CN103336032A - Preparation method of gas sensitive sensor based on carbon nano tube-polypyrrole complex network structure - Google Patents
Preparation method of gas sensitive sensor based on carbon nano tube-polypyrrole complex network structure Download PDFInfo
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Abstract
The invention discloses a preparation method of a gas sensitive sensor based on a carbon nano tube-polypyrrole complex network structure. The preparation method comprises the following steps of: carrying out hydrophilic treatment on a silicon base; carrying out amination treatment on the silicon base; assembling a carbon nano tube on the silicon base; adsorbing iron ions on the surface of a carbon nano tube network; depositing polypyrrole on the surface of the carbon nano tube network; and micromachining to prepare an electrode. The gas sensitive sensor based on the carbon nano tube-polypyrrole complex network structure obtained by the preparation method disclosed by the invention realizes the purpose that an ammonia response performance is greatly improved; the preparation method is simple in process and is suitable for large-scale preparation of the sensors.
Description
Technical field
The present invention relates to the nano-sensor technical field, particularly relate to a kind of preparation method based on carbon nano-tube-polypyrrole composite network structure gas sensor.
Background technology
Along with pressing for and the development of nanometer technology of commercial production and environment measuring, the nanometer gas sensor is being brought into play more and more important effect.Various nano materials such as metal-oxide semiconductor (MOS) nano particle, carbon nano-tube and two-dimensional nano film etc., all can be used as sensitive material and constitute the nanometer gas sensor.Wherein, carbon nano-tube is the full carbon monodimension nanometer material with special performance, and it has the irreplaceable advantage of conventional sensors: 1) huge interface provides a large amount of gas passages, thereby has improved sensitivity greatly; 2) significantly reduce the working sensor temperature; 3) microminiaturization of sensor can be realized, the making of portable sensor can be realized.Therefore, it has development prospect widely at aspects such as biology, chemistry, machinery, aviation, military affairs.
Usually, carbon nano-tube is as sensor, and its preparation process is the carbon nano-tube that will modify by dripping or means such as dielectrophoresis deposit to the surface of electrode, and contacting of carbon nano-tube and electrode surface is relatively poor, and therefore the performance to sensor impacts.For this reason, the method for available technology adopting self assembly is assembled into the oxidized silicon chip surface with carbon nano-tube, further combined with little processing and lift-off technology, prepares gold electrode in carbon nano tube surface, thereby can realize the good contact between carbon nano-tube and the electrode.Yet, because carbon nano-tube all has general response to all gases molecule, therefore, be necessary to improve carbon nano-tube to the selective response performance of all gases molecule.
Polypyrrole has good response performance as a kind of conducting polymer to the ammonia molecule, and it plays an important role in the ammonia gas sensor application facet as sensing material.Polypyrrole and carbon nano-tube is compound, can significantly improve homogenous material to the air-sensitive performance of ammonia molecule.Design carbon nano-tube-polypyrrole composite network, and at network surface preparation metal electrode realizing good electrical contact, thereby be expected to significantly improve composite network to the response performance of ammonia molecule.And make a general survey of present research, do not see relevant research report.
Therefore, at above-mentioned technical matters, be necessary to provide a kind of preparation method based on carbon nano-tube-polypyrrole composite network structure gas sensor.
Summary of the invention
In view of this, the present invention is directed to the prior art above shortcomings, a kind of preparation method based on carbon nano-tube-polypyrrole composite network structure gas sensor is provided, with silicon chip as substrate, adopt self-assembling method carbon nano-tube to be assembled into the surface of silicon base, realize the even distribution of ferric ion on carbon nano tube network by ion-exchange, in conjunction with the vapor deposition polymerization method polypyrrole is deposited on carbon nano tube surface, form the composite network structure, further by little processing and lift-off technology at composite network surface preparation gold electrode, thereby obtain in conjunction with preferably based on carbon nano-tube-polypyrrole composite network structure gas sensor.
To achieve these goals, the technical scheme that provides of the embodiment of the invention is as follows:
A kind of preparation method based on carbon nano-tube-polypyrrole composite network structure gas sensor, described preparation method may further comprise the steps:
S1, silicon base is carried out water wettability handle;
S2, silicon base is carried out amination handle;
S3, carbon nano-tube is assembled on the silicon base;
S4, at carbon nano tube network surface absorption ferric ion;
S5, at carbon nano tube network surface deposition polypyrrole;
S6, little processing and preparing electrode.
