CN103302399B - A kind of micro-flattening device based on high energy pulse laser stress effect and method thereof - Google Patents
A kind of micro-flattening device based on high energy pulse laser stress effect and method thereof Download PDFInfo
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Abstract
The invention discloses a kind of micro-flattening device based on high energy pulse laser stress effect, comprise Laser Driven control system, target system and target clamping displacement system.Laser Driven control system comprises computer, controller, nanosecond laser, plane mirror and condenser lens; Target system is clamped on described target clamping displacement system; Target clamping displacement system comprises controller, three-dimensional mobile platform, L-type base and clamp body.The present invention can realize the micro-smooth of target material surface defect and improve target performance, makes target resist defect; The present invention has the smooth advantage of LASER HEAT, simultaneously, as non-thermal formation process, material property can be made to keep even improving by the residual stress produced at target surface, this can improve the anticorrosive of target with anti-fatigue ability to prevent fine crack in industrial trade is produced.Easily realize based on high energy pulse laser stress effect micro-smooth, and very useful high-precision flat adjusting technique.
Description
Technical field
The present invention relates to a kind of micro-flattening device and the method thereof that are applicable to metal targets surface, in particular to a kind of micro-flattening device and method thereof of the sheet metal defect based on high energy pulse laser stress effect, belong to MEMS (MEMs) micro-planarizing technique and laser microsecond delay technical field.
Background technology
Along with the development of modern science and technology, the trend of the miniaturization of products is accelerated increasingly, also increasing to demand that is micro-, miniature parts, the particularly develop rapidly in MEMS (MEMS) field.In these industries and field, the flatness requirement of sheet metal is very high.And the unavoidable meeting of metal sheet forming method forms various defect in metal surface, typically have: point defect, line defect and planar defect.Although, these blemish can be given less power by forging press and slowly be flattened, or be placed in low feed pressure machine and reduce and even eliminate blemish, but, because these traditional levelling methods existence processing is consuming time, the shortcoming that working (machining) efficiency is low, makes it be subject to a lot of restriction in the industrial production.
And the laser processing technology developed rapidly in recent years provides Research foundation for we solve this difficult problem.Because Laser Processing quality is good, machining accuracy is high, laser energy density is high, processing can be completed instantaneously, the unmanageable material of the conventional method that can be shaped, compared with traditional processing mode, crudy significantly improves, and processing laser processing technology being applied in micro parts puts on the agenda gradually.
Paper Experimental investigation on laser flattening of sheet metal reports a kind of levelling method utilizing the fuel factor of induced with laser to realize sheet metal, can reduce when not using instrument or load external force and even eliminate blemish.This technology is considered to a kind of temperature field and Deformation Field and influences each other interactional process, belonging to complicated Thermo-mechanical Coupling Problems, namely producing residual stress by producing thermograde on metal targets surface.When laser beam irradiation is to cracks of metal surface, target surface is heated, and produces temperature field heterogeneous in a thickness direction.The thermal stress produced can realize plastic deformation, and then eliminates blemish.Describe the levelling method of three kinds of typical defects (point defect, line defect, planar defect) in literary composition, the point defect as: sheet metal carries out circular scanning and radial scan overcomes by utilizing laser beam at fault location.
But, because hot former system depends on the temperature field produced by induced with laser, this temperature field by the geometry of workpiece, laser power, lasing beam diameter, sweep speed, scanning pattern etc. affect determine, this can make formation process become be difficult to control.In addition, fuel factor can cause bad microstructure to produce, and comprises and produces unexpected phase transformation and recrystallization in the process.It may melt or ablation target surface, produces gap even in its surface.Therefore, LASER HEAT planarizing technique is utilized to be difficult to keep the performance of sheet metal material.
Summary of the invention
Temperature effect for the smooth existence of LASER HEAT in prior art is large, deflection is difficult to control, difficulty realizes micro-smooth, micro-smooth precision of contact type mechanical and is difficult to the problems such as control, the invention provides a kind of non-contacting micro-smooth method based on high energy pulse laser stress effect and device.
Technical scheme of the present invention is:
Based on a micro-flattening device for high energy pulse laser stress effect, comprise Laser Driven control system, target system and target clamping displacement system.
Described Laser Driven control system comprises computer, controller, nanosecond laser, plane mirror and condenser lens, computer is connected with controller respectively with nanosecond laser, computer is for controlling controller, and controller to reflex to after condenser lens focuses on through plane mirror for the laser beam that controls nanosecond laser and send and directly acts on described target system;
Described target system is clamped on described target clamping displacement system;
Described target clamping displacement system comprises controller, three-dimensional mobile platform, L-type base and clamp body, described target system is put in clamp body, clamp body is arranged in three-dimensional mobile platform, three-dimensional mobile platform is arranged on L-type base, the movement of target clamping displacement system is realized by the movement of controller regulation and control three-dimensional mobile platform, and described controller is controlled by computer.
As a further improvement on the present invention, described target system is made up of the target layer distributed successively from bottom to up, pitch-dark layer, water layer.
Based on a micro-levelling method for high energy pulse laser stress effect, specifically comprise the steps:
First, adopt absolute alcohol cleaning tool a little, the target material surface of line or planar defect, ensure the clean of target;
Secondly, pitch-dark formation opaque coating is coated at target material surface, to ensure the absorptivity of target to laser;
3rd, putting into water by scribbling pitch-dark target, utilizing water as restraint layer, being covered in pitch-dark surface;
4th, by target clamp with fixed position;
5th, open nanosecond laser, regulate light path, make the laser exported by nanosecond laser focus on target material surface through plane mirror and condenser lens, then single or multiple firing operation is carried out to ps pulsed laser and ns pulsed laser, thus realize list or the multiple pulses laser-impact of target;
Six, high-octane pulsed laser beam is to target material surface, opaque coating produces vaporization instantaneously and becomes HTHP plasma, and along with the ablation of opaque coating, the volume of plasma of generation expands gradually, produce shock wave, and then mechanical compression is applied to target material surface; When laser beam irradiation is to the blemish place of target, downward shock loading gives target shock zone with downward inertia, when laser beam stops irradiating, due to inertia, cause local plastic deformation, the generation of local plastic deformation causes the Commodity flow flowing of shock zone, causes target plasticity deformation, to overcome target material surface defect, realize the micro-smooth of target material surface.
The invention has the beneficial effects as follows:
1, the present invention is that a kind of shock wave of accurate, contactless use induced with laser carries out smooth technology, is a kind ofly to produce stress effect with the method for the elimination of realize target target defect based on high energy pulse induced with laser shock wave.It has the smooth advantage of LASER HEAT, as contactless, exempts from instrument and high efficiency.In addition, as non-thermal formation process, material property can be made to keep even improving by the residual stress produced at target surface, this can improve the anticorrosive of target with anti-fatigue ability to prevent fine crack in industrial trade is produced;
2, the micro-planarizing technique itself based on high energy pulse laser stress effect of the present invention has unique superiority, has with short production cycle as a kind of without mould, contactless leveling adjusting technique without external force, flexibility greatly, precision high.Due to the thermal boundary protection of absorbed layer and restraint layer, make whole process be only cold stamping distortion under power effect, compared with smooth with LASER HEAT, target material surface quality is good, produce without ablated surface micro-crack.Laser-impact process has superposability, and the repeat impact of material not only can improve planarization effects, and can increase shock treatment region, realizes large-area shock treatment, and repeat impact also can be repaired the effect of impacting first, improves the flexibility of process;
3, the present invention is compared to the micro-planarizing technique of traditional machinery, and another obvious advantage is exactly that the material that brings of laser reinforcing effect makes metal structure surface modification, greatly extends the research and apply of this technology.Laser reinforcing effect can improve microbarn material case hardness, improves target performance, causes target to resist larger moment of flexure.
4, the present invention is by regulating laser action parameter, single-point impact is carried out to sheet metal, repeat impact, or multiple spot impacts the micro-planarizing technique based on high energy pulse laser stress effect to obtaining desirable planarization effects, to be the new pattern laser planarizing technique of a kind of low cost, high efficiency, of low pollution, prospects for commercial application be wide.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of micro-flattening device based on high energy pulse laser stress effect of the present invention;
Fig. 2 is the smooth loading schematic diagram of laser-impact eliminating point defect;
Fig. 3 is the smooth loading schematic diagram of laser-impact eliminating line defect;
Fig. 4 is the smooth loading schematic diagram of laser-impact eliminating planar defect.
In figure: 1, L-type base, 2, three-dimensional mobile platform, 3, clamp body, 4, target layer, 5, pitch-dark layer, 6, water layer, 7, condenser lens, 8, plane mirror, 9, nanosecond laser, 10, computer, 11, controller.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described in further detail.
A kind of micro-flattening device based on high energy pulse laser stress effect of the present invention is as shown in Figure 1:
A kind of micro-flattening device based on high energy pulse laser stress effect is made up of Laser Driven control system, target system and target clamping displacement system.Wherein:
Laser Driven control system is made up of computer 10, controller 11, nanosecond laser 9, plane mirror 8 and condenser lens 7, computer 10 controls controller 11, and controller 11 controls the laser beam that nanosecond laser 9 sends and directly enter target system after plane mirror 8 back reflection focuses on to condenser lens 7; Target system is made up of water layer 6, pitch-dark layer 5 and target 4, and water layer is covered in the target upper surface scribbling pitch-dark layer as restraint layer;
Whole target system is clamped on target clamping displacement system;
Target clamping displacement system is made up of controller 11, three-dimensional mobile platform 2, L-type base 1 and clamp body 3, target system is put in clamp body 3, clamp body 3 is arranged in three-dimensional mobile platform 2, three-dimensional mobile platform 2 is arranged on L-type base 1, the movement of target clamping displacement system regulates and controls three-dimensional mobile platform 2 by controller 11 and moves realization, and controller 11 is controlled by computer 10.
A kind of micro-levelling method based on high energy pulse laser stress effect of the present invention, comprises the following steps:
First, adopt absolute alcohol cleaning tool a little, line, planar defect target material surface, ensure the clean of target;
Secondly, pitch-dark formation opaque layer coating is coated at target material surface, to ensure the absorptivity of target to laser;
3rd, putting into water as restraint layer using scribbling pitch-dark target, utilizing water as restraint layer, being covered in pitch-dark surface;
4th, by target clamp to ensure position, open nanosecoud pulse laser, regulate light path, the laser exported by nanosecoud pulse laser is made to focus on target material surface through plane mirror and condenser lens, then single or multiple firing operation is carried out to ps pulsed laser and ns pulsed laser, thus realize list or the multiple pulses laser-impact of target, when high-octane pulsed laser beam is to target material surface, opaque coating produces vaporization instantaneously and becomes HTHP plasma, along with the ablation of opaque coating, the volume of plasma of generation expands gradually, produces shock wave, and then applies mechanical compression to target material surface, opaque coating is as expendable material, in order to the fuel factor effect avoiding short-pulse laser to irradiate target material surface generation, transparent restraint layer is delayed thermal expansion and limits plasma spatial location, thus produce higher pressure, because target has blemish, when laser beam irradiation is to the blemish place of target, downward shock loading gives target shock zone with downward inertia, when laser beam stops irradiating, due to inertia, cause the generation of local plastic deformation, the generation of local plastic deformation causes the Commodity flow flowing of shock zone, cause target plasticity deformation, to overcome target material surface defect, realize the micro-smooth of target material surface.
Fig. 2 to Fig. 4 is laser-impact smooth loading schematic diagram: Fig. 2 is the smooth loading schematic diagram of laser-impact eliminating point defect; Fig. 3 is the smooth loading schematic diagram of laser-impact (wherein the direction of arrow is repeatedly that multiple spot impacts path) eliminating line defect; Fig. 4 is the smooth loading schematic diagram of laser-impact (wherein the direction of arrow is repeatedly that multiple spot impacts path) eliminating planar defect.Visible, for different defects, eliminate by different loading strategies.By experiment data collection and arrange the relation between Impulsive load strategy from different defect of can drawing, be used to guide design and produce.
The present invention adopt absolute alcohol cleaning tool a little, line, planar defect target material surface, ensure the clean of target, target material surface answers japanning, to ensure the absorptivity of target to laser, uses water as restraint layer is covered in pitch-dark surface.Target clamp is to ensure position.Open nanosecoud pulse laser, regulate light path, the laser exported by nanosecoud pulse laser is made to focus on target material surface through plane mirror and condenser lens, then single or multiple firing operation is carried out to ps pulsed laser and ns pulsed laser, target produces micro-smooth deformation under list or multiple pulses laser-impact, by adjustment laser parameter and loading area, the micro-smooth of sheet metal defect can be realized.The present invention can produce high compression and strain rate to target, not only can realize the micro-smooth of target material surface defect but also improve target performance, makes target resist defect.The present invention has the smooth advantage of LASER HEAT, as contactless, exempts from instrument and high efficiency.In addition, as non-thermal formation process, material property can be made to keep even improving by the residual stress produced at target surface, this can improve the anticorrosive of target with anti-fatigue ability to prevent fine crack in industrial trade is produced.Easily realize based on high energy pulse laser stress effect micro-smooth, and very useful high-precision flat adjusting technique.
