CN103376055A - High-resolution linear interferometer - Google Patents
High-resolution linear interferometer Download PDFInfo
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- CN103376055A CN103376055A CN2012101187779A CN201210118777A CN103376055A CN 103376055 A CN103376055 A CN 103376055A CN 2012101187779 A CN2012101187779 A CN 2012101187779A CN 201210118777 A CN201210118777 A CN 201210118777A CN 103376055 A CN103376055 A CN 103376055A
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Abstract
The invention provides a high-resolution linear interferometer. The high-resolution linear interferometer comprises a polarization splitting prism, a transmission arm cube-corner prism and a reflection arm cube-corner prism and further comprises a transmission arm quarter-wave plate, a reflection arm quarter-wave plate and a common cube-corner prism, wherein the common cube-corner prism and the reflection arm quarter-wave plate are arranged on the two opposite side faces of the polarization splitting prism respectively, the transmission arm quarter-wave plate is arranged on a third side face, opposite to an incidence laser light source, of the polarization splitting prism, the transmission arm quarter-wave plate is arranged between the polarization splitting prism and the transmission arm cube-corner prism, and the reflection arm quarter-wave plate is arranged between the polarization splitting prism and the reflection arm cube-corner prism. The high-resolution linear interferometer still takes a cube-corner prism as an object to be tested, and adjustment requirements are not high when the interferometer is used. Through being additionally provided with the quarter-wave plates, the high-resolution linear interferometer has the advantage of four-times optical fine division and enables the optical resolution to be promoted to lambda/4.
Description
Technical field
The present invention relates to the two-frequency laser interferometer field, and be particularly related to the linear interferometer of a kind of high resolving power.
Background technology
As light source, because its coherent length is very large, the measurement range of interferometer can be expanded greatly with the helium-neon laser of frequency stabilization; And because its beam divergence angle is little, concentration of energy, thereby the interference fringe that its produces can receive with photelectric receiver, becomes electric signal, and by recording of not leaking of counter, thereby improved measuring speed and measuring accuracy.
But the laser of this single-frequency is not perfection, and its a basic weakness is exactly affected by environment serious, and abominable at test environment, when measuring distance was longer, this shortcoming was very outstanding.Its reason is that it is a kind of direct current measurement system, must have the drawback of the gentle level drift of direct current light.When the movable reflective mirror of laser interferometer moves, photelectric receiver meeting output signal, if signal has surpassed the triggering level of counter then will go on record, if and laser beam intensity changes, just might make photosignal be lower than the triggering level of counter and make counter stop the counting, making the main cause of laser instrument intensity or interference signal Strength Changes is air turbulence, the lathe mist of oil, cutting swarf is on the impact of light beam, and skew or corrugated distortion occur light beam as a result.The difficult automatic adjustment by triggering level of this random variation compensates, thereby limited the range of application of single-frequency interferometer, only manage to replace the direct current measurement system could fundamentally overcome this weakness of single frequency laser interferometer with the AC measurment system.
Two-frequency laser interferometer is a kind of heterodyne system interferometer that develops on the basis of single frequency laser interferometer.The same with single frequency laser interferometer, two-frequency laser interferometer also is a kind of instrument of as standard tested length being measured with wavelength, different persons, be when but index prism is motionless on the one hand, the former interference signal be between the brightest and the darkest between certain direct current light flat, and the latter's interference signal is the AC signal that a frequency is about 1.5MHz; On the other hand, but when index prism moves, the former interference signal be the brightest and the darkest between the signal that slowly changes, and the latter's interference signal is original AC signal frequency is increased or to have reduced Δ f, the result still is an AC signal.Thereby for two-frequency laser interferometer, the AC amplifier that available enlargement factor is larger is amplified interference signal, like this, even light intensity attenuation 90% still can obtain suitable electric signal.
