CN103368451A - Nanometer electric generator utilizing sliding friction - Google Patents
Nanometer electric generator utilizing sliding friction Download PDFInfo
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- CN103368451A CN103368451A CN2013100322710A CN201310032271A CN103368451A CN 103368451 A CN103368451 A CN 103368451A CN 2013100322710 A CN2013100322710 A CN 2013100322710A CN 201310032271 A CN201310032271 A CN 201310032271A CN 103368451 A CN103368451 A CN 103368451A
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Abstract
The invention provides a nanometer electric generator utilizing sliding friction. The nanometer electric generator comprises a first friction layer, a first conducting element, a second friction layer and a second conducting element, wherein the first conducting element is arranged under the first friction layer in a contact way; the second conducting element is arranged above the second friction layer in a contact way; the upper surface of the first friction layer is arranged opposite to the lower surface of the second friction layer; when relative sliding friction occurs between the upper surface of the first friction layer and the lower surface of the second friction layer by an exerted external force, and the contact area is changed, an electric signal is output to an external circuit by the first and second conducting elements; when a periodic tangential external force is exerted to the nanometer electric generator utilizing sliding friction, alternating current pulse signal output is realized between the first and second conducting elements.
Description
Technical field
The present invention relates to a kind of generator, particularly the mechanical energy that applies external force is converted into the friction nano generator of electric energy.
Background technology
In today of microelectronics and material technology high speed development, a large amount of novel microelectronic devices with several functions and Highgrade integration constantly are developed, and show unprecedented application prospect in the every field of people's daily life.Yet, and the research of these microelectronic devices power-supply system of mating but relatively lags behind, in general, the power supply of these microelectronic devices all is directly or indirectly to come from battery.Not only volume is large, quality is heavier for battery, and there are potential harm in the poisonous chemical confrontation environment that contains and human body.Therefore, developing the technology that the mechanical energy that motion, vibration etc. exist naturally can be converted into electric energy is extremely important.
But, above-mentioned mechanical energy can be converted into effectively at present the generator of electric energy all take electromagnetic induction as the basis, driven by the hydraulic turbine, steam turbine, diesel engine or other dynamic power machine, with current, air-flow, the Conversion of Energy that fuel combustion or nuclear fission produce is that mechanical energy is passed to generator, is converted to electric energy by generator again and is used.These generators all need relatively to concentrate, the greatly energy input of intensity, and for the less kinetic energy of intensity that produces in people's daily routines and nature exists, substantially all it effectively can't be converted into electric energy.Simultaneously, the volume of conventional electric generators is large, complex structure, can not use as the power supply component of microelectronic device at all.
Summary of the invention
In order to overcome the problems referred to above of the prior art, the invention provides a kind of sliding friction nano generator, the mechanical energy that is applied to the tangential external force on the friction nano generator can be converted into electric energy.
For achieving the above object, the invention provides a kind of friction nano generator, comprise
A kind of sliding friction nano generator is characterized in that, comprising:
The first frictional layer;
The first conducting element that the below contact of described the first frictional layer is placed;
The second frictional layer;
The second conducting element that the top contact of described the second frictional layer is placed;
The lower surface of the upper surface of described the first frictional layer and described the second frictional layer is staggered relatively;
When externally applied forces makes the lower surface generation relative sliding friction of the upper surface of described the first frictional layer and described the second frictional layer and causes friction area to change, can be by described the first conducting element and the second conducting element to the external circuit output electrical signals;
Preferably, friction electrode order difference is arranged between the lower surface material of the top surface of described the first frictional layer and described the second frictional layer;
Preferably, described the first frictional layer and/or the second frictional layer are insulating material or semi-conducting material;