The part that the present invention does not relate to prior art that maybe can adopt all same as the prior art is realized.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention.All any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (1)
1., based on a micro-levelling method for micro-flattening device of high energy pulse laser stress effect, described micro-flattening device comprises Laser Driven control system, target system and target clamping displacement system;
Described Laser Driven control system comprises computer (10), controller (11), nanosecond laser (9), plane mirror (8) and condenser lens (7), computer (10) is connected with controller (11) respectively with nanosecond laser (9), computer (10) is for controlling controller (11), and controller (11) to reflex to after condenser lens (7) focuses on through plane mirror (8) for the laser beam that controls nanosecond laser (9) and send and directly acts on described target system;
Described target system is clamped on described target clamping displacement system;
Described target clamping displacement system comprises controller (11), three-dimensional mobile platform (2), L-type base (1) and clamp body (3), described target system is put in clamp body (3), clamp body (3) is arranged in three-dimensional mobile platform (2), three-dimensional mobile platform (2) is arranged on L-type base (1), the movement of target clamping displacement system is realized by the movement of controller (11) regulation and control three-dimensional mobile platform (2), and described controller (11) is controlled by computer (10);
Micro-levelling method of described micro-flattening device specifically comprises the steps:
First, adopt absolute alcohol cleaning tool a little, the target material surface of line or planar defect, ensure the clean of target;
Secondly, pitch-dark formation opaque coating is coated at target material surface, to ensure the absorptivity of target to laser;
3rd, putting into water by scribbling pitch-dark target, utilizing water as restraint layer, being covered in pitch-dark surface;
4th, by target clamp with fixed position;
5th, open nanosecond laser, regulate light path, make the laser exported by nanosecond laser focus on target material surface through plane mirror and condenser lens, then single or multiple firing operation is carried out to ps pulsed laser and ns pulsed laser, thus realize list or the multiple pulses laser-impact of target;
Six, high-octane pulsed laser beam is to target material surface, opaque coating produces vaporization instantaneously and becomes HTHP plasma, and along with the ablation of opaque coating, the volume of plasma of generation expands gradually, produce shock wave, and then mechanical compression is applied to target material surface; When laser beam irradiation is to the blemish place of target, downward shock loading gives target shock zone with downward inertia, when laser beam stops irradiating, due to inertia, cause local plastic deformation, the generation of local plastic deformation causes the Commodity flow flowing of shock zone, causes target plasticity deformation, to overcome target material surface defect, realize the micro-smooth of target material surface.
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| CN104073622A (en) * | 2014-06-24 | 2014-10-01 | 北京工业大学 | Light path converting device applicable to laser impact treatment |
| CN105328334B (en) * | 2015-11-27 | 2017-05-03 | 江苏大学 | Laser shock sheet metal deformation connecting device and method |
| CN110087820B (en) * | 2016-12-22 | 2021-12-24 | 三菱电机株式会社 | Laser processing apparatus, laser processing method, and method for manufacturing semiconductor device |
| CN107378252A (en) * | 2017-08-29 | 2017-11-24 | 江苏大学 | A kind of apparatus and method of the raising without cylinder sleeve engine cylinder-bore wearability |
| CN107699682B (en) * | 2017-08-29 | 2019-10-01 | 江苏大学 | A kind of apparatus and method improving automobile brake camshaft wearability |
| CN109794674B (en) * | 2018-12-11 | 2021-08-24 | 东莞捷荣技术股份有限公司 | Laser shaping method for mobile phone middle plate |
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| US8330070B2 (en) * | 2006-05-11 | 2012-12-11 | Kabushiki Kaisha Toshiba | Laser shock hardening method and apparatus |
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| CN101204756A (en) * | 2007-12-18 | 2008-06-25 | 中国石油大学(华东) | Heat conjunction metal board laser forming method |
| CN101920397A (en) * | 2010-04-16 | 2010-12-22 | 江苏大学 | Diffractive micro-optical element-based intense laser die-free forming method and device |
| CN102756020A (en) * | 2012-08-03 | 2012-10-31 | 江苏大学 | Method and device of laser impact fine tuning |
Non-Patent Citations (1)
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| "Experimental investigation on laser flattening of sheet metal";Takashi Ueda;《Optics and Lasers in Engineering》;20110131;第49卷(第1期);137-144 * |
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