CN103364465A - Sensor device and method for analyzing fluid component - Google Patents
Sensor device and method for analyzing fluid component Download PDFInfo
- Publication number
- CN103364465A CN103364465A CN2013101124242A CN201310112424A CN103364465A CN 103364465 A CN103364465 A CN 103364465A CN 2013101124242 A CN2013101124242 A CN 2013101124242A CN 201310112424 A CN201310112424 A CN 201310112424A CN 103364465 A CN103364465 A CN 103364465A
- Authority
- CN
- China
- Prior art keywords
- sensor
- ingredient
- signal
- filtrator
- sensor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0022—General constructional details of gas analysers, e.g. portable test equipment using a number of analysing channels
- G01N33/0024—General constructional details of gas analysers, e.g. portable test equipment using a number of analysing channels a chemical reaction taking place or a gas being eliminated in one or more channels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
- G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—Specially adapted to detect a particular component
- G01N33/0037—Specially adapted to detect a particular component for NOx
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Abstract
The invention relates to a sensor device (100) for analyzing fluid components. The sensor device (100) is provided with a first sensor (102), a second sensor (104) and a filter (200). The first sensor (102) is formed to detect the component, the second sensor (104) is formed to also detect the component, and the second sensor (104) is arranged to be close to the first sensor (102). The filter (200) is formed to enable the component to be away from the second sensor (104).
Description
Technical field
The present invention relates to for the sensor device of analysing fluid ingredient and the method that is used for the analysing fluid ingredient.
Background technology
DE 101 61 213 A1 have described a kind of gas sensor.This gas sensor has two fet structures (measurement field effect transistor and reference field effect transistor).By for example change the work function of sensitive material via the molecule at sensitive material Adsorption on Surface material, the drain current in the measurement field effect transistor passage can be affected.
Summary of the invention
Under this background, utilize the present invention to introduce according to the sensor device that is used for the analysing fluid ingredient of main claim and the method that is used for the analysing fluid ingredient.Favourable expansion scheme obtains from corresponding dependent claims and following description.
The sensitivity of gas sensor increases with temperature and changes.Yet therefore can use with gas to be analyzed and separate the reference sensor that is placed under the identical as far as possible environmental baseline.Under the condition of using the reference sensor signal, the signal of gas sensor can be corrected.
Also can experience such as the sensor of sensor crystal pipe aging, this aging impact that is subjected to the chemico-physical properties of fluid to be analyzed.Therefore, the signal of sensor is because aging can the change.This effect can obtain identification by using reference sensor.This reference sensor can be advantageously separates with the ingredient to be detected of fluid.Can not cause that the fluid ingredient of signal may arrive reference sensor at reference sensor, so that the reference sensor image sensor is aging like that.Advantageously, can improve measuring accuracy by means of the aging sensor that can be compensated, because can realize less measuring uncertainty.
The sensor device that is used for the analysing fluid ingredient has following characteristics:
Be used for surveying the first sensor of ingredient;
Be used for surveying the second sensor of ingredient, wherein the second sensor is arranged to first sensor adjacent; With
Filtrator, it constitutes be used to making ingredient away from the second sensor.
Fluid for example refers to the waste gas of automotive internal combustion engines.Therefore, this sensor device for example can use in motor vehicle.In addition, fluid can refer to air or breathing gas.Therefore, this sensor device for example can be used as the air analysis system and uses, and analyzes in particular for the medical science breathe air.This sensor device can be understood as the space of at least two sensors and arranges.Sensor can be chemosensitive sensor, for example with transistorized form.Ingredient to be detected can refer to the species of fluid.Except ingredient to be detected, fluid can also have at least one other ingredient.Sensor can constitute at least one that can not survey in the other ingredient.Sensor can be arranged in the space of available fluid loading.The structure of first sensor can be corresponding with the structure of the second sensor.First sensor can be arranged in the second sensor next door at carrier.Filtrator can be mechanical type or catalysis type filtrator.This filtrator can be porous layer.By filtrator, the sensing surface of the second sensor can separate with ingredient, so that ingredient can only be surveyed by first sensor, surveys and can not pass through the second sensor.Sensor can constitute for output sensor signal respectively.By the comparison of sensor signal, cause the disturbing effect of the sensor signal distortion of first sensor to be compensated.Especially can be identified the disturbing effect that the impact of first sensor causes by ingredient.
Sensor can be chemosensitive field effect transistor (ChemFET).In order to survey the chemical species in the fluid, chemosensitive field effect transistor can have the chemosensitive sensor cover as gate electrode, and it is pre catalysis type.Atom and/or molecule from the species of fluid can gather at sensor cover, to affect the electromotive force of gate electrode.This influence of electric potential transistorized current flowing of flowing through.This current flowing can be the yardstick of the concentration of species in the fluid, because the concentration balance of species in the atom that gathers and/or molecular amounts and the fluid.