Preferably, described insulating material is selected from polytetrafluoroethylene, dimethyl silicone polymer, polyimides, aniline-formaldehyde resin, polyformaldehyde, ethyl cellulose, polyamide, melamino-formaldehyde, the polyethylene glycol succinate, cellulose, cellulose ethanoate, polyethylene glycol adipate, polydiallyl phthalate, the regenerated fiber sponge, polyurethane elastomer, the styrene-acrylonitrile copolymer copolymer, styrene-butadiene-copolymer, staple fibre, poly-methyl, methacrylate, polyvinyl alcohol, polyester, polyisobutene, the polyurethane flexible sponge, PETG, polyvinyl butyral resin, phenolic resins, neoprene, butadiene-propylene copolymer, natural rubber, polyacrylonitrile, poly-(vinylidene chloride-co-acrylonitrile), polyethylene the third diphenol carbonate, polystyrene, polymethyl methacrylate, Merlon, polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polyvinylidene chloride, polyethylene, polypropylene or polyvinyl chloride;
Preferably, described semi-conducting material be selected from silicon, germanium, III and V compounds of group, II and VI compounds of group, oxide, by III-V compounds of group and the solid solution that II-the VI compounds of group forms, amorphous glass semiconductor and organic semiconductor;
Preferably, described III and V compounds of group are selected from GaAs and gallium phosphide; Described II and VI compounds of group are selected from cadmium sulfide and zinc sulphide; Described oxide is selected from the oxide of manganese, chromium, iron or copper; Describedly be selected from gallium aluminum arsenide and gallium arsenic phosphide by III-V compounds of group and solid solution that II-the VI compounds of group forms;
Preferably, described frictional layer is non-conductive oxide, conductor oxidate or complex oxide, comprises silica, aluminium oxide, manganese oxide, chromium oxide, iron oxide, titanium oxide, cupric oxide, zinc oxide, BiO
2Or Y
2O
3
Preferably, the lower surface of described the first frictional layer upper surface and/or the second frictional layer is distributed with the micro-structural of micron or inferior micron dimension;
Preferably, described micro-structural is selected from nano wire, nanotube, nano particle, nanometer channel, micron groove, nanocone, micron cone, nanosphere and micron chondritic;
Preferably, the lower surface of described the first frictional layer upper surface and/or the second frictional layer has interspersing of nano material or coating;
Preferably, the lower surface of described the first frictional layer upper surface and/or the second frictional layer is through chemical modification, so that be that positive material surface is introduced the functional group that loses easily electronics and/or introduced the functional group that obtains easily electronics for negative material surface in polarity in polarity;
Preferably, the described functional group that loses easily electronics comprises amino, hydroxyl or alkoxyl;
Preferably, the described functional group that obtains easily electronics comprises acyl group, carboxyl, nitro or sulfonic group;
Preferably, the lower surface of described the first frictional layer upper surface and/or the second frictional layer is through chemical modification, so that be that positive material surface is introduced positive charge and/or introduced negative electrical charge in polarity for negative material surface in polarity;
Preferably, described chemical modification realizes by the mode of chemical bonding introducing charged groups;
Preferably, described the first frictional layer or the second frictional layer are electric conducting material;
Preferably, the described electric conducting material that consists of described the first frictional layer or the second frictional layer is selected from metal and conductive oxide;
Preferably, its described metal is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy that is formed by above-mentioned metal;
Preferably, described the first conducting element and/or the second conducting element are selected from metal and conductive oxide;
Preferably, described the first conducting element and/or the second conducting element are selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy that is formed by above-mentioned metal;
Preferably, described the first frictional layer and/or the second frictional layer are film;
Preferably, described the first conducting element and/or the second conducting element are film.
When sliding friction nano generator of the present invention is applied periodic tangential external force, can between the first conducting element and the second conducting element, form the output of alternating-current pulse signal.Compared with prior art, sliding friction nano generator of the present invention has following advantages:
1, the new breakthrough in principle and the application.Do not need the gap between the generator two substrates of the present invention, different on electricity generating principle with the device that entirely separates from the periodically full contact of two substrates, provide a brand-new mentality of designing to society.And gapless design omitted the installation of elasticity apart from keeper, also for encapsulation technology provides convenience, can be applied in more wide field.
2, the efficient utilization of energy.Generator of the present invention need not extensive, high-intensity energy input, the relative sliding that the mechanical energy that only need input can drive between the first frictional layer and the second frictional layer gets final product, therefore can effectively collect the mechanical energy of the various intensity that produce in nature and the people's daily life, and be translated into electric energy, realize the efficient utilization of energy.
