CN103335754B - Fully-flexible three-dimensional force tactile sensor - Google Patents

Fully-flexible three-dimensional force tactile sensor Download PDF

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CN103335754B
CN103335754B CN201310244322.6A CN201310244322A CN103335754B CN 103335754 B CN103335754 B CN 103335754B CN 201310244322 A CN201310244322 A CN 201310244322A CN 103335754 B CN103335754 B CN 103335754B
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resistance
dimensional force
sensing unit
force tactile
flexible
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CN103335754A (en
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黄英
杨庆华
缪伟
张玉刚
刘彩霞
吴思谕
李锐琦
袁海涛
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Hefei Luyang Technology Innovation Group Co ltd
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Hefei University of Technology
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Abstract

The invention discloses a fully-flexible three-dimensional force tactile sensor. The fully-flexible three-dimensional force tactile sensor is characterized in that in a flexible basal body and on the same plane, a resistor R5 is formed by taking a pressure sensitive element as a center, and four same stretching sensitive elements are respectively arranged in the Y-axis positive direction, the Y-axis negative direction, the X-axis positive direction and the X-axis negative direction respectively, so as to form a resistor R1, a resistor R3, a resistor R2 and a resistor R4; the resistor R1, the resistor R2, the resistor R3, the resistor R4 and the resistor R5 form a three-dimensional force tactile sensing unit which is arranged on the surface of an area to-be-detected. All three-dimensional force tactile sensing units are in an array arrangement on the surface of the area to-be-detected; flexible basal bodies are filled among the three-dimensional force tactile sensing units; the three-dimensional force tactile sensing units and the flexible basal bodies form the three-dimensional force tactile sensor. The three-dimensional force tactile sensor has the advantages of good flexibility, high precision and stable performance.

