CN103403529B - Optical gas analyser device having means for calibrating the frequency spectrum - Google Patents
Optical gas analyser device having means for calibrating the frequency spectrum Download PDFInfo
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- CN103403529B CN103403529B CN201180065929.7A CN201180065929A CN103403529B CN 103403529 B CN103403529 B CN 103403529B CN 201180065929 A CN201180065929 A CN 201180065929A CN 103403529 B CN103403529 B CN 103403529B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 31
- 238000001228 spectrum Methods 0.000 title claims abstract description 23
- 238000010521 absorption reaction Methods 0.000 claims abstract description 16
- 230000005855 radiation Effects 0.000 claims abstract description 14
- 229920006254 polymer film Polymers 0.000 claims abstract description 9
- 230000003595 spectral effect Effects 0.000 claims abstract description 7
- 238000004458 analytical method Methods 0.000 claims abstract description 6
- 238000012360 testing method Methods 0.000 claims description 53
- 238000005259 measurement Methods 0.000 claims description 26
- 238000009434 installation Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- 238000011156 evaluation Methods 0.000 claims description 7
- -1 polyethylene terephthalate Polymers 0.000 claims description 6
- 238000012937 correction Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000004952 Polyamide Substances 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 4
- 229920002367 Polyisobutene Polymers 0.000 claims description 4
- 239000004743 Polypropylene Substances 0.000 claims description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 4
- 238000001745 non-dispersive infrared spectroscopy Methods 0.000 claims description 4
- 229920002647 polyamide Polymers 0.000 claims description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 4
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 229920001155 polypropylene Polymers 0.000 claims description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 4
- 229920002620 polyvinyl fluoride Polymers 0.000 claims description 4
- 230000002238 attenuated effect Effects 0.000 claims description 3
- 238000004868 gas analysis Methods 0.000 claims description 3
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 claims description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 claims description 2
- 239000002174 Styrene-butadiene Substances 0.000 claims description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims description 2
- MTAZNLWOLGHBHU-UHFFFAOYSA-N butadiene-styrene rubber Chemical compound C=CC=C.C=CC1=CC=CC=C1 MTAZNLWOLGHBHU-UHFFFAOYSA-N 0.000 claims description 2
- HGAZMNJKRQFZKS-UHFFFAOYSA-N chloroethene;ethenyl acetate Chemical compound ClC=C.CC(=O)OC=C HGAZMNJKRQFZKS-UHFFFAOYSA-N 0.000 claims description 2
- 229920000058 polyacrylate Polymers 0.000 claims description 2
- 239000004417 polycarbonate Substances 0.000 claims description 2
- 229920000515 polycarbonate Polymers 0.000 claims description 2
- 229920001195 polyisoprene Polymers 0.000 claims description 2
- 229920001296 polysiloxane Polymers 0.000 claims description 2
- 229920002689 polyvinyl acetate Polymers 0.000 claims description 2
- 239000011118 polyvinyl acetate Substances 0.000 claims description 2
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 2
- 239000004800 polyvinyl chloride Substances 0.000 claims description 2
- 239000011115 styrene butadiene Substances 0.000 claims description 2
- 229920003048 styrene butadiene rubber Polymers 0.000 claims description 2
- 230000009102 absorption Effects 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 74
- 239000010408 film Substances 0.000 description 14
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 10
- 238000007689 inspection Methods 0.000 description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 5
- 239000001569 carbon dioxide Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 238000000862 absorption spectrum Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000001157 Fourier transform infrared spectrum Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000008246 gaseous mixture Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 238000004847 absorption spectroscopy Methods 0.000 description 1
- 239000002671 adjuvant Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 239000010436 fluorite Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005325 percolation Methods 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0006—Calibrating gas analysers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
- G01N21/276—Calibration, base line adjustment, drift correction with alternation of sample and standard in optical path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
- G01N21/278—Constitution of standards
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N21/61—Non-dispersive gas analysers
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
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Abstract
The invention relates to an optical gas analyser device, comprising at least one measuring chamber (2) in the form of a tubular measuring cuvette (3) through which measuring gas flows. The measuring chamber is illuminated longitudinally by a radiation source (1) that is arranged at the input end thereof and the light beam of which weakened by absorption losses is detected for gas concentration analysis by at least one detector (7) arranged at the output end. Means are provided for calibrating the measuring process by means of a reference spectrum and for that purpose at least a thin polymer film (10) can be inserted into the measuring process in place of the measuring cuvette (3). The thin polymer film generates a plurality of strong absorptions across the entire wavelength range of the measuring spectrum in order to cause attenuations (A1 ... An) that in the particular spectral position correspond to those of the gaseous measuring medium in greater concentration.
