CN103268921B - 制造woled的方法、woled及显示设备 - Google Patents
制造woled的方法、woled及显示设备 Download PDFInfo
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- CN103268921B CN103268921B CN201210592451.XA CN201210592451A CN103268921B CN 103268921 B CN103268921 B CN 103268921B CN 201210592451 A CN201210592451 A CN 201210592451A CN 103268921 B CN103268921 B CN 103268921B
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- 238000000034 method Methods 0.000 title claims abstract description 61
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 229910052751 metal Inorganic materials 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims abstract description 30
- 238000000059 patterning Methods 0.000 claims abstract description 27
- 238000005530 etching Methods 0.000 claims abstract description 8
- 238000001704 evaporation Methods 0.000 claims abstract description 8
- 238000001914 filtration Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 11
- 230000008020 evaporation Effects 0.000 claims description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 238000001579 optical reflectometry Methods 0.000 claims description 5
- 239000004411 aluminium Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 238000001259 photo etching Methods 0.000 claims description 3
- 238000011161 development Methods 0.000 claims description 2
- 238000001312 dry etching Methods 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims 1
- 238000000151 deposition Methods 0.000 abstract description 18
- 239000010408 film Substances 0.000 description 40
- 230000015572 biosynthetic process Effects 0.000 description 14
- 238000009413 insulation Methods 0.000 description 13
- 230000008021 deposition Effects 0.000 description 12
- 239000000203 mixture Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000010030 laminating Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 241000931705 Cicada Species 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000010977 unit operation Methods 0.000 description 1
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Abstract
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Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210592451.XA CN103268921B (zh) | 2012-12-31 | 2012-12-31 | 制造woled的方法、woled及显示设备 |
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CN201210592451.XA CN103268921B (zh) | 2012-12-31 | 2012-12-31 | 制造woled的方法、woled及显示设备 |
Publications (2)
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CN103268921A CN103268921A (zh) | 2013-08-28 |
CN103268921B true CN103268921B (zh) | 2016-04-20 |
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CN201210592451.XA Active CN103268921B (zh) | 2012-12-31 | 2012-12-31 | 制造woled的方法、woled及显示设备 |
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Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103839974B (zh) * | 2014-03-12 | 2016-05-25 | 四川虹视显示技术有限公司 | Woled、woled制作方法及woled驱动方法 |
CN104952905A (zh) * | 2015-05-06 | 2015-09-30 | 京东方科技集团股份有限公司 | 有机发光显示面板及其制备方法、显示装置 |
CN106159107B (zh) | 2016-08-09 | 2018-05-29 | 京东方科技集团股份有限公司 | 有机发光二极管照明灯片及其制备方法 |
KR102631461B1 (ko) | 2016-10-26 | 2024-01-30 | 엘지디스플레이 주식회사 | 발광 영역 및 반사 영역을 포함하는 디스플레이 장치 |
CN107068718B (zh) * | 2017-04-10 | 2019-12-17 | 深圳市华星光电技术有限公司 | Woled显示装置 |
CN107527941B (zh) * | 2017-08-31 | 2019-09-17 | 维信诺科技股份有限公司 | 一种有机发光显示屏及其制造方法 |
CN108172600B (zh) * | 2017-12-29 | 2020-01-17 | 深圳市华星光电半导体显示技术有限公司 | 用于woled显示器的彩膜基板及woled显示器 |
CN108232031A (zh) * | 2018-01-03 | 2018-06-29 | 深圳市华星光电技术有限公司 | Oled显示器件及制备方法 |
CN110164909B (zh) * | 2018-04-24 | 2021-03-16 | 京东方科技集团股份有限公司 | 显示基板及其制备方法、显示装置 |
CN108550615A (zh) * | 2018-05-31 | 2018-09-18 | 武汉华星光电半导体显示技术有限公司 | 有机发光显示面板及显示器 |
CN109599507A (zh) * | 2018-12-13 | 2019-04-09 | 武汉华星光电半导体显示技术有限公司 | 显示器的制备方法 |
CN110224076B (zh) | 2019-05-15 | 2020-08-11 | 武汉华星光电半导体显示技术有限公司 | Oled面板及其制造方法 |
CN110504387B (zh) | 2019-08-30 | 2023-01-13 | 京东方科技集团股份有限公司 | 一种显示基板及其制作方法和显示装置 |
CN111192533A (zh) * | 2020-02-28 | 2020-05-22 | 恩利克(浙江)智能装备有限公司 | 一种硅基oled微型显示面板的结构与制作方法 |
CN111863919B (zh) * | 2020-07-29 | 2022-07-26 | 武汉天马微电子有限公司 | 显示面板和显示装置 |
CN114335401A (zh) * | 2020-09-30 | 2022-04-12 | 咸阳虹微新型显示技术有限公司 | Oled显示面板制备方法、oled显示面板和oled显示器 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002015292A2 (en) * | 2000-08-15 | 2002-02-21 | Emagin Corporation | Organic light emitting diode display devices having barrier structures between sub-pixels |
CN1882207A (zh) * | 2005-06-16 | 2006-12-20 | 悠景科技股份有限公司 | 具有高发光效率与高灰阶对比的有机电致发光显示器 |
CN1934605A (zh) * | 2004-03-17 | 2007-03-21 | 皇家飞利浦电子股份有限公司 | 电致发光显示器件 |
CN102637829A (zh) * | 2011-02-11 | 2012-08-15 | 株式会社半导体能源研究所 | 发光装置及显示装置 |
CN203085550U (zh) * | 2012-12-31 | 2013-07-24 | 上海天马微电子有限公司 | 一种woled及显示设备 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4526776B2 (ja) * | 2003-04-02 | 2010-08-18 | 株式会社半導体エネルギー研究所 | 発光装置及び電子機器 |
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2012
- 2012-12-31 CN CN201210592451.XA patent/CN103268921B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002015292A2 (en) * | 2000-08-15 | 2002-02-21 | Emagin Corporation | Organic light emitting diode display devices having barrier structures between sub-pixels |
CN1934605A (zh) * | 2004-03-17 | 2007-03-21 | 皇家飞利浦电子股份有限公司 | 电致发光显示器件 |
CN1882207A (zh) * | 2005-06-16 | 2006-12-20 | 悠景科技股份有限公司 | 具有高发光效率与高灰阶对比的有机电致发光显示器 |
CN102637829A (zh) * | 2011-02-11 | 2012-08-15 | 株式会社半导体能源研究所 | 发光装置及显示装置 |
CN203085550U (zh) * | 2012-12-31 | 2013-07-24 | 上海天马微电子有限公司 | 一种woled及显示设备 |
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CN103268921A (zh) | 2013-08-28 |
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Effective date of registration: 20170718 Address after: 518052, Guangdong, Shenzhen, Futian District Shennan Road, building 22, South Airlines Patentee after: Tianma Micro-Electronics Co.,Ltd. Address before: 201201 Shanghai, Pudong New Area Hui Qing Road, No. 889 Patentee before: SHANGHAI TIANMA MICROELECTRONICS Co.,Ltd. |
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Effective date of registration: 20170926 Address after: 510032 five, 388, Fenghuang three, Fenghuang 17, Guangzhou, Guangzhou, Guangdong, Guangzhou Patentee after: GUANGDONG JUHUA PRINTED DISPLAY TECHNOLOGY Co.,Ltd. Address before: 518052, Guangdong, Shenzhen, Futian District Shennan Road, building 22, South Airlines Patentee before: Tianma Micro-Electronics Co.,Ltd. |