As a further improvement on the present invention, described step S1 is specially:
It is the concentrated sulphuric acid and the hydrogen peroxide mixed solution of 3:1 that silicon base is placed volume ratio, takes out washing 4～5 times behind 80 ℃ of processing 1～5h, and dries up with high pure nitrogen.
As a further improvement on the present invention, described step S2 is specially:
To place massfraction through the silicon base that step S1 handles is that 1%～5% silane coupling agent aqueous solution is soaked 12h～36h, takes out water flushing 3～4 times, and high pure nitrogen dries up, and realizes the amination of silicon base.
As a further improvement on the present invention, described silane coupling agent is 3-aminopropyl triethoxysilane or 3-aminopropyl trimethoxysilane.
As a further improvement on the present invention, described step S3 is specially:
Will be ultrasonic in water through the carbon nano-tube of modifying, control carbon nano-tube concentration is after centrifugal treating, after placing this carbon nano-tube solution to soak the amidized silicon base, use washed with de-ionized water, heat-treat after nitrogen dries up, obtain being assembled with the silicon base of carbon nano-tube.
As a further improvement on the present invention, among the described step S3 in water ultrasonic time be 1h～3h, ultrasonic power is 100W～200W, ultrasonic frequency is 40Hz～80Hz; Carbon nano-tube concentration is 0.01mg/mL～10mg/mL; Centrifugal speed is 10000g～20000g; Soak time is 1min～24h; The washed with de-ionized water number of times is 3～4 times; Thermal treatment is 120 ℃ and handles 1h.
As a further improvement on the present invention, described is the carbon nano-tube of carboxylic carbon nano-tube, sulfonation carbon nano-tube, anionic polyelectrolyte modification or the carbon nano-tube that anionic surfactant is modified through the carbon nano-tube of modifying.
As a further improvement on the present invention, described carbon nano-tube is multi-walled carbon nano-tubes, double-walled carbon nano-tube or Single Walled Carbon Nanotube.
As a further improvement on the present invention, described anionic polyelectrolyte is kayexalate, hyaluronic acid or poly-sulfonated ethylene sulfate.
As a further improvement on the present invention, described anionic surfactant is neopelex, lauryl sodium sulfate, secondary alcohol polyoxyethylene ether sulphosuccinates or sodium lauroyl sarcosine.
As a further improvement on the present invention, described step S4 is specially:
Place alkali lye to soak the silicon base that is assembled with carbon nano-tube, use washed with de-ionized water, nitrogen dries up to be placed in the molysite aqueous solution and soaks, and uses washed with de-ionized water, and nitrogen dries up, and realizes the ferric ion absorption on carbon nano tube network surface.
As a further improvement on the present invention, the concentration of alkali lye aqueous solution is 0.1moL/L～2moL/L among the described step S4, and soak time is 1h～24h; The concentration of molysite aqueous solution is 0.1moL/L～2moL/L, and soak time is 1h～48h; Twice washed with de-ionized water number of times is 3～4 times.
As a further improvement on the present invention, described alkali lye is the aqueous solution of potassium hydroxide, NaOH, lithium hydroxide or ammoniacal liquor.
As a further improvement on the present invention, described molysite is ferric trichloride, ferric nitrate, ferric acetate and the trivalent iron salt that has water of crystallization thereof.
As a further improvement on the present invention, described step S5 is specially:
The carbon nano tube network that is adsorbed with ferric ion is placed the closed container that contains pyrroles's saturated vapour under 25 ℃～60 ℃ temperature, carry out vapor deposition polymerization reaction 12h～48h, nitrogen dries up after cleaning 3～4 times with washed with de-ionized water 3～4 times, ethanol, realizes that polypyrrole is in the deposition on carbon nano tube network surface.
As a further improvement on the present invention, described step S6 is specially:
Adopt photoetching and lift-off technology in the micro-processing technology to prepare positive and negative electrode.
As a further improvement on the present invention, the control of the spacing of positive and negative electrode is at 4000 μ m～6000 μ m among the described step S6, and the spacing of adjacent electrode is 5 μ m～50 μ m.