Description
Technical field
The present invention relates to a kind of optical gas analytical equipment, comprise that at least one forms in tubular measurement test tube by the measuring chamber of tested gas through-flow, at radiation source this measuring chamber of transmission along the longitudinal that entrance side is arranged, at least one detects the light beam be attenuated by absorption loss of this radiation source at the detector for gas concentration analysis that outlet side is arranged, wherein, be provided with for the calibrating installation by reference spectrum calibration measurement path.
Background technology
Range of application of the present invention extends in following commercial Application, wherein, determine the concentration of a kind of gas in gaseous mixture.Here, the absorption by electromagnetic radiation carrys out tested gas concentration.Here interested optical gas analytical equipment preferably carries out work according to the principle of the ultraviolet resonance-absorption-spectroscopy for analysis of nitrogen oxide, but also can apply in the preferred spectral range of 200 to 600 nanometers according to the measuring principle of the non-diffusing UVA measured for sulphuric dioxide or nitrogen dioxide gas concentration.In addition also it is contemplated that, the present invention is applied to infrared photometer, and its measuring principle according to the infrared ray absorbing of non-diffusing is at the ripple operated within range of 2.5 to 8 microns.
Radiation absorption is the yardstick as the concentration realizing measured medium to be measured or its composition absorbed at this.For this reason, measured medium flows through measuring chamber according to length, and wherein, the side of the measuring chamber formed in most of cylindrical shape is provided with the window of the Measure Channel of the mensuration luminosity for light beam.
In order to regulate zero point and the sensitivity of optical gas analytical equipment exactly, usually use so-called zero gas or the inspection gas of concentration known, this gas is through-flow measuring chamber between alignment epoch.Thus, measured value appears in detector cells, this measured value is consistent in order to calibrate the ratings be placed in expecting.Can implement accurate as far as possible adjustment of sensitivity by this method, this adjustment of sensitivity eliminates the drift such as caused due to transmissison characteristic.Only in this way could ensure the reliability of measurement result chronically.In simple exercisable gas componant, as under carbon monoxide or carbon dioxide situation, this disposal route can be implemented simply, usually more difficulty for other gases as oxides of nitrogen, hydrochloric acid, water vapor calibration gas analytical equipment.
On the other hand, the general advantage of optical gas analytical equipment is, can measure multiple gases composition simultaneously.This instrument is particularly also applicable to Emission measurement thus.Usually the check of gas analyzing apparatus is carried out termly.In fact undertaken by two steps in the check of this calibration data.Use zero gas such as surrounding air record reference spectra every day termly with short interval, great majority.By the change of the transmissison characteristic of this reference spectra compensating measure system.The change case of transmissison characteristic is as by the change of radiation source or detector or caused by the pollution of measuring chamber.The compensation at zero point is carried out according to wavelength, thus simultaneously for all composition correction zero points.
Usually wanting in another step of every thoughtful annual enforcement, termly by the check of inspection gas and the reference point of also calibrating all the components if desired.Simple exercisable gas can be calibrated with inspection gas without the need to additional adjuvant in inspection gas bottle.Replace inspection gas bottle, service test gas generator under unworkable gas station, this inspection gas generator structure expends and is difficult to run in some using areas of gas analyzing apparatus very much.
