CN103322812A - Furnace door sealing device of diffusion furnace - Google Patents
Furnace door sealing device of diffusion furnace Download PDFInfo
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- CN103322812A CN103322812A CN2013102580026A CN201310258002A CN103322812A CN 103322812 A CN103322812 A CN 103322812A CN 2013102580026 A CN2013102580026 A CN 2013102580026A CN 201310258002 A CN201310258002 A CN 201310258002A CN 103322812 A CN103322812 A CN 103322812A
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Abstract
The invention discloses a furnace door sealing device of a diffusion furnace. A furnace door plate comprises two hinged sliding rotating furnace door plate bodies which share a hinged door spindle, opening and closing of the two rotating furnace door plate bodies are controlled through a door opening and closing mechanism which comprises a door opening state detection device, a controller, a driving motor and a transmission mechanism, the door opening state detection device is an angle sensor, the transmission mechanism is composed of a worm-worm gear mechanism and a connecting bar mechanism, namely, one of the two rotating furnace door plate bodies, one corresponding connecting bar, a rotating disc and a fixed base plate form two sets of four-bar mechanism respectively, the two rotating furnace door plate bodies are enabled to achieve opening and closing actions, and when the two rotating furnace door plate bodies are completely closed, a furnace nozzle of the diffusion furnace is sealed. When an angle-adjustable furnace door is applied to charging and discharging of the diffusion furnace, the door plate is opened and sealed at different angles according to working requirements of furnace charge conveying, exhaust pollution is reduced to the lowest, and diffusion efficiency of the diffusion furnace is guaranteed.
Description
Technical field
The present invention relates to a kind of stove gate device of diffusion furnace, a kind of furnace door sealing device particularly is applied to the switch fire door control field of continous way diffusion furnace.
Background technology
Diffusion furnace is one of important technological equipment of operation before the semiconductor production line, is used for the techniques such as diffusion, oxidation, annealing, alloy and sintering of the industries such as large scale integrated circuit, discrete device, power electronics, photoelectric device and optical fiber.Diffusion technique requires the air temperature and current in the reaction tube stable, and therefore, the sealing quality of the stove gate device of diffusion furnace directly affects utilization rate and the semi-conductive electricity conversion of diffuse source.
Traditional Open tdde diffusion stove, external environment condition can affect air temperature and current in the stove, thereby affect diffuser efficiency and the diffusion quality of diffusion furnace.Simultaneously, open pipe technique directly is discharged to waste gas in the stove outside the stove, causes exhaust emission and heat radiation.Existing stopped pipe diffusion furnace furnace door sealing device all adopts the encapsulating method of standard-sized sheet, full cut-off, can not satisfy the requirement of continous way diffusion furnace.
Summary of the invention
In order to solve the prior art problem, the object of the invention is to overcome the deficiency that prior art exists, a kind of furnace door sealing device of diffusion furnace is provided, adopt the angle adjustable fire door, when being applied to continous way diffusion furnace input and output material, according to the job requirement of transporting furnace charge, fire door is carried out unlatching and the sealing of different angles, exhaust emission is dropped to minimum, guarantee the diffuser efficiency of diffusion furnace.
For achieving the above object, the present invention adopts following technical proposals:
A kind of furnace door sealing device of diffusion furnace, it is arranged at the boiler tube mouth place of diffusion furnace, a fixing base is fixedly connected with the boiler tube mouth, stove gate is offered in corresponding boiler tube mouth position on fixing base, but be provided with the stove door plant of folding in the stove gate position, control sealing and the unlatching that realizes stove gate by the folding to stove door plant, the revolving burner door-plate that stove door plant is split by two slippages consists of, two revolving burner door-plates share a hinge type door-hinge, the hinge type door-hinge is vertically fixed on the fixing base, when two revolving burner door-plates rotate around the hinge type door-hinge, two revolving burner door-plate inner surfaces can be close to and slide along the front surface of fixing base, folding by two revolving burner door-plates of door opening and closing mechanism control, door opening and closing mechanism comprises the door opening state checkout gear, controller, drive motors and transmission mechanism, the door opening state checkout gear is angular transducer, angular transducer is installed in the junction near the hinge type door-hinge, angular transducer detects the open angle between two revolving burner door-plates in real time, the signal output part of angular transducer is connected with the signal receiving end of controller, transmission mechanism is comprised of worm screw turbine mechanism and linkage, the worm screw turbine mechanism is arranged at the back side one side of fixing base, linkage is arranged at front one side of fixing base, the worm screw turbine mechanism comprises worm screw and turbine, worm screw and turbine are rotationally connected by bearing block and the fixing base of correspondence respectively, the surperficial keeping parallelism of the axis of rotation of worm screw and fixing base, the command signal receiving terminal of drive motors is connected with the command signal output of controller, drive motors directly drives worm screw and rotates, turbine axis and fixing base be arranged in parallel, the synchronous rotating shaft of turbine passes from the through hole on the fixing base, one side also is provided with round rotating disk in the front of fixing base, the fixed rotating shaft of circle rotating disk is fixedly connected with the synchronous rotating shaft of turbine, be that worm screw is by driving the turbine rotation, and then drive circle dial rotation, on the circle rotating disk, be provided with two hinge fulcrum shafts take the axis of rotation of justifying rotating disk as symmetrical center line, a hinge fulcrum shaft respectively end of the connecting rod identical with length is rotationally connected, form the revolute pair of flake type of attachment, two symmetric positions away from the junction of its hinge type door-hinge on two revolving burner door-plates are provided with two other hinge fulcrum shafts, and be rotationally connected with the other end of two connecting rods respectively, also form revolute pair, namely one of two revolving burner door-plates respectively with a corresponding connecting rod, circle rotating disk and fixing base form two cover lanar four rod mechanisms, when the circle dial rotation, spur simultaneously two connecting rods, two connecting rods spur simultaneously again two revolving burner door-plates and rotate around its hinge type door-hinge respectively, make two revolving burner door-plates realize opening and closing movement, when two revolving burner door-plates are fully closed, the boiler tube cause for gossip of diffusion furnace is now sealed.
Improvement as technical solution of the present invention, door opening and closing mechanism also comprises manual driving device, manual driving device is made of moment power transmission shaft and hand-adjusting type handwheel, one end of moment power transmission shaft is by an end coaxial be fixedly connected with of shaft coupling with worm screw, the coaxial hand-adjusting type handwheel that is fixedly connected with of the other end of moment power transmission shaft, when needs are manually controlled, the user is by rotating the hand-adjusting type handwheel, utilize moment power transmission shaft transfer of torque, and then the driving worm screw is rotated, realize manually two revolving burner door-plates of control folding, thereby realize that manually control seals the boiler tube mouth of diffusion furnace.
In the technique scheme, when being left and right sides setting position between two revolving burner door-plates and concerning, worm screw turbine mechanism and linkage be positioned at simultaneously diffusion furnace the boiler tube mouth above or below.
In the technique scheme, when presenting lower setting position between two revolving burner door-plates and concern, worm screw turbine mechanism and linkage are positioned at left side or the right side of the boiler tube mouth of diffusion furnace simultaneously.
The present invention has following apparent outstanding substantive distinguishing features and remarkable advantage compared with prior art:
1. the present invention adopts the angle adjustable fire door, especially be fit to be applied to adopt continuous feeding to enter the diffusion furnace of stove, when being applied to continous way diffusion furnace input and output material, according to the job requirement of transporting furnace charge, fire door is carried out unlatching and the sealing of different angles, realize automatic-sealed, and exhaust emission is dropped to minimum, guarantee the diffuser efficiency of diffusion furnace;
2. the furnace door sealing device of diffusion furnace of the present invention adopts Electric Machine Control, can realize according to plan batch entering continuously the stove feed, can adjust as required beat, automaticity is high, special the time, also can adopt simultaneously manual mode control, realize automatic mode and manual mode combination, ensure continous way diffusion furnace steady operation.
Description of drawings
Fig. 1 is the structural representation of the furnace door sealing device of the embodiment of the invention one diffusion furnace.
Fig. 2 is the structural representation of transmission mechanism of the furnace door sealing device of the embodiment of the invention one diffusion furnace.
Fig. 3 is the structural representation when door opened of the furnace door sealing device of the embodiment of the invention one diffusion furnace.
Fig. 4 is the structural representation of the furnace door sealing device of the embodiment of the invention two diffusion furnaces.
Fig. 5 is the structural representation of the furnace door sealing device of the embodiment of the invention three diffusion furnaces.
Fig. 6 is the structural representation of the furnace door sealing device of the embodiment of the invention four diffusion furnaces.
The specific embodiment
Details are as follows for the preferred embodiments of the present invention:
Embodiment one:
In the present embodiment, referring to Fig. 1～Fig. 3, a kind of furnace door sealing device of diffusion furnace, it is arranged at boiler tube mouth 9 places of diffusion furnace, a fixing base 6 is fixedly connected with boiler tube mouth 9, stove gate is offered in corresponding boiler tube mouth 9 positions on fixing base 6, but be provided with the stove door plant of folding in the stove gate position, control sealing and the unlatching that realizes stove gate by the folding to stove door plant, the revolving burner door-plate 3 that stove door plant is split around by two slippages, 4 consist of, two revolving burner door- plates 3,4 share a hinge type door-hinge, the hinge type door-hinge is vertically fixed on the fixing base 6, when two revolving burner door- plates 3,4 when rotating around the hinge type door-hinge, two revolving burner door- plates 3,4 inner surfaces can be close to and slide along the front surface of fixing base 6, two revolving burner door-plates 3 of door opening and closing mechanism control of top by being arranged at boiler tube mouth 9,4 opening and closing left and right, door opening and closing mechanism comprises the door opening state checkout gear, controller, drive motors 14 and transmission mechanism, the door opening state checkout gear is angular transducer 5, angular transducer 5 is installed in the junction near the hinge type door-hinge, angular transducer 5 detects two revolving burner door-plates 3 in real time, open angle between 4, the signal output part of angular transducer 5 is connected with the signal receiving end of controller, transmission mechanism is comprised of worm screw turbine mechanism and linkage, the worm screw turbine mechanism is arranged at the back side one side of fixing base 6, linkage is arranged at front one side of fixing base 6, the worm screw turbine mechanism comprises worm screw 10 and turbine 13, worm screw 10 and turbine 13 are rotationally connected with fixing base 6 by the bearing block 11 of correspondence respectively, the surperficial keeping parallelism of the axis of rotation of worm screw 10 and fixing base 6, the command signal receiving terminal of drive motors 14 is connected with the command signal output of controller, drive motors 14 directly drives worm screw 10 and rotates, turbine 13 axis and fixing base 6 be arranged in parallel, the synchronous rotating shaft of turbine 13 passes from the through hole on the fixing base 6, a side also is provided with round rotating disk 1 in the front of fixing base 6, the fixed rotating shaft of circle rotating disk 1 is fixedly connected with the synchronous rotating shaft of turbine 13, be that worm screw 10 is by driving turbine 13 rotations, and then drive circle rotating disk 1 rotates, on circle rotating disk 1, be provided with two hinge fulcrum shafts take the axis of rotation of justifying rotating disk 1 as symmetrical center line, a hinge fulcrum shaft respectively end of the connecting rod 2 identical with length is rotationally connected, form the revolute pair of flake type of attachment, at two revolving burner door-plates 3 away from the junction of hinge type door-hinge, 4 upper end symmetric position correspondence is provided with two other hinge fulcrum shafts, and be rotationally connected with the other end of two connecting rods 2 respectively, also form revolute pair, i.e. two revolving burner door-plates 3, one of 4 respectively with a corresponding connecting rod 2, circle rotating disk 1 and fixing base 6 form two cover lanar four rod mechanisms, when circle rotating disk 1 rotates, spur simultaneously two connecting rods 2, two connecting rods 2 spur again two revolving burner door-plates 3 simultaneously, 4 rotate around its hinge type door-hinge respectively, make two revolving burner door- plates 3,4 realize the opening and closing left and right action, when two revolving burner door-plates 3, during 4 complete closure, make the boiler tube mouth 9 of diffusion furnace realize sealing.The furnace door sealing device of the present embodiment diffusion furnace is the angle adjustable furnace door sealing device, according to different working conditions, fire door needs the angle of folding different, measure the angle information of oven door opening by angular transducer 5, then angle information is fed back to control end, make the rundown time of control end control worm screw 10 axles, fire door is carried out unlatching and the sealing of different angles, realize automatic-sealed, and exhaust emission is dropped to minimum, guarantee the diffuser efficiency of diffusion furnace.
In the present embodiment, referring to Fig. 1～Fig. 3, door opening and closing mechanism also comprises manual driving device, manual driving device is made of moment power transmission shaft 7 and hand-adjusting type handwheel 8, one end of moment power transmission shaft 7 is by an end coaxial be fixedly connected with of shaft coupling 12 with worm screw 10, the coaxial hand-adjusting type handwheel 8 that is fixedly connected with of the other end of moment power transmission shaft 7, when needs are manually controlled, the user is by rotating hand-adjusting type handwheel 8, utilize moment power transmission shaft 7 transfer of torque, and then drive worm screw 10 rotations, realize manually two revolving burner door-plates 3 of control, 4 foldings, thus realize that manually control seals the boiler tube mouth 9 of diffusion furnace.In the present embodiment, realize automatic mode and manual mode combination, ensure continous way diffusion furnace steady operation.
Embodiment two:
The present embodiment and embodiment one are basic identical, and special feature is:
In the present embodiment, referring to Fig. 4, the revolving burner door-plate 3 that stove door plant is split around by two slippages, 4 consist of, two revolving burner door-plates 3 of door opening and closing mechanism control of below by being arranged at boiler tube mouth 9,4 opening and closing left and right, at two revolving burner door-plates 3 away from the junction of hinge type door-hinge, two hinge fulcrum shafts that 4 bottom symmetric position correspondence is provided with, end with two connecting rods 2 is rotationally connected respectively, form revolute pair, make two revolving burner door- plates 3,4 realize the opening and closing left and right action, when two revolving burner door-plates 3, during 4 complete closure, make the boiler tube mouth 9 of diffusion furnace realize sealing.The worm screw turbine mechanism of the furnace door sealing device of the present embodiment diffusion furnace and linkage are positioned at the below of the boiler tube mouth 9 of diffusion furnace simultaneously, can reach equally the technique effect of previous embodiment.
Embodiment three:
The present embodiment and previous embodiment are basic identical, and special feature is:
In the present embodiment, referring to Fig. 5, the revolving burner door-plate 3 that stove door plant is split up and down by two slippages, 4 consist of, two revolving burner door-plates 3 of door opening and closing mechanism control on the right side by being arranged at boiler tube mouth 9,4 up and down folding, at two revolving burner door-plates 3 away from the junction of hinge type door-hinge, two hinge fulcrum shafts that 4 right-hand member symmetric position correspondence is provided with, end with two connecting rods 2 is rotationally connected respectively, form revolute pair, make two revolving burner door- plates 3,4 realize up and down opening and closing movement, when two revolving burner door-plates 3, during 4 complete closure, make the boiler tube mouth 9 of diffusion furnace realize sealing.The worm screw turbine mechanism of the furnace door sealing device of the present embodiment diffusion furnace and linkage are positioned at the right side of the boiler tube mouth 9 of diffusion furnace simultaneously, can reach equally the technique effect of previous embodiment.
Embodiment four:
The present embodiment and previous embodiment are basic identical, and special feature is:
In the present embodiment, referring to Fig. 6, the revolving burner door-plate 3 that stove door plant is split up and down by two slippages, 4 consist of, two revolving burner door-plates 3 of door opening and closing mechanism control in the left side by being arranged at boiler tube mouth 9,4 up and down folding, at two revolving burner door-plates 3 away from the junction of hinge type door-hinge, two hinge fulcrum shafts that 4 left end symmetric position correspondence is provided with, end with two connecting rods 2 is rotationally connected respectively, form revolute pair, make two revolving burner door- plates 3,4 realize up and down opening and closing movement, when two revolving burner door-plates 3, during 4 complete closure, make the boiler tube mouth 9 of diffusion furnace realize sealing.The worm screw turbine mechanism of the furnace door sealing device of the present embodiment diffusion furnace and linkage are positioned at the left side of the boiler tube mouth 9 of diffusion furnace simultaneously, can reach equally the technique effect of previous embodiment.
The above is illustrated the embodiment of the invention by reference to the accompanying drawings; but the invention is not restricted to above-described embodiment; can also make multiple variation according to the purpose of innovation and creation of the present invention; all according to technical solution of the present invention Spirit Essence and principle under make change, modification, substitute, combination, simplify; all should be the substitute mode of equivalence; as long as goal of the invention according to the invention; only otherwise deviate from know-why and the inventive concept of the furnace door sealing device of diffusion furnace of the present invention, all belong to protection scope of the present invention.
Claims (4)
1. the furnace door sealing device of a diffusion furnace, its boiler tube mouth (9) that is arranged at diffusion furnace is located, a fixing base (6) is fixedly connected with boiler tube mouth (9), offer stove gate in upper corresponding described boiler tube mouth (9) position of described fixing base (6), but be provided with the stove door plant of folding in the stove gate position, control sealing and the unlatching that realizes stove gate by the folding to stove door plant, it is characterized in that: the revolving burner door-plate (3 that described stove door plant is split by two slippages, 4) consist of, two described revolving burner door-plates (3,4) share a hinge type door-hinge, described hinge type door-hinge is vertically fixed on the described fixing base (6), when two described revolving burner door-plates (3, when 4) rotating around described hinge type door-hinge, two described revolving burner door-plates (3,4) inner surface can be close to and slide along the front surface of described fixing base (6), by two described revolving burner door-plates (3 of door opening and closing mechanism control, 4) folding, described door opening and closing mechanism comprises the door opening state checkout gear, controller, drive motors (14) and transmission mechanism, described door opening state checkout gear is angular transducer (5), described angular transducer (5) is installed in the junction near described hinge type door-hinge, described angular transducer (5) detects two described revolving burner door-plates (3 in real time, 4) open angle between, the signal output part of described angular transducer (5) is connected with the signal receiving end of described controller, described transmission mechanism is comprised of worm screw turbine mechanism and linkage, described worm screw turbine mechanism is arranged at the back side one side of described fixing base (6), described linkage is arranged at front one side of described fixing base (6), described worm screw turbine mechanism comprises worm screw (10) and turbine (13), described worm screw (10) and described turbine (13) are rotationally connected by corresponding bearing block (11) and described fixing base (6) respectively, the surperficial keeping parallelism of the axis of rotation of described worm screw (10) and described fixing base (6), the command signal receiving terminal of described drive motors (14) is connected with the command signal output of described controller, described drive motors (14) directly drives described worm screw (10) and rotates, described turbine (13) axis and described fixing base (6) be arranged in parallel, the synchronous rotating shaft of described turbine (13) passes from the through hole on the described fixing base (6), a side also is provided with round rotating disk (1) in the front of described fixing base (6), the fixed rotating shaft of described round rotating disk (1) is fixedly connected with the synchronous rotating shaft of described turbine (13), be that described worm screw (10) is by driving described turbine (13) rotation, and then drive described round rotating disk (1) and rotate, on described round rotating disk (1), be provided with two hinge fulcrum shafts take the axis of rotation of described round rotating disk (1) as symmetrical center line, a described hinge fulcrum shaft respectively end of the connecting rod (2) identical with length is rotationally connected, form the revolute pair of flake type of attachment, at two described revolving burner door-plates (3,4) two symmetric positions of upper junction away from its described hinge type door-hinge are provided with two other hinge fulcrum shafts, and be rotationally connected with the other end of two described connecting rods (2) respectively, also form revolute pair, i.e. two described revolving burner door-plates (3,4) one of respectively with a corresponding described connecting rod (2), described round rotating disk (1) and described fixing base (6) form two cover lanar four rod mechanisms, when described round rotating disk (1) rotates, spur simultaneously two described connecting rods (2), two described connecting rods (2) spur again two described revolving burner door-plates (3 simultaneously, 4) rotate around its described hinge type door-hinge respectively, make two described revolving burner door-plates (3,4) realize opening and closing movement, when two described revolving burner door-plates (3, when 4) fully closed, make the described boiler tube mouth (9) of diffusion furnace realize sealing.
2. the furnace door sealing device of diffusion furnace according to claim 1, it is characterized in that: described door opening and closing mechanism also comprises manual driving device, described manual driving device is made of moment power transmission shaft (7) and hand-adjusting type handwheel (8), one end of described moment power transmission shaft (7) is by an end coaxial be fixedly connected with of shaft coupling (12) with described worm screw (10), the coaxial described hand-adjusting type handwheel (8) that is fixedly connected with of the other end of described moment power transmission shaft (7), when needs are manually controlled, the user is by rotating described hand-adjusting type handwheel (8), utilize described moment power transmission shaft (7) transfer of torque, and then drive described worm screw (10) and rotate, realize manually two described revolving burner door-plates (3 of control, 4) folding, thus realize that manually control seals the described boiler tube mouth (9) of diffusion furnace.
3. the furnace door sealing device of diffusion furnace according to claim 1 and 2, it is characterized in that: when being left and right sides setting position between two described revolving burner door-plates (3,4) and concerning, described worm screw turbine mechanism and described linkage be positioned at simultaneously diffusion furnace described boiler tube mouth (9) above or below.
4. the furnace door sealing device of diffusion furnace according to claim 1 and 2, it is characterized in that: when presenting lower setting position between two described revolving burner door-plates (3,4) and concern, described worm screw turbine mechanism and described linkage are positioned at left side or the right side of the described boiler tube mouth (9) of diffusion furnace simultaneously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310258002.6A CN103322812B (en) | 2013-06-26 | 2013-06-26 | Furnace door sealing device of diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310258002.6A CN103322812B (en) | 2013-06-26 | 2013-06-26 | Furnace door sealing device of diffusion furnace |
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| Publication Number | Publication Date |
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| CN103322812A true CN103322812A (en) | 2013-09-25 |
| CN103322812B CN103322812B (en) | 2015-07-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310258002.6A Expired - Fee Related CN103322812B (en) | 2013-06-26 | 2013-06-26 | Furnace door sealing device of diffusion furnace |
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| CN (1) | CN103322812B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108154585A (en) * | 2017-12-26 | 2018-06-12 | 安徽省东乾食品有限公司 | A kind of dehydrated fruits and vegetables workshop door control system |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6472521A (en) * | 1987-09-14 | 1989-03-17 | Toshiba Corp | Cap closing gear for reactor core pipe |
| US20020094502A1 (en) * | 2001-01-15 | 2002-07-18 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and method for manufacturing semiconductor device |
| CN201440038U (en) * | 2009-06-30 | 2010-04-21 | 北京七星华创电子股份有限公司 | Diffusion furnace door sealing structure |
| CN201909539U (en) * | 2010-12-24 | 2011-07-27 | 株洲众欣科技发展有限责任公司 | Furnace door structure of diffusion furnace |
| CN102767958A (en) * | 2012-07-16 | 2012-11-07 | 上海大学 | Automatic furnace door of diffusion furnace |
| CN202582204U (en) * | 2012-04-20 | 2012-12-05 | 中国电子科技集团公司第四十八研究所 | Furnace door sealing device for diffusion furnace |
-
2013
- 2013-06-26 CN CN201310258002.6A patent/CN103322812B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6472521A (en) * | 1987-09-14 | 1989-03-17 | Toshiba Corp | Cap closing gear for reactor core pipe |
| US20020094502A1 (en) * | 2001-01-15 | 2002-07-18 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and method for manufacturing semiconductor device |
| CN201440038U (en) * | 2009-06-30 | 2010-04-21 | 北京七星华创电子股份有限公司 | Diffusion furnace door sealing structure |
| CN201909539U (en) * | 2010-12-24 | 2011-07-27 | 株洲众欣科技发展有限责任公司 | Furnace door structure of diffusion furnace |
| CN202582204U (en) * | 2012-04-20 | 2012-12-05 | 中国电子科技集团公司第四十八研究所 | Furnace door sealing device for diffusion furnace |
| CN102767958A (en) * | 2012-07-16 | 2012-11-07 | 上海大学 | Automatic furnace door of diffusion furnace |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108154585A (en) * | 2017-12-26 | 2018-06-12 | 安徽省东乾食品有限公司 | A kind of dehydrated fruits and vegetables workshop door control system |
| CN108154585B (en) * | 2017-12-26 | 2020-10-27 | 六安市舒杰科技信息咨询有限公司 | Door control system for dehydrated fruit and vegetable production workshop |
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| CN103322812B (en) | 2015-07-01 |
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