CN103360039B - Large-size sheet-type electric-insulation heat-dissipation ceramic substrate and preparation method thereof - Google Patents
Large-size sheet-type electric-insulation heat-dissipation ceramic substrate and preparation method thereof Download PDFInfo
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Abstract
The invention belongs to technical field of inorganic nonmetallic materials, be specifically related to a kind of large scale chip ceramic substrate and preparation method thereof.The described ceramic substrate length of side is 150 ~ 350mm, thickness is 0.2 ~ 10mm, and ceramic substrate batching percent mass is composed as follows: alumina powder, 0.2% ~ 5% complex sintering aids of 95% ~ 99.8%; The additional organic functions auxiliary agent accounting for alumina powder and complex sintering aids quality summation 4 ~ 7%, accounts for the solvent of alumina powder and complex sintering aids quality summation 10 ~ 18%.The present invention is by reforming injection molded in gel injection molding and forming technology, changing in original technology is conducted oneself with dignity by slurry injects the mode of mould as power source, adopts source of consistent pressure controlled injection molding from bottom to top and plural gel mode of excitation to prepare a kind of large scale chip aluminium oxide ceramic substrate material.The large scale aluminium oxide ceramic substrate that the length of side is 150 ~ 350mm, thickness range is wide, surface quality good, process controllability is good, angularity is lower is can be mass according to preparation method of the present invention.
Description
Technical field
The invention belongs to technical field of inorganic nonmetallic materials, be specifically related to a kind of large scale chip ceramic substrate and preparation method thereof.
Background technology
Aluminium oxide ceramic substrate, because of its good heat-conductive characteristic, higher mechanical strength, excellent insulation property and the high performance-price ratio having using value, becomes the sector application such as semiconductor, electronics inorganic non-metallic baseplate material the most widely.Especially be applied in high-power and high-luminance LED (light-emitting diode) and IGBT(insulated gate bipolar transistor) in as insulating radiation substrate, there is boundless application prospect.Along with the encapsulation technology of LED and IGBT develops, to can improve the large scale of circuit printing efficiency and heat dissipation, high-flatness, great surface quality ceramic substrate demand day by day increase.At present, the moulding process that can carry out industrialized mass production aluminium oxide ceramic substrate mainly contains flow casting molding, compressing and gel casting forming.
The tape casting forming technique has the development course of decades, and its automaticity and shaping efficiency are relatively high.But due to the limitation of technique, be usually only applicable to length and width size < 150 × 150mm, thickness < 1.5mm ceramic substrate shaping.
Compressingly comprise dry-pressing formed and half dry-pressing formed, its advantage is that cost is lower, but is not suitable for the comparatively complicated goods of shape, and easily causes blank density skewness to cause product deformation because of moulding process self character, increases post-production cost.And due to the intensity of compressing base substrate and pliability relatively low, in the scope of length and width size > 150 × 150mm, thickness < 5mm, cannot industrialized mass production be carried out.
The ceramic substrate that gel casting forming is applicable to thickness 0.6 ~ 10mm is shaping, but automaticity and shaping efficiency relatively low.In mass production, the self gravitation of general slurry injects mould as power source, and require higher to the aspect such as the type of flow, gel time control, body drying uniformity of slurry fluidity, injection mould in its technique, quantified controlling difficulty is larger.Mold process is injected at slurry, can the suspended nitride of gel easily by the density variation injecting the impact of flow process and cause local slurry, thus cause in dry run, shrinking the inconsistent warpage causing blank edge, thus cause the goods rate of finished products of length and width size > 150 × 150mm too low, mass production requirement cannot be met.
For the ceramic substrate of length and width size > 150 × 150mm, thickness 0.2 ~ 10mm, existingly can the preparation method of industrialized mass production all cannot to meet the demands completely.
Summary of the invention
For above deficiency of the prior art, technical problem to be solved by this invention is to provide and a kind ofly meets the Large-size sheet-type electric-insulation heat-dissipation ceramic substrate that the length of side is 150 ~ 350mm, thickness 0.2 ~ 10mm is applicable to industrialized mass production simultaneously, invention also provides its preparation method.
Large-size sheet-type electric-insulation heat-dissipation ceramic substrate of the present invention, the ceramic substrate length of side is 150 ~ 350mm, thickness is 0.2 ~ 10mm, and ceramic substrate batching percent mass is composed as follows:
Alumina powder, 0.2% ~ 5% complex sintering aids of 95% ~ 99.8%;
The additional organic functions auxiliary agent accounting for alumina powder and complex sintering aids quality summation 4 ~ 7%, accounts for the solvent of alumina powder and complex sintering aids quality summation 10 ~ 18%.
