CN 103411534 B CN103411534 B CN 103411534B
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Abstract
The invention discloses a kind of method and apparatus measuring spot size, this device includes: guide rail, guide rail adjusting bracket, blade, blade adjust frame, two light hole supports and laser power meter, testing laser device and laser power meter lay respectively at the outside of two light hole supports, wherein, guide rail be respectively arranged at the two ends with a light hole support, the line between light hole corresponding on two light hole supports is parallel with the axis of guide rail；Blade adjusts frame and is fixed on guide rail between two light hole supports, blade adjusts and is provided with blade on frame, blade adjusts frame, and at blade, the edge of a knife shift position on blade is planar adjusted by institute, so that the edge of a knife is to passing the testing laser Shu Jinhang of corresponding light hole blocking in various degree；Guide rail adjusting bracket is pointed to guide rail thereon and carries out position adjustments, and blade place plane is vertical with the axis of guide rail.For the adjustment of light path when the present invention simplifies facula measurement, improve measuring accuracy.
Description
Technical field
The present invention relates to laser measuring technique field, particularly relate to a kind of method and apparatus measuring spot size.
Background technology
Spot size and diameter are the important parameters weighing laser beam output characteristics.
Along with people going deep into Laser Study, the emphasis of concern is transferred on the laser beam how obtaining more high brightness and power density by the lifting pursuing merely Output of laser power already.Beam quality also obtain the attention of research worker as the important indicator evaluating laser brightness.Although the measuring method of beam quality is a lot, but all it is dependent on measuring laser facula size along certain on Laser Transmission direction or many places after all and calculates and get.
After laser instrument output beam of laser, transmission characteristic determines it and can not directly be applied.It is typically necessary and laser could be applied in target with the transmission parameter needed by a series of optical transforms.The flow process that optical conversion process therein is a whole set of design of Optical System in fact, processes, debug, use, evaluate.And spot size be this optical system indispensable design initial conditions and design considerations；And how to evaluate the design of this set optical system, result of use, it is also required to the size of light beam is weighed by laser beam after optical system in certain occasion, with amendment design value.Therefore, the measurement of spot size is all very important for laser instrument and laser applied research.
The measurement of laser facula generally there are the methods such as over, knife-edge method, CCD (Charge-coupledDevice, charge coupled cell) method.These methods all define the method for measurement in national military standard GJB5441-2005.But in actual applications, over and CCD method all also exist a lot of defect.
Over is primarily directed to circle or can predict facula measurement that general shape and optical field distribution are symmetrical.And for a lot of occasions, research worker can not the shape of look-ahead hot spot, and hot spot there is also the situation that intensity everywhere is inconsistent.Therefore its test result can not be very accurate, is limited by very large on using.
CCD method mainly by charge-coupled image sensor to the photon of response wave length can carry out opto-electronic conversion, with reading circuit, electric charge is read, and by computers the concrete property of hot spot being shown after software processes.One of universal means measuring spot size becoming Recent study personnel employing due to its operation objective interface.But there is also a lot of shortcoming: first, CCD has certain respective wavelength as electrooptical device, can not carry out imaging, test for the laser outside respective wavelength, it is possible to need to be equipped with multiple ccd detector；And a set of beam quality based on CCD to test system price expensive, a lot of research units have no ability to be equipped with.Secondly, light spot image is by software processes.Relevant test software design patterns parameter is a lot, it is complex to operate, it is necessary to operator have certain Professional knowledge and through corresponding training；Owing to a certain parameter that arranges arranges and incorrect causes that the probability of test crash is bigger in practical operation.
And knife-edge method has a very strong light spot shape adaptive capacity due to it, and simply have employed light power meter in test, and be not as big with the wavelength degree of association of concrete laser instrument, cost is also very low.Therefore in spot size test-purpose, possess the potentiality of popularization.But knife-edge method also has obvious shortcoming, it is simply that light path adjusts complex and causes that measuring accuracy is inadequate.It would therefore be desirable to have a set of special device simplifies light path adjustment, improve measuring accuracy.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of method and apparatus measuring spot size, for the adjustment of light path during simplification facula measurement, improves measuring accuracy.