By the known a kind of optical gas analytical equipment of DE3522949A1, carry out the calibration of this gas analyzing apparatus by inspection gas.Consist essentially of for ultrared radiation source according to the gas analyzing apparatus of NDIR method work, it through surround measuring chamber measurement test tube side window and through the window of another side enter arrange abreast relatively use test tube.Measure test tube by tested gas percolation, be provided with inlet and outlet adapter for this reason thereon.Measure test tube spatially to separate with test tube with comparing, make gas analyzing apparatus have two light paths.Enter the light beam and entering measuring test tube to compare to be taken turns by the interruption rotated with the light beam of test tube and anti-phase modulate.Measuring beam by the window arranged at outlet side leave measure test tube and compare light beam by arrange with being adjacent another outlet side arrange window leave.Measuring beam and compare light beam and received by the detector of photometric measurement.The front side of detector is by saturating ultrared closed windows.
Even if because gas analyzing apparatus also must provide reliable measured value after a longer time, need to carry out calibrating adjusting again in meaning.This is undertaken by means for correcting, and this means for correcting has guide rail structure, and this guide rail structure receives two to demarcation test tube.Demarcate test tube a pair and fill up inert gas completely, at another, to demarcating a demarcation test tube filling inert gas in test tube, this fills tested composition to another demarcation test tube in standard test tube.If will analyze carbon dioxide by gas analyzing apparatus, then carbon dioxide loaded by this demarcation test tube.Described guide rail structure can to-and-fro movement.In terminal location, two demarcation test tubes of filling inert gas are in Measure Channel.At this position alignment zero point.When guide rail structure is in another terminal location, another is in Measure Channel different measurement test tubes.Whereby can the end points of correcting measuring device or sensitivity.This solution for calibration measurement path be particularly applicable to cleaned without carbon dioxide with the inspection gas of anhydrous steam.But this technological means for calibration measurement path, particularly different measurement test tubes have been seen and have been expended very much.
By the known another kind of gas analyzing apparatus of DE102007065345B3, it is according to FTIR spectrum work.From radiation source, produce parallel beam by the first optical system by expanding, this beam is mapped on the semi-transparent mirror as beam splitter.Have fixed wave length and frequency location-that is the part of monochromatic and relevant-light to be mapped to now on the fixing mirror in position and to be reflected there.Another divided beams is reflected towards semi-transparent mirror direction by movable mirror backward by semi-transparent mirror point-blank, and here present two divided beams interfere with each other.Controllably coherence can be checked here via along optical axis adjustment mirror backward.Set out therefrom, the light of interference, through measuring test tube, is guided through tested gas.Realize the effective frequency position of very accurately tuning light beam by interferometer, this light beam is encountered and is measured test tube and tested gas thus.Like this can the spectrum of detection of complex on the detector, and be not only the absorptivity under fixed frequency.In order to optical illumination detector, again focus on the light beam be divided via the second optical system, and be focus in the size of detector.
In order to calibration measurement system, calibration gas can be guided to pass through to measure test tube, again to import tested gas by Valve controlling after calibration steps.Alternatively advising, by calibration test tube face restriction calibration gas before the detectors in Measure Channel selectively, and is limit so long, until calibration or checking continue.After this, calibration test tube is made again to deflect out from light path.The calibration test tube alternative gas or alternative gaseous mixture representing tested gaseous spectrum is filled.Like this, spectral range uses sulphuric dioxide, carbon dioxide etc. representatively thing, replace unworkable gas componant hydrochloric acid, water vapor etc.
The checking of the reference point of gas analyzing apparatus or calibration particularly can only be implemented by high technology and time cost when it relates to described unworkable gas.Because additional technical equipment usually must be installed, as checked gas generator and the regulating time of unworkable demand length.The calibration of reference point or checking are therefore only to implement by trained expert.Therefore reference point only with the check of long interval, does not that is have the checking of reference point for longer measurement interval.This causes the raising risk to the error analysis recording gas concentration.
