CN103394983A - Static pressure supporting device for ultra large diameter optical machining - Google Patents

Static pressure supporting device for ultra large diameter optical machining Download PDF

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Publication number
CN103394983A
CN103394983A CN2013103392537A CN201310339253A CN103394983A CN 103394983 A CN103394983 A CN 103394983A CN 2013103392537 A CN2013103392537 A CN 2013103392537A CN 201310339253 A CN201310339253 A CN 201310339253A CN 103394983 A CN103394983 A CN 103394983A
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cylinder body
diaphragm
static pressure
limiting structure
piston
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CN2013103392537A
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CN103394983B (en
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胡海飞
罗霄
郑立功
张学军
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

The invention provides a static pressure supporting device for ultra large diameter optical machining and belongs to the technical field of static pressure supporting. The static pressure supporting device for ultra large diameter optical machining comprises a piston, a spacer, a rolling membrane, a membrane pressing sheet, a cylinder body cover, a cylinder body radial limiting structure, a screwed plug, a stress receiving body radial limiting structure, a sealing ring and a cylinder body upper limiting structure. A horizontal central hole and a vertical central hole are formed in the side surface of the piston. The cylinder body radial limiting structure is connected with the vertical central hole of the piston. The spacer is connected with cylinder body cover through the rolling membrane. The rolling membrane is provided with the membrane pressing sheet. The piston is connected with the rolling membrane and the membrane pressing sheet through threaded holes. A counter bore, a threaded blind hole and an exhaust vent are formed in the center of the top of the cylinder body cover. The stress receiving body radial limiting structure is arranged in the counter bore of the cylinder body cover. The cylinder body upper limiting structure is connected with the spacer. The screwed plug is arranged in the threaded blind hole and used for compressing the sealing ring arranged in the threaded blind hole. The static pressure supporting device for ultra large diameter optical machining is good in self-balance performance, low in cost, and high in optical machining supporting accuracy.