First sensor and the second sensor can constitute at least one other ingredient of surveying fluid.Filtrator can also constitute be used to making at least one other ingredient away from the second sensor.
This filtrator can not can be passed through by the fluid ingredient of first sensor and the detection of the second sensor at least one.This not detectable ingredient can cause identical catabiosis and therefore change in the same manner the sensitivity of sensor, reduce especially in the same manner the sensitivity of sensor on two sensors.Whereby, when proofreading and correct the signal of first sensor, can realize larger reliability.
This filtrator can be arranged on the sensor cover of the second sensor.This filtrator can directly link to each other with described sensor cover.This filtrator can also link to each other with described sensor cover via for example middle layer.By arranging filtrator at described sensor cover, this filtrator can directly be applied during the manufacture process of sensor or sensor device.
This filtrator can constitute can not be by the fluidic species of first sensor and the detection of the second sensor be used to ingredient is converted to.For this reason, this filtrator can have the material of catalytic action.Not detectable fluidic species can be chemical species, and sensor does not have acceptor or susceptibility to these chemical species.
This filtrator can constitute be used to the additional ingredient that makes fluid gather and will described additional ingredient and ingredient be combined at least one can not be by the fluidic species of first sensor and the detection of the second sensor.This filtrator can also constitute be used to making ingredient split into a plurality of not detectable species.
This filtrator can constitute be used to making ingredient chemical combination.When ingredient contacted with filtrator, this filtrator can be extracted ingredient out from fluid.This filtrator can be with attraction force acts in ingredient.
This filtrator can constitute for impacting and the release ingredient in response to cleaning.Cleaning impact for example can be thermal shock.This ingredient can " burnout " from filtrator.By discharging ingredient, filtrator can be regenerated.
This sensor device can have another filtrator, this another filtrator constitutes be used at least one the other ingredient that makes fluid away from the second sensor, and wherein first sensor and the second sensor constitute for surveying at least one other ingredient.For example ingredient can produce signal in combination with other ingredient at the first sensor place.Another filtrator can be arranged on this filtrator.Another filtrator can have the structure dissimilar with described filtrator.For example another filtrator can be mechanical type filter, and described filtrator for example is the catalysis type filtrator.
This sensor device can have analytical equipment, and this analytical equipment links to each other with the second sensor with first sensor, and the reference signal that constitutes be used to the measuring-signal that makes first sensor and the second sensor makes up, to obtain the measuring-signal of correction.Analytical equipment can be the processor of processing signals.This analytical equipment can be arranged in the common member with first sensor and the second sensor.
The method that is used for the analysing fluid ingredient has following steps:
Determine to have the measuring-signal of the distinctive component of ingredient and non-distinctive component, the wherein concentration of ingredient in the distinctive representation in components fluid of this ingredient, and at least a disturbing effect of this non-distinctive representation in components;
Determine to have the reference signal of non-distinctive component; With
Multiple measurement signal and reference signal are to obtain the signal of expression fluid ingredient.
Disturbing effect is appreciated that the aging signal quality deteriorates that causes of serving as reasons.
Description of drawings
The below exemplarily elaborates the present invention with reference to the accompanying drawings.
Fig. 1 shows the theory diagram according to the sensor device that is used for the analysing fluid ingredient of one embodiment of the invention;
Fig. 2 to Fig. 5 shows the diagram according to the sensor device that is used for the analysing fluid ingredient of the embodiment of the invention;
Fig. 6 shows the process flow diagram according to the method that is used for the analysing fluid ingredient of one embodiment of the invention; With
Fig. 7 a to 7c shows according to the input signal of the method that is used for the analysing fluid ingredient of one embodiment of the invention and the state diagram of output signal.
Embodiment
In the following description of the preferred embodiment of the present invention, using identical or similar reference marker with the similar element of effect shown in the different figure, wherein omitted being repeated in this description of these elements.
Fig. 1 shows the theory diagram according to the sensor device 100 that is used for the analysing fluid ingredient of one embodiment of the invention.Sensor device 100 has first sensor 102, the second sensor 104 and analytical equipment 106.First sensor 102 and the second sensor 104 constitute for survey this ingredient when at least one ingredient of fluid and sensor 102,104 sensor cover contact.For this reason, two sensors 102,104 are arranged in the space that described fluid is positioned at.Sensor 102,104 links to each other with analytic unit 106 respectively.First sensor 102 constitutes for measuring-signal being offered analytic unit 106.The second sensor 104 constitutes for reference signal being offered analytic unit 106.