The inspection generator expended when being difficult to operating gas can be abandoned in this way, but need to provide the calibration test tube filling up alternative gas.
High quality requirements is proposed for its manufacture process, to ensure accurate calibration.In addition to note gas to each other and with calibration tube material chemical compatibility.In addition formed and carry out the necessity of filling, so that the product reaching concentration and absorption path-length equals the product in the long path unit of FTIR spectrum meter with very high partial pressure.
Summary of the invention
Therefore the object of the invention is to, realize a kind of optical gas analytical equipment, its Measure Channel calibrating installation structure is simple and allow accurate correction.
This object is reached by a kind of optical gas analytical equipment, it comprises, and at least one forms in tubular measurement test tube, by the measuring chamber of tested gas through-flow, at radiation source this measuring chamber of transmission along the longitudinal that entrance side is arranged, at least one detects the light beam be attenuated by absorption loss of this radiation source at the detector for gas concentration analysis that outlet side is arranged, wherein, be provided with for the calibrating installation by reference spectrum calibration measurement path, as calibrating installation, at least one thin polymer film can replace measuring test tube and be set in Measure Channel, described thin polymer film produces the multiple strong absorption in the whole wavelength coverage of measure spectrum, to cause multiple decay, described decay corresponds to the decay of the gaseous state measured medium of enough concentration in corresponding spectrum position.
The present invention comprises such technology instruction, as the calibrating installation for calibration measurement path, light filter can be set in Measure Channel and replace measuring test tube, the filter of this light filter produces the multiple strong absorption in the whole wavelength coverage of measure spectrum, to cause multiple decay, these decay correspond to the decay of the gaseous state measured medium of large concentration in corresponding spectrum position.
The advantage of solution of the present invention is particularly, can abandon calibration test tube or the also more expensive inspection gas generator for calibrating completely.Calibration or checking are not carry out by means of the comparison gas always produced, but form by means of solid and light filter, are namely configured to a kind of disc of partially transparent.
By a kind of preferred implementing form suggestion of the present invention, the special light filter with the absorption spectrum of compound is made up of plasticon.This film can obtain with different thickness and diameter as commodity in enormous quantities.Preferably, the thickness of spendable plasticon in the scope of 10 microns to 100 microns, be more preferably 50 microns.In infra-red spectrum, this film has many outstanding absorption bands, and it is associated with the absorption of nitrogen dioxide, hydrochloric acid, water vapor etc. consumingly.These gas molecules can not be stored in calibration test tube mostly long-term and stably just.Be swinging in optical path by plasticon thus and realize simply and reliably verifying possibility to measuring system.
In order to be applied in other wavelength or be applied to other gas componant, the filter should applied in light filter is made up of thin polymer film, it is preferably selected from a material group, this material group comprises: polyethylene terephthalate (PET), polyvinyl fluoride (PVF), polypropylene (PP), tygon (PE), polyimide (PI), polyisobutylene (PIB), bisphenol-A (BPA), chloropropylene oxide, polyacrylate, polyamide (PA), polycarbonate, polychlorobutadiene, polyisoprene, polyvinyl acetate, polyvinyl alcohol (PVA), Polyvinylchloride, silicone and styrene-butadiene.
Also the optical interference filtrator of special exploitation can be considered in principle, to realize the light filter for alignment purpose with strong absorption in measure spectrum wavelength coverage.
Advise according to improvement measure of the present invention, film is fixed in substrate.This film can be made thus to stablize relative to the position of Measure Channel and orientation.Such as fluorite can be considered as substrate.Also it is contemplated that, multiple film is in turn arranged in one of thin-film carrier common substrate and is sent in Measure Channel, to produce total spectrum of each single film of this formation light filter simultaneously.
