CN103367628A - Piezoelectric film element and preparation method thereof - Google Patents
Piezoelectric film element and preparation method thereof Download PDFInfo
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- CN103367628A CN103367628A CN2012100969143A CN201210096914A CN103367628A CN 103367628 A CN103367628 A CN 103367628A CN 2012100969143 A CN2012100969143 A CN 2012100969143A CN 201210096914 A CN201210096914 A CN 201210096914A CN 103367628 A CN103367628 A CN 103367628A
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Abstract
The invention relates to a piezoelectric film element which comprises a piezoelectric film. The piezoelectric film comprises a first surface and a second surface arranged oppositely to the first surface. A first surface electrode is arranged at the first surface, and comprises a first induction-zone electrode and a first extraction electrode. A second surface electrode is arranged at the second surface, and comprises a second induction-zone electrode and a second extraction electrode extending out of the second induction-zone electrode. The thickness of each extraction electrode is lower than or equals to 20 micrometer and is greater than or equals to 3 micrometer, and the thickness of each induction-zone electrode is lower than or equals to 800 nanometer and is greater than or equals to 20 nanometer. The invention also relates to a preparation method for the piezoelectric film element. According to technical scheme of the invention, the piezoelectric film elements are higher in yield rate and lower in cost.
Description
Technical field
The present invention relates to a kind of piezoelectric film-type element and preparation method thereof.
Background technology
Piezoelectric membrane is the core material of making various acoustic-electrics, power electric transducer and actuator.Usually, for the piezoelectric membrane internal charge is conducted out, also need to form piezoelectric film-type element at the positive and negative surface electrode of two relative surface coverage of described piezoelectric membrane.In practical engineering application, in order to prevent the damage of surface electrode, also need described surface electrode is encapsulated, and get through the hole at the positive and negative extraction electrode of described piezoelectric membrane.Then, in described through hole, introduce metal terminal or rivet, metal terminal is contacted with the section of positive and negative surface electrode, can realize electrical connection between the positive and negative surface electrode by this metal terminal or rivet.
At present, the technique at piezoelectric membrane formation surface electrode is mainly silk-screen printing technique and coating process.Particularly, by silk-screen printing technique the silver slurry is printed on the piezoelectric membrane surface exactly and forms surface electrode, or adopt coating process that the metals such as aluminium, copper (corronil) are formed on the surperficial surface electrode that forms of piezoelectric membrane.
The surface electrode that adopts silk-screen printing technique to form, its thickness is thicker usually, thus so that during the piezoelectric membrane of metal terminal after piercing through encapsulation, can be larger with the section contact area of surface electrode, thus good with electrically contacting of surface electrode.Yet because thickness is thicker, cost is higher by the formed surface electrode of silk-screen printing technique.The surface electrode that adopts coating process to form only has tens usually to the hundreds of nanometer thickness, and cost is lower.Yet, the surface electrode that is formed by coating process is because thinner thickness, thereby so that during the piezoelectric membrane of metal terminal after piercing through encapsulation, less with the section contact area of surface electrode, easily cause metal terminal and surface electrode poor electric contact, cause product yield to reduce.
Summary of the invention
In view of this, the invention provides and a kind ofly can improve the preparation method that product yield can reduce again piezoelectric film-type element and this piezoelectric film-type element of cost.
A kind of piezoelectric film-type element, it comprises a piezoelectric membrane, this piezoelectric membrane comprises first surface and the second surface that is oppositely arranged.One first surface electrode is arranged on described first surface, and described first surface electrode comprises that one first induction zone electrode and one first extraction electrode extend from described the first induction zone electrode.One second surface electrode is arranged on described second surface, and described second surface electrode comprises that one second induction zone electrode and one second extraction electrode extend from described the second induction zone electrode.Described the first induction zone electrode is symmetrical arranged with the relative piezoelectric membrane of described the second induction zone electrode, described the first extraction electrode and the projection interval setting of described the second extraction electrode on described piezoelectric membrane.The thickness of described the first extraction electrode less than or equal to 20 microns more than or equal to 3 microns, the thickness of described the first induction zone electrode less than or equal to 800 nanometers more than or equal to 20 nanometers.The thickness of described the second extraction electrode less than or equal to 20 microns more than or equal to 3 microns, the thickness of described the second induction zone electrode less than or equal to 800 nanometers more than or equal to 20 nanometers.