Two-frequency laser interferometer can be at constant temperature, constant humidity, and shockproof metering Indoor gauge block, gauge rod is carved chi and coordinate measuring machine etc.It both can carry out precision measurement to tens meters wide range, also can carry out precision measurement to small movements such as watch parts, both can measure geometric sense such as length, angle, linearity, the depth of parallelism, flatness, verticality etc., also can be used for special occasions, such as the measurement of track spacing on the microposition of optical semiconductor lithography and the computer memory etc.
Linear interferometer belongs to a kind of of two-frequency laser interferometer, possesses the measuring accuracy height, and it is large to measure dynamic range, the measuring speed advantages of higher, and the fields such as school, precision machine tool processing, measurement of coordinates of surveying at lathe all have very widely purposes.
Linear interferometer of the prior art with prism of corner cube as testee, as shown in Figure 1, it comprises polarization splitting prism 10, gage beam prism of corner cube 20 and reference arm prism of corner cube 30, wherein said gage beam prism of corner cube 20 is fixed on the testee, from the laser process polarization splitting prism 10 of two-frequency laser, after processing, the linear interferometer that gage beam prism of corner cube 20 and reference arm prism of corner cube 30 form shoots to receiver.Because the characteristic of prism of corner cube self, its emergent light is strict parallel with incident light, so linear interferometer in use, and is less demanding to debuging, and is particularly suitable for long stroke measurment, but, present linear interferometer only has the twice optical fine, and namely optical resolution is λ/2, so the linear interferometer optics resolution of prior art is not high, thereby cause measuring accuracy lower, can't satisfy the demand of industrial development.
Summary of the invention
In order to achieve the above object, the present invention proposes the high-resolution linear interferometer of a kind of optics, it still with prism of corner cube as testee, less demanding to debuging during use, but by increasing transmission arm quarter-wave plate, reflection arm quarter-wave plate increases a common angles cone prism simultaneously, the resolution of conventional linear interferometer is brought up to λ/4 by λ/2, and keep conventional linear interferometer advantage easy to use.
The present invention proposes the linear interferometer of a kind of high resolving power, comprising: polarization splitting prism, transmission arm prism of corner cube, reflection arm prism of corner cube, and described interferometer also comprises transmission arm quarter-wave plate, reflection arm quarter-wave plate and common angles cone prism,
Wherein, described common angles cone prism and reflection arm quarter-wave plate are arranged at respectively the relative two sides of described polarization splitting prism, described transmission arm quarter-wave plate is arranged at described polarization splitting prism with respect to the 3rd side of incident laser light source, described transmission arm quarter-wave plate is arranged between described polarization splitting prism and the transmission arm prism of corner cube, and described reflection arm quarter-wave plate is arranged between described polarization splitting prism and the reflection arm prism of corner cube.
Further, described transmission arm quarter-wave plate adopts the glass of identical type and thickness to equate with described reflection arm quarter-wave plate.
Further, described transmission arm prism of corner cube adopts the glass of identical type and thickness to equate with described reflection arm prism of corner cube.
Further, described incident laser is from the two-frequency laser module.
Further, the laser beam of described two-frequency laser module ejaculation comprises the laser of two kinds of different frequencies.
Further, described double-frequency laser is orthogonal two linearly polarized lights in polarization direction.
Further, the emergent ray of processing through the linear interferometer of described high resolving power is sent to the photoelectric commutator module, and is electric signal by described photoelectric commutator module converts.
Further, described electric signal is sent to the laser counting module to be processed, displacement calculating information and output.
The present invention is on the basis of conventional linear interferometer, the linear interferometer of a kind of high resolving power has been proposed, it still with prism of corner cube as testee, less demanding to debuging during use, but by increasing quarter-wave plate, have the advantages that four times of optical fines are λ/4 resolution, have simultaneously and use simply, debug less demandingly, be suitable for the advantages such as long stroke measurment.
Description of drawings
Figure 1 shows that the structural representation of prior art neutral line interferometer.
Figure 2 shows that the linear interferometer structure synoptic diagram of high resolving power of preferred embodiment of the present invention.
Figure 3 shows that the two-frequency laser interferometer system construction drawing of preferred embodiment of the present invention.
Embodiment
In order more to understand technology contents of the present invention, especially exemplified by specific embodiment and cooperate appended graphic being described as follows.
Please refer to Fig. 2, Figure 2 shows that the linear interferometer structure synoptic diagram of high resolving power of preferred embodiment of the present invention.The present invention proposes the linear interferometer of a kind of high resolving power, comprise: polarization splitting prism 100, transmission arm prism of corner cube 600, reflection arm prism of corner cube 400, described interferometer also comprises transmission arm quarter-wave plate 500, reflection arm quarter-wave plate 300 and common angles cone prism 200
Wherein, described common angles cone prism 200 and reflection arm quarter-wave plate 300 are arranged at respectively the relative two sides of described polarization splitting prism 100, described transmission arm quarter-wave plate 500 is arranged at described polarization splitting prism 100 with respect to the 3rd side of incident laser light source, described transmission arm quarter-wave plate 500 is arranged between described polarization splitting prism 100 and the transmission arm prism of corner cube 600, and described reflection arm quarter-wave plate 300 is arranged between described polarization splitting prism 100 and the reflection arm prism of corner cube 400.
The preferred embodiment according to the present invention, the linear interferometer of high resolving power provided by the invention can with wherein some or all of optical element is glued together, also can adopt discrete optical element.
Please refer to again Fig. 3, Figure 3 shows that the two-frequency laser interferometer system construction drawing of preferred embodiment of the present invention.The laser that comprises f1, two kinds of frequencies of f2 from the laser beam of two-frequency laser module 40 (comprising the elements such as laser tube, quarter-wave plate, spectroscope, laser Circuit tuning and photoelectric tube), orthogonal two linearly polarized lights in polarization direction, this double-frequency laser bundle is separated at the light splitting surface of polarization splitting prism 100, wherein the polarization direction is reflected perpendicular to the f2 of the plane of incidence, and the f1 that the polarization direction is parallel to the plane of incidence then is transmitted.
Place reflection arm quarter-wave plate 300 and reflection arm prism of corner cube 400 in the direction of propagation of f2.Linearly polarized light f2 is through becoming circularly polarized light after the reflection arm quarter-wave plate 300, after reflection arm prism of corner cube 400, BEAM SQUINT certain position and partially turnback retroeflection, again through after the reflection arm quarter-wave plate 300, f2 becomes again linearly polarized light, its polarization direction is parallel to the plane of incidence of polarization splitting prism 100, therefore be transmitted to common angles cone prism 200, depart from certain position and partially turnback retroeflection on the surface of common angles cone prism 200, and again be polarized Amici prism 100 and be transmitted through reflection arm quarter-wave plate 300 and reflection arm prism of corner cube 400, back and forth through behind the reflection arm quarter-wave plate 300, the polarization direction of the f2 again plane of incidence with polarization splitting prism 1 is vertical again.
Transmission arm quarter-wave plate 500 and transmission arm prism of corner cube 600 are placed in the direction of propagation at f1.Linearly polarized light f1 is through becoming circularly polarized light after the transmission arm quarter-wave plate 500, after transmission arm prism of corner cube 600, BEAM SQUINT certain position and partially turnback retroeflection, again pass through after the transmission arm quarter-wave plate 500, f1 becomes again linearly polarized light, its polarization direction is perpendicular to the plane of incidence of polarization splitting prism 100, therefore be reflected onto common angles cone prism 200, depart from certain position and partially turnback retroeflection on the surface of common angles cone prism 200, and again be polarized Amici prism 100 and reflex to transmission arm quarter-wave plate 500 and transmission arm prism of corner cube 600, after again passing through back and forth transmission arm quarter-wave plate 500, therefore the polarization direction of f1 is again parallel with the plane of incidence of polarization splitting prism 100, is transmitted and converges with f2.Because Doppler effect is the f1 that transmission arm prism of corner cube 600 returns by the measurement catoptron that moves, its frequency becomes f1 ± 2 Δ f, and wherein Δ f contains displacement information X.
F1 after converging ± 2 Δ f and f2 are reflected that photoelectric commutator module 50 (comprising the elements such as analyzer and photoelectric tube) is sent in mirror 800 reflection and laser counting module 60 (comprises the amplification shaping, the module such as subtraction circuit and counting circuit), wherein said photoelectric commutator module 50 comprises the two-way input, respectively will be from the laser beam f1 of two-frequency laser module 40, f1 after the linear interferometer processing of f2 and process converges ± 2 Δ f and f2 laser beam are converted to two path signal, and described two path signal is delivered to laser counting module 60 process, by processing Δ f being converted into the measurement catoptron is the displacement information X of transmission arm prism of corner cube 600, and output.
The light beam f1 of the reflection light beam f2 of arm and transmission arm has all come back reflective twice, therefore belongs to optics four segmentations, and namely optical resolution is λ/4.And the type of glass same thickness of the light beam process of reflection arm and transmission arm equates therefore have low-down thermal drift error.
In sum, the present invention is on the basis of conventional linear interferometer, the linear interferometer of a kind of high resolving power has been proposed, it still with prism of corner cube as testee, less demanding to debuging during use, but by increasing quarter-wave plate, have the advantages that four times of optical fines are λ/4 resolution, have simultaneously and use simply, debug less demandingly, be suitable for the advantages such as long stroke measurment.
Although the present invention discloses as above with preferred embodiment, so it is not to limit the present invention.The persond having ordinary knowledge in the technical field of the present invention, without departing from the spirit and scope of the present invention, when being used for a variety of modifications and variations.Therefore, protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (8)
1. the linear interferometer of a high resolving power comprises: polarization splitting prism, transmission arm prism of corner cube, reflection arm prism of corner cube, and it is characterized in that: described interferometer also comprises transmission arm quarter-wave plate, reflection arm quarter-wave plate and common angles cone prism,
Wherein, described common angles cone prism and reflection arm quarter-wave plate are arranged at respectively the relative two sides of described polarization splitting prism, described transmission arm quarter-wave plate is arranged at described polarization splitting prism with respect to the 3rd side of incident laser light source, described transmission arm quarter-wave plate is arranged between described polarization splitting prism and the transmission arm prism of corner cube, and described reflection arm quarter-wave plate is arranged between described polarization splitting prism and the reflection arm prism of corner cube.
2. the linear interferometer of high resolving power according to claim 1 is characterized in that, described transmission arm quarter-wave plate adopts the glass of identical type and thickness to equate with described reflection arm quarter-wave plate.
3. the linear interferometer of high resolving power according to claim 1 is characterized in that, described transmission arm prism of corner cube adopts the glass of identical type and thickness to equate with described reflection arm prism of corner cube.
4. the linear interferometer of high resolving power according to claim 1 is characterized in that described incident laser is from the two-frequency laser module.
5. the linear interferometer of high resolving power according to claim 4 is characterized in that the laser beam that described two-frequency laser module penetrates comprises the laser of two kinds of different frequencies.
6. the linear interferometer of high resolving power according to claim 5 is characterized in that described double-frequency laser is orthogonal two linearly polarized lights in polarization direction.
7. the linear interferometer of high resolving power according to claim 1 is characterized in that, the emergent ray of processing through the linear interferometer of described high resolving power is sent to the photoelectric commutator module, and is electric signal by described photoelectric commutator module converts.
8. the linear interferometer of high resolving power according to claim 7 is characterized in that, described electric signal is sent to the laser counting module to be processed, displacement calculating information and output.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697807A (en) * | 2013-12-13 | 2014-04-02 | 清华大学 | Double-frequency laser displacement and angle interferometer |
| CN104006739A (en) * | 2014-05-29 | 2014-08-27 | 清华大学 | Optical eight-subdivision linear interferometer |
| CN104697443A (en) * | 2015-03-30 | 2015-06-10 | 北方民族大学 | Motion-compensated cascade stepped reflection mirror laser interferometer and measurement method |
| CN104848782A (en) * | 2015-05-29 | 2015-08-19 | 北方民族大学 | Contrast type anti-interference micro-cascading ladder angle reflector laser interferometer as well as calibration method and measurement method |
| CN105588515A (en) * | 2015-12-16 | 2016-05-18 | 华中科技大学 | Nanometer displacement measurement sensor-based nanometer micro-displacement detector |
| CN106646699A (en) * | 2017-03-09 | 2017-05-10 | 索尔思光电（成都）有限公司 | Prism and light transmit-receive assembly |
| CN112747667A (en) * | 2019-10-31 | 2021-05-04 | 上海微电子装备（集团）股份有限公司 | Differential interferometer apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030197869A1 (en) * | 2002-04-18 | 2003-10-23 | Johnstone Eric S. | Interferometer using beam re-tracing to eliminate beam walk-off |
| CN2727698Y (en) * | 2004-09-28 | 2005-09-21 | 中国科学院上海光学精密机械研究所 | Dual-frequency laser interferometer |
| CN101566459A (en) * | 2009-05-27 | 2009-10-28 | 上海微电子装备有限公司 | Dual-frequency laser interferometer |
-
2012
- 2012-04-20 CN CN2012101187779A patent/CN103376055A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030197869A1 (en) * | 2002-04-18 | 2003-10-23 | Johnstone Eric S. | Interferometer using beam re-tracing to eliminate beam walk-off |
| CN2727698Y (en) * | 2004-09-28 | 2005-09-21 | 中国科学院上海光学精密机械研究所 | Dual-frequency laser interferometer |
| CN101566459A (en) * | 2009-05-27 | 2009-10-28 | 上海微电子装备有限公司 | Dual-frequency laser interferometer |
Non-Patent Citations (1)
| Title |
|---|
| 侯文玫等: "分光镜对外差激光干涉仪非线性的影响", 《机械工程学报》 * |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015085694A1 (en) * | 2013-12-13 | 2015-06-18 | 清华大学 | Double-frequency laser displacement and angle interferometer |
| CN103697807B (en) * | 2013-12-13 | 2016-04-13 | 清华大学 | A kind of double-frequency laser displacement and angle interferometer |
| CN103697807A (en) * | 2013-12-13 | 2014-04-02 | 清华大学 | Double-frequency laser displacement and angle interferometer |
| CN104006739B (en) * | 2014-05-29 | 2016-06-15 | 清华大学 | A kind of optics eight segments linear interference instrument |
| CN104006739A (en) * | 2014-05-29 | 2014-08-27 | 清华大学 | Optical eight-subdivision linear interferometer |
| CN104697443A (en) * | 2015-03-30 | 2015-06-10 | 北方民族大学 | Motion-compensated cascade stepped reflection mirror laser interferometer and measurement method |
| CN104697443B (en) * | 2015-03-30 | 2017-07-28 | 北方民族大学 | A kind of stepped corner reflector laser interferometer of motion compensation formula cascade and measuring method |
| CN104848782B (en) * | 2015-05-29 | 2017-06-13 | 北方民族大学 | A kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer and scaling method and measuring method |
| CN104848782A (en) * | 2015-05-29 | 2015-08-19 | 北方民族大学 | Contrast type anti-interference micro-cascading ladder angle reflector laser interferometer as well as calibration method and measurement method |
| CN105588515A (en) * | 2015-12-16 | 2016-05-18 | 华中科技大学 | Nanometer displacement measurement sensor-based nanometer micro-displacement detector |
| CN105588515B (en) * | 2015-12-16 | 2018-12-14 | 华中科技大学 | A kind of nanometer micro-displacement detector based on nanometer displacement gage probe |
| CN106646699A (en) * | 2017-03-09 | 2017-05-10 | 索尔思光电（成都）有限公司 | Prism and light transmit-receive assembly |
| CN112747667A (en) * | 2019-10-31 | 2021-05-04 | 上海微电子装备（集团）股份有限公司 | Differential interferometer apparatus |
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Application publication date: 20131030 |