The advantage that the present invention is based on the preparation method of carbon nano-tube-polypyrrole composite network structure gas sensor is with silicon chip as substrate, after the method for employing self assembly is assembled into the surface of substrate with carbon nano-tube, utilize vapor deposition polymerization to realize that polypyrrole is in the even distribution on carbon nano tube network surface, further carry out little processing on the composite network surface, can guarantee the good combination between electrode and the composite network.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, the accompanying drawing that describes below only is some embodiment that put down in writing among the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 among the present invention based on the structural representation of carbon nano-tube-polypyrrole composite network structure gas sensor;
Fig. 2 among the present invention based on preparation method's particular flow sheet of carbon nano-tube-polypyrrole composite network structure gas sensor;
Fig. 3 a, 3b are respectively the sem photograph of carbon nano tube network and carbon nano-tube-polypyrrole composite network distribution;
Fig. 4 be in the embodiment of the invention carbon nano tube network sensor and carbon nano-tube-polypyrrole composite network structure gas sensor to the resistance variations response curve of 50ppm ammonia molecule.
Embodiment
Describe the present invention below with reference to embodiment shown in the drawings.But these embodiments do not limit the present invention, and the conversion on the structure that those of ordinary skill in the art makes according to these embodiments, method or the function all is included in protection scope of the present invention.
Join shown in Figure 1ly, the present invention is based on the structural representation of carbon nano-tube-polypyrrole composite network structure gas sensor, the resistance variations that this gas sensor can be when detecting composite mesh and ammonia molecular action realizes the response to the DMMP molecule.Join shown in Figure 2ly, the preparation method of this gas sensor comprises:
S1, silicon base is carried out water wettability handle;
S2, silicon base is carried out amination handle;
S3, carbon nano-tube is assembled on the silicon base;
S4, at carbon nano tube network surface absorption ferric ion;
S5, at carbon nano tube network surface deposition polypyrrole;
S6, little processing and preparing electrode.
This preparation method is specially:
S1, silicon base is carried out water wettability handle.Silicon base is carried out water wettability handle, thereby obtain hydrophilic silicon base.
This silicon base is the SiO that has insulation course
2/ Si substrate;
Water wettability is handled and specifically to be comprised: silicon base is placed the mixed solution (volume ratio is 3:1) of the concentrated sulphuric acid and hydrogen peroxide, handle 1～5h for 80 ℃, take out washing 4～5 times, high pure nitrogen dries up.
S2, silicon base is carried out amination handle.The silicon base that water wettability is handled places the silane coupling agent aqueous solution after immersion a period of time, takes out water flushing 3～4 times, and high pure nitrogen dries up, thereby realizes the amination of silicon base.
Silane coupling agent can be 3-aminopropyl triethoxysilane, 3-aminopropyl trimethoxysilane;
The concentration of silane coupling agent aqueous solution is 1%～5%(massfraction);
Soak time is 12h～36h;
S3, carbon nano-tube is assembled on the silicon base.To after centrifugal treating, place this carbon nano-tube solution to soak amidized silicon base through the carbon nano-tube of modifying with finite concentration ultrasonic dispersion in water, with washed with de-ionized water 3～4 times, nitrogen dries up, 120 ℃ of thermal treatment 1h, thus obtain being assembled with the silicon base of carbon nano-tube.
Can be the carbon nano-tube of carboxylic carbon nano-tube, sulfonation carbon nano-tube, anionic polyelectrolyte modification or the carbon nano-tube that anionic surfactant is modified through the carbon nano-tube of modifying; Carbon nano-tube can be multi-walled carbon nano-tubes, double-walled carbon nano-tube or Single Walled Carbon Nanotube.Wherein, anionic polyelectrolyte can be kayexalate (PSS), hyaluronic acid or poly-sulfonated ethylene sulfate; Anionic surfactant can be neopelex, lauryl sodium sulfate, secondary alcohol polyoxyethylene ether sulphosuccinates or sodium lauroyl sarcosine.