The technical solution used in the present invention is, the device of described measurement spot size, testing laser bundle is sent by testing laser device, this device includes: guide rail, guide rail adjusting bracket, blade, blade adjust frame, two light hole supports and laser power meter, testing laser device and laser power meter lay respectively at the outside of two light hole supports, wherein
Guide rail be respectively arranged at the two ends with a light hole support, the line between light hole corresponding on two light hole supports is parallel with the axis of guide rail；
Blade adjusts frame and is fixed on guide rail between two light hole supports, blade adjusts and is provided with blade on frame, blade adjusts frame, and at blade, the edge of a knife shift position on blade is planar adjusted by institute, so that the edge of a knife is to passing the testing laser Shu Jinhang of corresponding light hole blocking in various degree；
Guide rail adjusting bracket is pointed to guide rail thereon and carries out position adjustments, and blade place plane is vertical with the axis of guide rail.
Further, being shaped as shelving or carve type of the edge of a knife on described blade.
Further, one end of described guide rail is mounted and fixed on the fixing end of guide rail adjusting bracket, and the other end is arranged on the adjustable side of guide rail adjusting bracket, and by the lateral adjustments screw of described adjustable side and vertical adjustment screw, orientation and pitching to guide rail is adjusted respectively.
Further, the length of described guide rail adjusting bracket is at least 1/2nd of the length of described guide rail.
Further, if the hot spot maximum gauge of laser beam to be measured is D, the light hole diameter on described light hole support is within the scope of D ± 40%D, and thickness is be more than or equal to D/3.
Further, described blade adjust frame by horizontal micrometer caliper thereon and vertical micrometer caliper respectively to the edge of a knife blade transverse direction planar and vertically movable position be adjusted.
The present invention also provides for a kind of method adopting described measurement device spot size, including:
Step one, the light hole on the light hole support of the laser beam that testing laser device is sent traverse guide rail one end；
Step 2, is adjusted the position of guide rail by guide rail adjusting bracket, so that laser beam can incide described laser power meter through corresponding light hole on guide rail other end light hole support, the record number of degrees now are P；
Step 3, the edge of a knife shift position on blade is planar adjusted by institute at blade to adjust frame by blade, so that the laser beam through corresponding light hole is blocked by the edge of a knife, the number of degrees of change laser power meter；
Step 4, based on laser power meter the number of degrees fromChange toTime corresponding edge of a knife displacement, it is determined that the size of described laser beam spot.
Further, in described step 4, when carrying out laser beam laterally blocking, the number of degrees recorded when described laser power meter areTime, the reading X1 of record horizontal micrometer caliper now, the number of degrees recorded when described laser power meter areTime, the reading X2 of record horizontal micrometer caliper now, then the trans D of described laser beam spot is 2 | X1-X2 |.
Further, in described step 4, when laser beam is vertically blocked, the number of degrees recorded when described laser power meter areTime, the reading X3 of record vertical micrometer caliper now, the number of degrees recorded when described laser power meter areTime, the reading X4 of record vertical micrometer caliper now, then the vertical diameter of described laser beam spot is 2 | X3-X4 |.
Adopting technique scheme, the present invention at least has the advantage that
The method and apparatus of measurement spot size of the present invention, simplifies the method for testing adopting knife-edge method testing laser speckle size, improves concordance during the method test；The weakness that can effectively overcome over that laser output wavelength and operator's know-how are required by light spot shape, CCD method, has stronger versatility；And this device relate to very low cost, be beneficial to popularization.
Accompanying drawing explanation
Fig. 1 is the axonometric chart of the device measuring spot size of first embodiment of the invention；
Fig. 2 is the front view of the device measuring spot size of first embodiment of the invention；
Fig. 3 is the top view of the device measuring spot size of first embodiment of the invention；
Fig. 4 is the method flow diagram measuring spot size of second embodiment of the invention；
Fig. 5 is the test philosophy figure of second embodiment of the invention；
Fig. 6 is the schematic diagram of the device measuring spot size of application example of the present invention；
Fig. 7 is the optical path adjusting schematic diagram of application example of the present invention.