3, simple in structure, light and handy portable and highly compatible.Generator of the present invention need not the parts such as magnet, coil, rotor, simple in structure, volume is very little, easy to make, with low cost, can be installed in various can making on the device that the first frictional layer and the second frictional layers produce relative sliding, need not special operational environment, therefore have very high compatibility.
4, of many uses.By the upper surface of the first frictional layer in the generator and the lower surface of the second frictional layer are carried out physical modification or chemical modification, introduce nanostructured pattern or be coated with nano material etc., can also further improve the contact charge density that the friction nano generator produces when the contact of two substrates and relative sliding under tangential External Force Acting, thereby improve the fan-out capability of generator.Therefore, generator of the present invention can not only as the mini power source, also can be used for Electricity Generation simultaneously.
Description of drawings
Shown in accompanying drawing, above-mentioned and other purpose of the present invention, Characteristics and advantages will be more clear.Reference numeral identical in whole accompanying drawings is indicated identical part.Deliberately do not draw accompanying drawing by actual size equal proportion convergent-divergent, focus on illustrating purport of the present invention.
Fig. 1 is rub a kind of typical structure schematic diagram of nano generator of the present invention;
Fig. 2 is the rub generalized section of electricity generating principle of nano generator of the present invention;
Fig. 3 is the rub another kind of typical structure schematic diagram of nano generator of the present invention;
Fig. 4 is the rub another kind of typical structure schematic diagram of nano generator of the present invention;
Fig. 5 lights 80 real-time photos of commercial LED bulb for the present invention's nano generator that rubs when providing the slip actuating force with finger.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described.Obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that obtains under the creative work prerequisite.
Secondly, the present invention is described in detail in conjunction with schematic diagram, and when the embodiment of the invention was described in detail in detail, for ease of explanation, described schematic diagram was example, and it should not limit the scope of protection of the invention at this.
The invention provides a kind ofly will move, friction nano generator simple in structure that mechanical energy that vibration etc. exists naturally is converted into electric energy, the power supply of coupling can be provided for microelectronic device.Friction nano generator of the present invention produces the phenomenon that surface charge shifts when having utilized the material contact that the polarity in friction electrode order there are differences, the mechanical energy of external force is converted into electric energy.
" friction electrode order " described in the present invention, refer to according to material the attraction degree of electric charge its ordering of carrying out, bi-material is in the moment of phase mutual friction, and negative electrical charge is transferred to the negative material surface of friction electrode order Semi-polarity from the material surface of friction electrode order Semi-polarity calibration on rubbing surface.Up to now, the mechanism that does not also have explanation electric charge that a kind of unified theory can be complete to shift it is generally acknowledged that this electric charge shifts relevant with the surface work function of material, and the transfer on contact-making surface realizes the electric charge transfer by electronics or ion.Need to prove, friction electrode order is a kind of statistics based on experience, be that bi-material differs far away in this sequence, the probability that the positive negativity of the electric charge that produces and this sequence are consistent after the contact is just larger, and actual result is subject to the impact of many factors, such as material surface roughness, ambient humidity with whether relative friction etc. is arranged.
" contact electric charge " described in the present invention, refer to the material that there are differences two kinds of friction electrode order polarity in contact friction and after separating its surface with electric charge, it is generally acknowledged that this electric charge only is distributed in the surface of material, the distribution depth capacity only is about 10 nanometers.Need to prove that the symbol of contact electric charge is the symbol of net charge, namely at the aggregation zone that may have negative electrical charge with some areas of the material surface that just contacts electric charge, but the symbol of whole surperficial net charge is for just.
Fig. 1 is rub a kind of typical structure of nano generator of the present invention.Comprise: the first frictional layer 10, contact the first conducting element 11 of placing, the second frictional layer 20 with the first frictional layer 10 lower surfaces, contact the second conducting element 21 of placement with the second frictional layer upper surface; The upper surface of the first frictional layer 10 contacts with the lower surface of the second frictional layer 20; Under the effect of external force, relative sliding can occur in the contact interface of described the first frictional layer 10 and the second frictional layer 20, and simultaneously contact area changes, thus by the first conducting element 11 and the second conducting element 21 to the external circuit output electrical signals.
