CN103335607B - Surface shape inspection method for large-caliber metal off-axis ellipsoidal mirror or parabolic mirror - Google Patents
Surface shape inspection method for large-caliber metal off-axis ellipsoidal mirror or parabolic mirror Download PDFInfo
- Publication number
- CN103335607B CN103335607B CN201310269584.8A CN201310269584A CN103335607B CN 103335607 B CN103335607 B CN 103335607B CN 201310269584 A CN201310269584 A CN 201310269584A CN 103335607 B CN103335607 B CN 103335607B
- Authority
- CN
- China
- Prior art keywords
- dot laser
- caliber metal
- laser unit
- mirror
- checked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 65
- 239000002184 metal Substances 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000007689 inspection Methods 0.000 title description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 23
- 230000003287 optical effect Effects 0.000 claims description 10
- 230000002159 abnormal effect Effects 0.000 claims description 6
- 238000012360 testing method Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 3
- 238000003801 milling Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 6
- 230000004927 fusion Effects 0.000 description 6
- 238000011161 development Methods 0.000 description 5
- 238000005498 polishing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007669 thermal treatment Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005269 aluminizing Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000013036 cure process Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The invention relates to a method for inspecting the surface shape of a large-caliber metal off-axis ellipsoidal mirror or parabolic mirror, wherein the device used in the method for inspecting the surface shape of the large-caliber metal off-axis ellipsoidal mirror or parabolic mirror comprises a base and two or more groups of point laser units which are arranged on the base and can be adjusted at any angle on the base. The invention provides a method for testing the surface shape of a large-caliber metal off-axis ellipsoidal mirror or parabolic mirror, which is convenient to test and has obvious testing effect.
Description
Technical field
The invention belongs to field of optical detection, relate to a kind of optical component surface shape verifying attachment and based on the method for inspection of this verifying attachment to optical component surface shape, particularly relate to a kind of caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape verifying attachment and the method for inspection.
Background technology
Laser fusion is with the inertial confinement fusion of high-energy short-pulse light laser as drive source, indirectly driving in fusion, first laser incide target cavity wall and produce X ray and plasma, and X ray burns pellet, compressed fuel realizes fusion, and X ray is the Direct driver source of fusion.Incident laser pulse is a train pulse, first the laser pulse of follow-up incidence meets with plasma before arrival target cavity wall, plasma has scattering process to incident laser, quite a few laser energy is scattered out target chamber, the laser energy of arrival target cavity wall is weakened, has blocked the entrance of laser as plasma." block up " and cause laser significantly to reduce to the transformation efficiency of X ray, the compression effectiveness of fusion fuel can be had a strong impact on.
Backscattering diagnostic system is one of key equipment of research " blocking up " problem, and it is by collecting plasma diffusion light and its energy, spectrum, time response measurement being carried out to the mechanism of Study of Laser and Plasma Interaction.This system needs development, and " diameter is
endoporus is
annular off-axis ellipsoidal mirror " and " diameter is
off-axis paraboloidal mirror " for the collection of scattered light, the former is installed on diameter
spheroid target chamber in, the latter is installed on outside spheroid.The Material selec-tion of catoptron and version are the emphasis of design: because of the demand of lightweight, low cost, two catoptrons all adopt Imported Aluminium alloy material, and machining property is good; Annular ellipsoidal mirror because of size large, if Integral design just cannot enter spheroid target chamber, the form thus adopting pintongs to splice, is not only easy to enter sphere installation, and be convenient to optionally partial dismantling to get rid of the impact of Local stronger disturbance light.But, be the difficult point of catoptron development from the processing of axle speculum and detection.
The difficulty of processing is mainly derived from catoptron from axle amount large (, from axle 1.4m, parabolic lens is from axle 3.8m for ellipsoidal mirror), carrousel cannot be adopted to process, can only adopt milling.Milling operation is very meticulous: rough mill, thermal treatment, shaping milling, thermal treatment, finish-milling, but finish-milling rear surface smooth finish is still lower, also there are trickle milling tool marks; Then mirror-polishing wanted by workpiece: underhand polish, polishing, plating nickel on surface cure process, underhand polish polishing again, and aluminizing high-reflecting film and diaphragm in surface, finally reaches mirror effect.