Wherein:
Described alumina powder be particle mean size 1 ~ 4 μm of microcosmic crystal formation in the form of sheets or short cylinder high-temperature calcination alpha-alumina, particle mean size 0.1 ~ 1 μm of microcosmic crystal formation be spherical or the mixture of one or more arbitrary proportions in short cylinder pure alpha-aluminum oxide powder.Two kinds of aluminium oxide are commercially available prod.Wherein, pure alpha-aluminum oxide powder purity >=99.99%.High-temperature calcination alpha-alumina and high-purity alumina powder are alpha-alumina.
At present, the classification that two are larger is substantially divided in commercially available alpha-alumina:
(1) particle mean size 1 ~ 4 μm of microcosmic crystal formation of producing of Bayer process in the form of sheets or short cylinder alpha-alumina, the alumina powder that this kind of technique generally adopts the mode of pyrolytic conversion to produce, its microscopic pattern is because of the in the form of sheets unusual or short cylinder of the places of origin of raw materials, pyrolytic conversion equipment, its grain structure is more irregular, sintering activity is relatively low, and slurry fluidity is relatively better;
(2) stimulate by downstream sapphire industry requirement, the method of high purity (purity >=99.99%) aluminium oxide such as aluminium ammonium decomposition method (alum, aluminium carbonate ammonium), aluminium isopropoxide Hydrolyze method develops rapidly at home in recent years, the alpha-alumina particle mean size of producing is general lower, and microcosmic crystal formation is short cylinder or spherical.Its grain structure is more homogeneous, and specific surface energy is relatively high, and sintering activity is relatively high, and slurry fluidity is relatively poor.
Described complex sintering aids is the mixture of two or more arbitrary proportions in talcum, magnesite, magnesium carbonate, carborundum, kaolin, nanometer aluminium powder, calcium carbonate, lanthana, aluminium nitride, yittrium oxide or rubidium nitrate.
Described organic functions auxiliary agent is the multiple arbitrary proportion mixture in citric acid, polyacrylic acid, ammonium polyacrylate, 2-hydroxy-2-methyl phenyl-propane-1-ketone, acrylamide, N-N' methylene-bisacrylamide, glycerol, 1-hydroxycyclohexyl phenyl ketone, ammonium persulfate, tetramethylethylenediamine, Tetramethylammonium hydroxide, dimethoxybenzoin or acetone.
Described solvent is deionized water.The raw material that the present invention adopts is commercially available prod.
The preparation method of described Large-size sheet-type electric-insulation heat-dissipation ceramic substrate, comprises the following steps:
(1) batching, grinding, slurry process:
The alumina powder of precise formula ratio, sintering aid, organic functions auxiliary agent and solvent, according to the time sequencing of technological requirement add successively various raw material carry out that wet ball grinding makes can gel ceramic slurry, slurry is carried out vacuum stirring de-bubble;
(2) injection molding:
Take source of consistent pressure, by slurry obtained for step (1) by mold bottom press-in die, control injection pressure, in maintenance mould, slurry liquid upper thread level is until fill mould;
Described source of consistent pressure is one or both the combination in the hydraulic pressure of adjustable pressure within the scope of 0 ~ 0.3MPa, air pressure, machine driving pressure.
Described mold material is the material of one or both compounds in stainless steel, plastics, glass, pottery, and excitaton source is the excitaton source of one or both compounds in thermal source, infrared ray, ultraviolet, microwave.
(3) liquid mould is separated and gel:
Adopt the mode of closing molding inlet valve or initiation topical gel to complete the lock out operation of slurry and mould, naturally place or adopt excitaton source mode, completing gel process;
(4) demoulding, drying, shaping:
After gel process completes, open mould taking-up ceramic green sheet and complete knockout course, after carrying out dry process to ceramic green sheet, punching press or laser incising are divided into the ceramic substrate base substrate of required form, proceed drying until moisture is lower than 0.5%;
Described dry run is divided into two stages:
First stage: first keep 20 ~ 40h in temperature 20 ~ 35 DEG C, humidity 75 ~ 90% times after the demoulding, then carry out the ceramic substrate base substrate that punching press or laser incising are divided into required form;
Second stage: continue to carry out drying 2 ~ 32h at 60 ~ 95 DEG C, until moisture is lower than 0.5%.Second stage dry run use that drying equipment is infra-red drying, one in microwave drying or electric heating heated-air drying equipment.
(5) burn till, ramming, integer:
1460 ~ 1670 DEG C of high temperature sinterings 1 ~ 7 hour is carried out at by after ceramic substrate base substrate pad powder lamination, burn till Temperature fall after terminating, carry out ramming operation removal substrate surface and glue powder, then under the temperature environment of 80 ~ 120 DEG C, oven dry 0.5 ~ 2 hour is carried out, until carry out hot pressing integer after removal surface moisture, improve goods evenness further.During hot pressing shaping, at 0.05 ~ 20MPa, keep 0.5 ~ 2 hour at 1270 ~ 1560 DEG C.
(6) cut, check, pack:
According to product demand, laser cutting or other processing modes is adopted to cut to finished product, packaging after inspection.
Beneficial effect of the present invention is as follows:
(1) by the formulation optimization to the alumina powder of diverse microcosmic crystal formation, particle size range and complex sintering aids, organic functions auxiliary agent, the ceramic substrate that slurry suspension is good, integer temperature is low, microcosmic crystal boundary thermal resistance is little is prepared.
(2) reformed the injection molded of existing gel casting forming, injected by uncontrollable slurry natural flow and change injection mode bottom employing source of consistent pressure into, weaken the impact that slurry viscosity fluctuation produces product blank density.Decrease the surface quality problems such as product surface pin hole, pit, fine wrinkle that injection process causes, effective raising length of side is the ceramic substrate rate of finished products of 150 ~ 350mm, can prepare the ceramic substrate that existing Gelcasting Technique is difficult to the thickness 0.2 ~ 0.6mm prepared simultaneously.
(3) according to the shaping demand of difference of the situation such as shape, thickness of product, adopt excitaton source that is a kind of or two kinds of compounds, increase the controllability of gel process, improve the temperature sensitivity of existing Gelcasting Technique gel time.
(4) adopt method of the present invention, reduce base substrate local density difference, significantly improve the consistency of product, reduce goods angularity, improve production efficiency.
Embodiment
Below in conjunction with embodiment, the invention will be further described.
Embodiment 1
Be prepared as example be described with the aluminium oxide of size 165.1mm × 165.1mm × 2mm (96wt%) ceramic substrate below, each raw material weight proportioning:
First grind wet ball grinding 15 hours by technological requirement and above pulp furnish dress, then add acrylamide 1.325kg, N-N' methylene-bisacrylamide 0.07kg, continue ball milling after 3 hours, add glycerol 0.52kg ball milling 2 hours.Released by slurry, vacuum stirring adds 2-hydroxy-2-methyl phenyl-propane-1-ketone 0.5kg and stirs 10 minutes after 20 minutes.
Adopt pressure to be that slurry is injected the glass mold of 450mm × 450mm × 2.52mm inner chamber by bottom grouting port by the air pressure of 0.07MPa, keep pressure 2 minutes, close inlet valve.Carry out airtight Ultraviolet radiation operation, until ceramic body hardening gel.
Opening mold takes out ceramic green sheet, and the temperature that controls environment 25 DEG C, humidity keep 24h 80% time.Strike out the blank of 206.2 × 206.2mm size, use the drying equipment of infrared heating wind mode under 80 DEG C of environment dry 17 hours.
Folded 5 layers of ceramic body monolithic spreading alumina powder drying being contracted to 206 × 206mm is placed on load bearing board, uses 5m
3shuttle kiln littlely to sinter at present 1560 DEG C of insulations 3.After Temperature fall, mode of vibration is adopted to carry out ramming operation.Then 80 DEG C dry after be 6MPa at pressure, carry out hot pressing shaping, cooling naturally under the temperature 1330 DEG C insulation environment of 1 hour.
The finished product blank burning till rear about 180 × 180mm is carried out the aluminium oxide ceramic substrate being laser-cut into size 165.1 × 165.1mm.
Detect ceramic substrate after the assay was approved, performance is: density 3.78g/cm
3, bending strength 413MPa, thermal conductivity 27W/ (mK), surface roughness 0.4 μm, angularity 0.04/25(25mm unit length warpage 0.04mm).
Embodiment 2
Be prepared as example be described with the aluminium oxide of size 180mm × 180mm × 0.635mm (99.8wt%) ceramic substrate, each raw material weight proportioning:
First grind wet ball grinding 20 hours by technological requirement and above pulp furnish dress, then add acrylamide 3.4kg, N-N' methylene-bisacrylamide 0.17kg, continue ball milling after 3 hours, add glycerol 2.479kg ball milling 2 hours.Released by slurry, vacuum stirring evenly adds tetramethylethylenediamine 0.017kg after 20 minutes and ammonium persulfate 0.034kg stirs 3 minutes.
Adopt pressure to be that slurry is injected the glass mold of 450mm × 450mm × 0.8mm inner chamber by bottom grouting port by the hydraulic pressure of 0.3Mpa, keep pressure 1 minute, close inlet valve.Room temperature leaves standstill, until ceramic body hardening gel completes.
Opening mold takes out ceramic green sheet, keeps 20h 75% time in ambient temperature ambient temperature 35 DEG C, humidity.Strike out the blank of 205.06 × 205.06mm size, use microwave dryer under 95 DEG C of environment dry 2 hours.
Folded 5 layers of ceramic body monolithic spreading alumina powder drying being contracted to 203 × 203mm is placed on load bearing board, uses 5m
3shuttle kiln littlely to sinter at present 1460 DEG C of insulations 7.After Temperature fall, mode of vibration is adopted to carry out ramming operation.Then 80 DEG C dry after be 0.05MPa at pressure, carry out hot pressing shaping, cooling naturally under the temperature 1270 DEG C insulation environment of 0.5 hour.
Warehouse-in is packed after being checked by the finished product aluminium oxide ceramic substrate burning till rear 180 × 180mm.
Detect ceramic substrate after the assay was approved, performance is: density 3.95g/cm
3, bending strength 357MPa, thermal conductivity 29W/ (mK), surface roughness 0.3 μm, angularity 0.05/25(25mm unit length warpage 0.05mm).
Embodiment 3
Be prepared as example be described with the aluminium oxide of size 200mm × 200mm × 10mm (95wt%) ceramic substrate, each raw material weight proportioning:
First grind wet ball grinding 24 hours by technological requirement and above pulp furnish dress, then add acrylamide 1kg, N-N' methylene-bisacrylamide 0.05kg, continue ball milling after 2 hours, add glycerol 0.7kg ball milling 2 hours.Released by slurry, vacuum stirring evenly adds tetramethylethylenediamine 0.0085kg after 20 minutes and ammonium persulfate 0.017kg stirs 3 minutes.
Adopt pressure to be that slurry is injected the glass-stainless steel double mould of 500mm × 500mm × 12.8mm inner chamber by bottom grouting port by the hydraulic pressure of 0.1Mpa, keep pressure 1 minute, close inlet valve.Room temperature leaves standstill, until ceramic body hardening gel completes.
Opening mold takes out ceramic green sheet, at 20 DEG C, humidity 90% time maintenance 40h.Strike out the blank of 230 × 230mm size, under using composite drying equipment 60 DEG C of environment of microwave and hot blast, carry out drying 32 hours.
Folded for ceramic body monolithic spreading alumina powder 5 layers are placed on load bearing board, uses 5m
3shuttle kiln littlely to sinter at present 1640 DEG C of insulations 6.After Temperature fall, mode of vibration is adopted to carry out ramming operation.Then 120 DEG C dry after be 20MPa at pressure, carry out hot pressing shaping, cooling naturally under the temperature 1560 DEG C insulation environment of 2 hours.
After burning till the product inspection of rear 200 × 200mm, packaging is put in storage.
Detect ceramic substrate after the assay was approved, performance is: density 3.7g/cm
3, bending strength 327MPa, thermal conductivity 24W/ (mK), surface roughness 0.6 μm, angularity 0.05/25(25mm unit length warpage 0.05mm).
Embodiment 4
Be prepared as example be described with the aluminium oxide of size 230mm × 230mm × 2.3mm (99wt%) ceramic substrate, each raw material weight proportioning:
First grind wet ball grinding 20 hours by technological requirement and above pulp furnish dress, then add acrylamide 2.74kg, N-N' methylene-bisacrylamide 0.137kg, continue ball milling after 2 hours, add glycerol 1.623kg ball milling 2 hours.Released by slurry, vacuum stirring evenly adds 2-hydroxy-2-methyl phenyl-propane-1-ketone 0.3kg and ammonium persulfate 0.005kg and stirs 3 minutes after 20 minutes.
Adopt pressure to be that slurry is injected the glass mold of 270mm × 270mm × 2.9mm inner chamber by bottom grouting port by the hydraulic pressure of 0.05Mpa, keep pressure 1 minute, close inlet valve.Carry out airtight ultraviolet-Microwave Treatment operation, until ceramic body hardening gel completes.
Opening mold takes out ceramic green sheet, keeps 36h 75% time in ambient temperature 25 DEG C, humidity.Strike out the blank of 265.88 × 265.88mm size, use electric heating heated-air drying equipment under 60 DEG C of environment dry 32 hours.
Folded 6 layers of ceramic body monolithic spreading alumina powder drying being contracted to 265.6 × 265.6mm is placed on load bearing board, uses 5m
3shuttle kiln littlely to sinter at present 1590 DEG C of insulations 5.After Temperature fall, mode of vibration is adopted to carry out ramming operation.Then 80 DEG C dry after be 0.1MPa at pressure, carry out hot pressing shaping, cooling naturally under the temperature 1450 DEG C insulation environment of 1 hour.
Warehouse-in is packed after being checked by the finished product aluminium oxide ceramic substrate burning till rear 230 × 230mm.
Detect ceramic substrate after the assay was approved, performance is: density 3.90g/cm3, bending strength 310MPa, thermal conductivity 28W/ (mK), surface roughness 0.6 μm, angularity 0.04/25(25mm unit length warpage 0.05mm).
Embodiment 5
Be prepared as example be described with the aluminium oxide of size 300mm × 300mm × 1.5mm (95wt%) ceramic substrate, each raw material weight proportioning:
First grind wet ball grinding 24 hours by technological requirement and above pulp furnish dress, then add acrylamide 1.25kg, N-N' methylene-bisacrylamide 0.0625kg, continue ball milling after 2 hours, add glycerol 0.6kg ball milling 2 hours.Released by slurry, vacuum stirring evenly adds dimethoxybenzoin (BDK) 0.006kg and stirs 2 minutes after 20 minutes.
Adopt pressure to be that slurry is injected the glass mold of 366mm × 366mm × 1.88mm inner chamber by bottom grouting port by the air pressure of 0.15Mpa, keep pressure 1 minute, close inlet valve.Airtight Ultraviolet radiation is adopted to operate, until ceramic body hardening gel completes.
Opening mold takes out ceramic green sheet, at 30 DEG C, humidity 75% time maintenance 25h, carries out drying 24 hours under using electric heating heated-air drying equipment 60 DEG C of environment.
Folded 5 layers of the ceramic body monolithic spreading alumina powder that will be contracted to 345 × 345mm is placed on load bearing boards, uses push pedal electrical kiln to sinter at present 1590 DEG C of insulations 4.5 are little.After Temperature fall, mode of vibration is adopted to carry out ramming operation.Then 100 DEG C dry after be 5MPa at pressure, carry out hot pressing shaping, cooling naturally under the temperature 1500 DEG C insulation environment of 1.5 hours.
After burning till the product inspection of rear 300 × 300 × 1.5mm, packaging is put in storage, and this monolithic product can adopt laser incising to be divided into 150 × 150 × 1.5mm product 4,100 × 100 × 1.5mm product 9 or other type products according to customer demand again.
Detect ceramic substrate after the assay was approved, performance is: density 3.78g/cm
3, bending strength 367MPa, thermal conductivity 25.2W/ (mK), surface roughness 0.5 μm, angularity 0.05/25(25mm unit length warpage 0.05mm).
Embodiment 6
Be prepared as example be described with the aluminium oxide of size 350mm × 350mm × 3.5mm (96wt%) ceramic substrate.
Require that mode completes slurry preparation according to the batching of embodiment 1 and grinding technics.Released by slurry, vacuum stirring evenly adds ammonium persulfate 0.01kg and stirs 3 minutes after 20 minutes.
Adopt pressure to be that slurry is injected the glass mold of 500mm × 500mm × 4.4mm inner chamber by bottom grouting port by the hydraulic pressure of 0.2Mpa, keep pressure 1 minute, close inlet valve.Carry out closed microwave process operation, until ceramic body hardening gel completes.
Opening mold takes out ceramic green sheet, keeps 40h 85% time in ambient temperature 30 DEG C, humidity.Strike out the blank of 402.5 × 402.5mm size, use microwave dryer under 95 DEG C of environment dry 12 hours.
Folded 3 layers of ceramic body monolithic spreading alumina powder drying being contracted to 402.1 × 402.1mm is placed on load bearing board, uses 5m
3shuttle kiln littlely to sinter at present 1560 DEG C of insulations 6.After Temperature fall, mode of vibration is adopted to carry out ramming operation.Then 80 DEG C dry after be 10MPa at pressure, carry out hot pressing shaping, cooling naturally under the temperature 1330 DEG C insulation environment of 0.5 hour.Warehouse-in is packed after being checked by the finished product aluminium oxide ceramic substrate burning till rear 350 × 350mm.
Detect ceramic substrate after the assay was approved, performance is: density 3.77g/cm
3, bending strength 384MPa, thermal conductivity 27W/ (mK), surface roughness 0.4 μm, angularity 0.06/25(25mm unit length warpage 0.05mm).
Claims (1)
1. a Large-size sheet-type electric-insulation heat-dissipation ceramic substrate, is characterized in that: ceramic substrate is of a size of 165.1mm × 165.1mm × 2mm, and ceramic substrate each raw material weight proportioning is as follows:
Particle mean size 2.3 μm of sheet microcosmic crystal formation high-temperature calcination alpha-alumina 45.25kg
Particle mean size 0.8 μm of short cylinder microcosmic crystal formation pure alpha-aluminum oxide powder 2.75kg
Kaolin 1.25kg
Calcium carbonate 0.5kg
Yittrium oxide 0.25kg
Ammonium polyacrylate 0.336kg
Tetramethylammonium hydroxide 0.06kg
Deionized water 8.33kg;
The preparation method of described Large-size sheet-type electric-insulation heat-dissipation ceramic substrate is as follows:
First grind wet ball grinding 15 hours by technological requirement and above pulp furnish dress, then add acrylamide 1.325kg, N-N' methylene-bisacrylamide 0.07kg, continue ball milling after 3 hours, add glycerol 0.52kg ball milling 2 hours; Released by slurry, vacuum stirring adds 2-hydroxy-2-methyl phenyl-propane-1-ketone 0.5kg and stirs 10 minutes after 20 minutes;
Adopt pressure to be that slurry is injected the glass mold of 450mm × 450mm × 2.52mm inner chamber by bottom grouting port by the air pressure of 0.07MPa, keep pressure 2 minutes, close inlet valve; Carry out airtight Ultraviolet radiation operation, until ceramic body hardening gel;
Opening mold takes out ceramic green sheet, and the temperature that controls environment 25 DEG C, humidity keep 24h 80% time; Strike out the blank of 206.2 × 206.2mm size, use the drying equipment of infrared heating wind mode under 80 DEG C of environment dry 17 hours;
Folded 5 layers of ceramic body monolithic spreading alumina powder drying being contracted to 206 × 206mm is placed on load bearing board, uses 5m
3shuttle kiln littlely to sinter at present 1560 DEG C of insulations 3; After Temperature fall, mode of vibration is adopted to carry out ramming operation; Then 80 DEG C dry after be 6MPa at pressure, carry out hot pressing shaping, cooling naturally under the temperature 1330 DEG C insulation environment of 1 hour;
The finished product blank burning till rear 180 × 180mm is carried out being laser-cut into the aluminium oxide ceramic substrate of size 165.1 × 165.1mm;
Detect ceramic substrate after the assay was approved, performance is: density 3.78g/cm
3, bending strength 413MPa, thermal conductivity 27W/ (mK), surface roughness 0.4 μm, 25mm unit length warpage 0.04mm.
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| CN100491285C (en) * | 2007-07-13 | 2009-05-27 | 北京中材人工晶体有限公司 | Alumina ceramic and preparation method thereof |
| CN101468915A (en) * | 2007-12-26 | 2009-07-01 | 中国科学院上海硅酸盐研究所 | Polycrystal alumina transparent ceramic with preferred orientation and preparation thereof |
| CN102173816B (en) * | 2011-01-30 | 2013-05-08 | 河北鹏达新材料科技有限公司 | Method for forming indium tin oxide (ITO) target |
| CN102659415B (en) * | 2012-04-24 | 2013-06-19 | 景德镇陶瓷学院 | Manufacturing method of translucent alumina ceramic bulb casings and molding equipment |
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