CN103388134B - 容性耦合等离子体增强化学气相沉积制备厚度均匀薄膜的方法 - Google Patents
容性耦合等离子体增强化学气相沉积制备厚度均匀薄膜的方法 Download PDFInfo
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- CN103388134B CN103388134B CN201310308952.5A CN201310308952A CN103388134B CN 103388134 B CN103388134 B CN 103388134B CN 201310308952 A CN201310308952 A CN 201310308952A CN 103388134 B CN103388134 B CN 103388134B
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- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 title claims abstract description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052802 copper Inorganic materials 0.000 claims abstract description 4
- 239000010949 copper Substances 0.000 claims abstract description 4
- 238000002715 modification method Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 18
- 239000000758 substrate Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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CN201310308952.5A CN103388134B (zh) | 2013-07-22 | 2013-07-22 | 容性耦合等离子体增强化学气相沉积制备厚度均匀薄膜的方法 |
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CN201310308952.5A CN103388134B (zh) | 2013-07-22 | 2013-07-22 | 容性耦合等离子体增强化学气相沉积制备厚度均匀薄膜的方法 |
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CN103388134A CN103388134A (zh) | 2013-11-13 |
CN103388134B true CN103388134B (zh) | 2016-05-18 |
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CN110419562B (zh) * | 2019-09-02 | 2022-08-16 | 四川长虹电器股份有限公司 | 可改变接入平行板面积的射频解冻装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101110381A (zh) * | 2006-07-20 | 2008-01-23 | 应用材料股份有限公司 | 利用快速温度梯度控制处理衬底 |
CN201990724U (zh) * | 2011-03-04 | 2011-09-28 | 深圳市创益科技发展有限公司 | 用于化学气相沉积设备的射频电源连接机构 |
EP2469611A1 (en) * | 2010-06-11 | 2012-06-27 | Shenzhen Trony Science & Technology Development Co., Ltd. | Movable jig for silicon-based thin film solar cell |
CN202945323U (zh) * | 2012-12-05 | 2013-05-22 | 中国电子科技集团公司第十八研究所 | 小面积衬底用硒源离化器 |
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EP1812949B1 (en) * | 2004-11-12 | 2010-07-07 | Oerlikon Trading AG, Trübbach | Impedance matching of a capacitively coupled rf plasma reactor suitable for large area substrates |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101110381A (zh) * | 2006-07-20 | 2008-01-23 | 应用材料股份有限公司 | 利用快速温度梯度控制处理衬底 |
EP2469611A1 (en) * | 2010-06-11 | 2012-06-27 | Shenzhen Trony Science & Technology Development Co., Ltd. | Movable jig for silicon-based thin film solar cell |
CN201990724U (zh) * | 2011-03-04 | 2011-09-28 | 深圳市创益科技发展有限公司 | 用于化学气相沉积设备的射频电源连接机构 |
CN202945323U (zh) * | 2012-12-05 | 2013-05-22 | 中国电子科技集团公司第十八研究所 | 小面积衬底用硒源离化器 |
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Address after: 241000 No.3, exi Road, Sanshan Economic Development Zone, Wuhu City, Anhui Province Patentee after: Chai Fenfen Address before: No.99, Dongbao Road, Jiangdong Street, Gulou District, Nanjing, Jiangsu Province, 210000 Patentee before: Chai Fenfen |
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Effective date of registration: 20210806 Address after: 201707 Building 1, No. 303, Xinke Road, Qingpu District, Shanghai Patentee after: Shanghai boshiguang Semiconductor Technology Co.,Ltd. Address before: 241000 No.3, exi Road, Sanshan Economic Development Zone, Wuhu City, Anhui Province Patentee before: Chai Fenfen |