Description

Fully-flexible three-dimensional force tactile sensor
Technical field
The invention belongs to field of sensing technologies, particularly relate to a kind of 3 D force-touch sensor being applied to robot.
Background technology
Along with the development of Robotics, the research of touch sensor has received increasing concern.At present comparatively ripe to the research of one-dimensional force snesor, but as the intelligent skin of robot, not only need sensor can realize the detection of effects on surface pressure at right angle, also need sensor can the shearing force in detection level direction simultaneously.During as robot gripping object, need perception tangential force, the positive pressure of perception simultaneously.When the object of some surface imperfections of robotic contact, need to realize the three-dimensional even detection of multi-dimensional direction power.The development of 3 D force-touch sensor has become an important research field of intelligent robot technology.
Develop multiple three-dimensional force sensor, for robot skin both at home and abroad at present.The mode that the people such as the Van A H of Japan utilize MEMS technology to paste pressure-sensitive film resistance in rood beam structure has made the 3 D force-touch sensor for robot finger; The people such as the Huang of Taiwan National Chenggong University utilize bending platinum/titanium film, one section being fixed and are arranged to rood beam structure, having made the touch sensor for detecting vertical force and shearing force; The people such as the Su of Taiwan National Tsing Hua University generate anisotropic carbon nano-tube on silicon substrate, and are shifted and revolve on figure to PDMS and made the flexible touch sensation sensor that can detect vertical force and shearing force; These mainly adopt metal or metal oxide rood beam or semiconductor material etc. for the sensor measuring three-dimensional force information, and these materials are all rigid materials, do not have flexibility.
The people such as Chen are with PDMS and PET for matrix material, and ITO has made the flexible capacitance type touch sensor that can detect vertical and shearing force as electrode; The people such as the Xu Fei of Hefei intelligent machine research institute of Chinese University of Science and Technology for matrix material, and are routed to criss-cross construction in material internal levels with carbon black/silicon rubber, have made three-dimensional force flexible touch sensation sensor, have achieved the detection to three-dimensional force.Though the three-dimensional force sensor utilizing conductive rubber to make this has certain flexibility, the Form Characteristic of its electrode and force-sensitive material double contact, cause sensor production process to have very large difficulty, and unreliable in stability and sensitivity.
Summary of the invention
The present invention be for the artificial sensitive skin of intelligent robot provide a kind of flexible, precision is high, the Grazing condition three-dimensional force sensor array of stable performance.
The present invention is that technical solution problem adopts following technical scheme:
The design feature of Fully-flexible three-dimensional force tactile sensor of the present invention is: in flexible substrate, in the same plane, centered by a presser sensor part, form resistance R5; Be arranged in Y-axis positive dirction, Y-axis negative direction, X-axis positive dirction and X-axis positive dirction respectively with four identical stretching position-sensing units, form resistance R respectively 1, resistance R 3, resistance R 2with resistance R 4, form the three-dimensional force tactile sensing unit being arranged on detected region surface; Each three-dimensional force tactile sensing unit is arranged in array in detected region surface, and flexible substrate is filled each other, forms 3 D force-touch sensor.
The design feature of Fully-flexible three-dimensional force tactile sensor of the present invention is also:
Described stretching position-sensing unit is for material with the compliant conductive rubber of the formation of filling carbon nano-pipe in silicon rubber; Described presser sensor part is for material with the compliant conductive rubber of formation carbon black-filled in silicon rubber; Described flexible substrate fills silicon dioxide in silicon rubber, makes described flexible substrate be consistent with the hardness of pulling force position-sensing unit and presser sensor part.
Three-dimensional force in described three-dimensional force tactile sensing unit is pressed following formula and is resolved acquisition:
k x F x = ΔR 2 / R 2 - ΔR 4 / R 4 2
k y F y = ΔR 1 / R 1 - ΔR 3 / R 3 2
k zF z＝ΔR 5/R 5
In above formula:
F x, F yand F zthe suffered in the x, y and z directions acting force of three-dimensional force tactile sensing unit respectively;
K x, k yand k zthat three-dimensional force tactile sensing unit is for directed force F respectively x, F yand F zresistance coefficient, described k x, k yand k zcarry out demarcation by test to obtain;
R 1, R 2, R 3, R 4and R 5the initial resistance of resistance in the y-axis positive dirction of three-dimensional force tactile sensing unit under non-stress, the initial resistance of resistance in x-axis positive dirction respectively, the initial resistance of resistance in y-axis negative direction, the initial resistance of resistance in x-axis negative direction, and the resistance initial value on z-axis direction;
Δ R 1, Δ R 2, Δ R 3, Δ R 4with Δ R 5be when three-dimensional force tactile sensing unit is subject to acting force, be arranged in each stretching position-sensing unit in Y-axis positive dirction, X-axis positive dirction, Y-axis negative direction and X-axis positive dirction respectively and be positioned at the resistance change amount of presser sensor part at center.
Compared with the prior art, beneficial effect of the present invention is embodied in:
1, all making materials of Grazing condition three-dimensional force sensor array of the present invention comprise stretching sensitive material, pressure sensitive material, and matrix material is flexible material, meet the requirement of artificial skin to flexibility;
2, the present invention adopts cross structure, decomposes out by Fx, Fy and Fz, reduces the degree of coupling of resistance data, also reduces the decoupling zero difficulty of algorithm, and making to detect in real time becomes possibility;
3, the present invention's three-dimensional force unit used adopts the method for global formation to shape, its compact conformation, and globality is strong, thus makes its working stability, and easy to use, adaptability is good, applied widely;
4, the range of three-dimensional force of the present invention and sensitivity can being controlled by Packed component ratio contained in stretching sensitive material and pressure sensitive material and scantling, and range of adjustment is wide.
Accompanying drawing explanation
Fig. 1 is three-dimensional force sensing unit structures schematic diagram of the present invention;
Fig. 2 is three-dimensional force sensor of the present invention five equivalent resistance position distribution schematic diagram;
Fig. 3 is the array example structural representation figure of invention sensor;
Number in the figure: 1 stretching sensitive material; 2 pressure sensitive materials; 3 flexible substrates.
Embodiment