Description

Static pressure supporting device for the processing of super large caliber optics
Technical field
The invention belongs to static pressure support technology field, be specifically related to a kind of static pressure supporting device for the processing of super large caliber optics.
Background technology
For saving, manufacture and the delivery cost, the camera lens of large-aperture optical remote sensor generally is designed to have the lightweight thin-wall construction of larger radius-thickness ratio, and it is connected with optical-mechanical system by several strong points, this design feature causes the bending rigidity difference of its minute surface diverse location.When bistrique was pressed in the minute surface weakness, minute surface subsided, and can't realize removing, and minute surface thicker part or camera lens supporting point position generating material are removed; Treat that bistrique withdraws, the weakness resilience forms bulge, and this is print-through.The print-through of optics processing is unavoidable, as long as but its print-through can be suppressed in certain accuracy rating and (be generally face shape RMS≤λ/50 ≈ 13nm), still it can be debug into to preferably optical system of performance.
The existing method that solves print-through has the schemes such as spring supporting, the inflation of mirror back of the body cavity, mirror body immersion type and static pressure support.Spring supporting is difficult to guarantee that all spring initial lengths are consistent with deflection, easily the mirror body is caused to constraint; Inflation method need to be for the different encapsulation scheme of different lightweight hole form designs, and the immersion liquid method needs to adopt different perimeter support to each mirror body, and this two schemes all lacks versatility, and has increased the design difficulty of machine tooling platform.By contrast, static pressure supporting construction being most widely used at super large caliber optics manufacture field.
Static pressure supports and uses a series of static pressure cylinder supporting reflex mirrors, and the support force when optics is processed in the control static pressure cylinder realizes treating the support of machine component, can connect static pressure cylinder to reduce the pressure control element in case of necessity.The static pressure supporting construction is for the process support of many heavy caliber mirror bodies, although be widely used, still there is complex structure in existing static pressure supporting construction, the movable part balance is poor, positioning performance is poor, control strategy is complicated and structure be not easy to standardization, can not mass production etc. problem.
Summary of the invention
The objective of the invention is in order to solve existing static pressure supporting device complex structure, the movable part balance is poor, positioning performance is poor, problem that can not mass production, and provides a kind of static pressure supporting device for the processing of super large caliber optics.
the invention provides a kind of static pressure supporting device for the processing of super large caliber optics, this device comprises piston, pad, rolling diaphragm, the diaphragm compressing tablet, the cylinder body lid, cylinder body is position limiting structure radially, plug, beaer is position limiting structure radially, sealing ring and cylinder body upper limit structure, described piston side surface arranges the straight centre bore of horizontal vertical, cylinder body radially position limiting structure is the boss through-hole structure, cylinder body radially position limiting structure is connected with the vertical centre hole in the straight centre bore of the horizontal vertical of piston, piston contacts with pad, and pad is connected by rolling diaphragm with the cylinder body lid, and the diaphragm compressing tablet is set on rolling diaphragm, piston is connected with the diaphragm compressing tablet with rolling diaphragm by screw, and cylinder body tops center sets gradually counterbore from top to bottom, tapped blind hole and steam vent, beaer radially position limiting structure is arranged in the counterbore of cylinder body lid and coordinates with cylinder body lid cylinder, the cylinder body upper limit structure is connected with the lower surface of pad, plug is arranged in tapped blind hole, for compressing the sealing ring that is placed in tapped blind hole, the straight centre bore of the horizontal vertical of described piston, the center of pad, cylinder body radially the counterbore of position limiting structure center De Tu hole and cylinder body lid on a concentric shafts, described piston, rolling diaphragm, the diaphragm compressing tablet, the cylinder body lid, plug and sealing ring form airtight cavity.
Preferably, on described rolling diaphragm, the diaphragm screening glass also is set.
Preferably, described diaphragm screening glass is copper sheet.
Preferably, the number of described cylinder body upper limit structure is 3.
Preferably, described rolling diaphragm is F type, FC type, D type, DC type, OB type or P type diaphragm.
Preferably, described sealing ring is the O RunddichtringO.
Operation principle of the present invention