By unshowned filtrator, the second sensor 104 separates with fluid.This filtrator can not pass through at least one ingredient of fluid, so that the second sensor 104 separates with at least one ingredient.Be different from the second sensor 104, first sensor 102 does not separate with at least one ingredient and therefore can survey at least one ingredient.
The measuring-signal of first sensor 102 represent the environmental impact of influential sensor, comprise the concentration of at least one ingredient in the fluid.The reference signal of the second sensor 104 only represents environmental impact, and does not represent the concentration of at least one ingredient in the fluid.
The below describes embodiment according to Fig. 1, and sensor is based on field effect transistor 102, the 104(ChemFET of semi-conductive gas sensitization in this embodiment).This transistorlike 102,104 is used increasingly extensive in sensor technology.At this, utilize the gas of test species to be detected-for example or liquid or gas or liquid mixture-load transistor 102,104 grid usually to cause the electromotive force on transistor 102,104 the gate electrode to change, this electromotive force changes can change transistor 102,104 channel impedance.Whereby, flow through from the source electrode contact site to the drain electrode contact site transistor 102,104 electric current, namely so-called channel current is changed.Have larger band gap (〉 3eV if use for transistor 102,104) semiconductor material, for example gallium nitride (GaN) or silit (SiC), so this so that ChemFET102,104 can be used for using up to the sensor technology in 800 ℃ of situations in temperature, described temperature also occurs in the engine exhaust of motor vehicle in principle.In order to analyze engine exhaust, sensor 102,104 can be arranged in the off-gas line of motor vehicle.
In the working point of selecting, field effect transistor 102,104 channel current are usually than by loading the test species, being that the channel current that sensor 102,104 actual measured signal cause changes high several order of magnitude.Obtain thus the high request to noiseless current measurement.Outside disturbing effect for example is temperature change or sensor degradation, and they cause the change of channel current and not based on the existence of test species.For compensate for disturbances impact and skew, for example can use the field effect transistor 104 that works as reference element, it is insensitive for material to be detected.Preferably, about semiconductor structure, physical dimension and electrical specification, the field effect transistor 104 that is used as reference element is identical with the field effect transistor 102 that works as survey sensor.In addition, in two field effect transistors 102,104 the less situation of space interval, there is good thermal coupling.This for example provides in situation about device 102,104 being integrated on the chip 100.So in the ideal case, the difference of the channel current of the field effect transistor 102 that works as survey sensor and the field effect transistor 104 that works as reference element is only also owing to the existence of material to be detected.
For this reason, two field-effect transistors 102,104 should experience identical disturbing effect.Can use the physics fence (Barriere) of the form of the layer that can not pass through with analyte in order to make reference sensor 104, be prevented from by means of the contact between the sensitive layer of described physics fence tester kind and reference sensor 104.Shielding fully in reference sensor 104 situations, can be on gas sensor 102, but reference sensor 104 occur by real gas or liquid environment cause aging.This means the difference that between gas sensor 102 during the duration of operation of sensor device 100 and reference element 104, may occur aspect the electric behavior.
What the scheme of here introducing had been introduced the signal drift that is used for ChemFET sensor 100 does not depend on aging compensating unit.Integrated reference sensor 104 on semiconductor gas sensor chip 100, it is placed under the environmental baseline identical with the sensor 102 of measurement gas, for example temperature or exhaust gas atmosphere.By forming poor from the sensor signal of potential electrode 102 and reference electrode 104, can calculate the glitch-free and difficult measuring-signal that wears out.Therefore, life period full remuneration drift current and the disturbing effect at sensor device 100 is comprehensively possible.
For compensate for disturbances and drift, use reference electrodes 104 at ChemFET sensor chip 100, described reference electrode is owing to the aging behavior identical with potential electrode to be compensated 102 experienced in chemical corrosion.Therefore, at two electrodes 102,104 identical catabiosis appears so that after the long duration of operation sensor row of the change of potential electrode 102 for can with under new state, be compensated very similarly.For this reason, the species of gases of formation signal is converted into the gas that does not cause sensor signal catalysis type before its arrives sensor electrode surface.These gases are together with being included in all other gases, for example carbon dioxide, water or oxygen in the gas flow, do not cause signal on sensor 104, arrive the sensor surface of reference electrode 104 and apply there and interference identical on potential electrode 102 and burn-in effects, for example gas noise or chemical corrosion.So of short duration disturbing effect except being compensated whereby, for example outside temperature, gas noise or the pressure dependence, also may during the long time period, realize the aging behavior that is caused by medium that type is identical, i.e. benchmark and survey sensor 102,104 so-called chemical corrosion.In addition, obtained the simplification of ChemFET sensor 100, made cheaply, because during process, can save additional semiconductor processes step by saving physical gas fence (Gasbarriere).