What the checkout equipment of aspheric mirror was conventional has contourgraph and knife.Contourgraph is by drawing minute surface profile to the pointwise contact measurement of minute surface, and the method is very directly perceived, can measure the error condition of every bit; But measure very consuming time, easily damage minute surface, equipment price also costly.Knife is also a kind of very effective optical element checkout equipment, can find out the aberration situation that minute surface exists; But the scattered light for low precision is collected and detected aberration mirror is obviously unnecessary, causes the waste of cost.In addition, if catoptron detects after reaching minute surface, once mirror shape has problem, will do over again from finish-milling operation.Therefore, if can find a kind of intermediate link from development just can detection faces shape low cost, intuitively, equipment easily, just can reduce risk of doing over again, raising development efficiency.
Summary of the invention
In order to solve the above-mentioned technical matters existed in background technology, the invention provides one and being convenient to inspection and the obvious caliber metal off-axis ellipsoidal mirror of test effect or parabolic mirror surface shape verifying attachment and the method for inspection.
Technical solution of the present invention is: the invention provides a kind of caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape verifying attachment, its special character is: described caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape verifying attachment comprise pedestal and be arranged on two groups or more the dot laser unit that pedestal also can carry out on pedestal arbitrarily angled adjustment.
When above-mentioned dot laser unit is more than two, described dot laser unit comprises central point laser element and around the periphery dot laser unit being arranged on central point laser element outside.
Above-mentioned periphery dot laser unit is inner ring periphery dot laser unit and around periphery, the outer ring dot laser unit being arranged on dot laser unit outside, inner ring periphery.
Above-mentioned dot laser unit comprises ball and socket joint seat, spherical joint and dot laser; Described ball and socket joint seat is arranged on pedestal; Described dot laser is arranged on ball and socket joint seat by spherical joint.
Based on the method that caliber metal off-axis ellipsoidal mirror as above or parabolic mirror surface shape verifying attachment are tested to caliber metal off-axis ellipsoidal mirror face shape, its special character is: said method comprising the steps of:
1) adjust the position of dot laser unit on pedestal, the laser that the dot laser in two groups or more dot laser unit is launched converges a common focus, and this focus described is light beam convergent point;
2) the light beam convergent point in step 1) is placed in the first focus place of caliber metal off-axis ellipsoidal mirror to be measured, the diverse location that the laser that the dot laser in difference laser element is launched is incident to caliber metal off-axis ellipsoidal mirror to be checked reflects;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of caliber metal off-axis ellipsoidal mirror to be checked of launching according to the dot laser in dot laser unit; If the second focus place to caliber metal off-axis ellipsoidal mirror to be checked is assembled in reflection, then the face shape of caliber metal off-axis ellipsoidal mirror to be checked is normal; If reflect the second focus place that can not assemble to caliber metal off-axis ellipsoidal mirror to be checked, then the face shape of caliber metal off-axis ellipsoidal mirror to be checked is abnormal.
Based on the method that caliber metal off-axis ellipsoidal mirror as above or parabolic mirror surface shape verifying attachment are tested to caliber metal off-axis paraboloidal mirror face shape, it is characterized in that: said method comprising the steps of:
1) adjust the position of dot laser unit on pedestal, the laser that the dot laser in two groups or more dot laser unit is launched and the optical axis of caliber metal off-axis paraboloidal mirror to be checked are parallel to each other;
2) diverse location laser that the dot laser in difference laser element is launched being incident to caliber metal off-axis paraboloidal mirror to be checked reflects;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of caliber metal off-axis paraboloidal mirror to be checked of launching according to the dot laser in dot laser unit; If the focus place to caliber metal off-axis paraboloidal mirror to be checked is assembled in reflection, then the face shape of caliber metal off-axis paraboloidal mirror to be checked is normal; If reflect the focus place that can not assemble to caliber metal off-axis paraboloidal mirror to be checked, then the face shape of caliber metal off-axis paraboloidal mirror to be checked is abnormal.