A kind of preparation method of piezoelectric film-type element, its step comprises: a piezoelectric membrane is provided, this piezoelectric membrane comprises first surface and the second surface that is oppositely arranged, define one first induction region and one first at described first surface and draw the zone, define one second induction region and one second at described second surface and draw the zone, described the first induction region described piezoelectric membrane relative to the second induction region is symmetrical arranged, and described first draws zone and second draws the relative described piezoelectric membrane in zone and be symmetrical arranged; One first mask is set covers described first and draw the zone, one second mask is set covers described second and draw the zone; Form one first induction zone electrode at described the first induction region, form one second induction zone electrode at described the second induction region, described the first induction zone electrode described piezoelectric membrane relative to the second induction zone electrode is symmetrical arranged; Remove described the first mask and the second mask; Draw the zone described first and form one first extraction electrode, described the first extraction electrode and described the first induction zone electrode electrically contact, draw the zone described second and form one second extraction electrode, described the second extraction electrode and described the second induction zone electrode electrically contact, and make described the first extraction electrode and the projection interval setting of described the second extraction electrode on described piezoelectric membrane, and make the thickness of described the first extraction electrode greater than the thickness of described the first induction zone electrode, make the thickness of described the second extraction electrode greater than the thickness of described the second induction zone electrode.
Compared with prior art, piezoelectric film-type element provided by the invention, the thickness of its first extraction electrode and the second extraction electrode is larger, so that during the piezoelectric membrane of metal terminal after piercing through encapsulation, can have larger contact area with the section of the first extraction electrode and the second extraction electrode, thereby good with electrically contacting of first, second surface electrode, the product yield of raising piezoelectric film-type element.In addition, the first induction zone electrode in the described piezoelectric film-type element and the thickness of the second induction zone electrode are less, thereby can save the cost of material of first, second surface electrode, and then save the cost of piezoelectric film-type element.That is, piezoelectric film-type element provided by the invention can have higher product yield, can have lower cost again.Preparation method by piezoelectric film-type element provided by the invention, can realize forming less first, second induction zone electrode and first, second the larger extraction electrode of thickness of thickness in the zones of different of piezoelectric membrane, thereby so that can have higher product yield by the piezoelectric film-type element of the method preparation, can have lower cost again.Simultaneously, the preparation method's of described piezoelectric film-type element technique is comparatively simple, easily realizes, is fit in enormous quantities, low-cost production.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of specification, and for above and other objects of the present invention, feature and advantage can be become apparent, below especially exemplified by embodiment, and the cooperation accompanying drawing, be described in detail as follows.
Description of drawings
Fig. 1 is the structural representation of the piezoelectric film-type element that provides of first embodiment of the invention.
Fig. 2 is the structural representation at another visual angle of piezoelectric film-type element shown in Figure 1.
Fig. 3 is the schematic diagram of piezoelectric membrane first surface in the piezoelectric film-type element shown in Figure 1.
Fig. 4 is the schematic diagram of piezoelectric membrane second surface in the piezoelectric film-type element shown in Figure 1.
Fig. 5 is the structural representation that inserts metal terminal in piezoelectric film-type element shown in Figure 1.
Fig. 6 is the structural representation of another piezoelectric film-type element of providing of second embodiment of the invention.
Fig. 7 is the structural representation of another piezoelectric film-type element of providing of third embodiment of the invention.
Fig. 8 is the preparation flow figure of the piezoelectric film-type element that provides of first embodiment of the invention.
Embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, piezoelectric film-type element that foundation the present invention is proposed and preparation method thereof is described in detail as follows:
See also Fig. 1 and Fig. 2, be the piezoelectric film-type element 100 that first embodiment of the invention provides, it comprises a piezoelectric membrane 10, a first surface electrode 20 and a second surface electrode 30.