Static pressure supporting device for the processing of super large caliber optics provided by the invention, piston side surface in this device arranges the straight centre bore of horizontal vertical, the horizontal ends of the straight centre bore of horizontal vertical is connected with conduit under fluid pressure, vertically end and cylinder body radially position limiting structure be connected, piston, diaphragm, diaphragm compressing tablet, cylinder body lid, plug and sealing ring form airtight cavity, by hydraulic tube to filling liquid in above-mentioned airtight cavity, when in airtight cavity, liquid pressure reached a certain size, the cylinder body lid upwards floated and can support optical element to be processed; After by the degree of tightness circulation of plug and sealing ring, getting rid of the bubble in airtight cavity and liquid feeding pipeline, tighten plug, Gu guarantee higher stream-coupled structure rigidity; In this device, radially position limiting structure can be in the radial position that limits cylinder body early stage of feed flow pressurization for cylinder body; Beaer radially position limiting structure can be in the radial position of the relative workpiece of the later stage of feed flow pressurization restriction cylinder body lid, the two common guarantee fixed point support accuracy, guarantees the axis direction of overall power output along the cylinder body lid; The cylinder body upper limit structure is connected with the lower surface of pad, has guaranteed the balance of this device.
Beneficial effect of the present invention
Static pressure supporting device for the processing of super large caliber optics provided by the invention, self-regulation is good, barycenter is on the axle center of revolving structure, the power output precision is controlled, and without feedback regulation, can accurately act on and specify mirror back of the body position, possess rigidity preferably, the free travel of certain limit is provided again simultaneously, has higher optics process support precision; This static pressure supporting device is convenient to mass production, and cost is low, and is easy for installation, and interchangeability is good.
The accompanying drawing explanation
Fig. 1 is the profile of the present invention for the static pressure supporting device of super large caliber optics processing.
Fig. 2 is that the present invention is for the plug of the static pressure supporting device of super large caliber optics processing and the partial enlarged drawing of sealing ring.
Fig. 3 is the overall structure schematic diagram of the present invention for the static pressure supporting device of super large caliber optics processing.
In figure, 1, piston, 2, pad, 3, rolling diaphragm, 4, the diaphragm compressing tablet, 5, the cylinder body lid, 6, cylinder body position limiting structure radially, 7, plug, 8, beaer position limiting structure radially, 9, sealing ring, 10, the diaphragm screening glass, 11, the cylinder body upper limit structure.
The specific embodiment
in conjunction with Fig. 1 to Fig. 3, present embodiment is described, a kind of static pressure supporting device for the processing of super large caliber optics, this device comprises piston 1, pad 2, rolling diaphragm 3, diaphragm compressing tablet 4, cylinder body lid 5, cylinder body is position limiting structure 6 radially, plug 7, beaer is position limiting structure 8 radially, sealing ring 9, diaphragm screening glass 10 and cylinder body upper limit structure 11, described piston 1 side surface arranges level-vertical centre bore, cylinder body radially position limiting structure 6 is the boss through-hole structure, the cylinder body radially vertical centre hole in the level of position limiting structure 6 and piston 1-vertical centre bore is connected, piston 1 contacts by central flange with pad 2, pad 2 is connected with cylinder body lid 5 thes brim of a hat by rolling diaphragm 3, diaphragm screening glass 10 also is set on the brim of a hat of rolling diaphragm 3, for rolling diaphragm 3 is carried out to the resistance to compression protection, described diaphragm screening glass is preferably copper sheet, diaphragm compressing tablet 4 is set on the crown of rolling diaphragm 3, piston 1 is connected with diaphragm compressing tablet 4 with rolling diaphragm 3 by screw, cylinder body lid 5 top center set gradually counterbore from top to bottom, tapped blind hole and steam vent, beaer radially position limiting structure 8 is arranged in the counterbore of cylinder body lid 5 and coordinates with cylinder body lid 5 cylinders, cylinder body upper limit structure 11 is connected with the lower surface of pad 2, plug 7 is arranged in tapped blind hole, for compressing the sealing ring 9 of the escape that is placed in tapped blind hole, the level of described piston 1-vertical centre bore, the center of pad 2, cylinder body radially the counterbore of position limiting structure 6 De Tu holes, center and cylinder body lid 5 on a concentric shafts, described piston 1, rolling diaphragm 3, diaphragm compressing tablet 4, cylinder body lid 5, plug 7 and sealing ring 9 form airtight cavity.
described piston 1 side surface of present embodiment arranges level-vertical centre bore, the lateral aperture of level-vertical centre bore is connected with conduit under fluid pressure, the vertical centre hole by top counterbore and cylinder body radially position limiting structure be connected, its level-vertical perforate mode is convenient to feed flow, the bottom of described piston 1 arranges flange, for whole installation, kingpin hole is set on flange, to realize the accurate location of piston, when not pressurizeing, pad 2 contacts with the central flange of piston 1, central flange has played the effect of cylinder body lower limit, can bear the weight of workpiece, guarantee the safety of workpiece.
The described rolling diaphragm 3 of present embodiment is preferably F type (shape for hat), FC type (shape for hat, pre-convolution), D type, DC type (shape for hat, O type circle flange, pre-convolution), OB type or P type diaphragm, during use, adopt the method for pre-convolution to install, during the selection of rolling diaphragm 3, to consider diaphragm self wearing character, tensile strength, tear characteristics and with the frictional resistance characteristic of piston 1, pad 2, and relevant with the class of liquids that adds in airtight cavity, the preferred natural rubber skin that adopts, inject antirust water for industrial use in airtight cavity.
The described cylinder body lid 5 of present embodiment is the inner chamber biconical surface structure, top center arranges steam vent, beaer radially position limiting structure 8 is arranged in the counterbore of cylinder body lid 5 and coordinates with cylinder body lid 5 cylinders, plug 7 is arranged in the tapped blind hole of cylinder body lid 5, between the bottom of cylinder body lid 5 center screw escapes and plug 7, sealing ring 9 is set, cylinder body covers 5 tapped blind hole can realize fastening to plug 7; When plug 7 is installed, answer press seal circle 9 to guarantee sealing, the tapped blind hole degree of depth should make plug 7 countersunk heads with guarantee beaer radially position limiting structure 8 can be absorbed in the top counterbore of cylinder body lid 5, by the degree of tightness circulation of plug 7, can be by the removal of bubbles in airtight cavity and liquid feeding pipeline.Described sealing ring is preferably the O RunddichtringO, and material is preferably natural rubber.The described cylinder body lid 5 of present embodiment and beaer radially position limiting structure 8 can also be made into parts.
The described cylinder body of present embodiment radially position limiting structure 6 is the boss through-hole structure, be convenient to exhaust, in radially perforate on the sidewall of position limiting structure 6 of cylinder body, be convenient to quick filling liquid, before feed flow, it is a that structure 6 heads probe into cylinder body lid 5 degree of depth, and beaer radially the highest position of position limiting structure 8 is b lower than workpiece lowest surfaces height, recommends a >=b.The described cylinder body of present embodiment radially position limiting structure 6 and piston 1 can also be made into parts.
The described cylinder body upper limit structure 11 of present embodiment is connected with the lower surface of pad 2, and circumference is arranged on the surrounding of pad 2 symmetrically, the flight behavior of the floating member such as pad 2, cylinder body lid 5 in the time of can avoiding fluid pressure excessive, thereby protection rolling diaphragm.The number of described cylinder body upper limit structure is preferably 3.
The piston 1 of present embodiment, diaphragm compressing tablet 4, cylinder body radially position limiting structure 6, plug 7, beaer radially the material of position limiting structure 8 to be preferably model be 304 stainless steel material; Pad 2, cylinder body lid 5 and cylinder body upper limit structure 11 are preferably the aluminum material that model is 2A12.
The described static pressure supporting device for the processing of super large caliber optics of present embodiment is carrying out reducing air bubble content at water tank when installing, the bubble pressurization that before installing, piston 1, diaphragm 3, diaphragm compressing tablet 4, cylinder body lid 5, plug 7 and sealing ring 9 is formed in the related whole screws of airtight cavity is discharged, eliminate to greatest extent the impact of air entrapment on the rigidity of structure, concrete steps are as follows:
By cylinder body radially position limiting structure 6 be connected by screw piston 1;
2. rolling diaphragm 3 is trapped in to pad 2;
3. step 1, step 2 assembly are installed, rolling diaphragm 3 will be carried out when mounted to the pre-convolution of craft, mating holes position bonnet upper diaphragm compressing tablet 4, be connected to piston 1 with screw, tightens to guarantee that rolling diaphragm 3 is compressed by diaphragm compressing tablet 4;
4. structure is inverted, and uses screw that cylinder body lid 5 is connected on pad 2 across diaphragm screening glass 10 and rolling diaphragm 3, tightens to guarantee that rolling diaphragm 3 is compacted;
5. cylinder body upper limit structure 11 is connected by screw on pad 2;
6. structure is inverted, and places O RunddichtringO 9, and the plug 7 of screwing on, and slowly pretension, guarantee that the cylindrical end tangs of plug 7 is passed O RunddichtringO 9 so that O RunddichtringO 9 is fixing with one heart;
By the feed pipe jiont treatment to piston 1 side opening, connect bypass line, branch road valve, main line pipeline, main line valve, discharge duct, drain tap, pressure transducer and pressue device; Install feed flow after plug, pressurization, carry out performing leak test;
8. by after performing leak test, close the branch road valve of each support, each static pressure supporting construction is taken out water tank is installed, be installed to the assigned address of processing table top, by beaer radially position limiting structure 8 put into the heavy stand of cylinder body lid 5, can form the static pressure supporting device for the processing of super large caliber optics.While forming support system, each support will connect equally in water, after the ducted bubble in eliminating main line, can open the branch road valve.
Static pressure supporting device for the processing of super large caliber optics of the present invention, can be used as the workpiece support in optics processing, mechanical processing process, also can be used as support component or motor element in various structural systems, mechanical system.

Claims (6)

1. the static pressure supporting device of processing for super large caliber optics, it is characterized in that, this device comprises piston (1), pad (2), rolling diaphragm (3), diaphragm compressing tablet (4), cylinder body lid (5), cylinder body is position limiting structure (6) radially, plug (7), beaer is position limiting structure (8) radially, sealing ring (9) and cylinder body upper limit structure (11), described piston (1) side surface arranges the straight centre bore of horizontal vertical, cylinder body radially position limiting structure (6) is the boss through-hole structure, the cylinder body radially vertical centre hole in the straight centre bore of horizontal vertical of position limiting structure (6) and piston (1) is connected, piston (1) contacts with pad (2), pad (2) is connected by rolling diaphragm (3) with cylinder body lid (5), rolling diaphragm (3) arranges diaphragm compressing tablet (4), piston (1) is connected with diaphragm compressing tablet (4) with rolling diaphragm (3) by screw, cylinder body lid (5) top center sets gradually counterbore from top to bottom, tapped blind hole and steam vent, beaer radially position limiting structure (8) is arranged in the counterbore of cylinder body lid (5) and coordinates with cylinder body lid (5) cylinder, cylinder body upper limit structure (11) is connected with the lower surface of pad (2), plug (7) is arranged in tapped blind hole, for compressing the sealing ring (9) that is placed in tapped blind hole, the straight centre bore of horizontal vertical of described piston (1), the center of pad (2), cylinder body radially the counterbore of De Tu hole, position limiting structure (6) center and cylinder body lid (5) on a concentric shafts, described piston (1), rolling diaphragm (3), diaphragm compressing tablet (4), cylinder body lid (5), plug (7) and sealing ring (9) form airtight cavity.
2. the static pressure supporting device for the processing of super large caliber optics according to claim 1, is characterized in that, diaphragm screening glass (10) also is set on described rolling diaphragm (3).
3. the static pressure supporting device for the processing of super large caliber optics according to claim 2, is characterized in that, described diaphragm screening glass (10) is copper sheet.
4. the static pressure supporting device for the processing of super large caliber optics according to claim 1, is characterized in that, the number of described cylinder body upper limit structure (11) is 3.
5. the static pressure supporting device for the processing of super large caliber optics according to claim 1, is characterized in that, described rolling diaphragm (3) is F type, FC type, D type, DC type, OB type or P type diaphragm.
6. the static pressure supporting device for the processing of super large caliber optics according to claim 1, is characterized in that, described sealing ring (9) is the O RunddichtringO.
CN201310339253.7A 2013-08-06 2013-08-06 Static pressure supporting device for ultra large diameter optical machining Active CN103394983B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020078042A1 (en) * 2018-10-19 2020-04-23 中国矿业大学 Optical lens spherical diaphragm support apparatus
CN112536675A (en) * 2020-12-03 2021-03-23 中国工程物理研究院激光聚变研究中心 Splicing device for numerical control machining of square optical element
CN112828765A (en) * 2021-03-29 2021-05-25 长春工业大学 Screw rod supporting device for processing and detecting optical reflector
CN114227445A (en) * 2021-12-24 2022-03-25 中国科学院长春光学精密机械与物理研究所 Hydraulic spherical hinge supporting unit for optical machining of reflector

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CN202251235U (en) * 2011-09-19 2012-05-30 广东天恒液压机械有限公司 Oil tank sealing and static pressure supporting device for high-frequency vibration
CN103056397A (en) * 2012-12-31 2013-04-24 哈尔滨工业大学 Large-diameter ultra-precise air static pressure rotating shafting

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020078042A1 (en) * 2018-10-19 2020-04-23 中国矿业大学 Optical lens spherical diaphragm support apparatus
CN112536675A (en) * 2020-12-03 2021-03-23 中国工程物理研究院激光聚变研究中心 Splicing device for numerical control machining of square optical element
CN112828765A (en) * 2021-03-29 2021-05-25 长春工业大学 Screw rod supporting device for processing and detecting optical reflector
CN114227445A (en) * 2021-12-24 2022-03-25 中国科学院长春光学精密机械与物理研究所 Hydraulic spherical hinge supporting unit for optical machining of reflector

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