Advantage of the present invention is:
The invention provides a kind of caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape verifying attachment and the method for inspection, this device is made up of a large amount of rotating dot laser, can simulation points light source and parallel beam, meets the detection light source demand of ellipsoidal mirror and parabolic lens; Light source of the present invention is discrete, clearly can find out the incoming position of every beam of laser on minute surface and the converged position at focus place, detects very directly perceived; It is low to detection faces smoothness requirements, still can judge principal reflection ray position according to " bright spot of view-field center " of strip scattering hot spot when even minute surface exists turnning and milling tool marks, can to finish-milling and the metallic mirror surface of simple polishing carries out surface testing; Single detects the situation that can reflect whole shape.Device provided by the present invention has that detection speed is fast, cost is low, directly perceived, can carry out the advantage such as controlling from the intermediate link of development, through and the contrast test of other checkout equipment, show that this device is reliable.
Accompanying drawing explanation
Fig. 1 be provided by the present invention shape verifying attachment structural representation (wherein, Fig. 1 a be provided by the present invention shape verifying attachment face structural representation; Fig. 1 b is that the A-A of Fig. 1 a is to cut-open view);
Fig. 2 is schematic diagram when assembling laser beam based on device provided by the present invention;
Fig. 3 is schematic diagram when detecting ellipsoidal mirror based on device provided by the present invention;
Fig. 4 is schematic diagram when detecting parabolic lens based on device provided by the present invention;
Wherein:
1-pedestal 2-ball and socket joint seat 3-spherical joint; 4-dot laser.
Embodiment
The invention provides a kind of caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape verifying attachment, this device comprises pedestal 1 and is arranged on two groups or more the dot laser unit that pedestal 1 also can carry out on pedestal 1 arbitrarily angled adjustment, when dot laser unit is more than two, dot laser unit comprises central point laser element and around the periphery dot laser unit being arranged on central point laser element outside.
Periphery dot laser unit is inner ring periphery dot laser unit and around periphery, the outer ring dot laser unit being arranged on dot laser unit outside, inner ring periphery.
Such as shown in Fig. 1 (Fig. 1 a and Fig. 1 b), verifying attachment provided by the present invention is formed by 19 " dot laser 4 " arrays, central distribution 1 (central point laser element), inner ring (inner ring periphery dot laser unit) is uniformly distributed 6, and outer ring (periphery, outer ring dot laser unit) is uniformly distributed 12.Dot laser unit comprises ball and socket joint seat 2, spherical joint 3 and dot laser 4; Ball and socket joint seat 2 is arranged on pedestal 1; Dot laser 4 is arranged on ball and socket joint seat 2 by spherical joint 3.Each " dot laser 4 " is installed in one " spherical joint 3 ", and " spherical joint 3 " passes through " ball and socket joint seat 2 " and be fixed on " pedestal 1 ", and laser instrument freely can rotate around " spherical joint 3 ".The number of laser array and spread geometry can be determined according to the shape of concrete detected object and size.
Because each " dot laser 4 " all freely can rotate around spherical joint 3, therefore the beam shape of whole laser beam device can freely change.When detecting for optical element, the shape of laser beam can be adjusted according to the optical characteristics of element to be checked.
If each " dot laser 4 " all any rotation does not occur, then laser beam device emergent light is the parallel beam be made up of several light; If the light beam of all laser instruments is converged at front a bit (as Fig. 2), then device can simulate the pointolite that sends some light.