Described piezoelectric membrane 10 is prepared from by the dielectric with piezoelectric effect, and described piezoelectric membrane 10 comprises copolymer p (VDF+TrFE) piezoelectric membrane, the piezo-electric electret thin film of Kynoar (PVDF) piezoelectric membrane, Kynoar and trifluoro-ethylene.Described piezoelectric membrane 10 is a film like structures, has the first surface 11 and the second surface 12 that are oppositely arranged.Please further referring to Fig. 3 and Fig. 4, define described first surface 11 and have one first induction region 111 and one first and draw zone 112.Define described second surface 12 have one second induction region 121 and one second draw the zone 122.Described the first induction region 111 is symmetrical arranged with described the second induction region 121 relative piezoelectric membranes 10, and described first draws zone 112 and described second draws regional 122 relative piezoelectric membranes 10 and be symmetrical arranged.
Described first surface electrode 20 is separately positioned on described first surface 11 and second surface 12 with second surface electrode 30, is used for described piezoelectric membrane 10 internal charge are conducted out.Described first surface electrode 20 comprises one first induction zone electrode 21 and one first extraction electrode 22.Described the first induction zone electrode 21 is arranged on described the first induction region 111.Described the first extraction electrode 22 extends and is arranged on described first from described the first induction zone electrode 21 draws zone 112.Described second surface electrode 30 comprises one second induction zone electrode 31 and one second extraction electrode 32.Described the second induction zone electrode 31 is arranged on described the second induction region 121.Described the second extraction electrode 32 extends and is arranged on described second from described the second induction zone electrode 31 draws zone 122.Described the first induction zone electrode 21 is symmetrical arranged with described the second induction zone electrode 31 relative piezoelectric membranes 10.Described the first extraction electrode 22 and projection interval and the corresponding setting of described the second extraction electrode 32 on described piezoelectric membrane 10.
The thickness of described the first induction zone electrode 21 less than or equal to 800 nanometers more than or equal to 20 nanometers.Preferably, the thickness of described the first induction zone electrode 21 is 200 nanometers.The thickness of described the first extraction electrode 22 less than or equal to 20 microns more than or equal to 3 microns.Preferably, the thickness of described the first extraction electrode 22 is 10 microns.The thickness of described the second induction zone electrode 31 less than or equal to 800 nanometers more than or equal to 20 nanometers.Preferably, the thickness of described the second induction zone electrode 31 is 200 nanometers.The thickness of described the second extraction electrode 32 less than or equal to 20 microns more than or equal to 3 microns.Preferably, the thickness of the thickness of described the second extraction electrode 32 is 10 microns.
See also Fig. 5, because described the first extraction electrode 22 and projection interval and the corresponding setting of described the second extraction electrode 32 on described piezoelectric membrane 10, thereby can respectively insert a metal terminal 200 with described the second extraction electrode 32 at described the first extraction electrode 22, and this first extraction electrode 22 and section and the described metal terminal 200 of described the second extraction electrode 32 are electrically contacted.The electric charge that is appreciated that described piezoelectric membrane 10 can be derived by this metal terminal 200.Structure and the shape of described metal terminal 200 are not limit, as long as can be electrically connected with the section of described the second extraction electrode 32 with the first extraction electrode 22.
Piezoelectric film-type element 100 provided by the invention, its first surface electrode 20 and second surface electrode 30 are according to different functional areas, and its thickness is also different.Particularly, the thickness of first, second surface induction electrode 21,31 that is used for conducting piezoelectric membrane 10 electric charges in first, second surface electrode 20,30 is less, thereby so that first, second surface electrode 20,30 have preferably piezoelectric property and can save raw material.Be used for forming first, second extraction electrode 22 that section contacts with metal terminal 200 at it, 32 thickness is then larger, thereby so that described metal terminal is when piercing through described piezoelectric membrane 10, can have larger contact area with the section of the first extraction electrode 22 and the second extraction electrode 32, thereby with first, second surface electrode 20,30 have good electrically contacting, and improve the product yield of piezoelectric film-type element 100.