Fig. 2 shows the diagram that is used for the sensor device 100 of analysing fluid ingredient according to one embodiment of the invention.This sensor device 100 has the first sensor 102 as survey sensor, as the second sensor 104 of reference sensor be used for the filtrator 200 of the second sensor 104.Sensor 102,104 is arranged on the carrier 204.Filtrator 200 is arranged on the surface that deviates from carrier 204 of reference sensor 104.Filtrator 200 can cover or cross over the sensing surface of the second sensor 104 fully.
Two sensors 102,104 are implemented as chemosensitive field effect transistor (ChemFET), as described according to Fig. 1.Carrier 204 is implemented as Semiconductor substrate 204.Two sensors 102,104 have gate electrode 202 in Semiconductor substrate 204.Semiconductor substrate 204 connects two sensors 102,104.Filtrator 200 is oxidator (Oxikat) in this embodiment, and it is oxidized to sensor 102,104 insensitive compounds with at least one ingredient of sensor 102,104 sensitivities.
In order to make reference sensor 104, the carrier layer 200 that contains catalyst converter is applied on the area of grid 202 of ChemFET of gas sensitization.This carrier layer 200 should be the porous that links up, and enters into gate electrode 202 so that gas can pass carrier layer 200 always.
The ChemFET102 that has at least two gases and expose, 104 sensor chip have been shown as sensor device among Fig. 2.At this, a ChemFET is reference sensor 104, and the 2nd ChemFET is survey sensor 102.Both provide respectively signal, and these signals are as for example difference signal that is processed in analytic unit shown in Figure 1.This analytic unit can be integrated on the sensor chip monolithic, namely is integrated in the Semiconductor substrate 204.
In one embodiment, sensor chip 204 has two identical electrodes 202, and wherein sensor 102,104 is for all nitrogen oxides (NOx), carbon dioxide (CO
2) and water (H
2O) be insensitive.Oxidation catalyzer 200(is additionally arranged hereinafter referred to as oxidator on reference sensor 104).Oxidator 200 can consist of by being carried at platinum on ceramic alumina particle or the zirconia particles, high degree of dispersion or platinum/rhodium potpourri or platinum/palladium potpourri.Exist in the oxygen situation, this oxidator 200 is responsible for will be from such as ammonia (NH
3) or the hydrogen-containing gas of the waste gas of hydrocarbon (HC) be oxidized to N
2, NOx, CO
2Or H
2O.If ammonia is loaded on the whole sensor chip 100 now, the signal of gas appears depending at survey sensor 102 so, and the opposite catalysis type conversion of on reference sensor 104, carrying out ammonia by means of oxidator 200, so that measuring-signal do not occur and reference signal be provided.On the contrary, all other gases that comprise in gas flow similarly identical interference and burn-in effects occur and cause at two sensors 102,104.They can calculate mutually and be processed into the measuring-signal of correction in analytic unit.
Because electrode 202 is identical for reference sensor 104 with survey sensor 102, obtain the manufacturing of the simplification of sensor array 100.Applying of electrode material can be carried out in process steps.Possible electrode material is Pt, Pd, Rh, Re, Ir, Au, Ru, Cr, Al, Ni, Co, Mn, Cu, Hf, Ta, Al and their potpourri and alloy.Yet the electrode material of gas sensor 102 and reference sensor 104 in principle can be different.
In other words, Fig. 2 shows the embodiment that is used for the Abgassensor 100 of ammonia sensitivity according to one embodiment of the invention.Show the schematic configuration of the sensor array 100 with reference sensor 104 and survey sensor 102.Can use same electrode material for two ChemFET102,104, this electrode material is responsive for ammonia, yet does not demonstrate for NOx, CO
2And H
2The susceptibility of O.Employed oxidation catalyzer 200 is responsible for ammonia is changed into such material on reference sensor 104: employed electrode material 202 does not demonstrate susceptibility for these materials.
Fig. 3 shows the diagram that is used for the sensor device 100 of analysing fluid ingredient according to one embodiment of the invention.Sensor device 100 is constructed as the sensor device among Fig. 2.Different from Fig. 2, use the filtrator 300 that constitutes the NSC catalyst converter.
Therefore, described an embodiment according to Fig. 3, NOx accumulator-type catalytic converter (NSC) 300 is applied on the reference sensor 104 in this embodiment, and this NOx accumulator-type catalytic converter for example can be implemented based on Pt and baryta.This storage oxidator 300 for example is stored in the nitrogen oxide that contains in the motor vehicle exhaust gases, and this nitrogen oxide is reacted into N with the unspent ammonia or the hydrocarbon that contain in waste gas
2, H
2O and CO
2These reaction product do not produce measuring-signal on sensor 104.Therefore in the situation that loads NOx, distinctive signal occurs at survey sensor 102, and on reference sensor 104, carry out the storage of nitrogen oxide and conversion and distinctive signal therefore do not occur by means of NSC catalyst converter 300 on the contrary.Non-distinctive disturbing effect occurs and can be compensated at two sensors 102,104.