Detailed description of the invention
For further setting forth that the present invention reaches technological means and effect that predetermined purpose is taked, below in conjunction with accompanying drawing and preferred embodiment, the present invention is described in detail as after.
First embodiment of the invention, a kind of device measuring spot size, testing laser bundle is sent by testing laser device, as shown in Figures 1 to 3, this device includes: guide rail 1, guide rail adjusting bracket 2, blade 3, blade adjust frame the 4, first light hole support the 5, second light hole support 6 and laser power meter 7, testing laser device and laser power meter 7 lay respectively at the outside of two light hole supports, wherein
Guide rail 1 be respectively arranged at two ends with the first light hole support 5 and the second light hole support 6, the line between light hole corresponding on the two light hole support is parallel with the axis of guide rail 1；As it is shown in figure 1, be equipped with 5 light holes on the first light hole support 5 and the second light hole support 6, the size of corresponding each two light hole is identical, but the size of 5 light holes on each light hole support can be different.
Blade adjusts frame 4 and is fixed between the first light hole support 5 and the second light hole support 6 on guide rail 1, blade adjusts and is provided with blade 4 on frame 4, blade adjusts frame 4, and at blade 3, the edge of a knife shift position on blade 3 is planar adjusted by institute, so that the edge of a knife is to passing the testing laser Shu Jinhang of corresponding light hole blocking in various degree；
Guide rail adjusting bracket 2 is pointed to guide rail 1 thereon and carries out position adjustments, and blade 3 place plane is vertical with the axis of guide rail 1.
Concrete, the edge of a knife on blade 3 be shaped as shelving, as it is shown on figure 3, or can also for carving type.
One end of guide rail 1 is mounted and fixed on the fixing end 40 of guide rail adjusting bracket 2, and the other end is arranged on the adjustable side 41 of guide rail adjusting bracket 2, and by the lateral adjustments screw 410 of adjustable side 41 and vertical adjustment screw 411, orientation and pitching to guide rail 1 is adjusted respectively.
The length of guide rail adjusting bracket 2 is at least 1/2nd of the length of guide rail 1, generally closer to the second light hole support 5.
If the hot spot maximum gauge of the laser beam that laser instrument to be measured sends is D, the light hole diameter on two light hole supports can be arranged within the scope of D ± 40%D, and the thickness of light hole can be more than or equal to D/3.
Blade adjust frame 4 by horizontal micrometer caliper 420 thereon and vertical micrometer caliper 421 respectively to the edge of a knife blade transverse direction planar and vertically movable position be adjusted.
Second embodiment of the invention, a kind of adopts the method for measurement device spot size described in first embodiment, and as shown in Figure 4, the method includes step in detail below:
Step S101, the light hole on the light hole support of the laser beam that testing laser device is sent traverse guide rail one end；
Step S102, is adjusted the position of guide rail by guide rail adjusting bracket, so that laser beam can incide described laser power meter through corresponding light hole on guide rail other end light hole support, the record number of degrees now are P；
Step S103, the edge of a knife shift position on blade is planar adjusted by institute at blade to adjust frame by blade, so that the laser beam through corresponding light hole is blocked by the edge of a knife, the number of degrees of change laser power meter；The test philosophy figure of the present invention is as shown in Figure 5.
Step S104, based on laser power meter the number of degrees fromChange toTime corresponding edge of a knife displacement, it is determined that the size of described laser beam spot.Constant e=2.718281828459.
Concrete, in described step S104, when carrying out laser beam laterally blocking, the number of degrees recorded when described laser power meter areTime, the reading X1 of record horizontal micrometer caliper now, the number of degrees recorded when described laser power meter areTime, the reading X2 of record horizontal micrometer caliper now, then the trans D of described laser beam spot is 2 | X1-X2 |.
In described step S104, when laser beam is vertically blocked, the number of degrees recorded when described laser power meter areTime, the reading X3 of record vertical micrometer caliper now, the number of degrees recorded when described laser power meter areTime, the reading X4 of record vertical micrometer caliper now, then the vertical diameter of described laser beam spot is 2 | X3-X4 |.
On the basis of above-described embodiment, introduce the application example of a present invention.