For convenience of description, selection principle and the material ranges of principle of the present invention, each parts are described below with reference to the typical structure of Fig. 1, but these contents also not only are confined to embodiment shown in Figure 1 obviously, but can be used for all technical schemes disclosed in this invention.
In conjunction with Fig. 2 the rub operation principle of nano generator of the present invention is described.When having external force to make the lower surface generation relative sliding friction of the upper surface of the first frictional layer 10 and the second frictional layer 20, because the top surface of the first frictional layer 10 and the lower surface material of the second frictional layer 20 there are differences in friction electrode order, cause surface charge and shift (referring to Fig. 2 (a)), in order to shield owing to dislocation remains in the formed electric field of surface charge in the first frictional layer 10 and the second frictional layer 20, free electron in the first conducting element 11 will flow on the second conducting element 21 by external circuit, thereby produces an extrinsic current (referring to Fig. 2 (b)).When applying external force in the other direction, the relative sliding dislocation of the first frictional layer 10 or the second frictional layer 20 disappears, and two conducting elements restore to the original state, and the electronics in the second conducting element 21 flows back to the first conducting element 10, thereby provides a rightabout extrinsic current.And so forth, form the alternating-current pulse electric current.
Although the phenomenon of triboelectrification is familiar with by people already, also there is common recognition this area to the material category that triboelectrification can occur, often we know is that friction can play static, but for utilizing sliding friction to generate electricity and then being that the present invention proposes first with its device.By the operation principle that the present invention provides above, those skilled in the art can clearly realize that the working method of sliding friction nano generator, thereby can understand the selection principle of each component materials.Below provide the selectable range of each component materials of all technical schemes among applicable the present invention, when practical application, can do according to actual needs concrete selection, thereby reach the purpose of regulating generator output performance.
The first frictional layer 10 and the second frictional layer 20 are comprised of the material with differentiated friction electrical characteristics respectively, described differentiated friction electrical characteristics mean that the two is in different positions in friction electrode order, thereby so that the two can produce on the surface contact electric charge in the process that friction occurs.Conventional high molecular polymer all has the friction electrical characteristics, all can be used as the material of preparation the present invention's the first frictional layer 10 and the second frictional layer 20, enumerate some macromolecule polymer materials commonly used herein: polytetrafluoroethylene, dimethyl silicone polymer, polyimide film, the aniline-formaldehyde resin film, the polyformaldehyde film, ethyl cellulose film, polyamide film, the melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, the polyethylene glycol adipate film, the polydiallyl phthalate film, regenerated fiber sponge film, the elastic polyurethane body thin film, the styrene-acrylonitrile copolymer copolymer film, the styrene-butadiene-copolymer film, the staple fibre film, poly-methyl film, the methacrylic acid ester film, polyvinyl alcohol film, polyester film, the polyisobutene film, polyurethane flexible sponge film, pet film, polyvinyl butyral film, the phenolic resins film, the neoprene film, the butadiene-propylene copolymer film, the natural rubber film, the polyacrylonitrile film, poly-(vinylidene chloride-co-acrylonitrile) film or polyethylene the third diphenol carbonate thin film, polystyrene, polymethyl methacrylate, Merlon or polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polyvinylidene chloride, polyethylene, polypropylene, polyvinyl chloride.Reason as space is limited; can not carry out exhaustive to all possible material; only list several concrete polymeric materials herein from people's reference; but obviously these concrete materials can not become the restrictive factor of protection range of the present invention; because under the enlightenment of invention, the friction electrical characteristics that those skilled in the art has according to these materials are easy to select other similar materials.