See also Fig. 6, be the piezoelectric film-type element 300 that second embodiment of the invention provides, it comprises a piezoelectric membrane 310, a first surface electrode 320 and a second surface electrode 330.Described first surface electrode 320 is separately positioned on two surfaces that described piezoelectric membrane 310 is oppositely arranged with second surface electrode 330.
Described first surface electrode 320 comprises one first induction zone electrode 321 and one first extraction electrode 322.Described second surface electrode 330 comprises one second induction zone 331 and one second extraction electrode 332.Piezoelectric film-type element 300 in the present embodiment and shape and the function of the piezoelectric film-type element 100 among the first embodiment are basic identical, its main distinction is, in the present embodiment, the first induction zone electrode 321 in the first surface electrode 320 is a plurality of block type electrodes, and these a plurality of block type electrodes are in the horizontal of piezoelectric membrane 310 and vertically be discontinuous distribution.That is, there is not block type electrode can pass through described piezoelectric membrane 310.The first induction zone electrode 21 in the surface electrode 20 among the first embodiment laterally or vertically is being one continuous then, and direction (laterally or vertically) can connect piezoelectric membrane 10 therein.
Be appreciated that, because described the second induction zone electrode 332 and the first induction zone electrode 331 relative piezoelectric membrane 310 symmetries, therefore, the difference of described the second induction zone electrode 332 and the second induction zone electrode 32, basic identical with the difference of the first induction zone electrode 331 and the first induction zone electrode 31.
See also Fig. 7, be the piezoelectric film-type element 400 that third embodiment of the invention provides, it comprises a piezoelectric membrane 410, a first surface electrode 420 and a second surface electrode 430.Described first surface electrode 420 is separately positioned on two surfaces that described piezoelectric membrane 410 is oppositely arranged with second surface electrode 430.
Described first surface electrode 420 comprises one first induction zone electrode 421 and one first extraction electrode 422.Described second surface electrode 430 comprises one second induction zone 431 and one second extraction electrode 432.Piezoelectric film-type element 400 in the present embodiment and shape and the function of the piezoelectric film-type element 300 among the second embodiment are basic identical, its main distinction is, in the present embodiment, the first induction zone electrode 421 in the first surface electrode 420 is a plurality of round shape electrodes, and these a plurality of round shape electrodes are in the horizontal of piezoelectric membrane 410 and vertically be discontinuous distribution.And the first induction zone electrode 321 in the surface electrode 320 among the second embodiment is a plurality of block type electrodes.
Be appreciated that, because described the second induction zone electrode 432 and the first induction zone electrode 431 relative piezoelectric membrane 410 symmetries, therefore, the difference of described the second induction zone electrode 432 and the second induction zone electrode 332, basic identical with the difference of the first induction zone electrode 431 and the first induction zone electrode 331.
Please referring to Fig. 8, the preparation method of the piezoelectric film-type element 100 that first embodiment of the invention provides may further comprise the steps:
Step S110 provides a piezoelectric membrane 10, and this piezoelectric membrane 10 comprises first surface 11 and the second surface 12 that is oppositely arranged.Draw zone 112 at described first surface 11 definition one first induction regions 111 and one first, draw zone 122 at described second surface 12 definition one second induction regions 121 and one second.Described the first induction region 111 is symmetrical arranged with the second induction region 121 relative described piezoelectric membranes 10, and described first draws zone 112 and second draws regional 122 relative described piezoelectric membranes 10 and be symmetrical arranged.Described piezoelectric membrane 10 comprises copolymer piezoelectric membrane, the piezo-electric electret thin film of poly meta fluoroethylene piezoelectric film, Kynoar and trifluoro-ethylene.
Be appreciated that before step S110, also can further comprise the step of described piezoelectric membrane 10 being carried out corona treatment, so that described piezoelectric membrane 10 has better piezoelectric property.
Step S120 arranges one first mask 40 and covers described the first induction region 111, one second mask 50 is set covers described the second induction region 121.For fixing with piezoelectric membrane 10, a surface of described the first mask 40 is provided with viscose, and described the first mask 40 is bonded in described the first induction region 111 by this viscose.One surface of described the second mask 50 is provided with viscose, and described the second mask 50 is bonded in described the second induction region 121 by this viscose.
Step S 130, form one first induction zone electrode 21 at described the first induction region 111, form one second induction zone electrode 31 at described the second induction region 121, described the first induction zone electrode 21 is symmetrical arranged with the second induction zone electrode 31 relative described piezoelectric membranes 10.Described the first induction zone electrode 21 is formed on described the first induction region 111 by coating process, and described the second induction zone electrode 31 is formed on described the second induction region 121 by coating process.Described coating process comprises vaporation-type coating process and magnetron sputtering formula coating process.Be appreciated that owing to adopting coating process, described first, second induction zone electrode 21,31 thickness is easily accomplished thinner, and more even, thereby so that described piezoelectric film-type element 100 has preferably piezoelectric property, and can save first, second induction zone electrode 21,31 costs of material of preparation.Usually, the thickness of described the first induction zone electrode 21 and the second induction zone electrode 31 all less than or equal to 800 nanometers more than or equal to 20 nanometers.Preferably, the thickness of first, second induction zone electrode 21,31 is 200 nanometers.
Step S140 removes described the first mask 40 and the second mask 50.Be appreciated that, because the coverage of the first mask 40 and the second mask 50, described first, second are drawn zone 112,122 and are not coated with electrode, thereby be convenient to draw zone 112,122 at described first, second and further form respectively first, second extraction electrode 22,32.
Step S150 draws zone 112 described first and forms one first extraction electrode 22, and described the first extraction electrode 22 electrically contacts with described the first induction zone electrode 21.Draw zone 122 described second and form one second extraction electrode 32, described the second extraction electrode 32 electrically contacts with described the second induction zone electrode 21, and makes described the first extraction electrode 22 and the projection interval setting of described the second extraction electrode 32 on described piezoelectric membrane 10.Make the thickness of described the first extraction electrode 22 greater than the thickness of described the first induction zone electrode 21, make the thickness of described the second extraction electrode 32 greater than the thickness of described the second induction zone electrode 31.Described the first extraction electrode 22 and the second extraction electrode 32 by silk-screen printing technique be respectively formed at described first draw the zone 112 and second draw the zone 122.Preferably, described the first extraction electrode 22 and the second extraction electrode 32 mode by silk screen printing silver slurry or carbon slurry is respectively formed at described first and draws zone 112 and second and draw zone 122.For described the first extraction electrode 22 and the second extraction electrode 32 are fixed on the piezoelectric membrane 10 better, can further include following steps: the piezoelectric membrane 10 of printed silver slurry or carbon slurry is placed on an oven for baking.
Be appreciated that, owing to adopting silk-screen printing technique, described first, second induction zone electrode 21,31 thickness is easily accomplished thicker, so that during the piezoelectric membrane of metal terminal after piercing through encapsulation, can have larger contact area with the section of the first extraction electrode and the second extraction electrode, thus good with electrically contacting of first, second surface electrode, the product yield of raising piezoelectric film-type element.Usually, the thickness of described the first extraction electrode 22 and the second extraction electrode 32 all less than or equal to 20 microns more than or equal to 3 microns.Preferably, the thickness of described first, second extraction electrode 22,32 is 10 microns.
Preparation method by piezoelectric film-type element 100 provided by the invention, can realize forming first, second less induction zone electrode 21 of thickness in the zones of different of piezoelectric membrane 10,22 and first, second larger extraction electrode 31 of thickness, 32, thereby so that can have higher product yield by the piezoelectric film-type element 100 of the method preparation, can have lower cost again.Simultaneously, the preparation method of described piezoelectric film-type element 100 is by selecting coating process to form first, second induction zone electrode 21,22, can make described first, second induction zone electrode 21,22 thickness is easily accomplished thinner and well-balanced, thereby improves the piezoelectric property of piezoelectric film-type element 100 and reduce the material cost that improves piezoelectric film-type element 100.By selecting silk-screen printing technique to form first, second extraction electrode 31,32, the thickness of described first, second extraction electrode 31,32 is easily accomplished thicker, thereby be improved the product yield of piezoelectric film-type element 100.To sum up, preparation method's technique of piezoelectric film-type element 100 provided by the invention is comparatively simple, easily realizes, is fit in enormous quantities, low-cost production.
The above, only be embodiments of the invention, be not that the present invention is done any pro forma restriction, although the present invention discloses as above with embodiment, yet be not to limit the present invention, any those skilled in the art, within not breaking away from the technical solution of the present invention scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be not break away from the technical solution of the present invention content, any simple modification that foundation technical spirit of the present invention is done above embodiment, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (10)
1. piezoelectric film-type element, it comprises:
One piezoelectric membrane, this piezoelectric membrane comprise first surface and the second surface that is oppositely arranged;
One first surface electrode is arranged on described first surface, and described first surface electrode comprises that one first induction zone electrode and one first extraction electrode extend from described the first induction zone electrode;
One second surface electrode is arranged on described second surface, and described second surface electrode comprises that one second induction zone electrode and one second extraction electrode extend from described the second induction zone electrode;
Described the first induction zone electrode is symmetrical arranged with the relative piezoelectric membrane of described the second induction zone electrode, described the first extraction electrode and the projection interval setting of described the second extraction electrode on described piezoelectric membrane;
It is characterized in that, the thickness of described the first extraction electrode less than or equal to 20 microns more than or equal to 3 microns, the thickness of described the first induction zone electrode less than or equal to 800 nanometers more than or equal to 20 nanometers, the thickness of described the second extraction electrode less than or equal to 20 microns more than or equal to 3 microns, the thickness of described the second induction zone electrode less than or equal to 800 nanometers more than or equal to 20 nanometers.
2. the preparation method of a piezoelectric film-type element, its step comprises:
One piezoelectric membrane is provided, this piezoelectric membrane comprises first surface and the second surface that is oppositely arranged, define one first induction region and one first at described first surface and draw the zone, define one second induction region and one second at described second surface and draw the zone, described the first induction region described piezoelectric membrane relative to the second induction region is symmetrical arranged, and described first draws zone and second draws the relative described piezoelectric membrane in zone and be symmetrical arranged;
One first mask is set covers described first and draw the zone, one second mask is set covers described second and draw the zone;
Form one first induction zone electrode at described the first induction region, form one second induction zone electrode at described the second induction region, described the first induction zone electrode described piezoelectric membrane relative to the second induction zone electrode is symmetrical arranged;
Remove described the first mask and the second mask;
Draw the zone described first and form one first extraction electrode, described the first extraction electrode and described the first induction zone electrode electrically contact, draw the zone described second and form one second extraction electrode, described the second extraction electrode and described the second induction zone electrode electrically contact, and make described the first extraction electrode and the projection interval setting of described the second extraction electrode on described piezoelectric membrane, and make the thickness of described the first extraction electrode greater than the thickness of described the first induction zone electrode, make the thickness of described the second extraction electrode greater than the thickness of described the second induction zone electrode.
3. the preparation method of a piezoelectric film-type element as claimed in claim 2 is characterized in that, before described the first mask is set, further comprises the steps: described piezoelectric membrane is carried out corona treatment.
4. the preparation method of a piezoelectric film-type element as claimed in claim 2 is characterized in that, described piezoelectric membrane comprises copolymer piezoelectric membrane, the piezo-electric electret thin film of poly meta fluoroethylene piezoelectric film, Kynoar and trifluoro-ethylene.
5. the preparation method of a piezoelectric film-type element as claimed in claim 2, it is characterized in that, one surface of described the first mask is provided with viscose, described the first mask is bonded in described first by this viscose and draws the zone, one surface of described the second mask is provided with viscose, and described the second mask is bonded in described second by this viscose and draws the zone.
6. the preparation method of a piezoelectric film-type element as claimed in claim 2, it is characterized in that, described the first induction zone electrode is formed on described the first induction region by coating process, and described the second induction zone electrode is formed on described the second induction region by coating process.
7. the preparation method of a piezoelectric film-type element as claimed in claim 6 is characterized in that, described coating process comprises vaporation-type coating process and magnetron sputtering formula coating process.
8. the preparation method of a piezoelectric film-type element as claimed in claim 2 is characterized in that, described the first extraction electrode and the second extraction electrode are respectively formed at described first by silk-screen printing technique and draw zone and second and draw the zone.
9. the preparation method of a piezoelectric film-type element as claimed in claim 8 is characterized in that, described the first extraction electrode and the second extraction electrode mode by silk screen printing silver slurry or carbon slurry of stating is respectively formed at described first and draws zone and second and draw the zone.
10. the preparation method of a piezoelectric film-type element as claimed in claim 2, it is characterized in that, the thickness of described the first extraction electrode and the second extraction electrode all less than or equal to 20 microns more than or equal to 3 microns, the thickness of described the first induction zone electrode and the second induction zone electrode all less than or equal to 800 nanometers more than or equal to 20 nanometers.
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| CN104347791A (en) * | 2014-08-06 | 2015-02-11 | 贝骨新材料科技（上海）有限公司 | Piezoelectric electret film element and preparing method of piezoelectric electret film element |
| CN106848051A (en) * | 2016-12-23 | 2017-06-13 | 深圳市豪恩声学股份有限公司 | Mechanical energy harvester and preparation method thereof |
| CN108336983A (en) * | 2017-01-17 | 2018-07-27 | 日本电波工业株式会社 | Piezoelectric vibration piece and piezoelectric element |
| CN112226867A (en) * | 2020-08-19 | 2021-01-15 | 西安工程大学 | Method for preparing super-soft piezoelectric PVDF yarn |
| CN112538182A (en) * | 2020-12-03 | 2021-03-23 | 江西欧迈斯微电子有限公司 | Piezoelectric film, preparation method thereof, fingerprint identification module and electronic equipment |
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| CN1819293A (en) * | 2005-12-28 | 2006-08-16 | 中国科学院长春应用化学研究所 | Piezoelectric thin-film sensor with vinylidene difluoride and production thereof |
| EP2086031A2 (en) * | 2008-01-30 | 2009-08-05 | NGK Insulators, Ltd. | Piezoelectric/electrostrictive film element and method manufacturing the same |
| CN102044625A (en) * | 2009-10-10 | 2011-05-04 | 精量电子（深圳）有限公司 | Electrode for piezoelectric film ultrasonic sensor |
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| CN1819293A (en) * | 2005-12-28 | 2006-08-16 | 中国科学院长春应用化学研究所 | Piezoelectric thin-film sensor with vinylidene difluoride and production thereof |
| EP2086031A2 (en) * | 2008-01-30 | 2009-08-05 | NGK Insulators, Ltd. | Piezoelectric/electrostrictive film element and method manufacturing the same |
| CN102044625A (en) * | 2009-10-10 | 2011-05-04 | 精量电子（深圳）有限公司 | Electrode for piezoelectric film ultrasonic sensor |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104347791A (en) * | 2014-08-06 | 2015-02-11 | 贝骨新材料科技（上海）有限公司 | Piezoelectric electret film element and preparing method of piezoelectric electret film element |
| CN104347791B (en) * | 2014-08-06 | 2016-11-23 | 贝骨新材料科技（上海）有限公司 | Piezo-electric electret thin film element and preparation method thereof |
| CN106848051A (en) * | 2016-12-23 | 2017-06-13 | 深圳市豪恩声学股份有限公司 | Mechanical energy harvester and preparation method thereof |
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| CN108336983A (en) * | 2017-01-17 | 2018-07-27 | 日本电波工业株式会社 | Piezoelectric vibration piece and piezoelectric element |
| CN108336983B (en) * | 2017-01-17 | 2022-11-08 | 日本电波工业株式会社 | Piezoelectric vibrating reed and piezoelectric device |
| CN112226867A (en) * | 2020-08-19 | 2021-01-15 | 西安工程大学 | Method for preparing super-soft piezoelectric PVDF yarn |
| CN112538182A (en) * | 2020-12-03 | 2021-03-23 | 江西欧迈斯微电子有限公司 | Piezoelectric film, preparation method thereof, fingerprint identification module and electronic equipment |
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