See Fig. 1, Fig. 2 and Fig. 3, in the present embodiment, the version of Fully-flexible three-dimensional force tactile sensor is: in flexible substrate, in the same plane, centered by a presser sensor part, form resistance R5; Be arranged in Y-axis positive dirction, Y-axis negative direction, X-axis positive dirction and X-axis positive dirction respectively with four identical stretching position-sensing units, form resistance R respectively 1, resistance R 3, resistance R 2with resistance R 4, form the three-dimensional force tactile sensing unit being arranged on detected region surface; Each three-dimensional force tactile sensing unit is arranged in array in detected region surface, and flexible substrate is filled each other, forms 3 D force-touch sensor.
In the present embodiment, the version of Fully-flexible three-dimensional force tactile sensor is also: stretching position-sensing unit is for material with the compliant conductive rubber of the formation of filling carbon nano-pipe in silicon rubber; Described presser sensor part is for material with the compliant conductive rubber of formation carbon black-filled in silicon rubber; Described flexible substrate fills silicon dioxide in silicon rubber, makes described flexible substrate be consistent with the hardness of pulling force position-sensing unit and presser sensor part.
In concrete enforcement, be arranged in presser sensor part be utilize the compliant conductive rubber of the carbon black-filled formation of silicon rubber for material previously prepared, about the correlation technique content of this material at International Standard Serial Number: " functional material " second phase in 2010 of the domestic unified edition number of ISSN1001-9731: CN50-1099/TH, be publicly reported in the document 1 of " conducing composite material for composite flexible touch sensor is studied " of being delivered by people such as Zhao Xing, Huang Ying, described its excellent piezoresistive characteristic in document 1 and be verified.Four identical stretching position-sensing units are the compliant conductive rubber that formed with filling carbon nano-pipe in silicon rubber for material is previously prepared, about the correlation technique content of this material at International Standard Serial Number: " functional material " the 6th phase in 2013 of the domestic unified edition number of ISSN1001-9731: CN50-1099/TH, by Miao Wei, Huang Ying, be publicly reported in the document 2 of " principle Analysis based on the carbon black/silicon rubber stretch sensor of GEM model " that the people such as Li Ruiqi deliver, described its excellent stretching resistance characteristic in document 2 and be verified.
Concrete preparation be by between presser sensor part and stretching position-sensing unit and surrounding flexible substrate encapsulate as a whole, the flexible matrix material adopted is the flexible insulator of filling silicon dioxide formation in silicon rubber, the hardness of flexible substrate can be controlled by the content of silicon dioxide in adjustment flexible insulator, make the hardness of flexible substrate be consistent with the hardness of pulling force position-sensing unit and presser sensor part.
When there being Z-direction masterpiece to be used on sensing unit, sensor unit forced compression, now its resistance of presser sensor part pressurized is according to the size generation respective change of pressure.When having X, the effect of Y-direction power on the sensor surface, sensor unit stretches by shearing force, and stretching position-sensing unit according to the size of pulling force, corresponding change occurs by its resistance of pulling force.
In fig. 2, the resistance of four stretching position-sensing units and a presser sensor part forms five equivalent resistances, realizes three-dimensional force and detects.
To the mechanism that three-dimensional force information detects be: three-dimensional force acts on pressure force-sensitive material and stretching sensitive material by flexible matrix material, the equivalent resistance R of stretching sensitive material 1, R 2, R 3and R 4when being subject to straining, resistance will change.By realizing F the measurement of four resistance variations x, F ydetection, the equivalent resistance R of pressure sensitive material 5when being subject to straining, resistance changes, by resistance R 5the measurement of change can realize F zdetection.
According to existing research, the size of pressure sensitive material and stretching sensitive material all has impact to straining the size exported.
Work as F xduring effect, R 1be subject to compressive strain resistance to reduce, R 3stretching strain resistance increases, and R 2with R 4be subject to stretching strain but the strain facies that is subject to is by calculating mutual counteracting, resistance variations is ignored.
Work as F yduring effect, R 2be subject to compressive strain resistance to reduce, R 4the increase of stretching strain resistance, is subject to stretching strain but the strain facies be subject to is by calculating mutual counteracting, and resistance variations is ignored.
Work as F zduring effect, R 5be subject to compressive strain, resistance reduces.
Sensor output voltage signal is input to computing machine through switching gate circuit, voltage contrasting amplified circuit, Data collecting conversion, through matrix operation process, obtains F x, F y, F zvalue.
Three-dimensional force in three-dimensional force tactile sensing unit is pressed following formula and is resolved acquisition:
k x F x = ΔR 2 / R 2 - ΔR 4 / R 4 2
k y F y = ΔR 1 / R 1 - ΔR 3 / R 3 2
k zF z＝ΔR 5/R 5
In above formula:
F x, F yand F zthe suffered in the x, y and z directions acting force of three-dimensional force tactile sensing unit respectively;
K x, k yand k zthat three-dimensional force tactile sensing unit is for directed force F respectively x, F yand F zresistance coefficient, described k x, k yand k zcarry out demarcation by test to obtain;
R 1, R 2, R 3, R 4and R 5the initial resistance of resistance in the y-axis positive dirction of three-dimensional force tactile sensing unit under non-stress, the initial resistance of resistance in x-axis positive dirction respectively, the initial resistance of resistance in y-axis negative direction, the initial resistance of resistance in x-axis negative direction, and the resistance initial value on z-axis direction;
Δ R 1, Δ R 2, Δ R 3, Δ R 4with Δ R 5be when three-dimensional force tactile sensing unit is subject to acting force, be arranged in each stretching position-sensing unit in Y-axis positive dirction, X-axis positive dirction, Y-axis negative direction and X-axis positive dirction respectively and be positioned at the resistance change amount of presser sensor part at center.
The touch sensor that the present invention is based on compliant conductive rubber makes by following technique:
First, room temperature synthesis technique is adopted to make presser sensor part and stretching position-sensing unit according to method described in document 1 and document 2; By pressure sensitive material and the impact briquetting of stretching sensitive material, and according to Fig. 1 construction packages in insulation flexible matrix material, flexible insulation matrix adopts silicon rubber to mix with silicon dioxide and form, and makes the hardness of flexible insulation matrix suitable with stretching sensitive material with pressure sensitive material.
Afterwards, touch sensor based on flexible pressure-sensitive conductive rubber is demarcated, with the pressure repeated action of different size in sensor and detect respectively the situation lower sensor of different pressures resistance value with execute stressed relation, with this, sensor is demarcated, by extracting and process three voltage signals that each three-dimensional force sensing unit in three-dimensional force sensitization array exports under three-dimensional contact force effect, linear coupling relation between stressed and three voltage signals of all directions is obtained through linear decoupling zero, the coupled relation between each sensing unit is obtained again through neural network decoupling.

Claims (3)

1. Fully-flexible three-dimensional force tactile sensor, is characterized in that: in flexible substrate, in the same plane, centered by a presser sensor part, form resistance R5; Be arranged in Y-axis positive dirction, Y-axis negative direction, X-axis positive dirction and X-axis negative direction respectively with four identical stretching position-sensing units, form resistance R respectively 1, resistance R 3, resistance R 2with resistance R 4, form the three-dimensional force tactile sensing unit being arranged on detected region surface; Each three-dimensional force tactile sensing unit is arranged in array in detected region surface, and flexible substrate is filled each other, forms 3 D force-touch sensor.
2. Fully-flexible three-dimensional force tactile sensor according to claim 1, is characterized in that: described stretching position-sensing unit is for material with the compliant conductive rubber of the formation of filling carbon nano-pipe in silicon rubber; Described presser sensor part is for material with the compliant conductive rubber of formation carbon black-filled in silicon rubber; Described flexible substrate fills silicon dioxide in silicon rubber, makes described flexible substrate be consistent with the hardness of pulling force position-sensing unit and presser sensor part.
3. Fully-flexible three-dimensional force tactile sensor according to claim 1, is characterized in that: the three-dimensional force in described three-dimensional force tactile sensing unit is resolved by following formula and obtained:
k x F x = Δ R 2 / R 2 - Δ R 4 / R 4 2
k y F y = Δ R 1 / R 1 - Δ R 3 / R 3 2
k zF z＝ΔR 5/R 5
In above formula:
F x, F yand F zthe suffered in the x, y and z directions acting force of three-dimensional force tactile sensing unit respectively;
K x, k yand k zthat three-dimensional force tactile sensing unit is for directed force F respectively x, F yand F zresistance coefficient, described k x, k yand k zcarry out demarcation by test to obtain;
R 1, R 2, R 3, R 4and R 5the initial resistance of resistance in the y-axis positive dirction of three-dimensional force tactile sensing unit under non-stress, the initial resistance of resistance in x-axis positive dirction respectively, the initial resistance of resistance in y-axis negative direction, the initial resistance of resistance in x-axis negative direction, and the resistance initial value on z-axis direction;
Δ R 1, Δ R 2, Δ R 3, Δ R 4with Δ R 5be when three-dimensional force tactile sensing unit is subject to acting force, be arranged in each stretching position-sensing unit in Y-axis positive dirction, X-axis positive dirction, Y-axis negative direction and X-axis negative direction respectively and be positioned at the resistance change amount of presser sensor part at center.
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