Such light filter can comprise multiple film one after another, and these films have different spectral transmission linearity curves.By this combination, the absorption spectrum of compound can be produced in a simple manner.Also it is contemplated that, the correction test tube of the light filter be made up of multiple film with the traditional type being filled with gas is combined.This alternatives is particularly considered when following: the characteristic absorption band that can not consist of measure spectrum film.
Advise according to improvement another measure of the present invention, what the side being used in Measure Channel was arranged swings in device, measures test tube for alternatively swinging in light filter to replace.Can accurately and successfully implement to measure test tube to the replacing of light filter by this device that swings in.In the simplest situations, swing in device and be made up of the receiving cylinder supported rotationally, this receiving cylinder measures test tube at a side bearing light filter with in opposite side supporting.Swing in itself can manually or flexibly carry out.Finally, should have for light filter or the sensor device measuring test tube location.
Suggested measures of the present invention is improved according to another, gas analyzing apparatus comprises electronic evaluation unit, this electronic evaluation unit swinging in light filter to Measure Channel the analytical algorithm replacing measuring and to implement after test tube for calibration measurement system, to replace the Measurement Algorithm for calculating gas concentration.This analytical algorithm and Measurement Algorithm can be run in the analytic unit in the form of software at Microprocessor S3C44B0X at this.Because this analytical algorithm is different from original Measurement Algorithm, changed by simple algorithm, form the possibility of carrying out measuring system high-precision calibration at short notice.
Be suitable for carrying out gas analysis based on FTIR, NDUV or NDIR spectroscopy and universally can being applied to gas analysis thus by optical gas analytical equipment of the present invention.
Accompanying drawing explanation
Describe other in detail by accompanying drawing together with description of the preferred embodiment of the present invention below and improve measure of the present invention.In accompanying drawing:
Fig. 1 has the schematic diagram of special light filter as the optical gas analytical equipment of the calibrating installation for calibration measurement light path;
Fig. 2 A is the first form of implementation of light filter;
Fig. 2 B is the second form of implementation of light filter;
Fig. 2 C is the 3rd form of implementation of light filter;
Fig. 3 is the curve view of the transmissivity of light filter in wavelength coverage.
Embodiment
According to Fig. 1, the gas analyzing apparatus being embodied as NDIR spectrometer in this embodiment comprises the radiation source 1 of ultrared optics, and this infrared ray is by length transmission measurement room 2, and this measuring chamber is formed by measuring test tube 3.This measurement test tube 3 has the entrance 4 of the tested gas for flowing into and the outlet 5 of tested gas for flowing out.
Enter the infrared light beam measured in test tube 3 and be guided through the prefilter 6 being arranged on radiation source 1 and measuring between test tube 3.In the inside of measuring chamber 2, light beam stands decay by absorption loss, and this decay is detected by the optical detector 7 arranged at the outlet side measuring test tube 3.Detector 7 provides the electric signal corresponding with measured value, and this electric signal is supplied to electronic evaluation unit 8 at entrance side and uses.This electronic evaluation unit 8 is analyzed measuring-signal by the Measurement Algorithm of the enforcement for calculating gas concentration.The gas concentration value of such mensuration can export by traditional mode.
Optical gas analytical equipment also comprises and swings in device 9, and this swings in device and forms according to the type of skateboard and alternatively swing in light filter 10 and be used for replacing measuring test tube 3.This swings in device 9 for this purpose in the present embodiment can manual manipulation, described is measuring the conversion between test tube 3 and light filter 10 to cause.
According to Fig. 2 A, light filter 10 comprises the light filter 10 be made up of unique plasticon 11, and its thickness is 50 microns.In order to the Measure Channel be relatively illustrated by the broken lines stablizes plasticon 11, be provided with infrared ray can completely through substrate 12, fix plasticon 11 on this substrate.In addition, light filter 10 is surrounded by metal retaining ring 13, and this retaining ring is set up and the mechanical connection swinging in device 9 not shown further.