In other words, Fig. 3 shows according to one embodiment of the invention and is used for embodiment to the Abgassensor 100 of nitrogen oxide sensitive.Show the schematic configuration of the sensor array 100 with reference sensor 104 and survey sensor 102.Be responsible for the storage nitrogen oxide and nitrogen oxide is changed into such material at the NSC catalyst converter 300 that reference sensor 104 uses: employed electrode material 202 does not demonstrate susceptibility for these materials.
Fig. 4 shows the diagram that is used for the sensor device 100 of analysing fluid ingredient according to one embodiment of the invention.Sensor device 100 is constructed as the sensor device in Fig. 2 and 3.Different from Fig. 2 and 3, use to constitute NO
xThe filtrator 400 of storer.
Described an embodiment according to Fig. 4, used in this embodiment NOx storage material 400, for example zeolite or BaO.Before nitrogen oxide is run into sensor surface and can be produced measuring-signal, in these materials, store nitrogen oxide.If this storer 400 is full of, then it can and be cleared thus by of short duration regeneration.This is for example undertaken by the heating steps of heat, and its mode is that sensor 100 is heated to higher temperature momently.Nitrogen oxide is discharged and storer 400 is activated again.During the time interval of described regeneration, the measuring-signal of sensor 100 can not be analyzed.
In other words, Fig. 4 shows the embodiment to the Abgassensor 100 of nitrogen oxide sensitive of being used for according to one embodiment of the invention.Show the schematic configuration of the sensor array 100 with reference sensor 104 and survey sensor 102.Be responsible for the storage nitrogen oxide at the NOx storer 400 that reference sensor 104 uses, so nitrogen oxide can not arrive sensor surface.If this storer 400 is full of, then carry out of short duration regeneration step.
Fig. 5 shows the diagram that is used for the sensor device 100 of analysing fluid ingredient according to one embodiment of the invention.Sensor device 100 is constructed as the sensor device among Fig. 2.Be additional to the layout shown in Fig. 2, the sensor device shown in Fig. 5 also has the second filtrator 500 and the 3rd filtrator 502.Filtrator 500 constitutes the SCR catalyst converter, and is arranged on the filtrator 200 that constitutes oxidator.Filtrator 502 constitutes oxidator, and is arranged on the sensitive electrode 202 of first sensor 102.Therefore, filtrator 200 is arranged between the sensing surface and filtrator 500 of sensitive electrode 202 of the second sensor 104.The surface of the sensitive electrode that deviates from the second sensor 104 202 of filtrator 200 is covered by filtrator 500 fully.In order to make the ingredient that is in the fluid in sensor 102,104 environment arrive the sensitive electrode 202 of the second sensor 104, require this ingredient to penetrate two filtrators 500,200.In order to make the ingredient that is in the fluid in sensor 102,104 environment arrive the sensitive electrode 202 of first sensor 102, require this ingredient to penetrate filtrator 502.The surface of the sensitive electrode 202 of first sensor 102 is covered by filtrator 502 fully.Filtrator 200,502 can be identical.Filtrator 200,502 can be different.
According to Fig. 5 one embodiment has been described, in this embodiment, be additional to oxidator 200 for the Abgassensor 100 for nitrogen oxide sensitive and also use the catalyst converter 500 that is used for SCR (SCR-Kat), this catalyst converter 500 can for example be implemented as the basis take zeolite.Can be according to type stores ammonia and/or the hydrocarbon of catalyst converter material in these SCR catalyst converters 500.So the nitrogen oxide that exists in they and the waste gas is reacted into N
2And H
2O.As sensitive electrode 202, can use the material that not only ammonia is had susceptibility but also nitrogen oxide is also had susceptibility, because these two kinds of materials are converted at employed catalyst converter 200,500.Identical electrode material 202 can use on survey sensor 102 in combination with oxidation catalyzer 502.In the situation that loads NOx, produce distinctive signal at survey sensor 102, and on reference sensor 104, carry out the conversion of nitrogen oxide and therefore do not produce distinctive signal by means of SCR catalyst converter 500 on the contrary.Non-distinctive disturbing effect occurs and can be compensated at two sensors 102,104.
In other words, Fig. 5 shows the embodiment to the Abgassensor 100 of nitrogen oxide sensitive of being used for according to one embodiment of the invention.Show the schematic configuration of the sensor array 100 with reference sensor 104 and survey sensor 102.Can use same electrode material 202 for two ChemFET102,104, this electrode material is responsive for ammonia and nitrogen oxide.Be responsible in combination converting nitrogen oxide and ammonia to such material with oxidation catalyzer 200 at the SCR catalyst converter 500 that reference sensor 104 uses: employed electrode material 202 does not demonstrate susceptibility for these materials.