The power of ultrasonic dispersion is 100W～200W, and frequency is 40Hz～80Hz; Ultrasonic time is 1h～3h;
Carbon nano-tube concentration is 0.01mg/mL～10mg/mL;
Centrifugal speed is 10000g～20000g;
Soak time is 1min～24h;
S4, at carbon nano tube network surface absorption ferric ion.Place alkali lye to soak the silicon base that is assembled with carbon nano-tube, use washed with de-ionized water 3～4 times, nitrogen dries up, and is placed in the molysite aqueous solution to soak, and uses washed with de-ionized water 3～4 times, and nitrogen dries up, thereby realizes the ferric ion absorption of carbon nano tube network.
Alkali lye can be the aqueous solution of potassium hydroxide, NaOH, lithium hydroxide, ammoniacal liquor etc.; The concentration of alkali lye aqueous solution is 0.1moL/L～2moL/L; The dipping by lye time is 1h～24h;
Molysite can be ferric trichloride, ferric nitrate, ferric acetate etc. and have the trivalent iron salt of water of crystallization; The concentration of molysite aqueous solution is 0.1moL/L～2moL/L; The soak time of molysite aqueous solution is 1h～48h.
S5, at carbon nano tube network surface deposition polypyrrole.The carbon nano tube network that is adsorbed with ferric ion is placed the closed container that contains pyrroles's saturated vapour, vapor deposition polymerization reaction 12h～48h uses washed with de-ionized water 3～4 times, and ethanol cleans 3～4 times, nitrogen dries up, thereby realizes that polypyrrole is in the deposition on carbon nano tube network surface.
The vapor deposition polymerization temperature is 25 ℃～60 ℃.
S6, little processing and preparing electrode.Adopt photoetching and lift-off technology in the micro-processing technology, control between positive and negative electrode and the spacing between adjacent electrode, at composite network surface preparation gold electrode, thereby obtain based on carbon nano-tube-polypyrrole composite network structure gas sensor.
The spacing control of positive and negative electrode is at 4000 μ m～6000 μ m, and the spacing of adjacent electrode is 5 μ m～50 μ m.
Ginseng Fig. 3 a, 3b are respectively the sem photograph of carbon nano tube network and carbon nano-tube-polypyrrole composite network distribution, the uniform reticulate texture of composite network is arranged as can be seen, with respect to the pure nano-carbon tube network, the diameter of composite nano tube significantly increases simultaneously.
Ginseng Fig. 4 is that carbon nano tube network sensor and carbon nano-tube-polypyrrole composite network structure gas sensor are to the resistance variations response curve of 50ppm ammonia molecule, as can be seen, than simple carbon nano tube network, carbon nano-tube-polypyrrole composite network is greatly improved to the response performance of ammonia molecule.
Further specify below in conjunction with embodiment.
Embodiment 1:
Present embodiment is described preparation method may further comprise the steps:
1, silicon base is placed the mixed solution (volume ratio is 3:1) of the 40mL concentrated sulphuric acid and hydrogen peroxide, handle 5h for 80 ℃, take out washing 4 times, high pure nitrogen dries up, and obtains hydrophilic silicon base.
2, to place massfraction be after 2% 3-aminopropyl triethoxysilane aqueous solution is soaked 12h, to take out water flushing 3 times to the silicon base that water wettability is handled, and high pure nitrogen dries up, thereby realizes the amination of silicon chip.
3, with carboxylated Single Walled Carbon Nanotube ultrasonic 1h in water, control concentration is 1mg/mL, after the 12000g centrifugal treating, the silicon base that amination is handled places this carboxylated Single Walled Carbon Nanotube aqueous solution, soak 20h, use washed with de-ionized water 3 times, nitrogen dries up, 120 ℃ of thermal treatment 1h, thus carbon nano tube modified silicon base obtained.
4, to place concentration be that the potassium hydroxide solution of 0.2moL/L soaks 12h to the silicon chip that will be assembled with carbon nano-tube, with washed with de-ionized water 3 times, nitrogen dries up, be placed in the ferric chloride aqueous solutions that concentration is 0.2moL/L and soak 12h, with washed with de-ionized water 3 times, nitrogen dries up, thereby realizes the ferric ion absorption of carbon nano tube network.