According to the embodiment illustrated in fig. 2b, light filter 10 ' comprises three single thin polymer film 14a to 14c one after another altogether, these films are same here to be fixed by substrate 12 and is had different spectral transmission linearity curves, and the combination of these curves corresponds to desired measure spectrum.
According to Fig. 2 C, comprise the light filter 10 of unique film 15, preferably plasticon " combine with traditional correction test tube 16 being filled with gas, to cover the special measure spectrum being used for alignment purpose.
Thickness shown in Figure 3 be the plasticon of 50 microns as the absorption spectrum of light filter, its cover 600 to 4000 every centimetre between wave number.Cause multiple decay A1 to A8 by this filter, these decay correspond to the decay of the gas measured medium of enough large concentration in corresponding spectral position.
The invention is not restricted to above-mentioned preferred embodiment.But also it is contemplated that flexible program, these flexible programs are included in the protection domain of claims together.Like this it is for instance also possible that for arranging other filter for the light filter of calibration gas analytical equipment, as long as desired measure spectrum can be covered whereby.
Reference numerals list
1 radiation source
2 measuring chambers
3 measure test tube
4 entrances
5 outlets
6 prefilters
7 detectors
8 electronic evaluation unit
9 swing in device
10 light filters
11 plasticons
12 substrates
13 retaining rings
14 films one after another
15 single films
16 correct test tube
A
nn-th decay
Claims (11)
1. optical gas analytical equipment, it comprises, and at least one forms in the tubular measurement test tube (3), by the measuring chamber (2) of tested gas through-flow, at radiation source (1) this measuring chamber of transmission along the longitudinal that entrance side is arranged, at least one detects the light beam be attenuated by absorption loss of this radiation source at the detector (7) for gas concentration analysis that outlet side is arranged, wherein, be provided with for the calibrating installation by reference spectrum calibration measurement path, it is characterized in that, as calibrating installation, at least one thin polymer film can replace measuring test tube (3) and be set in Measure Channel, described thin polymer film produces the multiple strong absorption in the whole wavelength coverage of measure spectrum, to cause multiple decay (A
1a
n), described decay corresponds to the decay of the gaseous state measured medium of enough concentration in corresponding spectrum position.
2. according to optical gas analytical equipment according to claim 1, it is characterized in that, calibrating installation is made up of plasticon (11).
3. according to optical gas analytical equipment according to claim 2, it is characterized in that, the thickness of plasticon is in the scope of 10 microns to 100 microns.
4. according to optical gas analytical equipment according to claim 1, it is characterized in that, calibrating installation is thin polymer film, be selected from a material group, this material group comprises: polyethylene terephthalate (PET), polyvinyl fluoride (PVF), polypropylene (PP), tygon (PE), polyimide (PI), polyisobutylene (PIB), bisphenol-A (BPA), chloropropylene oxide, polyacrylate, polyamide (PA), polycarbonate, polychlorobutadiene, polyisoprene, polyvinyl acetate, polyvinyl alcohol (PVA), Polyvinylchloride, silicone and styrene-butadiene.
5. according to the optical gas analytical equipment one of Claims 1-4 Suo Shu, it is characterized in that, the calibrating installation be made up of film is fixed in substrate (12) to stablize.
6. according to the optical gas analytical equipment one of Claims 1-4 Suo Shu, it is characterized in that, calibrating installation comprises multiple single film (14a to 14c) one after another, and these films have different spectral transmission linearity curves.
7. according to the optical gas analytical equipment one of Claims 1-4 Suo Shu, it is characterized in that, calibrating installation also comprises the correction test tube (16) that at least one is filled with gas except at least one film (15).
8. according to optical gas analytical equipment according to claim 1, it is characterized in that, be provided with in the side of Measure Channel and swing in device (9), measuring test tube (3) for alternatively swinging in calibrating installation to replace.