Fig. 6 shows the process flow diagram according to the method 600 that is used for the analysing fluid ingredient of one embodiment of the invention.The method can be by implementing such as the sensor device of describing according to earlier figures.
The concentration that Fig. 7 a to 7c shows the ingredient of gas on the sensor device is moved towards chart and is moved towards chart according to the signal of reference signal 700, the measuring-signal 702 of the sensor device of one embodiment of the invention and the measuring-signal 704 proofreaied and correct.This sensor device can be as according to the described sensor device of earlier figures.Accordingly, reference signal 700 can be the signal at the reference sensor 104 shown in the earlier figures, measuring-signal 702 can be the signal at the survey sensor 102 shown in the earlier figures, and the measuring-signal 704 of proofreading and correct can be the output signal of the analytic unit 106 for example described according to Fig. 1.
On horizontal ordinate, drawn the time respectively, on ordinate, drawn respectively signal level, for example signal voltage.The time shaft of these charts is corresponding each other.With the time mutual relationship respectively in the chart drawn beneath in the concentration trend according to the part of the gas composition to be detected on the sensor device of one embodiment of the invention.In this example, draw the ammonia NH as the ingredient to be detected of gas
3Concentration.The ammonia concentration trend has at first shown lower level, and then great-jump-forward is increased to higher level and then again drops to described lower level great-jump-forward.This reference signal is by producing with gas composition section to be detected separated sensor.Measuring-signal is by not producing with gas composition section to be detected separated sensor.
Fig. 7 a shows the signal trend according to the reference signal 700 of one embodiment of the invention.This reference signal 700 does not have the change relevant with the concentration change of ammonia.This reference signal 700 has the drift of high value, and this drift changes based on the sensitivity of reference sensor and/or based on the component of signal of other gases, because this reference sensor separates by filtrator and ammonia.
Fig. 7 b shows the signal trend according to the measuring-signal 702 of one embodiment of the invention.Measuring-signal 702 has great-jump-forward and rises this rising and NH
3The rising of concentration is consistent in time.At NH
3In the situation that concentration descends, this measuring-signal 702 has equally great-jump-forward and descends.The distinctive component of signal of ammonia superposeed with Fig. 7 a in the shown identical drift of reference signal.
Fig. 7 c shows the signal trend according to the measuring-signal 704 of the correction of one embodiment of the invention.The measuring-signal of proofreading and correct has as one man copied rising and the decline of NH3 concentration on 704 times.The measuring-signal 704 of this correction does not have drift.The measuring-signal 704 of this correction produces from the stack of measuring-signal and reference signal, and wherein this reference signal calculates from measuring-signal.
In other words, Fig. 7 a to 7c shows measuring-signal 700,702,704 synoptic diagram.Because the ammonia on oxidator transforms (Ammoniakumsatz), reference sensor does not demonstrate the susceptibility for ammonia.On the contrary, survey sensor has sensitivity response for ammonia.Non-distinctive disturbing effect occurs and can be compensated in the measuring-signal 704 of proofreading and correct at two sensors.
Described scheme can be used to the form of compensation transistor the ChemFET gas sensor based on active catalyst converter material above reference electrode.The NOx that the described structure of ChemFET sensor especially can be used for the motor vehicle exhaust gases pipe surveys.
Embodiment described and that illustrate in the drawings only is exemplary selection.Different embodiment can fully or relate to each mutually combination of feature ground.One embodiment can also be replenished by the feature of another embodiment.In addition, can repeat to implement according to method step of the present invention and sequentially implement with other that is different from described order.
Claims (10)
1. sensor device (100) that is used for the analysing fluid ingredient, wherein said sensor device (100) has following characteristics:
Be used for surveying the first sensor (102) of ingredient;
Be used for surveying second sensor (104) of described ingredient, it is adjacent with first sensor (102) that wherein said the second sensor (104) is arranged to; With
Filtrator (200; 300; 400), described filtrator (200; 300; 400) constitute be used to making described ingredient away from the second sensor (104).
2. according to sensor device claimed in claim 1 (100), in described sensor device (100), filtrator (200; 300; 400) can not can be passed through by the fluid ingredient of first sensor (102) and the second sensor (104) detection at least one.
3. according to the described sensor device of one of aforementioned claim (100), in described sensor device (100), filtrator (200; 300; 400) be arranged on the sensor cover (202) of the second sensor (104).
4. according to the described sensor device of one of aforementioned claim (100), in described sensor device (100), filtrator (200; 300; 400) constituting can not be by the fluidic species of first sensor (102) and the second sensor (104) detection be used to ingredient is converted to.