5, the carbon nano tube network that will be adsorbed with ferric ion places the closed container that contains pyrroles's saturated vapour, 25 ℃ of vapor deposition polymerization reactions of room temperature 24h uses washed with de-ionized water 3 times, and ethanol cleans 3 times, nitrogen dries up, thereby realizes that polypyrrole is in the deposition on carbon nano tube network surface.
6, on the silicon base that contains carbon nano-tube-polypyrrole composite network, adopt photoetching and lift-off technology in the micro-processing technology to prepare gold electrode, the spacing of control positive and negative electrode is 5000 μ m, the spacing of adjacent electrode is 10 μ m, thereby obtains based on carbon nano-tube-polypyrrole composite network structure gas sensor.
Embodiment 2:
Step such as embodiment 1 become 1h with water wettability processing time of silicon chip by 5h, and the resistance for preparing device becomes 1500 Ω by 800 Ω.
Embodiment 3:
Step such as embodiment 1 become 36h with amination processing time of silicon chip by 12h, and the resistance for preparing device becomes 700 Ω by 800 Ω.
Embodiment 4:
Step such as embodiment 1 become multi-walled carbon nano-tubes with the kind of carbon nano-tube, and the resistance for preparing device becomes 650 Ω by 800 Ω.
Embodiment 5:
Step such as embodiment 1 become 0.1mg/mL with the concentration of carbon nano-tube by 1mg/mL, and the resistance for preparing device becomes 1200 Ω by 800 Ω.
Embodiment 6:
Step such as embodiment 1 become 1min with the soak time of amidized silicon base in the carboxylic carbon nano-tube aqueous solution by 20h, and the resistance for preparing device becomes 2200 Ω by 900 Ω.
Embodiment 7:
Step such as embodiment 1 bring up to 60 ℃ with the vapor deposition polymerization temperature, and the resistance for preparing device becomes 1300 Ω by 800 Ω.
By above embodiment as can be seen, by changing the technological parameter in the technological process, all can prepare based on carbon nano-tube-polypyrrole composite network structure gas sensor, the difference of technological parameter only influences the resistance of gas sensor.
In sum, the preparation method who the present invention is based on carbon nano-tube-polypyrrole composite network structure gas sensor has following beneficial effect:
The preparation method who the present invention is based on carbon nano-tube-polypyrrole composite network structure gas sensor with silicon chip as substrate, after the method for employing self assembly is assembled into the surface of substrate with carbon nano-tube, utilize vapor deposition polymerization to realize that polypyrrole is in the even distribution on carbon nano tube network surface, further carry out little processing on the composite network surface, can guarantee the good combination between electrode and the composite network.The gas sensor for preparing has been realized the significantly raising to the ammonia response performance.This preparation method's technology is simple simultaneously, is suitable for a large amount of preparations of sensor.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned one exemplary embodiment, and under the situation that does not deviate from spirit of the present invention or essential characteristic, can realize the present invention with other concrete form.Therefore, no matter from which point, all should regard embodiment as exemplary, and be nonrestrictive, scope of the present invention is limited by claims rather than above-mentioned explanation, therefore is intended to include in the present invention dropping on the implication that is equal to important document of claim and all changes in the scope.Any Reference numeral in the claim should be considered as limit related claim.
In addition, be to be understood that, though this instructions is described according to embodiment, but be not that each embodiment only comprises an independently technical scheme, this narrating mode of instructions only is for clarity sake, those skilled in the art should make instructions as a whole, and the technical scheme among each embodiment also can form other embodiments that it will be appreciated by those skilled in the art that through appropriate combination.
Claims (17)
1. preparation method based on carbon nano-tube-polypyrrole composite network structure gas sensor is characterized in that described preparation method may further comprise the steps:
S1, silicon base is carried out water wettability handle;
S2, silicon base is carried out amination handle;
S3, carbon nano-tube is assembled on the silicon base;
S4, at carbon nano tube network surface absorption ferric ion;
S5, at carbon nano tube network surface deposition polypyrrole;
S6, little processing and preparing electrode.
2. preparation method according to claim 1 is characterized in that, described step S1 is specially:
It is the concentrated sulphuric acid and the hydrogen peroxide mixed solution of 3:1 that silicon base is placed volume ratio, takes out washing 4～5 times behind 80 ℃ of processing 1～5h, and dries up with high pure nitrogen.
