CN103335548A - Temperature control gas phase working medium perfusion method for micron heat pipe - Google Patents
Temperature control gas phase working medium perfusion method for micron heat pipe Download PDFInfo
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- CN103335548A CN103335548A CN2013102317327A CN201310231732A CN103335548A CN 103335548 A CN103335548 A CN 103335548A CN 2013102317327 A CN2013102317327 A CN 2013102317327A CN 201310231732 A CN201310231732 A CN 201310231732A CN 103335548 A CN103335548 A CN 103335548A
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Abstract
The invention discloses a temperature control gas phase working medium perfusion method for a micron heat pipe, which is applied to heat dissipation of high heating flux devices. The method is characterized in that the temperature of the micron heat pipe and the temperature of a working medium container are respectively controlled; the micron heat pipe and the working medium container are respectively vacuumized; then the working medium container is connected with a working medium source, so that working medium steam can get into the working medium container; the micron heat pipe and the working medium container are communicated, so that perfusion of the gas phase working medium can be realized by utilizing the temperature difference between the micron heat pipe and the working medium container; the perfusion amount of the working medium can be controlled as per time, and after a perfusion port of the micron heat pipe is sealed, working medium perfusion for the micron heat pipe is accomplished. The working medium exists in a perfusion system in gas phase, so the perfusion rate, the repeatability and the controllability are good; the temperature of the micron heat pipe and the temperature of the working medium are respectively controlled, so that the perfusion efficiency of the working medium is improved; the method can improve the performance of the micron heat pipe.
Description
Technical field
The invention belongs to the micro element encapsulation field, relate to the method for a kind of micro heat pipe gas phase temperature control perfusion working medium in vacuum environment, be applied to the heat radiation of high heat flux device.
Background technology
Along with the development of social scientific and technological level, electronic equipment is to multi-functional, high-power and trend toward miniaturization development; Highdensity organizational technology also is widely used in the various devices simultaneously.According to statistics, 55% electronic equipment lost efficacy and caused owing to temperature is too high.And from the eighties in last century so far, the heat radiation density of electronic devices and components has increased by 15 times, the heat flow density of great power LED and high-performance CPU has reached 100W/cm especially
2More than.Therefore how efficiently, controllably the heat in such electronic devices and components is reliably shed and become the focus of designs aspect in recent years.Typical passive heat transfer device-micro heat pipe can be eliminated hot spot fast in conjunction with the heat sink heat radiation that has been widely used in CPU, video card and LED etc. of high heat conductance, reduces the thermograde of device simultaneously.
Concept [the Cotter of micro heat pipe is proposed from Cotter1984, T.P., Principles and Prospects for Micro Heat Pipes, Proceedings of the5th International Heat Pipe Conference, Tsukuba, Japan, 1984:328-335] since, scholars have carried out a large amount of theories and experimental study to it.In recent years, along with the development of MEMS technology, the dull and stereotyped micro heat pipe that structure is more compact begins to enter the people visual field.Compare with the tubulose micro heat pipe, it contacts better with the high temperature face of micro element, more is conducive to the heat conduction.But its special structure has also caused the difficult point of manufacturing process, and how in tens working medium of accurately pouring into certain mass to the inside heat pipe of several hectolambdas, the vacuum of not destroying inside heat pipe simultaneously becomes the manufacturing bottleneck technology of such heat pipe.
Existent method is primarily aimed at working medium perfusion and the encapsulation of metal micro heat pipe and carries out.Mainly comprise earlier vacuumizing, pour into working medium [Lu Longsheng, soup is brave, Yuan Dong, Jiang Lelun, the perfusion of micro heat pipe vacuumizes manufacturing technology, mechanical engineering journal, 2009] again.The shortcoming of this method is working medium vaporization rapidly under vacuum, is difficult to the accurately perfusion ratio of control working medium.Second method is to carry out the working medium perfusion earlier, carry out boiling and exhaust method [Xiaowei Liu afterwards, et al., Design and Fabrication of Flat Heat Pipes with different length, 2011] or vacuumizing and exhausting method [Lu Longsheng, Tang Yong, Yuan Dong, Jiang Lelun, the perfusion of micro heat pipe vacuumizes manufacturing technology, the mechanical engineering journal, 2009] the interior vacuum of realization heat pipe.The shortcoming of this method is affected by environment bigger, and working medium can be lost.The third method is that the perfusion of vacuum working medium is carried out [Li Yong simultaneously with degasification, He Chengbin, Ceng Zhixin, a kind of heat-tube vacuum topping up and degasification method and equipment thereof: China, 201210177728.2], this method is applicable to the heat pipe than the macrostructure size, for tens using to the perfusion volume of several hectolambdas in the micro heat pipe.