If element to be checked is ellipsoidal reflector, because the light beam sent from ellipsoidal mirror focus reflects post-concentration in another focus of ellipsoidal mirror through ellipsoidal mirror, can characteristic pointolite be adopted to detect ellipsoidal mirror accordingly, make it to converge at front a bit (as shown in Figure 2) by each laser instrument adjusting laser beam device, the maximum subtended angle of convergent beam can be determined according to the subtended angle of element to be checked.Based on this, see Fig. 3, based on the method that verifying attachment provided by the present invention is tested to caliber metal off-axis ellipsoidal mirror face shape, the method comprises the following steps:
1) adjust the position of dot laser unit on pedestal 1, the laser that the dot laser 4 in two groups or more dot laser unit is launched assembles a common focus, and this focus is light beam convergent point;
2) the light beam convergent point in step 1) is placed in the first focus place of caliber metal off-axis ellipsoidal mirror to be measured, the diverse location that the laser that the dot laser 4 in difference laser element is launched is incident to caliber metal off-axis ellipsoidal mirror to be checked reflects;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of caliber metal off-axis ellipsoidal mirror to be checked of launching according to the dot laser 4 in dot laser unit; If the second focus place to caliber metal off-axis ellipsoidal mirror to be checked is assembled in reflection, then the face shape of caliber metal off-axis ellipsoidal mirror to be checked is normal; If reflect the second focus place that can not assemble to caliber metal off-axis ellipsoidal mirror to be checked, then the face shape of caliber metal off-axis ellipsoidal mirror to be checked is abnormal.
If element to be checked is parabolic lens, according to the optical characteristics of parabolic lens, the light beam parallel with axis of symmetry will converge at parabolic lens focal point F place (as shown in Figure 4) after parabolic lens reflection, and each laser instrument adjusting laser beam device accordingly makes it outgoing beam and is parallel to each other to simulate bigbore parallel beam.
See Fig. 4, based on the method that verifying attachment provided by the present invention is tested to caliber metal off-axis paraboloidal mirror face shape, the method comprises the following steps:
1) adjust the position of dot laser unit on pedestal 1, the laser that the dot laser 4 in two groups or more dot laser unit is launched and the optical axis of caliber metal off-axis paraboloidal mirror to be checked are parallel to each other;
2) diverse location laser that the dot laser 4 in difference laser element is launched being incident to caliber metal off-axis paraboloidal mirror to be checked reflects;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of caliber metal off-axis paraboloidal mirror to be checked of launching according to the dot laser 4 in dot laser unit; If the focus place to caliber metal off-axis paraboloidal mirror to be checked is assembled in reflection, then the face shape of caliber metal off-axis paraboloidal mirror to be checked is normal; If reflect the focus place that can not assemble to caliber metal off-axis paraboloidal mirror to be checked, then the face shape of caliber metal off-axis paraboloidal mirror to be checked is abnormal.
Claims (2)
1., based on the method that caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape verifying attachment are tested to caliber metal off-axis ellipsoidal mirror face shape, described caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape verifying attachment comprise pedestal and are arranged on two groups or more the dot laser unit that pedestal also can carry out on pedestal arbitrarily angled adjustment; When described dot laser unit is more than two, described dot laser unit comprises central point laser element and around the periphery dot laser unit being arranged on central point laser element outside; Described periphery dot laser unit is inner ring periphery dot laser unit and around periphery, the outer ring dot laser unit being arranged on dot laser unit outside, inner ring periphery; Described dot laser unit comprises ball and socket joint seat, spherical joint and dot laser; Described ball and socket joint seat is arranged on pedestal; Described dot laser is arranged on ball and socket joint seat by spherical joint; It is characterized in that: said method comprising the steps of:
1) adjust the position of dot laser unit on pedestal, the laser that the dot laser in two groups or more dot laser unit is launched assembles a common focus, and this focus described is light beam convergent point;
2) by step 1) in light beam convergent point be placed in the first focus place of caliber metal off-axis ellipsoidal mirror to be measured, the diverse location that the laser that the dot laser in difference laser element is launched is incident to caliber metal off-axis ellipsoidal mirror to be checked reflects;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of caliber metal off-axis ellipsoidal mirror to be checked of launching according to the dot laser in dot laser unit; If the second focus place to caliber metal off-axis ellipsoidal mirror to be checked is assembled in reflection, then the face shape of caliber metal off-axis ellipsoidal mirror to be checked is normal; If reflect the second focus place that can not assemble to caliber metal off-axis ellipsoidal mirror to be checked, then the face shape of caliber metal off-axis ellipsoidal mirror to be checked is abnormal.