3. preparation method according to claim 1 is characterized in that, described step S2 is specially:
To place massfraction through the silicon base that step S1 handles is that 1%～5% silane coupling agent aqueous solution is soaked 12h～36h, takes out water flushing 3～4 times, and high pure nitrogen dries up, and realizes the amination of silicon base.
4. preparation method according to claim 3 is characterized in that, described silane coupling agent is 3-aminopropyl triethoxysilane or 3-aminopropyl trimethoxysilane.
5. preparation method according to claim 1 is characterized in that, described step S3 is specially:
Will be ultrasonic in water through the carbon nano-tube of modifying, control carbon nano-tube concentration is after centrifugal treating, after placing this carbon nano-tube solution to soak the amidized silicon base, use washed with de-ionized water, heat-treat after nitrogen dries up, obtain being assembled with the silicon base of carbon nano-tube.
6. preparation method according to claim 5 is characterized in that, among the described step S3 in water ultrasonic time be 1h～3h, ultrasonic power is 100W～200W, ultrasonic frequency is 40Hz～80Hz; Carbon nano-tube concentration is 0.01mg/mL～10mg/mL; Centrifugal speed is 10000g～20000g; Soak time is 1min～24h; The washed with de-ionized water number of times is 3～4 times; Thermal treatment is 120 ℃ and handles 1h.
7. preparation method according to claim 5 is characterized in that, described is the carbon nano-tube of carboxylic carbon nano-tube, sulfonation carbon nano-tube, anionic polyelectrolyte modification or the carbon nano-tube that anionic surfactant is modified through the carbon nano-tube of modifying.
8. preparation method according to claim 5 is characterized in that, described carbon nano-tube is multi-walled carbon nano-tubes, double-walled carbon nano-tube or Single Walled Carbon Nanotube.
9. preparation method according to claim 7 is characterized in that, described anionic polyelectrolyte is kayexalate, hyaluronic acid or poly-sulfonated ethylene sulfate.
10. preparation method according to claim 7 is characterized in that, described anionic surfactant is neopelex, lauryl sodium sulfate, secondary alcohol polyoxyethylene ether sulphosuccinates or sodium lauroyl sarcosine.
11. preparation method according to claim 1 is characterized in that, described step S4 is specially:
Place alkali lye to soak the silicon base that is assembled with carbon nano-tube, use washed with de-ionized water, nitrogen dries up to be placed in the molysite aqueous solution and soaks, and uses washed with de-ionized water, and nitrogen dries up, and realizes the ferric ion absorption on carbon nano tube network surface.
12. preparation method according to claim 11 is characterized in that, the concentration of alkali lye aqueous solution is 0.1moL/L～2moL/L among the described step S4, and soak time is 1h～24h; The concentration of molysite aqueous solution is 0.1moL/L～2moL/L, and soak time is 1h～48h; Twice washed with de-ionized water number of times is 3～4 times.
13. preparation method according to claim 11 is characterized in that, described alkali lye is the aqueous solution of potassium hydroxide, NaOH, lithium hydroxide or ammoniacal liquor.
14. preparation method according to claim 11 is characterized in that, described molysite is ferric trichloride, ferric nitrate, ferric acetate and the trivalent iron salt that has water of crystallization thereof.
15. preparation method according to claim 1 is characterized in that, described step S5 is specially:
The carbon nano tube network that is adsorbed with ferric ion is placed the closed container that contains pyrroles's saturated vapour under 25 ℃～60 ℃ temperature, carry out vapor deposition polymerization reaction 12h～48h, nitrogen dries up after cleaning 3～4 times with washed with de-ionized water 3～4 times, ethanol, realizes that polypyrrole is in the deposition on carbon nano tube network surface.
16. preparation method according to claim 1 is characterized in that, described step S6 is specially:
Adopt photoetching and lift-off technology in the micro-processing technology to prepare positive and negative electrode.