Summary of the invention
The objective of the invention is to overcome the shortcoming and defect of prior art and method, a kind of working medium method for filling that can be applicable to micro heat pipe is provided, guarantee the vacuum in the heat pipe of perfusion back simultaneously.
Technical scheme of the present invention is as follows:
A kind of gas phase temperature control working medium method for filling of micro heat pipe, concrete technical scheme is as follows:
The first step: open temperature control system, make micro heat pipe reach design temperature.The working medium fill orifice of waiting to pour into the micro heat pipe of working medium is linked to each other with vavuum pump and vacuumize, reach the vacuum of setting.
Second step: utilize temperature control system to make working medium and working medium source container reach design temperature.Afterwards the working medium source container is connected with vavuum pump and vacuumizes, reach set vacuum after, UNICOM's working medium and working medium source container, making does not have other gaseous matters in the working medium source container except working substance steam.
The 3rd step: be communicated with micro heat pipe and working medium source container, this moment, working substance steam just can enter in the cavity of micro heat pipe endlessly.Because the design temperature of micro heat pipe is lower than the design temperature of working medium, so liquid state is returned in working medium condensable in micro heat pipe.The working medium groundwater increment is by the control of control connection time, utilizes the quality of electronic balance weighing perfusion front and back micro heat pipe, and then obtains the empirical value table of working medium groundwater increment under the different time.
The 4th step: tabling look-up obtains the connection time of required working medium groundwater increment correspondence.Repeat the first step and second step, be communicated with micro heat pipe and working medium source container afterwards, reach connection and cut off the perfusion path during time.
The 5th step: to the sealing-in of micro heat pipe perfusing hole, finish the working medium perfusion.
Effect of the present invention and benefit are: owing to adopt the gas phase perfusion, so the working medium in the priming line system also exists with gas phase, and the working medium loss of cutting off the perfusion path is few, is applicable to the micro liquid perfusion, the filling rate control of working medium better, the repeatability of perfusion might as well; Temperature control makes working medium source container and micro heat pipe be in different temperatures, improves the working medium charging efficiency; Therefore the incoagulable gas that exists in the working medium is lighter, is gathered in the top of working medium source container, can offer connecting pipeline in the middle and lower part to link to each other with heat pipe, thereby only Working medium gas be arranged and do not have incoagulable gas and enter micro heat pipe, raising micro heat pipe performance.
Description of drawings
Fig. 1 is the structural representation of micro heat pipe gas phase temperature control device for casting of the present invention.
Among the figure: 1 first water bath with thermostatic control; 2 working medium; 3 first temperature sensors; 4 magnetic valves; 5 working medium annular seal spaces; 6 first vacuum valves; 7 second vacuum valves; 8 three-way diverter valves; 9 second temperature sensors; 10 vacuum meters; 11 the 3rd vacuum valves; 12 micro heat pipes; 13 second waters bath with thermostatic control; 14 vavuum pumps.
The specific embodiment
Below in conjunction with technical scheme and accompanying drawing, be described in detail specific embodiments of the invention.