With respect to insulator, semiconductor and metal all have the friction electrical characteristics that lose easily electronics, often are positioned at the place, end in the tabulation of friction electrode order.Therefore, semiconductor and metal also can be used as the raw material of preparation the first frictional layer 10 or the second frictional layer 20.Semiconductor commonly used comprises silicon, germanium; III and V compounds of group, such as GaAs, gallium phosphide etc.; II and VI compounds of group, such as cadmium sulfide, zinc sulphide etc.; And by III-V compounds of group and solid solution that II-the VI compounds of group forms, such as gallium aluminum arsenide, gallium arsenic phosphide etc.Except above-mentioned Crystalline Semiconductors, also have amorphous glass semiconductor, organic semiconductor etc.Non-conductive oxide, conductor oxidate and complex oxide also have the friction electrical characteristics, can form surface charge at friction process, therefore also can be used as frictional layer of the present invention, for example the oxide of manganese, chromium, iron, copper also comprises silica, manganese oxide, chromium oxide, iron oxide, cupric oxide, zinc oxide, BiO
2And Y
2O
3Metal commonly used comprises gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy that is formed by above-mentioned metal.Certainly, can also use other materials with conductive characteristic to serve as the baseplate material that loses easily electronics, for example indium tin oxide ITO.
Found through experiments, when the first frictional layer 10 and the second frictional layer 20 materials electronic capability when differing larger (namely the position in friction electrode order differs far away), the signal of telecommunication of generator output is stronger.So, can according to actual needs, select suitable material to prepare the first frictional layer 10 and the second frictional layer 20, to obtain better output effect.
Can also carry out physical modification to the first frictional layer 10 upper surfaces and/or the second frictional layer 20 lower surfaces, make its surface distributed that the micro structure array of micron or inferior micron dimension be arranged, to increase the contact area between the first frictional layer 10 and the second frictional layer 20, contact the quantity of electric charge thereby increase.Concrete method of modifying comprises photoengraving, chemical etching and plasma etching etc.Also can by nano material intersperse or the mode of coating realizes this purpose.
Also can carry out chemical modification to the first frictional layer 10 of being in contact with one another and/or the surface of the second frictional layer 20, can further improve electric charge in the transfer amount of Contact, thereby improve the power output of contact charge density and generator.Chemical modification is divided into again following two types:
A kind of method is for the first frictional layer 10 that is in contact with one another and the second frictional layer 20 materials, be that positive material surface is introduced easier betatopic functional group (namely by force to electron cloud) in polarity, perhaps introduce the functional group (strong electrophilic group) of the electronics that more is easy to get for negative material surface in polarity, can both further improve the transfer amount of electric charge when mutually sliding, thereby improve the power output of triboelectric charge density and generator.Comprise to electron cloud by force: amino, hydroxyl, alkoxyl etc.; Strong electrophilic group comprises: acyl group, carboxyl, nitro, sulfonic group etc.The introducing of functional group can the using plasma surface modification etc. conventional method.For example can make the gaseous mixture of oxygen and nitrogen under certain power, produce plasma, thereby introduce amino on the baseplate material surface.
Another method is to be that positive charge is introduced on positive baseplate material surface in polarity, and introduces negative electrical charge in polarity for negative baseplate material surface.Specifically can realize by the mode of chemical bonding.For example, can utilize the method for hydrolysis-condensation (English is abbreviated as sol-gel) to modify upper tetraethoxysilane (English is abbreviated as TEOS) at the PDMS substrate surface, and make it electronegative.Also can utilize the bond of gold-sulphur to modify the golden nanometer particle that upper surface contains softex kw (CTAB) at the metallic gold thin layer, because softex kw is cation, so can make whole substrate become positively charged.Those skilled in the art can select suitable decorative material and its bonding according to the receiving and losing electrons character of baseplate material and the kind of surface chemistry key, and to reach purpose of the present invention, therefore such distortion is all within protection scope of the present invention.
The present invention does not limit the first frictional layer 10 and the second frictional layer 20 must be hard material, also can select flexible material, because the hardness of material does not affect the sliding friction effect between the two, those skilled in the art can select according to actual conditions.The thickness of the first frictional layer 10 and the second frictional layer 20 has no significant effect enforcement of the present invention, the preferred frictional layer of the present invention is film, thickness is 100nm-5mm, preferred 1 μ m-2mm, more preferably 10 μ m-800 μ m, more preferably 20 μ m-500 μ m, these thickness all are suitable for technical schemes all among the present invention.