17. preparation method according to claim 16 is characterized in that, the control of the spacing of positive and negative electrode is at 4000 μ m～6000 μ m among the described step S6, and the spacing of adjacent electrode is 5 μ m～50 μ m.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016030710A1 (en) * | 2014-08-25 | 2016-03-03 | Diasys Diagnostics India Private Limited | Carbon nanotubes formulation and uses thereof |
| CN105609636A (en) * | 2016-02-17 | 2016-05-25 | 上海交通大学 | Field effect transistor employing directional single-walled carbon nanotube array as channel and manufacturing method |
| CN105651844A (en) * | 2014-11-12 | 2016-06-08 | 长沙理工大学 | Bi2S3-based ammonia gas sensor and preparation method thereof |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101354368A (en) * | 2008-08-19 | 2009-01-28 | 浙江大学 | Polypyrrole and carbon nano-tube composite gas sensor and manufacturing method thereof |
| CN101935010A (en) * | 2010-09-07 | 2011-01-05 | 上海交通大学 | Preparation method of carbon nano tube nasaltube type gas-sensitive sensor based on polyimide flexible substrate |
| CN102095769A (en) * | 2010-11-29 | 2011-06-15 | 中国科学院苏州纳米技术与纳米仿生研究所 | Carbon-nano-tube air-sensitive sensor and preparation method thereof |
| CN102718408A (en) * | 2012-06-21 | 2012-10-10 | 电子科技大学 | Method for preparing gas-sensitive film |
-
2013
- 2013-06-28 CN CN2013102692093A patent/CN103336032A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101354368A (en) * | 2008-08-19 | 2009-01-28 | 浙江大学 | Polypyrrole and carbon nano-tube composite gas sensor and manufacturing method thereof |
| CN101935010A (en) * | 2010-09-07 | 2011-01-05 | 上海交通大学 | Preparation method of carbon nano tube nasaltube type gas-sensitive sensor based on polyimide flexible substrate |
| CN102095769A (en) * | 2010-11-29 | 2011-06-15 | 中国科学院苏州纳米技术与纳米仿生研究所 | Carbon-nano-tube air-sensitive sensor and preparation method thereof |
| CN102718408A (en) * | 2012-06-21 | 2012-10-10 | 电子科技大学 | Method for preparing gas-sensitive film |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016030710A1 (en) * | 2014-08-25 | 2016-03-03 | Diasys Diagnostics India Private Limited | Carbon nanotubes formulation and uses thereof |
| CN105651844A (en) * | 2014-11-12 | 2016-06-08 | 长沙理工大学 | Bi2S3-based ammonia gas sensor and preparation method thereof |
| CN105651844B (en) * | 2014-11-12 | 2018-08-03 | 长沙理工大学 | A kind of Bi2S3Base ammonia gas sensor and preparation method thereof |
| CN105609636A (en) * | 2016-02-17 | 2016-05-25 | 上海交通大学 | Field effect transistor employing directional single-walled carbon nanotube array as channel and manufacturing method |
| CN105609636B (en) * | 2016-02-17 | 2018-05-08 | 上海交通大学 | Directional single-wall carbon nanotube array is the field-effect transistor and production method of raceway groove |
| CN108459054B (en) * | 2017-02-20 | 2020-06-19 | 天津大学 | Preparation method of silicon nanowire-polypyrrole composite material |
| CN108459054A (en) * | 2017-02-20 | 2018-08-28 | 天津大学 | A kind of preparation method of silicon nanowires-Pt/Polypyrrole composite material |
| CN107174956A (en) * | 2017-06-09 | 2017-09-19 | 天津工业大学 | The preparation method of perfluoroethylene-propylene hollow-fibre membrane with finishing coat |
| CN107174956B (en) * | 2017-06-09 | 2019-02-01 | 天津工业大学 | The preparation method of perfluoroethylene-propylene hollow-fibre membrane with finishing coat |
| CN111293035A (en) * | 2018-12-07 | 2020-06-16 | 中国科学院物理研究所 | Preparation method of carbon nanotube film |
| CN111293035B (en) * | 2018-12-07 | 2022-12-06 | 中国科学院物理研究所 | Preparation method of carbon nanotube film |
| CN110927220A (en) * | 2019-12-10 | 2020-03-27 | 苏州慧闻纳米科技有限公司 | Preparation method of gas-sensitive material for detecting ammonia gas and gas sensor |
| CN110927218A (en) * | 2019-12-10 | 2020-03-27 | 苏州慧闻纳米科技有限公司 | Preparation method of gas-sensitive material for detecting nitrogen dioxide and gas sensor |
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