The test device of this application example is as shown in Figure 6, according to the mode of first embodiment, the test device of this application example is arranged on reliable and stable optical table or other installed surfaces, and ensure that the height of the first aperture 10 on the first light hole support and the second orifice 20 on the second light hole support and testing laser facular height are basically identical.What the first aperture 10 herein and second orifice 20 referred to is exactly for corresponding two light hole through testing laser bundle on two light hole supports.For the maximum gauge of testing laser bundle for 5mm, the diameter of the first aperture 10 and second orifice 20 is about 5mm, and thickness is about 1mm.
Details are as follows for the process of the described measurement device spot size of use this application example:
S1: open testing laser device so that it is normal operation.The first aperture 10 on first light hole support is directed at the light beam that laser instrument is launched, enables the hot spot of laser beam to pass the first aperture 10.In real process, the height that can suitably adjust first that side of aperture 10 adjusts screw.
S2: by adjusting the orientation of that side of second orifice 20 on the second light hole support, facing upward the adjustment screw bowed so that second orifice 20 can be passed through by the laser beam of the first aperture 10.Now it is believed that the axis of guide rail is total to vertical and parallel with the axis of testing laser bundle.The light path of application example of the present invention adjusts principle schematic as shown in Figure 7.
S3: in the outside of second orifice 20, places laser power meter according to the actual height of laser beam spot.
S4: remove the first light hole support and the second light hole support.
S5: keep the normal operation of testing laser device, record the number of degrees P of now laser power meter.
S6: lay the blade equipped with blade on guide rail and adjust frame.
S7: keep testing laser bundle hot spot all through guide rail, and can to incide on laser power meter.The horizontal micrometer caliper on frame is adjusted so that the edge of a knife of blade can from laterally blocking laser facula now by regulating blade.The edge of a knife is slowly pushed into hot spot, starts the test of X-direction spot size.
S8: when the number of degrees that laser power meter shows are P 86%, stops the mobile edge of a knife, records the number of degrees X2 of now micrometer caliper；Then move on the edge of a knife so that the number of degrees that energy meter records are 14% during P, the reading X3 of record now horizontal micrometer head.
S9: pass through formula: dx=2 │ X2-X3 │ can calculate the spot size (diameter) obtaining this hot spot in X-direction.
S10: the edge of a knife is removed hot spot, and adjusts the vertical micrometer caliper on frame by regulating blade so that the edge of a knife can block laser facula from short transverse.The edge of a knife is slowly pushed into hot spot, starts the test of Y-direction spot size.
S11: when the number of degrees that laser power meter shows are P 86%, stops the mobile edge of a knife, records the number of degrees Y2 of now micrometer caliper；Then move on the edge of a knife so that the number of degrees that energy meter records are 14% during P, the reading Y3 of record now horizontal micrometer head.
S12: pass through formula: dy=2 │ Y2-Y3 │ can calculate the spot size obtaining this hot spot in the Y direction.
S13: complete test process.
The method measuring spot size described in the embodiment of the present invention, simplify the operating procedure of knife-edge method testing laser spot size, improve measuring accuracy and repdocutbility, the device of spot size is measured described in the embodiment of the present invention, can testing laser spot size simple, reliable, and the restriction of not Stimulated Light output wavelength and light spot shape, there is stronger versatility, and this device relate to very low cost, be beneficial to popularization.
By the explanation of detailed description of the invention, it should can be reach technological means that predetermined purpose takes and effect is able to more deeply and concrete understanding to the present invention, however appended diagram be only to provide with reference to and purposes of discussion, be not used for the present invention is any limitation as.
Claims (10)
1. the device measuring spot size, testing laser bundle is sent by testing laser device, it is characterized in that, described device includes: guide rail, guide rail adjusting bracket, blade, blade adjust frame, two light hole supports and laser power meter, testing laser device and laser power meter lay respectively at the outside of two light hole supports, wherein
Guide rail be respectively arranged at the two ends with a light hole support, the line between light hole corresponding on two light hole supports is parallel with the axis of guide rail；
Blade adjusts frame and is fixed on guide rail between two light hole supports, blade adjusts and is provided with blade on frame, blade adjusts frame, and at blade, the edge of a knife shift position on blade is planar adjusted by institute, so that the edge of a knife is to passing the testing laser Shu Jinhang of corresponding light hole blocking in various degree；
Guide rail adjusting bracket is pointed to guide rail thereon and carries out position adjustments, so that laser beam can incide described laser power meter through corresponding light hole on guide rail other end light hole support；Blade place plane is vertical with the axis of guide rail.
2. the device of measurement spot size according to claim 1, it is characterised in that being shaped as shelving or carve type of the edge of a knife on described blade.
3. the device of measurement spot size according to claim 1, it is characterized in that, one end of described guide rail is mounted and fixed on the fixing end of guide rail adjusting bracket, the other end is arranged on the adjustable side of guide rail adjusting bracket, and by the lateral adjustments screw of described adjustable side and vertical adjustment screw, orientation and pitching to guide rail is adjusted respectively.
4. the device of measurement spot size according to claim 1, it is characterised in that the length of described guide rail adjusting bracket is at least 1/2nd of the length of described guide rail.
5. the device of measurement spot size according to claim 1, it is characterised in that setting the hot spot maximum gauge of laser beam to be measured as D, the light hole diameter on described light hole support is within the scope of D ± 40%D, and thickness is be more than or equal to D/3.
6. the device measuring spot size according to any one of Claims 1 to 5, it is characterized in that, described blade adjust frame by horizontal micrometer caliper thereon and vertical micrometer caliper respectively to the edge of a knife blade transverse direction planar and vertically movable position be adjusted.
7. one kind adopts the method for measurement device spot size as according to any one of claim 1～6, it is characterised in that including:
Step one, the light hole on the light hole support of the laser beam that testing laser device is sent traverse guide rail one end；
Step 2, is adjusted the position of guide rail by guide rail adjusting bracket, so that laser beam can incide described laser power meter through corresponding light hole on guide rail other end light hole support, the record number of degrees now are P；
Step 3, the edge of a knife shift position on blade is planar adjusted by institute at blade to adjust frame by blade, so that the laser beam through corresponding light hole is blocked by the edge of a knife, the number of degrees of change laser power meter；
Step 4, based on laser power meter the number of degrees fromChange toTime corresponding edge of a knife displacement, it is determined that the size of described laser beam spot.
8. the method for measurement spot size according to claim 7, it is characterized in that, in described step 3, described blade adjust frame by horizontal micrometer caliper thereon and vertical micrometer caliper respectively to the edge of a knife blade transverse direction planar and vertically movable position be adjusted.
9. the method for measurement spot size according to claim 7, it is characterised in that in described step 4, when carrying out laser beam laterally blocking, the number of degrees recorded when described laser power meter areTime, the reading X1 of record horizontal micrometer caliper now, the number of degrees recorded when described laser power meter areTime, the reading X2 of record horizontal micrometer caliper now, then the trans D of described laser beam spot is 2 | X1-X2 |.
10. the method for measurement spot size according to claim 7, it is characterised in that in described step 4, when laser beam is vertically blocked, the number of degrees recorded when described laser power meter areTime, the reading X3 of record vertical micrometer caliper now, the number of degrees recorded when described laser power meter areTime, the reading X4 of record vertical micrometer caliper now, then the vertical diameter of described laser beam spot is 2 | X3-X4 |.
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| CN201310340491.XA CN103411534B (en) | 2013-08-07 | 2013-08-07 | A kind of method and apparatus measuring spot size |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107014315A (en) * | 2017-04-14 | 2017-08-04 | 西安工业大学 | The detection method and its device of knife-edge method measuring beam collimation |
| CN108362480B (en) * | 2018-05-21 | 2024-01-19 | 吉林省永利激光科技有限公司 | Automatic testing device for laser output mode |
| CN109186757A (en) * | 2018-07-23 | 2019-01-11 | 江苏天元激光科技有限公司 | A kind of semiconductor laser beam quality test device and its test method |
| CN110186641B (en) * | 2019-05-15 | 2024-05-10 | 中国空气动力研究与发展中心超高速空气动力研究所 | Knife edge monitoring control system and method convenient for schlieren system light path debugging |
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