The first conducting element 11 and the second conducting element 21 are as two electrodes of generator, as long as possess the characteristic that to conduct electricity, can be selected from metal or conductive oxide, metal commonly used comprises gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy that is formed by above-mentioned metal, more preferably metallic film, for example aluminium film, golden film, copper film; Conductive oxide commonly used comprises the semiconductor of indium tin oxide ITO and ion doping type.Electrode layer preferably with corresponding substrate surface close contact, to guarantee the efficiency of transmission of electric charge, mode is with the surface filming of the mode of electric conducting material by deposition at corresponding substrate preferably; Concrete deposition process can be electron beam evaporation, plasma sputtering, magnetron sputtering or evaporation.
The first conducting element 11 can be to be connected with external circuit by wire or metallic film with being connected the mode that conducting element 21 is connected with external circuit.
Fig. 3 is not exclusively exemplary embodiments of contact of two substrates of the present invention.The major part of this embodiment is identical with embodiment shown in Figure 1, only the two difference is described herein.The upper surface less of embodiment the first frictional layer 10 shown in Figure 3, and the lower surface of its upper surface and the second frictional layer 20 all is prepared into the out-of-flatness surface, in the process of relative sliding, can form the variation of contact area after the two contact, thereby realize the purpose of outside output electrical signals.This embodiment can be used for relative position variable too small because of the upper surface of the first frictional layer 10 or the first frictional layer 10 and the second frictional layer 20 when smaller, the size of external force or substrate movably insufficient space so that the situation of the suitable signal of telecommunication of generator output, effectively control the contact area of the first frictional layer 10 and the second frictional layer 20 by the setting on out-of-flatness surface, and produced the required effective relative displacement of the signal of telecommunication.The surface area that those skilled in the art can predict the second frictional layer 20 hour also can adopt this mode to realize purpose of the present invention fully; and the setting of surface irregularity pattern also can be selected according to actual conditions, so these distortion are all within protection scope of the present invention.
Fig. 4 is the exemplary embodiments that substrate surface of the present invention is provided with micro-structural.The major part of this embodiment is identical with embodiment shown in Figure 1, only the two difference is described herein.Embodiment shown in Figure 4 is respectively equipped with micron-sized linear structure 12 and 22 at the upper surface of the first frictional layer 10 and the lower surface of the second frictional layer 20.In the first frictional layer 10 and process that the second frictional layer 20 contacts, its surperficial micro-structural is interted mutually or is overlapping, has greatly increased the area of contact friction, thus output performance that can the Effective Raise generator.For the concrete form of micro-structural, those skilled in the art can select conventional bar-shaped, wire or flower shape etc. according to preparation condition or actual needs.Although it is best that the effect of micro-structural is set simultaneously on the surface of two substrates, obviously only on the surface of a substrate micro-structural being set also can obtain similar effect.
Embodiment 1
It is the metallic copper thin layer of 100nm that the first conducting element adopts thickness, the first frictional layer employing thickness is 25 microns Teflon (polytetrafluoroethylene) film, it is the metallic aluminium thin layer of 100nm that the second frictional layer adopts thickness, the second conducting element is the indium tin oxide ito thin film, and the macro-size of these retes is 5cm * 7cm.Metallic copper thin layer and ito thin film layer are wired on the ammeter, the relatively complete overlapping placement that contacts of Teflon film and metallic aluminium film, then use with the finger of insulating gloves push-and-pull metallic copper thin layer repeatedly, make the reciprocal relative sliding of generating period between Teflon thin layer and the metallic aluminium thin layer, at ammeter short circuit current output is arranged, show the generator normal operation.It is luminous to drive 80 commercial LED bulbs with this generator, specifically sees the photo of Fig. 5.
Because polytetrafluoroethylene has extremely negative polarity in friction electrode order, and the polarity calibration of metallic aluminium in the electrode order, the combination of materials of present embodiment is conducive to improve the output of friction nano generator.
Embodiment 2
Take thickness as 50 microns, the dimethyl silicone polymer (English is abbreviated as PDMS) of 3cm * 8cm as the first frictional layer 10, with the silicon chip of identical macro-size as the second frictional layer, and silicon slice rotating applied the last layer photoresist, utilize the method for photoetching to form the length of side at the square window array of micron or inferior micron dimension at photoresist; Silicon chip after photoetching finished forms pyramidal sunk structure array through the chemical etching of overheated potassium hydroxide at the window place.And when silicon chip and PDMS bi-material contact concurrent looks under external force to slip, because PDMS has preferably elasticity, it can enter and fill the sunk structure of silicon chip surface, thus increased and silicon chip between the CONTACT WITH FRICTION area, can obtain better electric output effect.
Embodiment 3
Present embodiment is only done modification to polytetrafluoroethylene film on the basis of embodiment 1, other are all identical with embodiment 1, repeat no more herein.Adopt the inductively coupled plasma etching method to prepare nano-wire array in PolytetrafluoroethylFilm Film, at first deposit the gold of about 10 nanometer thickness with sputter at ptfe surface, afterwards, polytetrafluoroethylene film is put into the inductively coupled plasma etching machine, the one side that deposits gold is carried out etching, pass into O
2, Ar and CF
4Gas, flow is controlled at respectively 10sccm, 15sccm and 30sccm, pressure is controlled at 15mTorr, working temperature is controlled at 55 ℃, power with 400 watts produces plasma, 100 watts power comes accelerate plasma, carries out about 5 minutes etching, and the length that obtains being basically perpendicular to insulating thin layer is about 1.5 microns high molecular weight ptfe nanometer stick array.
Sliding friction nano generator of the present invention can utilize translational kinetic energy to make generator produce electric energy, for small-sized electric appliance provides power supply, and does not need the Power supply such as battery, is a kind of generator easy to use.In addition, friction nano generator preparation method of the present invention is easy, preparation cost is cheap, is a kind of friction nano generator and generating set that has wide range of applications.
The above only is preferred embodiment of the present invention, is not the present invention is done any pro forma restriction.Any those of ordinary skill in the art, do not breaking away from the technical solution of the present invention scope situation, all can utilize method and the technology contents of above-mentioned announcement that technical solution of the present invention is made many possible changes and modification, or be revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not break away from technical solution of the present invention according to any simple modification, equivalent variations and the modification that technical spirit of the present invention is done above embodiment, all still belongs in the scope of technical solution of the present invention protection.
Claims (22)
1. a sliding friction nano generator is characterized in that, comprising:
The first frictional layer;
The first conducting element that the below contact of described the first frictional layer is placed;
The second frictional layer;
The second conducting element that the top contact of described the second frictional layer is placed;
The lower surface of the upper surface of described the first frictional layer and described the second frictional layer is staggered relatively;
When externally applied forces makes the lower surface generation relative sliding friction of the upper surface of described the first frictional layer and described the second frictional layer and causes friction area to change, can be by described the first conducting element and the second conducting element to the external circuit output electrical signals.
2. generator as claimed in claim 1 is characterized in that, friction electrode order difference is arranged between the lower surface material of the top surface of described the first frictional layer and described the second frictional layer.
3. generator as claimed in claim 1 or 2 is characterized in that the upper surface of described the first frictional layer and/or the lower surface of the second frictional layer are insulating material or semi-conducting material.
4. generator as claimed in claim 3, it is characterized in that described insulating material is selected from polytetrafluoroethylene, dimethyl silicone polymer, polyimides, aniline-formaldehyde resin, polyformaldehyde, ethyl cellulose, polyamide, melamino-formaldehyde, the polyethylene glycol succinate, cellulose, cellulose ethanoate, polyethylene glycol adipate, polydiallyl phthalate, the regenerated fiber sponge, polyurethane elastomer, the styrene-acrylonitrile copolymer copolymer, styrene-butadiene-copolymer, staple fibre, poly-methyl, methacrylate, polyvinyl alcohol, polyester, polyisobutene, the polyurethane flexible sponge, PETG, polyvinyl butyral resin, phenolic resins, neoprene, butadiene-propylene copolymer, natural rubber, polyacrylonitrile, poly-(vinylidene chloride-co-acrylonitrile), polyethylene the third diphenol carbonate, polystyrene, polymethyl methacrylate, Merlon, polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polyvinylidene chloride, polyethylene, polypropylene or polyvinyl chloride.
5. generator as claimed in claim 3, it is characterized in that described semi-conducting material be selected from silicon, germanium, III and V compounds of group, II and VI compounds of group, by III-V compounds of group and the solid solution that II-the VI compounds of group forms, amorphous glass semiconductor and organic semiconductor.
6. generator as claimed in claim 5 is characterized in that described III and V compounds of group are selected from GaAs and gallium phosphide; Described II and VI compounds of group are selected from cadmium sulfide and zinc sulphide; Described oxide is selected from the oxide of manganese, chromium, iron or copper; Describedly be selected from gallium aluminum arsenide and gallium arsenic phosphide by III-V compounds of group and solid solution that II-the VI compounds of group forms.
7. generator as claimed in claim 1 or 2, it is characterized in that described frictional layer is non-conductive oxide, conductor oxidate or complex oxide, comprise silica, aluminium oxide, manganese oxide, chromium oxide, iron oxide, titanium oxide, cupric oxide, zinc oxide, BiO
2Or Y
2O
3
8. such as each described generator of claim 1-7, it is characterized in that the lower surface of described the first frictional layer upper surface and/or the second frictional layer is distributed with the micro-structural of micron or inferior micron dimension.
9. generator as claimed in claim 8 is characterized in that, described micro-structural is selected from nano wire, nanotube, nano particle, nanometer channel, micron groove, nanocone, micron cone, nanosphere and micron chondritic.
10. such as each described generator of claim 1-9, it is characterized in that the lower surface of described the first frictional layer upper surface and/or the second frictional layer has interspersing of nano material or coating.
11. such as each described generator of claim 1-10, it is characterized in that, the lower surface of described the first frictional layer upper surface and/or the second frictional layer is through chemical modification, so that be that positive material surface is introduced the functional group that loses easily electronics and/or introduced the functional group that obtains easily electronics for negative material surface in polarity in polarity.
12. generator as claimed in claim 11 is characterized in that, the described functional group that loses easily electronics comprises amino, hydroxyl or alkoxyl.
13. generator as claimed in claim 11 is characterized in that, the described functional group that obtains easily electronics comprises acyl group, carboxyl, nitro or sulfonic group.
14. such as each described generator of claim 1-13, it is characterized in that, the lower surface of described the first frictional layer upper surface and/or the second frictional layer is through chemical modification, so that be that positive material surface is introduced positive charge and/or introduced negative electrical charge in polarity for negative material surface in polarity.
15. generator as claimed in claim 14 is characterized in that, the mode that described chemical modification is introduced charged groups by chemical bonding realizes.
16., it is characterized in that described the first frictional layer or the second frictional layer are electric conducting material such as each described generator of claim 1-15.
17. generator as claimed in claim 16 is characterized in that described electric conducting material is selected from metal and conductive oxide.
18. generator as claimed in claim 17 is characterized in that described metal is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy that is formed by above-mentioned metal.
19., it is characterized in that described the first conducting element and/or the second conducting element are selected from metal and conductive oxide such as each described generator of claim 1-18.
20. generator as claimed in claim 19 is characterized in that described metal is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy that is formed by above-mentioned metal.
21. such as each described generator of claim 1-20, it is characterized in that described the first frictional layer and/or the second frictional layer are film.
22. such as each described generator of claim 1-21, it is characterized in that described the first conducting element and/or the second conducting element are film.
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| CN103523743A (en) * | 2013-10-28 | 2014-01-22 | 北京大学 | Miniature friction energy harvester and method for manufacturing same |
| CN103780136A (en) * | 2013-10-24 | 2014-05-07 | 国家纳米科学中心 | Rotary friction generator capable of outputting constant current |
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