Embodiment 1
Apparatus structure schematic diagram of the present invention provides part, three parts of micro heat pipe part and vacuum line system to form by working medium as shown in Figure 1.Working medium provides part by first water bath with thermostatic control 1, working medium 2, and first temperature sensor 3, magnetic valve 4 and working medium annular seal space 5 are formed.The micro heat pipe part is by second temperature sensor 9, and micro heat pipe 12 and second water bath with thermostatic control 13 are formed.The vacuum line system is by first vacuum valve, 6, the second vacuum valves 7, three-way diverter valve 8, and vacuum meter 10, the three vacuum valves 11 and vavuum pump 14 are formed.
In the present embodiment, temperature control system adopts the water-bath attemperating unit, also can adopt other attemperating units such as hot plate and constant temperature oven.The working medium of perfusion adopts deionized water, also can adopt organic solvent such as methyl alcohol, ethanol and isopropyl alcohol or nanoparticles solution etc.
At first open 1 to 50 ° of C of first water bath with thermostatic control, the temperature of first water bath with thermostatic control 1 is between the fusing point and boiling point of worker quality liquid, and present embodiment is selected 50 ° of C.Swivel tee reversal valve 8 makes vavuum pump 14 be communicated with working medium annular seal space 5, opens first vacuum valve 6 and the 3rd vacuum valve 11, closes second vacuum valve 7, uses 14 pairs of working medium annular seal spaces 5 of vavuum pump to vacuumize.
Vacuum in the working medium annular seal space 5 is identical with the vacuum of the needs of macroscopical tubular heat tube.After vacuum meter 10 shows to reach required vacuum, close first vacuum valve 6, open magnetic valve 4, make the working medium deionized water of micro heat pipe enter working medium annular seal space 5 with the vapor form of 50 ° of C of bath temperature.
Afterwards, open second vacuum valve 7 and the 3rd vacuum valve 11, swivel tee reversal valve 8 makes the vacuum line system be communicated with micro heat pipe 12, and it is vacuumized.Regulate the temperature of second water bath with thermostatic control 13, reach 20 ° of C of filling temperature, filling temperature and is lower than the working medium temperature also between the fusing point and boiling point of working medium, just the temperature of first water bath with thermostatic control 1.
At last, after vacuum meter 10 shows to reach required vacuum, close the 3rd vacuum valve 11, swivel tee reversal valve 8, open first vacuum valve 6 and second vacuum valve 7, micro heat pipe 12 is communicated with working medium annular seal space 5, at this moment gaseous working medium can charge in the cavity of micro heat pipe 12 and condense.Look into the empirical value table and obtain infusion time, after reaching setting-up time, close first vacuum valve 6 and second vacuum valve 7, and the working medium perfusing hole of heat sealing micro heat pipe 12, accurate working medium amount just perfusion has been advanced micro heat pipe 12.
Claims (1)
1. the method for micro heat pipe gas phase temperature control perfusion working medium in vacuum environment is applied to the heat radiation of high heat flux device, it is characterized in that the step of this method is as follows:
A) control the temperature of micro heat pipe and working medium container respectively, temperature range be the fusing point of working medium to boiling point, and the temperature of micro heat pipe is lower than the temperature of working medium container;
B) micro heat pipe and working medium container vacuumize respectively, and vacuum is consistent with the vacuum of macroscopical conventional heat pipe, afterwards working medium container are linked to each other with the working medium source, obtain working substance steam in working medium container;
C) be communicated with micro heat pipe and working medium container, utilize both temperature differences to realize the perfusion of gas phase working medium, reach groundwater increment after, the perfusing hole of sealing-in micro heat pipe is realized the working medium perfusion of micro heat pipe.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104006687A (en) * | 2014-05-15 | 2014-08-27 | 华南理工大学 | Working medium steam perfusion device and method for flat plate type multi-channel heat pipe |
| CN104075599A (en) * | 2014-05-21 | 2014-10-01 | 海康创业(北京)科技有限公司 | Passive integrated heat pipe perfusion device |
| CN104457350A (en) * | 2014-11-03 | 2015-03-25 | 大连理工大学 | Micro heat pipe packaging method with peristaltic pump adopted for pouring |
| CN105444596A (en) * | 2015-12-14 | 2016-03-30 | 上海利正卫星应用技术有限公司 | Filling device of heat pipe phase change working medium and using method of filling device |
| CN106698309A (en) * | 2015-07-20 | 2017-05-24 | 江苏宏力光电科技有限公司 | Novel heat pipe liquid injection equipment |
| CN106931814A (en) * | 2017-03-09 | 2017-07-07 | 广东工业大学 | A kind of flat-plate type micro heat pipe evacuation priming device and its method |
| CN108106471A (en) * | 2017-12-15 | 2018-06-01 | 陕西仙童科技有限公司 | A kind of accurate filling system of heat-pipe working medium and filling method |
| CN109579581A (en) * | 2018-11-08 | 2019-04-05 | 大连理工大学 | A kind of micro heat pipe packaging method based on PDMS |
| CN112087918A (en) * | 2020-08-03 | 2020-12-15 | 东莞领杰金属精密制造科技有限公司 | Manufacturing method of blown-up aluminum temperature-equalizing plate |
| CN113227701A (en) * | 2018-12-18 | 2021-08-06 | 微软技术许可有限责任公司 | Weighing method steam chamber and heat pipe feeding using radiation heating |
| CN115560621A (en) * | 2022-11-17 | 2023-01-03 | 福建龙净环保股份有限公司 | Multi-tube-row gravity vacuum heat pipe filling and exhausting method and system |
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| JPS5568586A (en) * | 1978-11-20 | 1980-05-23 | Tokico Ltd | Heat pipe working liquid injecting device |
| JPS6246193A (en) * | 1985-08-23 | 1987-02-28 | Mitsubishi Electric Corp | Manufacture of heat pipe |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104006687A (en) * | 2014-05-15 | 2014-08-27 | 华南理工大学 | Working medium steam perfusion device and method for flat plate type multi-channel heat pipe |
| CN104075599A (en) * | 2014-05-21 | 2014-10-01 | 海康创业(北京)科技有限公司 | Passive integrated heat pipe perfusion device |
| CN104457350A (en) * | 2014-11-03 | 2015-03-25 | 大连理工大学 | Micro heat pipe packaging method with peristaltic pump adopted for pouring |
| CN104457350B (en) * | 2014-11-03 | 2016-08-24 | 大连理工大学 | Use the micro heat pipe method for packing of peristaltic pump perfusion |
| CN106698309B (en) * | 2015-07-20 | 2018-11-09 | 江苏宏力光电科技有限公司 | A kind of new heat pipe liquid-injection equipment |
| CN106698309A (en) * | 2015-07-20 | 2017-05-24 | 江苏宏力光电科技有限公司 | Novel heat pipe liquid injection equipment |
| CN105444596A (en) * | 2015-12-14 | 2016-03-30 | 上海利正卫星应用技术有限公司 | Filling device of heat pipe phase change working medium and using method of filling device |
| CN105444596B (en) * | 2015-12-14 | 2018-05-18 | 上海利正卫星应用技术有限公司 | The charging device and its application method of heat pipe phase-change working substance |
| CN106931814A (en) * | 2017-03-09 | 2017-07-07 | 广东工业大学 | A kind of flat-plate type micro heat pipe evacuation priming device and its method |
| CN108106471A (en) * | 2017-12-15 | 2018-06-01 | 陕西仙童科技有限公司 | A kind of accurate filling system of heat-pipe working medium and filling method |
| CN109579581A (en) * | 2018-11-08 | 2019-04-05 | 大连理工大学 | A kind of micro heat pipe packaging method based on PDMS |
| CN113227701A (en) * | 2018-12-18 | 2021-08-06 | 微软技术许可有限责任公司 | Weighing method steam chamber and heat pipe feeding using radiation heating |
| CN112087918A (en) * | 2020-08-03 | 2020-12-15 | 东莞领杰金属精密制造科技有限公司 | Manufacturing method of blown-up aluminum temperature-equalizing plate |
| CN115560621A (en) * | 2022-11-17 | 2023-01-03 | 福建龙净环保股份有限公司 | Multi-tube-row gravity vacuum heat pipe filling and exhausting method and system |
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Application publication date: 20131002 |