5. according to the described sensor device of one of aforementioned claim (100), in described sensor device (100), filtrator (200; 300; 400) constitute be used to the additional ingredient that makes fluid and gather and described additional ingredient can not be made up by the ingredient of the fluidic species of first sensor (102) and the second sensor (104) detection with at least one.
6. according to the described sensor device of one of aforementioned claim (100), in described sensor device (100), filtrator (200; 300; 400) constitute be used to making ingredient chemical combination.
7. according to sensor device claimed in claim 6 (100), in described sensor device (100), filtrator (200) constitutes for response and cleans impact ground release ingredient.
8. according to the described sensor device of one of aforementioned claim (100), described sensor device (100) has another filtrator (500), described another filtrator (500) constitutes be used at least one the other ingredient that makes fluid away from the second sensor (104), and wherein said first sensor (102) and the second sensor (104) constitute for surveying at least one other ingredient.
9. according to the described sensor device of one of aforementioned claim (100), described sensor device (100) has the analytical equipment (106) that links to each other with the second sensor (104) with first sensor (102), and the reference signal that described analytical equipment (106) constitutes be used to the measuring-signal that makes first sensor (102) and the second sensor (104) makes up, with the measuring-signal that obtains to proofread and correct.
10. method (600) that is used for the analysing fluid ingredient, wherein said method (600) has following steps:
Determine (602) measuring-signal (702), described measuring-signal (702) has the distinctive component of ingredient and non-distinctive component, the concentration of ingredient in the distinctive representation in components fluid of wherein said ingredient, and at least a disturbing effect of described non-distinctive representation in components;
Determine (604) reference signal (700), described reference signal (700) has non-distinctive component; With
Combination (606) measuring-signal (702) and reference signal (700) are to obtain the signal of expression fluid ingredient.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102012205398A DE102012205398A1 (en) | 2012-04-03 | 2012-04-03 | A sensor device and method for analyzing a component of a fluid |
| DE102012205398.0 | 2012-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103364465A true CN103364465A (en) | 2013-10-23 |
Family
ID=49209869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013101124242A Pending CN103364465A (en) | 2012-04-03 | 2013-04-02 | Sensor device and method for analyzing fluid component |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2013213822A (en) |
| CN (1) | CN103364465A (en) |
| DE (1) | DE102012205398A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6668827B2 (en) | 2016-03-03 | 2020-03-18 | 富士通株式会社 | Gas sensor device |
| JP7155185B2 (en) * | 2020-03-05 | 2022-10-18 | 株式会社東芝 | MOLECULAR DETECTION DEVICE AND MOLECULAR DETECTION METHOD |
| CN111474215B (en) * | 2020-06-01 | 2022-01-14 | 中国科学技术大学 | Semiconductor-solid electrolyte type dual-mode sensor and application thereof in gas identification |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1071510A (en) * | 1990-06-12 | 1993-04-28 | 卡塔鲁逖克公司 | NOx sensor and detection method |
| CN1507560A (en) * | 2001-05-04 | 2004-06-23 | ҽҩ����ѧ��������˾ | Electro-optical sensing device with reference channel |
| CN101044395A (en) * | 2004-04-22 | 2007-09-26 | 迈克纳斯公司 | FET-based gas sensor |
| CN101363813A (en) * | 2007-08-10 | 2009-02-11 | 深圳市奥特迅传感技术有限公司 | Gas sensor for monitoring gas content in insulating oil |
| CN101563591A (en) * | 2006-10-20 | 2009-10-21 | 模拟装置公司 | A sensor including a reference sensor element |
| CN101571506A (en) * | 2008-04-29 | 2009-11-04 | 华瑞科学仪器(上海)有限公司 | Formaldehyde sensor |
| CN101692061A (en) * | 2008-07-02 | 2010-04-07 | 孙一慧 | Sensor instrument system including method for detecting analytes in fluids |
| CN101779121A (en) * | 2007-07-24 | 2010-07-14 | 罗伯特.博世有限公司 | Method and device for the detection of substances |
| WO2011054577A1 (en) * | 2009-11-03 | 2011-05-12 | Robert Bosch Gmbh | Sensor for detecting a component of a gas mixture |
| WO2011095257A1 (en) * | 2010-02-05 | 2011-08-11 | Robert Bosch Gmbh | Method for detecting two or more gas species |
| CN102292153A (en) * | 2008-12-04 | 2011-12-21 | 约翰森·马瑟公开有限公司 | Nox storage materials for sensor applications |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10161213B4 (en) | 2001-12-13 | 2004-02-19 | Ignaz Prof. Dr. Eisele | Gas sensor and method for the detection of one or more components of a gas mixture and / or gases in a liquid according to the principle of work function measurement |
-
2012
- 2012-04-03 DE DE102012205398A patent/DE102012205398A1/en not_active Withdrawn
-
2013
- 2013-04-02 JP JP2013077033A patent/JP2013213822A/en not_active Withdrawn
- 2013-04-02 CN CN2013101124242A patent/CN103364465A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1071510A (en) * | 1990-06-12 | 1993-04-28 | 卡塔鲁逖克公司 | NOx sensor and detection method |
| CN1507560A (en) * | 2001-05-04 | 2004-06-23 | ҽҩ����ѧ��������˾ | Electro-optical sensing device with reference channel |
| CN101044395A (en) * | 2004-04-22 | 2007-09-26 | 迈克纳斯公司 | FET-based gas sensor |
| CN101563591A (en) * | 2006-10-20 | 2009-10-21 | 模拟装置公司 | A sensor including a reference sensor element |
| CN101779121A (en) * | 2007-07-24 | 2010-07-14 | 罗伯特.博世有限公司 | Method and device for the detection of substances |
| CN101363813A (en) * | 2007-08-10 | 2009-02-11 | 深圳市奥特迅传感技术有限公司 | Gas sensor for monitoring gas content in insulating oil |
| CN101571506A (en) * | 2008-04-29 | 2009-11-04 | 华瑞科学仪器(上海)有限公司 | Formaldehyde sensor |
| CN101692061A (en) * | 2008-07-02 | 2010-04-07 | 孙一慧 | Sensor instrument system including method for detecting analytes in fluids |
| CN102292153A (en) * | 2008-12-04 | 2011-12-21 | 约翰森·马瑟公开有限公司 | Nox storage materials for sensor applications |
| WO2011054577A1 (en) * | 2009-11-03 | 2011-05-12 | Robert Bosch Gmbh | Sensor for detecting a component of a gas mixture |
| WO2011095257A1 (en) * | 2010-02-05 | 2011-08-11 | Robert Bosch Gmbh | Method for detecting two or more gas species |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102012205398A1 (en) | 2013-10-10 |
| JP2013213822A (en) | 2013-10-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112789500A (en) | Digital back-end to control and optimize analog front-end to measure nanomaterial-based gas sensor arrays to supply data to pattern recognition algorithms | |
| Ingebrandt et al. | Label-free detection of single nucleotide polymorphisms utilizing the differential transfer function of field-effect transistors | |
| EP1806414B1 (en) | Fet-based sensor for detecting ionic material, ionic material detecting device using the fet-based sensor, and method of detecting ionic material using the fet-based sensor | |
| Hassibi et al. | On noise processes and limits of performance in biosensors | |
| Andersson et al. | New generation SiC based field effect transistor gas sensors | |
| US10145846B2 (en) | Digital protein sensing chip and methods for detection of low concentrations of molecules | |
| JP2018109654A (en) | Ion-sensing charge-accumulation circuits and methods | |
| US8626451B2 (en) | Method and device for characterization and sensing of exhaust gas and control of engines and components for aftertreatment of exhaust gases | |
| Sun et al. | An immunoelectrochemical sensor for salivary cortisol measurement | |
| Javed et al. | Using sensor arrays to decode NOx/NH3/C3H8 gas mixtures for automotive exhaust monitoring | |
| JP2009543090A (en) | Biosensor consisting of comb-shaped electrode sensor unit | |
| Hu et al. | A highly selective chemical sensor array based on nanowire/nanostructure for gas identification | |
| CN103364465A (en) | Sensor device and method for analyzing fluid component | |
| Andersson et al. | Investigations on the possibilities of a MISiCFET sensor system for OBD and combustion control utilizing different catalytic gate materials | |
| CN103635796A (en) | Device and method for determining the carbon dioxide content of air | |
| Bur et al. | Increasing the selectivity of Pt-gate SiC field effect gas sensors by dynamic temperature modulation | |
| US20180364188A1 (en) | Modular chemiresistive sensor for in vitro diagnostic and gas sensing applications | |
| US8516795B2 (en) | Exhaust gas sensor device, engine control device and method | |
| Poghossian et al. | Multi-parameter detection of (bio-) chemical and physical quantities using an identical transducer principle | |
| Nguyen et al. | Handheld readout system for field‐effect transistor biosensor arrays for label‐free detection of biomolecules | |
| CN104185788A (en) | Sensor for detecting a component of a gas mixture | |
| US20140261348A1 (en) | Exhaust Gas Sensor Device | |
| Eklöv et al. | Gas mixture analysis using a distributed chemical sensor system | |
| KR102539362B1 (en) | Detection sensor including an optional high electron mobility transistor for detecting gaseous or liquid components | |
| Bur et al. | New method for selectivity enhancement of SiC field effect gas sensors for quantification of NO x |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20131023 |
|
| RJ01 | Rejection of invention patent application after publication |