9. according to optical gas analytical equipment according to claim 1, it is characterized in that, be provided with electronic evaluation unit (8), this electronic evaluation unit swinging in calibrating installation to Measure Channel the analytical algorithm replacing measuring test tube (3) and implements for calibration measurement system later, to replace the Measurement Algorithm for calculating gas concentration.
10. according to the optical gas analytical equipment one of Claims 1-4 and 8 to 9 Suo Shu, it is characterized in that, gas analysis is based on FTIR, NDUV or NDIR spectroscopy.
11., according to optical gas analytical equipment according to claim 3, is characterized in that, the thickness of plasticon is 50 microns.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010056137.1 | 2010-12-23 | ||
| DE102010056137.1A DE102010056137B4 (en) | 2010-12-23 | 2010-12-23 | Optical gas analyzer device with means for calibrating the frequency spectrum |
| PCT/EP2011/006483 WO2012084233A1 (en) | 2010-12-23 | 2011-12-21 | Optical gas analyser device having means for calibrating the frequency spectrum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103403529A CN103403529A (en) | 2013-11-20 |
| CN103403529B true CN103403529B (en) | 2015-07-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180065929.7A Active CN103403529B (en) | 2010-12-23 | 2011-12-21 | Optical gas analyser device having means for calibrating the frequency spectrum |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9448215B2 (en) |
| CN (1) | CN103403529B (en) |
| DE (1) | DE102010056137B4 (en) |
| WO (1) | WO2012084233A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013005997B3 (en) * | 2013-04-08 | 2014-05-15 | Abb Technology Ag | Optical gas analyzer device for use with industrial chimney of waste-incineration plant, has processing unit determining gas concentration of total carbon contained in measurement gas other than analyzing pollutant components |
| CN103969190B (en) * | 2014-05-07 | 2016-05-18 | 长春理工大学 | A kind of self-checking device of laser type pacity smokemeter |
| EP3161121A4 (en) | 2014-06-27 | 2017-12-27 | Pulse Health LLC | Fluorescence detection assembly |
| EP3237885A1 (en) * | 2014-12-23 | 2017-11-01 | Carrier Corporation | Counterfeit refrigerant analyzer |
| US9829378B1 (en) | 2016-10-13 | 2017-11-28 | Bentley Instruments, Inc. | Determining a size of cell of a transmission spectroscopy device |
| KR20220110316A (en) * | 2019-12-19 | 2022-08-05 | 에이엠에스 센서스 싱가포르 피티이. 리미티드. | Detector Wavelength Calibration |
| CN116735520A (en) * | 2023-08-11 | 2023-09-12 | 至善时代智能科技(北京)有限公司 | TVOC gas monitoring system and method |
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| CN101918814A (en) * | 2007-11-22 | 2010-12-15 | Abb股份公司 | Method for operating an FTIR spectrometer, and FTIR spectrometer |
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2010
- 2010-12-23 DE DE102010056137.1A patent/DE102010056137B4/en active Active
-
2011
- 2011-12-21 CN CN201180065929.7A patent/CN103403529B/en active Active
- 2011-12-21 WO PCT/EP2011/006483 patent/WO2012084233A1/en active Application Filing
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2013
- 2013-06-24 US US13/925,505 patent/US9448215B2/en active Active
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| US5616823A (en) * | 1995-12-21 | 1997-04-01 | Johnson & Johnson Medical, Inc. | Calibration verification device |
| CN101918814A (en) * | 2007-11-22 | 2010-12-15 | Abb股份公司 | Method for operating an FTIR spectrometer, and FTIR spectrometer |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102010056137B4 (en) | 2014-03-27 |
| DE102010056137A1 (en) | 2012-06-28 |
| US9448215B2 (en) | 2016-09-20 |
| WO2012084233A1 (en) | 2012-06-28 |
| US20130276509A1 (en) | 2013-10-24 |
| CN103403529A (en) | 2013-11-20 |
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