2., based on the method that caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape verifying attachment are tested to caliber metal off-axis paraboloidal mirror face shape, described caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape verifying attachment comprise pedestal and are arranged on two groups or more the dot laser unit that pedestal also can carry out on pedestal arbitrarily angled adjustment; When described dot laser unit is more than two, described dot laser unit comprises central point laser element and around the periphery dot laser unit being arranged on central point laser element outside; Described periphery dot laser unit is inner ring periphery dot laser unit and around periphery, the outer ring dot laser unit being arranged on dot laser unit outside, inner ring periphery; Described dot laser unit comprises ball and socket joint seat, spherical joint and dot laser; Described ball and socket joint seat is arranged on pedestal; Described dot laser is arranged on ball and socket joint seat by spherical joint; It is characterized in that: said method comprising the steps of:
1) adjust the position of dot laser unit on pedestal, the laser that the dot laser in two groups or more dot laser unit is launched and the optical axis of caliber metal off-axis paraboloidal mirror to be checked are parallel to each other;
2) diverse location laser that the dot laser in difference laser element is launched being incident to caliber metal off-axis paraboloidal mirror to be checked reflects;
3) judgement of face shape is carried out in the position of laser after the diverse location reflection of caliber metal off-axis paraboloidal mirror to be checked of launching according to the dot laser in dot laser unit; If the focus place to caliber metal off-axis paraboloidal mirror to be checked is assembled in reflection, then the face shape of caliber metal off-axis paraboloidal mirror to be checked is normal; If reflect the focus place that can not assemble to caliber metal off-axis paraboloidal mirror to be checked, then the face shape of caliber metal off-axis paraboloidal mirror to be checked is abnormal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310269584.8A CN103335607B (en) | 2013-06-28 | 2013-06-28 | Surface shape inspection method for large-caliber metal off-axis ellipsoidal mirror or parabolic mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310269584.8A CN103335607B (en) | 2013-06-28 | 2013-06-28 | Surface shape inspection method for large-caliber metal off-axis ellipsoidal mirror or parabolic mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103335607A CN103335607A (en) | 2013-10-02 |
| CN103335607B true CN103335607B (en) | 2015-12-02 |
Family
ID=49243815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310269584.8A Expired - Fee Related CN103335607B (en) | 2013-06-28 | 2013-06-28 | Surface shape inspection method for large-caliber metal off-axis ellipsoidal mirror or parabolic mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103335607B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204228121U (en) * | 2014-10-09 | 2015-03-25 | 无锡中科光电技术有限公司 | A kind of ellipsoidal mirror surface shape detection apparatus |
| CN106989693B (en) * | 2017-05-12 | 2022-10-21 | 中国工程物理研究院激光聚变研究中心 | Off-axis ellipsoidal mirror surface shape detection device and detection method thereof |
| CN107991064B (en) * | 2017-12-14 | 2024-01-30 | 中国科学院西安光学精密机械研究所 | Near back scattering light measuring system resistant to stray light interference |
| CN108168701B (en) * | 2017-12-14 | 2024-04-12 | 中国科学院西安光学精密机械研究所 | Full-aperture back-scattered light measurement system for clustered targeting laser |
| CN110118645B (en) * | 2019-04-19 | 2021-11-05 | 西北核技术研究所 | Optical performance comprehensive evaluation method of semi-ellipsoid reflecting surface |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1403783A (en) * | 2002-09-18 | 2003-03-19 | 清华大学 | Apex cuvature radius measuring method and device for aspherics |
| CN102435150A (en) * | 2011-09-15 | 2012-05-02 | 湘潭电机股份有限公司 | Method and device for detecting surface precision of dish parabolic reflecting mirror |
| CN102519388A (en) * | 2011-10-28 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting surface figures of large-aperture off-axis convex aspheric mirror |
| CN203364773U (en) * | 2013-06-28 | 2013-12-25 | 中国科学院西安光学精密机械研究所 | Large-caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape inspection device |
-
2013
- 2013-06-28 CN CN201310269584.8A patent/CN103335607B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1403783A (en) * | 2002-09-18 | 2003-03-19 | 清华大学 | Apex cuvature radius measuring method and device for aspherics |
| CN102435150A (en) * | 2011-09-15 | 2012-05-02 | 湘潭电机股份有限公司 | Method and device for detecting surface precision of dish parabolic reflecting mirror |
| CN102519388A (en) * | 2011-10-28 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting surface figures of large-aperture off-axis convex aspheric mirror |
| CN203364773U (en) * | 2013-06-28 | 2013-12-25 | 中国科学院西安光学精密机械研究所 | Large-caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape inspection device |
Non-Patent Citations (1)
| Title |
|---|
| 神光Ⅲ原型装置的近背向散射光诊断***;徐涛等;《强激光与粒子束》;20121231;第24卷(第12期);第2853-2855页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103335607A (en) | 2013-10-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103335607B (en) | Surface shape inspection method for large-caliber metal off-axis ellipsoidal mirror or parabolic mirror | |
| CN108871733B (en) | Near-field detection device of large-caliber optical system and measurement method thereof | |
| CN103017681B (en) | Real time detecting method for rotary shaft symmetrically concave aspheric surfaces approximate to paraboloids | |
| JP7160564B2 (en) | Method for detecting imaging quality of optical system | |
| CN110375964A (en) | It is a kind of based on extension how the wavefront error detection device and detection method of bohr-Zernike polynominal optimization phase recovery | |
| CN202471018U (en) | Large-caliber plane mirror surface shape detection device | |
| CN102564340A (en) | Large-caliber plane mirror surface shape detection device | |
| CN106997091B (en) | A kind of laser angular measurement lens optical system | |
| TW201534879A (en) | Infrared thermometer and method for measuring temperature of energy zone | |
| JP2015519616A (en) | A real-eye telecentric imager with total reflection | |
| CN102937421A (en) | Real-time detection method of symmetrical optical non-spherical face of rotary shaft | |
| CN115166932B (en) | Optical axis adjusting method of large-caliber long-focus off-axis optical system | |
| KR20170095273A (en) | Lens array-based illumination for wafer inspection | |
| CN203364773U (en) | Large-caliber metal off-axis ellipsoidal mirror or parabolic mirror surface shape inspection device | |
| CN103196391A (en) | Quick surface shape detection method of annular concave aspheric surface near to paraboloid | |
| CN202221493U (en) | Large-aperture parallel light beam expanding device | |
| CN104019893A (en) | Offner structure imaging spectrometer | |
| CN205192727U (en) | Array corner reflector pointing accuracy measurement system | |
| RU108600U1 (en) | TWO-MIRROR CENTERED OPTICAL SYSTEM ADJUSTMENT DEVICE | |
| CN104142130A (en) | Fizeau laser interferometer standard reference mirror with F number of 0.6 | |
| Campos-García et al. | New null screen design for corneal topography | |
| CN114185144A (en) | Method for adjusting large-caliber optical system based on small-caliber plane mirror | |
| CN208736353U (en) | A kind of detection focal length measures greatly the optical system of off axis paraboloidal mirror off axis | |
| CN202853744U (en) | Strip-shaped light spot wavefront testing device | |
| RU2643707C1 (en) | Infrared three-lens objective |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151202 Termination date: 20160628 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |